TW200900729A - Parallel measuring apparatus among transparent body and reflection body and method thereof - Google Patents
Parallel measuring apparatus among transparent body and reflection body and method thereof Download PDFInfo
- Publication number
- TW200900729A TW200900729A TW96123465A TW96123465A TW200900729A TW 200900729 A TW200900729 A TW 200900729A TW 96123465 A TW96123465 A TW 96123465A TW 96123465 A TW96123465 A TW 96123465A TW 200900729 A TW200900729 A TW 200900729A
- Authority
- TW
- Taiwan
- Prior art keywords
- light
- reflector
- parallel
- lens
- photodetector
- Prior art date
Links
- 238000000034 method Methods 0.000 title claims abstract description 21
- 230000003287 optical effect Effects 0.000 claims abstract description 13
- 230000009471 action Effects 0.000 claims abstract description 4
- 201000009310 astigmatism Diseases 0.000 claims description 12
- 238000005259 measurement Methods 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 4
- 230000010287 polarization Effects 0.000 claims description 3
- 210000001747 pupil Anatomy 0.000 claims description 2
- 241000406668 Loxodonta cyclotis Species 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 229910052743 krypton Inorganic materials 0.000 description 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96123465A TW200900729A (en) | 2007-06-28 | 2007-06-28 | Parallel measuring apparatus among transparent body and reflection body and method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW96123465A TW200900729A (en) | 2007-06-28 | 2007-06-28 | Parallel measuring apparatus among transparent body and reflection body and method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW200900729A true TW200900729A (en) | 2009-01-01 |
| TWI345624B TWI345624B (enrdf_load_stackoverflow) | 2011-07-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW96123465A TW200900729A (en) | 2007-06-28 | 2007-06-28 | Parallel measuring apparatus among transparent body and reflection body and method thereof |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW200900729A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114383822A (zh) * | 2022-01-04 | 2022-04-22 | 中国科学院微电子研究所 | 用于光学系统调焦调平的检测装置及方法 |
-
2007
- 2007-06-28 TW TW96123465A patent/TW200900729A/zh not_active IP Right Cessation
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114383822A (zh) * | 2022-01-04 | 2022-04-22 | 中国科学院微电子研究所 | 用于光学系统调焦调平的检测装置及方法 |
| CN114383822B (zh) * | 2022-01-04 | 2024-02-09 | 中国科学院微电子研究所 | 用于光学系统调焦调平的检测装置及方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI345624B (enrdf_load_stackoverflow) | 2011-07-21 |
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|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |