200901927 九、發明說明： 【發明所屬之技術領域】 本發明係與除靜電、等離子及集塵有關，更詳而言之 ’尤指以吸塵方式，避免二次污染及以等離子除靜電的一 種等離子除靜電及集塵器。 【先前技術】 按’先行所知，等離子是陽離子的的帶電數等於陰離 子的帶電數，兩者在解離中成電中性的狀態，因等離子乃 分子與分子反覆激烈碰撞，成為帶電荷的離子，以等離子 清洗物質，因物質處於活性化狀態，能量非常高，故容易 與其它分子產生反應，拥其性質可清洗物品、有機污垢 、改變物質表面的性質’諸如L CD的電極清洗、清洗與 心片（CH I P)接合的薄膜基板上之各處清洗、l c D/ PDP面板與薄膜基板間的接合面、清除附在薄膜基板上 的有機污染物、除去晶片上的感光薄膜、清洗複合電子部 件的接觸部份、清洗光學鏡片等等； /由於上述清洗皆採噴料離子方式清除，如圖一所示 ’係-等離子清洗器1 ’等離子清洗器2設有—喷口2， 並由-外接駐機產生轉子錢流或水流經由等離子清 洗器1之喷Π 2仙’對物件3儒，在裝配喷水線中I ，乳氣或氫氣的轉子可以除綠垢，無論以帶等離子之 氣机嘴H洗或水流噴出清洗，污_隨氣流、水流散出 ，容易造成二次污染’尤其在無塵室中，噴出的灰塵、 π蜀源，會再度污染其他物件，或者污塵喊於物件之角 200901927 污濁且無法有效地去除 落、死角，無法真正去除灰塵 靜電； 有鑑於此，本案發明人乃基於上述弊端 開發、研究，並累積多年製造 ^極努力 以解決上述弊端之發明產生。 驗轉於有一足 【發明内容】200901927 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to the removal of static electricity, plasma and dust collection, and more particularly, in particular, a method of vacuuming, avoiding secondary pollution, and removing plasma by plasma. In addition to static electricity and dust collectors. [Prior Art] According to the 'first known, the charge number of the cation is equal to the charge number of the anion. The two are electrically neutral in the dissociation. The plasma is a collision with the molecules and becomes a charged ion. Plasma cleaning materials, because the material is in an activated state, the energy is very high, so it is easy to react with other molecules, and its properties can clean things, organic dirt, change the surface properties of the material 'such as L CD electrode cleaning, cleaning and Cleaning of the core sheet (CH IP) bonded film substrate, bonding surface between the lc D/PDP panel and the film substrate, removing organic contaminants attached to the film substrate, removing the photosensitive film on the wafer, cleaning the composite electron The contact part of the part, the cleaning optical lens, etc.; / Since the above cleaning is carried out by the spray ion method, as shown in Fig. 1, the 'system-plasma cleaner 1' plasma cleaner 2 is provided with a spout 2, and by- The external station generates the rotor money flow or water flow through the plasma cleaner 1 sneeze 2 sen 'on the object 3 Ru, in the assembly line I, milk or hydrogen The rotor of the gas can remove the green scale, no matter whether it is washed with a gas nozzle with a plasma or sprayed with water, the pollution _ is discharged with the air flow and the water flow, which is easy to cause secondary pollution, especially in the clean room, the dust emitted, π Wuyuan will pollute other objects again, or the dust will shout at the corner of the object 200901927. It is dirty and cannot effectively remove the falling and dead corners, and can not really remove the dust static electricity. In view of this, the inventor of the present invention is based on the above drawbacks, research and research, and Accumulated many years of manufacturing efforts to solve the above drawbacks. Verification to one foot [invention content]
即’本發明—縛離子除靜電及集㈣，I 係提供以吸取的方式，作雜 、 、 沾楚祕7 , 示^電’產生激化 ^離子，加叫除物件之靜電，並物件 而易吸取灰塵及雜，有舰將灰 ^激化 中污塵，侧式等料乾淨及集 ’二次污染物件。 再放於空乳中 有 :緣是，本剌-卿軒除靜電及麵器，其係包含 另端為排出 —主體，内有容置空間，一端為吸t ，於主體周邊預定處設有至少一進氣口， · 處’等離子產生 ^ —等離子產生器，設置於主體近吸□ 益與吸口處之間為混合區域； —馬達及風扇，設置於主體近排出口處. 據此’風祕將外界空氣由進氣 荨離子產生器會產生激化的等離子，^ ^ £域：5亥 ’並物件表面受到激化’吸口易吸取灰塵及=件：: =:r混合，性電位，經排出= 200901927 為使責審查委員，對本發明之内容、特徵及目的， 有著更進一步之瞭解與認同，茲舉一較佳實施例，並配合 圖式、圖號說明於后： 【貫施方式】 首先’本發明一種等離子除靜電及集塵器，如圖二、 三、四所示，其係包含有一主體10、一等離子產生器工 1j一馬達12、風扇13 ,該主體1〇為管狀或其他具 有谷置空間之形體皆可，主體10—端為吸口14，另端 為排出口15，於主體1〇周邊兩側處各設有一進氣口工 6，在主體1〇内設有呈放射狀之進氣壁面17與排出口 下方有進氣頂面18 ,從主體1〇周邊兩側處之進氣口工 6至進氣壁面17而下，以形成進氣流道19，吸口14 處上方為—混合區域101，吸口14處部份設有底壁工 4底壁141與進氣頂面18對稱，該進氣流道19延 伸至混合區域1〇1，該主體10之吸口14設有出氣流 道1〇 2，出氣流道1〇 2延伸至排出口15，主體1〇 ，吸口14周邊設有刷毛i 4 2，或該底壁141外底面 °又有刷毛14 2亦可； _ 該等離子產生器11可以使用直流放電生成，或高頻 放電生成，或微波放電生成，設置於主體1〇近吸口工4 處’等離子產生器11與吸口 i 4處之間為混合區域工〇 1，等離子產生器11會產生激化的等離子，加以去除物 件之靜電，並物件表面受到激化，而易吸取灰塵及污垢. s亥馬達12及風扇13，設置於主體1〇近排出口 200901927 5處與等離子產生111 