TW200915464A - Compact substrate transport system with fast swap robot - Google Patents

Abstract

A substrate processing system including a load port module configured to hold at least one substrate container for storing and transporting substrates, a substrate processing chamber, an isolatable transfer chamber configured to couple the substrate processing chamber and the load port module, and a substrate transport mounted at least partially within the transfer chamber and having arm links configured to support at least one substrate, the arm links being configured to transport the at least one substrate directly between the at least one substrate container and the processing chamber with but one touch of the at least one substrate.

Description

200915464 IX. DESCRIPTION OF THE INVENTION: TECHNICAL FIELD This embodiment relates generally to a substrate transport system, and more particularly to an automatic control transfer arm of a substrate transport device. The present application claims benefit from U.S. Provisional Patent Application Serial No. 60/938,913, filed on May 18, 2007, the disclosure of which is hereby incorporated by reference. [Prior Art] The processing of semiconductors typically involves multiple processing steps performed by a single-step implement, which includes photographic etching, dry stripping, beveling, and heating, cooling, and cleaning of the film deposited on a substrate. Individual processing operations are typically performed in a vacuum in a special processing chamber. Due to the extreme cleanliness and precision required for each process, batch processing of semiconductor substrates has generally been replaced by individual substrate processing. This method allows the processing of each substrate to be more controlled, but limits the overall throughput of the system. For each processing step, the processing chamber must be vented, loaded with substrates, resealed and vacuumed. After Yuancheng, the steps opposite to the above are also carried out. In order to improve the processing energy, in a conventional form, a group of processing cabins is configured to be transported around a conventional substrate, which is constructed to maintain a vacuum; or more loading cages are connected to the transport compartment by opening and (4) The shipping compartment is connected to the front end module and is typically consuming the front end unit. Loading the box for reading the substrate to be processed, the box is placed in front of the system = 1 = the end of the transfer transport device is transferred to the load, a construction to accommodate such a load gate is in the case of US Patent No. 5,664,925, the case And 5 200915464 == = : Participation: The content disclosed in the No. 1 case patent, according to this form, the cycle can be increased by 'processing and transportation, and the output of the system can be greatly increased, the shipment is closed and discharged. Holding the vacuum, and only the loading room is rotated after the 'auto-end 埠 with q' rolling, the loading gate can receive the processing substrate, the front is closed, and it is installed as a vacuum and transport and handle the automatic transfer mechanism. Install the S in the transport and operate the self-loading brake to remove the base and transfer it to the selected place; after processing, the substrate is picked up by the robot and taught to be transported to the lower-processing chamber or a loading gate for Unloading the shipping compartment, some examples 'for timing purposes, these systems may employ a buffer station that is used to store the substrate prior to loading' or other time during which the substrate is transported in the system. A system of this type is disclosed in U.S. Patent No. 5,882,413, the disclosure of which is incorporated herein by reference. The contents disclosed are all incorporated herein by reference. It has been found that 'substrates with a diameter of 200 mm or more can be effectively processed by conventional clustering (cluster) type systems. As can be understood, the size of traditional in-situ machines depends mostly on the traditional shipping compartments that communicate the processing modules of clusters. The size of the 'in particular' has been trending towards increasing the diameter. When dealing with 300mm, 450mm or larger diameters, the clustered system will become large and improper; the processing system with a two-arm connecting device Can be used to reduce the volume to the extension ratio of the transport device, however, when the diameter or size of the substrate increases, the length of the two-arm linkage of the transport device also increases. Therefore, the volume must be increased to accommodate the lever arm in the transport compartment. 200915464 Action. When the treatment device is geometrically contracted and the thickness of the film is increased, it means shortening the sedimentation and removal processing time. When the evacuation of the gate charge is longer than the treatment time, evacuating the larger volume of the load gate may shorten the precipitation and removal time. conflict. A small substrate transport system is provided to allow for reduced loading gate evacuation time. It is advantageous to have a substrate transport system that allows multiple processing modules to be placed in close proximity to each other to maximize production facility space and has a substrate. The transportation system is more advantageous without the need to use the front-end module equipment, and can directly couple a loading gate to a processing module. SUMMARY OF THE INVENTION An embodiment of the present invention provides a substrate processing system including a loading cassette module configured to hold at least one substrate cassette for storing and transporting a substrate; a substrate processing chamber; An detachable transport compartment coupling the substrate processing chamber and the loading cassette module; and a substrate transporting device at least partially mounted in the transport compartment, and having an arm link configured to support at least one substrate, the arm joint The rod is configured to directly contact the at least one substrate in one time and directly transport at least one substrate between the at least one substrate cassette and the processing chamber. [Embodiment] The foregoing and other features of the disclosed embodiments will be described in detail with reference to the accompanying drawings. FIG. 1A-C illustrates an example of a substrate processing system according to an embodiment, although the illustrated embodiment will be implemented with reference to the drawings. For example, it is to be understood that the disclosed embodiments may be embodied in many alternative forms and that any suitable size, shape or type of elements or materials can be used. 200915464 As can be seen in Figures 1A-C, the processing system can also be referred to as a cluster of implements, which can include a front end module device (EFEM) 150, one of the first sides coupled to the EFEM 150, or a plurality of load ports. One or a plurality of load gates 110 on the second side of the EFEM, one or most of the transfer compartments 100 coupled to the load locker 110, and one or more of the processing modules 120 coupled to the transfer compartment 100; the configurations shown in Figures 1A-C are only For example, in the alternative embodiment, the implement can have any other suitable configuration. The loading gate 110 and the transfer compartment 100 can be collectively referred to as the transport module 101. It should be noted that in an alternative embodiment, the loading gate 110 can be a substrate buffer device. Alternatively, it should be understood that the cushioning device can be any suitable cushioning device and can include a substrate cooling feature or any other suitable feature such as a metering system to assist in the processing of the substrate; the connector 130 including the slotted valve can The processing module 120, the transfer compartment 100, and the load locker 110 are coupled together as shown. In an alternative embodiment, the process module 120, the transfer compartment 100, and the load locker 110 can be coupled to any suitable configuration; in this embodiment, The processing module 120 舆 the transfer compartment 100 can form a pumpable vacuum sealed housing for processing the substrate, and can be maintained in a vacuum state by, for example, a vacuum pump 140; the loading gate can be switched to a vacuum and has some pressure Between vacuum and vacuum, the vacuum pump 140 can also be used to evacuate the load lock 110; as shown, the load lock 110 can also include a valve 160 that isolates the interior of the load lock from the atmosphere of the EFEM 150 while allowing the load lock 110 to be evacuated. In an alternative embodiment, the processing system can have a shipping compartment/loading gate, such as in a vacuum system, coupled to a loading magazine without intervening EFEM. A first substrate transport robot can be at least partially covered in the EFEM, and the substrate can be transported to the load gate 110 (or buffer) through the valve 160, for example, by one of the substrates 停 埠 151, the first machine The hand can be fixed or installed in the 200915464. It depends on the loading 埠 151 module and / or on the top, this type of transport loading a number of loading gates 110 one of the paths 6, _, _ number, the household has been stated in the common The first US robot may include - 2 axes = value ^ The case is fully incorporated into the case, the drop/indexer is loaded on the device. / The device and / or may include a substrate lift cabin: for Through the group (10) between the 4 transport compartments 100 can be extremely small in the installation of 110 and processing

