200903958 九、發明說明 【發明所屬之技術領域】 本發明是有關一種如交流馬達或步進馬達般，利用作 用於磁鐵與線圈構件之間的磁性吸引力，得到馬達轉子之 轉矩的旋轉馬達，詳細是有關在與線型致動器組合，製作 X — 0致動器的情形下，最適合相關之X - 0致動器之小 型化的小型旋轉馬達。 【先前技術】 據知以往在X-Y工作台或物品搬運裝置等的FA機器 中’利用線型馬達作爲賦予物品、零件等平移運動的致動 器的所謂線型馬達致動器。雖然據知以各種形式者作爲該 線型馬達致動器’但其中之一，據知是所謂轉子型的線型 馬達致動器（日本特開平11-150973號公報）。該轉子型 的線型馬達致動器，係由：形成棒狀並且沿著軸向以既定 的間距重覆排列N極及S極’且兩端被支承在底板上之作 爲固定子的磁鐵桿；和隔著稍微的間隙遊動嵌合在該磁鐵 桿之周圍的致力子（forcer )所構成，構成通電至設於致 力子內的線圈構件’讓相關的致力子在磁鐵桿的周圍沿著 軸向運動。 另一方面，作爲對是爲搬運對象物的物品 '構件等加 上平移運動並陚予旋轉運動的致動器，據知有組合前述線 型馬達致動器與旋轉馬達之所謂的X 一 0致動器（日本特 開2004-3 6 43 48號公報）。該χ— θ致動器係在前述線型 200903958 馬達致動器的致力子之外側安裝旋轉馬達，對馬達外殼旋 轉自如的支承前述致力子，並且在馬達外殼的內側設置固 定子線圈，另一方面，在前述致力子之外側設置旋轉子磁 鐵’通電至前述固定子線圈，就能賦予致力子任意的旋轉 量。因而，藉由組合該致力子的旋轉運動與利用線型馬達 致動器的磁鐵桿的平移運動，就能對相關的磁鐵桿賦予組 合平移運動及旋轉運動的X一 6»運動。 專利文獻1 :日本特開平1 1 - 1 5 0 9 7 3號公報 專利文獻2:日本特開2〇04-364348號公報 【發明內容】 [發明欲解決之課題] 但因爲在該習知的X- 6»致動器，係在磁鐵桿的周圍 設置致力子’且在該致力子的周圍設置旋轉馬達的旋轉子 磁鐵’更在旋轉子磁鐵的周圍設置固定子線圈，構成線型 馬達致動器的磁鐵及線圈構件、構成旋轉馬達的磁鐵及線 圈構件’是重疊在前述磁鐵桿的半徑方向，所以會有所謂 X — 0致動器之外徑大型化的問題。 尤其是一旦提高賦予磁鐵桿之平移運動及旋轉運動之 輸出的話，因爲光該部分就會令線型馬達部及旋轉馬達部 的線圈構件的繞阻數量增加，使該等線圈構件大型化，所 以會有所謂X - θ致動器之外徑也不得不大型化的問題。 [用以解決課題之手段] -5- 200903958 本發明係有鑑於此種問題所完成的發明，其目的在於 提供一種能重新評估馬達外殼內的磁鐵與線圈構件的位置 關係，達到該等磁鐵與線圈構件之配設空間的扁平化，並 且可達到馬達外殼之小徑化的小型旋轉馬達。 又，本發明之其他目的係在於提供藉由組合此種本發 明之小型旋轉馬達與線型致動器，不會讓外徑大型化，且 能提高平移運動及旋轉運動之輸出的X— 0致動器。 爲了達成前述目的，本發明之小型旋轉馬達係由：對 馬達外殼旋轉自如的支承的馬達轉子；和搭載在前述馬達 轉子或馬達外殼之任一方，並沿著其周方向交互的排列N 極及S極的磁鐵；和固定在前述馬達外殼或馬達轉子，與 前述磁鐵相對向，並且產生旋轉磁場，對前述馬達轉子賦 予轉矩的線圏構件所構成，讓前述磁鐵與線圈構件沿著旋 轉軸方向相對向。 又，利用該小型旋轉馬達的X - 0致動器係具備：沿 著軸向以既定的間距排列多數個磁極的輸出軸；和具有遊 動嵌合著該輸出軸的貫通孔，並與該輸出軸互相結合構成 線型馬達，對應所施加的電訊號，讓前述輸出軸往軸向進 退的致力子；構成在前述致力子的外側設置前述之本發明 的小型旋轉馬達的馬達轉子，以相關的旋轉馬達賦予致力 子任意的旋轉。 若藉由依此所構成的本發明之小型旋轉馬達，因爲產 生旋轉磁場的線圈構件和與此相對向的磁鐵是沿著馬達轉 子的旋轉軸方向相對向，所以比起該等線圈構件和磁鐵重 -6- 200903958 疊在半徑方向的習知旋轉馬達，更能與徑向有關的扁平化 線圈構件和磁鐵的配設空間，讓馬達外殻的徑向尺寸小型 化。 又，當組合線型馬達致動器與旋轉馬達來構成X - Θ 致動器時，將此種本發明的旋轉馬達設置在線型馬達致動 器之致力子的外側，可達到X - 0致動器之外徑的小型化 ，同時可達成平移運動及旋轉運動的高輸出化與小型化。 【實施方式】 [用以實施發明的最佳形態] 以下，根據所附圖面詳細的說明本發明之旋轉馬達及 利用該之X - β致動器。 第1圖是表示本發明之小型旋轉馬達的實施形態的剖 面圖。該旋轉馬達1係由：輸出軸2'嵌合於該輸出軸2 的馬達轉子3、透過軸承3 0旋轉自如的支承在前述馬達轉 子3的馬達外殼4、固定在前述馬達轉子3的旋轉子磁鐵 5、固定在前述馬達外殼4內，並且與前述旋轉子磁鐵5 相對向的固定子線圈6所構成。而且，在該旋轉馬達1 ’ 以通電到前述固定子線圈6的方式’在相關的固定子線圏 6與旋轉子磁鐵5之間作用了磁性吸引力’變成在前述馬 達轉子3作用有轉矩。 前述馬達轉子3係具有固定在輸出軸2之外周面的軸 頸（journal )部31，並且在該軸頸部3 1的軸向兩端具有 一對凸緣部32’藉由該等凸緣部32與前述馬達外殼4圍 200903958 繞的空間，成爲前述固定子線圈6與旋轉子磁鐵5的 空間。又，在各凸緣部32之外周面固定著前述軸承 透過相關的軸承3 0，旋轉自如的組裝著馬達轉子3與 外殼4。 前述旋轉磁鐵5係固定於具備在馬達轉子3的各 部3 2的內側面。第2圖是表示各凸緣部3 2之旋轉子 5的配置圖。前述旋轉子磁鐵5係以圍繞前述軸頸部 方式排列在凸緣部3 2的內側面，沿著周方向交互的 N極及S極。但在固定於各凸緣部32的一對旋轉子磁 中，挾著前述固定子線圈6互相的相對向的磁極係爲 的極性，亦即N極與S極。 一方面，前述固定子線圈6係與前述旋轉子磁鐵 相作用構成同步馬達，施加三相交流電流，在馬達轉 的周圍產生轉磁場。該固定子線圍是對成爲鐵心的複 芯構件60施行繞阻6 1構成線圈，具有以u、v及w 三個線圈爲一組的線圏群。各芯構件60係形成棒狀 且其長邊方向形成與輸出軸的軸向一致’位在馬達轉 的一對凸緣部3 2之間，與各旋轉子磁鐵5稍微隔著 相對向。前述繞阻61係形成貫通各芯構件6 0的磁束 芯構件6 0的長邊方向一致，亦即成爲各芯構件6 0與 子磁鐵5的對向方向一致。此種構造的固定子線圈6 定在馬達外殻4的內周面。 第3圖係表示在周方向之處切斷第1圖所示的旋 達1，展開前述固定子線圈6及旋轉子磁鐵5之狀態 收容 30， 馬達 凸緣 磁鐵 3 1的 排列 鐵5 不同 5互 子3 數個 相之 ，並 子3 間隙 與該 旋轉 係固 轉馬 的圖 -8- 200903958 。如該圖所示，在馬達轉子3的各凸緣部3 2的內側，係 排列著前述旋轉子磁鐵5，挾著固定子線圏6相對向的一 對旋轉子磁鐵5，係其中一方的極性爲N極，另一方的極 性爲S極。又，在該等旋轉子磁鐵5之間，配設著固定子 線圈6，形成棒狀的芯構件60的兩端分別與旋轉子磁鐵5 相對向。 雖然在該第3圖中，箭頭線A方向與馬達外殼4的周 方向一致，但在沿著相關的周方向排列的複數個芯構件60 ，依序捲繞著對應U相、V相及W相的繞阻3 1。又，各相 的芯構件6 0的排列間距，係設定的比旋轉子磁鐵5的排 列間距短。因而，對固定子線圈6通電三相交流電流的話 ，在相關的固定子線圈6，係在馬達轉子3的周圍產生旋 轉磁場，相關的旋轉磁場對旋轉子磁鐵5產生作用，藉此 在馬達轉子3產生轉矩。藉此，對應旋轉磁場的旋轉速度 會令馬達轉子3旋轉，就能賦予嵌合於此的輸出軸2旋轉 動力。 在如此構造的本發明之旋轉馬達1，因爲沿著令旋轉 子磁鐵5與固定子線圏6旋轉的輸出軸2的軸向相對向’ 所以形成馬達轉子3的軸頸部3 1與馬達外殼4的旋轉子 磁鐵5及固定子線圏6的收容空間爲與半徑方向相關，變 成可以形成很薄。因爲在習知的旋轉馬達，係沿著半徑方 向讓旋轉子磁鐵與固定子線圈相對向，所以與相關的半徑 方向有關，不得不增大設定旋轉子磁鐵及固定子線圏的收 容空間，雖馬達外殻之外徑僅那部分大型化，但若藉由本 -9 - 200903958 發明，就能令馬達外殼4之外徑小徑化’達到旋轉馬達1 的小型化。 