200916223 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種精密非晶合金元件快速成形之技 術領域，尤指一種能將非晶合金元件快速降溫以縮短作業 時間，並提高微結構複印精密度之裝置及方法。 【先前技術】 按，金屬玻璃專非晶合金材料產品，以彳主大多以成本 較高的壓鑄法製作，使用壓鑄法會受限於冷卻速率而影響 生產效率，且壓鑄法所使用的設備成本較高，因此有以改 進之必要。 而若要於產品上形成微米、奈米級的微結構則必需再 以蝕刻法來形成，蝕刻法的製程繁複，所需耗用的時間及 製程成本也較高，因此同樣有改進的必要。 近來開始有使用塑性成形的方法技術出現，如中國發 明專利ZL03137428.X號「一種非晶合金精密零部件超塑 性模鍛成形裝置及方法」即是，其係於一真空爐内設置可 更換壓頭及模具等結構，而該可更換壓頭係由内壓頭、外 壓頭滑塊及連結座等組成，該模具則由模具及頂出機構組 成。其成形方法是將非晶合金胚料和模具置於真空爐，待 真空爐達到所需之真空度後開始加熱，當胚料被加熱至過 冷液相區間溫度後，再以可更換壓頭對模具内的胚料進行 加壓塑形，待塑形完成後再由頂出機構將成形後之成品頂 200916223 前述之成形裝置及方法雖可製 "网甚至是奈米級精度之產品，面粗糙度小於 首先，前述的内壓頭、外壓頭、滑二、問題·· 模具及頂出機構等均需設置於直:丨、結座乃至於 積相當大，其設置及使用成本均=内’因此真空爐的體 再者，成形後之成品雖被頂出機構頂 仍位於真空射，因此有成品取件W^。、 密微刻痕會因慢速冷卻而晕開，造成刻痕較=场 =1奴切技㈣製程f遍存在作業時間長、 1 =不佳及成本較高的問題，而製成品則有微刻痕較 夂的問碭，因此有再加以改進之必要。 【發明内容】 本發明之主要目的即在於針對上述先前技術之缺 作業= 將非晶合金塑形成品快速降溫，而可縮短 ^ ^ a 间生產效率，並有助於精密微刻痕複印之俨 密非晶合金元件快速成形裝置及方法。 月 、本創作之次-目的係在於該模具組具有減少熱傳導 速率之設計，而能提高高溫爐的恆溫效果。 、為達成前述之㈣，本發明之精密非晶合金元件快速 成形U ’係由-〶溫爐、―模具組、—壓模機構、—退 拉機構以及-快速冷卻機構所組成。該高溫爐係用以對非 200916223 晶合金材料快速加埶 此一區間；該模具:具^間溫度’並維持溫度於 n M m 上模與一下模，並於兮卜— 该下杈之間形成一模穴以供非晶合 卜亥场與 "構係由一動力源驅動__ ’ ，忒壓杈機 並與該上模連,該壓桿係延伸至該高溫爐内 模座，該4二=機構係由至少-動力源驅動-下 下模位移進出該0;下換設置’而能由該下模座連動該 出高溫爐之位置而該快速冷卻機構對應該下模移 體而將非晶合金;u牛喷嘴，俾藉由喷嘴噴出氣 非晶晶，金元件快速成形裝置形成精密 — 之方法，疋將非晶合金材料置於模具組之模 八中’置於高溫爐中加熱至過冷液相區間溫度，並維持溫 度=此-區間，而後由壓模機構之壓桿; 非^合金材料於模穴中被模塑成形為非晶合金元件，再由 退核機構載送非晶合金元件退出高溫爐，並由快速冷卻機 構之喷嘴噴出氣體而將非晶合金元件快速冷卻成形。 由於本發明之成形裝置設有快速冷卻機構，而能將模 塑成形之非晶合金元件，以喷嘴噴出氣體將其快速冷卻， 如此可有效細短作業時間、提咼生產效率，並達到複印精 密微刻痕之功效。 再者，本發明之模具組的下模結合部外緣設有凹部， 使下模與下模座間之接觸面積減少以降低熱傳導速率，而 能提高模具組於高溫爐内的悮溫效果。 200916223 炫列舉本發明之較佳實施例，並配合圖式做進一步之 洋細說明如下。 【實施方式】 以下為本發明之較佳實施例，茲配合圖示作詳細之說 明。 、 凊芩閱第1圖，本發明之精密非晶合金元件快速成形 裝置具有—機台10，該機台10具有數支向上延伸之支架 # ，各支架11之頂端係結合於一頂板12，該頂板12上設 ::壓模機構2，而各支架η之間固設-高溫爐3，且該 機口 10上設有一退模機構4，且於該壓模機構2與該退模 機構4之間設有一模具組5,另於該高溫爐3下方設有一、 快速冷卻機構6。 請參閱第2目’該模具組5具有一上模51與一下模 X下杈52對應§亥上模51形成有一模穴53，而該下模 =的下半段具有—結合部54，且於該結合部Μ外緣設有 ‘〜凹部55 ’於本實施例中，該凹部55係呈環狀凹槽之形 請配合參閱第1圖與第2圖，該壓模機構2具有一 力源L該動力源21係設置於該頂板⑵ 係驅動一麼焊乃，4网# 00 人m 1原、 動广干22’爾22則延伸至該高溫爐3内瓦 二杈51連結’而能由該壓桿&帶動 爐3中上、下位移。於太麻浐如士 油壓红。 於本^心，該動力源21係為 9 200916223 。亥退拉機構4具有二個設置於機台1()内之動力源 本實施例中各動力源41均為-油壓缸，且該二動 -八別-右係同步驅動—平台42 ’該平台42對應各支架11 t滑座43，使該平台42可被驅動沿各支架Π 上月私’亚且在該平台42上對應該壓模機構2設有 二 4，該下模座44係呈中空之形態，且該下模座 丁、知對應該模具組5之下模52的結合部54凹設有一容 置。M5以供承置該下模52，而能由該下模座^連動該下 模52位移進出該高溫爐3。 該平台42對應該下模座44設有一頂出機構7,兑係 由:動力源71驅動一頂桿72，該頂桿⑴系穿設於中^之 下杈座44中’而能藉由該動力源71驅動該頂桿72向上 移以穿越該下模72，俾以將非晶合金元件頂出。於本實施 例中該動力源71係為—氣壓缸。 产請配合參閱第i圖與第3圖，該快速冷卻機構6具有 一氣源6卜該氣源61以—管路62穿繞過—冰水機63， 使氣源之氣體經由該管路62而降低溫度，而後再由管路 62將氣體導至二喷嘴64，各喷嘴係對應該下模52移出高 溫爐3之位置設置。 而本發明形成精密非晶合金元件之方法係將非晶合 金材料置於模具組5之模穴53中，並使其置於高溫爐3 中加熱至過冷液相區間溫度，並維持溫度於此一區間，而 後由壓模機構2之壓桿22帶動上模51下壓，使非晶合金 200916223 材料於模穴53中被模塑成形為非晶合金^件，再由該退 模機構4載送非晶合金^件退出高溫爐3，並以快速冷= 機構6之喷嘴64喷出氣體而將非晶合金元件快速冷:: 最後以頂出機構7將非晶合金元件之成品頂出模穴。 以下兹舉一實例來說明本發明形成精密非晶合金元 件之方法。本例所採用之非晶合金材料係為 (z碰㈣99.5SiG.5的成分、密度6 8_3、彈性限 2%的金屬玻璃。 册將前述之金屬玻璃置於模穴53中，並由退模機構4 帶動下模座44上升，使下模52與金屬玻璃進人高溫爐3 中’如第4圖中所示之位置，再以約⑽。c/min的升溫 速率加溫，使溫度位於材料具有超塑性成形的過冷液相區 間，以本例之材料而言約在46〇〜48〇r，材料會開始軟化。 如第5圖所示，第5圖係溫度與位移量相對關係圖，該圖 中所採用是凱氏絕對溫度κ，凱氏絕對溫度K=273 + t，第 5圖中顯示軟化溫度為74〇κ，也就是467<t。 而材料在此溫度區間具有相當低的枯度，如第6圖所 不，第6圖係溫度與黏度的相對關係圖，由圖中可以看出 溫度約在753K(48(TC)前具有較低的黏度，在753κ之後則 王現急劇上升的趨勢，因此本發明之成型溫度區間選取在 460〜480 C之間。高溫爐3在加熱至此一溫度區間之後則 維持恆溫，才能提供材料具有足夠的流動性。 接下來，壓模機構2之壓桿22以0. 04〜0. 4 m/s的速 200916223 率帶動上模51對模穴5 3中之非晶合金材料加壓，如第4 圖所示之狀態，使非晶材料具有較低的塑流應力而能變形 並複印出模具上的微米、奈米級的微結構刻痕或充填入微 小模穴，其最低成形壓力約為10〜20 MPa，為常溫的1/10 倍。此較低的成型負荷可避免模具的耗損。 成型後，由退模機構4將下模及模塑成形後之非晶合 金元件成品退出高溫爐3外，再由快速冷卻機構6之喷嘴 64對非晶合金元件之成品喷射惰性氣體，使其快速降溫 後，以頂出機構7將非晶合金元件成品頂出模穴即可取出 成品。 