:Small: Connected to the transfer compartment _ or 2 Width 2 = Hand can be any suitable conveyor,,, width, the first - mechanical, the substrate can be described in the following conditions in more detail. The main λ ^ The younger brother transports the robot through the slit valve 13 and the (4) gate 1H) can be closed, pumped and vacuumed;) 3] is known to be open to the transfer 100, in this state, the substrate can be supplied to The following is a more detailed description of the following. Other small-sized transport systems are available in the commonly-owned U.S. Patent No. 6,918,731, and the commonly-assigned name is the fast-switching double-substrate transport device for loading gates. Application No. 11/104,397 of the application filed on April 12, the disclosure of which is incorporated herein by reference. As best seen in FIG. 1B, the multiple processing modules 12A can be continuously arranged along the EFEM side. In this embodiment, the substrate transport system is configured such that the processing module can be configured, for example, no larger than 505 mm (see FIG. 20) One of the distances D, which is now half the specific distance between the working paths of the front-end transport system (such as the EFEM 150 relative to the 300 mm diameter substrate); in other embodiments, the distance between the EFEM working paths can be More or less than 505 mm, such as a system configured to process a substrate such as 200 mm or 450 mm in diameter; in an alternative embodiment, 'process the 200915464 module and its associated transport system (ie, transport systems 100 and 200 (Figures 1A and 2Α) Β)) can be placed at any suitable distance, such as a distance of greater than 5 〇 5 mm, 'Thus, one of the clustering implements of this embodiment can be configured such that the width of the implement can be approximately EFEM or a processing module The width is limited. 2A and 2B show another embodiment of the substrate transport system according to an embodiment. The transport system is substantially similar to the above-described reference system and the same features are shown with the same number, however, this example The transport, and the load-carrying gates are combined into a single module, which will be described in more detail in the following. As can be seen in Figure 2B, the module 200 can allow the processing module 120 to be larger than the above reference figure (1). The form is continuously arranged. 3A-C illustrate in more detail the load gate 11〇, the transfer allowance and the processing module 12〇, ι; ι〇2, the load m shows that the cover 111 (this provides the population of the load gate shoes) is only an example In the alternative embodiment, the (four) piece of the transporting boat/stopper can be placed around the cover 111 to prevent any leakage. In an alternative embodiment, the interior of the loading brake can be used according to the === The entrant; the transport vessel (10) may also have a cover and, second, the transport: at 盍111. The transport system may also include a controller 310 connected to the processing module 310, which may include any of the lights and a load switch 110. The controller (3) rotates the program or algorithm, and at least controls the processing module to be finely detailed. The relevant valve and vacuum pump (and any other suitable components of the 处理 处理 processing module 120, the transfer 〇〇 1 〇〇, the second one of the fly processing system) can be used as part of the burglary structure. 310 can be connected and accepted by the instructional cluster structure control system (not shown) 'has a flaw, and a suitable example can be found in the case of US Patent Application No. 11/178,615, which was published on July 5, 2005. The matters referred to in the text are all incorporated into the present disclosure; the controller 310 can be connected to the central controller via the connector 300, and the connector 300 can include an electrical connector, a vacuum line connector, a gas line connector, or can be used for handling of the transport system. Any other suitable connector. In an alternative embodiment, the controller 310 can be part of a central control module that can control the entire processing system, such as the processing systems illustrated in Figures 1A-C and 2A-B. Should The solution transport module 200 can also include a controller substantially similar to one of the controllers 310, and a connector for electrical, vacuum, gas, and/or air, such as the connector 300. Referring now to Figures 4A-B and 5A-B, The loading gate 110 is provided with a substantially straight path (i.e., the valves 460 and 130 are spaced apart by about 180 degrees). The transfer system is generally arranged in a straight line. In other embodiments, the loading gates 110', 110" The slit valves 460, 130 are spaced 90 degrees apart; as can be seen in Figures 4A-B and 5A-B, the slit valve 460 can be placed on either side of the load locks 110', 110 " in an alternative embodiment, transport The slotted valve allows the substrate path, for example between the processing module and the EFEM, to have any suitable relationship to each other, such as any suitable angle between 0 and 180 degrees, so that the processing tool can be configured in any desired configuration (ie, the loading gate/transportation compartment and processing module are along the side of the EFEM.) Referring to Figure 6, the shipping compartment 100 of Figure 1A is shown in more detail. In this embodiment, the cover on the shipping compartment 100 101 has been removed to make the drawing clear, as can be seen in Figure 6, the shipping compartment 100 can have The outer casing 100H of a suitable shape is rectangular in this embodiment. However, in an alternative embodiment, the outer casing may have any suitable shape, and the outer casing 100H may be configured to be coupled with the adapter 130 in any suitable manner, and a suitable one is provided. The seal is between the adapter 130 and the outer casing 100H to prevent leakage of atmosphere within the transport compartment 100 of the 2009 2009 464. The transport compartment 100 includes any suitable transfer device or robot 600 to transport the substrate through the transfer compartment 100, an example of a transfer robot 600 Further details will be provided below; the inner walls of the transfer compartment 100 (i.e., the top, bottom, and sides) may be contoured as the substrate moves within the chamber 100 to reduce the volume of the interior of the lower compartment 100, as previously involved. As described in U.S. Patent No. 6,918,731, for example, the interior 100C of the transfer compartment 100 can be designed to allow only sufficient space for the robot 600 to operate freely, by providing only sufficient operational clearance to the top, bottom and bottom of the inner chamber 100C. Between the side walls, the volume of the transfer compartment 100 can be minimized. When, for example, the transfer compartment 100 is directly coupled to a loading cassette module and a processing module, the transfer compartment 100 is pumped into a true The empty cycle time is minimized to provide a cycle time consistent with substrate processing time, such as when the transfer compartment 100 is directly coupled to a load port module and processing module as will be described below. . Referring to Figure 8, a cross-sectional view of the loading gate 110 of Figure 1A is more clearly shown. The inner walls of the loading gate 110 (i.e., the top, bottom, and sides) may also be contoured with the path of the substrate moving within the loading gate 110 to reduce the loading gate. The internal volume of 110, thus reducing or minimizing the cycle time for vacuuming or venting the pump, in this embodiment (for example only, the volume VI of the load lock 110 may be approximately 7 liters with loading One of the gates 110 has a gas flow rate of about 60 standard liters per minute (slpm). In the alternative embodiment, the load gate 110 may have a volume of more than or less than 7 liters and has any suitable gas flow rate within the load gate 110. The gas may be any suitable gas including inert gas, conditioned air or atmosphere, which is self-existing; reducing volume and increasing flow rate may allow for rapid pumping/discharging cycles and higher substrate throughput, and loadgate 110 may be configured to isolate gas The expansion causes particle contamination to be minimized. Referring to Figure 7, the transfer compartment 200TC of the transport unit 200 has a clearer 12 200915464 display, it should be noted that the cover of the transport compartment 200TC has been removed for clarity, as can be seen in Figure 7. The transfer compartment is enclosed within the outer casing 200H, which is rectangular in this example. In an alternative embodiment, the outer casing 200H can have any suitable shape. The inner wall of the transfer compartment 200TC is shown in this example substantially along the outer casing. 200H outer contour, but in an alternative embodiment, the inner walls (ie, top, bottom, and sides) may be contoured as the substrate moves within the chamber 100 to reduce the internal volume of the chamber 100 for vacuum evacuation purposes. The above embodiment of Fig. 6. In this embodiment, the transporting compartment 200TC has an opening 700S for appropriately connecting the slitting valve 700 to the outer casing 200H, and the slitting valve 700 can be used to transport the transport compartment 200TC from the processing module 120 and / or buffer isolation of the load lock or transfer module 200, as will be described below; as will be appreciated, the slit valve 700 can be easily operated by, for example, lowering the valve or otherwise decoupling the valve from the opening 700S. There is no need to disassemble or disconnect the transfer compartment 200TC from other components of the transport system; it should be understood that in other embodiments, the valve 700 can be inserted into the top of the penetration opening 700S (ie, inserting the interior of the self-transporting compartment 200TC through the outer casing 200H) rather than The bottom of the opening 700S, In an alternative embodiment, the transfer compartment 200TC can be configured to allow the valve 700 to be inserted (: / detached) via any suitable side of the transfer compartment housing 200H. The transfer compartment 200TC can also include a small connector 230 for attaching a processing module To the transfer compartment 200TC, the connector 230 can be any suitably constructed connector having suitable seals to prevent the processing module and/or the transfer compartment

