TW200915348A - Stabilization control device - Google Patents

Stabilization control device Download PDF

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Publication number
TW200915348A
TW200915348A TW96135216A TW96135216A TW200915348A TW 200915348 A TW200915348 A TW 200915348A TW 96135216 A TW96135216 A TW 96135216A TW 96135216 A TW96135216 A TW 96135216A TW 200915348 A TW200915348 A TW 200915348A
Authority
TW
Taiwan
Prior art keywords
control
gas
control unit
supply mechanism
gas supply
Prior art date
Application number
TW96135216A
Other languages
English (en)
Chinese (zh)
Other versions
TWI350545B (https=
Inventor
Jia-Bau Wang
San-Rung Jou
Jeng-Shian Fang
Jeng-Shi Tsau
de-wen Ju
Jiun-Liang Lin
Tang-Yi Lin
Sheng-Yu Lin
Shen-Yue Tzeng
Yun-Huei Liou
Yu-Ying Chen
Wen-Bin Shiu
Ching-Shr Liou
Original Assignee
Atomic Energy Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Council filed Critical Atomic Energy Council
Priority to TW96135216A priority Critical patent/TW200915348A/zh
Publication of TW200915348A publication Critical patent/TW200915348A/zh
Application granted granted Critical
Publication of TWI350545B publication Critical patent/TWI350545B/zh

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TW96135216A 2007-09-20 2007-09-20 Stabilization control device TW200915348A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW96135216A TW200915348A (en) 2007-09-20 2007-09-20 Stabilization control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW96135216A TW200915348A (en) 2007-09-20 2007-09-20 Stabilization control device

Publications (2)

Publication Number Publication Date
TW200915348A true TW200915348A (en) 2009-04-01
TWI350545B TWI350545B (https=) 2011-10-11

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ID=44725739

Family Applications (1)

Application Number Title Priority Date Filing Date
TW96135216A TW200915348A (en) 2007-09-20 2007-09-20 Stabilization control device

Country Status (1)

Country Link
TW (1) TW200915348A (https=)

Also Published As

Publication number Publication date
TWI350545B (https=) 2011-10-11

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