200909073 九、發明說明： 【發明所屬之技術領域j 技術領域 本發明係有關於一種可採用於塗布裝置之塗布液供給 5 裝置。200909073 IX. Description of the Invention: TECHNICAL FIELD The present invention relates to a coating liquid supply device 5 which can be applied to a coating device.
【先前技術:J 背景技術 眾所周知，以往塗布液供給裝置的結構係構造成在設 於塗布液收容構件之開口緣的歧管内面形成密封構件，以 10透過密封構件將塗布液壓出構件密封，並透過塗布液導入 部，將塗布液導入形成於歧管内面與塗布液壓出構件之間 的環狀空間（例如，參照專利文獻丨）。 【專利文獻1】特開2005-246201號公報 【明内^^】 15 發明揭示 發明所欲解決之問題[Prior Art: J. It is known that the structure of the coating liquid supply device is configured such that a sealing member is formed on the inner surface of the manifold provided on the opening edge of the coating liquid accommodating member, and the coating hydraulic pressure member is sealed by the 10 through the sealing member. The coating liquid is introduced into the annular space formed between the inner surface of the manifold and the coating hydraulic discharge member through the coating liquid introduction portion (for example, see Patent Document). [Patent Document 1] JP-A-2005-246201 (Embodiment) ^ Invention Disclosure Problem to be solved by the invention
目的在於提供一種可確實防止從塗布 布液到達外部的塗布液供給裝置。 200909073 用以解決問題之手段 本發明之用以解決前述問題的手段係將塗布液供給裝 置構造成包含有： 塗布液收容構件，係設有可吐出所收容之塗布液的塗 5 布液流動部者；及 塗布液壓出構件，係插入前述塗布液收容構件内，將 收容於前述塗布液收容構件内之塗布液透過前述塗布液流 動部往外部吐出者， 又，y述塗布液收容構件在前述塗布液壓出構件之插 10入部設有用以回收經由該插人部漏出之塗布液的塗布液回 收部。 、’、〇再P便·附著於塗布液壓出構件之外 周面的塗布液從塗布液收容構件漏出，但因該處設有塗布 15 固 部，故不會接觸到外部空氣。因此，沒有塗布液凝 布I業不佳影響的情形，不需維修即可長期進行良好之塗 洗淨2塗布液回收部只要以可填充使前述塗布液溶解之 ^夜的洗淨室構成即可。 韁由此種結構，可用洗淨液溶躲你 出之塗希、^ 仏讀韻布液收容構件漏 液，防止其回到塗布液收容構件内。 更換淨室最好是構造成可根據更換時期特定資訊來 時器等^ 更換時期特定資訊只要可使例如計 就通知已只要該使用期間到達預設之時間， 已到更換時期’自動進行更換即可。 20 200909073 月1述塗布液壓出構件最好是可相對於前述塗布液收容 構件之内周面維_定間隔並往返移動， 前述塗布液回收部最好是以排出用塗布液收容室構 成，該排出用塗布液收容室係藉由隔壁部形成於前述塗布 液收容構件内，且前述隔壁部設有可滑動地引導前述塗布 液壓出構件之導孔者。 10 15 藉由此種、.、。構’首先可防止附著於塗布液壓出構件之 周面的塗布液於隔壁部漏出。就算漏出至排出用塗布液 收容室’也會和供給至排出用塗布液收容室之塗布液一起 =部排H藉由在排出用塗布液收容室供給、排出 f絲確保流動狀態。因此，萬一附著於塗布液壓出構 ，之外周面的塗布液漏出而凝固时布液收容構件之外 二Si藉由在排出用塗布液收容室所形成之塗布液的流 传装非出。此外’所排出之塗布液亦可藉由再生處理 使其循環再利用。 引述塗布液收容構件之前述塗布液流動部包含： 塗布;^供給部，係設於前述塗布㈣㈣件之插 側者；及 塗布液吐出部，係設於與前述插入部相反之側，且可 吐出所供給之塗布液者。 错由此種結構，可透過塗布液吐出部依序從由塗布液 U供給至塗布液收容構件内之塗布液吐出，故舊塗布 液不易殘留在塗布液收容構件中。 别述塗布液收容構件位於與前述塗布液供給部相反之 20 200909073 側’且在最高之位置設有空氣排出部。 藉由此種結構，可藉由供給至塗布液收容構件内之塗 布液’最自然地排出塗布液收容構件内之空氣。 塗布液往前述排出用塗布液收容室之供給係透過形成 5 於前述隔壁部之開口部進行， 而塗布液從前述排出用塗布液收容室之排出則透過塗 布液排出部進行，且該塗布液排出部係與前述塗布液吐出 部個別分開設置，並連通於前述排出用塗布液收容室者。 藉由此種結構，可有效地排出假定含有異物而形成之 10 排出用塗布液收容室内之塗布液。 發明效果 根據本發明，可將從塗布液收容構件漏出之塗布液於 塗布液回收部回收，故不會有塗布液漏出外部而凝固等狀 況發生，而可長期性地將塗布作業維持在良好的狀態。 15 【實施方式】 實施發明之最佳形態 以下參照添附圖式，詳細地說明實施本發明之實施形 態。此外，在以下之說明中，同一名稱 '符號係顯示同一 或同性質構件，並適當省略詳細說明。 20 (第1實施形態） (結構） 第1圖係顯示第1實施形態之塗布裝置。該塗布裝置大 略包含有塗布液槽1、塗布液供給裝置2、塗布液吐出裝置 3、及控制裝置4。 8 200909073 塗布液槽1貯存有塗布液，可隨時將塗布液供給至塗布 液供給裝置2。塗布液可使用如用以塗布於玻璃基板上之 PDP用玻植糊。$，並不限於該者，可使用習知公知之 各種塗布液。 5 塗布液供給裝置2包含有塗布液收容構件5、塗布液壓 出構件6、及驅動構件7。 塗布液收容構件5係以圓筒狀之缸體構成。在此，係使 用玻璃製之缸體以提高内部之視認性，亦可由不鏽鋼等金 屬製材料形成。唯，必須要將内面藉由鏡面加工等將面粗 10 糙度抑制在極小程度。 如第2圖所示，塗布液收容構件5之其中一端部係呈封 閉狀態，而另一端部為形成有第丨穿通孔8之第丨密封壁9。 前述第1穿通孔8之内周面2處（兩端開口部）形成有擴大内徑 之階段部10，該處分別配設有〇型環等第丨密封構件丨丨。塗 15布液收容構件5内係藉由在前述第丨密封壁9以預定間隔設 置之隔壁部12，分離成吐出用塗布液收容室13與排出用塗 布液收容室14。隔壁部π分別形成有與前述第丨密封壁9之 第1穿通孔8對向之導孔15、及可供塗布液從吐出用塗布液 收谷至13流入之2處貫通孔16。此外，貫通孔16設成丨處或3 20 處以上皆可。 塗布液收容構件5分別連接有塗布液供給管17、塗布液 吐出管18、空氣排出管19及塗布液排出管2〇。 塗布液供給管17在前述隔壁部12附近連通於吐出用塗 布液收谷室13，將來自塗布液槽丨之塗布液供給至吐出用塗 9 200909073 布液收容室13内。 又’塗布液吐出管18在與前述第1密封壁9為相反側之 端部側連通於吐出用塗布液收容室13，可使所吐出之塗布 液往塗布液吐出裝置3流動。 5 10 15 刀4排出官19係位於與前述塗布液供給管Η相反 側之端部，且在最高之位置連通於吐出用塗布液收容室 13。藉此，藉㈣過塗布液供給fl7供給之塗布液，可將 吐出用塗布液收容室13内之空氣順利地往外部排出。 又’塗布液排出管20連通於排出用塗布液收容室14。 而且可將附著於塗布液壓出構件6之外周面的異物(如因 附著於塗布㈣㈣件6之外周面的塗布液由於滑動連接 於第1密封構件U而凝@⑽產生之固形㈣）、或將從後 述之塗布液回收部22漏出至排㈣塗布液收容室14之洗淨 液往外部排出。此時’亦可進行將異物等從所排出之塗布 液中去除之再生處理，再使其回流至前述塗布液供給管 17，在吐出用塗布液收容室13内供給。 此外，前述各配管（塗布液供給管17、塗布液吐出管 18、空氣排出管19、塗布液排出管2〇)分別設有開閉閥21a、 21b、21c ' 21d。然後，如後述，可藉由控制裝置4進行驅 20動控制各開閉閥21a ' 21b、21c、21d之開閉動作。 又’塗布液收容構件5鄰接第1密封壁9地設有塗布液回 收部22。在此，塗布液回收部22設有填充有可使塗布液溶 解之洗淨液的洗淨室22a。洗淨液可使用塗布液之溶劑。例 如’可使用PGMEA(丙二醇單曱醚乙酸酯）。唯，並不限於 200909073 該者，只要依塗布液之種類使用各種溶劑即可。 塗布液回收部22之其中一端側開口部係與第1密封壁9 一體化’而另一端部係以第2密封壁23構成。第2密封壁23 與前述第1密封壁9一樣，形成有與前述第1穿通孔8對向之 5第2穿通孔24，其内周面設有第2密封構件25。第1穿通孔8 與第2穿通孔24之間最好是確保充分之距離。藉此，可使貫 通之塗布液壓出構件6之支撐狀態安定，且可洗淨塗布液壓 出構件6進入吐出用塗布液收容室13内之全區域。 此外，前述塗布液回收部22亦可設置可更換洗淨液的 10 結構。又，亦可構造成藉由蒸餾回收裝置等將自塗布液回 收部22排出之洗淨液再利用’使其往塗布液回收部22回流。 塗布液壓出構件6係將金屬製材料(例如不鏽鋼、鐵、 或在表面進行鍍鉻者）製成圓柱狀者。塗布液壓出構件6之 表面係藉由鏡面加工等將面粗經度抑制在極小程度。 