The leak of the internal atmosphere of 200TC. It should be noted that in the present embodiment, the slitting valve 700 is disposed along the inner wall of the transfer compartment 200TC. However, in an alternative embodiment, the slitting valve 700 can be disposed in a manner similar to the above, for example, in a connector, that is, For example, the connector 230, for example, the connector may have an opening substantially similar to the opening 700S through which the slotted valve may be attached or detached, as shown in Figure 7, the transport compartment 200TC 13 200915464 may also include a suitable transfer device Or a robot 600 for transporting the substrate S through the transfer compartment 100 as will be described below. Referring to FIG. 9, the cross section of the loading gate portion 200LL of the substrate processing system 200 of FIG. 2A is shown in more detail. The inner wall of the loading gate 200LL (ie, the top, bottom, and sides) may also follow the path of the substrate moving within the loading gate portion 200LL. The profiling is to reduce the internal volume of the loading gate portion 200LL, so that the cycle time for vacuuming or exhausting the pump is reduced or minimized. In this embodiment and for example only, the volume of the loading gate portion 200LL is used. V2 is about 3 liters, and the gas flow rate through the load gate portion 200LL is about 90 standard liters per minute (slpm); in alternative embodiments, the volume of the load gate can be more or less than 3 liters, and can have any suitable Gas flow rate. The gas in the load gate portion 200LL may be any suitable gas including inert gas, regulated air or atmosphere, and is not limited to this; reducing the volume and increasing the flow rate can allow rapid pumping/discharging cycles and higher substrate throughput, loading the gate The 200LL can be configured to minimize particulate contamination by isolating the expansion of the gas within the load lock portion 200LL. Referring to FIG. 9A-9D, another embodiment of the transport module 900 is shown. In the embodiment, the transport module 900 includes a buffer portion 900B and a transport cabin 900TC formed in, for example, a housing 900H. In this embodiment, the outer casing 900H can be a single or a unitary structure. In the alternative embodiment, the outer casing 900H can be an assembly; the buffer portion 900B and a transfer portion 900TC can be separated by a wall 970, and the wall 970 can include a The opening or slit 970S is provided between the buffer portion 900B and the transfer chamber 900TC, and the combination of the buffer portion 900B and the transfer chamber portion 900TC can function as a load gate between the EFEM and the processing module; in this embodiment, The buffer portion 900B and the transport compartment 900TC may not be isolated from each other, but in the embodiment thereof, in the case of 14 200915464, a slotted valve may be detachably disposed between the buffer portion 900B and the transfer cabin portion 900TC, so that the two portions are mutually relocated. The isolation and the buffering portion 900B are converted into, for example, a loading brake as will be described below. The buffer portion 900B can include a substrate buffering device 920 for buffering at least one substrate. The buffer portion 900B can also have a calibration function to calibrate the reference of a substrate for processing. In other embodiments, the buffer portion can be a thermal substrate. Cooling or any other support method is provided for substrate processing; in yet other embodiments, the buffer portion can be configured to perform any suitable processing operations on the substrate. The transfer compartment 900TC can include a transfer robot 930 for transporting the substrate S from the buffer 920 through the slit 970S and through the valve 940V to a processing module, and vice versa, the valve 940V can be used for connection transport The module 900 is a part of the connector 940 of one of the processing modules; in other embodiments, the valve 940V can be inserted or connected to the connector 940 via an opening in substantially the same manner as described above with reference to FIG. 7; In other embodiments, valve 940V can be inserted through, for example, one of the openings in the bottom of transfer tank 900TC, as described above, to abut, for example, an inner wall of transfer tank 900TC; in an alternative embodiment, valve 940V can be placed in transport tank 900TC And/or any suitable portion of the connector 940, another valve 960 can be disposed on the other opposite side of the transport module 900 to permit attachment of the buffer portion 900B to, for example, an EFEM or any other suitable component of the processing device. In this embodiment, the valve 960 is shown as an air valve, but in other embodiments, the valve 960 can be any suitable valve, such as a slotted valve; the transport module 900 can also have connectors 950, 95 to connect For example, vacuum and gas lines to the transfer tank 900TC and/or the buffer portion 900B. Referring to Figures 10A-10D, another configuration example of the transfer module 900 is shown. 15 200915464 In this configuration, the transfer module housing 900H can be provided with an opening 1000S through, for example, the bottom of the housing to open a slit valve 1适当 is properly coupled to the outer casing 900H via the opening 1000S as previously described with reference to Figure 7; the slitting valve 1000 is available to isolate the buffer from the transfer tank 900TC and convert the buffer to a loader Gate 900LL 'As indicated above, the opening i〇〇〇s and the valve 1〇〇〇 may be configured to be inserted through the outer casing 900H from the bottom of the casing or from the interior of the transhipment compartment; in alternative embodiments, the same valve and opening may also be placed The interior of the loading gate 900LL of the transfer module 900. (Figure HA-12B illustrates that the transfer module 900 is equipped with a transfer robot 930 that extends at various locations, for example, Figures 11A and 11B show that the transfer robot 930 extends through the valve 940V' and Figures 12A and 12B show the transfer machine The hand 930 extends into the load lock 900LL (or buffer) of the transfer module 900. The operation of the transfer robot 930 will be described in more detail below. Referring to Figures 13A-B, 14A-C and 15A-B, an implementation is now An example of a substrate transport device 1400 is illustrated. The small, fast-switching two-way transport device of the following example may include a two-axis transmission having unequal arms and two differentially coupled end effectors; The transport device i4 can have 1 or more suitable configurations for more or less than two end effectors, and/or more or less than two drive shafts. As can be seen in Figure 13A, the transport device 1400 displays The transport device 1400 can be disposed in any suitable component of the processing system in an alternative embodiment, such as in the shipping compartment 1 of the processing system. As can be seen in Figure 13B, the transport device 1400 can be Have one or two axes The coaxial transmission system 13 01 ' is substantially similar to, for example, the application of US Patent No. 11/179,762, filed on the co-pending application, the name, UNEQUAL LENGTH SCARA ARM, 2005 7 16 200915464月11曰 application, the disclosure of which is incorporated herein by reference in its entirety, for example, the transmission system 1301 may include a cover coaxial coaxial core assembly and two motors 1362 and 1366 one housing 1301H; In an alternate embodiment, the transmission system 1301 can be provided with more or less than two motors; the transmission shaft assembly 1360 has two transmission shafts 1368A and 1368C, and in alternative embodiments more or less than two transmissions can be provided. The first motor 1362 includes a stator 1378A and a rotor 1380A coupled to the inner shaft 1368A. The second motor 1366 includes a stator 1378C and a rotor. The 1380C is coupled to the outer shaft 1368A. The two stators 1378A and 1378C are fixedly mounted. The outer casing 1301H is at a different vertical height or position along the outer casing; in the present embodiment, for illustrative purposes only, the first stator 1378A is a lower stator, and the second stator 1378C is an upper stator, and each stator usually includes a The magnetic coil, the two transmission shafts 1368A and 1368C are arranged coaxially; the two rotors 1380A, 1380C preferably comprise permanent magnets, but may comprise a magnetic induction rotor without permanent magnets; the sleeve 1363 may be disposed on the rotor 1380 and the stator 1378 Between, to allow the transport device 1400 to be used in a vacuum environment, wherein the drive shaft assembly 1360 is placed within the vacuum environment, and the stator 1378 is placed outside of the vacuum environment, however, if the transport device 1400 is only intended to be used In an atmospheric environment, it is not necessary to provide a sleeve 1363. In other embodiments, the robot can be configured to isolate the arms, rotors, and stator interior from the vacuum environment; in alternative embodiments, suitable seals can be provided for the rotor and stator to be isolated from the vacuum environment, It is not increased by the transmission mechanism of the transfer robot. The first shaft 1368A is an inner shaft extending from the lower stator 1378A. The inner shaft has a first rotor 1380A and a lower stator 1378A arranged in a row, the outer shaft 1368C extends upward from the upper stator 1378C, and the outer shaft has a second rotor. 1380C and 17 200915464 The upper stator 1378C is arranged in a row, the different bearings are disposed around the shaft 1368 and the outer casing 1301H, and the shafts are allowed to rotate independently with respect to each other and the outer casing 1301H; in an alternative embodiment, the two motors 1362, 1366 can be configured The automatic bearing motor is such that the rotors 1380A, 1380C are substantially free of contact, but can be supported inside the housing by forces such as their corresponding stators 1378A, 1378C applied to the rotors 1380A, 1380C; in other alternative embodiments, the motor can be coupled to The bulkhead of the transfer compartment 100 is as described, for example, in the U.S. patent application entitled "Substrate Processing Apparatus with Motor Coupled to the Wall", Attorney Docket No. 390P013018-US (-#1), US Serial No.: 60 /950,33 Bu application on July 17, 2007; and US patent application name "substrate transport device", Attorney Docket N〇.390P010885-US (PAR) > US Serial No.: 1 2/117,355 ′ May 8th, 2008 application, the disclosures involved in this case were all incorporated into the case. Each of the axes 1368A, 1368C can be provided with a suitable position sensor that can transmit the rotational position of the shaft 1368 relative to each other and/or relative to the housing 1301H to the controller 310 (see FIG. 3D), and any suitable sensor can be used. 'Including optical and inductive sensors, but not limited to this. The outer shaft 1368C is fixedly coupled to the upper arm 1401, such that the shaft 1368C and the upper arm H01 rotate about the shaft z as a unit, the second shaft 1368 (: can be coupled to the end effector pulley 1437, and the end effector 14 〇 3, 14〇4, as will be described below. In the alternative embodiment, the transmission shafts of the transmission shafts (ie, the upper arm and the end effector) can be placed on one of the arms, for example, the transmission of the upper arm is rotated. The female device is placed on the shoulder joint 1310, and the actuator for rotating the end effector is disposed on the wrist joint 1312; in an alternative embodiment, the transport device can be provided with any suitable 18 200915464 transmission system (coaxial or non-coaxial) Having more or less than two drive shafts, in other embodiments, the drive train can include one of the z-axis transmissions for vertical movement of the arm assembly.

As shown most clearly in Figures 14A-C, the transport device 1400 includes a base 1405, an upper arm 1401, a forearm 14〇2, and two end effectors 1403, 1404. In the present embodiment, the upper arm 1401 and the forearm 1402 may have unequal lengths as previously described in the 'Application No. 11/179,762'. For example, the forearm 1402 may be longer than the upper arm 1401. The volume ratio of the extension of the arm assembly can minimize the unequal length of the upper arm 1401 and the forearm 14〇2 so that the swing diameter of the arm assembly in the retracted position still maintains the total arm length of the upper arm and the forearm. The swinging diameter is the same, however, the unequal length of the upper arm 1401 and the forearm H02 can be tolerated. For example, the equal length link arms having the same swing diameter always have a large extension or extension, and thus the volume ratio of the arm assembly 1400. Can increase its stretch. The upper arm 14〇1 is rotatably coupled to the base 1405 at a shoulder joint 1410, the forearm 1402 is rotatably coupled to the upper arm 1401 at an elbow joint 1411, and the end effector 1403 4404 is rotatably coupled to the forearm 14〇2 in a wrist joint ^^: Although the embodiment shown in Figures 14A-C is provided with a two-end effector, it is to be understood that the arm assembly may have more or less than two end effectors. The upper arm can be rotatably driven at a shoulder joint 141〇 by a first drive shaft 1436 (which can be substantially similar to the shaft 1368C of the drive plan 1301), a second drive shaft 1435 (which can be substantially similar to The transmission system 13〇1's '丨3-68 8 7 can be coupled and rotatably drives a first end effector pulley Η" on the second shaft 1435, and borrows 1 when two = support, is the first When the two shafts 1435 and/or the upper arm rotate, the shoulder river 19 200915464 wheel 1430 does not rotate; for example, the shoulder pulley 143 固定 can be fixedly coupled to the base 1405 by the joint member 1431 to prevent the shoulder pulley 1430 from rotating (ie, the forearm from In the alternative embodiment, where the theta movement of the transport device (ie, the transport arm rotates integrally) is required, the shoulder pulley 1430 can be coupled to another motor of the transmission portion to prevent the forearm 1402 and the upper arm 1401. The upper arm 1401 can be appropriately configured such that the connecting member 1431 is coupled to the base 1405 through the upper arm 1401. In an alternative embodiment, the shoulder pulley 143 can be rotated in any suitable configuration. Fixed, including to a third non-rotating axis, The first end effector pulley 1440 is disposed on the elbow joint I!, and the second end effector pulley 1440 can be freely rotated by, for example, a suitable bearing 1443 and suitably supported around the axis 1411'; And the second end effector pulleys may be coupled to each other by a belt 1439. Although only one belt is shown, it should be understood that any suitable number of belts may be used. It should be noted that in alternative embodiments, the belt 1439 may be substituted for any suitable The connecting member includes a chain, a conveyor belt and a continuous stalk, but not limited thereto; an elbow pulley 1441 can also be freely rotated about the elbow axis 1411, and the elbow pulley 1441 can be fixedly coupled to the forearm 14〇2 by being suitably supported by, for example, a bearing. The elbow pulley 1441 is used to transmit the rotation of the forearm 1402 about the elbow joint 1411. The elbow pulley 1441 can be similarly coupled to the end effector pulleys 1437, 144 ,, for example, by the belt 1438. The pulley 1430. In the present embodiment, the shoulder and elbow pulleys 1430, 1441 can have a diameter of about 2 to i, so that the predetermined arm can be maintained while the transport device is extended and contracted. The trajectory, in the alternative embodiment, the shoulder and elbow pulleys 1430, 1441 can have any suitable diameter ratio. 20 200915464 The first and fourth ends of the writing, the code is just inside the wealth joint 1411 round 1 secret, M46 Can be placed on the forearm pulley 1440, where the squeegee is coupled to the second end effector 1446 as shown as a separate % of the third and fourth end effector pulleys 1445, such as two chutes. Then, it may be only - having a shape. A fifth and sixth end effect example, the pulley may have any suitable structure in the wrist joint (4) 2, and if the bearing is rotatably supported on the wrist shaft 1412, 145G, according to the above-mentioned form, by the H pulley (10) to the fifth end effector pulley 142 ^ such as - belt assist 'drive transmission ground to the sixth end effect " 1423 ' cocoa is poor The connection is such that the end effector has the following shape: == As will be described below, for example, the belt 1422 can be twisted into a U-shaped configuration as shown in the opposite direction of the pulley 1420. At the end of the third stage of the first class, the action thief 1404 can be fixedly transferred to the fifth end effector pulley 1420, and when the gyro is rotated by the g pulley, the end effector immediately rotates with the second end effector. To the sixth end of the actuator pulley and 'as soon as the pulley is rotated, the end effect of the stomach just rotates. In alternative embodiments, the transport device 1400 can have more or less than two end effectors. The end effector can have any suitable configuration, including the illustrated end effectors 1403, H04, 14〇31丨404, Type examples, but are not limited to this. It should be noted that in this embodiment, the pulley system is disposed on the upper arm 14〇1 and the forearm 14〇2, and the forearm can be sealed and/or exhausted by, for example, a vacuum fruit 200915464 to prevent particles from the transmission system. The substrate S carried by the pollution transport device 1400; in an alternative embodiment, the pulley can be placed in any suitable position, and it should be noted that the pulley configuration shown in Figures 14A-C and 15A-B is intended to be exemplified, and the pulley can be any suitable The configuration is for the transmission robot arm and the end effector. Referring to Figures 16A and 16B, the extension of the transport arm 1603 into, for example, a load lock (or buffer) 1601 is illustrated: the transport device 1600 can be substantially similar to the transport device described above with respect to Figures 14A-C and 15A-B, In this example, the transport arm 1603 is displayed at the six listed position AF, wherein the A position is indicated as the neutral or starting position of the transport arm 1603, and the F position is indicated as the position where the transport arm 1603 is extended, for illustrative purposes only. It should be noted that the term 'starting 〃 and 申 〃 〃 position is only used to describe the action of the transport arm. In the A position, the end effectors 1630, 1640 are generally arranged above the upper arm 1610 to extend or move the end effector (one of the end effectors 1630, 1640) to the position of picking or placement in the direction indicated by arrow 1605 ( That is, the position of the substrate in the loading gate/buffer portion), the upper arm 1610 rotates in the direction of arrow 1605; the transport device transmission system 1301 (Fig. 13) moves the arm and the end effector as indicated by a control rule, and the driven forearm The 1620 is driven in the direction of arrow 1606 via rotation of the upper arm 1610 and the fixed shoulder pulley 1430, and the end effector is driven by the end effector pulley and the shaft 1435 such that the end effector 1630 is rotated in the direction of arrow 1608. The differentially coupled end effector 1640 then rotates in the direction of arrow 1607. As can be seen in Figure 16B (the transfer robot has an end effector for clarity purposes), the substrate placed on the end effector can be used in the transfer compartment 1602. An arched or U-shaped passageway 1670, while being outside the transfer compartment 1602 (i.e., within the load lock or buffer portion 1601) 22 200915464, follows a substantially straight or linear passageway 1680. In particular, in this embodiment, the linear passages 1680 on opposite sides of the transfer compartment may be substantially aligned with each other; although it will be appreciated that in alternative embodiments the passages may be angled relative to one another; as will be appreciated, The contraction of the arm 1603 occurs in a manner substantially opposite to the extension of the arm 16〇3; it is further understood that the 'three-link transporting robot arm is extremely efficient, and has a cover that allows the transport arm 1603 to have the smallest extension. Space or footprint (transport device carrying the substrate). In this state, the volume ratio of the extension/extension of the transport device can be maximized, and it is known that the double end effector can be applied to the rapid exchange of the substrate, that is, when one end effector picks up a processed substrate, and the other end effector An unprocessed substrate is placed in the load lock/buffer portion. Referring to Figures 17A and 17B', the transfer arm 1603 is extended into, for example, a processing module (not shown in Figure 17B but indicated by the letters, PNT). In an alternative embodiment, the arm 1603 can be extended into the following manner. In any suitable position, the transport device 1600 can be substantially similar to the transport device described above with reference to Figures 14A-C & 15A_B, which in this example is shown at seven listed positions GM 'where the G position is the starting position of the transport arm 1603, The μ position is the position where the transport arm 1603 is stretched. 