TW200916852A - Photosensitive resin composition for forming partition of color filter and partition of color filter formed by using the same as well as color filter and manufacturing method for color filter - Google Patents
Photosensitive resin composition for forming partition of color filter and partition of color filter formed by using the same as well as color filter and manufacturing method for color filter Download PDFInfo
- Publication number
- TW200916852A TW200916852A TW097125856A TW97125856A TW200916852A TW 200916852 A TW200916852 A TW 200916852A TW 097125856 A TW097125856 A TW 097125856A TW 97125856 A TW97125856 A TW 97125856A TW 200916852 A TW200916852 A TW 200916852A
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- TW
- Taiwan
- Prior art keywords
- color filter
- light
- shielding
- ink
- partition wall
- Prior art date
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/201—Filters in the form of arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/22—Absorbing filters
- G02B5/223—Absorbing filters containing organic substances, e.g. dyes, inks or pigments
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0005—Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
- G03F7/0007—Filters, e.g. additive colour filters; Components for display devices
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0046—Photosensitive materials with perfluoro compounds, e.g. for dry lithography
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Optical Filters (AREA)
- Materials For Photolithography (AREA)
Abstract
Description
200916852 九、發明說明: 【發明所屬之技術領域】 . 本發明係有關濾色器間隔壁形#田成止α从 與使用該樹脂組成物形成之避光感先性树脂組成物 Κ延先性濾色器間隔壁、及濾色 器與遽色器的製造方法,尤其為有關適合以噴墨印刷法製 造濾色器之濾色器間隔壁形成用感光性樹脂組成物,以及 使用=組成物形成之遮光性濾色器間隔壁與濾色器者。 【先前技術】 遽色器通常在玻璃、塑谬板等透明基板的表面形成愛 矩陣(Mack matrix),接著使紅、、綠、藍三種以上之不同色 相’依序形成為帶狀(strap)或鑲嵌簡等 案。圖案大小崎色器的用途以及各自的顏色而二色3 U為5至7〇0#111左右。此外’重疊的位置精度為數#瓜 數十// m,由尺寸精度尚的精細加工技術所製造。 濾色器之代表性的製造方法,為染色法、印刷法、顏 料分散法、以及電著法等。此等方法中,尤其是,將含有 顏色材料之光聚合性組成物塗佈於透明基板上並進行圖案 曝光、顯影且依需要以童複硬化的方式形成滤色器圖案的 顏料分散法,由於濾色器像素之位置、膜厚等的精度高, 耐光性、•性等的耐久性優異,且針孔(p.inh〇ie)等的缺 陷少,而被廣泛地採用。 另方面,黑矩陣通常以格子狀、帶狀、或鑲嵌狀配 置在紅:,綠、藍之顏色圖案間,而達成因各色間之混色抑 制而k成之對比提升、或因漏光造成之誤動作的防止 320324 5 200916852 '效果因此,在黑矩陣被要求高度的遮光性。 以钱刻而形成鉻等金屬膜’或使用含有 =陣一般 性樹脂以微影法形成。 ’”、性顏料之感光 然而,由於若使用上述方法形成顏色圖案 六 各色進行放射線等之照射與顯影的步驟,故/ ( 因而提案以低成本即可提供濾色器費成本。 像素構成的區域中,僅將紅、綠、二 法為在 於:自必要之像素並使之硬化而形成像素的方 ,先以微影步驟形成間隔壁,並於其像素部 = 法。然而,在此方法會產生各色區域之滲 ▲々方 之混色。因此,在構成該間隔壁的材料:係區:或二 ,(印墨)朝向著色區域外擴散的特性。例 :上者 I:::有:要印墨與間隔壁表面之靜態4 = 至55便月匕有效地迴避混色。另一方面,在 心 觸角時,被認為其印墨與間隔壁表面的前進角^動祕 此外’從印墨喷頭喷出之印墨係要^# 的同時覆蓋到間隔壁上時,t間 的设盍像素内200916852 IX. Description of the Invention: [Technical Field of the Invention] The present invention relates to a color filter spacer wall shape #田成止α from the use of the resin composition to form a light-proof sensitive resin composition. a color filter partition wall, and a method for producing a color filter and a color filter, in particular, a photosensitive resin composition for forming a color filter spacer suitable for producing a color filter by an inkjet printing method, and a use composition A light-shielding color filter spacer and a color filter are formed. [Prior Art] A color caster usually forms a Mack matrix on the surface of a transparent substrate such as a glass or a plastic slab, and then three or more different hue of red, green, and blue are sequentially formed into a strap. Or inlaid Jane and other cases. The size of the pattern size is used for the purpose of the color and the color of the two colors is 5 to 7 〇 0 #111. In addition, the positional accuracy of the overlap is several # melons tens/m, which is manufactured by a fine processing technique of dimensional accuracy. Representative production methods of the color filter are a dyeing method, a printing method, a pigment dispersion method, and an electrophoresis method. Among these methods, in particular, a pigment dispersion method in which a photopolymerizable composition containing a color material is coated on a transparent substrate, subjected to pattern exposure, development, and a color filter pattern is formed by child hardening as needed, The color filter has high precision in position and film thickness, and is excellent in durability such as light resistance and the like, and has few defects such as pinholes, and is widely used. On the other hand, the black matrix is usually arranged in a grid, a strip, or a mosaic in the red:, green, and blue color patterns, and the contrast is improved due to the color mixture suppression between the colors, or the malfunction due to light leakage. The prevention of 320324 5 200916852 'The effect is therefore that the black matrix is required to be highly opaque. A metal film such as chromium is formed by engraving or formed by a lithography method using a general resin containing a matrix. However, since the above-described method is used to form a color pattern of six colors to perform irradiation and development of radiation or the like, / (thus, it is proposed to provide a color filter at a low cost. In the middle, only the red, green, and two methods are: the pixels that are formed by hardening the pixels from the necessary pixels, and the spacers are first formed by the lithography step, and the pixel portion = method. However, in this method The color mixture of each color region is generated. Therefore, the material constituting the partition wall: the region: or the second, (ink) diffuses toward the outside of the colored region. Example: The above I::: Yes: The ink and the surface of the partition wall are static 4 = to 55 months, effectively avoiding the color mixture. On the other hand, at the heart tentacles, it is considered that the ink advancing angle of the ink and the partition wall surface is in addition to the 'ink nozzle When the ink that is ejected is to be covered on the partition wall at the same time, the space between t is set in the pixel
τ 以间丨田璧表面的印墨合田主I 墨性而回到像素内之自行修復作用。尤其i,在= ”經微細化之高精細化要求中,亦對從 嘖 滴覆蓋至黑矩陣的頻率變高之产 :貝碩噴出之液 ^”貝卞欠同之匱形,以及為了補足在久. 區成之角洛部的印墨展開性而與間 進行檢討(參考專利文獻7)。預到在二宜打印之情形 ^馱)預利在覆盍於間隔壁部的$ 回到像素内時,印墨之滑落角宜小。 ^ 320324 6 200916852 做為賦予如此目的之間隔壁材料的光阻組成物者係提 案將氟系或矽系化合物混合作為賦予拒印墨性之成分的方 法。在專利文獻1揭示有含有含全氟烷基之(甲基)丙烯酸 酯單體與含矽氧(silicone)鏈之乙烯性不飽和單體的光阻組 成物。然而,上述共聚物的添加量相對於光阻組成物之固 形份為0.001至0.05重量%,在如此低含量中之拒印墨性 不足。 在專利文獻2中,例示有六氟丙烯與不飽和羧酸及/或不 飽和羧酸酐的鹼顯影性共聚物與氟有機化合物的組成物。 然而,要獲得六氟丙烯之聚合物不能缺少高壓下之聚合, 其分子量亦小至2000以下。此外,辅助該化合物的氟有機 化合物亦為界面活性劑系,其拒印墨性持續地產生問題。 在專利文獻3中,例示一種阻劑組成物,係包含:將 =H2=CH(Ri)C00XRi(Rf表示碳數*至6的全氟烧基)作為 單體,且氟原子含有率為7至35重量%的含氟樹脂。在此 情形.下,R1基限定為Η、CH3、或CF3。 ,在專利文獻4中’描述有一種負型感光性樹脂組成物, 係匕g .在自文性基以及分子内具有3個以上乙稀性雙鍵之 驗可溶性的感光性㈣;以及使具有至少有丨個氫原子被 氟原子取代之碳數20以下之烷基的聚合單元與具有乙烯 性雙鍵的聚合單元進行共聚之聚合體作為拒印墨劑。該拒 印墨f之含氟聚合單元係為與上述專利讀3同等者。在 任何惝形下’若增加光阻固形份中之含氟化合物的比例, 、J被私出對支撐基板的密著性降低以及表面平滑性的惡 320324 7 200916852 化。 在專利文獻5中,敘述一種表面拒印墨性黑矩陣的製 造方法’财法係使用黑矩陣所含之樹脂貞含有親和性少 之矽及/或氟原子之拒印墨劑,在顯影後以將黑矩陣以 至230°C煅燒的方式,使拒印墨劑移至表面並使其與著色 印墨之接觸角控制在3 〇至6 〇。。其中,作為拒印^劑的具 體例’係例示有··在主鏈或支鏈歸有機㈣者;與偏氣 乙=(vinylidene fluoride)等之含氟單體的共聚合所成之氟 樹脂。可是,界面活性劑等之含相寡聚物以及氟系寡聚 物、,即使在烺燒後移至表面,其拒印墨性亦有隨著之後的 清洗或經時而降低的問題。 另一方面,有關使用丙烯酸酯聚合物之含氟支鏈的分 子鏈長所造成之動態接觸角,係記载於施⑽讀㈣s, 38(2005),5699頁(非專利文獻υ、並記載若含氟分子鍵長 之碳數超過6,則因支鏈的結晶化而使後退角變大,滑落 ^ EPACeconomic partnership agreement ; 謂夥伴關係協定)歡告中提出到20H)年為止將碳數8以 上(長鏈)之具氟垸(Rf)基之氟化合物的生產削減95%之方 針,故期望碳數6以下之滑落角小的拒印墨性含氣化合物。 此外,就適合形成遮光性樹脂矩陣的光阻而言, 利文獻6中,俜趨土 ^ ^ ^ ° 含使特定^ 薄膜形成用組成物,係包 牛&夕-、,方環氧化合物與(甲基)丙烯酸的反應物進一 之^rf^(polybasic carboxylic acid)或其軒反應所得 3 Lσ土化合物作為樹脂主成分的黑色阻蝕劑,為具 320324 8 200916852 有高遮光率,且容易以微影法形成精細圖案, 性、耐熱性、密著性、室溫保存穩定性 真= ,文獻6未提及其拒印墨特性,亦沒有提到相溶性惟,專利 另-方面,所謂的「白點」主要為起因 墨在間隔壁包圍的區域内無法充分且 陸磁,合士达知、 J也擴月ί而產生的 會成為顏色不均或對比降低之顯示不房。 形成間隔壁時,一般使用利用黑色阻劑的 驟 阻劑所含之久錄士、八& I 士 Υ驟’因於 上、二ί 礙對污染物附著於支擇基板 1水之展開、尤其是朝向藉由間隔壁 之展開的情形。此外,在使用如上述之含拒‘的:: 者於支撐基板表面,成為妨礙印墨朝角落部展開;附 再者,在間隔壁侧面之拒印墨性與支 古眭,Ie ?牙愚板表面相比為極 ::技: 間隔壁側面被排拒,而使間隔壁與印 墨相接的部分顏色變淡的問題。 ' 基於如上述的狀況’為了僅使間隔壁之頂面選擇性地 拒P墨化,且間隔壁的側面不♦巨印墨化,而提案下列 二喊間隔壁本身產生如此性質之方式層· 2種材料的方 法,⑴以阻劑包覆間隔壁以外的部分,僅將間隔壁之頂面 t拒印墨化處理的方法;ii〇在支撐基板上形成 =進行拒印墨化處理後,藉由微影步驟將阻飯層“ 圖木化而形成圖案化間隔壁的方法;iv)在專利文獻8中, 料將在藉由間隔壁形成之區域内露出的支撐基板表 仃親印墨化處理的方法,而照射能量線的方法。在此情形 320324 200916852 y古就僅將間隔壁之頂面進行拒印墨化的處方而言, 不有於支縣板上塗佈間隔壁形成用之感光性塗料,將整 =拒印墨化處理劑進行處理後,藉由微影步驟將感光性 树脂進行圖案化的手法。之德 ^ 辟以月*捭主 後將經由能量線照射對間隔 ㈣表面_地、或選擇性對任 墨化處理者。 百逛仃親印 然而,在該等方法必須將間隔壁多層化,而必須對在 將間隔壁之頂面進行拒印羃μ卢 ^> 、 Ρ墨化處理後鉻出的支撐基板表面 ,印墨化處理,此外,維持間隔壁之側面與頂面之充 刀的拒印墨作用差係為困難。另外,V)在專利文獻9中, :載有以使間隔壁成為倒錐形的方式,來控制對繼合 电漿在_壁之側面與頂面的拒印墨性。然而,該方法 中基本上係進行2次電漿處理。 [專利文獻1]日本特開平9_54432號公報 [專利文獻2]旺本特開平11_281815號公報 [專利文獻3]日本特開2005-315984號公報 [專利文獻4]W〇2〇〇4-42474號手冊 [專利文獻5]日本特開2006-251433號公報 [專利文獻6]日本特開平8_278629號公報 [專利文獻7]曰本特開2〇〇6_343518號公報 [專利文獻8]日本特開平9_23〇129號公報 [專利文獻9]曰本特開2〇〇2_62422號公報 [非專利文獻 l]MacrGiniolecules,38(2005) 5699 【發明内容】 320324 10 200916852 (發明欲解決的課題) , 因此,本發明之目的係解決如上述即 供一種感光性樹脂組成物哺切 诂π Α τ形成表面拒印墨性優里且卽 使,、坚一般的清洗或時間的經 /、 外’斟*拎甘』 、刀J、准符表面拒印墨性,此 ‘ # ^板之密著性亦優異的間隔壁。其外 的為提供一種遽色器間隔壁,該間隔壁係使用該 感光性樹脂組成物所形成, a 人 壁俜在报&柘a+ 猎此所侍之濾色器間隔 的= 拒印墨性優異,且對於支撐基板 ,二兮! 再者’本發明之其他目的為提供-種濟 该遠色器係使用該濾色器間隔壁而形成。 ^ (解決課題的手段) 果,^ 等係為了解決上述課題而努力進行檢討的結 ' {雙酚類衍生的芳族環氧化合物與(甲基)丙烯 酸的反應物進一步盥多亓鉍 歸 夕凡竣酸或其酐反應所得之含不飽和 土 作為中心且並用預定量的拒印墨性(甲基)丙烯酸 聚合物,則可給千卽估卢凌Λ „ VT 土 J内辟酉夂 在濾色器間隔壁形成用感光性樹脂 組成物中拒印墨劑的相溶性亦優異,製膜後之表面外觀以 ΐ圖綠狀為良好,不僅表面拒印墨性優異,且經過-般 :,或¥間的經過亦維持表面拒印墨性,與透明基板之密 者,賴性優異㈣色器間隔壁形成用感光性樹脂組成物, 而得以完成本發明。 本發明係為 (,種C光j·生;慮色器間隔壁形成用感光性樹脂組成 物’係包含Tit(椒⑻成分作為必分: 320324 11 200916852 (A)刀子中具有酸性基與2個以上乙烯#. 顯影性寡聚物; 上乙烯性雙鍵的驗 ()工、有由具石反數4至6的主鏈且氫原子中至少有7個 被氟原子取代而成之卒人 合物; 聚σ早70的拒印墨性(甲基)丙烯酸聚 (D)光聚合起始劑 (Ε)包含,黑色有機顏料、混色有機顏料、以及遮光材 中k出至>、1種的遮光性分散顏料。 此外,為 ㈣2如上述(1)記载之遮光性濾色器間隔壁形成用感光 :曰立成物’其中’在上述遽色器間隔壁形成用感光性 树月曰組成物中復調配以下成分而成: (C)1刀子中至少具有3個以上乙烯性雙鍵的光聚合性 早體。 更為以下之各發明。 * (3)如上述(1)或⑺記載之螻光性濾色器間隔壁形成用 :光,樹脂組成物’其中,在上述濾色器間隔壁形成用感 :ί·生⑽日組成物中’(A)_分子中.具有酸性基與2個以上乙 婦^雙鍵的驗顯影性寡聚物,係為使雙驗類衍生之具有2 :,氧丙基縣之環氧化合物與(甲基)丙烯酸的反應物再 二夕7L羧酸或其酐反應所得之含有鹼顯影性不飽和基的寡 聚物。 、(4)如上述(1)或(2)記载之遮光性濾色器間隔壁形成用 感光性樹脂組成物,其中,在上述濾'色器間隔壁形成用感 320324 12 200916852 光性樹脂組成物中,(A)一分 稀性雙鍵的鹼顯影性寡聚:中具有酸性基與2個 雙粉類衍生之具有2個==為具有從下述㈣所示: 〇hs~ch-ciis 、〆 ^ 基之環氧化合物,τ Self-healing effect returned to the pixel with the ink of the ink field on the surface of the 丨田璧. In particular, in the high-definition requirement of "fineness", the frequency from the dripping of the drip to the black matrix is also high: the liquid ejected by Besuo ^" is not the same as the shape of the black, and to complement In the long period of time, it is reviewed (see Patent Document 7). In the case of printing in the second place, it is recommended that the ink slide angle should be small when the film is covered in the partition wall and returned to the pixel. ^ 320324 6 200916852 As a photoresist composition for partition walls which impart such a purpose, a fluorine- or lanthanide-based compound is mixed as a component for imparting ink-repellent properties. Patent Document 1 discloses a photoresist composition comprising a perfluoroalkyl group-containing (meth) acrylate monomer and a silicone chain-containing ethylenically unsaturated monomer. However, the above copolymer is added in an amount of from 0.001 to 0.05% by weight based on the solid content of the photoresist composition, and the ink repellent in such a low content is insufficient. Patent Document 2 exemplifies a composition of an alkali-developable copolymer of hexafluoropropylene and an unsaturated carboxylic acid and/or an unsaturated carboxylic anhydride and a fluoroorganic compound. However, the polymer to obtain hexafluoropropylene cannot be deficient in polymerization under high pressure, and its molecular weight is as small as 2,000 or less. Further, the fluoroorganic compound which assists the compound is also a surfactant system, and its ink repellency continues to cause problems. In Patent Document 3, a resist composition is exemplified, which comprises: =H2=CH(Ri)C00XRi (Rf represents a carbon number* to 6 perfluoroalkyl group) as a monomer, and a fluorine atom content ratio is 7 Up to 35% by weight of the fluorine-containing resin. In this case, the R1 group is defined as Η, CH3, or CF3. In Patent Document 4, a negative photosensitive resin composition is described, which is a dye having a solubility of three or more ethylene double bonds in a self-complexing group and a molecule (4); A polymer obtained by copolymerizing a polymerized unit having at least one hydrogen atom having 20 or less carbon atoms substituted with a fluorine atom and a polymer unit having an ethylenic double bond as a printing ink. The fluorine-containing polymerization unit of the ink repellent f is equivalent to the above-mentioned Patent Reading 3. In any 惝 shape, if the proportion of the fluorine-containing compound in the photoresist is increased, the adhesion of J to the support substrate is lowered and the surface smoothness is deteriorated. Patent Document 5 describes a method for producing a surface-repellent ink black matrix. The method uses a resin containing a black matrix to contain a ruthenium having a low affinity and/or a fluorine atom, and after development, The resist ink was moved to the surface and the contact angle with the colored ink was controlled to be 3 〇 to 6 以 in such a manner that the black matrix was calcined at 230 °C. . In the above, a specific example of the refractory agent is exemplified by a copolymerization of a fluorine-containing monomer such as a vinylidene fluoride or the like in a main chain or a branched chain; . However, the phase-containing oligomer and the fluorine-based oligomer of the surfactant and the like have a problem that the ink repellent property is lowered with subsequent cleaning or elapse of time even after being burned to the surface after the calcination. On the other hand, the dynamic contact angle caused by the molecular chain length of the fluorine-containing branch of the acrylate polymer is described in (10), (4) s, 38 (2005), 5,699 (non-patent literature) When the carbon number of the fluorine-containing molecular bond is more than 6, the receding angle becomes larger due to the crystallization of the branch, and the EPAC economic partnership agreement is said to be 20+ years. Since the production of a fluorine-containing (Rf)-based fluorine compound (long-chain) is reduced by 95%, it is desirable to have a carbon-repellent gas-containing compound having a small slip angle of 6 or less. Further, in the case of a photoresist which is suitable for forming a light-shielding resin matrix, in the literature 6, the composition of the film is formed by the composition of the film, and the composition of the film is coated with a bovine & A 3 L sigma compound obtained by reacting a reaction with (meth)acrylic acid with a polybasic carboxylic acid or a ruthenium thereof as a main component of the resin, has a high light-shielding ratio and is easy to be 320324 8 200916852 The fine pattern is formed by the lithography method, and the stability, heat resistance, adhesion, and storage stability at room temperature are true. The literature 6 does not mention the ink-repellent characteristics, and there is no mention of compatibility. The patent is another aspect. The "white point" is mainly due to the inability of the ink to be sufficient in the area surrounded by the partition walls, and the earth magnetism, which is produced by the combination of the singularity of the singularity and the expansion of the moon, may become a display of color unevenness or contrast reduction. When the partition walls are formed, it is generally used for the long-term, eight & I stipulations contained in the thief resisting agent using the black resisting agent due to the adhesion of the contaminant to the supporting substrate 1 due to the upper and lower barriers. In particular, it is oriented towards the deployment by the partition walls. In addition, in the use of the above-mentioned inclusions:: on the surface of the support substrate, it becomes a hindrance to the development of the ink toward the corners; and further, the ink-repellent ink on the side of the partition wall and the support of the ancients, Ie? The surface of the board is extremely:: Technique: The side of the partition wall is rejected, and the color of the portion where the partition wall is in contact with the ink is lightened. 'Based on the situation as described above', in order to selectively reject only the top surface of the partition wall, and the side surface of the partition wall is not heavily inked, it is proposed that the following two shunt partition walls themselves produce such a property layer. The method of the two materials, (1) coating the portion other than the partition wall with a resist, and only rejecting the top surface t of the partition wall by the ink-jet treatment; ii, forming on the support substrate = performing the ink-repellent treatment a method of forming a patterned barrier by "shaping" a barrier layer by a lithography step; iv) in Patent Document 8, a support substrate exposed in a region formed by a partition wall The method of chemical treatment, and the method of illuminating the energy line. In this case, 320324 200916852 y, the prescription for rejecting the ink on the top surface of the partition wall is not used for forming the partition wall on the branch plate. The photosensitive coating is a method in which the photosensitive resin is patterned by a lithography step after the entire printing ink is removed, and the photosensitive resin is patterned by the ray-shaping step. (4) Surface _ ground, or selective However, in these methods, the partition walls must be multi-layered, and it is necessary to support the chrome on the top surface of the partition wall by 拒μ卢^> The surface of the substrate, the ink-jet treatment, and the difference in the ink-repellent action of the filling blade on the side surface and the top surface of the partition wall are difficult. Further, in Patent Document 9, the carrier is placed so that the partition wall is inverted. A conical manner is used to control the ink repellency of the side and top surfaces of the virgin plasma. However, in this method, the plasma treatment is basically performed twice. [Patent Document 1] Japanese Patent Laid-Open No. 9_54432 [Patent Document 2] Japanese Patent Laid-Open Publication No. Hei. No. 2005-315984 (Patent Document 4) No. WO-A No. 4-42474 (Patent Document 5) Japanese Patent Laid-Open Publication No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. Japanese Patent Publication No. 2-62422 [Non-Patent Document 1] Macr Giniolecules, 38 (2005) 56 SUMMARY OF THE INVENTION [Abstract] 320324 10 200916852 (Problem to be solved by the present invention) Therefore, the object of the present invention is to solve the problem of providing a photosensitive resin composition for feeding a 诂π Α τ surface to prevent ink from being printed as described above. , the general cleaning or the time of the /, the outside '斟*拎甘』, the knife J, the surface of the quasi-symbol ink, this '# ^ plate is also excellent in the adhesion of the partition wall. Provided is a color filter partition formed by using the photosensitive resin composition, and a person's niche is excellent in rejecting ink in the color filter interval of the newspaper & 柘a+ hunting, and For the support substrate, two! Further, another object of the present invention is to provide a color filter which is formed by using the color filter partition. ^ (Means for Solving the Problem) Fruits, ^, etc. In order to solve the above problems, we are trying to review the results of the {{bisphenol-derived aromatic epoxy compound and (meth)acrylic acid. The unsaturated soil obtained by the reaction of an acid or its anhydride is used as a center and a predetermined amount of the ink-repellent (meth)acrylic polymer is used in combination, and the VT 卽 VT VT VT „ The compatibility of the ink-repellent ink in the photosensitive resin composition for forming the partition wall is also excellent, and the surface appearance after film formation is good in green in the form of a pattern, and not only the surface is excellent in ink resistance, but also: The invention also achieves the invention by the fact that the surface of the film is also ink-repellent, and the photosensitive substrate is excellent in adhesion to the transparent substrate, and the photosensitive resin composition for forming the spacer spacer is excellent. j·生; photosensitive resin composition for coloring spacer formation' contains Tit (Pepper (8) component as a must: 320324 11 200916852 (A) The knife has an acidic group and two or more ethylene #. Developability oligomerization The test of the ethylenic double bond a compound consisting of a main chain of 4 to 6 in the inverse of the stone and at least 7 of which are replaced by a fluorine atom; a poly(D) light of poly(Z) early 70-rejected ink (meth)acrylic acid The polymerization initiator (Ε) includes a black organic pigment, a color mixed organic pigment, and a light-shielding material, and a light-shielding dispersion pigment, which is one of the light-shielding filters described in (1) above. The photosensitive spacer is formed by sensitizing: the erecting product 'in which' is compounded with the following components in the photosensitive tree sap composition for forming the smear spacer: (C) at least three or more ethylene in the knives (3) The use of the light-emitting color filter partition wall described in the above (1) or (7): light, resin composition The color filter partition wall is formed by the following: ί· raw (10) composition in the '(A)_ molecule. The test-developing oligomer having an acidic group and two or more women's double bonds is used to make the double Derived from the class 2, the reaction of the epoxy compound of the oxypropyl group with the (meth)acrylic acid and the reaction of the 7L carboxylic acid or its anhydride (4) The photosensitive resin composition for forming a light-blocking color filter spacer according to the above (1) or (2), wherein the filter is formed by the above-mentioned filter. 'Color spacer formation feeling 320324 12 200916852 In the optical resin composition, (A) alkali-developing oligomerization of a dilute double bond: having an acidic group and two double powders derived from two = = is an epoxy compound having the following: (4): 〇hs~ch-ciis, 〆^
^OCH^CH~Cl!2〇 Rs OH^OCH^CH~Cl!2〇 Rs OH
(惟,式中Ri以及R2表示氫原子、碳數! 或i素原子之任一者,χ 的烷基、 „ . 句七◦-、-S〇2-、、 -Si(CH3)2- ' -CH2- ' -C(CH 'l n 3)2_、 苐基、 乂卜述式所不之9,9_ 0¾ 或不存在,η為0至ΐ〇的整數)。 (5)如上述⑴或(2)記載之遮光性濾色器間隔壁形成用 感光性樹脂組成物,其中,在上述濾色器間隔壁形成用感 先性樹腊組成物中,(Β)具有由具碳數4至6的主鏈,且氣 原子中至少有7個被氟原子取代而成之聚合單元的拒印墨 性(甲基)丙烯酸聚合物,係具有由下述通式(2)所示單體形 成之單體單元的含氟樹脂, cH2=C(Rii)-COO-Y.Rf (2) (式t,Rn表示氣或碳數2以上之有機基,γ表示碳 320324 13 200916852 數1至6之不含氟原子的2價有機基,Rf表示碳數4至6 之全敦炫基)。 ⑹如上述⑴或⑺記載之遮光性濾色器間隔壁形成用 2性樹脂組成物,其中’在上述濾色器間隔壁形成用感 • v树脂組成物中,相對於組成物中全固形份100重量 份,(B)成分係調配0.05至1〇重量份。 片亦上述(1)或(2)記載之遮光性濾色器間隔壁形成用 :先性樹脂組成物’其中,在上述濾、 光性樹脂組成物I相對於固形份1。〇重量份 及⑹成分係分別調配2至1。重量份以及25至 ,光=^述⑴或⑺記載之遮光㈣色器間隔壁形成用 ^ 成物,其中,遮光性分散顏_為碳黑分散 (9)一種遮光性濾色器間隔壁, 之遮光性濾色器間隔壁形 …、处()或⑺記载 明基板上,進行^ 感先性樹赌組成物塗佈於透 —夕甚 综後,必須進行(a)以紫外線曝光裝置淮 至3μιη。 W 土該間隔壁之膜厚係為1.5 〇〇)—種濾色器,係在如上述 間隔壁内藉由喷墨印刷法形成。口 4光性濾色器 〇 Ό一種濾色器的製造方法, 有複數個像素與位於相鄰之像素間的標基板上至少具 造方法,該方法係具備:’、曰、日网壁之濾色器的製 320324 ]4 200916852 ⑴在支禮基板上形成含有含I樹脂之岸 η .resist)所構成之含氟系遮光間隔壁的步驟;、⑽ 接著❹彳U㈣水溶液胁之清洗處 渡處理中選出晕放電處理、以及氧電 間隔壁之去m 將上述形成有含氣系遮光 ^支撐基板進行清洗的步驟;以及 方上述含氟系遮光間隔壁包圍之區域藉由喷墨 方式賦予印墨而形成像素的步驟; 、 .'ί ,抖it ’形成上述含氟系遮光間隔壁的黑色阻劑中之含 Γί I (2ηΛ* 5 # 4 ^"]"# ψ ^ °·3 ^ ι〇-% ^ 純水洗步驟前後之含氟系遮光間隔壁在頂面之 '、,屯水接觸角的降低率為10%以下。 匕(12)如上述⑴)記載之淚、色器的製造方法,t中,含 树月曰係為含氟(甲基)丙稀酸醋之共聚物。、 (,的製色器,係使用上述(11)或(一 (發明的效果) 之本發明可給予:拒印墨性之相溶性優異,製膜後 =面外^及圖案形狀為良好’不僅表面拒印墨性優 :、且經過一般的清洗或時間的經過亦可维持表面拒印累 ^器間隔壁形成用感她組成:== 由^製程進行之遽色器的製造方法中,不需要由 化行表面拒印墨處理的設備而可達成低成本 °、當地提供有助於提升生產量的材料。 320324 15 200916852 【實施方式】 以下,詳細地說明本發明。 在(A)成分之使雙酚類衍生之具有2個環 ==„反應物再與多元=3 雒、.伃之3有鉸顯影性不飽和基的寡聚物中,就 :盼類衍生之具有2個環氧丙基醚基之環氧化合物而言,, 父佳可舉出以下述通式⑴表示的環氧化合物。 " n R, 〇(In the formula, Ri and R2 represent a hydrogen atom, a carbon number! or an atom of an atom, an alkyl group of χ, „. 句七◦-, -S〇2-, -Si(CH3)2- ' -CH2- ' -C(CH 'ln 3)2_, 苐 base, 9 所 9 9, 9, _ 0⁄4 or absent, η is an integer from 0 to )) (5) as above (1) or (2) The photosensitive resin composition for forming a partition of a light-shielding color filter according to the above aspect, wherein the color filter 4 has a carbon number of 4 to a sensitizing wax composition for forming a color filter partition wall. An ink-repellent (meth)acrylic polymer having a main chain of 6 and at least 7 of which are replaced by a fluorine atom, and having a monomer represented by the following formula (2) The fluorine-containing resin of the monomer unit, cH2=C(Rii)-COO-Y.Rf (2) (Formula t, Rn represents a gas or an organic group having a carbon number of 2 or more, and γ represents a carbon 320324 13 200916852 number 1 to 6 The divalent organic group which does not contain a fluorine atom, and Rf represents the carbon resin of 4 to 6 of the above-mentioned (1) or (7). In the above-mentioned color filter partition wall formation feeling In the resin composition, the component (B) is formulated in an amount of 0.05 to 1 part by weight based on 100 parts by weight of the total solid content of the composition. The sheet is also a light-shielding color filter partition wall according to the above (1) or (2). For forming: a precursor resin composition, wherein the filter and photoresin composition I is formulated with respect to the solid portion 1. The yt parts by weight and the (6) component are respectively 2 to 1. parts by weight and 25 to, light = (1) The method for forming a light-shielding (four) color spacer according to (7), wherein the light-shielding dispersion surface is a carbon black dispersion (9), a light-shielding color filter partition wall, and a light-shielding color filter partition wall shape... At (a) or (7), on the substrate, the composition of the sensitizing tree gambling is applied to the transparent eve, and it is necessary to carry out (a) the ultraviolet exposure device to 3 μm. a film thickness of 1.5 〇〇) is a color filter formed by an inkjet printing method as described above. A port 4 optical filter 〇Ό a method of manufacturing a color filter, having a plurality of pixels At least a method is created on the target substrate between adjacent pixels, and the method has: ', 曰, 日网The color filter of the wall is 320324 ] 4 200916852 (1) a step of forming a fluorine-containing light-shielding partition wall comprising a base resin containing a resin on the support substrate; and (10) cleaning the 水溶液U (four) aqueous solution In the treatment, the halo discharge treatment is selected, and the oxygen barrier wall is removed. The step of cleaning the gas-containing light-shielding support substrate is performed, and the region surrounded by the fluorine-containing light-shielding partition wall is sprayed. a step of imparting ink to the ink to form a pixel; , . . . , ί , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , · 3 ^ ι〇-% ^ The fluorine-containing light-shielding partition wall before and after the pure water washing step is at the top surface, and the reduction ratio of the hydrophobic contact angle is 10% or less. (12) The method for producing a tear and a color device according to the above (1), wherein, in the case of t, a tree-containing fluorene is a copolymer of fluorine-containing (meth)acrylic acid vinegar. In the coloring device of the above (11) or (the effect of the invention), the ink-repellent property of the ink-repellent ink is excellent, and the film is made out of the surface and the pattern shape is good. Not only the surface is rejected, but also after the general cleaning or the passage of time, the surface rejection is maintained. The composition of the partition wall is composed of: == In the method of manufacturing the color cleaner by the process, It is possible to achieve a low cost by locally disposing of the surface-removed ink processing apparatus, and locally provide a material which contributes to an increase in throughput. 320324 15 200916852 [Embodiment] Hereinafter, the present invention will be described in detail. The bisphenol-derived oligomer having two rings == „reactant and ternary=3 雒, 伃3 has a hinge-developable unsaturated group, and the desired one has two rings. In the epoxy compound of the oxypropyl ether group, the epoxy compound represented by the following formula (1) can be mentioned as a parent. " n R, 〇
"OCH2-CH~CH2 - ^ V ⑴ (惟,式中R〗以及R2表示氫屌子、"OCH2-CH~CH2 - ^ V (1) (However, R and R2 in the formula represent hydrogen hydrazine,
Ri 乳屌亍、叾反數1至5的烷基、或 齒素原子之任一者,X為rri cr, 馬-CO-、_s〇2-、-c(cf3)2_、 -Si(CH3)2-、-CH2-、-C(CH3)2-、_〇、以丁、+、^ 3;2 υ 以下、速式所示之9,9 第基、. , 0¾ 或不存在,η為0至1Ό.的整數) 〃在從該等之雙紛類衍生之具有2個環氧丙基峻基之環 氧化合物中,使(甲基)丙烯酸(此為「丙婦酸及/或甲基丙稀 酸」的意義)進行反應’可將多元繞酸或其酐於所得之具有 經基的化合物中反應而得之環氧(甲基)丙烯義酸加成 物’作為本發明之(Α)成分的含鹼顯影性不飽和基寡聚物使 320324 16 200916852 用。以如此方式而得之(A)成分的鹼顯影性寡聚物,由於兼 具乙烯性不飽和雙鍵與羧基,故對濾色器間隔壁形成用感 光性樹脂組成物賦予優異的光硬化性、優良顯影性、圖案 化特性,且達成遮光性間隔壁的物體特性提升。 如上述,(A)成分的驗顯影性寡聚物,較佳為從以上述 式(1)表示之環氧化合物衍生,亦即該環氧化合物係從雙酚 類衍生。因此,藉由說明雙酚類的方式而可理解含鹼顯影 性不飽和基寡聚物,故透過雙酚類說明較佳的具體例。 就可給予較佳之含鹼顯影性不飽和基寡聚物之雙酚類 而言,可舉出如以下者。含有雙(4-羥基苯基)酮、雙(4-羥 基-3,5-二曱基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)礙、雙(4-羥基-3,5-二甲基苯基)颯、雙(4-羥基 -3,5-二氯苯基)砜、雙(4-羥基苯基)六氟丙烷、雙(4-羥基 -3,5-二曱基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟 丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二曱基 苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、 雙(4-羥基苯基)曱烷、雙(4-羥基-3,5-二氯苯基)曱烷、雙(4-羥基-3,5-二溴苯基)曱烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯 基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基 -3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二曱基 苯基)醚、雙(4-羥基-3,5-二氯苯基)醚等的化合物;或式(1) 中的X為上述9,9-苐基之9,9-雙(4-羥基苯基)苐、9,9-雙(4-羥基-3-曱基苯基)g、9,9-雙(4-羥基-3-氯苯基)苐、9,9-雙 17 320324 200916852 (4-羥基-3-溴苯基)苐、9,9-雙(4-羥基-3-氟苯基)苐、9,9-雙 _ (4_羥基-3-曱氧基苯基)第、9,9-雙(4-羥基-3,5-二甲基苯基) • 苐、9,9-雙(4-羥基-3,5-二氯苯基)苐、9,9-雙(4-羥基-3,5-二 溴苯基)苐等;或更進一步可舉出4,4'-雙酚、3,3'-雙酚等化 合物。 (A)成分之驗顯影性寡聚物,可由如上述之雙紛類衍生 之環氧化合物獲得,但除了如此之環氧化合物之外,只要 盼驗搭(phenol novolac)型環氧化合物,或甲紛紛搭(cresol novolac)型環氧化合物等有效地含有具有2個環氧丙基醚 基的化合物者即可使用。此外,在將雙酚類進行環氧丙基 醚化時,寡聚物單體雖會混入,但只要是在通式(1)之η的 平均值為0至1〇(較佳為0至2)的範圍,則本樹脂組成物 的性能即不成問題。 此外,就可與使如此之環氧化合物與(曱基)丙烯酸反 應所得之環氧(曱基)丙烯酸酯分子中之羥基進行反應而得 的多元羧酸或其酐而言,可舉出例如,馬來酸、琥珀酸、 ‘ 伊康酸、苯二甲酸、四氫苯二曱酸、六氳苯二甲酸、曱基 内亞曱基四氫笨二曱酸(methyl endomethylene tetrahydrophthalic acid)、氯橋酸(chlorendic acid)、曱基四 氫苯二甲酸、偏苯三曱酸(trimellitic acid)、苯均四酸 (pyromellitic acid)等或其酐;更進一步可舉出二苯甲酮四 羧酸、聯苯四羧酸、聯苯醚四羧酸等芳族多元羧酸或其二 酐等。然後,有關酸酐或酸二酐的使用比例,可選擇適合 藉由曝光、鹼顯影操作來形成精細圖案的比例,此外,使 18 320324 200916852 如此之環氧化合物與(甲基)丙烯酸反應所得之環氧(曱基) 丙烯酸酯可僅使用1種,亦可使用2者以上,且亦可與多 元.羧酸或其酐進行反應獲得共聚物。 有關(A)成分之驗顯影性寡聚物,可僅使用其中i種, 亦可使用2種以上的混合物。此外,環氧化合物與(曱基) 丙烯酸的反應,在該反應所得之環氧(曱基)丙烯酸酯與多 元酸或其酐的反應,係可採用上述專利文獻6的公知方 法’但並非為特別限定者。 此外,就用以獲得(A)成分的其他方法而言,係以使包 吞1)具有1個以上缓基之乙烯性不飽和單體、2)在支鍵具 有聚合後可導入不飽和基的經基、酸酐基、環氧丙基等的 乙烯性不飽和單體、^ 3)其他乙稀性不飽和單體的單體 混合物在過氧化物以及鏈轉移劑共存的溶劑中進行自由基 f聚合所得之共聚物’可進—步加成在2)的支鏈加成之二 能基的不飽和化合物而成為黏合劑樹脂的方式,成為具有 乙烯性雙鍵之鹼顯影性寡聚物。 •八 就可作為上述單體混合物使用之〇具有2個以上羧基 之乙烯性不飽和單體而言,可舉出例如丙烯酸、甲基丙: 酸m «·氯㈣酸、依他尼酸、桂皮酸等不飽 ;:Γί、馬來酸酐、富馬酸、伊康酸、伊康酸酐、 ^康酉文、檸康_、中康酸等不餘和二緩酸㈤類j價以 上之不飽和多元鲮酸(酐)類等。其中尤以丙烯 美 ::::以:該等_之乙婦性不飽和單體,係可單;或 320324 19 200916852 京尤單體混合物之另一成分的3)其他的乙烯性不飽和單 •體而言,係可舉出例如苯乙烯、α_甲基苯乙烯、乙烯基曱 苯、氣苯乙烯、甲氧基苯乙烯等芳族乙烯化合物;丙稀酸 曱酯、甲基丙烯酸曱酯、丙烯酸乙酯、曱基丙烯酸乙酯、 丙烯酸丙酉旨、曱基丙烯酸丙酯、丙婦酸丁酉旨、甲基丙稀酸 .丁酯、丙烯酸2-羥乙酯、甲基丙烯酸2_羥乙酯、丙烯酸苯 曱醋、甲基丙烯酸苯甲醋、甲基丙稀酸月桂醋、甲基丙稀 酸十四酯、甲基丙烯酸十六酯、甲基丙烯酸硬脂酯、甲基 ,十八酯、甲基丙烯酸二十二醋、甲基丙烯酸二十醋 等不飽和缓酸酯類;丙烯酸胺乙醋、曱基丙稀酸胺乙醋、 丙烯酸胺丙醋、甲基丙稀酸胺丙醋、等不飽和緩酸胺烧酉旨 類二丙婦酸環氧丙醋、甲基丙稀酸環氧丙醋等不飽和㈣ 環氧丙酯類;乙酸乙烯酯、丙酸乙烯酯、丁酸乙烯酯、苯 曱酸乙烯醋等叛酸乙烯醋.類;乙稀基甲基鍵、乙稀基乙基 醚、烯丙基環氧丙基醚、甲基丙烯基環氧丙基醚等不飽和 轉類:丙晞腈、甲基丙稀腈、α 氯丙烯腈、偏二氰乙烤等 氰乙烯化合物;丙烯醯胺、甲基丙烯醯胺、氯丙烯醯胺、 Ν-羥乙基丙婦醯胺、Ν_羥乙基甲基丙烯醯胺、馬來醯亞胺 等不飽和酿胺或不飽和醯亞胺類;1,3-丁二烯、異戊二烯、 氣戊一稀荨月曰肪族共輛一烯類等。其中尤以丙稀酸甲酯、 甲基丙烯酸f酯、丙烯酸乙酯、甲基丙烯酸乙酯、丙烯酸 2-羥乙酯、甲基丙烯酸2_羥乙酯、丙烯酸苯甲酯、甲基丙 婦酉文本甲酉曰為佳。該等之其他不飽和單體,可單獨或併用 2種以上。 320324 20 200916852 此外,該(A)成分的酸價,以中和1§樹脂中之鲮基所 必須之KOH的mg數表#,從影像圖形成時的影像處二時 間、圖案形狀、或硬化膜之密著性的觀點來看,以川至 150(KOHmg/g)為佳。若低於7〇則無法藉由驗顯影液進行 圖案形成,此外,在使用交聯劑時,與作為交聯劑之 樹脂的交聯變得不夠充分,會產生㈣性降低、在有機溶 7中的密著性不良等。然後’若酸價超過15(),則驗顯影 時之表面粗經、精細圖案之顯影密著度不良、以及硬化: 之耐濕性會成為問題。 眠 本發明之拒印墨性(甲基)丙烯酸聚合物⑻為拒印黑 劑,且為具有至少7個(較佳為9個)氫原子被氣原子取= ^碳數4至6的聚合單元之具拒印墨性之含氟(甲基) 酸,合物。、具,而言,可例示具有由如以下述通式⑺所示 之單體形成的單體單元者。 ’、 CH2=C(Rn)-CO〇-Y-Rf ⑺ (式中’ Rn表示氯或碳數2以上之有機基,丫表示碳數 至6之不含氟原子的2價有機基,以表示碳數4至6之八 鼠炫基。) 王 以通式(2)表示的單體,為藉由發揮間隔物作用之有 f入使Rf連接至具“位取代基㈣的聚合物主鏈者。 右王氣院基(Rf)的碳數超過6,虽隹然表面拒印墨性優里 成物的相溶性降低,而使縫隙塗佈時的表: ~卜、且另方面,若Rf的碳數小於4 320324 21 200916852 則因拒印墨性降低而不佳。 . >另一方面,若《位取代基Rn為相當於氫或甲基之體 積較小者,則相對於在黑矩陣锻燒時破壞碳數6以下之全 氣烧基的支鏈結晶性而使拒印墨性在锻燒後降低,成為適 合以成為碳數2以上之有機基的方式來束缚主鏈的運動性 而造成起因於支鏈之拒印墨性的維持。此時,若為間隔物 之Y基為碳數6以下,則該主鏈對支鏈全氟院基的表面在 清洗後或硬化後拒印墨性亦維持而佳。 '",作為可給予如此之拒印墨性(甲基)丙烯酸聚合物之 含亂單體單元的具體例而言,可舉出:Rn基為_cH2CH3、 CH(CH3)2、-ch2c6h5、-coo-Rm、_CH2C00_Rm(Rm 表示 烷基、苯基、烷氧基等有機基,亦可包含氧、矽、以及氟); Rf 為-C4F9、-C5Fn、c6Fl3 ; γ 基為 _CH2cH2_、_cH2CH2〇_、 -ch2ch(oh)ch2o-等者。 再使如此之含氟單體與非含氟單體進行共聚合的方 t式’調!拒印墨性(甲基)丙烯酸聚合物(B)成分。就如此之 非含氟單體而言,可例示一般的丙婦酸醋、甲基丙稀酸醋、 苯乙婦衍生物、馬來酐醋等。從與驗顯影性樹脂的相溶性 以及維持拒印墨性的觀點來看,以與甲基丙婦酸醋的共聚 為佳,此外支鏈之醇殘基以苯甲基、異莰基、金剛燒基等 分子大者為佳。使用於拒印墨性(甲基)丙烯酸聚合物(B)之 含氟單體單元的比例,以在30莫耳%(較佳為在50莫耳% 以上)為佳。若未達30莫耳%,則無法發揮充分的拒印墨 性,此外,在黑矩陣形成時以及直到喷墨印墨之塗佈前盆 320324 22 200916852 拒印墨性會有消失的情形發生。 • α亥拒印墨性(曱基)丙稀酸聚合物的重量平均分子旦, 係=以凝膠層析法求得之聚苯乙_算重“二 子置(Mw)必須在4000至20_的範圍。若該分子量在400刀0 ‘以下,則在間隔壁形成製程的拒印墨作用會降低,而使拒 •之持續變困難。分子量的上限,會延 ; 液之溶解而不佳。 p r 該拒印墨性(甲基)丙_聚合物⑻,係以對間隔 予表面拒印墨性之目的而添加,必須在不損及本發明之組 成、及八硬化物之其他性質的範圍添加,相對於樹脂組 成物中全固形份100重量份,(B)成分以在_至^重 份(較佳為在〇.2至1〇重量份)的範圍使用。綱成分的, 配比例未滿0.05重量份時,無法表現充分的表面拒印黑括 能,相反地若朗1G重量份,則會影響錄性 ^ =不均:於㈣之平坦性不佳,對麵的耐濕密著^ I ,不好的衫響。再者,會有塗膜表面粗糙度增加而使表面 平滑性惡化的可能性。另外,感光性樹脂組成物的全固妒 份録示在硬化後作為固形份殘留之成分的總量。, 就(C)成分的1分子中至少具有3個以上乙稀性雙鍵的 酉^合性單體而言’可舉出例如,三乙二醇二(甲基)丙埽 二-曰、四乙一醇二(甲基)丙婦酸醋、丁二醇二(甲基)丙婦酸 -曰、二殘基丙院三(甲基)丙婦酸醋、三經甲基乙烧三(甲 丙婦酸酯、季戊四醇二W基)丙烯酸酯、季戊四醇三(甲 丙稀酸醋、季戊四醇四(甲基)丙稀酸醋、二季戊四醇土 320324 23 200916852 基)丙烯i^S9、二季戊四醇六(甲基)丙烯酸酯、甘油 =婦IS日等基)丙婦酸醋類。該等化合物 = 使用1種之外,亦可將2種以上併用。 了僅早獨 並硬m之單體係必須在不損及本發明之組成物以及 =物之性質的範圍添加,較佳為相對於㈧成分、⑻ 成分、以及(C)成分之總計100重量份,以15至5〇重量份 的祀園使用(C)成分者。在(c)成分的調配比例未達15重量 由於樹腊中所含光反應性宫能基的比例少而變成光 故形成之圖案比做為目標的線寬細,容易造成 =:# m在超過5G重量份時,顯影速度過 快而無法相對於遮罩重現原有的線寬。此外,由於顯影性 惡化’會有產生圖案邊緣變的殘缺不均而無法變銳利之問 題的顧慮。 本發明之濾色器間隔壁形成用感光樹脂組成物,為包 含(A)成分、(C)成分等光聚合性之化合物者,為了使其硬化 υ而包含作為(D)成分之光聚合起始kd)成分係透過紫外線 光照射(尤其是300至45〇nm),產生自由基群,且加成於光 聚合性化合物並開始自由基聚合,使樹脂組成物硬化。 就(D)成分的光聚合起始劑而言,可舉出二苯基酮、米 氏酮(Michler’s ketone)、n,N-四曱基_4,4,_二胺基二苯基 酮、4-甲減_4,_二曱基胺基二笨基g同、M,_二土乙基胺土基二 苯基酮、2_乙基蒽職、菲等芳_ ; *息香甲基醚、安息 香乙基醚、安息香苯基醚等安息香醚類;甲基安息香、乙 基安息香等安息香;2·(〇·氯苯基)_4,5_笨基㈣二聚物、 320324 24 200916852 2-(o-氯苯基)-4,5-二(m-甲氧基苯基)咪唑二聚物、2_(〇_氟苯 基)-4,5-二苯基咪唑二聚物、2_(〇_f氧基苯基)_4,5_二苯基 咪唑二聚物、2,4,5-三芳基咪唑二聚物、2_苯甲基_2_二甲基 胺基-1-(4-嗎啉基苯基)_丁酮、2_三氯甲基_5_苯乙烯基 .-1,3,4·噁二唑、2_三氯曱基-5-(p-氰基苯乙烯基)-13,4-噁二 唑、2-三氯甲基·5-(Ρ-甲氧基苯乙烯基)噁二唑等南甲 基噻唑化合物;2,4,6-参(三氯甲基)4,3,5-三畊、2_甲基_4,心 /雙(二氯曱基)-1,3,5-三畊、2-苯基_4,6_雙(三氯甲基)-1,3,5_ '三畊、2_(4_氯苯基)_4,6·雙(三氯曱基;M,3,5-三畊、2-(4-甲. 氧基苯基)-4,6-雙(三氯曱基)-ns三哄、2_(4_甲氧基萘 基)-4,6-雙(三氯甲基卜^,、三哄、2_(4_曱氧基苯乙烯 基)-4,6-雙(三氯甲基三哄、2_(3,4,5_三甲氧基苯乙埽 基)-4,6-雙(二氯曱基)_ι,3,5·三u井、2-(4-甲硫基苯乙烯 基)-4,6-雙(二氯曱基)_1,3,5-三啡等鹵甲基_5_三0井系化合 物,2,2-二曱氧基_1,2_二苯基乙烧4 —酮、2_曱基。-[仁(甲硫 I基)苯基]-2-嗎啉基丙酮、2-苯甲基_2_二曱基胺基―丨气仁嗎啉 基苯基]-丁酮-1,1-羥基-環己基_苯基酮等光聚合起始劑。此 外’適合使用汽巴精化(Ciba Specialty Chemicals)製之蔣酯 (OXIME ESTER)系光起始劑(〇χΕ01 以及 〇χΕ〇2)。 該等光聚合起始劑係可單獨或將2種以上混合使用。 此外,亦可添加其本身雖不會進行作為光聚合起始劑或增 敏劑之作用,但如與上述化合物組合使用便可增加光聚合 起始劑或增敏劑之能力的化合物。就如此之化合物而言, 可舉出例如,與二苯基酮組合使用會發揮效果的三乙醇胺 320324 25 200916852 等三級胺。 以(A)⑻、以及(〇各成分之總計1〇 (D)成分之光聚合起始劑 刀馮基旱 〜曰J使用里適合為7至20重量份。 ^例未達7重量份時,絲合的速度會變 |·又且破感度下降’另-方面,在超過2G重量份時,敏感度Ri chyle, an alkyl group having an inverse number of 1 to 5, or a dentate atom, X is rri cr, equine-CO-, _s〇2-, -c(cf3)2_, -Si(CH3 ) 2-, -CH2-, -C(CH3)2-, _〇, 丁, +, ^ 3; 2 υ The following 9, 9, base, . , 03⁄4 or non-existent, η An integer of 0 to 1 Ό. 〃 In the epoxy compound having two epoxypropyl thio groups derived from the above-mentioned double genus, (meth)acrylic acid (this is "glycolic acid and/or The meaning of "methacrylic acid" is carried out as 'the epoxy (meth) acrylic acid acid adduct obtained by reacting a polybasic acid or its anhydride in the obtained compound having a trans group as the present invention The (Α)-containing alkali-developable unsaturated-based oligomer is used in 320324 16 200916852. Since the alkali-developable oligomer of the component (A) obtained in this manner has both an ethylenically unsaturated double bond and a carboxyl group, it imparts excellent photocurability to the photosensitive resin composition for forming a color filter partition wall. Excellent developability and patterning characteristics, and the object characteristics of the light-shielding partition walls are improved. As described above, the testable oligomer of the component (A) is preferably derived from an epoxy compound represented by the above formula (1), that is, the epoxy compound is derived from a bisphenol. Therefore, since the alkali-developing unsaturated group-containing oligomer can be understood by explaining the bisphenol type, a preferred specific example will be described by the bisphenol. The bisphenol which can give a preferred alkali-developable unsaturated group-containing oligomer is as follows. Containing bis(4-hydroxyphenyl)ketone, bis(4-hydroxy-3,5-dimercaptophenyl)one, bis(4-hydroxy-3,5-dichlorophenyl)one, bis(4- Hydroxyphenyl), bis(4-hydroxy-3,5-dimethylphenyl)anthracene, bis(4-hydroxy-3,5-dichlorophenyl)sulfone, bis(4-hydroxyphenyl)hexa Fluoropropane, bis(4-hydroxy-3,5-dimercaptophenyl)hexafluoropropane, bis(4-hydroxy-3,5-dichlorophenyl)hexafluoropropane, bis(4-hydroxyphenyl) Dimethyl decane, bis(4-hydroxy-3,5-dimercaptophenyl)dimethyl decane, bis(4-hydroxy-3,5-dichlorophenyl)dimethyl decane, bis (4- Hydroxyphenyl)decane, bis(4-hydroxy-3,5-dichlorophenyl)decane, bis(4-hydroxy-3,5-dibromophenyl)decane, 2,2-dual (4 -hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-bis(4-hydroxy-3,5-dichlorophenyl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis(4-hydroxyphenyl)ether, bis (4 a compound such as -hydroxy-3,5-dimercaptophenyl)ether or bis(4-hydroxy-3,5-dichlorophenyl)ether; or formula (1) X in the above 9,9-fluorenyl 9,9-bis(4-hydroxyphenyl)anthracene, 9,9-bis(4-hydroxy-3-indolylphenyl)g, 9,9-double (4-hydroxy-3-chlorophenyl)indole, 9,9-bis 17 320324 200916852 (4-hydroxy-3-bromophenyl)indole, 9,9-bis(4-hydroxy-3-fluorophenyl)苐, 9,9-bis-(4-hydroxy-3-indolylphenyl), 9,9-bis(4-hydroxy-3,5-dimethylphenyl) • 苐, 9,9- Bis(4-hydroxy-3,5-dichlorophenyl)anthracene, 9,9-bis(4-hydroxy-3,5-dibromophenyl)anthracene, etc.; or further, 4,4'- Compounds such as bisphenol and 3,3'-bisphenol. The developable oligomer of the component (A) can be obtained from an epoxy compound derived as described above, but in addition to such an epoxy compound, as long as a phenol novolac type epoxy compound is observed, or A cresol novolac type epoxy compound or the like which effectively contains a compound having two epoxypropyl ether groups can be used. Further, when the bisphenol is subjected to epoxypropyl etherification, the oligomer monomer may be mixed, but the average value of η in the general formula (1) is 0 to 1 Torr (preferably 0 to In the range of 2), the performance of the present resin composition is not a problem. Further, as the polyvalent carboxylic acid or an anhydride thereof obtained by reacting a hydroxyl group in an epoxy (fluorenyl) acrylate molecule obtained by reacting such an epoxy compound with (hydrazino)acrylic acid, for example, for example, , maleic acid, succinic acid, 'iconic acid, phthalic acid, tetrahydrophthalic acid, hexaphthalic acid, methyl endomethylene tetrahydrophthalic acid, chlorine Chlorendic acid, mercaptotetrahydrophthalic acid, trimellitic acid, pyromellitic acid, etc. or an anhydride thereof; further examples are benzophenone tetracarboxylic acid An aromatic polycarboxylic acid such as biphenyltetracarboxylic acid or diphenyl ether tetracarboxylic acid or a dianhydride thereof. Then, regarding the use ratio of the acid anhydride or the acid dianhydride, a ratio suitable for forming a fine pattern by exposure, alkali development operation may be selected, and further, a ring obtained by reacting an epoxy compound such as 18 320324 200916852 with (meth)acrylic acid The oxygen (mercapto) acrylate may be used singly or in combination of two or more kinds, and may also be reacted with a polyvalent carboxylic acid or an anhydride thereof to obtain a copolymer. The test-developing oligomer of the component (A) may be used alone or in combination of two or more. Further, in the reaction of the epoxy compound with (mercapto)acrylic acid, the reaction of the epoxy (fluorenyl) acrylate obtained by the reaction with a polybasic acid or an anhydride thereof can be carried out by the known method of the above-mentioned Patent Document 6 'but not Specially qualified. Further, in other methods for obtaining the component (A), the ethylenically unsaturated monomer having one or more slow groups is swallowed, and 2) the unsaturated group may be introduced after the branch has polymerization. a monomer mixture of a vinyl group, an acid anhydride group, an epoxy group, and the like, and a monomer mixture of other ethylenically unsaturated monomers, which are free radicals in a solvent in which a peroxide and a chain transfer agent coexist. The copolymer obtained by f-polymerization can be further added to the branched-chain addition of the unsaturated compound of 2) to form a binder resin, and becomes an alkali-developable oligomer having an ethylenic double bond. . • The ethylenic unsaturated monomer having two or more carboxyl groups which can be used as the above monomer mixture, for example, acrylic acid, methyl propyl: acid m «·chloro (tetra) acid, ethenic acid, Cinnamonic acid and other unsaturated;: Γί, maleic anhydride, fumaric acid, itaconic acid, itaconic anhydride, ^ Kang Yuwen, citracose _, mesaconic acid, etc. and the second acid (five) class above the price of unsaturated Dicarboxylic acid (anhydride) and the like. Among them, propylene is beautiful:::: to: such _ _ _ women's unsaturated monomer, can be single; or 320324 19 200916852 another component of the Jingyou monomer mixture 3) other ethylenic unsaturated single • The body may, for example, be an aromatic vinyl compound such as styrene, α-methylstyrene, vinyl anthracene, gas styrene or methoxystyrene; decyl acrylate or bismuth methacrylate; Ester, ethyl acrylate, ethyl methacrylate, propyl acrylate, propyl methacrylate, butyl acetoate, butyl methacrylate, butyl acrylate, 2-hydroxyethyl acrylate, methacrylic acid 2_ Hydroxyethyl ester, phenyl hydrazine acrylate, benzyl methacrylate, methyl acrylate laurel, tetradecyl methacrylate, hexadecyl methacrylate, stearyl methacrylate, methyl, Unsaturated acid esters such as octadecyl ester, methacrylic acid twenty-two vinegar, methacrylic acid twenty vinegar; acetoacetate, mercapto acetoacetate, acetoacetic acid, methyl acrylate Amine propyl vinegar, etc., unsaturated sulphuric acid amine sputum, propylene glycol propylene glycol, methyl acrylate acid propylene vinegar, etc. Saturated (iv) glycidyl esters; vinyl acetate, vinyl propionate, vinyl butyrate, benzoic acid, vinyl vinegar, etc.; ethical methyl bond, ethyl ether ethyl ether, olefin Unsaturated conversions such as propylepoxypropyl ether and methacryloxypropyl propyl ether: cyanoethylene compounds such as acrylonitrile, methyl acrylonitrile, α chloro acrylonitrile, and diacetyl cyanide; Amine, methacrylamide, chloropropenylamine, hydrazine-hydroxyethyl propyl sulfonamide, hydrazine-hydroxyethyl methacrylamide, maleic imine, etc. Class; 1,3-butadiene, isoprene, gas, pentane, sulphur, sulphate, alkene, etc. Among them, methyl acrylate, methyl methacrylate, ethyl acrylate, ethyl methacrylate, 2-hydroxyethyl acrylate, 2-hydroxyethyl methacrylate, benzyl acrylate, methyl propyl methacrylate The 酉 text is better. These other unsaturated monomers may be used alone or in combination of two or more. 320324 20 200916852 In addition, the acid value of the component (A) is determined by the number of mg of KOH necessary to neutralize the sulfhydryl group in the resin. The image is formed at the time of image formation at two times, pattern shape, or hardening. From the viewpoint of the adhesion of the film, Kawasaki 150 (KOH mg/g) is preferred. If it is less than 7 Å, the pattern formation cannot be performed by the developer. Further, when the crosslinking agent is used, the crosslinking with the resin as the crosslinking agent becomes insufficient, and the (four) property is lowered and the organic solvent is dissolved. Bad adhesion, etc. Then, if the acid value exceeds 15 (), the surface roughness during development, the poor development density of the fine pattern, and the hardening: the moisture resistance may become a problem. The ink-repellent (meth)acrylic polymer (8) of the present invention is a black-rejecting agent, and is a polymerization having at least 7 (preferably 9) hydrogen atoms taken by a gas atom = ^ carbon number 4 to 6. The unit has a fluorine-containing (meth) acid compound which refuses to print ink. In addition, a monomer unit having a monomer represented by the following formula (7) can be exemplified. ', CH2=C(Rn)-CO〇-Y-Rf (7) (wherein Rn represents chlorine or a carbon number of 2 or more organic groups, and 丫 represents a carbon number to 6 of a fluorine-free atom-free divalent organic group, A monomer represented by the formula (2), which is a monomer represented by the formula (2), which is a polymer backbone having a "substituent (4)" by acting as a spacer. The right-handed gas base (Rf) has a carbon number of more than 6, although the compatibility of the surface of the ink-repellent ink-repellent product is reduced, and the surface of the gap coating is: ~, and on the other hand, if Rf The carbon number is less than 4 320324 21 200916852, but it is not good because the ink resistance is reduced. . . . > On the other hand, if the "substituent Rn is equivalent to the smaller volume of hydrogen or methyl group, then it is relative to the black matrix. In the calcination, the branched crystallinity of the total gas-burning group having a carbon number of 6 or less is destroyed, and the ink-repellent ink property is lowered after calcination, and the mobility of the main chain is restricted so as to be an organic group having 2 or more carbon atoms. And the maintenance of the ink resistance caused by the branch is caused. At this time, if the Y group of the spacer is 6 or less carbon atoms, the surface of the main chain to the branched perfluorinated base is clear. The ink repellent property after washing or hardening is also maintained. '" As a specific example of the disordered monomer unit to which such an ink-repellent (meth)acrylic polymer can be imparted, there are mentioned: The Rn group is _cH2CH3, CH(CH3)2, -ch2c6h5, -coo-Rm, _CH2C00_Rm (Rm represents an organic group such as an alkyl group, a phenyl group or an alkoxy group, and may also contain oxygen, hydrazine, and fluorine); Rf is -C4F9, -C5Fn, c6Fl3; γ group is _CH2cH2_, _cH2CH2〇_, -ch2ch(oh)ch2o-, etc. Further, the formula of such a fluorine-containing monomer and a non-fluorine-containing monomer is copolymerized. Adjusted to reject the ink (meth)acrylic polymer (B) component. For such a non-fluorinated monomer, general vinegar vinegar, methyl acetonate, styrene derivative And maleic anhydride vinegar, etc. It is preferable to copolymerize with methyl acetoacetate from the viewpoint of compatibility with the testable resin and maintaining ink repellency, and the branched alcohol residue is benzoic acid. The molecular weight, the sulfhydryl group, the adamantyl group and the like are preferably larger, and the ratio of the fluorine-containing monomer unit used for the ink-repellent (meth)acrylic polymer (B) is reduced to 30 m. % (preferably 50 mol% or more) is preferable. If it is less than 30 mol%, sufficient ink repellency cannot be exhibited, and further, at the time of formation of the black matrix and until the application of the inkjet ink Pot 320324 22 200916852 Rejection of ink will disappear. • The weight average molecular weight of the alpha-receptive (mercapto) acrylic polymer, the polystyrene obtained by gel chromatography B = the weight "two sub-set (Mw) must be in the range of 4000 to 20_. If the molecular weight is 400 kn. 00 or less, the ink repellency of the partition forming process is lowered, and the continuation of the refusal becomes difficult. The upper limit of the molecular weight will be delayed; the dissolution of the liquid is not good. Pr The ink-repellent (meth) propylene-polymer (8) is added for the purpose of imparting ink repellency to the surface at intervals, and must be in a range that does not impair the composition of the present invention and other properties of the octa cured product. The component (B) is used in a range of from _ to 2 parts by weight, preferably in parts by weight to 2 parts by weight, based on 100 parts by weight of the total solid content in the resin composition. When the proportion of the composition is less than 0.05 parts by weight, sufficient surface rejection blackening energy cannot be expressed. Conversely, if the weight is 1G by weight, the recording property will be affected. ^ = unevenness: the flatness of (4) is not good. The opposite side is resistant to moisture, and I don't have a good shirt. Further, there is a possibility that the surface roughness of the coating film is increased to deteriorate the surface smoothness. Further, the total solid content of the photosensitive resin composition is shown as the total amount of the component remaining as a solid component after hardening. In the case of a ruthenium monomer having at least three or more ethylene double bonds in one molecule of the component (C), for example, triethylene glycol di(methyl) propyl bismuth dioxime, Tetraethyl alcohol di(methyl) propyl acetoacetate, butane diol di(methyl) propyl benzoate- hydrazine, di-residue propyl tris(methyl) propyl acetonate, tris-methyl ethene tris ( Methyl propionate, pentaerythritol di W) acrylate, pentaerythritol tris (methacrylic acid vinegar, pentaerythritol tetrakis(meth) acrylate vinegar, dipentaerythritol 320324 23 200916852 ketone) propylene i^S9, dipentaerythritol (Meth) acrylate, glycerin = women's IS day, etc.) acetoacetate. These compounds may be used in combination of two or more. A single system which is only a single hard and hard m must be added in a range that does not impair the properties of the composition of the present invention and the substance, preferably a total of 100 weights relative to the components (8), (8), and (C). For the portion, use the component (C) in 15 to 5 parts by weight of the garden. The proportion of the component (c) is less than 15%. Since the proportion of the photoreactive uterine energy group contained in the tree wax is small, the pattern formed by the light is thinner than the target line width, and it is easy to cause =:# m in When the amount exceeds 5 G by weight, the development speed is too fast to reproduce the original line width with respect to the mask. Further, since the developability is deteriorated, there is a concern that the pattern edge becomes uneven and the sharpness cannot be sharpened. The photosensitive resin composition for forming a color filter partition of the present invention is a photopolymerizable compound containing the component (A) or the component (C), and contains photopolymerization as the component (D) in order to harden the ruthenium. The component of the first kd) is irradiated with ultraviolet light (especially 300 to 45 Å) to generate a radical group, and is added to the photopolymerizable compound to initiate radical polymerization to harden the resin composition. Examples of the photopolymerization initiator of the component (D) include diphenyl ketone, Michler's ketone, and n,N-tetradecyl-4,4,diaminodiphenyl ketone. , 4-methyl _4, _didecylamino dipyrylene g, M, _ dioxin ethyl urethane diphenyl ketone, 2 _ ethyl 蒽, phenanthrene, etc.; Benzoin ethers such as methyl ether, benzoin ethyl ether, benzoin phenyl ether; benzoin such as methyl benzoin, ethyl benzoin; 2·(〇·chlorophenyl)_4,5_styl (tetra) dimer, 320324 24 200916852 2-(o-Chlorophenyl)-4,5-di(m-methoxyphenyl)imidazole dimer, 2_(〇-fluorophenyl)-4,5-diphenylimidazole dimer , 2_(〇_foxyphenyl)_4,5-diphenylimidazole dimer, 2,4,5-triarylimidazole dimer, 2-benzyl-2_dimethylamino- 1-(4-morpholinylphenyl)-butanone, 2-trichloromethyl-5-styryl-1,3,4-oxadiazole, 2-trichloroindolyl-5-(p -N-cyanostyryl-3,4-oxadiazole, 2-trichloromethyl-5-(anthracene-methoxystyryl)oxadiazole and other southern methylthiazole compounds; 2,4,6 - ginseng (trichloromethyl) 4,3,5-three tillage, 2_methyl_4, heart/double ( Chloroindyl)-1,3,5-three tillage, 2-phenyl-4,6-bis(trichloromethyl)-1,3,5_ 'three tillage, 2_(4-chlorophenyl)_4, 6·Bis(trichloroindenyl; M,3,5-three tillage, 2-(4-methyloxyphenyl)-4,6-bis(trichloroindenyl)-ns triterpenoid, 2_(4 _Methoxynaphthyl)-4,6-bis(trichloromethylbu), triterpenoid, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyltrimethylene, 2_(3,4,5-trimethoxyphenylethyl)-4,6-bis(dichloroindenyl)_ι,3,5·三u well, 2-(4-methylthiostyryl) -4,6-bis(dichloroindenyl)_1,3,5-trimorphine, etc. Halomethyl_5_三0 well compound, 2,2-dimethoxyl_1,2_diphenyl Burning 4-ketone, 2_fluorenyl.-[Role (methylthiol)phenyl]-2-morpholinylacetone, 2-benzyl-2_2-didecylamino-helium morpholino Photopolymerization initiator such as phenyl]-butanone-1,1-hydroxy-cyclohexyl-phenyl ketone. In addition, it is suitable to use OZME ESTER light from Ciba Specialty Chemicals. Starting agents (〇χΕ01 and 〇χΕ〇2). These photopolymerization initiators may be used alone or in combination of two or more. A compound which functions as a photopolymerization initiator or a sensitizer, but which can increase the ability of a photopolymerization initiator or a sensitizer, in combination with the above compound, may be mentioned, for example, as such a compound. A tertiary amine such as triethanolamine 320324 25 200916852 which is effective in combination with diphenyl ketone. The photopolymerization initiator φ 旱 旱 曰 曰 曰 使用 使用 使用 使用 使用 使用 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合 适合, the speed of the silk will change | · and the degree of damage is reduced 'other - aspect, when more than 2G parts by weight, sensitivity
過強,圖案線寬相對於圖幸护置A 固茱4罩為過粗狀態,惟恐產生如 下問題:無法相對於遮罩重命 旱董見原本的線見以及圖案邊緣變 的殘缺不均而無法變銳利。 尤使用於⑻成分之黑色有機顏料、混色有機顏料、或 遮光材等遮光性分散顏料而言,以耐熱性、耐光性、以及 耐溶劑性優異者為佳。在此,就黑色有機㈣而言,可舉 ^例^如二萘嵌苯黑(peryIene black)、酞菁黑(C灿心㈣ =°就混色有機顏料而言,可舉出將由紅、藍、綠、紫、 :色、青色、洋紅Wmagenta).等選出至少2種以上的顏料 此口而類黑色化者。就遮光材而言,可舉出碳里、氧化 氧化鐵、鈦黑(than black)、苯胺黑、敗菁黑,雖然可適每 選擇2種以上使用’但尤以碳黑在遮光性、表面平滑性: 分散安定性、與樹脂的相溶性為良好的觀點來看為佳。將 =此等之遮光性顏料中選出之i種以上,依需要而隨分散 =、分散助劑分散於有機溶劑中的方式而可成為遮光性分 有關(E)成分的調配比例,相對於感光性樹脂組成物之 全固形份100重量份,以25$ 巷Μ ( 里切“至60重置份調配的方式為佳。 若少於25重量份,則遮光性會變得不夠充分。若超過的 320324 26 200916852 ,里伤則由於原本成為黏合劑之感光性樹脂的含量減 少’而產生在損及顯影特性的同時發生損害膜形成能 良問題。 在本發明之濾色器間隔壁形成用感光組成物中,除了 上述(A)至(E)成分之外可使用溶劑。就溶劑而言,可舉出 例如,甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇等 醇類’ α -或石’品醇(terpine〇1)等萜類;丙酮、甲基乙美 酮、環己酮、N_甲基_2_n比咯啶酮等酮類;甲苯、二甲苯^ 四甲基苯等芳族烴類;溶纖劑㈣losoWe)、甲基溶纖劑、 乙基溶纖劑、卡必醇(carbit〇1)、甲基卡必醇、乙基卡必醇、 丁基卡必醇、丙二醇單甲基醚、丙二-一 醇單甲基喊、二丙二醇單乙基驗一醇單糊丙: 乙-轉早乙基驗等二_類;乙酸乙§旨、乙酸丁醋、溶纖 劑乙酸酯、乙基溶纖劑乙酸酯、丁基溶纖劑乙酸酯、卡必 醇乙酸醋、乙基卡必醇乙酸_、了基卡必醇乙酸醋、丙二 :單甲基醚乙酸酯、丙二醇單乙基醚乙酸醋等乙酸 、、。可藉由使用該等化合物溶解、混合的方式,成為均 的溶液狀組成物。 此外,在本發明之濾色器間隔壁形成用感光組成物 ,可因應需要調配偶合劑、硬化促進劑、熱聚合抑制,、 =树、溶劑、調平劑、消泡劑等添加劑。偶合劑心升 曰to壁與透明基板的耐濕密著性者,可適合使用在1八子 :擁有環氧丙基、甲基丙烯醯基、異氰酸基之任—者= 時具有烧氧基之石夕氧院化合物。就熱聚合抑制劑而古,、:Too strong, the line width of the pattern is relatively thick relative to the figure. The solid cover is too thick, so the following problems may arise: it is impossible to see the original line and the unevenness of the edge of the pattern with respect to the mask. Can't be sharp. In particular, it is preferable that the light-blocking pigment such as a black organic pigment, a color mixed organic pigment or a light-shielding material of the component (8) is excellent in heat resistance, light resistance, and solvent resistance. Here, as for the black organic (four), for example, peryIene black, phthalocyanine black (C can be (4) = °, mixed color organic pigment, it will be exemplified by red, blue , green, purple, : color, cyan, magenta Wmagenta). Select at least two kinds of pigments for this kind of mouth and black. Examples of the light-shielding material include carbon, oxidized iron oxide, titanium black, aniline black, and phthalocyanine black. Although it can be used in two or more types, it is particularly suitable for carbon black in light-shielding and surface. Smoothness: It is preferable from the viewpoint of good dispersion stability and compatibility with a resin. I or more of the above-mentioned light-shielding pigments may be selected, and if necessary, the dispersion ratio and the dispersing aid may be dispersed in an organic solvent to form a blending ratio of the (E) component of the light-shielding component, relative to the photosensitive layer. The total solid content of the resin composition is 100 parts by weight, which is preferably 25$ lanes (the ratio of Liche "to 60 replacement parts. If less than 25 parts by weight, the light-shielding property will become insufficient. In the case of 320324 26 200916852, the damage of the photosensitive resin which is originally a binder is reduced, and the film formation performance is deteriorated while the development characteristics are impaired. In the composition, a solvent can be used in addition to the above components (A) to (E). Examples of the solvent include alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol, and propylene glycol. 'α - or stone 'terpine 〇 (terpine 〇 1) and other hydrazines; acetone, methyl ketone, cyclohexanone, N-methyl 2 _ b-pyrrolidone and other ketones; toluene, xylene ^ four Aromatic hydrocarbons such as benzene; cellosolve (4) losoWe), methyl cellosolve Ethyl cellosolve, carbitol (carbit〇1), methyl carbitol, ethyl carbitol, butyl carbitol, propylene glycol monomethyl ether, propylene glycol monomethyl shunt, two Propylene glycol monoethyl alcohol monoglyceride: B-transfer early ethyl test, etc.; acetic acid B, acetic acid butyl vinegar, cellosolve acetate, ethyl cellosolve acetate, butyl cellosolve Acetate, carbitol acetate vinegar, ethyl carbitol acetic acid _, carbamide alcohol acetate vinegar, propylene: monomethyl ether acetate, propylene glycol monoethyl ether acetate vinegar and other acetic acid,. By using such a compound to dissolve and mix, it is a uniform solution-like composition. Further, in the photosensitive composition for forming a color filter partition wall of the present invention, a coupling agent, a hardening accelerator, and heat can be prepared as needed. Additives such as polymerization inhibition, = tree, solvent, leveling agent, antifoaming agent, etc. The coupling agent is suitable for use in the heat-resistant and dense substrate of the substrate and the transparent substrate. a methacrylic fluorenyl group or an isocyanate group, which has an alkoxy group compound. And ancient,,:
Ό 口J 320324 27 200916852 舉f對苯二紛、對苯二紛單甲基峻、焦梧盼咖〇抑11〇1)、 • ▲、及丁基兒余酚、酚噻啡(phenothiazine)等;就增塑劑而 °可舉出鄰苯二甲酸二丁酯、鄰苯二曱酸二辛酯、三曱 ^ 土科I Sg等,就填充材而言,可舉出玻璃纖維、石夕石、 ‘雲母、氧化紹等。此外,就消泡劑或調平劑而言,可舉出 例如石夕系、氟系、丙烯系的化合物。 ^尤其是在添加使用於表面特性改善之調平劑、消泡劑 等/、有"面活性作用的材料時,必須在不損及硬化後之表 面拒印墨性的程度而添加,較佳為以相對於組成物中之全 固形份的濃度少於拒印墨劑的含量而添加。 本發明之濾、色器間隔壁形成用感光性樹脂組成物,係 =上述⑷至⑻成分或該等成分與溶劑作為主成分。在 2去溶劑之固形份(固形份包含硬化後成為固形 ί ;二上’更佳為在9〇 Wt%以上。溶劑的量雖然依存於 二式且依作為目標的黏度而變化,但期望為在 9〇wt。/。的範圍。 π主 本發明之遽色器間隔壁係使用上述本發明的遽 ==嫌樹脂組成物並藉由微影法爾心 成物成:舉:以下方法:首先,使感光性樹脂組 :基板表面’接著使溶劑乾燥(㈣烤) 部硬化,再上放置光遮罩’照射紫外線使曝光 ^化再使用H谷液將未曝光部溶 圖案,再進行後供烤作為後乾谭ό 而形成 320324 28 200916852 就塗佈感光性樹脂組成物之溶液的基板而言,可使用 在破璃、透明薄膜(例如,聚碳酸酯、聚對苯二甲酸乙二酯、 聚醚砜等)上蒸鍍或圖案化IT〇、金等透明電極者。--曰 就將該感光性樹脂組成物塗佈於基板的方法而言,除 了 ^知的溶液浸潰法、喷霧法之外,亦可採用❹㈣機: 刀月塗佈機(land coater)、或旋轉機之方法等任何方法。依 照該等方法㈣為㈣的厚度後,藉由去除㈣(預供朴 的方式’使被卿成。觀烤n由烤箱、加熱板等加 預烘烤之加熱溫度與加熱時間係因應使用 的洛別來適當選擇,例如在8〇至12〇1:的Ό 口 J 320324 27 200916852 f f Benzene bismuth, benzodiazepine monomethyl sulphate, 焦 梧 〇 〇 〇 〇 11〇 1), • ▲, and butyl phenol, phenothiazine (phenothiazine) Examples of the plasticizer include dibutyl phthalate, dioctyl phthalate, and triterpene I Sg. Examples of the filler include glass fiber and Shi Xi. Stone, 'mica, oxidized Shao and so on. Further, examples of the antifoaming agent and the leveling agent include a compound of the genus, a fluorine-based, and a propylene-based compound. ^In particular, when adding a leveling agent, an antifoaming agent, etc., which has an improved surface property, and a material having a surface activity, it must be added to the extent that the surface of the surface after the hardening is not damaged. Preferably, it is added in a concentration relative to the total solid content of the composition less than the content of the ink to be rejected. The photosensitive resin composition for forming a filter and a separator of the present invention is a component of the above (4) to (8) or a component and a solvent as a main component. In 2, the solid content of the solvent is removed (the solid part comprises a solid form after hardening; the second part is more preferably 9 〇 Wt% or more. The amount of the solvent varies depending on the formula and depends on the target viscosity, but is expected to be In the range of 9 〇wt%. π Mainly, the color filter spacer of the present invention is formed by using the above-described 遽== 树脂 resin composition of the present invention and by lithography: First, the photosensitive resin group: the surface of the substrate is cured by drying the solvent ((four) baking), and then the light mask is placed on the surface of the substrate, and the ultraviolet light is irradiated to expose the film to the unexposed portion by using the H-liquid. For baking, it is formed as a post-dried tan. 320324 28 200916852 For the substrate coated with the solution of the photosensitive resin composition, it can be used in a glass-cut, transparent film (for example, polycarbonate, polyethylene terephthalate). , such as polyethersulfone, etc., vapor-deposited or patterned transparent electrodes such as IT 〇, gold, etc. - 曰 曰 将该 将该 将该 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 涂布 溶液 溶液 溶液 溶液 溶液 溶液 溶液 溶液 溶液 溶液 溶液 溶液 溶液 溶液 溶液In addition to the spray method, you can also use the ❹(4) machine: Knife Coating Machine Any method, such as land coater), or a method of rotating the machine. According to the method (4), the thickness of (4) is removed by (4) (pre-supplied by the way 'to make it clear. View the grilled n by oven, heating plate, etc. The heating temperature and heating time of prebaking are appropriately selected according to the use of Lobe, for example, from 8〇 to 12〇1:
分鐘。 q i芏1U ^預烘烤後進行的曝光,係由曝光機進行,藉由隔介 先遮罩曝先的方式而僅使圖案所對應之部分的阻劑感光。 曝光機以及其曝光條件係經適當選擇,使用超高壓水銀 ^高壓水絲、金屬崎燈、遠料線料光源進行曝 光’使塗膜中的黑色阻劑用樹脂組成物光硬化。 、曝光後的鹼_,係^除不曝光部分找劑為目的 :二广藉由該顯影形成期望的圖案。就適合該鹼顯影 Γ:言,雖可舉出例如,驗金屬或驗土金屬的碳酸 二水〉谷液、驗金屬的氫氧化物水料等,但尤其是以使用 含有碳酸鈉、礙酸钾、碳酸鋰等碳酸鹽0.05至3重量%的 =驗性水溶液独2G i听的溫度顯影輕,亦可使。用 ^面販售的顯影機或超音波清洗機等精密地形成細微 320324 29 200916852 在以如此方式顯影後,以160至250°C的溫度,以及 2〇至1〇〇分鐘的條件進行熱處理(後烘烤)。該後烘烤係以 為了提局經圖案化之遮光膜與基板的密著性等目的而進 订、。此係與預烘烤相同,以藉由烤箱、加熱板等加熱的方 式進行。本發明之經圖案化的遮光膜,係經 影法之各步驟而形成。 之破 在^以上之間隔壁形成步驟之預烘烤以及曝光步驟 、曲’含氟樹脂在間壁的頂面因本身的界面活性作用而被 浪縮。 以如以上方式形成之_隔壁的支撐基板中,例如 主1圖所不’在形成間隔壁2的部分以外的支撐基板I =面1&的純水接觸角幾乎都超過30度,此外因大氣中 ==使水接觸角隨著時間而增加,結果使得對於: 喷墨裝置進行印墨滴下此於本發明中’於 K. 洗處理的清洗步驟,㈣疋之β 清洗步驟,由於在表間隔壁的支撐基板。因該 氟樹脂與在間隔辟項面/:及間隔壁之側面2b殘留的含 表面之形成間隔壁之部分以外的^ 使支#基板1 印墨化處理,並同時使間p 、a進订親水化或親 墨化處理。另—方面,/ 側® 2b進行親水化或親印 述之含氟聚合物,而可和:間隔壁之頂面2a,因含有如前 在t、+、、主生 了抑制純水接觸角之降低。 在上述π洗步驟中, 、主 頂面h之純水的接觸角。心,洗步驟前之間隔壁之 n 1 /、在凊洗步驟後之間隔壁之頂 320324 30 200916852 面2a之純水的接觸角 觸角的降低率[(αι~α )二…、,使清洗步驟前後之該接 =方式所成之像素形成步驟(3) = 至間隔壁之頂面,亦可使印黑 呜于 成良好的像素。 ’土確!地回到像素内,而能形 行之法的具體例而言’可舉出從以驗性水溶液進 洗處理、準分子雷射清洗、電晕放 之气=中虱電漿處理中選出之1種以上的處理所構成 來’但藉由在放電部施加強力的磁場則亦可 了^\、,生。就此時的導入氣體而言,若因應需要除 面#2 H开用氣、氨、氮等氣體’則可控制間隔壁之頂 將a、互印墨性之降低’而給予較佳的結果。此外’就電 方法而言’可使用低頻放電、高頻放電、微波放 旦 工此外,可任意設定電漿處理時的、壓力、氣體流 =電頻率、處理時間等條件。例如,在壓力!她左 的減Μ下時,藉由氧氣流量為電力1·曙咖2 =氣\漿處理Μ獲得良好的結果。此外,在大氣壓下 二藉由氧氣机里80ccm、氦氣流量101/min、電力300W、 基板^距離lmm、支錄板之運送速度為馳油的 下之氧氣電漿連續處理,或藉由氣體流量 ^OOccm、氦氣流量1〇1/min、支撐基板之運送速度為加油 厭下之A電漿連續處理皆可獲得同樣的結果。大氣 土 %水在’又空使處理室内成為真空而可簡單地達成相同之 320324 31 200916852 表面改質的觀點來看為非常有效。 另方s #對驗性水溶液之清洗處王里,可例示例如 使用/辰度G.G4%至〇,1%之氫氧化卸水溶液或氫氧化納水溶 液等,使形成有間隔壁的支撐基板進行浸潰或喷霧之 理。針對處理時間,雖依處理條件而有所不同,但例如在 WOH時’在抑至抓進行3〇至8〇秒左右即可在 此外,針對UV清洗處理,例如可例示如使用— 於基板前處理清洗的紫外線’照射形成有間隔 二之支撐基板的處理。只要進行50〇s 2000mJ左右的uv 清洗處理,即可維持僅在間隔壁之頂面2 a殘留拒印墨性, =將間隔壁形成之部分以外的支撐基板之表面U、以及間 隔二之側面2b進行親水化或親印墨化處理。再者,在準分 子雷射清洗處理或電暈放電處理時,雖可在較短時間進行 處理’但與UV清洗相比不易抑制‘間隔壁頂表部之黑 性的降低。 ^ 如上述之清洗處理,係為用以從具備由含有含氟樹脂 之黑色阻劑所形成之間隔壁2的支樓基板1,去除間隔壁 /成之u卩刀以外的支撐基板之表面la,以及間隔壁之 π之拒印墨性的處理,藉此,僅在間隔壁之頂面2&殘留 2印墨性’且在將印墨賦予於藉由喷墨方式之像素形成步 、Α ()中以間隔壁2包圍的區域内時,被賦予於間隔壁之頂 的印墨回到區域内(像素内)之自行修復作用係、充分地 备揮功能’此外’在區域内印墨可充分且均勾地分散而可 防止如「白點」的現象。 320324 32 200916852 w在ΐί,清洗步驟(2)後’在以含氟遮光間隔壁包圍的 θ贺墨印刷法(喷墨方式)賦予印墨而使像素形 成。針對此時採用之哈: 、 之噴墨方式並無特別限制,可使用在濾 益、1\般使用的方法。喷墨頭從對有機溶劑之耐久 性與喷出量精度方面,以塵電⑻叫式(XAAR公司或 SPECTRA公司)者為佳,填充於被間隔壁所包圍之像素内 的印墨里,以乾無後之膜厚成為與間隔壁厚幾乎相同的程 度者為佳。亦即,例如從其印墨固形份-般為10至33% ^看,若要使間隔壁厚度為2_,需填充卿瓜至 度的印墨量。 此外本發明之濾色11間隔壁形成用感光性樹腊組成 、,例如只要藉由上述方法等成為遮光性遽色器間隔壁, j各種手段4置像素形成預定的顏色圖案,便可獲得遽 ,盗尤其疋,使用本發明之感光性樹脂組成物形成的濾 間隔壁,由於對基板之密著性優異且同時拒印墨性優 異’故適合在所得之遮光性濾色器間隔壁内藉由喷墨印刷 法形成像素而獲得濾色器。 (實施例) 以下,根據實施例以及比較例,㈣說明本發明之實 施形態。在此’於實施例、比較例之黑色阻劑之製造所使 用的調配成分係如下述。 (驗顯影性寡聚物之調整) <合成例1 > 環氧化合物(環氧當量 將源自9,9-雙(4-羥基苯基)荞之 320324 33 200916852 258)與1.01當量的丙烯酸和觸媒量(〇〇5當量)的四乙基溴 化銨一起於120 C加熱12小時,之後以丙二醇單甲基醚乙 酸酯稀釋而獲得環氧丙烯酸酯化合物溶液(固形份濃度=5 〇 重量%)。相對於該溶液l00g,添加聯苯基_3,3,,4,4,_四羧酸 *二酐U.lg、四羥基苯二甲酸酐5.76g,再加入丙二醇單甲 基醚乙酉夂酉曰使固形份濃度成為56 5%,於擾掉加熱4 小時,獲得含有鹼顯影性不飽和基寡聚物溶液(A-1,酸價 55.0mgK〇H/g)。 、 ,〈合成例2> 除了與合成例1使用之環氧化合物相同且環氧當量為 288以上之外,以與合成例1相㈣方式獲得含:彡 性不飽和基寡聚物溶液(Αϋ形份濃度5 酸價 56mgKOH/g)。 貝 〈合成例3> 在合成例4中,除了使聯苯基_3,3,,4,4,_四 為 W、四經基苯二甲酸酐6.9g之外,以同 驗顯影性残和絲㈣溶 目 有 酸價 55.5mgK〇H/g)。 嶋辰度 S6.5%, <合成例4> 準備使用9,9-雙(4-_其1 鈽其贫(工基_3''甲基本基)苐代替9,9-雔f 歹工基本基)苐的環氧化物(環氧各 又( _3,3,,4,4,-四綾酸_肝主 ),以使聯苯; 硬敞—酐為1〇·7 四 其他為與合成例相同 、土 、一甲酉夂酐5.5g 不飽和基寡聚物溶、夜(A工、仃合成’獲得含有鹼顯影'ί 液(Α-4,固形份濃度兄5%,酸價53m 320324 34 200916852 KOH/g)。 _ 將在骨架具有9,9-雙(4-羥基苯基)苐之環氧化合物(環 ' 氧當量258),與在骨架具有2,2-雙(4-羥基苯基)丙烷之環 氧化合物(環氧當量240)以3對1之重量份比混合之外,使 聯苯基-3,3',4,4'-四羧酸二酐為12.0g、四羥基苯二甲酸酐 6.2g,以與合成例1相同的方式進行,獲得含有鹼顯影性 不飽和基寡聚物溶液(A-5,固形份濃度56.5%,酸價57.2mg KOH/g)。 /(拒印墨性(甲基)丙烯聚合物的調整) <合成例6> 拒印墨劑 B-1 在具備攪拌機之内容積5公升的反應機放入 2MCA-bCF4 (352g)、IBMA(43.4g)、GMA(14.2g)、MMA (8.6g)、聚合起始劑V-70(8.8g)、鏈轉移劑2-ME(4.4g),再 以使固形份濃度成為40wt°/。的方式加入PGMEA,於氮氣 環境下攪拌,同時於40°C進行18小時聚合。降溫後,以 t 固形份濃度成為20wt%的方式於PGMEA稀釋中,而獲得 拒印墨劑B-1溶液。拒印墨劑B-1之重量平均分子量係為 7300。惟,重量平均分子量係藉由以THF為展開溶劑之 GPC所求得(PS換算)。 〈合成例7至13 > 在拒印墨劑 B-1的合成中,以將原料之調配量變更 如表1之外其餘以相同的方式進行,獲得拒印墨劑B-2至 B-6、以及樹脂溶液b-Ι(固形份濃度20wt%)。另外,如表 35 320324 200916852 1所示之各成分攔中的數值之單位為「g」。 (比較用(甲基)丙烯聚合物之調整) ’〈合成例14至15> 以與在合成例6使用之相同的合成法來合成甲基丙烯 .酸異莰酯共聚物溶液’獲得a-Ι以及a-2(固形份濃度 36.7wt%) ° 將原料之調配一併表示於表1。 在此’將在上述以及表1之化合物的簡略記號顯示於 I 下。