第4圖是表示組合本發明之旋轉馬達與轉子型的線型 馬達致動器所構成的X - 0致動器的實施形態的圖。 該X - Θ致動器係由：旋轉馬達1 0、貫通該旋轉馬達 1 〇的馬達轉子3之作爲輸出軸的磁鐵桿7、隔著稍微的間 隙遊動嵌合在該磁鐵桿7的周圍’並且與前述馬達轉子3 一體化的致力子8所構成。前述磁鐵桿7與致力子8係構 成線型馬達。再者’前述旋轉馬達1 0的構造’係爲與第1 圖所示的旋轉馬達1之構造完全相同’在第4圖中附上與 第1圖相同的符號，在此省略其詳細的說明。 第5圖是表示由前述磁鐵桿7與致力子8所構成的線 型馬達的槪略圖。在前述磁鐵桿7係沿著軸向排列著複數 個場磁鐵70，外周面係加工成圓滑。各場磁鐵70係具有 N極及S極，互相鄰接的場磁鐵7 0係以N極彼此或S極 彼此相對向的方式交互逆轉方向排列。藉此’在磁鐵桿7 係形成有沿著其長邊方向交互的排列著N極的磁極與S極 的磁極的驅動用的著磁部。 另一方面，致力子8係在前述馬達轉子3的軸頸部31 的內周面，收納圓筒狀的線圈構件8 0所構成。即使該線 型馬達，線圈構件8 0亦具有以u、v及w相之三個繞阻爲 一組的線圈群。如第6圖所示，任一相的線圏構件8 0 ’亦 爲沿著馬達轉子3之周方向的環繞狀，與磁鐵桿7的外周 面隔著梢微的間隙相對向。又，各相的線圈構件80的排 -10- 200903958 列間距，係設定的比場磁鐵7 0的排列間距短。在磁鐵桿7 係由S極的磁極朝向N極的磁極形成磁束7 1，在前述馬 達轉子3係內裝著檢查該磁束密度的磁極感測器（圖未示 )。因而，由該磁極感測器所輸出的檢查訊號來掌握對線 圏構件80之磁鐵桿7的各磁極（N極及極）的位置關係 。控制對線圏構件80之通電的控制器，係接收前述磁極 感測器的檢查訊號，演算對應線圈構件80與磁鐵桿7之 各磁極的位置關係的最佳流電’將該電流通電至各線圈構 件8 0。其結果，藉由流到各線圈構件8 0的電流與利用場 磁鐵7 0形成的磁束71的相互作用，在線圈構件8 0與場 磁鐵70的各磁極之間產生吸引力及排斥力，致力子8與 馬達轉子3 —同朝向磁鐵桿7的軸向推進。 第7圖係表示馬達轉子3與磁鐵桿7之間的轉矩傳達 機構9。前述致力子8僅朝該軸向推進磁鐵桿7，對磁鐵 桿7而言是不會傳遞任何該軸心圓周方向的轉矩。因而， 爲了將馬達轉子3的旋轉傳達到磁鐵桿7，產生需要利用 此種轉矩傳達機構9，來結合馬達轉子3與磁鐵桿7。 該轉矩傳達機構9係由：固定在馬達轉子3，並且貫 通著前述磁鐵桿7的基座板90、與前述磁鐵桿7平行，而 且以夾持磁鐵桿7的方式，直立設在前述基座板9 0的一 對引導軸9 1、以及沿著各引導軸9 1朝向箭頭A方向移動 自如的一對引導套筒92、保持該等引導套筒92，並且固 定在前述磁鐵桿7之端部的連結板93所構成。 固定在磁鐵桿7的前述連結板93係透過引導套筒92 -11 - 200903958 支承在兩根引導軸9 1，沿著該等引導軸9 1的軸向自如的 移動。因此，藉由對致力子8的通電讓磁鐵桿7朝軸向進 退的話，連結板9 3係與磁鐵桿7 —同沿著引導軸91移動 。另一方面，使馬達轉子3旋轉的話，直立設在基座板90 的一對引導軸9 1在磁鐵桿7的周圍公轉，該轉矩被傳達 到藉由引導軸91引導的連結板93。藉此，賦予馬達轉子 3的轉矩則透過連結板93傳達到磁鐵桿7。 因而，若藉由該轉矩傳達機構9，就能一邊容許藉由 線型馬達之磁鐵桿7之軸向的進退、一邊將馬達轉子3的 轉矩傳達到磁鐵桿7。 再者，作爲對前述磁鐵桿7傳達馬達轉子3的轉矩傳 的其他形態，係例如考慮利用滾珠栓槽軸（ball spline ) 的形態。具體上，係在前述磁鐵桿7之一方的軸端設置栓 槽軸，並且在馬達轉子3的端部，固定嵌合於前述栓槽軸 的栓槽帽。藉此，磁鐵桿7會對馬達轉子3朝軸向進退自 如的引導，並且完成對馬達轉子3之磁鐵桿7的周方向止 轉，就能將馬達轉子3的旋轉傳達到磁鐵桿7。 而且，在如此構成的X- 0致動器，係對前述致力子8 的線圈構件80通電，就能讓磁鐵桿7對馬達轉子3僅進 退任意的量，又對旋轉馬達1 〇的固定子線圏6通電，就 能讓前述馬達轉子3僅旋轉任意的量，並讓磁鐵桿7於軸 向的周圍旋轉，例如可對磁鐵桿7的前端，對利用氣動夾 頭等的保持手段所把持的工件賦予平移運動及旋轉運動之 兩者。 -12- 200903958 此時，因爲在前述旋轉馬達10中，旋轉子磁鐵5與 固定子線圈6是沿著磁鐵桿7的軸向相對向，所以形成有 馬達轉子3的軸頸部3I與馬達外殼4的旋轉子磁鐵5及 固定子線圈6的收容空間’相關在半徑方向上可以形成很 薄，即使用在馬達轉子3的內部收容線型馬達的致力子8 之情形下’亦可抑制馬達外殼4大徑化。亦即，在線型馬 達致動器的外徑側重疊旋轉馬達的本發明之χ_ 0致動器 ，係可達成馬達外殼4的小型化，且針對各種ρ a機器， 提供有用的Χ-6»致動器。 再者，雖然在採用第1圖說明的旋轉馬達i，係在馬 達轉子3搭載旋轉子磁鐵5，在馬達外殼4搭載固定子線 圈’但也可藉由變更該等馬達轉子及馬達外殼的形狀，在 馬達外殻搭載作爲固定子的磁鐵，在馬達轉子搭載作爲旋 轉子的線圈構件。 【圖式簡單說明】 第1圖是表示本發明之小型旋轉馬達實施形態的剖面 圖。 第2圖是表示馬達轉子之旋轉子磁鐵的排列狀態的圖 〇 第3圖是表示在平面上展開排列在周方向的固定子線 圈及旋轉子磁鐵之形態的圖。 第4圖是表示利用本發明之旋轉馬達的χ-0致動器 的剖面圖。 -13- 200903958 第5圖是表示線型馬達致動器的磁鐵桿與致力子之構 造的槪略圖。 第6圖是表示磁鐵桿與致力子之間的磁束之作用的說 明圖。 第7圖是表示馬達轉子與磁鐵桿之間的轉矩傳達機構 的剖面圖。 【主要元件符號說明】 1 :旋轉馬達 2 :輸出軸 3 :馬達轉子 3 〇 :軸承 3 1 :軸頸（j 〇 u r n a 1 )部 3 2 :凸緣部 4 :馬達外殼 5 :旋轉子磁鐵 6 :固定子線圈構件 6 0 :芯構件 6 1 :繞阻（c 〇 i 1 ) 7 :磁鐵桿 7〇 :場磁鐵 71 :磁束 8:致力子（forcer) 8 0 :線圏構件 -14- 200903958 9 :轉矩傳達機構 9 0 :基座板 9 1 :引導軸 92 :引導套筒 9 3 :連結板 1 〇 :旋轉馬達BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a rotary motor that obtains a torque of a motor rotor by utilizing a magnetic attraction force acting between a magnet and a coil member, such as an alternating current motor or a stepping motor. In detail, in the case of combining an X-type actuator with a linear actuator, it is most suitable for a small-sized rotary motor of a related X-0 actuator. [Prior Art] Conventionally, in a FA machine such as an X-Y table or an article transporting device, a linear motor has been used as a so-called linear motor actuator that imparts an actuator for translational motion of articles and components. It is known that the linear motor