H，將主體1⑽氣流排出琴 排出口 1 5 ; σΛ 藉由上述之結構農置，本發明一種等離子除靜電及集 塵器’操作時如圖二、四所示，係啟動馬達12，旋轉: 扇1 3，朗時啟鱗離子產生器丨χ產生轉子，將主 體10之吸口14朝向需清除灰塵的物件，或以吸口工4 處之刷毛14 2清除灰塵、污垢，該混合區域丨〇丄及吸 口14外側處，會產生激化的等離子，加以去除物件之靜 電’並物件表面朗激化，而f吸取灰塵及污垢，由主體 10之及口14進入混合區域1〇1，該主體1〇之進氣 口 1 6叉風扇1 3引流，由進氣口 ；[ 6進人空氣至混合區 域101，空氣、灰塵及污垢混合帶中性電位，再由出氣 流道1〇 2至排出口15作排出，以清潔物件之表面； 由於本發明係採吸塵的方式，與傳統採喷出的方式不 同，本案以吸取的方式將空氣、灰塵及污垢混合而帶中性 電位，並經排出口15作排出，排出口15可外接管體， 排出至室外或其它地方集中處理，尤其對無塵室的物件清 4，可以去除靜電及清潔灰塵，非常有助益，不會因排出 污塵造成二次污染物件； 本案之馬達12可以延長主體1〇長度至一盒體，馬 達12改置於盒體内，以盒體集塵，待一段時間，再加以 清除灰塵； 以專離子產生帶中性電再加以吸塵方式集塵，可以去 除物件之靜電，對於物件之死角避免二次污染產生的落塵 200901927 而難以清除，所以諸如鏡頭之光學鏡片、晶圓片等精細物 件，可有效清除污塵； 本案不只用於高精密的物件，也可應用於一般之吸塵 器及曰常居加的清潔吸塵，更可激化物件表面，而易吸取 灰塵及污垢’將灰塵清除乾淨，減後將污塵集中處理， 改變一般吸塵器純作吸塵的動作； 综上所述，本發明一種等離子除靜電及 穎性、實用性乃毋庸罟飪.,/、新 可庸置疑，為此懇祈貴審查委員，—垂 國人努力創作初衷，賜、# —貝 秉 賜准本案專利，則申請人是幸丨 200901927 【圖式簡單說明】 【圖式】 第一圖係傳統等離子喷出清洗器之立體示意圖。 第二圖係本發明之立體示意圖。 第三圖係圖二3 — 3之剖面示意圖。 第四圖係圖三4 — 4之剖面不意圖。 【習知圖號】 3物件 1等離子清洗器 2喷口 【主要元件符號說明】 1 0主體 11等離子產生器 1 4吸口 1 5排出口 18進氣頂面 101混合區域 1 2馬達 1 4 1底壁 1 6進氣口 19進氣流道 10 2出氣流道 1 3風扇 1 4 2刷毛 17進氣壁面That is, the present invention - the binding of ions in addition to static electricity and set (four), I system provides a way to absorb, do, and smear the secret, 7 shows that the electricity 'increases ^ ions, add the static electricity of the object, and the object is easy Dust and miscellaneous, there are ships that will ash and intensify the dust, side materials and other materials are clean and collect 'secondary pollutants. In the empty milk, there is: the edge is, in addition to the electrostatic and facial device, the Benedictine-Qingxuan contains the other end as the discharge-main body, which has a receiving space inside, and one end is sucking t, which is located at the predetermined place around the main body. At least one air inlet, · 'plasma generation ^ - plasma generator, is set between the main body near the suction and the suction port is a mixing area; - the motor and the fan are placed at the main body near the discharge. According to this 'wind The secret air will be generated by the inlet air 荨 ion generator, ^ ^ £ domain: 5 hai' and the surface of the object is intensified 'The mouth is easy to absorb dust and = part:: =: r mixed, sexual potential, discharged = 200901927 For the purpose of reviewing the committee, there is a further understanding and recognition of the contents, features and objectives of the present invention. A preferred embodiment is described with reference to the drawings and figures: [Comprehensive method] A plasma static elimination and dust collector according to the present invention, as shown in Figures 2, 3, and 4, includes a main body 10, a plasma generator 1j, a motor 12, and a fan 13, which is tubular or otherwise. Shape with valley space The body 10 can be a suction port 14 and the other end is a discharge port 15. Each of the two sides of the main body 1 is provided with an air inlet 6 and a radial air inlet wall is arranged in the main body 1 . There is an intake top surface 18 below the discharge port, and an air intake port 6 from the two sides of the main body 1 to the intake wall surface 17 to form an intake flow passage 19, and the upper portion of the suction port 14 is a mixed region. 101, a portion of the suction port 14 is provided with a bottom wall 4 and a bottom wall 141 is symmetric with the air intake top surface 18. The inlet flow path 19 extends to the mixing area 101 and the suction port 14 of the main body 10 is provided with an air flow path 1 〇2, the air flow path 1〇2 extends to the discharge port 15, the main body 1〇, the periphery of the suction port 14 is provided with the bristles i 4 2 , or the outer bottom surface of the bottom wall 141 has the bristles 14 2; _ the plasma generator 11 can be generated by DC discharge, or generated by high-frequency discharge, or generated by microwave discharge, and disposed at