minute. q i芏1U ^ Exposure after prebaking is performed by an exposure machine, and only a portion of the resist corresponding to the pattern is exposed by masking the exposure first. The exposure machine and the exposure conditions thereof are appropriately selected, and exposure is performed using ultra-high pressure mercury, high-pressure water wire, metal-gas lamp, and long-distance source light source to photoharden the resin composition for black resist in the coating film. The alkali _ after exposure is for the purpose of removing the unexposed portion of the seeker: the second broad form forms a desired pattern by the development. It is suitable for the alkali development Γ: for example, a metal or a soil-measuring metal dihydrate liquid, a metal hydroxide hydroxide, etc., but especially using sodium carbonate, acid Carbonate such as potassium or lithium carbonate is 0.05 to 3% by weight of the aqueous solution of the test solution. Precision formation of fine 320324 29 200916852 by a developing machine or ultrasonic cleaning machine sold by a surface, after being developed in this manner, heat treatment is performed at a temperature of 160 to 250 ° C and for 2 Torr to 1 Torr ( After baking). This post-baking is carried out for the purpose of improving the adhesion between the patterned light-shielding film and the substrate. This is the same as prebaking, and is carried out by heating in an oven, a hot plate or the like. The patterned light-shielding film of the present invention is formed by various steps of the photographic method. The pre-baking and the exposure step of the partition wall forming step of the above, and the fluorochemical resin are shrunk by the interface activity of the partition wall on the top surface of the partition wall. In the support substrate of the partition wall formed as described above, for example, the pure water contact angle of the support substrate I = face 1 & other than the portion where the partition wall 2 is formed is almost 30 degrees, and the atmosphere is further Medium == causes the water contact angle to increase with time, as a result of which: for the ink jet device, the ink is dripped, and in the present invention, the cleaning step of the K. washing process, (4) the β cleaning step, due to the inter-table Support substrate for the next wall. The fluororesin is printed on the substrate 1 other than the portion of the surface containing the partition surface/: and the side surface 2b of the partition wall which forms a partition wall, and at the same time, the intermediate p and a are ordered. Hydrophilic or ink-repellent treatment. On the other hand, / side ® 2b is hydrophilized or pro-labeled fluoropolymer, and can be: the top surface 2a of the partition wall, because it contains the same as in the t, +, and the main artificial inhibition of pure water contact angle Reduced. In the above π washing step, the contact angle of the pure water of the main top surface h. Heart, the n 1 / of the partition wall before the washing step, the top of the partition wall after the washing step 320324 30 200916852 2a pure water contact angle angle reduction rate [(αι~α) two..., so that cleaning The pixel formation step (3) formed by the connection method before and after the step = to the top surface of the partition wall, and the black mark can be made into a good pixel. ‘The earth is indeed! The specific example of the method of returning to the pixel can be exemplified by the treatment of the aqueous solution washing, the excimer laser cleaning, the corona discharge gas, and the plasma processing. One or more types of processing are configured to be 'but a strong magnetic field is applied to the discharge portion, and it is also possible to generate a ^. In the case of the introduction gas at this time, if it is necessary to remove the gas such as gas, ammonia, or nitrogen by the surface #2 H, it is possible to control the top of the partition wall to lower a and the ink resistance of the mutual print, and give better results. Further, in terms of the electric method, low-frequency discharge, high-frequency discharge, and microwave discharge can be used. Further, conditions such as pressure, gas flow = electric frequency, and processing time at the time of plasma treatment can be arbitrarily set. For example, under pressure! When she left the squat, she achieved good results by the oxygen flow rate of electricity 1 曙 2 2 = gas / pulp treatment. In addition, under atmospheric pressure, the oxygen plasma is continuously treated by 80ccm in the oxygen machine, the helium flow rate 101/min, the electric power 300W, the substrate distance lmm, the transfer speed of the sub-plate, or by the gas. The same result can be obtained by continuous treatment of A plasma with a flow rate of ^OOccm, a helium gas flow rate of 1 〇 1 min, and a support substrate transport speed. It is very effective from the viewpoint that the atmospheric water % water is vacuumed in the treatment chamber and can be easily achieved by the same 320324 31 200916852 surface modification. In the other side, the cleaning solution of the aqueous solution can be exemplified by using a G.G4% to 〇, a 1% aqueous solution of hydrogen hydroxide or an aqueous solution of sodium hydroxide, etc., so that the support substrate having the partition walls is formed. Dip or spray. Although the processing time varies depending on the processing conditions, for example, in the case of WOH, it can be carried out for about 3 to 8 seconds, and in addition, for the UV cleaning treatment, for example, it can be exemplified as used in front of the substrate. The treatment of the cleaned ultraviolet rays is irradiated to form a support substrate having two spacers. As long as the uv cleaning treatment is performed for about 50 〇s 2000 mJ, it is possible to maintain the ink repellent property only on the top surface 2 a of the partition wall, the surface U of the support substrate other than the portion where the partition walls are formed, and the side of the spacer 2 2b is subjected to hydrophilization or photo-inking treatment. Further, in the case of the quasi-molecular laser cleaning treatment or the corona discharge treatment, the treatment can be performed in a short period of time. However, it is less likely to suppress the decrease in the blackness of the partition wall top portion than the UV cleaning. ^ The cleaning treatment as described above is for removing the surface of the support substrate other than the partition wall/the burr from the support substrate 1 having the partition wall 2 formed of the black resist containing the fluorine resin. And the treatment of the ink repellency of the π of the partition wall, whereby only the ink surface of the top surface 2 & 2 of the partition wall is left and the ink is applied to the pixel forming step by the ink jet method. In the area surrounded by the partition wall 2 in (), the ink applied to the top of the partition wall returns to the self-repairing function in the area (inside the pixel), and the full-fledged function 'further' in the area It can be fully and evenly dispersed to prevent phenomena such as "white spots". 320324 32 200916852 w After the cleaning step (2), the ink is applied to the ink by the θ helium printing method (inkjet method) surrounded by the fluorine-containing light-shielding partition walls. There is no particular limitation on the ink jet method to be used at this time. It can be used in a filter or a general use method. The ink jet head is preferably made of dust (8) (XAAR or SPECTRA) in terms of durability against the organic solvent and the accuracy of the discharge amount, and is filled in the ink in the pixel surrounded by the partition wall, It is preferable that the film thickness after drying is almost the same as the thickness of the partition wall. That is, for example, from the viewpoint of the ink solid content of 10 to 33% ^, if the thickness of the partition wall is 2 _, the amount of ink to be filled is required. Further, the color filter 11 of the present invention is composed of a photosensitive wax for forming a partition wall. For example, if the light-shielding color filter partition wall is formed by the above-described method or the like, the various means 4 form a predetermined color pattern by the pixel, thereby obtaining 遽. In particular, the filter partition formed by using the photosensitive resin composition of the present invention is excellent in adhesion to the substrate and excellent in ink repellent at the same time. Therefore, it is suitable to borrow from the obtained light-shielding color filter partition wall. A color filter is obtained by forming a pixel by an inkjet printing method. (Embodiment) Hereinafter, embodiments of the present invention will be described based on examples and comparative examples. The formulation components used in the production of the black resists of the examples and the comparative examples are as follows. (Adjustment of developable oligomer) <Synthesis Example 1 > Epoxy compound (epoxy equivalent will be derived from 9,9-bis(4-hydroxyphenyl)fluorene 320324 33 200916852 258) and 1.01 equivalent The acrylic acid and the amount of catalyst (〇〇5 equivalents) of tetraethylammonium bromide were heated together at 120 C for 12 hours, and then diluted with propylene glycol monomethyl ether acetate to obtain an epoxy acrylate compound solution (solid concentration = 5 〇 weight%). Adding biphenyl_3,3,4,4,4-tetracarboxylic acid* dianhydride U.lg, tetrahydroxy phthalic anhydride 5.76g, and then adding propylene glycol monomethyl ether oxime relative to 100 g of the solution The solid content concentration was 56 5%, and the mixture was heated for 4 hours to obtain an alkali-developable unsaturated group-containing oligomer solution (A-1, acid value: 55.0 mgK〇H/g). <Synthesis Example 2> In addition to the epoxy compound used in Synthesis Example 1 and having an epoxy equivalent of 288 or more, a solution containing an anthracene-based unsaturated group was obtained in the same manner as in Synthesis Example 1 (IV). The concentration of 5 is acid value of 56 mgKOH/g). Shell <Synthesis Example 3> In Synthesis Example 4, except that biphenyl _3, 3, 4, 4, _4 was W and tetra-terephthalic anhydride was 6.9 g, And the silk (4) has an acid value of 55.5 mg K 〇 H / g).嶋 度 S S S S S S S S S S S S S S S S Equivalent epoxide (epoxide each (_3,3,4,4,-tetradecanoic acid_hepatic main) to make biphenyl; hard open-anhydride is 1〇·7 four others Same as the synthesis example, soil, a formaldehyde anhydride 5.5g unsaturated oligopolymer dissolved, night (A work, 仃 synthesis 'obtained with alkali-developed' liquid (Α-4, solid concentration concentration 5%, acid The price is 53m 320324 34 200916852 KOH/g). _ The epoxy compound (ring 'oxygen equivalent 258) having 9,9-bis(4-hydroxyphenyl)fluorene in the skeleton, and 2,2-double in the skeleton ( The epoxy compound of 4-hydroxyphenyl)propane (epoxy equivalent weight 240) is mixed in a ratio of 3 to 1 by weight, and biphenyl-3,3',4,4'-tetracarboxylic dianhydride is 12.0 g and 6.2 g of tetrahydroxyphthalic anhydride were carried out in the same manner as in Synthesis Example 1 to obtain a solution containing an alkali-developable unsaturated group oligomer (A-5, a solid concentration of 56.5%, an acid value of 57.2 mg KOH). /g) / (Adjustment of Repellent Ink (Meth) Propylene Polymer) <Synthesis Example 6> Repellent Ink B-1 In a reactor equipped with a 5 liter internal volume of a stirrer, 2MCA-bCF4 (352g), IBMA (43.4g), GMA (14.2g), MMA (8.6g), and a polymerization initiator V-70 (8.8g) were placed. The chain transfer agent 2-ME (4.4 g) was added to PGMEA in such a manner that the solid content concentration became 40 wt%, and the mixture was stirred under a nitrogen atmosphere while being polymerized at 40 ° C for 18 hours. After cooling, the solid content was t. The concentration of the coating was 20 wt% in the PGMEA dilution, and the ink-repellent ink B-1 solution was obtained. The weight average molecular weight of the ink-repellent ink B-1 was 7,300. However, the weight average molecular weight was obtained by using THF as a developing solvent. <Comparative Example 7 to 13 > In the synthesis of the ink-repellent ink B-1, the amount of the raw material was changed in the same manner as in Table 1, and the same manner was obtained. The inks B-2 to B-6 and the resin solution b-Ι (solid content concentration: 20% by weight) were rejected. Further, the unit of the numerical value of each component shown in Table 35 320324 200916852 1 was "g". (Adjustment of (meth) propylene polymer for comparison) 'Synthesis Examples 14 to 15> Synthesis of methacrylic acid by the same synthesis method as used in Synthesis Example 6. The acid isodecyl ester copolymer solution 'obtained a-Ι and a-2 (solid content concentration 36.7 wt%) ° The raw materials were formulated together and shown in Table 1. Here, the abbreviations of the compounds mentioned above and Table 1 Displayed under I.
2MCA-bCF4 : CH2=C-CH2C00-CH2CH2CF2CF2CF2CF3 I C00-CH2CH2CF2CF2CF2CF32MCA-bCF4 : CH2=C-CH2C00-CH2CH2CF2CF2CF2CF3 I C00-CH2CH2CF2CF2CF2CF3
2MCA-bCF6: CH2=C-CH2COO—CH2CH2CF2CF2CF2CF2CF2CF2CF3 I2MCA-bCF6: CH2=C-CH2COO-CH2CH2CF2CF2CF2CF2CF2CF2CF3 I
C00-CH2CH2CF2CF2CF2CF2CF2CF3 2NICA-HbF4 · CH2-C—CH^COOHC00-CH2CH2CF2CF2CF2CF2CF2CF3 2NICA-HbF4 · CH2-C—CH^COOH
I 、 coo-ch2ch2cf2cf2cf2cf3 2MGI-EtCF4: CH2=C—Cl G 1 coo-gh2ch2cf2cf2cf2cf3 2MCI~EtCF6: CH2=C—ClI, coo-ch2ch2cf2cf2cf2cf3 2MGI-EtCF4: CH2=C-Cl G 1 coo-gh2ch2cf2cf2cf2cf3 2MCI~EtCF6: CH2=C-Cl
I coo-ch2ch2cf2cf2cf2gf2cf2cf3 CF6MA : CH2=C(CH3)CO〇CH2CH2(CF2)5CF3 CFnMA : CH2=C(CH3)CO〇CH2CH2(CF2)nCF3 n=4 至 10 之 混合物 IBMA :曱基丙烯酸異莰酯 2-HEMA :甲基丙嫦酸2-經乙酉旨 320324 36 200916852 GMA :曱基丙烯酸環氧丙酯 MMA ··曱基丙烯酸甲酯I coo-ch 2ch 2 cf 2 cf 2 cf 2 2 2 2 -HEMA: Methylpropionic acid 2-Ethyl acetate 320324 36 200916852 GMA : Glycidyl methacrylate MMA · Methyl methacrylate
