200848692 九、發明說明： 【發明所屬之技術領域】 本發明係有關於一種消除微型鑽針偏擺的芯厚量測系 統及其方法，尤指利用一套自動化、高精度與刀具取放便 利之微型鑽針芯厚量測機構平臺，利用軟體核心程式之撰 寫將雷射模組、機構模組、電控模組等關鍵技術予以整 合，以解決微型鑽針偏擺之現像，而精確求得微型鑽針之 芯厚值。 【先前技術】 按，由於近年國内通訊半導體產業蓬勃發展，導致p C B板與I c載板需求量大增，因此利用微型鑽針（直徑 0· 3刪以下）鐵削電子元件孔位也愈顯重要，然而影響 鑽削品質與孔位精度的重要參數：微形刀具芯厚值，目^ 仍停留在人工方式的量測，首先由熟練的操作人員進行多 j械研磨刀具截面，再透過精密的顯微鏡進行微米級芯 厚！測，因由於操作人員的視差與角度的變異，造成量測 數據因人而異，此方法不僅耗時又費工，量測數據不準確 且屬於破壞性量測。 另前有申請帛0931191155號發明專利案，雖整 電腦自動化連線控制，使得傳動系統、線雷射掃描系統、 點雷射測距系統運作’而求得鑽針芯厚量測值，但因益法 2 =針芯厚㈣時，所產生的偏擺現象，致使所量測的 鑽針芯厚值，產生相當誤差。 5 200848692 ，故有鑒於上述以人工方式量測微型鑽針芯厚’及先前 技術所了生的各項缺失’本案之發明人利用光機電整合技 ^己:Γ測方法’開發出極具原創性的消除微型鑽針偏擺 t厚里測系統及其方法，利用本消除微型鑽針偏擺的芯 :里測系統及其方法’可大幅提昇量測速度，其非破壞性 f測將可大幅降低刀具檢測耗損成本，以及避免人為與先 則，術置測誤判，並提升微型鑽針芯厚量測值的精準，其 精密之機構設計使㈣重複精度可達微料級，實為一符 合產業利用價值且具有功效增進之發明。 【發明内容】 /發明之消除微型鑽針偏擺的芯厚量測系統，係由雷 射板、、且冑構H電控模組所構成，利用電控模組整合 電細自動化連線控制’令使雷射模組及機構模組運作，使 得2型鑽針偏擺之現象得以解決，而微商料徑、槽深 旦厚透=電細内之！測程式整合運算’將微型鑽針芯厚 1測達到高度自動化並提升刀具芯厚量測之精確度。 而該微型鑽針芯厚量測方法，係由電腦連線控制，其 匕含下列步驟：（A)啟動電腦’點選芯厚量測程式；（ 動核W程式後’使用者可以依所需功能來選擇，欲 離開量測系統按結束鈕即可；（C )將、音窄6里沾土 x y t丨」，〔D將π冻凡畢的未開槽 ^ 聖槽座與橡皮摩擦輪之間，選擇主程式之 校正鈕；（D)當按下校正鈕後，確認鑽針由 二 雷射點皆打在圓棒之軸心後按下離開鈕離開校正晝面 200848692 正工作完畢後’即可開始進行芯厚量測 &擇執蚀；（F)人機介㈣定此 針參數後，按儲存紐；（G)參數=二t選定鑽 針尖點的位置與線雷射量測儀：:即進仃鑽 於同-平面上.（H)_ 射儀之雷射是處 厚量測，當所有截面量測完畢後，移動= 二果至：械原點，然後軟體系統進行資料分析，將 f示出來，並盥理“ j心居值和芯厚增量顯200848692 IX. Description of the invention: [Technical field to which the invention pertains] The present invention relates to a core thickness measuring system and method for eliminating the yaw of a micro-drill, especially a set of automation, high precision, and convenient pick-and-place of tools. The micro-drill core thickness measuring mechanism platform integrates key technologies such as laser module, mechanism module and electronic control module by using the software core program to solve the phenomenon of micro-needle yaw, and accurately obtains The core value of the micro drill. [Prior Art] According to the vigorous development of the domestic communication semiconductor industry in recent years, the demand for p CB board and I c carrier board has increased greatly. Therefore, the hole of the electronic component is also cut by the micro drill (with a diameter of 0.3). The more important, however, the important parameters that affect the quality of the drilling and the accuracy of the hole position: the thickness of the micro-tool core, the target is still in the manual measurement, first by the skilled operator to carry out the multi-machine grinding tool section, and then Micron core thickness through a precision microscope! Because the measurement data varies from person to person due to the operator's parallax and angle variation, this method is not only time-consuming and labor-intensive, but the measurement data is inaccurate and destructive. In addition, there was an invention patent file of 帛0931191155. Although the computerized automatic connection control made the transmission system, the line laser scanning system, and the point laser ranging system operate, the thickness of the drill core was measured, but When the method 2 = pin core thickness (four), the resulting yaw phenomenon causes the measured core thickness of the drill to produce considerable errors. 5 200848692, so in view of the above-mentioned manual measurement of the micro-drill core thickness 'and the lack of the prior art', the inventor of the case used the electromechanical integration technology ^ Γ test method 'developed very original Sexual elimination of micro-needle yaw t-thickness measurement system and its method, using this core to eliminate the micro-needle yaw: the measurement system and its method can greatly increase the measurement speed, and its non-destructive f measurement will be Significantly reduce the cost of tool inspection and loss, as well as avoid man-made and pre-emptive, misplaced and error-adjusted micro-drill core thickness measurement, and its precise mechanism design makes (4) repeatability up to micro-level, which is one An invention that meets the value of industrial use and has improved efficacy. SUMMARY OF THE INVENTION / The invention discloses a core thickness measuring system for eliminating micro-needle yaw, which is composed of a laser plate and a HH electric control module, and integrates electric fine control and automatic connection control by using an electric control module. 