actuators of the various types are known as the linear motor actuators of the rotor type (Japanese Laid-Open Patent Publication No. Hei 11-150973). The rotor type linear motor actuator is a magnet rod as a rod which is formed in a rod shape and which is arranged in a row at a predetermined pitch in the axial direction and which is supported on the bottom plate at both ends; And a forcer that is fitted around the magnet rod with a slight gap therebetween, and is configured to be energized to the coil member disposed in the force-forcer so that the associated force is axially around the magnet rod motion. On the other hand, as an actuator that adds a translational motion to the article 'member or the like of the object to be transported and performs a rotational motion, it is known that a so-called X-to-zero combination of the aforementioned linear motor actuator and the rotary motor is known. Actuator (Japanese Laid-Open Patent Publication No. 2004-3 6 43 48). The χ-θ actuator is provided with a rotary motor on the outer side of the force generator of the linear type 200003958 motor actuator, rotatably supports the aforementioned force-generating body to the motor casing, and is provided with a fixed sub-coil on the inner side of the motor casing, and By providing a rotating sub-magnet "on the outer side of the force-receiving member" to the fixed sub-coil, an arbitrary amount of rotation of the force-receiving member can be imparted. Thus, by combining the rotational motion of the forcemaker with the translational motion of the magnet shaft of the linear motor actuator, the associated magnet shaft can be imparted with a combined translational and rotational motion X-6» motion. Patent Document 1: Japanese Laid-Open Patent Publication No. Hei No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. Hei. No. 04-364348. The X-6» actuator is a rotating sub-magnet that is provided with a force generating member around the magnet shaft and a rotating motor is disposed around the ferro-forcer. Further, a fixed sub-coil is disposed around the rotating sub-magnet to form a linear motor actuation. The magnet and the coil member of the device, the magnet constituting the rotary motor, and the coil member 'are overlapped in the radial direction of the magnet rod. Therefore, there is a problem that the outer diameter of the X-0 actuator is increased. In particular, when the output of the translational motion and the rotational motion of the magnet shaft is increased, the number of windings of the linear motor portion and the coil member of the rotary motor portion is increased by the light portion, and the coil members are increased in size. There is a problem that the outer diameter of the so-called X-θ actuator has to be enlarged. [Means for Solving the Problem] -5- 200903958 The present invention has been made in view of the above problems, and an object thereof is to provide a positional relationship between a magnet and a coil member in a motor casing that can be re-evaluated to achieve the magnet and The arrangement of the coil member is flat, and a small-sized rotary motor having a small diameter of the motor casing can be obtained. Further, another object of the present invention is to provide a small rotary motor and a linear actuator of the present invention, which can increase the outer diameter and increase the output of the translational