15 驅動構件7係構造成藉由馬達26之驅動，使與其轉轴— 體化之滾珠螺桿27旋轉，透過螺合於此之支撐部28使前述 塗布液壓出構件6往返移動。 例如，塗布液吐出裝置3係以習知公知之結構，將塗布 液透過狹縫噴嘴塗布於載置於花尚岩板等支撐台29上之 20 PDP(電漿顯示面板）等被塗布構件3〇，形成塗膜31(例如， 請參照特開2002-U34U號公報、特開平8_229497號公報 等）。 控制裝置4係依關設之控難相閉各關間2 i &、 训、2lc、21d，，驅動控制馬達26等，執行以下之各步驟。 11 200909073 唯關於開閉閥21a、21b，亦可使用機械性地開閉之止回 閥來代替電氣控制。 接著，說明前述結構之塗布液供給裝置2的動作。 (初期準備步驟） 首先，如第2圖所示，使塗布液壓出構件6移動至最後 U之位置（塗布液壓出構件6之前端面與隔壁部12之吐出用 塗布液收谷至側之内面呈同—面的位置，以下稱作初期位 置）此時，開閉閥2ia、21b、⑴、21d全為封閉狀態，亦 可開放開閉閥2lc讓外部空氣經由空氣排出管19進入，以使 〇塗布液壓出構件6順利地動作。 (塗布液供給步驟） 然後，如第3圖所示，開放開閉閥21a，透過塗布液供 給管17，將貯存於塗布液槽1之塗布液供給至吐出用塗布液 收容室13内。此時，開放開閉閥21c，將吐出用塗布液收容 ^至13内之空氣經由空氣排出管19排出。空氣排出管⑽位 於與塗布液供給管17相反側之位置，且設於吐出用塗布液 收谷室13之最南之位置。因此，吐出用塗布液收容室咖 之空氣可順利地排出’而不會殘留於内部。此外，只要塗 布液從空氣排出管19溢出就封閉開閉閥21c，並停止供給。 又，供給至吐出用塗布液收容室13内之塗布液也會透過形 成於隔壁部12之貫通孔16流人排出用塗布液收容室14(此 時，亦可預先開放開閉閥21d，將排出用塗布液收容室14内 之工氣乂塗布液排出官2〇排出。然後，和前述開閉閥21。一 樣’只要塗布液從塗布液排出管2G溢出，就封閉開閉間 12 200909073 21d)。 (塗布液吐出步驟） 10 15 20 如此如第4圖所示，若塗布液已供給至（包含排出用 塗布液收容室U)吐出用塗布液收容室_ (在此種狀態 了，已開放之所有開閉閥21a、21c(依需要叫)係呈封閉狀 態）’便開放開P_21b，藉由驅動驅動構件7之馬達％使滾 珠螺桿27旋轉’使塗布液壓出構件6前進。塗布液壓出構件 6便會進入吐出用塗布液收容室13内，使填充於内部之塗布 液透過塗布液吐綺難塗布液吐出裝置3吐出。此時，係 大致從供給至吐出用塗布液收容室13内之塗布液依序透過 塗布液吐出管财出塗布液，即輯謂的先進先出方式吐 出。然後如習知公知一般，以塗布液吐出裳置3將塗布液塗 布於如PDP表面。因此，吐出用塗布液收容室⑽不會供 給舊塗布液’而可在經常良好之«下進行塗布作業。又， 此時’亦可藉由在-定時間開放開閉閥叫，將混入塗布液 中之空氣透過空氣排出管19由上方排出。 (第2次以後之準備步驟） 如第5圖所示，若塗布液之吐出結束後，反轉驅動驅動 構件7之馬達26，使塗布液壓出構件6往前述初期位置後 退。又，封閉開閉_。此時，開放開閉閥2u，透過塗 布液供給管Π開始往吐出用塗布液收容室 液。因係配合使塗布液壓出構件6後⑼增大之空間體積， 依序往吐出職布液收容室13内供給塗布液，故在初期準 備步驟後之塗布液供給步驟中，如前述，開閉閥…可維持 13 200909073 在封閉鎖狀態。 (異物去除步驟） —藉由重複進行以上步驟執行塗布作業。此時，假定由 於第1密封構件η滑動連接於塗布液壓出構件6之外周面， 5而有塗布峡@、„的情形，是，塗布液壓出構件6係 貫通塗布液回收部η設置。即，每次往返移動時，與前述 第1密封構件11之滑動連接部分會進人洗淨㈣，溶解塗布 液二而且’在塗布液回收部22之前方側設有排出用塗布液 1收谷至14。因此，凝固或變質之塗布液不會進入吐出用塗 1〇布液收容室13内，可將塗布作業長期維持在良好之狀態。 又，如第6圖所示，可依需要，藉由在前述初期位置只 開放開閉閥21a及開閉閥21d，將塗布液供給至吐出用塗布 液收奋室13内，並透過塗布液排出管20將排出用塗布液收 I令至14内之塗布液排出即可。藉此，就算在塗布液壓出構 15件6之外周面凝固（變質）之塗布液沒有在塗布液回收部22被 回收而殘留在塗布液收容構件5内，也還是在排出用塗布液 收容室14而非吐出用塗布液收容室13，而且，於該處之塗 布液可透過塗布液排出管2〇排出至外部。因此，可將吐出 用塗布液收容室13内之塗布液維持在無異物之經常良好之 20 狀態，而可使塗布作業長期順利地進行。 (第2實施形態） 第7圖係顯示第2實施形態之塗布液供給裝置2。該塗布 液供給裝置2與前述第1實施形態所示者在未設有排出用塗 布液收容室14這一點上不同。 14 200909073 P在第7圖中，沒有隔壁部12，S布液收容構件5内 、出用塗布液收容室13構成。而且，係構造成對於在 塗布液壓出構件6之外周面凝固（變質）之塗布液，僅用使其 '合解於塗布液回收部22内之洗淨液的方式來處理。因此， 最好疋將塗布液回收部22構造成設有可更換洗淨液的結 構。此時’只要根據更換時期特定資訊來更換洗淨液即可。 更換時期特定資訊可使用自使用開始之期間、或塗布液壓 出構件6之實際往返次數、以直接感測器檢測洗淨液之辨污 狀況(例如，可藉由光感測器檢測透過度)所得之資訊等。而 且亦可分別連接將洗淨液供給至塗布液回收部22之洗淨 液供給管（圖未示）、及將洗淨液從塗布液回收部22排出之洗 淨液排出官（圖未示並於各配管設置開閉閥（圖未示），藉 由泵（圖未示）等進行洗淨液之自動供給及排出。又，亦可構 4成藉由条餾回收裝置等將從塗布液回收部22排出之洗淨 15液再利用，使其往塗布液回收部22回流。 另’如第8圖所示，只要為僅設置前述塗布液回收部22 的結構’亦可如同習知將塗布液壓出構件6構造成活塞32滑 動連接缸體33之内周面的結構。此時，在塗布液回收部22 中’藉由活塞32於缸體33内劃分之連通於後方側的空間的 2 0 配管没有開閉閥2ie、21f，而連通於前方側的空間之配管 设有互相分岐之塗布液供給管17與塗布液排出管18。而 且’在活塞32前進時，開放開閉閥2ie供給洗淨液（此時， 開閉閥21 f呈封閉狀態），在使活塞3 2後退時，開放開閉閥21 f 排出洗淨液(此時，開閉閥21e呈封閉狀態）。唯，不一定需 15 200909073 要開閉閥21e及21f，亦可構造成洗淨液可從另外設置之洗 淨液槽（圖未示）自由出入缸體33内。 (第3實施形態） 第9圖係顯示第3實施形態之塗布液供給裝置2。該塗布 5液供給裝置2與前述第1實施形態所示者在未設有塗布液回 收部22這一點上不同。 在该塗布液供給敦置2中，若塗布液由於滑動連接設於 第1密封壁9之第1穿通孔8之第1密封構件丨丨、接觸外部空 氣，而在塗布液壓出構件6之外周面凝固等成為異物，可透 1〇過塗布液排出管20將該異物排出至外部。因此，異物不會 混入吐出用塗布液收容室13内，而可將塗布作業長期維持 在良好之狀態。 此外，在前述各實施形態中，係將塗布液供給裝置2 配置成横向，即塗布液壓出構件6係在水平方向上往返移 15動，但亦可配置成縱向，即塗布液壓出構件6係在垂直方向 上往返移動β 【阖式簡單說明】 第1圖係第1實施形態之塗布裝置之全體結構的概略說 明圖。 20 第2圖係在第1圖之塗布液供給裝置中，顯示初期準備 步驟的概略說明圖。 第3圖係在以圖之塗布液供給裝置中，顯示初期塗布 液供給步驟的概略說明圖。 第4圖係在第旧之塗布液供給裝置中，顯示塗布液吐 16 200909073 出步驟的概略說明圖。 第5圖係在第1圖之塗布液供給裝置中，顯示第2次以後 之塗布液供給步驟的概略說明圖。 第6圖係在第1圖之塗布液供給裝置中，顯示異物去除 5 步驟的概略說明圖。 第7圖係顯示第2實施形態之塗布液供給裝置的概略說 明圖。 第8圖係顯示第2實施形態之塗布液供給裝置之另一例 的概略說明圖。 10 第9圖係顯示第3實施形態之塗布液供給裝置的概略說 明圖。 17 200909073 【主要元件符號說明】 1…塗布液槽 2"塗布液供給裝置 3.. .塗布液吐出裝置 4.. .控制裝置 5.. .塗布液收容構件 6…塗布液壓出構件 7…驅動構件 8.. .第1穿通孔 9.. .第1密封壁 10…階段部 11…第1密封構件 12.. .隔壁部 13.. .吐出用塗布液收容室 14.. .排出用塗布液收容室 15···導孔 16…貫通孔 17…塗布液供給管 18.. .塗布液吐出管 19.. .空氣排出管 20.. .塗布液排出管 21a〜21£..開閉閥 22…塗布液回收部 22a...洗淨室 23.. .第2密封壁 24…第2穿通孔 25…第2密封構件 26.. .馬達 27…滾珠螺桿 28…支樓部 29.. .支撐台 30…被塗布構件 31…塗膜 32…活塞 33…缸體 18It is an object of the invention to provide a coating liquid supply device which can surely prevent the coating liquid from reaching the outside. 