'Let the laser module and the mechanism module operate, so that the phenomenon of the 2 type burs yaw can be solved, and the micro-commercial material, the groove is deep and transparent. The program integration operation 'supplied the micro drill core thickness 1 to achieve a high degree of automation and improve the accuracy of the tool core thickness measurement. The micro-drill core thickness measurement method is controlled by a computer connection, and the following steps are included: (A) start the computer 'click the core thickness measurement program; (after the dynamic core program) the user can Need to choose the function, you can leave the measurement system and press the end button; (C) will be narrower than 6 inches of soil xyt丨", [D will π freeze the unopened slot ^ holy seat and rubber friction wheel Between the two, select the calibration button of the main program; (D) After pressing the calibration button, confirm that the bur is hit by the two laser points on the axis of the round bar and then press the exit button to leave the calibration surface 200848692. You can start the core thickness measurement & select the corrosion; (F) the human machine (4) after setting the needle parameters, press the storage button; (G) parameter = two t to select the position of the needle tip and the line laser measurement Instrument:: that is, the boring is drilled on the same plane. (H) _ The laser of the ejector is a thick measurement. When all the sections are measured, move = two fruits to: the origin of the machine, then the software system performs Data analysis, show f, and deal with "j heart value and core thickness increment display
)-人上Γ 對分析，計算其誤差；（I 二："面出現對話視窗’將所有參 I! “ 以方便置測人員做資料建檔的工作.（J、）放 =待量測微型鑽針，若是重覆…至了；)(父放 里I、餘微型鑽針芯厚，直至 二 厚量測程式。 者右否則結束芯 (本發明之主要目的，乃係在提供 控制，使微型鑽針芯厚透由 自動化連線 方法，以解決忾型_ 正σ技術，並配合量測 值’二擺之現像’而得到最精準之量測 先前技術之:失:二方式，善傳統人工量測及 天以增進經濟之效益。 【實施方式】 所附其系統與功能上的特性’將依據 1只麵例予以說明。 7 200848692 首先請參閱第1圖及第2 測系統，其主要包含有：圖所-者，係為本發明之量 雷射模組1，係由線雷射 1 2所構成，分別量測鑽針之 值：：硎儀 測儀Η與點雷射量測儀12分:心二;=射量 二:ί2在線雷射量測儀“與點雷射量測：12之？ 心有-出口 2 i ’且該線雷射量測儀丄丄鱼：： 測儀1 2-側各固設有固定夹治具（1工工、^射里 機構模組3，係置於固定平臺2下方，裝設在一i， 平臺4上，由橡皮摩擦輪3工、又移動 Q m ^ η A 玉價展32、氣壓紅3 3、馬達34、伺服馬達35所構成，其 3 V型槽座32中並與橡皮摩擦輪3 ，並對應固定平臺2之中σ9^ 疋的一點支撐 蟫浐f Ρ1去-、ΛΛ 而伺服馬達3 5透過導 』：,(圖未不）的帶動，使移動平臺4做上下的移動，使 鑽針5移動至雷射模進行量_; 使 電控H如第3圖所示者’係包含了運動 料擷取兩個架構，整人了 卫制及貝 σ 了電驷6、線雷射量測儀控制 二1ΤΓ儀控制器14、驅動器7、10接線盒8與 端Ϊ以pc—based控制為主，由於電腦運算 程^人’因此以電腦為決策中心並發展控制 矛壬式與人機介面，透由雷 擷取卡6 2以及AD (類==控:卡61、資料 射模組1的線雷射量漏2 面63，將上述雷 里测儀1 1與點雷射量測儀1 2，及機 200848692 構模組3的氣壓缸3 3與飼服馬達3 5之控制訊號以及回 授訊號作相對應的作動； 俾藉上述模組系統，由電控模組整合電腦6自動化連 線控制，令使雷射模組1及機構模組3運作，以解決微型 鑽針偏擺之現像，並透由電腦6内之量測程式整合運算， 而精確求得微型鑽針5之芯厚值。 # 承上所述，該線雷射量測儀x i與線雷射量測儀控制 器1 3連接’肖以量測鑽針5之外徑，而點雷射量測似 2與點雷射量測儀控制器i 4連接，用以量測鑽針之槽深 ;另該點雷射量測儀1 2係用光學方式或電動方式，在微 型鑽針5偏擺範圍内，以準確量測鑽針5之槽深。 續上所述，該V型槽座3 2係用陶瓷製成之，利用平 面研磨機成形加工，再經過拋光處理，以增加斜面之光滑 平坦度，另外V型槽座3 2表面經過熱處理，可加強表= 硬度、耐磨耗與抗氧化，而氣壓缸3 3之輸出軸3 3丄開 一溝槽3 3 2，將橡皮摩擦輪3 1之轴心3 1 1置於溝栌 3 3 2内，該橡皮摩擦輪3 i之軸心3 1 1底端置於 f輪3 6 ’另氣壓缸3 3尾端設有壓力微調3 3 3 ^ 整鑽針5之夾持力量，而馬達3 4旋轉經皮帶3 7與 輪36帶動橡皮摩擦輪31之軸心311 ，且山μ ^ 丄丄再由橡皮摩擦 輪3 1轉動驅使鑽針5旋轉’另飼服馬達3 5的車由、壯- 有聯軸器3 5 1，以有效吸收伺服馬達3 5運轉時所產生 的震動以及些微的軸偏心。 9 200848692 ，首第4圖至第5圖所示者’本量測系統運作時 :先啟動電腦6 ’然後將鑽針5柄端置 ： 與橡皮摩擦輪31成為穩定的三點支撺，此Γ 2 =3來做閉合的動作，當氣壓缸3 “ = 之輸乂 = ΐ間成閉合狀態，同理，氣壓缸3 3 =軸3 3 1錢時，橡皮摩擦輪3 1#ν型槽座 ，達;:開啟狀態’利用電腦6自動化連線控制，使伺 、達3 5透過導蟬椁r R去-、 便钊服馬 往上Π = )的帶動，使移動平臺2緩慢 夕 7鑽針5穿過固定平臺2之出口 ^ 5尖點的位置與線雷射量馐、針 雷射是處於同一平面上，當鑽上=儀"的 置即為工作原點仿罟 ’十5大』位置確疋後，該位 距，旋轉平臺2移動至先前所設定之間 芯厚量、、則、轉動，帶動鑽針5旋轉開始執行鑽針5 鑽針5偏擺 2可用先學方式或電動方式，在微型 式即透由^準確量測鑽針5之槽深，該光學方 跑，而點雷射量測儀12的雷射點跟著光學 令點雷射=量测儀12上裝設電動褒置， 線雷射量測儀的雷射點可以左右上下移動，並配合 的鑽針5次却叙、里測刀具之外徑，同時會將兩者所量測 圖表可清楚觀轉換後顯示’每筆量測值利用 出鑽針5外徑的錐度趨勢以及槽深的量測 10 200848692 外徑資料與量測刀具此截面兩個槽深 作=有=:臺2再前進下一個距離重複執行量測動 :所有截面夏測完畢後，移動平臺2向下移動回至機 ::點：謝型槽座32與橡皮摩擦輪31之間成開啟 點二’，鑽針5即可取下，同時，線雷射量測儀1 1與 制：測過之數值，經由線雷射量測儀控 :3 1占毎射量测儀控制器丄4分別傳回電腦 經由電腦6軟體系统谁杆杳挝八化 蒞糸、，光進仃貝科分析，將結果呈現於電腦螢 幕上，把實際量測芯厚值和芯厚增量顯 設計值做比對分析，計算其誤差。 /、里娜 μ承上所述，線雷射量測儀11在本量測系統中有三大 1: ’主要有偏擺量測、鑽針5尖點定位以及鑽針5外徑 1測’下列個別詳細敘述之。 偏擺的檢測主要為了提高芯厚量測 產生的主要原因有鑽針5的圓心與柄部的中心沒有重t 成有偏擺的情形’而越靠近鑽針5位置其偏擺：重 ，另一原时鑽針5之㈣機構，主軸部份設計不良而導 =偏擺的產生，偏擺度的量測原理主要是當待 =轉t’待測物會遮斷部份的線雷射，而未被遮斷的 線每射區域我們稱其為鑽針的寬度，而偏擺度 出當待測鑽針旋轉180度時，線雷射的最大和最小寬; 及點雷射的最大和最小距離之差值，如第6圖所示者，旦 測芯厚值前必須解決偏擺之問題，所量測之芯厚值才會二 11 200848692 有參考意義。 鑽針5尖點定位是畚—旦、 ’為了因應產業界上不同的〜J鑽針5芯厚前的必要工作 的鑽針設計，而不同長度的:針乂所以會有不同長度尺寸 隨著改變，而本量測系統是可=，其量測間距長度也會 用，所以當移動平臺2 情不同型號尺寸的鑽針使 儀1 1方向緩慢移動時，=夾持機構朝線雷射量測 ，鑽針尖點位置_，當：=:射量测儀u之雷 躓到數值時’移動平臺2立 「里測儀1 1第-時間 點位置，然後依設定之間距2 ，其位置即是鑽針5尖 利用線雷射量測儀i：=行芯厚量测。 鑽針5置於雷射量測範圍内，鑽的原理主要 最大值與-最小值，如第 5旋轉-圈後會得到- 量測方法，我們取其量之據所提出之芯厚 徑尺寸。 取大值為鑽針5的實際外 、”I上所述，點雷射量测儀1 旦/ 功能，主要有鑽針5量 本置測系統中有二大 ，下列個別詳細敘述Γ 校正與鑽針5槽深量測 當點雷射打在鑽針5上時， 鑽針5的軸心位置—田射的位置必須落於 正的方冰日⑸所置測之槽深值將有誤差，幻六 ，而古速Γ勒用内建的攝影機將鑽針5影像顯示於螢幕上 而阿迷自動對焦鏡__ 於螢幕上 光學方式或電動方式之點雷射 ；晰，再透過 田耵里測儀1 2的微調滑臺將點 12 200848692 雷射移到鑽針5之軸心位置即可。 利用點雷射量测儀1 2量測鑽針5 針5置於雷射量测範圍内，且點雷射將鑽 位置，當鐵針5旋轉一圈，即可 2在鑽針5轴心 小值，將兩:==線可得兩组最大值與兩組最 ，將兩f j減去兩.组最小值可得兩組槽深值 似==槽冰值相加即可得到擬似總槽深，即l擬 人提==::=擬芯厚量測的方式，本發明 n线Γ 鑽針芯厚的方法，使用此方法時 首先我們在胸t鑽針5的外㈣擬似總槽深兩特徵參數， :== 的截面中心點建立-個最小外接圓 可於第8圖所示者’從截面觀察兩虛擬圓 了备現兩個虛擬圓的圓心均應在相同 本毛明之機構模組3亦可由筒夾槽座3 8 、伺服馬達35所構成，如第9圖所示者鑽= 定在筒夹槽座38,並對應固定平臺2之出口：二固 3 8之軸心（圖未示）底端連接馬達3 4，由馬S ^ 4轉動直接驅使鑽針5旋轉，另祠服馬達3 5透過導螺 桿（圖未示）的帶動，使移動平臺4做上下的移動，使鑽 針5移動至雷射模組1進行量測，該舰馬達3 5的軸心 13 200848692 2有聯軸器3 5 i，以有效吸收伺服馬達 產生的震動以及些微的軸偏心。 5運轉日谓 ^本量測系統運作時，如第工〇圖所示者 電腦6，然後將_5柄端置” 先啟動 腦δ自動化連線抑制d 8内，利用電 示）的帶動，使^動平^達3 5透過導螺桿（圖未 ㈣使移動平堂2緩慢往 固定平臺2之出口2工，伟纖私口， 7鑽針5穿過 測磋1使鑽針5尖點的位置與線雷射量 f 2儀11與點雷射量測儀12的雷射是處於同—平^里 ♦〶鑽針5尖點位置確定後，該位置即為I作原點位 臺2移動至先前所設定之間距，旋轉馬達 動广 ，動鑽針5旋轉開始執行鑽針5芯厚量測，在鑽針=轉 f程中’當鑽針5產生偏擺狀態時，點雷射 ㈣由分光鏡，將點雷射量測儀12的雷= 子九，右用電動方式即在點雷射量測 電動裝置，令點雷射量測儀12的雷射點可以左右上= 〔動、在微型鑽針5偏擺範圍内，以準綠量測鑽針5之槽深 本並配合線雷射量測儀1 1量測刀具之外徑，同時會^兩 者所量測的鑽針5資訊經過物理單位轉換後顯示，每筆量 ::值：用圖表可清楚觀察出鑽針5外徑的錐度趨勢以及槽 /衣的里測變化’讀取完鑽針5外徑資料與量測刀具此截面 ，，礼深距離之後’移動平臺2再前進下—個距離重複執 仃量測動作，當所有截面量測完畢後，移動平臺2向下移 動回至機械原點，然後筒夹槽座3 8成開啟狀態，此時鑽 14 200848692 針5即可取下’同時’線雷射量測儀丄i與點雷射量 1 2所量測過之數值，經由線雷射量測儀控制η 3 雷射量測儀控制器1 4分別傳回電腦6，再經 於 體系統進行資料分析，將結果呈現於電腦榮幕上，把^ 量測芯厚值和芯厚增量顯示出來，並與理論科值做= 分析，計算其誤差。 承上所述，本發明消除偏擺微型鑽針芯厚量測 :由電腦6連線控制’如第11圖所示者，其包含下列步 (Α)首先開啟電腦後’點選芯厚量測程式，進入主要 制晝面； t k (=啟動核心程式後’使用者可以依所需功能來選擇， 即可執料項功能，欲離開量測系統按結束紐即可； 次進行芯厚量測前必須先做平臺位置校正， 擦輪之間，選擇絲式之校正-; 橡皮摩 :二按下校正鈕後，移動平臺將向上開始移動，利用線 ^置測儀之雷射做頂端位置尋找，# 2 打於鑽針之轴：= ::移動，由點雷射量測儀之雷射 打在圓棒之鑽針由尖端至柄部雷射點皆 U後按下離開鈕離開校正晝面； 飾校始進行芯厚量測的功能，選擇 、後里測人貝將鑽針放置完成後，按下確認紐； 15 200848692 Y f)人機介面出現參數設定視窗，量測人員選定鑽針的 • tu類别外瓜、量測間距數以及量測位置等參數後，按 儲存赵’將所有參數儲存成-檔案，下次量測同型號鑽針 時，可直接將參數载入，節省量測時間及避免易發生輸入 錯誤參數； /數"又疋70畢後，移動平臺先執行機械原點復歸， 原點復歸完畢德，赵1 &、丁士 移動平堂緩慢向上移動，至鑽針尖點的 線雷射量測儀的雷射、點雷射量測儀的雷射是處於 卜」一平面上； 曰二）：針尖點位置確定後，鑽針旋轉開始執行鑽針芯厚 當所有截面量測完畢後，移動平臺向下移動回至： 械原點，铁後赴，会β成 介面上 統崎㈣分析，將結果呈現於人機 貫際量測芯厚值和芯厚增量顯示出來，並盘理 确设计值做比對分析，計算其誤差； /、里 二1介面出現對話視窗，將所有參數設定值、實 以㈣表格内，以方便量^::針1_全都儲存於 (J)放置新的待做資料建播的工作；)-人上Γ For analysis, calculate its error; (I II: " face dialog window will be all the reference I! " to facilitate the placement of personnel to do data file work. (J,) put = to be measured Miniature burs, if it is repeated...to;; (Father in the I, the remaining micro drill core is thick, until the two thickness measurement program. The right or the end of the core (the main purpose of the present invention is to provide control, The micro-drill core is made of an automated connection method to solve the _-_ σ 技术 technology, and with the measured value of the 'two pendulum' image to get the most accurate measurement of the prior art: Loss: two ways, good Traditional manual measurement and day to enhance economic benefits. [Embodiment] The attached system and functional characteristics will be described in terms of 1 surface. 