motion and the rotational motion. Actuator. In order to achieve the above object, a small rotary motor according to the present invention is a motor rotor that rotatably supports a motor casing, and an N pole that is mounted on one of the motor rotor or the motor casing and alternates along a circumferential direction thereof. a magnet of an S pole; and a coil member that is fixed to the motor casing or the motor rotor and that faces the magnet and generates a rotating magnetic field and applies a torque to the motor rotor, and the magnet and the coil member are along a rotating shaft The direction is opposite. Further, the X-0 actuator using the small-sized rotary motor includes an output shaft in which a plurality of magnetic poles are arranged at a predetermined pitch in the axial direction, and a through hole having a snap-fit engagement with the output shaft, and the output The shafts are combined with each other to form a linear motor, and a force generating member for advancing and retracting the output shaft in the axial direction corresponding to the applied electric signal; and a motor rotor of the small rotating motor of the present invention provided on the outer side of the force generator is associated with the rotation The motor imparts arbitrary rotation to the force. According to the small-sized rotary motor of the present invention configured as described above, since the coil member that generates the rotating magnetic field and the magnet opposed thereto are opposed to each other along the rotational axis direction of the motor rotor, they are heavier than the coil members and the magnet. -6- 200903958 The conventional rotary motor stacked in the radial direction is more suitable for the radial arrangement of the flat coil member and the magnet, and the radial size of the motor casing is miniaturized. Further, when the linear motor actuator and the rotary motor are combined to constitute the X - 致 actuator, the rotary motor of the present invention is disposed outside the urging force of the linear motor actuator to achieve X - 0 actuation The miniaturization of the outer diameter of the device can achieve high output and miniaturization of translational motion and rotational motion. [Embodiment] [Best Mode for Carrying Out the Invention] Hereinafter, a rotary motor of the present invention and an X-β actuator using the same will be described in detail based on the drawings. Fig. 1 is a cross-sectional view showing an embodiment of a small rotary motor according to the present invention. The rotary motor 1 is composed of a motor rotor 3 to which the output shaft 2' is fitted to the output shaft 2, a motor housing 4 rotatably supported by the motor rotor 3 via the bearing 30, and a rotor fixed to the motor rotor 3. The magnet 5 is fixed to the motor casing 4 and is fixed to the stator coil 6 facing the rotating sub-magnet 5. Further, in the manner in which the rotary motor 1' is energized to the fixed sub-coil 6, a magnetic attraction force acts between the associated fixed strand 圏6 and the rotating sub-magnet 5, and a torque acts on the motor rotor 3 . The motor rotor 3 has a journal portion 31 fixed to the outer peripheral surface of the output shaft 2, and has a pair of flange portions 32' at both axial ends of the journal portion 31 by the flanges The space between the portion 32 and the motor casing 