綜上所述，由於本發明之成形裝置設有快速冷卻機 構，而能將模塑成形之非晶合金元件成品，以喷嘴喷出的 惰性氣體將其快速冷卻，如此可有效縮短作業時間、提高 生產效率，並達到複印精密微刻痕之功效。再者，模具組 的下模結合部外緣設有凹部，使下模與下模座間之接觸面 積減少以降低熱傳導速率，而能提高模具組於高溫爐内的 十互溫效果。 再請參閱第7圖，其係本發明之精密非晶合金元件快 速成形裝置的第二實施例。其中，該高溫爐3A係設置於 該機台10A上，而該退模機構4A則直接設置於該機台 10A，使該退模機構4A可將模具組5A向上頂推而移出該 高溫爐3A，該快速卻機構6A則設置於該高溫爐3A上方對 應該下模52A移出該高溫爐3A的位置。 12 200916223 如此一來，當壓模機構2A之壓桿22A帶動上模51A 下壓，使非晶合金材料於模穴中被模塑成形為非晶合金元 ' 件，再由該退模機構4A向上頂推，使該非晶合金元件向 — 上移出該高溫爐3A，並以快速冷卻機構6A之喷嘴64A噴 出氣體而將非晶合金元件快速冷卻後取出。如此同樣可以 達到與前述第一實施例相同之功效。 當然，本發明之模具組除了前述實施例之形態之外， 亦可設計成其它形式之模具，例如擠形模具等，此等熟習 模具技術人員所能輕易變換之模具形式，仍應隸屬本發明 之範疇。 由以上詳細說明，可使熟知本項技藝者明瞭本發明的 確可達成前述目的，實已符合專利法之規定，爰提出專利 申請。 【圖式簡單說明】 第1圖係本發明之結構示意圖； 第2圖係本發明之模具組的結構示意圖； 第3圖係本發明之快速冷卻機構的結構示意圖； 第4圖係本發明之使用狀態示意圖； 第5圖係本發明實例加熱之溫度與位移量相對關係圖； 第6圖係本發明實例加熱溫度與黏度的相對關係圖；及 第7圖係本發明第二實施例之結構示意圖。 【主要元件符號說明】 10、10A 機台 13 200916223 11 支架 12 頂板 2、2A 壓模機構 21 動力源 22 、 22k 壓桿 3、3A 南溫爐 4、4A 退模機構 41 動力源 42 平台 43 滑座 44 下模座 45 容置部 5、5A 模具組 51 、 51A 上模 52 、 52A 下模 53 模穴 54 結合部 55 凹部 6、6A 快速冷卻機構 61 氣源 62 管路 63 冰水機 64 、 64A 喷嘴 14 200916223 7 頂出機構 71 動力源 72 頂桿200916223 IX. Description of the Invention: [Technical Field] The present invention relates to the technical field of rapid prototyping of precision amorphous alloy components, in particular to a method capable of rapidly cooling amorphous alloy components to shorten working time and improve microstructure A device and method for copying precision. [Prior Art] According to the metal-glass-specific amorphous alloy material, most of the enamel masters are made by the cost-effective die-casting method. The use of the die-casting method is limited by the cooling rate and affects the production efficiency, and the equipment cost used in the die-casting method. Higher, so there is a need for improvement. However, if micro- and nano-scale microstructures are to be formed on the product, it must be formed by etching. The etching process is complicated, the time required for the etching process and the process cost are also high, so there is also a need for improvement. Recently, there has been a method of using plastic forming, such as the Chinese invention patent ZL03137428.X "A super-plastic die forging forming device and method for precision parts of amorphous alloys", which is provided with a replaceable pressure in a vacuum furnace. The head and the mold are composed of an inner pressure head, an outer pressure head slider and a joint seat, and the mold is composed of a mold and an ejection mechanism. The forming method is that the amorphous alloy blank and the mold are placed in a vacuum furnace, and the heating is started after the vacuum furnace reaches the required vacuum degree. When the billet is heated to the temperature of the supercooled liquid phase, the replaceable indenter is used. Pressing and shaping the blank in the mold, and after forming the finished product, the finished product top is formed by the ejection mechanism. The above-mentioned forming device and method can manufacture a product of "net" or even nanometer precision. The surface roughness is less than the first, the above-mentioned internal pressure head, external pressure head, sliding two, problem, mold and ejection mechanism should be set in straight: 丨, 结, or even a large amount, the installation and use cost are both = Inside 'Therefore, the body of the vacuum furnace, the finished product after being formed is still under vacuum by the top of the ejection