7 200848692 First, please refer to Figure 1 and the second measurement system. It mainly includes: the map--, which is the volume laser module 1 of the invention, which is composed of a line laser 12, respectively measuring the value of the drill needle:: 硎 测 测 Η and point laser amount 12 points of the tester: heart 2; = shot 2: ί2 online laser measuring instrument "and point laser measurement: 12? Heart -Export 2 i 'and the line of the laser measuring instrument squid:: The measuring instrument 1 - 2 sides are fixed with fixed clamps (1 engineering, ^ shooting mechanism module 3, is placed on the fixed platform 2 below, installed on an i, platform 4, consisting of rubber friction wheel 3, moving Q m ^ η A jade price exhibition 32, air pressure red 3 3, motor 34, servo motor 35, its 3 V type In the slot 32 and the rubber friction wheel 3, and corresponding to the point σ9^ in the fixed platform 2, 蟫浐f Ρ1 goes to -, and the servo motor 35 transmits through the guide: (not shown), Move the mobile platform 4 up and down, and move the drill 5 to the laser die. _; Make the electronic control H as shown in Figure 3, which contains the two materials of the moving material, and the whole person has the system. And σσ 驷 驷 6, line laser measuring instrument control 2 1 ΤΓ 控制器 controller 14, drive 7, 10 junction box 8 and end Ϊ with pc-based control, due to computer computing ^ people's therefore computer For the decision-making center and develop the control spear-type and human-machine interface, through the Thunder card 6 2 and AD (class == control: card 61, data shooting module 1 line laser leakage 2 face 63, the above The measuring instrument 1 1 and the point laser measuring instrument 1 2, and the machine 200848692 constructing the module 3 of the pneumatic cylinder 3 3 and the feeding motor 35 control signal and the feedback signal corresponding to the operation; The group system is integrated with the computer 6 automatic connection control by the electronic control module, so that the laser module 1 and the mechanism module 3 are operated to solve the phenomenon of the micro-needle yaw and the measurement program in the computer 6 Integrate the calculation, and accurately determine the core thickness of the micro drill 5. # According to the above, the line laser measuring instrument xi is connected with the line laser measuring instrument controller 1 3 to measure the drilling pin 5 The outer diameter of the point, and the point laser measurement is similar to the point laser measuring instrument controller i 4, which is used to measure the groove depth of the bur. The laser measuring instrument 1 2 is optically or In the electric mode, the groove depth of the drill pin 5 is accurately measured within the range of the yaw of the micro drill 5 . Continuing to say, the V-shaped socket 3 2 is made of ceramic, formed by a plane grinder, and then polished to increase the smooth flatness of the bevel, and the surface of the V-shaped groove 32 is subjected to heat treatment. The table can be strengthened = hardness, wear resistance and oxidation resistance, while the output shaft 3 3 of the pneumatic cylinder 3 3 opens a groove 3 3 2, and the axis 3 1 1 of the rubber friction wheel 3 1 is placed in the groove 3 3 2, the bottom end of the rubber friction wheel 3 i 3 1 1 is placed at the f wheel 3 6 'the other end of the pneumatic cylinder 3 3 is provided with pressure trimming 3 3 3 ^ the clamping force of the whole drilling pin 5, and the motor 3 4 rotates through the belt 3 7 and the wheel 36 to drive the axis 311 of the rubber friction wheel 31, and the mountain μ ^ 丄丄 is rotated by the rubber friction wheel 3 1 to drive the drill needle 5 to rotate 'the other motor of the motor 3 5 Strong - There is a coupling 3 5 1, to effectively absorb the vibration generated by the servo motor 35 and a slight shaft eccentricity. 