4 surrounding the opening 90903958 serves as a space between the fixed sub-coil 6 and the rotating sub-magnet 5. Further, the bearing 30 through which the bearing is transmitted is fixed to the outer peripheral surface of each of the flange portions 32, and the motor rotor 3 and the outer casing 4 are rotatably assembled. The rotating magnet 5 is fixed to the inner surface of each of the portions 32 of the motor rotor 3. Fig. 2 is a layout view showing the rotor 5 of each flange portion 32. The rotating sub-magnet 5 is arranged on the inner side surface of the flange portion 32 around the axial portion, and the N pole and the S pole which alternate in the circumferential direction. However, in the pair of rotating sub-magnetics fixed to the respective flange portions 32, the polarities of the opposing magnetic poles of the fixed sub-coils 6 are the same, that is, the N pole and the S pole. On the other hand, the fixed sub-coil 6 interacts with the rotating sub-magnet to constitute a synchronous motor, and applies a three-phase alternating current to generate a rotating magnetic field around the motor. The fixed sub-wire circumference is a coil which is formed by winding a reciprocating member 6 1 which is a core, and has a coil group of three coils of u, v and w. Each of the core members 60 is formed in a rod shape, and its longitudinal direction is formed to coincide with the axial direction of the output shaft. The position is between the pair of flange portions 3 2 of the motor rotation, and is slightly opposed to the respective rotating sub-magnets 5. The winding resistance 61 forms a direction in which the longitudinal direction of the magnetic core element 60 passing through the respective core members 60 is aligned, that is, the direction in which the respective core members 60 and the sub-magnet 5 are aligned. The stator coil 6 of such a configuration is positioned on the inner peripheral surface of the motor casing 4. Fig. 3 is a view showing a state in which the rotation 1 shown in Fig. 1 is cut in the circumferential direction, and the state in which the fixed sub-coil 6 and the rotating sub-magnet 5 are unfolded is accommodated, and the arrangement of the motor flange magnets 3 is different. Mutual 3 is a number of phases, and the sub-3 gap is fixed with the rotation of the horse -8-200903958. As shown in the figure, the rotating sub-magnets 5 are arranged inside the respective flange portions 32 of the motor rotor 3, and the pair of rotating sub-magnets 5 facing the fixed sub-wires 6 are attached to one side. The polarity is N pole and the other polarity is S pole. Further, a fixed sub-coil 6 is disposed between the rotating sub-magnets 5, and both ends of the rod-shaped core member 60 are opposed to the rotating sub-magnet 5, respectively. In the third drawing, the direction of the arrow line A coincides with the circumferential direction of the motor casing 4, but the plurality of core members 60 arranged along the relevant circumferential direction are sequentially wound with the corresponding U phase, V phase, and W. Phase winding 3 1 . Further, the arrangement pitch of the core members 60 of the respective phases is set shorter than the arrangement pitch of the rotating sub-magnets 5. Therefore, when the three-phase alternating current is applied to the fixed sub-coil 6, a rotating magnetic field is generated