the vicinity of the body 1 near the mouth-sucker 4 'where the plasma generator 11 and the suction port i 4 are mixed zone work 1, the plasma generator 11 will generate an intensified plasma to remove the static electricity of the object, and the surface of the object is intensified, and easy to absorb dust And the dirt. The shai motor 12 and the fan 13 are disposed at the main body 1 near the discharge port 200901927 5 and the plasma generating 111 H, and the main body 1 (10) airflow is discharged from the piano discharge port 15; σΛ by the above-mentioned structure, the present invention As shown in Figures 2 and 4, a plasma static elimination and dust collector's operation is to start the motor 12, and rotate: the fan 1 3, the squaring ion generator generates a rotor, and the suction port 14 of the main body 10 is oriented. Remove dust or dirt, or remove dust and dirt with the bristles 14 at the mouthpiece. The mixing area and the outside of the suction port 14 will generate an intensified plasma to remove the static electricity of the object and the surface of the object will be intensified. And f sucks dust and dirt, and enters the mixing area 1〇1 from the mouth 14 of the main body 10, the air inlet of the main body 1 is diverted by the fork fan 13 3, and is taken by the air inlet; [6 into the air to the mixing area 101, air, dust and dirt mixed with a neutral potential, and then discharged from the air flow channel 1〇2 to the discharge port 15 to clean the surface of the object; because the invention is a way of vacuuming, and the traditional way of mining Different, this case is to suck The method of taking air, dust and dirt is mixed with a neutral potential, and is discharged through the discharge port 15. The discharge port 15 can be externally connected to the pipe body, and discharged to the outside or other places for centralized treatment, especially for the clean room objects. It can remove static electricity and clean dust, which is very helpful. It will not cause secondary pollutants due to dust discharge. The motor 12 of this case can extend the length of the main body to a box, and the motor 12 is placed in the box to The box body collects dust, and after a period of time, it is used to remove dust; the special ion is generated with neutral electricity and then vacuumed to collect dust, which can remove the static electricity of the object, and avoid the dust falling from the dead angle of the object to avoid the secondary pollution 200901927. Therefore, fine objects such as optical lenses and wafers of the lens can effectively remove dirt; the case is not only used for high-precision objects, but also for general vacuum cleaners and cleaning vacuum cleaners, and more excitable parts. The surface is easy to absorb dust and dirt. 'Clean up the dust, reduce the dust and concentrate it, and change the action of the general vacuum cleaner for vacuuming. According to the invention, a plasma static elimination and singularity and practicability are unremarkable., /, the new can be doubtful, for this reason, the 审查 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵 贵Patent, the applicant is fortunately 200901927 [Simple description of the diagram] [Picture] The first picture is a three-dimensional diagram of a conventional plasma spray cleaner. The second drawing is a schematic perspective view of the present invention. The third figure is a schematic cross-sectional view of Figure 2-3. The fourth figure is not intended for the section of Figure 3-4. [Historical figure number] 3 object 1 plasma cleaner 2 nozzle [main component symbol description] 1 0 body 11 plasma generator 1 4 suction port 1 5 discharge port 18 air intake top surface 101 mixing area 1 2 motor 1 4 1 bottom wall 1 6 air inlet 19 intake air passage 10 2 air flow passage 1 3 fan 1 4 2 bristles 17 intake wall