9 200848692 , the first picture shown in Figure 4 to Figure 5 'When the measurement system is in operation: first start the computer 6 ' and then put the handle 5 end: the three-point support with the rubber friction wheel 31, this Γ 2 = 3 to do the closing action, when the pneumatic cylinder 3 “======================================================================================= Block, up;: open state 'Using computer 6 automatic connection control, so that the servo, the 3 5 through the guide 蝉椁 r R to -, the 钊 钊 马 Π ) ) ) ) ) ) ) ) ) ) ) 移动 移动 移动 移动 移动 移动 移动 移动 移动The position of the burr 5 passing through the exit of the fixed platform 2 is 5, the position of the cusp point is the same as the line laser 馐, and the needle laser is on the same plane. When the drill is on the instrument, the position is assumed to be the work origin. After the 5th position is confirmed, the position of the position, the rotating platform 2 moves to the previously set core thickness, then, rotates, drives the drill 5 to rotate and starts to perform the drill 5, the drill 5 yaw 2 can be used first In the mode or the electric mode, in the micro type, the groove depth of the drill pin 5 is accurately measured, and the optical side runs, and the laser spot of the point laser measuring instrument 12 follows the optical order point. The electric measuring device 12 is equipped with an electric device, and the laser point of the line laser measuring instrument can be moved up and down, and the matching needle is used for 5 times, but the outer diameter of the tool is measured, and both will be The measured chart can be clearly displayed after the conversion. The 'measurement value of each measurement value is measured by the taper tendency of the outer diameter of the drill pin 5 and the groove depth. 10200848692 The outer diameter data and the measuring tool have two groove depths for this section=== :Taiwan 2 advances to the next distance and repeats the measurement: after all the sections are measured in summer, the mobile platform 2 moves back to the machine:: Point: the opening point between the X-shaped slot 32 and the rubber friction wheel 31 ', the drill pin 5 can be removed, at the same time, the line laser measuring instrument 1 1 and system: measured value, controlled by the line laser measuring instrument: 3 1 accounted for the measuring device 丄 4 respectively Back to the computer through the computer 6 software system who is in the 八 八 八 八 糸 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 , calculate its error. /, Rina μ bearing the above, the line laser measuring instrument 11 has three major ones in this measuring system: 'The main yaw measurement, the bur 5 point positioning and the bur 5 outer diameter 1 test' are described in detail below. The main reason for the yaw detection is to increase the core thickness measurement. There is no yaw in the center of the shank. The closer to the position of the bur 5, the yaw: heavier, the other (4) mechanism of the boring needle 5, the main shaft part is poorly designed and the yaw is biased. The principle of measurement of the yaw degree is mainly that when the object to be tested is turned off, the object to be tested will block part of the line laser, and the area of the line that is not blocked is called the width of the bur. The yaw degree is the maximum and minimum width of the line laser when the boring needle is rotated by 180 degrees; and the difference between the maximum and minimum distances of the point laser, as shown in Fig. 6, before the thickness of the core is measured The problem of yaw must be solved, and the measured core thickness value will be 2 11 200848692. The burr 5 cusp positioning is 畚 旦, 'in order to meet the needs of the industry, the different ya burs 5 core thickness before the necessary work of the bur design, and the different lengths: the needle 乂 so there will be different length dimensions with Change, and the measurement system is OK, and the measurement pitch length will also be used, so when the mobile platform 2 moves the needle of different model sizes to make the direction of the instrument 1 1 move slowly, the clamping mechanism is directed to the line laser amount. Measure, the position of the nip point of the drill _, when: =: when the thunder of the ray measuring instrument u reaches the value, 'moving the platform 2 立" the position of the measuring instrument 1 1 - time point, and then according to the setting distance 2, the position is It is the drill needle 5 tip using the line laser measuring instrument i:= core thickness measurement. The drill needle 5 is placed in the laser measurement range, the main principle of the drill is the maximum value and the minimum value, such as the 5th rotation-circle After that, we will get the measurement method, and we take the amount of the core thickness dimension proposed by the quantity. The large value is the actual value of the drill 5, as described above, the point laser measuring instrument 1 / function, There are two main types of drilling needles in the system. The following are the detailed descriptions. 校正 Correction and drilling 5 slots deep measurement when the laser is drilled When the needle 5 is on, the axial position of the drill needle 5—the position of the field shot must fall on the positive square ice day (5). The depth value of the groove measured will have an error, and the ancient speed dome uses the built-in camera. The image of the drill 5 is displayed on the screen and the A-focus autofocus mirror __ is laser on the screen optically or electrically. Clearly, then the fine-tuning slide of the field meter 1 2 will be point 12 200848692 Lei It can be moved to the axial position of the drill needle 5. Using the point laser measuring instrument 1 2 measuring the drill pin 5 pin 5 is placed in the laser measurement range, and the point laser will drill the position, when the iron pin 5 rotates once, it can be 2 in the drill pin 5 axis Small value, the two: == line can get the maximum value of the two groups and the two groups, the two fj minus two. The minimum value of the group can be obtained by the two sets of groove depth values == slot ice value can be added to get the quasi-like total The depth of the groove, that is, the method of measuring the thickness of the core, the method of measuring the core thickness of the n-line boring of the present invention, when using this method, first of all, we are in the outer (four) pseudo-slot of the chest drill needle 5 Deep two characteristic parameters, :== The center point of the section is established - a minimum circumscribed circle can be shown in Figure 8. 'Two virtual circles are observed from the cross section. The center of the two virtual circles should be in the same body. The module 3 can also be composed of a collet holder 38 and a servo motor 35. As shown in Fig. 9, the drill is fixed to the collet holder 38, and corresponds to the outlet of the fixed platform 2: the axis of the two solids 38 (not shown) The bottom end is connected to the motor 34, and the rotation of the horse S^4 directly drives the drill 5 to rotate, and the motor 34 is driven by the lead screw (not shown) to move the moving platform 4 up and down. , Bur 5 is moved to measure the laser module 1, the axis 35 of the motor ship 132008486922 35 I has a coupling, in order to effectively absorb the vibration of the servo motor and generates a slightly eccentric axis. 5 operating day is called ^ when the measurement system is operating, as shown in the figure of the computer, and then the _5 handle is set to "start the brain δ automatic connection suppression d 8, using the electric display", Let the moving level reach 3 5 through the lead screw (Fig. (4) makes the moving flat 