'There should be attention to the noun, the starting 〃 and the extended 〃 position for convenience of describing the action of the transport arm. In the G position, the end effectors 1630, 1640 are generally arranged above the upper arm 161 , to extend or move the end effector (one of the end effectors 163 〇, 164 )) in the direction indicated by the arrow 17 〇 5 to The position at which the substrate is picked up or placed (ie, the position of the substrate within the processing module), the upper arm 1610 is rotated in the direction of arrow 1705; the transport device transmission system 13〇1 (Fig. 13) is moved as indicated by a control rule to move the arm and end Actuator, driven forearm 1620 is rotated by upper arm 1610 and fixed shoulder pulley 143 and 23 200915464 is driven in the direction of arrow Π 06; end effectors 163 〇, 164 〇 can be driven by end effector pulley and shaft 1435 So that the end effector 四 (4) is turned in the direction of the arrow 1708, and the differentially coupled end effector 164 旋转 is rotated in the direction of the arrow Π 07. As best seen in Figure 17A, the substrate placed on the end effector, in the transfer compartment 16〇2, can follow a generally arched or passageway 70, and in the transfer compartment 1602 (i.e., in the processing mode) When the group ρΜ is outside, it follows a substantially straight or linear path 178〇. As can be appreciated, the arm 丨 6〇3, for example, the contraction of the processing module PM occurs in a manner substantially opposite to the extension of the arm 1603; further, in terms of the extension of the delivery arm, the three-link The transport robot arm is extremely efficient, but has the smallest footprint or footprint (the carrier carrying the substrate), in which the volume ratio of the extension/extension of the transport device can be maximized. It should be noted that the double end effectors 1630, 1640 can be applied to the rapid exchange of substrates, that is, when one end effector picks up a processed substrate, and the other end effector places an unprocessed substrate in the processing module, for example Still referring to FIG. 17A, the substrate is quickly exchanged to, for example, a processing module (not shown in the figure but indicated by the letter 〃). In this example, the two end effectors 163〇, 164〇 can be driven by a substrate and activated at the G position, and the substrates are arranged in a row with the folding robot arms 1610 and 162G, and the first substrate can be placed by the end effector. In the processing module, as described above and in the river of FIG. 17, after the substrate is processed, the end effector 1630 can be extended back into the processing module to pick up the substrate; the end effector is extended substantially opposite to the transport device. State, retracted from the processing module until the processed substrate is at least partially into the transfer compartment 16〇2; once the treated substrate has at least partially entered into the transfer compartment 1602, if so, on the treated basis 24 200915464 There will be sufficient clearance between the transfer bulkhead and/or the slit valve, and the end effector drive system will rotate in a clockwise or counterclockwise direction, causing the end effectors 1630, 1640 to exchange positions. In this example, the end effector 1630 is placed in the processing module as the transport device is extended, but after the two end effector exchange positions, the end effector 1640 becomes closed into the processing module. It is to be noted that in order to complete the rapid exchange of the substrate, the transport arm 1603 can be completely retracted to the g position shown in FIG. 17A for example only, when the arm 1603 is tied to the clamp (or along any suitable position along the transport path), There may be sufficient clearance between the substrate and the substrate and the transfer bulkhead and/or the slit valve. After the end effectors 163, 164 are in the exchange position, the arms 16〇3 are stretched in the above-mentioned manner, and the unprocessed substrate is subjected to The end effector 1640 is placed in the processing module; it is understood that when the arm 16〇3 is extended, when one of the substrates is placed outside the transfer compartment 1602, the 'substrate (on the two end effectors 1630, 1640) is substantially positioned and Moving along a centerline of the processing module and/or an EFEM operating path; as can be appreciated, the rapid exchange of the substrate to and from the buffer portion or the loading gate of the transport module can be performed in substantially the same manner as described above. As can be seen in Figure 18, in one configuration example, the arm ι8 can be configured such that the end effector 1803 can be fitted over a gap ι 83 如 in the processing module, as shown in the figure. The substrate holder 1810 can be defined by the substrate holder 1810 of the loading gate or the buffer portion. In this embodiment, the processing module can be provided with a substrate holder 1820 separated from each other by about 120 degrees. In an alternative embodiment, the substrate holder can be provided with each other. Any suitable spatial relationship. The end effector can have the configuration shown in FIG. 8 so that when the upper arm 1801, the forearm 1802, and the end effector 18〇3 protrude into the processing module, the end effector 1803 can be fitted to the substrate holder 182. Similarly, the end effector 1803 can also be configured such that when the transfer arm extends into the loading gate/buffer portion, 25 200915464 can be fitted between the substrate holders 1810; in alternative embodiments, the end effector can have any suitable configuration. type. The bidirectional movement of the transfer arm 1800 can also be seen in FIG. 18. For example, the arm 1800 can extend along the passage 1850 into the processing module PM on one side of the upper arm rotation axis 1860 and into the loading gate/buffer portion LL on the upper arm rotation axis. On the other side of 1860, the transfer arm 1800 is not rotated, such as around a unit of the axis 1860 (i.e., the arm can be rotated without rotation to extend in a direction opposite to the coaxial); in an alternative embodiment, the arm 1800 is configured to have an additional The motor, which rotates the arm as a unit to allow it to extend in other directions rather than along the passage 1850. Referring to Figures 19A-D and 20-23, the automatic vacuum wafer transport system described herein can be applied as a hollow block to configure a cluster of implements having any suitable number of processing modules, as shown in the example. In this embodiment, the width of the clustering implement is not affected by the width of the transport compartment, but only according to the width of the EFEM or the processing module; as shown in the embodiment, the clustering implement can be processed in a series of single steps. The modules (ie, each processing module performs only a single processing step) are connected to the respective transport modules that are connected in turn to a front end unit; in an alternative embodiment, between the transport compartment (which is in a vacuum) and the load lock A front end unit is used; in an alternate embodiment, each processing module can perform a variety of processing steps. An example of a clustering tool having one to four single-step processing modules is shown in Figures 19A-D. In an alternative embodiment, the clustering tool can have more than four processing modules, as suggested above, EFEMs have operational paths (two of which are represented by numbers CL1 and CL2 in Figures 20-23), which are separated by a distance D, such as a 300 mm diameter wafer distance D of 505 mm; as can be seen from the above, in an alternative embodiment The distance D can be any suitable distance. It is to be understood that the embodiments described herein can be scaled in size and configuration, and EFEMs and processes configured for any suitable size substrate 26 200915464 f

The modular fit, for example, the size of the transport robot, transfer bay, load lock or any other suitable component of the transport unit or module described herein may be increased or decreased depending on the size of the substrate being processed. Since the three-link unequal-arm transfer robot and the transfer pine group disclosed herein, the transport modules 1〇1, 2〇〇 (Fig. ία, 2A) may have a width smaller than the interval D between the EFEM operation paths, The transfer module ι〇ι, 2〇〇 and the processing module 1940 are arranged in a row with the EFEM operation path center lines CL1, CL2. As can be seen in Figure 19A, the EFEM 1910 is configured with a transfer module 1925, which can include a transfer compartment 1935 and a load lock 1920 and any associated slit or air valve; the EFEM 1910 can include a configuration to have access to two Loading 埠19〇〇 and loading brake 1920, one of the transfer robots 1915; FIG. 19B shows EFEM 191〇, and two transfer module 1925 configurations, the EFEM 1910, can include configurations to have access to two loads 1900 and two Loader 1920, one of the transfer robots 1915; FIG. 19C shows the EFEM 1910" and three transfer module 1925 configurations, which may include configurations to have access to three load ports 19 to and three load gates 1920 Transfer robot 1915', Figure 19D shows EFEM 1910'" and four transfer module 1925 configuration, the EFEM 1910," may include a transfer robot with a passage 四 1900 and a load 1920 configuration 1915 ", Note that the transfer module 1925 can be seen with the load lock configuration as shown, for example, in Figures 2 and 21; or with the buffer configuration as seen in, for example, Figures 22 and 23. See Figure 19 _19〇 The processing module 194G connected to the transfer module 1925 Having a width less than a half of a particular 750 mm width. In other embodiments, the connection to the transfer mode electrical reprocessing module 'is shown in Figures 19A-19D, which may be part of a single-processing module with multiple processing chambers For example, the processing module of FIG. 19B can be