200909073 A means for solving the above problems is to provide a coating liquid supply device including a coating liquid storage member and a coating liquid flow portion capable of discharging the contained coating liquid. And a coating hydraulic discharge member inserted into the coating liquid accommodating member, and the coating liquid contained in the coating liquid accommodating member is discharged to the outside through the coating liquid flow portion, and the coating liquid accommodating member is described above. The insertion/receiving portion of the coating hydraulic discharge member is provided with a coating liquid recovery portion for recovering the coating liquid leaked through the insertion portion. Then, the coating liquid adhering to the outer surface of the coating hydraulic discharge member leaks from the coating liquid accommodating member. However, since the coating 15 is provided at the place, the outside air is not exposed. Therefore, in the case where there is no influence of the coating liquid coagulation, the coating liquid can be cleaned for a long period of time without maintenance. The coating liquid recovery unit is configured to be a cleaning chamber that can be filled with the coating liquid dissolved. can.缰 By this structure, you can use the cleaning solution to dissolve the smear of the sputum, and to prevent the liquid from escaping into the coating liquid accommodating member. Preferably, the replacement clean room is configured to be able to change the time-specific information according to the specific information of the replacement period, etc., as long as the time-specific information can be notified, for example, as long as the usage period reaches the preset time, and the replacement period is automatically replaced. can. It is preferable that the coating hydraulic discharge member is reciprocally movable at intervals with respect to the inner circumferential surface of the coating liquid accommodating member, and the coating liquid recovery portion is preferably constituted by a discharge coating liquid storage chamber. The discharge coating liquid storage chamber is formed in the coating liquid storage member by a partition wall portion, and the partition wall portion is provided with a guide hole that slidably guides the coating hydraulic pressure discharge member. 10 15 By this, . First, the coating liquid adhering to the peripheral surface of the coating hydraulic discharge member can be prevented from leaking out at the partition wall portion. Even if it is leaked to the discharge coating liquid storage chamber ‘, the coating liquid supplied to the discharge coating liquid storage chamber will be supplied with the discharge/discharge liquid in the discharge coating liquid storage chamber. Therefore, in the case where the coating liquid adhered to the outer surface of the coating hydraulic fluid is leaked and solidified, the flow of the coating liquid formed in the discharge coating liquid storage chamber is eliminated. Further, the discharged coating liquid can be recycled by recycling treatment. The coating liquid flowing portion of the coating liquid accommodating member includes: a coating; a supply portion that is provided on the side of the coating (four) (four); and a coating liquid discharge portion that is provided on a side opposite to the insertion portion and that is The person who sprayed the supplied coating liquid. In this configuration, the coating liquid discharge portion is sequentially discharged from the coating liquid supplied from the coating liquid U to the coating liquid storage member, so that the old coating liquid does not easily remain in the coating liquid storage member. The coating liquid accommodating member is located on the side opposite to the coating liquid supply unit 20 200909073 side and is provided with an air discharge portion at the highest position. With this configuration, the air in the coating liquid accommodating member can be most naturally discharged by the coating liquid supplied to the coating liquid accommodating member. The supply of the coating liquid to the discharge coating liquid storage chamber is transmitted through the opening portion of the partition wall portion 5, and the discharge of the coating liquid from the discharge coating liquid storage chamber is performed through the coating liquid discharge portion, and the coating liquid is applied. The discharge portion is separately provided separately from the