2 slowly to the exit of the fixed platform 2, the Wei fiber is private, the 7 drill 5 passes through the test 1 to make the drill 5 sharp point The position and the laser amount of the line f 2 meter 11 and the point laser measuring instrument 12 are in the same - flat ^ ♦ 〒 〒 〒 5 5 5 5 5 5 确定 确定 确定 确定 确定 确定 确定 确定 确定 确定 确定 确定2 Move to the previously set distance, the rotary motor is wide, the rotary drill 5 rotates to start the drill 5 core thickness measurement, and in the drill pin = turn f, when the drill 5 is deflected, the mine Shooting (4) by the beam splitter, the point of the laser measuring instrument 12 of the lightning = sub-nine, the right electric method is to measure the electric device at the point of the laser, so that the laser point of the point laser measuring instrument 12 can be left and right = [Moving, within the range of the yaw of the micro-drill 5, the groove depth of the drill 5 is measured by the quasi-green amount and the outer diameter of the tool is measured with the line laser measuring instrument 1 1 , and the measurement is performed by both Drill pin 5 After the physical unit conversion, the amount of each volume:: value: the trend of the taper of the outer diameter of the drill 5 and the change of the inner diameter of the groove/cloth are clearly observed by the chart 'read the outer diameter of the drill 5 and the measuring tool After the cross-section, the depth of the distance is 'moving the platform 2 and then moving forward|the distance is repeated to perform the measuring action. When all the sections are measured, the moving platform 2 moves back to the mechanical origin, and then the collet holder 3 8 into the open state, at this time drill 14 200848692 needle 5 can take off the 'simultaneous' line laser measuring instrument 丄i and point laser quantity measured by 2, measured by line laser measuring instrument η 3 The laser measuring instrument controller 14 is respectively transmitted back to the computer 6, and then analyzed by the body system, and the result is presented on the computer glory screen, and the thickness of the measuring core and the thickness of the core are displayed, and According to the theoretical value, the error is calculated. According to the above, the invention eliminates the yaw micro-drill core thickness measurement: it is controlled by the computer 6 connection, as shown in Fig. 11, which includes the following steps ( Α) After turning on the computer, first click on the core thickness measurement program to enter the main system; tk ( = After starting the core program, the user can select according to the required function, and the function can be controlled. To leave the measurement system, press the end button; before the core thickness measurement, the platform position correction must be done first. Between the choice of silk correction -; rubber friction: two press the correction button, the mobile platform will start to move up, use the line ^ tester laser to do the top position search, # 2 hit the axis of the drill: = :: Move, the laser from the point laser measuring instrument hits the round needle, the needle from the tip to the handle is U, then press the exit button to leave the calibration surface; After the function is selected, after the person has placed the drill needle, press the confirmation button; 15 200848692 Y f) The parameter setting window appears in the man-machine interface, and the measurement personnel select the needle. After measuring the number of distances and measuring the position, press [Save] to save all the parameters into a file. The next time you measure the same type of drill, you can load the parameters directly, saving measurement time and avoiding input errors. Parameter; / number " after 疋70, the mobile platform is executed first The return of the origin of the machine, the return of the origin is