a separate dual processing module (ie, two processing modules in a single unit), 27 200915464 and the processing module 194 in FIG. 19C can be a The three processing modules (ie, the two processing modules are in a single unit), etc. Referring to Figures 21 and 24a, an operational example of the transport system is described with respect to the operating path CL2, first loading the gate 9〇〇LL The exhaust gas is first exhausted and opened at one of the interfaces 160 (Fig. 24A, block 24A); the front end transport device 2120 is activated, and one of the substrates s is transferred from the load port 19 to the load gate 900LL. For processing (Fig. 24A, block 24〇5); the transfer valve is sealed, and the loading chamber 900LL is pumped into a vacuum (Fig. 24A, block 241〇); when the processed work vacuum is obtained, the slit valve 1000 is Open (Fig. 24A, block 2415); placed in the transfer cabin 900TC The transport robot 2130 in vacuum, moves the substrate away from the load gate 9〇〇LL via a transport path such as that shown in FIG. 16B, and transports the substrate in the transport bay 900TC (FIG. 24A, block 2420); in the transport bay and loading The slit valve of the gate is closed 1 (Fig. 24A, block 2425); it should be noted that the robot 2130 of this example may have an end effector, and the operation of a robot equipped with a double end effector will be explained As follows: the slit valve 940V is opened (Fig. 24A, block 2430); at this time, the processing chamber 194 is emptied, and the transport device 2130 is in the so-called starting position, and the transport device 213 is transformed to pass through as shown in Fig. 17B. The transfer path to full extension (or any other suitable extension ancestor) 'where the substrate S is removed for processing (Fig. 24A, block 2435); the transport 2130 is retracted to its starting position, and the slit is processed When the valve 94〇V is closed and the Φ is sealed, the substrate s is subjected to a processing cycle in the processing chamber 194Q (block 244G in Fig. 24A); after processing, the substrate S is substantially in the opposite form to the above, f to the _ LL The robot picks up the processed substrate there, And put it in the plane for 1 埠 _ (Figure 24A' 28 200915464 box 2445), at this time p + ^ ^ self into a cycle, and a new cycle begins to process a new Substrate. If the boat is available, the loading gate 900LL may include a buffering portion, and when the substrate is placed at *6, the new substrate may be transported from the loading chamber into the transporter for processing. As shown in FIG. 20, another embodiment of FIG. 24B has a robot 2130 having an end effector. The end effector can be differentially driven for alternate use for picking up or unloading. When the 'second end effector will be moved through the path indicated by 16B & m, the extra end effector allows a substrate to be retained without the need for a buffer rack'. Therefore, the capacity of the system can be increased by the rapid exchange of the wire as described above. . In operation, each end effector will first hold a substrate to be processed (Fig. 24B 'block 2460); one of the end effectors places its substrate in the processing chamber for processing (Fig. 24B 'block 2465); Upon completion, the processed substrate is picked up by the empty end effector and evacuated from the processing chamber (Fig. 24B, block 2470); the end effector holding the processed substrate is moved into the storage position while holding the unprocessed substrate The differential coupling end effector moves forward, placing the unprocessed substrate in the process chamber (Fig. 24B, block 2475), (this is the rapid exchange of the substrate); during processing, as described above, the load brake is exhausted And open to allow the front end robot to mount a new substrate. 'The new substrate can be transported by the transport device 2130, and the differential drive end effector' is exchanged from the load gate 100 to the processed substrate. In this form, a simplified, highly adaptable transport system can be constructed for application to individual processing chambers, and the overall transport mechanism provides for transporting the substrate to one of the processing chambers for recycling of the next processing cycle during processing; this provides Installation of the complete 29 200915464 module in the ability of the existing front-end system to allow the side-by-side configuration of the processing module, thus avoiding the cumbersome system caused by the increase in the diameter of the substrate. As can be appreciated, the main cycling event in the substrate processing is the vacuum pumping operation of the load gate 900LL, and the pump 140 is operated simultaneously to maintain the vacuum of the processing module 1940 and the transfer chamber 900TC, and the pressure sensor can sense the loading. The pressure in the gate 900LL, and provides an indication such as the controller 310 to load the pressure in the gate 9〇〇LL. The time required to pump the load lock 900LL into a vacuum depends on the volume of the tank 900LL, in order to reduce the volume of the load compartment, All the space in the compartment that is not necessary for transporting or retarding the substrate is filled, and the side, the top and the bottom wall of the remaining wall are filled to reduce the air contained in the loading gate 900LL. Referring to Figure 24C, it should be understood that, for example, controller 310 can include appropriate counting methods to operate the valve and transfer robot as described above with reference to Figures 24A, 24B, and Figure 24c can be used to perform the various functions described above. 2480 - Example, each processing module is provided with appropriate sensing elements to detect the processing progress and the timing of the operating steps. Referring now to FIGS. 25A-F, another embodiment of the substrate transfer system is illustrated. The processing system is substantially similar to the buried system of the above embodiment. In this embodiment, the transfer compartment 2520 can be directly coupled to a loading gate module 2510 (without passing through An EFEM is reconnected to a load lock module. In an alternative embodiment, the transfer case can have any suitable configuration; the processing system shown in this embodiment is configured to have a single processing module (without EFEM) A separate vacuum system, in an alternative embodiment, the processing system can be clustered into an assembly substantially the same as shown in Figures 20-21, with a transport compartment directly coupled to the load gate module without intermediate EFEM; The model transports the substrate directly to the processing module by the self-loading gate module 2510, and only transfers the substrate by "one touch" 30 200915464 or a single transfer substrate (that is, when the transfer between the loading cassette and the processing module is carried out, the substrate is only transported. The device is touched once. For example, the transfer robot can pick up the substrate from the loading cassette and transfer it directly to the processing module without removing the substrate or transporting the substrate to another transport device. The EFEM-free vacuum system shown in Figures 25A-F allows applications including vacuum metrology, substrate research and development, and demonstration of disposable substrate production and systems. Since not limited to this, operation without EFEM systems can provide a low The vacuum system of cost. In one embodiment, the vacuum system includes a load lock module 2510 having a substrate lift/indexer, a load lock/transport module 2520, and a single processing module 2530. The transfer compartment 2520 can include a transfer robot 2540 that is substantially similar to the small two-axis dual end effector robot described above with reference to Figures 13 and 14A-C; in this example, the load lock module 2510 includes a lift/indexer The transfer robot 2540 may not have a Z-axis transmission. An appropriate interface may be provided between the loading cassette and the transport compartment of the bracket interface flange to allow the substrate to be detached from the bracket and indexed corresponding to the transport robot, which may be substantially similar to the transporter The shipping compartment 200TC of the module 200 (constructed with the valve 700). In other embodiments, the loading gate module 2510 is not equipped with a lifting/indexing device, and the transfer robot 2540 can be equipped with a Z-axis transmission; as is known, the robot 2540 includes a Z-axis transmission. The transfer compartment 2520 can be substantially similar to the transfer compartment 100. As can be clearly seen in Figures 8 and 9, the internal volume VI that can be possessed is larger than the internal volume V2 of the transfer compartment 200 TC, and the larger of the transfer compartment 100 The volume can accommodate the Z-direction movement of the transfer robot 2540; however, as will be appreciated, the transfer robot 2540 includes a Z-axis transmission, 31 200915464. The rotor portion of the motor, as described above with reference to Figure 13B, may be exposed to vacuum. The atmosphere, which will increase the cycle time of the pumping; in an alternative embodiment, a suitable sealing device can be used to isolate the rotor portion of the Z-axis transmission from the vacuum environment. The operation of the processing system shown in Figures 25A-F can be substantially similar to that described above with reference to Figure 24B, with the substrate being transported from one of the substrate carriers of the magazine 2510 and transported directly to the processing module 2530. Figure 25C-F shows a side view and an isometric view of the transport system of Figures 25A-B with different structural loading cassette modules 2510', 2510". In this embodiment, the loading cassette module 251 (shown as a bottom opening) Loading the gate