BzMA :甲基丙烯酸苯曱酯 V-70 : 2,2-偶氮雙(4-甲氧基-2,4-二曱基戊腈) 2-ME : 2-酼乙醇 表1 ί a~2 1 o 108.51 17.21 :35.2] 00 CO i 7000] (ΰ o i 86.8; : 14.2 丨 L 25.8: L. .35.¾ CO 00 : 8300: -Q : 213 : L 43.4; : 17.2: i 35.2: 00 CX) — : 6000: B-6 i : 272 : ί—— : 24.2: CO CO CO 00 寸 : 7500 B—5 : CM cv. i 43.4; : 24.2: to CO 00 σό tJ* : 6500; B—4 : 158 ! L ————辦: : 17.2: 00 CO — : 6300 B—3 : 226 : : 65.1; : 14.2: 00 CO : 6000; :B-2 ; ; 493 i L . 43.4; : 14.2: <〇 CO CO 00 寸 : 110001 t— CO CM in CO I_______43-4: ί__________14,2' CO CO CO CO 寸 7300 i2MCA~bCF4 !2MCA-bOF6 | £ ◦ 工 < O CM < I u_ _Ci-CF4 I I2MCI-CF6 I jCFnMA | liBMA | 12-HEMA | SGMA | SMMA I [BzMA | JV-70 52-ME 屮 <R Bl· _ w 37 320324 200916852 (濾色器用間隔壁形成用感光性樹脂組成物) <實施例1至19以及比較例1至4> ’首先將除了(A)成分之外的(B)至(E)成分以表2記載的 比例(重量份)混合,並與矽烷偶合劑s_51〇(信越化學 製)0.23重量份(F成分)一起添加丙二醇單甲醚乙酸酯,使 固形份濃度成為20重量%。接著,以表2記載的重量份添 加(A)成分;谷液’再添加梦糸界面活性劑557(花王 製)〇.〇〇5重量份(G-2成分)(僅在比較例4時為成分)。 接著使用2μιη之聚丙烯製膜濾網於〇.2kg/cm2加壓過濾, 調製濾色器間隔壁形成用感光性樹脂組成物。在表2中, 於(A)成分以及(B)成分的()内,以wt%顯示相對於全固形 伤之s周配比例。針對(E)成分之調配比例係在其他攔位顯示 相對於全固形份之(顏料/全固形份)wt〇/0。 320324 38 200916852表2 m cn 14.3 ,2.00 ! 2.02 1 1.21 CO CO 1 0.23 1 0.005 CO CO 〇 〇 〇 〇 〇 C0 esi S to CO s CO m CO 14.3 1.00 2.02 1.21 to CO i 0.23 ! 0.005 w CO 0 0 〇 〇 〇 CO 103 eg ΙΓ5 100 w r* 14.3 ,2.00 I 1 2.02 I n CO [0.23 | | 0.005 I n n 〇 〇 〇 〇 〇 CO ci 丨一丄〇—2—」 lf5 tn S CO in to 14.3 L. 1^0 1 ί 2.02 I L Ui I CO CO 1 0.23 1 1 0005 I ro CO 〇 〇 〇 〇 〇 05 eg o <N in L_ loo.. s m σ) 〇d 丨[00__I L.1.26...I Ι__1·26_ | O l〇 1 0.23 1 [0.005 | O in 〇 〇 〇 〇 〇 CO CO 1 100 s I 100 穿 寸 10.8 I i 1.00 1 L 1,53 . | L_1^g__ 1 芬 丨 023 1 1 0.005 i 〇 〇 〇 〇 〇 cn d o s <n cn o l〇 CO 14.3 I 1 4.00 | 1 2.02 1 丨 1.26 | CO n t 0.23 1 Γ 0.005 i fO CO 〇 〇 〇 〇 0 <M cj s CVJ in Oi 〇 5 二 14.3 | L-200 I 1 2.02 1 I 1-26 | n ¢0 | 0.23 1 Γ 0.005 l CO C5 〇 〇 〇 〇 〇 eo 〇i o C\J tr> o s ο 15.3 | lL〇〇」 1 2.16 I U-_26 1 1 0.23 1 1 0.005 i <-5 CO 〇 〇 〇 〇 〇 CO g CM kO I 102 s σ> 15.3 | ,1.00 I L紐.1 Γ.1.261 另 1 0.231 1 0.005 1 另 〇 〇 〇 〇 〇 cn csi o σ> Oi 骂 09 13.4 I 1.00 I 1 2.53 1 2 C5 CO 丨 023 j 1 0.005 | CO c〇 〇 〇 〇 〇 〇 « csi s CM m s r*-> 13.4 | 1.00 I ί 2.53 J l_Ui」 CO CO 1 0.23 1 1 0.005 1 CO CO 〇 〇 〇 〇 〇 CO 04 o 呑 σ> <n <〇 CD 13.4 I ,1.00 I r_2,53 1 丨丄2丄J o C9 f 0.23 | Γ0.005 1 CO CO 〇 〇 〇 〇 〇 CO csl CO σ> to to m 13.4 | too I 1 2·53_..1 ί 1-21 1 eo ¢0 Γ0.23Π 1 0.005 ! CO Λ 〇 〇 〇 〇 〇 oi o CM lO I 100 s 14.3 | LAPP」 I 2.02 1 L 1.21 I CO ro 1 0.23 1 1 0.005 1 CO CO 〇 〇 〇 〇 〇 n (N CO Oi 容 (£> CD 夺 CO 14.3 1 1.00 I Γ 2.02 1 I J--21 J CO CO I 0.23 ! 1 0.005 1 CO c〇 〇 〇 〇 〇 〇 CO c\i o I 100 s CM 14^1 1.00 I ΓΤ.02Ί I 1.21 I CO 1 0.23 1 1 0.005 1 CO CO 〇 〇 〇 〇 〇 eo s lO lO S fO in Ϊ 14.3 I r·» <d CO l 1,00 I ! 2.02 1 I 1.21 fO CO I 0.23 ! I 0.005 : o CO 〇 〇 〇 〇 〇 CO c-ί 丨水 ,100 |3CA | 52 O ? in cd in < S in to 1ft N < ? LO <d lO CO in <d lO < ? in to \a LD a-2(36.7%) | B-1 (20%) I B-2 (20%) | ? o CNJ ? CD B-4 (20%) | B-5 (20°/〇) 1 B-6 (20%) i § Ja 5 lC-2_ CO 1 〇 [D-1 I ID-2 1 I ___J [Gr2___I ί 函 \ 实 瑶 * IBCA | A成分 B成分 C成分 D成分 <R 恒 UJ 链 ll. G成分 ti 餘 m Μ 4 电 银 躲 蹈 撕 银 !3 C. E Q 〇 接觸a 接觸肖(1週後) 。伥·r#%lslg()w「衾染囫如\实埯」,令嘀(5,令噠(V):坊 39 320324 200916852 (is 寸 m CO τ—· CD <N CO c〇 CO o Τ Ο CO o 〇 〇 〇 〇 〇 <N oi O) CD o CO m CO σϊ τ— ο ovi CO ο CO co CNj r— CO ΓΟ CO CM O L〇 o o CO CO X X X X X cvj s T— in in o r·^· S 革 Μ CO σ> ο q 00 ο CO τ-· C^J CO CO CO CM d g o o CO ◦ 〇 X X 〇 X CNJ cvi σ> <〇 〇 口 Ϊ ±ί CO σ> r- · ο CO ο CO c\[ r * CO ro CO C4 d to o d CO CO 0 X X 〇 CM cvi c〇 00 CO c〇 CO T-* 在此,於實施例、比較例之感光性樹脂組成物之製造 所使用的調配成分係如下述。 A-6 :具有葬骨架之丙烯酸環氧酯的酸針聚縮合物之丙二 醇單甲基醚乙酸酯溶液(樹脂固形份濃度=56.1重量%,新 日鐵化學公司製,商品名V259ME)。 A-7··重量平均份子量30000、酸價之N-乙基馬來 亞胺/曱基丙烯酸/曱基丙稀酸苯曱酉旨共聚物的丙一醇單曱 基醚乙酸酯溶液(樹脂固形份濃度=36.7重量%)(N-乙基馬 來醯亞胺··甲基丙稀酸:曱基丙烯酸苯甲酯二29 : 20 : 5 lmol%) (Μ :二季戊四醇六丙烯酸酯與二季戊四醇五丙烯酸酯的混 合物(曰本化藥(股)製,商品名DPHA)。 C-2 :二季戊四醇四丙稀酸酯(共榮化學公司(股)製’商品 名 ΤΜΡ-Α)。 C-3:三羥曱基丙烷三曱基丙烯酸酯(共榮化學公司(股) 40 320324 200916852 製,商品名PE-4A)。 D-l : OXE-01(Ciba Specialty Chemicals 製)。 D-2 : OXE-02(Ciba Specialty Chemicals 製)。 E-1 :碳黑濃度20重量%,高分子分散劑濃度5重量%之 丙二醇單曱基醚乙酸酯分散液(固形份25%)。 F-1 :矽烷偶合劑S-510(信越化學(股)製)。 G-1 :氟系界面活性劑MEGAFAC F-470(大曰本印墨製)。 G-2 :矽系界面活性劑SH3557(花王製) 將在上述實施例、比較例所得之濾色器間隔壁形成用 感光性樹脂組成物,使用旋塗機以後烘烤後之膜厚成為 2.1 μιη的方式塗佈在i25mmxl25mm的玻璃基板上,並於 80°C進行1分鐘之預烘烤。之後,在將曝光間隙調整為 80μιη的乾燥塗膜上,覆蓋行/間距(iine Space)=2〇pm/20pm 的負型光罩’並以I線照度30mW/cm2之超高壓水銀燈照 射100mj/cm2之紫外線來進行感光部分的光硬化反應。 接著’將該已曝光塗板在0.05%氳氧化鉀水溶液中, 於23 C進行60秒或8〇秒之ikgf/cm2壓力淋浴顯影以及 5kgf/cm2壓力之噴灑水洗,並將塗膜之未曝光部分去除而 在玻璃基板上形成像素圖案,之後,使用熱風乾燥機於23〇 C進行30分鐘的熱後烘烤。實施例、比較例之黑矩 〇 估項目與方法係如以下所示。 勺坪 膜厚:使用探針式膜厚計(東京精密(股)製,商品名Surfc 顯影性,.、以顯微鏡觀察顯影後之像素圖案,將無法確^ 對基板之剝離或圖案邊緣部份之殘缺不均者評佑 320324 41 200916852 為〇< 良好>,有確認到上述現象者評估為以不良〉。 塗膜表面粗糙度:顯影,熱煅燒後之塗膜的表面粗糙度(Ra) 之值未達150 A評估為〇< 良好>,在15〇 a以上呼 估為乂<不良〉。 圖案密著性:在剝離測驗中無法確認20μπι圖案之剝離者 評估為〇< 良好>,確認有剝離者評估為χ<不良>。 pct密著性:將已實施後烘烤之圖案形成基板,在121。〇、 100%RH、2atm、24 小時之條件下實施 PCT(Pressure Cooker Test,壓力鍋測試)後,於2〇μιη圖案部貼附 透明膠帶進行剝離測驗來評估圖案密著性。 OD測定.使用後烘烤後2· 1μιη的塗膜,並使用大塚電子 製OD §十測定’且記載為1 μιη的〇d值。 接觸角測Πί由上述之同樣的方法,在顯影後於玻璃基 板上形成黑色之10mmxl〇mmx2 1μηι的四角圖宰。 在該黑色塗膜上㈣水或是丁基卡必醇乙酸醋 (BCA)’測定靜態接觸角。進一步將該黑色塗膜於 23°C5G%濕度條件下放置丨週後,再度敎靜態接 。上述之結果’在實施例中任一者皆滿足作為遮光性讀 色器間隔壁的各特性,且靜態接觸角在水、丁基卡必醇: 酸S旨中皆南’此外即使妨罢〗_、田L< " * , 便放置1週也幾乎沒有觀察到有降你 的情形。另一方面,在使用一妒丘取入 " 叙,、來s甲基丙埽酸黏合劑 之比較例1以及2中,卽祐4 < 磁 ^ v 即使加入拒印墨劑其相溶性亦不夠 充为’於顯影性的劣化、表 衣囱祖糙度的另化、或在比較例 320324 42 200916852 _ 支鏈長之直線性等的製版特性方面出現問題。在比 ,較例4中,以界面活性劑程度無法獲得充分的拒印墨性, 且放置1週可觀察到降低的傾向。 <實施例20> - 使用在實施例1所得的樹脂組成物,形成開口部 %〇Mmxl0(^m以及BM線3〇μιη、膜厚2 的矩陣。之 後、,在氧大氣壓電漿進行處理3秒鐘後,於CF4大氣壓電 漿進行處理3秒鐘。在該黑色塗膜上使用水或丁基卡必醇 乙酸醋(BCA),測量靜態接觸角時,分別顯示1GG。、50。。 使用東之TEC製噴墨頭,朝向該黑矩陣中噴入黏度 。9^爾、固形份濃度2〇%之紅、藍、、綠的印墨,並於23〇 c進订後烘烤,而形成濾、色器。所得之濾、色器在相鄰區域 中並無印墨混色而為良好濾色器。 (濾色器之製造) <調製例1>黑色阻劑BKd 將11.8重1份之A_6(固形份濃度56 5〇/小4 2重量份 =A-7(固形份濃度36 7%)、2 ι重量份之u重量 X及33重量份之E-l(碳濃度20%),接著以使 :成為20%的方式與石夕烧偶合劑s_51〇(信越化學 •I 0.23重量份一起加入丙二醇單曱基醚乙酸醋。接著,添 /加在上述所得之含氟樹脂Β·1溶液(固形份濃度20%)1重量 系界面活性劑SH3557(花王製)議重量份。將該 :°〆奋液使用之聚丙烯製膜遽網於〇.2kg/cm2加壓過 濾’調製黑色阻劑BK-1。 320324 43 200916852 •〈凋製例2>黑色阻劑ΒΚ-2 除了將含氟樹脂B —丨溶液$ .例1相同的方式進行,,得里 以與調製 她,"> 黑色阻二;:黑色阻劑犯2。 - 除了將含氟樹脂Β· 1滋:、、虑、天4 例1相同的方式進行,與Γ里I 量份以外以與調製 <調製例Μ色二;:黑色阻劑孤3。 Γ製例^^^旨…溶液添力…重量份以外以與調 衣1夕J 1相同的方式進行,驊 <調製例5>黑色阻劑瓜5又〜、且劍见4。 製例i相同:液添加°,1重量份以外以與調 megafac 會曰卜 印墨製)〇.2重量份代替犯3557(花王製)0 005 -βΚ.6 〇 ,、騎例1相同的方式進行,獲得黑色阻劑 〔實施例21〕 料例1所得之黑矩陣BK],使用旋塗機以後 玻璃美板上、成為2.1μΠ1的方式塗佈在125_125麵的 敕並於,C進行1分鐘之預供烤。之後,在將 曝先間二调整為150μπι的乾燥塗膜上,覆m線寬 μπι、開口部為70x210_的負型光罩,並以 产 3〇爾m2之超高壓水銀燈照射^啊/咖2之紫外線來ς 320324 200916852 行感光部分的光硬化反應。 接著,將該已曝光塗板在0.05%氫氧化鉀水溶液中, 於23 C進行60秒或80秒之lkgf/cm2壓力淋浴顯影以及 5kgf/cm2壓力之喷灑水洗,將塗膜之未曝光部分去除而在 玻璃基板上形成像素圖案,之後,使用熱風乾燥機於Mo C進行30分鐘的熱後烘烤,而形成膜厚21μιη的間隔壁。 測定此時之遮光間隔壁之頂面2b之純水接觸角、以及^形 成間隔壁之玻璃基板的表面u之純水接觸角。另外,膜厚 的測定係使用探針式膜厚計(東京精密(股)製,商品^ ^urfcom)進行測定。此外,接觸角的測定係測定在2叫爪 寬之間隔壁形成基板與在同一基板上形成之lmm寬⑽厚 黑框架上以及在間隔壁圖案周圍之玻璃 水 靜態接觸角。 ^ 接著,針對形成該間隔壁的支撐基板,以氧氣壓8pa V進行3秒鐘之各條件,❹平行平板型電漿處理束^ =電漿i面清洗處理(清洗步驟)。如表3所記载,^ 有^低後之遮光間隔壁之頂面^之純水接觸角浴 有降低太多(轉L06%)。另—方面,在清 : 玻璃基板表面U的純水接觸角係未達度。厂 此外’使用東芝TEC製喰黑葩, 後之支撐基板的間隔辟包圍f σ以上述清洗步驟 " 包圍的區域(像素内),嗔入❹ 9mPa.sec、固形份濃度聽之紅、誌)贺入黏度 。⑽行後烘烤,而形成濾色器。此; 隔壁與印墨的界面是否產生掉色光=色以及在間 使用先學顯微鏡,以穿 320324 45 200916852 透光、50倍倍率進行觀察時(〇:良好,不良),如表, 所示,皆未觀察到混色以及白點。進一步擴大剖面觀察時, 可確認到印墨以平坦的形狀與間隔壁之側面^密著。 〔實施例22至24〕 ^ 除了使用在上述調整例2至4調製之黑色阻劑bk_2 至4以外’係以與上述實施例j同樣的方式,在支樓基板 上形成間隔壁(實施例2 ·· BK-2、實施例l bk_3、實施例 4 : BK-4),之後,施以氧電漿表面處理,評估預定部位之 純水接觸肖。此外,使料洗步職之各支撐基板,與實 施例1相同地形成濾色器,評估混色與白點。將結果顯示 於表3。 [比較例5至6] 、除了使用在上述調整例5至6調製之黑色阻劑BK_5 至6以外,係以與上述實施例丨同樣的方式,在支撐基板 上形成間隔壁(比較例5 : BK-5、比較例6 : Βκ_6),之後, 施以氧電漿表面處理,評估預定部位之純水接觸角。此外, 使,清洗步驟後之各支撐基板’與實施例!相同地形成遽、 色器,評估混色與白點。將結果顯示於表3。可得知任一 者皆藉由氧電漿處理’而與實施例之結果相比在遮光間隔 壁之頂面2a的純水接觸角係顯著地降低。 320324 46 200916852 表3BzMA: phenyl decyl methacrylate V-70 : 2,2-azobis(4-methoxy-2,4-dimercapto valeronitrile) 2-ME : 2-indole ethanol Table 1 ί a~2 1 o 108.51 17.21 :35.2] 00 CO i 7000] (ΰ oi 86.8; : 14.2 丨L 25.8: L. .35.3⁄4 CO 00 : 8300: -Q : 213 : L 43.4; : 17.2: i 35.2: 00 CX ) — : 6000: B-6 i : 272 : ί—— : 24.2: CO CO CO 00 inch: 7500 B—5 : CM cv. i 43.4; : 24.2: to CO 00 σό tJ* : 6500; B—4 : 158 ! L ———— Office: : 17.2: 00 CO — : 6300 B—3 : 226 : : 65.1; : 14.2: 00 CO : 6000; :B-2 ; ; 493 i L . 43.4; : 14.2: <〇CO CO 00 inch: 110001 t—CO CM in CO I_______43-4: ί__________14,2' CO CO CO CO inch 7300 i2MCA~bCF4 !2MCA-bOF6 | £ &工< O CM < I u_ _Ci- CF4 I I2MCI-CF6 I jCFnMA | liBMA | 12-HEMA | SGMA | SMMA I [BzMA | JV-70 52-ME 屮<R Bl· _ w 37 320324 200916852 (Photosensitive resin group for partition wall formation for color filters) <Examples 1 to 19 and Comparative Examples 1 to 4> 'First, components (B) to (E) other than the component (A) were mixed at a ratio (parts by weight) shown in Table 2, and decane was added. To the coupling agent s_51 (manufactured by Shin-Etsu Chemical Co., Ltd.), 0.23 parts by weight (component F) was added together with propylene glycol monomethyl ether acetate so that the solid content concentration was 20% by weight. Next, the component (A) was added in the weight part shown in Table 2, and the Moon Liquid' was further added with 5% by weight of the Nightmare Surfactant 557 (manufactured by Kao) (G-2 component) (only in Comparative Example 4) As an ingredient). Subsequently, a 2 μm η polypropylene film filter was used under pressure filtration at 2 kg/cm 2 to prepare a photosensitive resin composition for forming a color filter partition. In Table 2, in (A) component and () component (), the s weekly ratio with respect to the total solid injury is shown in wt%. The blending ratio for the component (E) is shown in other barriers relative to the full solids (pigment/full solids) wt〇/0. 320324 38 200916852表2 m cn 14.3 ,2.00 ! 2.02 1 1.21 CO CO 1 0.23 1 0.005 CO CO 〇〇〇〇〇C0 esi S to CO s CO m CO 14.3 1.00 2.02 1.21 to CO i 0.23 ! 0.005 w CO 0 0 〇〇〇CO 103 eg ΙΓ5 100 wr* 14.3 , 2.00 I 1 2.02 I n CO [0.23 | | 0.005 I nn 〇〇〇〇〇CO ci 丨一丄〇—2—” lf5 tn S CO in to 14.3 L. 1^0 1 ί 2.02 IL Ui I CO CO 1 0.23 1 1 0005 I ro CO 〇〇〇〇〇05 eg o <N in L_ loo.. sm σ) 〇d 丨[00__I L.1.26...I Ι__1·26_ | O l〇1 0.23 1 [0.005 | O in 〇〇〇〇〇CO CO 1 100 s I 100 wear inch 10.8 I i 1.00 1 L 1,53 . | L_1^g__ 1 Fen 023 1 1 0.005 i 〇〇〇〇〇cn dos <n cn ol〇CO 14.3 I 1 4.00 | 1 2.02 1 丨1.26 | CO nt 0.23 1 Γ 0.005 i fO CO 〇〇〇〇0 <M cj s CVJ in Oi 〇5 II 14.3 | L-200 I 1 2.02 1 I 1-26 | n ¢0 | 0.23 1 Γ 0.005 l CO C5 〇〇〇 〇〇eo 〇io C\J tr> os ο 15.3 | lL〇〇" 1 2.16 I U-_26 1 1 0.23 1 1 0.005 i <-5 CO 〇〇〇〇〇CO g CM kO I 102 s σ> 15.3 | , 1.00 IL New Zealand.1 Γ.1.261 Another 1 0.231 1 0.005 1 〇〇〇〇〇cn csi o σ> Oi 骂09 13.4 I 1.00 I 1 2.53 1 2 C5 CO 丨023 j 1 0.005 | CO c〇 〇〇〇〇〇« csi s CM msr*-> 13.4 | 1.00 I ί 2.53 J l_Ui" CO CO 1 0.23 1 1 0.005 1 CO CO 〇〇〇〇〇CO 04 o 呑σ><n<〇 CD 13.4 I , 1.00 I r_2, 53 1 丨丄 2丄J o C9 f 0.23 | Γ0.005 1 CO CO 〇〇〇〇〇CO csl CO σ> to to m 13.4 | too I 1 2·53_..1 ί 1-21 1 eo ¢0 Γ0.23Π 1 0.005 ! CO Λ 〇〇〇〇〇oi o CM lO I 100 s 14.3 | LAPP" I 2.02 1 L 1.21 I CO ro 1 0.23 1 1 0.005 1 CO CO 〇〇 〇〇〇n (N CO Oi capacity (£> CD wins CO 14.3 1 1.00 I Γ 2.02 1 I J--21 J CO CO I 0.23 ! 1 0. 005 1 CO c〇〇〇〇〇〇CO c\io I 100 s CM 14^1 1.00 I ΓΤ.02Ί I 1.21 I CO 1 0.23 1 1 0.005 1 CO CO 〇〇〇〇〇eo s lO lO S fO in Ϊ 14.3 I r·» <d CO l 1,00 I ! 2.02 1 I 1.21 fO CO I 0.23 ! I 0.005 : o CO 〇〇〇〇〇CO c-ί 丨水,100 |3CA | 52 O ? in Cd in < S in to 1ft N < ? LO <d lO CO in <d lO < ? in to \a LD a-2(36.7%) | B-1 (20%) I B-2 (20%) | ? o CNJ ? CD B-4 (20%) | B-5 (20°/〇) 1 B-6 (20%) i § Ja 5 lC-2_ CO 1 〇[D-1 I ID-2 1 I ___J [Gr2___I ί letter \ 实瑶* IBCA | A component B component C component D component <R constant UJ chain ll. G component ti residual m Μ 4 electric silver hides tearing silver! 3 C. EQ 〇 Contact a contact Shaw (after 1 week).伥·r#%lslg()w “衾染囫如\实埯”,令嘀 (5,令哒(V):坊39 320324 200916852 (is inch m CO τ—· CD <N CO c〇CO o Τ Ο CO o 〇〇〇〇〇<N oi O) CD o CO m CO σϊ τ— ο ovi CO ο CO co CNj r— CO ΓΟ CO CM OL〇oo CO CO XXXXX cvj s T—in in or ·^· S Μ Μ CO σ> ο q 00 ο CO τ-· C^J CO CO CO CM dgoo CO ◦ 〇 XX 〇X CNJ cvi σ><〇〇口Ϊ±ί CO σ> r- · ο CO ο CO c\[ r * CO ro CO C4 d to od CO CO 0 XX 〇CM cvi c〇00 CO c〇CO T-* Here, the manufacturing facilities of the photosensitive resin compositions of the examples and the comparative examples The compounding ingredients used are as follows: A-6: propylene glycol monomethyl ether acetate solution of acid needle polycondensate of acrylic acid epoxy ester having a burial skeleton (resin solid concentration = 56.1% by weight, Nippon Steel Chemical Co., Ltd.) Company-made, trade name V259ME). A-7··weight average molecular weight 30000, acid value N-ethyl maleimide/mercaptoacrylic acid/mercapto acrylic acid benzoquinone Copolymer of propanol monodecyl ether acetate solution (resin solids concentration = 36.7 wt%) (N-ethyl maleimide · methyl methacrylate: benzyl methacrylate 2 29 : 20 : 5 lmol%) (Μ : a mixture of dipentaerythritol hexaacrylate and dipentaerythritol pentaacrylate (manufactured by Sakamoto Chemical Co., Ltd., trade name DPHA). C-2: dipentaerythritol tetrapropyl acrylate ( Co-Rong Chemical Co., Ltd. (commodity name ΤΜΡ-Α). C-3: Trihydromethane propane tridecyl acrylate (Kyoei Chemical Co., Ltd. 40 320324 200916852, trade name PE-4A). Dl: OXE-01 (manufactured by Ciba Specialty Chemicals) D-2: OXE-02 (manufactured by Ciba Specialty Chemicals) E-1: carbon black concentration: 20% by weight, polymer dispersant concentration: 5% by weight of propylene glycol monodecyl group Ether acetate dispersion (solids 25%). F-1 : decane coupling agent S-510 (manufactured by Shin-Etsu Chemical Co., Ltd.). G-1: fluorine-based surfactant MEGAFAC F-470 (manufactured by Otsuka Ink Printing Co., Ltd.). G-2: lanthanide surfactant SH3557 (manufactured by Kao) The film thickness of the photosensitive resin composition for forming a color filter partition obtained in the above Examples and Comparative Examples was changed to 2.1 after baking with a spin coater. The film was applied to an i25 mm x 25 mm glass substrate and prebaked at 80 ° C for 1 minute. Thereafter, on a dry coating film having an exposure gap adjusted to 80 μm, a negative mask of iine Space = 2 〇 pm / 20 pm was covered and irradiated with an ultrahigh pressure mercury lamp having an I illuminance of 30 mW/cm 2 at 100 mj/ The ultraviolet light of cm2 is used for the photohardening reaction of the photosensitive portion. Then, the exposed plate is subjected to a pressure-exposure of IKgf/cm2 for 30 seconds or 8 seconds at 23 C for 30 seconds or 8 seconds, and a spray of water of 5 kgf/cm 2 is applied, and the unexposed portion of the coating film is applied. The pixel pattern was formed on the glass substrate by removal, and then subjected to hot post-baking at 23 ° C for 30 minutes using a hot air dryer. The black moment estimation items and methods of the examples and comparative examples are as follows. The film thickness of the spoon is: using a probe type film thickness meter (Tokyo Precision Co., Ltd., trade name Surfc developability, and observing the developed pixel pattern with a microscope, the peeling of the substrate or the edge portion of the pattern cannot be confirmed. The disability is not recommended. 