coating liquid discharge portion, and is communicated with the discharge coating liquid storage chamber. According to this configuration, it is possible to efficiently discharge the coating liquid in the discharge liquid coating medium chamber which is formed by the assumption of containing foreign matter. According to the present invention, the coating liquid leaking from the coating liquid accommodating member can be recovered in the coating liquid collecting portion. Therefore, the coating liquid does not leak outside and solidifies, and the coating operation can be maintained for a long period of time. status. [Embodiment] BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In addition, in the following description, the same name 'symbol' shows the same or the same nature, and the detailed description is omitted as appropriate. (First Embodiment) (Structure) Fig. 1 shows a coating device according to a first embodiment. This coating apparatus roughly includes a coating liquid tank 1, a coating liquid supply device 2, a coating liquid discharge device 3, and a control device 4. 8 200909073 The coating liquid tank 1 stores the coating liquid, and the coating liquid can be supplied to the coating liquid supply device 2 at any time. As the coating liquid, for example, a glass paste for PDP coated on a glass substrate can be used. $ is not limited to this, and various known coating liquids can be used. The coating liquid supply device 2 includes a coating liquid storage member 5, a coating hydraulic discharge member 6, and a drive member 7. The coating liquid accommodating member 5 is constituted by a cylindrical cylinder. Here, a glass cylinder is used to improve the visibility of the interior, and it may be formed of a metal material such as stainless steel. However, it is necessary to suppress the surface roughness of the inner surface to a minimum by mirror processing or the like. As shown in Fig. 2, one end portion of the coating liquid accommodating member 5 is in a closed state, and the other end portion is a second sealing wall 9 on which the second through hole 8 is formed. The inner peripheral surface 2 (opening at both ends) of the first through-hole 8 is formed with a stepped portion 10 having an enlarged inner diameter, and a second sealing member 等 such as a 〇-shaped ring is disposed at each of these. The inside of the coating liquid accommodating member 5 is separated into the discharge coating liquid storage chamber 13 and the discharge coating liquid storage chamber 14 by the partition wall portion 12 which is provided at a predetermined interval on the first sealing wall 9. The partition portion π is formed with a guide hole 15 opposed to the first through hole 8 of the second sealing wall 9, and two through holes 16 through which the coating liquid can be collected from the discharge coating liquid to 13 inflow. In addition, the through hole 16 may be formed in a crucible or at more than 3 20 locations. The coating liquid storage member 5 is connected to a coating liquid supply pipe 17, a coating liquid discharge pipe 18, an air discharge pipe 19, and a coating liquid discharge pipe 2, respectively. The coating liquid supply pipe 17 communicates with the discharge coating liquid receiving chamber 13 in the vicinity of the partition wall portion 12, and supplies the coating liquid from the coating liquid tank to the discharge liquid coating chamber 13 200909073. Further, the coating liquid discharge pipe 18 communicates with the discharge coating liquid storage chamber 13 at the end side opposite to the first sealing wall 9, and allows the discharged coating liquid to flow to the coating liquid discharge device 3. 