module, and may include a substrate lifting/indexing device, and the loading and unloading module 2510" may not be provided with a lifting/indexing device; in an embodiment, for example, if the conveying device 2540 is not equipped with a stern-axis transmission device, The loading cassette module 2510' can include a lifting/indexing device and loading the cassette module 2550. If not, the loading cassette module 2510' can be configured to operate with a top or bottom open substrate cassette. Examples of the substrate for the application of the group of 2510' can be found in the co-pending applications of U.S. Patent Nos. 11/556,584, 11/594,365 and 11/787,981, entitled "REDUCED CAPACITY CARRIER TRANSPORT, LOAD PORT, BUFFER SYSTEM" The carrier transport device, loading buffer, buffer system), respectively, were applied on November 3, 2006, November 7, 2006, and April 18, 2007, respectively, and the disclosures involved in this case are all Into the case In another embodiment, the transport device 2540 is equipped with a Z-axis transmission, and the loading cassette module 2510" can be configured to cooperate with, for example, a slit valve or air valve 960 (see FIGS. 9A-D). Side-opening substrate carrier operation; between the loading cassette module 2510 and the transfer compartment/loading gate 2520' can be equipped with any suitable sealing device, such as bellows seal, 俾32 200915464 to prevent the internal atmosphere of the transfer compartment/loading gate 2520 When leaking, the vertical movement of the robot 2540 and/or the substrate is still allowed. The configuration and compact size of the transport tanks 200TC and 100 of the example enable the loading cassette module, the transfer compartment 2520 and the processing module 253 to be along the same center. The line cL configuration, the reduced capacity of the loading gate/transportation compartment, also reduces the time required for the exhaust and/or pumping of the loading gate/transportation chamber to a vacuum, which is an increase in capacity.

Referring now to Figure 26, there is shown an embodiment of another processing system configuration. In one embodiment, the transfer compartment 2600TC can be substantially similar to, for example, a transfer compartment 100 or 900 TC, and can be applied as a linear distribution. One of the processing units of the processing tool 26〇(), as described in U.S. Patent No. 11/422,511, the disclosure of which is incorporated herein by reference. Application on the 18th of the month, the disclosure of which is hereby incorporated by reference in its entirety herein in its entirety in the present application, that the transfer 擒 2600TC may include a transfer robot 1400', which may be substantially similar to the aforementioned transfer robot 1400' with reference to Figures 14A-C. Hand 14〇〇, shown as having an end effector, it should be understood that the transfer robot can have any suitable number of end effectors, which can be either a non-differential drive 'transport 2600TC can be connected or fitted in any suitable form To other transfer compartments such as transfer compartment 2601TC, or any other substrate processing apparatus 2630-2632, the other substrate processing apparatus 2630-2632 may include a processing module,埠, calibrator, load lock, cooler, heater, buffer, and other transfer robots; transfer robot 1400' can transport substrate S from the transfer robot to the transfer robot, or any suitable processing device 2630-263 Between each of the four sides of each of the four compartments, there may be openings 33 200915464 2610-2613, which communicate with other substrate processing devices. Note that although the transfer compartments 2600TC and 2601TC are shown as having four sides, the replacement is implemented. For example, the transfer compartment can have any suitable number of side walls that can be opened or not opened to other substrate processing devices; in one embodiment, one or more of the openings 2610-2613 can include a valve that will transport the transfer compartment 2600TC, The 2601TC is isolated from a processing unit connected to the transfer compartment. The small size and increased capacity of the 2600TC and 2601TC transfer tanks can achieve the ratio of 'Transporter 1400', which can reduce the footprint of linear distributed processing equipment. Minimizing the volume of the transport compartment can also reduce any pumping cycle of the transport compartment. The cycle time, as can be appreciated, the load gates such as the load gates 110 and 900LL can also be applied to the line-distribution processing tool in a form substantially similar to that described in the previous control transfer tanks 2600TC, 2601TC. Referring now to Figures 27A-27C Another embodiment of the substrate transfer system is shown. In this embodiment, the transport system includes an atmospheric transfer module 2710, a loading cassette module 1900, and a processing module 1940. 1900 and a processing module 1940, it is to be understood that any suitable number of loading modules and processing modules can be coupled to the transport module 2710; in this example, the transport module 2710 can be configured as an atmospheric module. Basically similar to an equipment front end module (similar to EFEM 150 of Figure 1), the transport module 2710 includes a transfer robot 2700 that is substantially similar to the aforementioned robot 1400, wherein the robot is operated For example, in an atmospheric environment, the transfer robot 2710 can be mounted on a path 2720, such that the robot 2700 can be switched in the direction of the arrow 2730 to allow the pick-up/place substrate to be coupled to the transport module 2710. For example, a suitable example of a path-mounted transport device can be found in U.S. Patent Application Serial No. 11/159,726, entitled "Dual Arm Substrate Transport Apparatus", Applicant filed May 29, 2002. It should be understood that the motion profile of the transport robot 2700 can be substantially similar to that described above with reference to Figure 16B 'e.g., the substrate S is placed at the end; above, when within the transport module 2710 , along a roughly arched 2750 is basically similar to the passage 167〇; and when the transfer module 271 is shaped by the passage/buffer, the processing module or the lining, the Similar to the channel contact; in the embodiment, the linear path can be along the -reference center, the line scu, the scu line or the line 271 操作 the operation path" as the transfer mode for this example, the transfer mode 271〇 shows the straight group 1900 and the processing module 194〇, and the 俾 俾 于 于 于 至 至 至 至 至 至 至 至 至 至 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 珲 基板 基板The combination of the embodiment and the assembly. The loading and processing module should be understood, and the embodiments described herein may be individually or in accordance with the following description: In combination with the case, it can be known to those skilled in the art, and it is intended to be included in this series. The case is not required to be included in this series. 35 200915464 [Simplified illustration] Figure 1A and 1B: An illustration of an example of a substrate processing system in accordance with an embodiment. 1C is a partial explanatory view showing an example of a substrate processing system of the embodiment shown in FIGS. 1A and 1B. FIGS. 2A and 2B are explanatory views showing another example of the substrate processing system according to an embodiment. 3A-3D, 4A, 4B, 5A and 5B are partial explanatory views of a substrate processing system in accordance with an embodiment. 6 and 7 are explanatory views of a substrate processing system in accordance with various embodiments. Figures 8 and 9 are cross-sectional explanatory views showing an example of the substrate processing system shown in Figures 6 and 7. 9A-D are explanatory views of an example of a transport module according to an embodiment. Figures 10A-D are illustrations of an example of a transport module in accordance with an embodiment. 11A and 11B are explanatory views of an example of a transfer cabin module according to an embodiment. Figs. 12A and 12B are explanatory views of a transfer case of the transfer case module of the embodiment shown in Figs. 11A and 11B. Figure 13A is a plan explanatory view of a substrate processing system in accordance with an embodiment. Figure 13B is an explanatory view showing an example of a transmission device according to an embodiment. 14A-14C are plan explanatory views of a substrate carrying device according to an embodiment. 15A and 15B are explanatory views of another flat 36 200915464 of a substrate carrying device according to an embodiment. Figs. 16A-B and 17A-B are explanatory views of a substrate transport device transport path according to an embodiment. Figure 18 is an illustration of an example of a substrate transport apparatus in accordance with an embodiment configuration. 19A-D, 20, 21, 22, and 23 are plan explanatory views of a substrate processing system in accordance with various embodiments. 24A-B are flow diagrams of an embodiment in accordance with an embodiment. Figure 24C is an explanatory diagram of a control panel according to an embodiment. Figures 25A-F are illustrations of another example of a substrate processing system in accordance with an embodiment configuration. Figure 26 is an illustration of another example of a substrate processing system in accordance with an embodiment configuration. 27A-C are explanatory views of still another example of a substrate processing system in accordance with an embodiment configuration. [Main component symbol description] 100 Transit module 101 Transfer module 100C Transfer cabin cavity 110 Load gate 110' '110" Load gate 111 Load brake cover 120 Process chamber 130 Connector (slit valve) 140 Vacuum pump 150 Front end module Equipment (EFEM) 151 Loading 埠160 Valve 200 Single Module 200TC Transfer Compartment 300 Connector 310 Controller 37 200915464 460 Slotted Valve 600 Transfer Manipulator 700S Opening 900B Buffer 900TC Transfer Cabin 970 Transfer Bulkhead 930 Transfer Machinery Hand 920 Buffer 940 Connector 1400 Substrate transport unit 1301 Drive system 1368A, 1368C Drive shaft 1378A, 1378C Stator 1380A, 1380C Rotor 1363 Sleeve 1360 Drive shaft assembly 1437 End effector pulley 1310 Shoulder joint 1312 Wrist joint 1405 Base 1401 Upper arm 1402 Forearm 1411 Elbow joint 1436 First drive shaft 1420 Fifth end effector pulley 1421 Sixth end effector pulley 1435 Second drive shaft 1437 First end effector pulley 143 Shoulder pulley 1431 Bearing 1431 Connector 1440 Second end action Pulley 1411' elbow axis 1439, 14 38 belt 1445 third end effector pulley 1446 fourth end effector pulley 1412, wrist shaft 1620 driven front arm 38 200915464 1301 transport device transmission system 1670, 1770 arched or U-shaped passage 1680, 1780 linear passage 1830 clearance 1810, 1820 substrate holder 1802 forearm 1940 processing module 940V slit valve 1850 path CL1, CL2 operating channel center line 2480 processing control system