mechanism, so there is a finished product take-up W^. , dense micro-scratches will smudge due to slow cooling, resulting in nicks = field = 1 slave cutting (four) process f has a long working time, 1 = poor and high cost, while the finished product has Micro-scratches are more embarrassing, so there is a need to improve them. SUMMARY OF THE INVENTION The main object of the present invention is to reduce the temperature of the amorphous alloy molded product by rapidly reducing the temperature of the amorphous alloy molded article, and to shorten the production efficiency between the ^ a and the fine micro-notch copying. Compact amorphous alloy component rapid prototyping device and method. Month, the second of this creation - the purpose is that the mold set has a design that reduces the heat transfer rate, and can improve the constant temperature effect of the high temperature furnace. In order to achieve the above (4), the rapid amorphous forming U ′ of the precision amorphous alloy component of the present invention is composed of a 〒-temperature furnace, a “mold set, a die-pressing mechanism, a pull-back mechanism, and a rapid cooling mechanism. The high temperature furnace is used to rapidly clamp the non-200916223 crystal alloy material; the mold has a temperature between the mold and the temperature of n m m and the lower mold, and between the lower jaw and the lower jaw Forming a cavity for the amorphous Hefei field and the "system" is driven by a power source __', and is connected to the upper mold, and the pressure bar extends to the mold base of the high temperature furnace. The 4== mechanism is driven by at least a power source-lower lower mold displacement into and out of the 0; the lower setting is configured to be able to interlock the position of the high temperature furnace by the lower mold base, and the rapid cooling mechanism corresponds to the lower mold shifting body The amorphous alloy; the u-nozzle nozzle, the squirting gas amorphous crystal by the nozzle, the gold component rapid prototyping device forming the precision method, and the amorphous alloy material is placed in the mold of the mold set 'placed in the high temperature furnace Heating to the temperature of the supercooled liquid phase zone, and maintaining the temperature = this interval, and then by the compression bar of the compression molding mechanism; the non-alloy material is molded into an amorphous alloy component in the cavity, and then the core-return mechanism Carrying the amorphous alloy component out of the high temperature furnace and ejecting the gas from the nozzle of the rapid cooling mechanism And rapidly cooling the amorphous alloy forming element. Since the forming device of the present invention is provided with a rapid cooling mechanism, the molded amorphous alloy member can be rapidly cooled by ejecting gas from the nozzle, thereby effectively reducing the working time, improving the production efficiency, and achieving the copying precision. The effect of micro-notch. Further, the outer edge of the lower mold joint portion of the mold set of the present invention is provided with a concave portion, so that the contact area between the lower mold and the lower mold base is reduced to lower the heat transfer rate, and the temperature effect of the mold set in the high temperature furnace can be improved. 