5 10 15 The knife 4 discharge member 19 is located at the end opposite to the coating liquid supply tube, and communicates with the discharge coating liquid storage chamber 13 at the highest position. By this, the coating liquid supplied from the coating liquid supply chamber 13 can be smoothly discharged to the outside by the coating liquid supplied from the coating liquid supply fl7. Further, the coating liquid discharge pipe 20 is in communication with the discharge coating liquid storage chamber 14. Moreover, the foreign matter adhering to the outer peripheral surface of the coating hydraulic discharge member 6 (for example, the coating liquid adhered to the outer peripheral surface of the coating (four) (four) member 6 is slidably connected to the first sealing member U to solidify (4), or The cleaning liquid that has leaked from the coating liquid recovery unit 22, which will be described later, to the discharge liquid (four) coating liquid storage chamber 14 is discharged to the outside. At this time, the regeneration process of removing the foreign matter or the like from the discharged coating liquid may be performed, and then it may be returned to the coating liquid supply pipe 17, and supplied in the discharge coating liquid storage chamber 13. Further, each of the pipes (the coating liquid supply pipe 17, the coating liquid discharge pipe 18, the air discharge pipe 19, and the coating liquid discharge pipe 2) is provided with opening and closing valves 21a, 21b, and 21c' 21d, respectively. Then, as will be described later, the opening and closing operations of the respective on-off valves 21a' 21b, 21c, and 21d can be controlled by the control device 4. Further, the coating liquid accommodating member 5 is provided with the coating liquid recovery portion 22 adjacent to the first sealing wall 9. Here, the coating liquid recovery unit 22 is provided with a washing chamber 22a filled with a washing liquid capable of dissolving the coating liquid. As the washing liquid, a solvent of the coating liquid can be used. For example, PGMEA (propylene glycol monoterpene ether acetate) can be used. However, it is not limited to 200909073. It is sufficient to use various solvents depending on the type of the coating liquid. One end side opening portion of the coating liquid recovery portion 22 is integrated with the first sealing wall 9 and the other end portion is constituted by the second sealing wall 23. Similarly to the first sealing wall 9, the second sealing wall 23 is formed with a second through hole 24 opposed to the first through hole 8, and a second sealing member 25 is provided on the inner circumferential surface thereof. It is preferable to ensure a sufficient distance between the first through hole 8 and the second through hole 24. Thereby, the support state of the through-coating hydraulic discharge member 6 can be stabilized, and the coating hydraulic discharge member 6 can be washed into the entire region in the discharge coating liquid storage chamber 13. Further, the coating liquid recovery unit 22 may be provided with a structure 10 in which the cleaning liquid can be exchanged. In addition, the cleaning liquid discharged from the coating liquid recovery unit 22 may be reused by the distillation recovery device or the like to be returned to the coating liquid recovery unit 22. The coating hydraulic discharge member 6 is formed by forming a metal material (for example, stainless steel, iron, or chrome-plated surface) into a cylindrical shape. The surface of the coated hydraulic discharge member 6 is such that the surface roughness is extremely minimized by mirror processing or the like. The driving member 7 is configured to rotate the ball screw 27 that is pivoted by the motor 26 by the driving of the motor 26, and the coating hydraulic discharge member 6 is reciprocated by the support portion 28 screwed thereto. For example, the coating liquid discharge device 3 is applied to a member to be coated such as a 20 PDP (plasma display panel) placed on a support table 29 such as a flower slab by a slit nozzle. In the meantime, the coating film 31 is formed (for example, JP-A-2002-U34U, JP-A-8-229497, etc.). The control device 4 performs the following steps in accordance with the control of the closed doors 2 i & training, 2lc, 21d, the drive control motor 26, and the like. 11 200909073 Only the on-off valves 21a and 21b may be mechanically opened or closed instead of the electric control. Next, the operation of the coating liquid supply device 2 having the above configuration will be described. (Initial preparation step) First, as shown in Fig. 2, the application hydraulic pressure output member 6 is moved to the position of the