2510 Loading Brake Module 39

Claims (1)

200915464 X. Patent application scope: 1. A substrate processing system comprises: a loading cassette module configured to accommodate at least one substrate cassette for storing and transporting substrates, a substrate processing chamber, and an isolation transport compartment. The device can be coupled to the substrate processing chamber and the loading cassette module, and a substrate transport device is at least partially mounted in the transport compartment, and has an arm link that can support at least one substrate, and the arm link is configured The at least one substrate can be directly transported between the at least one substrate cassette and the processing chamber. 2. The substrate processing system of claim 1, wherein the substrate carrying device comprises a first arm link, a second arm link, and at least one end effector rotatably coupled to each other, first and second The arm links have unequal lengths. 3. The substrate processing system of claim 1, wherein the load cassette module is directly coupled to the transfer compartment and the transfer compartment is directly coupled to the processing compartment. 4. The substrate processing system of claim 1, wherein the processing module, the shipping compartment, and the loading cassette are disposed substantially along a generally centerline. 5. The substrate processing system of claim 1, wherein the internal volume of the transfer compartment is configured to minimize the amount of gas present in the transfer compartment. 40 200915464 6. The substrate processing system comprises: a front end module device having at least one operation path from the front end module device transfer substrate; at least one substrate transfer module directly coupled to the front end processing device; and at least one substrate processing The module is coupled to each of the at least one substrate transport module; wherein a center line of each of the at least one substrate transport module, and one of the at least one substrate processing module is substantially in line with the corresponding at least one operation path . 7. The substrate processing system of claim 6, wherein the at least one substrate transport module comprises: a first cabin configuration to interface with the front end processing device and to clamp at least one substrate; a second cabin configuration to at least one The substrate processing module is docked; and a substrate transport device is at least partially disposed in the second chamber, configured to transport the substrate from the first chamber to the at least one substrate processing module. 8. The substrate processing system of claim 7, wherein the first and second compartments are isolated from each other and from a corresponding one of the front end processing devices and the at least one substrate processing module. 9. The substrate processing system of claim 7, wherein the first chamber is configured as a substrate buffer device, and a movable valve insert is configured to isolate the first and second chambers, and convert the buffer device into a Load the brakes. 41. The substrate processing module of claim 7, wherein the first and second compartments form a single ship that can be separated. 11. The substrate processing system of claim 6, wherein the at least one substrate transport module comprises a substrate transport device for transporting the substrate between the at least one substrate transport module and the at least one substrate processing module. The substrate processing system of claim 6, wherein the substrate transfer module comprises at least a substrate buffer device, a substrate cooling device and a substrate aligner. The substrate transfer system comprises: a front end unit configured to be Transferring a substrate from a substrate cassette; a transfer module coupled to the front end unit; a substrate processing chamber coupled to the transfer module, the transfer module having a width such that a center line of the transfer module and the processing chamber Positioning in at least one operation path along the front end unit, the operation path is configured to be capable of transporting the substrate from the front end unit; and a substrate transport device is at least partially mounted in the transfer module, and configured to transport the substrate The substrate transport device includes a transmission portion, a two-arm link and at least one end effector rotatably coupled to each other; a first arm link is rotatably coupled to the transfer module The first arm link has a first length at the first end; the first end of the second arm link is rotatably coupled to the first arm link 42 20091 a second end of the fifth arm, the second arm link has a second length, wherein the rotation of the second arm link is driven by the rotation of the first arm link; and the at least one end effector is Rotatablely coupled to the second end of the second arm link and configured to clamp at least one substrate, the at least one end effector being rotatably driven from the first and second arm links, respectively. 14. The shipping system of claim 13, wherein the front end unit comprises a plurality of operational paths that are substantially parallel to one another, wherein a transfer module is coupled to each of the plurality of operational paths. 15. The transport system of claim 13, wherein the transport module includes a buffer for buffering at least one substrate, and a transport portion for covering at least a portion of the transport device. 16. The transport system of claim 15 wherein the transport module further comprises a detachable valve insert configured to convert the buffer portion into a load lock having an atmosphere that can be isolated from the transport portion. 17. The transport system of claim 15 wherein the buffer portion and the transport portion form a single compartment selectively detachable from the processing chamber and the front end unit. 18. The transport system of claim 13, wherein the transport module comprises at least one of a substrate buffer, a substrate cooler, and a substrate aligner. 43 200915464 19. A substrate transport apparatus comprising: a frame; a transmission portion coupled to the frame and having at least two motion rotation axes; and at least one transport arm coupled to the transmission portion, the at least one transport arm comprising: a first The arm link is rotatably coupled to a first end of the first rotating shaft of the transmission portion at a shoulder joint, and the second arm link is rotatably coupled to the first arm link at the first end The second end is around an elbow joint and is driven by the first arm link. The length of the second arm link is different from the length of the first arm link, and at least two substrate supports are configured to support a substrate, the at least two substrate holders being rotatably coupled to one of the second ends of the second arm link at a wrist joint, and wherein the at least two substrate holders are only coupled to one of the second rotational axes of the transmission portion, respectively The transport device is configured for the at least two end effectors to extend bi-directionally corresponding to the shoulder joints, with their respective corresponding at least two end effectors rotating substantially oppositely. 20. The substrate transport device of claim 19, wherein the transport arm is configured to transport the substrate along a substantially arcuate path within the frame; and outside the frame, a substantially straight path along the centerline of the substrate transport device . 21. The substrate transport device of claim 19, wherein the transmission portion further comprises at least one linear movement axis. 22. The substrate transport apparatus of claim 19, wherein the substrate transport arm and the actuator are configured to operate in an atmosphere or a vacuum environment. 23. A method comprising: picking up at least one substrate by a substrate transport arm disposed in a substrate processing system, self-coupling to a substrate processing system, and loading the arm directly from the substrate The substrate cassette transports the at least one substrate to a processing module of the substrate processing system, and the at least one substrate is only clamped once during the transport. 24. The method of claim 23, wherein the substrate transport arm is disposed in a transport bay coupled to the load cassette and the processing module, the method comprising an atmosphere of the isolation transport compartment. 25. The method of claim 23, wherein the substrate transport arm comprises a fast exchange transport arm, the method comprising: removing a processed substrate from the processing module, and placing an unprocessed substrate on the fast exchange transport arm The processing module is configured to continuously process a substantially substrate. 45