around the motor rotor 3 in the associated fixed sub-coil 6, and the associated rotating magnetic field acts on the rotating sub-magnet 5, whereby the motor rotor 3 produces torque. Thereby, the rotation speed of the rotating magnetic field causes the motor rotor 3 to rotate, and the output shaft 2 fitted thereto can be rotated. In the thus configured rotary motor 1 of the present invention, since the axial direction of the output shaft 2 which rotates the rotary sub-magnet 5 and the fixed sub-wire 6 is opposed to each other, the journal portion 3 1 of the motor rotor 3 and the motor casing are formed. The accommodating space of the rotating sub-magnet 5 and the fixed sub-wire 6 of 4 is related to the radial direction, and can be formed to be thin. Since the conventional rotating motor has the rotating sub-magnet facing the fixed sub-coil in the radial direction, it is necessary to increase the accommodating space for setting the rotating sub-magnet and the fixed sub-wire, depending on the radial direction. The outer diameter of the outer casing of the motor casing is only increased in size. However, according to the invention of the present invention, the outer diameter of the motor casing 4 can be reduced to a smaller size. Fig. 4 is a view showing an embodiment of an X-0 actuator comprising a rotary motor of the present invention and a rotor type linear motor actuator. The X-Θ actuator is composed of a rotary motor 10, a magnet rod 7 as an output shaft of the motor rotor 3 that penetrates the rotary motor 1A, and is fitted around the magnet rod 7 with a slight gap therebetween. Further, it is composed of a force generating unit 8 integrated with the motor rotor 3. The magnet rod 7 and the force-receiving unit 8 constitute a linear motor. In addition, the structure of the rotary motor 10 is the same as that of the rotary motor 1 shown in Fig. 1 and the same reference numerals are attached to the first embodiment, and the detailed description thereof is omitted here. . Fig. 5 is a schematic view showing a linear motor composed of the above-described magnet rod 7 and the urging force 8. In the magnet rod 7, a plurality of field magnets 70 are arranged in the axial direction, and the outer peripheral surface is processed to be rounded. Each of the field magnets 70 has an N pole and an S pole, and the field magnets 70 adjacent to each other are alternately arranged in a reverse direction such that the N poles or the S poles face each other. In the magnet rod 7, the magnetic poles for driving the magnetic poles of the N pole and the magnetic poles of the S pole are alternately arranged along the longitudinal direction thereof. On the other hand, the urging force 8 is formed by accommodating a cylindrical coil member 80 on the inner circumferential surface of the journal portion 31 of the motor rotor 3. Even with this linear motor, the coil member 80 has a coil group of a group of three windings of u, v, and w phases. As shown in Fig. 6, the turns member 80' of any one phase also has a circumferential shape along the circumferential direction of the motor rotor 3, and faces the outer peripheral surface of the magnet shaft 7 with a slight gap therebetween. Further, the row-to-200903958 column pitch of the coil members 80 of the respective phases is set to be shorter than the arrangement pitch of the field magnets 70. In the magnet rod 