200916223 A preferred embodiment of the present invention will be described with reference to the drawings and further details are as follows. [Embodiment] The following is a detailed description of the preferred embodiments of the present invention. Referring to FIG. 1 , the rapid amorphous forming device of the precision amorphous alloy component of the present invention has a machine table 10 having a plurality of upwardly extending brackets # , and the top ends of the brackets 11 are coupled to a top plate 12 . The top plate 12 is provided with: a die-pressing mechanism 2, and a high-temperature furnace 3 is fixed between the brackets η, and a die-removing mechanism 4 is disposed on the machine port 10, and the die-pressing mechanism 2 and the die-cutting mechanism are A mold set 5 is disposed between the four, and a rapid cooling mechanism 6 is disposed below the high temperature furnace 3. Please refer to the second item 'The mold set 5 has an upper mold 51 corresponding to the lower mold X lower jaw 52. The upper mold 51 is formed with a cavity 53, and the lower half of the lower mold has a joint portion 54, and In the present embodiment, the concave portion 55 is formed in the shape of an annular groove. Please refer to FIGS. 1 and 2, the compression molding mechanism 2 has a force. Source L The power source 21 is disposed on the top plate (2) to drive a welding, 4 mesh # 00 people m 1 original, dynamic wide dry 22' 22 and the inner temperature to the high temperature furnace 3 The upper and lower displacements of the furnace 3 can be driven by the pressure bar & It is too numb like a soldier. In this heart, the power source 21 is 9 200916223. The black retracting mechanism 4 has two power sources disposed in the machine 1 (). In the embodiment, each of the power sources 41 is a hydraulic cylinder, and the two-eight-eight-right synchronous drive-platform 42' The platform 42 corresponds to each of the brackets 11 t slides 43 so that the platform 42 can be driven along the respective brackets and the second and fourth mold bases 4 are provided on the platform 42 . The hollow mold is formed, and the lower mold base and the joint portion 54 corresponding to the lower mold 52 of the mold set 5 are recessed. M5 is provided for receiving the lower mold 52, and the lower mold 52 can be moved in and out of the high temperature furnace 3 by the lower mold base. The platform 42 is provided with an ejection mechanism 7 corresponding to the lower mold base 44. The power supply 71 drives a top rod 72, and the top rod (1) is disposed in the lower portion 44 of the middle portion. The power source 71 drives the jack 72 up to pass the lower die 72 to eject the amorphous alloy component. In the present embodiment, the power source 71 is a pneumatic cylinder. For the production, please refer to the figures i and 3, the rapid cooling mechanism 6 has a gas source 6 and the gas source 61 is passed through the pipeline 62 to the ice water machine 63, so that the gas of the gas source passes through the pipeline. The temperature is lowered by 62, and then the gas is conducted by line 62 to the two nozzles 64, each of which is disposed corresponding to the position at which the lower mold 52 is removed from the high temperature furnace 3. The method for forming a precision amorphous alloy component of the present invention places the amorphous alloy material in the cavity 53 of the mold set 5, and places