completed, Zhao 1 & Ding Shi moving the flat hall slowly moving upwards, the laser of the laser measuring instrument of the point of the needle point point, the laser of the point laser measuring instrument is On the plane of the Bu"; 曰2): After the position of the needle point is determined, the rotation of the bur is started to perform the core thickness of the bur. When all the sections are measured, the moving platform moves down to: the origin of the machine, and the iron is followed. On the β-interface, Tatsuzaki (4) analysis, the results are presented in the human-machine cross-measurement core thickness value and core thickness increment display, and the correct design value is used for comparison analysis, and the error is calculated; 1 interface appears in the dialog window, set all the parameters, in the (4) table, to facilitate the amount ^:: pin 1_ all stored in (J) to place new work to be done to build the data;
)步驟，量測其餘微型鑽 ）至（I 則結束芯厚量測程式。針直至量測完成者，若否 综上所陳’本發明所提 人 的芯厚量測系統及1方、去’、 消除微型鑽針偏擺 賴性與進步性，實符合准^專^^業利用價值之新 利之要件，爰依法申請專利 16 200848692 之，凊速予審查，如蒙核准，實感德便。 ，兴斤述者，僅係本發明之較佳可行之實施例而已 發明上述之方法、形狀、構造、裝置所為之 ，艾化，S應包含於本案之權利範圍内。 【圖式簡單說明】 係為本發明之量測系統立體示意圖。 弟2圖係為本發明之機構模組示意圖。 =3圖係為本發明之整體電控模組架構圖。 =圖係為本發明之鑽針量測初始狀態圖。 ^係為本發明之鑽針量測動作狀態圖。 本發明之鐵針產生偏擺之示意圖。 第8圖係為本發明之 给η门 予里，則方法示意圖。 =係為本發明之另―機構模組示意圖。 =係為弟9圖之量測系統立體示意圖。 11圖係為本發明之量測方法流程圖。 【主要元件符號說明】 雷射模組· · · ·丄 固定夾治具...丄丄]、線雷射量測儀· . ；l丄 固定夾治具·..工2工·點雷射量測儀· . ！ 2 點雷射量測儀控制Η 4 ㈣射量測儀控制器13 200848692 固定平臺....2 出口 ··· 機構模組····3 橡皮摩擦輪 轴心......3 11 V型槽座· 氣壓缸.....33 輸出轴·· 溝槽......3 3 2 壓力微調· 馬達......3 4 伺服馬達· 聯軸器.....351 皮帶輪·· 皮帶......37 筒夾槽座· / 移動平臺· · · · 4 鑽針· · · 電腦......6 運動控制卡 資料擷取卡· · · 6 2 AD通訊介面 驅動器.....7 10接線盒· 18), measure the remaining micro drills to (I finish the core thickness measurement program. The needle is up to the measurement completion, if it is not comprehensive), the core thickness measurement system of the present invention and one side, go ', to eliminate the micro-drilling bias and progress, in fact, in line with the new benefits of the use of the value of the industry, the application of patents 16 200848692, idling for review, if approved, real sense of virtue. The above-mentioned methods, shapes, structures, and devices have been invented by the preferred embodiments of the present invention, and Aihua, S should be included in the scope of the present application. [Simplified Description] The figure is a schematic diagram of the measuring system of the present invention. The second drawing is a schematic diagram of the mechanical module of the present invention. The =3 drawing is the overall electronic control module architecture of the present invention. The initial state diagram is measured. ^ is the state diagram of the dynamometer measuring action of the present invention. The schematic diagram of the eccentricity of the iron needle of the present invention is shown in Fig. 8. The figure is the schematic diagram of the method for the η门予里. It is another schematic diagram of the mechanism module of the invention. The schematic diagram of the measuring system of the figure 9 is the flow chart of the measuring method of the present invention. [Description of the main components] Laser module · · · · 丄 fixed clamp fixture ... 丄丄], line Laser measuring instrument · . ; l丄 fixed clamp fixture ·.. 2 work · point laser measuring instrument · . ! 2 point laser measuring instrument control Η 4 (four) ray measuring instrument controller 13 200848692 fixed Platform....2 Export··· Mechanism Module····3 Rubber Friction Wheel Axis...3 11 V-Slot Seat · Pneumatic Cylinder.....33 Output Shaft·· Groove ......3 3 2 Pressure fine adjustment · Motor...3 4 Servo motor · Coupling ..... 351 Pulley · · Belt ... 37 collet holder · / Mobile Platform · · · · 4 Drills · · · Computers... 6 Motion Control Cards Data Capture Card · · · 6 2 AD Communication Interface Drivers.....7 10 Junction Boxes · 18