320324 41 200916852 is 〇<good>, it is confirmed that the above phenomenon is evaluated as bad>. Surface roughness of the coating: development, surface roughness of the coating after thermal calcination (Ra The value of less than 150 A is evaluated as 〇 < good >, and it is estimated to be 乂 &;; bad > above 15〇a. Pattern adhesion: It is not possible to confirm the peel of the 20μπι pattern in the peeling test as 〇<; Good >, confirmed that the peeler was evaluated as χ <Bad>. pct Adhesiveness: The pattern was formed by post-baking, and was carried out under conditions of 121 〇, 100% RH, 2 atm, 24 hours. After the PCT (Pressure Cooker Test), a transparent tape was attached to the 2〇μιη pattern portion to perform a peeling test to evaluate the pattern adhesion. OD measurement. After the baking, the coating film of 2·1 μm was used, and the large-sized electron was used. OD § ten determination 'and remember The value of 〇d is 1 μηη. Contact angle measurement Π 由 The same method is used to form a black square 10mmxl 〇mmx2 1μηι on the glass substrate after development. On the black coating film The static contact angle was measured by carbitol acetate vinegar (BCA). Further, the black coating film was placed at 23 ° C under 5 G% humidity for a week, and then statically connected. The above results were performed in either of the examples. It satisfies the characteristics of the partition wall as a light-shielding color reader, and the static contact angle is in water, butyl carbitol: acid S is in the middle of 'the other thing, even if it is OK _, Tian L<" *, put 1 Zhou has hardly observed any situation that has caused you to drop. On the other hand, in Comparative Examples 1 and 2 using a 妒 取 , , , , , , , , 比较 4 4 4 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较 比较Magnetic v. v. Even if the ink-repellent ink is added, the compatibility is insufficient to make it into the deterioration of the developability, the change of the surface roughness, or the plate making in the comparative example 320324 42 200916852 _ the length of the branch length There is a problem with the characteristics. In comparison, in Example 4, the degree of surfactant is not A sufficient ink repellent property was obtained, and a tendency to decrease was observed after being left for one week. <Example 20> - Using the resin composition obtained in Example 1, the opening portion %〇Mmx10 (^m and BM line 3) was formed. 〇μιη, a matrix of film thickness 2. After that, after treatment in an oxygen atmosphere piezoelectric slurry for 3 seconds, it was treated in CF4 atmospheric piezoelectric slurry for 3 seconds. Water or butyl carbitol acetic acid was used on the black coating film. Vinegar (BCA), when measuring static contact angle, shows 1GG. 50. . The viscosity was injected into the black matrix using an East TEC inkjet head. 9^尔, solid red, blue, and green ink with a concentration of 2〇%, and baked at 23〇c, forming a filter and a color filter. The resulting filter and color filter have no ink color mixing in adjacent areas and are good color filters. (Production of color filter) <Preparation Example 1> Black Resistant BKd A1 of 1 part by weight of A1 (solid content concentration of 5 5 Å / small 4 2 parts by weight = A-7 (solid content concentration: 36 7%), 2 parts by weight of u by weight X and 33 parts by weight of El (carbon concentration: 20%), and then adding propylene glycol alone with the sho singer s_51 〇 (Shin-Etsu Chemical•I 0.23 parts by weight in such a way as to become 20% Mercaptoether acetate vinegar, then added/added to the fluororesin Β·1 solution obtained above (solid content concentration 20%) 1 part by weight surfactant SH3557 (Kao) made by weight. The polypropylene film made by the liquid is filtered at a pressure of 2 kg/cm2 to modulate the black resist BK-1. 320324 43 200916852 • <For example 2> Black resist ΒΚ-2 In addition to the fluororesin B —丨 Solution $. Example 1 is carried out in the same way, and it is prepared to modulate her, "> black resistance 2: black resist 2. - In addition to fluororesin Β·1 滋:,, worry, day 4 cases 1 were carried out in the same manner, except for the amount of II, and the modulation <modulation example Μ色二;: black resist 孤3. Γ ^^^^^^^^^^^^^^^^^^^^^^^^^^^^ The dressing is performed in the same manner as J1, and 骅<modulation example 5> black resist melon 5 is again ~ and the sword is seen 4. The same is the case: liquid addition °, 1 part by weight, and megafac卜. 2 parts by weight, in place of 3557 (Kinghua) 0 005 -βΚ.6 〇, in the same manner as in Example 1, to obtain a black resist [Example 21] The black matrix obtained in Example 1 BK], after coating with a spin coater on a glass plate, 2.1 μΠ1, coated on a 125-125 surface, and C was pre-baked for 1 minute. Thereafter, the exposure was adjusted to 150 μm. On the coating film, a negative mask with a m line width of μπι and an opening of 70x210_ is used, and an ultraviolet light of 3 〇 m2 is used to illuminate the ultraviolet light of the ah/coffee 2 ς 320324 200916852 Photohardening of the photosensitive portion Next, the exposed coated plate is subjected to a pressure shower development of lkgf/cm2 for 60 seconds or 80 seconds at 60 C or a pressure of 5 kgf/cm 2 under a pressure of 0.05% potassium hydroxide aqueous solution, and the coating film is not exposed. Partial removal to form a pixel pattern on a glass substrate, after which a hot air dryer is used in Mo C After 30 minutes of hot post-baking, a partition wall having a film thickness of 21 μm was formed. The pure water contact angle of the top surface 2b of the light-shielding partition wall at this time, and the pure water contact of the surface u of the glass substrate forming the partition wall were measured. In addition, the measurement of the film thickness was performed using a probe type film thickness meter (manufactured by Tokyo Seimi Co., Ltd., product ^^urfcom). Further, the contact angle was measured by measuring the static contact angle of the glass water on the partition wall forming substrate having a width of 2 and the 1 mm wide (10) thick black frame formed on the same substrate and around the partition pattern. Next, the supporting substrate on which the partition wall is formed is subjected to various conditions of oxygen pressure of 8 Pa V for 3 seconds, and the parallel plate type plasma processing beam is subjected to a plasma i-side cleaning treatment (cleaning step). As shown in Table 3, there is a decrease in the pure water contact angle bath of the top surface of the light-shielding partition wall after the lowering (the L06%). On the other hand, in clear: the pure water contact angle of the surface U of the glass substrate is not reached. In addition, 'the use of Toshiba TEC made black enamel, the rear of the support substrate is surrounded by f σ in the above-mentioned cleaning step " surrounded by the area (in pixels), ❹ 9mPa.sec, solid concentration, red, ambition ) He entered the viscosity. (10) Post-row baking to form a color filter. This; whether the interface between the partition wall and the ink produces a color drop = color and the use of a microscope before use, to observe 320324 45 200916852 light transmission, 50 times magnification (〇: good, bad), as shown in the table, No color mixing or white spots were observed. When the cross-sectional observation was further enlarged, it was confirmed that the ink was adhered to the side surface of the partition wall in a flat shape. [Examples 22 to 24] ^ A partition wall was formed on the support substrate in the same manner as in the above-described embodiment j except that the black resists bk_2 to 4 modulated in the above-mentioned adjustment examples 2 to 4 were used (Example 2) BK-2, Example 1 bk_3, and Example 4: BK-4), after which an oxygen plasma surface treatment was applied to evaluate the pure water contact shaw of the predetermined portion. Further, a color filter was formed in the same manner as in Example 1 for each of the support substrates for the washing step, and the color mixture and the white spots were evaluated. The results are shown in Table 3. [Comparative Examples 5 to 6] A partition wall was formed on the support substrate in the same manner as in the above-described Example except that the black resists BK_5 to 6 modulated in the above-described adjustment examples 5 to 6 were used (Comparative Example 5: BK-5, Comparative Example 6: Βκ_6), after which an oxygen plasma surface treatment was applied to evaluate the pure water contact angle of the predetermined portion. In addition, each support substrate ’ after the cleaning step is the same as the embodiment! The enamel and color are formed in the same manner, and the color mixture and the white point are evaluated. The results are shown in Table 3. It can be seen that the pure water contact angle of the top surface 2a of the light-shielding partition wall is remarkably lowered as compared with the results of the examples by either of the oxygen plasma treatment. 320324 46 200916852 Table 3
[比較例7至9] 在實施例21、22、以及比較例6中,對於形成間隔壁的 支撐基板不進行氧電漿處理,而以噴墨裝置將印墨灌入。 此時,在以間隔壁包圍的區域(像素内)之任一者的印墨之 展開性皆為不佳,尤其是在像素内之角落中觀察到白點。 此外,在將剖面放大觀察時,印墨在間隔壁之側面附近的 厚度變薄’沒有與間隔壁充分地密著。 [實施例25至28以及比較例1〇至i η (UV清洗) 代替在貫施例21至24以及比較例5至6中進行的氧 電桌清洗,進行30秒鐘超高壓水銀燈之uv(紫外線)清洗, 並"平估在預定部位之純水接觸角。此外,使用清洗步驟後 之各支樓基板’與實施例相同地形成濾色器,並評估混色 以及白點。將結果顯示於表4。 47 320324 200916852 表4 純水 接觸角 DUV處理 實施例25 1% 實施例26 2% 實施例27 4% 實施例28 0.3% 比較例10 0.1% 比較例Π 0% 間隔壁 頂面 前 94 100 102 92 91 93 後 89 95 98 89 81 70 玻璃基板 表面 前 30 35 40 30 34 27 後 17 20 20 17 15 22 IJ塗佈(電 漿處理後) 混色 〇 〇 〇 〇 X X 白點 〇 〇 〇 〇 〇 [實施例29] (電暈清洗) 針對开> 成間隔壁之支樓基板的清洗處理,除了進行電 暈放電處理代替氧電漿處理以外以與實施例1相同的方 式孑估在預定部位之純水接觸角。此外,使用清洗步驟 後之支撐基板,與實施例1相同地形成濾色器,並評估混色 以及白點。將結果顯示於表5。 [實施例30] (鹼清洗) 針對形成間隔壁之支撐基板的清洗處理,除了進行. 氫氧化鈉溶液之驗清洗(饥,1分鐘之淋浴清线 處理以相與實施例1相同的方式,評估在預: 、,水接觸角。此外,使用清洗步驟後之支撐A、 與實施例U日/ Μ说·^又保基板 果顯示於表5 錢、色器’並評估混色以及白點。心 320324 48 200916852 表5[Comparative Examples 7 to 9] In Examples 21 and 22 and Comparative Example 6, the support substrate on which the partition walls were formed was not subjected to the oxygen plasma treatment, but the ink was poured by the ink jet apparatus. At this time, the spreadability of the ink in any of the regions (inside the pixels) surrounded by the partition walls is poor, and in particular, white spots are observed in the corners of the pixels. Further, when the cross section is enlarged, the thickness of the ink near the side surface of the partition wall is made thin, and it is not sufficiently adhered to the partition wall. [Examples 25 to 28 and Comparative Examples 1 to i η (UV cleaning) Instead of the oxygen table cleaning performed in the respective Examples 21 to 24 and Comparative Examples 5 to 6, the UV of the ultrahigh pressure mercury lamp was performed for 30 seconds ( UV) cleaning, and "evaluate the pure water contact angle at the intended location. Further, a color filter was formed in the same manner as in the example using each of the substrate substrates after the cleaning step, and color mixing and white spots were evaluated. The results are shown in Table 4. 47 320324 200916852 Table 4 Pure water contact angle DUV treatment Example 25 1% Example 26 2% Example 27 4% Example 28 0.3% Comparative Example 10 0.1% Comparative Example Π 0% Front wall top 94 100 102 92 91 93 After 89 95 98 89 81 70 Glass substrate surface front 30 35 40 30 34 27 Rear 17 20 20 17 15 22 IJ coating (after plasma treatment) Color mixing 〇〇〇〇 XX white point 〇〇〇〇〇 [Examples 29] (corona cleaning) For the cleaning treatment of the floor substrate of the partition wall, in addition to the corona discharge treatment instead of the oxygen plasma treatment, the pure water at the predetermined portion was evaluated in the same manner as in the first embodiment. Contact angle. Further, a color filter was formed in the same manner as in Example 1 using the support substrate after the cleaning step, and color mixing and white spots were evaluated. The results are shown in Table 5. [Example 30] (Alkali cleaning) The cleaning treatment for the support substrate on which the partition walls were formed was carried out except that the sodium hydroxide solution was cleaned (hunted, 1 minute shower clearing treatment was carried out in the same manner as in Example 1, The evaluation is in the pre-, water contact angle. In addition, the support A after the cleaning step is used, and the substrate U is shown in Table 5, and the color is displayed in Table 5, and the color mixture and white point are evaluated. Heart 320324 48 200916852 Table 5
【圖式簡單說明】 第1圖係為顯示在支撐基板上形成間隔壁之情形的剖 面說明圖。 【主要元件符號說明】 支撐基板 1 a 表面(形成間隔壁之部分以外的表面) 2a 間隔壁之頂面 間隔壁之側面 320324 49BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional explanatory view showing a state in which a partition wall is formed on a support substrate. [Description of main component symbols] Support substrate 1 a Surface (surface other than the part forming the partition wall) 2a Top surface of the partition wall Side of the partition wall 320324 49
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TWI510860B (en) * | 2010-09-01 | 2015-12-01 | Sumitomo Chemical Co | Photosensitive resin composition |
KR102361573B1 (en) * | 2018-03-09 | 2022-02-10 | 동우 화인켐 주식회사 | A black photo sensitive resin composition, a color filter comprising a black metrics, a column spacer or black column spacer prepared by using the composition, and a display device comprising the color filter |
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CN110888301B (en) * | 2014-03-31 | 2023-08-15 | 日铁化学材料株式会社 | Photosensitive resin composition for light-shielding film, light-shielding film formed by hardening same, and color filter |
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