last U (the inner surface of the discharge liquid for discharge of the end surface and the partition wall portion 12 before the application of the hydraulic pressure output member 6 is on the inner side of the side) The same position is referred to as an initial position. In this case, the opening and closing valves 2ia, 21b, (1), and 21d are all closed, and the opening and closing valve 21c can be opened to allow outside air to enter through the air discharge pipe 19, so that the hydraulic pressure is applied. The output member 6 operates smoothly. (Coating liquid supply step) Then, as shown in Fig. 3, the opening and closing valve 21a is opened, and the coating liquid supply pipe 17 is passed through, and the coating liquid stored in the coating liquid tank 1 is supplied into the discharge coating liquid storage chamber 13. At this time, the opening and closing valve 21c is opened, and the air contained in the discharge coating liquid to 13 is discharged through the air discharge pipe 19. The air discharge pipe (10) is located on the opposite side of the coating liquid supply pipe 17, and is provided at the most southmost position of the discharge coating liquid receiving chamber 13. Therefore, the air for discharging the coating liquid in the discharge chamber can be smoothly discharged' without remaining inside. Further, as long as the coating liquid overflows from the air discharge pipe 19, the opening and closing valve 21c is closed, and the supply is stopped. In addition, the coating liquid supplied to the discharge liquid supply chamber 13 is also passed through the through-holes 16 formed in the partition wall portion 12 to discharge the coating liquid storage chamber 14 (in this case, the opening and closing valve 21d may be opened in advance, and the discharge liquid may be discharged. In the coating liquid storage chamber 14, the liquid venting liquid discharge liquid discharge unit 2 is discharged. Then, as in the above-described opening and closing valve 21, 'as long as the coating liquid overflows from the coating liquid discharge pipe 2G, the opening and closing chamber 12 is closed. 200909073 21d). (The coating liquid discharge step) 10 15 20 As shown in Fig. 4, the coating liquid is supplied (including the discharge coating liquid storage chamber U) to the discharge coating liquid storage chamber _ (in this state, it is opened) All of the opening and closing valves 21a and 21c (closed as needed) are opened, and the opening P_21b is opened, and the ball screw 27 is rotated by the motor % of the driving member 7 to advance the coating hydraulic discharge member 6. When the hydraulic discharge member 6 is applied, it enters the discharge liquid supply chamber 13 and the coating liquid filled therein is discharged through the coating liquid discharge coating liquid discharge device 3. At this time, the coating liquid supplied from the supply liquid to the discharge liquid supply chamber 13 is sequentially discharged through the coating liquid discharge pipe, which is a so-called first-in-first-out method. Then, as is well known in the art, the coating liquid is discharged from the surface of the PDP by spraying the coating liquid with the coating liquid. Therefore, the coating liquid storage chamber (10) for discharge does not supply the old coating liquid, and the coating operation can be performed under a regular condition. Further, at this time, it is also possible to open the opening and closing valve at a predetermined time, and the air mixed in the coating liquid is discharged through the air discharge pipe 19 from above. (Preparation step after the second time) As shown in Fig. 5, after the discharge of the coating liquid is completed, the motor 26 of the drive member 7 is reversely driven to retract the application hydraulic discharge member 6 to the initial position. Also, closed and closed _. At this time, the opening and closing valve 2u is opened, and the liquid is supplied to the discharge coating liquid through the coating liquid supply pipe. Since the coating liquid is supplied to the discharge liquid storage chamber 13 in order to increase the volume of the space after the hydraulic discharge member 6 is applied (9), the coating liquid supply step after the initial preparation step is as described above. ...can maintain 13 200909073 in a closed lock state. (foreign matter removal step) - The coating operation is performed by repeating the above steps. In this case, it is assumed that the first sealing member η is slidably coupled to the outer circumferential surface of the coating hydraulic pressure generating member 6, and the coating hydraulic pressure output member 6 is provided through the coating liquid collecting portion η. When the shuttle moves, the sliding connection portion with the first sealing member 11 is washed (4), the coating liquid 2 is dissolved, and the coating liquid 1 for discharge is placed on the side before the coating liquid recovery portion 22 to the valley. 14. Therefore, the coating liquid which has been solidified or deteriorated does not enter the discharge coating liquid storage chamber 13, and the coating operation can be maintained in a good state for a long period of time. Further, as shown in Fig. 6, it can be borrowed as needed When only the opening and closing valve 21a and the opening and closing valve 21d are opened at the initial position, the coating liquid is supplied to the discharge liquid supply chamber 13 and is passed through the coating liquid discharge pipe 20 to apply the coating liquid for discharge to 14 In this case, even if the coating liquid which has been solidified (deteriorated) on the surface of the coating material 15 is not recovered in the coating liquid collecting portion 22 and remains in the coating liquid accommodating member 5, it is discharged. Coating liquid storage chamber 1 4, the coating liquid storage chamber 13 is not discharged, and the coating liquid at the discharge liquid can be discharged to the outside through the coating liquid discharge pipe 2, so that the coating liquid in the discharge coating liquid storage chamber 13 can be maintained without foreign matter. In the case of the coating liquid supply device 2 of the second embodiment, the coating liquid supply device 2 and the first embodiment are shown in the second embodiment. In the case where the discharge coating liquid storage chamber 14 is not provided, it is different. 14 200909073 P In Fig. 7, the partition wall portion 12 is not provided, and the liquid supply container 1 and the coating liquid storage chamber 13 are formed. Further, the coating liquid which is configured to be solidified (deteriorated) on the outer peripheral surface of the applied hydraulic discharge member 6 is treated only by the method of dissolving the cleaning liquid in the coating liquid recovery unit 22. The coating liquid recovery unit 22 is configured to be provided with a replaceable cleaning liquid. At this time, it is only necessary to replace the cleaning liquid according to the replacement period specific information. The replacement period specific information can be used during the period from the start of use, or Coating The actual number of round trips of the extrusion member 6, the direct sensor to detect the staining condition of the cleaning liquid (for example, the transmittance can be detected by a light sensor), etc., and the cleaning liquid can also be separately connected. The cleaning liquid supply pipe (not shown) supplied to the coating liquid recovery unit 22 and the cleaning liquid discharge unit that discharges the cleaning liquid from the coating liquid recovery unit 22 (not shown in the drawings, the opening and closing valve is provided in each pipe (Fig. In addition, the cleaning liquid is automatically supplied and discharged by a pump (not shown), etc., and the cleaning liquid 15 can be discharged from the coating liquid recovery unit 22 by a fractionation recovery device or the like. Further, it is reflowed to the coating liquid recovery unit 22. Further, as shown in Fig. 8, the coating hydraulic discharge member 6 may be configured as a piston 32 as long as the configuration of the coating liquid recovery unit 22 is provided. The structure of the inner peripheral surface of the cylinder block 33 is slidably connected. At this time, in the coating liquid recovery unit 22, the 20 pipes that are