it in the high temperature furnace 3 to be heated to a temperature in the supercooled liquid phase, and maintains the temperature at In this interval, the upper mold 51 is pressed by the pressing rod 22 of the molding mechanism 2, so that the amorphous alloy 200916223 material is molded into the amorphous alloy member in the cavity 53, and the mold releasing mechanism 4 is further The amorphous alloy member is carried out of the high temperature furnace 3, and the amorphous alloy member is rapidly cooled by spraying the gas with the nozzle 64 of the rapid cooling = mechanism 6:: Finally, the finished product of the amorphous alloy member is ejected by the ejection mechanism 7. Cavity. An example of the method of forming a precision amorphous alloy member of the present invention will now be described. The amorphous alloy material used in this example is a metallic glass having a composition of z touch (four) 99.5SiG.5, a density of 6 8_3, and an elastic limit of 2%. The aforementioned metallic glass is placed in the cavity 53 and is retracted. The die mechanism 4 drives the lower die holder 44 to rise, so that the lower die 52 and the metallic glass enter the position of the high temperature furnace 3 as shown in FIG. 4, and then heat up at a temperature increase rate of about (10) c/min to make the temperature. Located in the supercooled liquid phase of the material with superplastic forming, the material will begin to soften at about 46〇~48〇r for the material of this example. As shown in Figure 5, the temperature and displacement of the fifth figure are relative to The relationship diagram is the Kjeldahl absolute temperature κ, Kjeldahl absolute temperature K=273 + t, and the softening temperature is 74〇κ, which is 467<t. The relatively low dryness, as shown in Figure 6, is the relative relationship between temperature and viscosity. It can be seen from the figure that the temperature has a lower viscosity before 753K (48 (TC), after 753κ) Then Wang is in a sharp upward trend, so the molding temperature range of the present invention is selected between 460 and 480 C. The high temperature furnace 3 is in addition. After that, the temperature is maintained at a constant temperature to provide the material with sufficient fluidity. Next, the pressure bar 22 of the compression molding mechanism 2 drives the upper mold 51 to the mold at a rate of 0. 04~0. 4 m/s. The amorphous alloy material in the hole 5 3 is pressurized, as shown in Fig. 4, so that the amorphous material has a lower plastic flow stress and can be deformed and copied into the micro- and nano-scale microstructures on the mold. Trace or fill into the micro cavity, the minimum forming pressure is about 10~20 MPa, which is 1/10 times of the normal temperature. This lower forming load can avoid the loss of the mold. After molding, the die is removed by the die-cutting mechanism 4. And the molded amorphous alloy component exits the high temperature furnace 3, and then the inert gas of the amorphous alloy component is sprayed by the nozzle 64 of the rapid cooling mechanism 6 to rapidly cool down, and then the ejector mechanism 7 The finished product of the crystal alloy component can be taken out of the cavity to take out the finished product. In summary, since the forming device of the present invention is provided with a rapid cooling mechanism, the molded amorphous alloy component can