7, a magnetic flux 171 is formed by a magnetic pole of the S pole toward the magnetic pole of the N pole, and a magnetic pole sensor (not shown) for inspecting the magnetic flux density is mounted in the motor rotor 3 system. Therefore, the positional relationship between the magnetic poles (N pole and pole) of the magnet rod 7 of the wire cymbal member 80 is grasped by the inspection signal output from the magnetic pole sensor. The controller that controls the energization of the coil member 80 receives the inspection signal of the magnetic pole sensor, calculates the optimal current flow corresponding to the positional relationship between the coil members 80 and the magnetic poles of the magnet rod 7, and energizes the current to each Coil member 80. As a result, an attractive force and a repulsive force are generated between the coil members 80 and the magnetic poles of the field magnet 70 by the interaction of the current flowing to each coil member 80 and the magnetic flux 71 formed by the field magnet 70. The sub- 8 is propelled in the axial direction of the magnet rod 7 together with the motor rotor 3. Fig. 7 shows a torque transmission mechanism 9 between the motor rotor 3 and the magnet shaft 7. The aforementioned force-forcer 8 advances the magnet rod 7 only in this axial direction, and does not transmit any torque in the circumferential direction of the shaft to the magnet rod 7. Therefore, in order to transmit the rotation of the motor rotor 3 to the magnet rod 7, it is necessary to use the torque transmission mechanism 9 to couple the motor rotor 3 and the magnet rod 7. The torque transmission mechanism 9 is fixed to the motor rotor 3, and penetrates the base plate 90 of the magnet rod 7 in parallel with the magnet rod 7, and is erected on the base so as to sandwich the magnet rod 7. a pair of guide shafts 91 of the seat plate 90, and a pair of guide sleeves 92 that are movable in the direction of the arrow A along the respective guide shafts 91, hold the guide sleeves 92, and are fixed to the magnet rods 7 The connecting plate 93 at the end is formed. The coupling plate 93 fixed to the magnet shaft 7 is movably supported by the two guide shafts 9, 1 through the guide sleeves 92 -11 - 200903958, along the axial direction of the guide shafts 9 1 . Therefore, when the magnet rod 7 is moved in the axial direction by energization of the force-receiving member 8, the coupling plate 913 moves along the guide shaft 91 together with the magnet rod 7. On the other hand, when the motor rotor 3 is rotated, the pair of guide shafts 9 1 which are erected on the base plate 90 revolve around the magnet rod 7, and the torque is transmitted to the coupling plate 93 guided by the guide shaft 91. Thereby, the torque applied to the motor rotor 3 is transmitted to the magnet rod 7 through the connecting plate 93. Therefore, the torque transmission mechanism 9 can transmit the torque of the motor rotor 3 to the magnet shaft 7 while advancing and retracting in the axial direction of the magnet shaft 7 of the linear motor. Further, as another aspect of transmitting the torque of the motor rotor 3 to the magnet rod 7, for example, a form in which a ball spline is used is considered. Specifically, a pin shaft is provided at one axial end of the magnet rod 7, and a pin groove cap fitted to the pin shaft is fixed to an end portion of the motor