separated from the space on the rear side by the piston 32 in the cylinder 33 do not have the opening and closing valves 2ie and 21f, and the piping that communicates with the space on the front side is provided. The coating liquid supply pipe 17 and the coating liquid discharge pipe 18 are branched from each other. Further, when the piston 32 is advanced, the opening and closing valve 2ie is supplied with the cleaning liquid (in this case, the opening and closing valve 21f is closed), and when the piston 3 2 is retracted, the opening and closing valve 21f is opened to discharge the cleaning liquid (at this time, The opening and closing valve 21e is in a closed state). However, it is not necessary to use 15 200909073 to open and close the valves 21e and 21f, and the cleaning liquid can be configured to freely enter and exit the cylinder 33 from a separately provided cleaning liquid tank (not shown). (Third Embodiment) Fig. 9 shows a coating liquid supply device 2 according to a third embodiment. The coating liquid supply device 2 is different from the one described in the first embodiment in that the coating liquid recovery unit 22 is not provided. In the coating liquid supply tank 2, the coating liquid is slidably connected to the first sealing member 设 provided in the first through-hole 8 of the first sealing wall 9 and contacts the outside air, and is applied to the outer periphery of the coating hydraulic discharge member 6. The surface solidification or the like becomes a foreign matter, and the foreign matter can be discharged to the outside through the coating liquid discharge pipe 20. Therefore, foreign matter is not mixed into the coating liquid storage chamber 13 for discharge, and the coating operation can be maintained in a good state for a long period of time. Further, in each of the above embodiments, the coating liquid supply device 2 is disposed in the lateral direction, that is, the application hydraulic discharge member 6 is reciprocated in the horizontal direction, but may be disposed in the longitudinal direction, that is, the application hydraulic discharge member 6 is attached. The present invention is a schematic illustration of the overall configuration of the coating apparatus of the first embodiment. 20 Fig. 2 is a schematic explanatory view showing an initial preparation step in the coating liquid supply device of Fig. 1. Fig. 3 is a schematic explanatory view showing a step of supplying the initial coating liquid in the coating liquid supply device shown in the drawing. Fig. 4 is a schematic explanatory view showing the steps of the coating liquid discharge 16 200909073 in the first coating liquid supply device. Fig. 5 is a schematic explanatory view showing a supply step of the coating liquid after the second time in the coating liquid supply device of Fig. 1. Fig. 6 is a schematic explanatory view showing a procedure of removing foreign matter 5 in the coating liquid supply device of Fig. 1. Fig. 7 is a schematic view showing the coating liquid supply device of the second embodiment. Fig. 8 is a schematic explanatory view showing another example of the coating liquid supply device of the second embodiment. Fig. 9 is a schematic view showing a coating liquid supply device according to a third embodiment. 17 200909073 [Description of main component symbols] 1...Coating liquid tank 2" Coating liquid supply device 3.. Coating liquid discharge device 4. Control device 5. Coating liquid storage member 6: Coating hydraulic discharge member 7... Drive Member 8. First through hole 9. First sealing wall 10: Stage portion 11... First sealing member 12: Partition wall portion 13. Disposing coating liquid storage chamber 14: Disposing coating Liquid accommodating chamber 15···Guide hole 16...through hole 17...coating liquid supply pipe 18.. coating liquid discharge pipe 19... air discharge pipe 20.. coating liquid discharge pipe 21a to 21: open and close valve 22: coating liquid recovery unit 22a: cleaning chamber 23: second sealing wall 24... second through hole 25... second sealing member 26: motor 27: ball screw 28... branch portion 29: Supporting table 30...coated member 31...coating film 32...piston 33...cylinder 18