be finished, and the inert gas is sprayed from the nozzle. Cool it quickly, so there is The utility model has the advantages of shortening the working time, improving the production efficiency, and achieving the effect of copying the precision micro-notch. Furthermore, the outer edge of the lower mold joint of the mold set is provided with a concave portion, so that the contact area between the lower mold and the lower mold base is reduced to reduce the heat conduction rate. Moreover, the ten-internal temperature effect of the mold set in the high-temperature furnace can be improved. Referring to Fig. 7, which is a second embodiment of the rapid amorphous forming device for precision amorphous alloy elements of the present invention, wherein the high-temperature furnace 3A is provided On the machine table 10A, the mold-removing mechanism 4A is directly disposed on the machine table 10A, so that the mold-removing mechanism 4A can push the mold group 5A upward and move out of the high-temperature furnace 3A, and the quick-release mechanism 6A is set. Above the high temperature furnace 3A, the lower mold 52A is moved out of the high temperature furnace 3A. 12 200916223 In this way, when the pressing rod 22A of the molding mechanism 2A drives the upper mold 51A to be pressed, the amorphous alloy material is molded into an amorphous alloy element in the cavity, and then the mold releasing mechanism 4A The amorphous alloy member is pushed upward to move the high temperature furnace 3A upward, and the gas is ejected from the nozzle 64A of the rapid cooling mechanism 6A to rapidly cool the amorphous alloy member and then taken out. Thus, the same effects as the first embodiment described above can be achieved. Of course, in addition to the form of the foregoing embodiment, the mold set of the present invention can also be designed into other forms of molds, such as extrusion molds, etc., which are familiar to mold molds that can be easily changed by the mold technician, and still belong to the present invention. The scope. From the above detailed description, it will be apparent to those skilled in the art that the present invention can achieve the above-mentioned objects, and is in accordance with the provisions of the Patent Law. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of the present invention; Fig. 2 is a schematic view showing the structure of the mold set of the present invention; Fig. 3 is a schematic view showing the structure of the rapid cooling mechanism of the present invention; FIG. 5 is a relative relationship between temperature and displacement of the example of the present invention; FIG. 6 is a relative relationship between heating temperature and viscosity of the present invention; and FIG. 7 is a structure of the second embodiment of the present invention. schematic diagram. [Main component symbol description] 10, 10A machine table 13 200916223 11 bracket 12 top plate 2, 2A compression molding mechanism 21 power source 22, 22k pressure bar 3, 3A south temperature furnace 4, 4A demoulding mechanism 41 power source 42 platform 43 slip Seat 44 Lower die holder 45 accommodating part 5, 5A Mold set 51, 51A Upper die 52, 52A Lower die 53 Mold cavity 54 Joint part 55 Recessed part 6, 6A Rapid cooling mechanism 61 Air source 62 Pipeline 63 Ice water machine 64 64A nozzle 14 200916223 7 ejection mechanism 71 power source 72 ejector