rotor 3. Thereby, the magnet rod 7 can guide the motor rotor 3 in the axial direction, and the rotation of the motor shaft 3 can be transmitted to the magnet rod 7 by stopping the circumferential direction of the magnet rod 7 of the motor rotor 3. Further, in the X-zero actuator configured as described above, the coil member 80 of the above-described force-sensitive member 8 is energized, and the magnet rod 7 can be advanced and retracted by an arbitrary amount to the motor rotor 3, and the stator of the rotary motor 1 is further fixed. When the coil 6 is energized, the motor rotor 3 can be rotated by an arbitrary amount, and the magnet rod 7 can be rotated around the axial direction. For example, the front end of the magnet rod 7 can be held by a holding means such as a pneumatic chuck. The workpiece imparts both translational and rotational motion. -12- 200903958 At this time, since the rotary sub-magnet 5 and the fixed sub-coil 6 are opposed to each other along the axial direction of the magnet shaft 7 in the above-described rotary motor 10, the journal 3I of the motor rotor 3 and the motor casing are formed. The accommodating space of the rotating sub-magnet 5 and the fixed sub-coil 4 can be formed thin in the radial direction, that is, in the case where the tying force 8 of the linear motor is accommodated inside the motor rotor 3, the motor housing 4 can also be suppressed. Large diameter. That is, the χ_0 actuator of the present invention in which the outer diameter side of the in-line type motor actuator overlaps the rotary motor can achieve miniaturization of the motor casing 4, and provides useful Χ-6» for various ρ a machines. Actuator. In addition, in the rotary motor i described in the first embodiment, the rotating sub-magnet 5 is mounted on the motor rotor 3, and the fixed sub-coil is mounted on the motor casing 4, but the shape of the motor rotor and the motor casing may be changed. A magnet as a stator is mounted on the motor casing, and a coil member as a rotor is mounted on the motor rotor. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing an embodiment of a small rotary motor according to the present invention. Fig. 2 is a view showing an arrangement state of the rotating sub-magnets of the motor rotor. Fig. 3 is a view showing a state in which the fixed sub-coils and the rotating sub-magnets are arranged in the circumferential direction in a plane. Fig. 4 is a cross-sectional view showing a χ-0 actuator using the rotary motor of the present invention. -13- 200903958 Figure 5 is a schematic diagram showing the construction of the magnet rod and the force-receiving unit of the linear motor actuator. Fig. 6 is an explanatory view showing the action of a magnetic flux between a magnet rod and a force-receiving member. Fig. 7 is a cross-sectional view showing a torque transmission mechanism between a motor rotor and a magnet rod. [Description of main component symbols] 1 : Rotary motor 2 : Output shaft 3 : Motor rotor 3 〇: Bearing 3 1 : journal (j 〇urna 1 ) 3 2 : Flange portion 4 : Motor housing 5 : Rotating sub-magnet 6 : fixed sub-coil member 6 0 : core member 6 1 : winding resistance (c 〇 i 1 ) 7 : magnet rod 7 〇: field magnet 71 : magnetic beam 8: forcer 8 0 : coil member-14 - 200903958 9 : Torque transmitting mechanism 9 0 : Base plate 9 1 : Guide shaft 92 : Guide sleeve 9 3 : Link plate 1 〇: Rotary motor