TW200848552A - Electrolytic gold plating solution and gold film produced by using the same - Google Patents

Electrolytic gold plating solution and gold film produced by using the same Download PDF

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TW200848552A
TW200848552A TW097105852A TW97105852A TW200848552A TW 200848552 A TW200848552 A TW 200848552A TW 097105852 A TW097105852 A TW 097105852A TW 97105852 A TW97105852 A TW 97105852A TW 200848552 A TW200848552 A TW 200848552A
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Taiwan
Prior art keywords
acid
gold
gold plating
plating solution
potassium
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TW097105852A
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Chinese (zh)
Inventor
Shigeki Shimizu
Ryuji Takasaki
Yoshizou Kiyohara
Tomoyuki Kojima
Jun Yamamoto
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Japan Pure Chemical Co Ltd
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Publication of TW200848552A publication Critical patent/TW200848552A/en

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    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/48Electroplating: Baths therefor from solutions of gold

Abstract

Disclosed is an electrolytic gold plating solution which can ensure to provide an excellent solder joint strength of a lead-free solder ball even when the solder ball is used for connection. Specifically disclosed is an electrolytic gold plating solution comprising at least gold cyanide, a dicarboxylic acid or a dicarboxylic acid salt represented by the formula (1) and a dicarboxylic acid or a dicarboxylic acid salt represented by the formula (2). [In the formula (1), -CnH2n- represents an alkylene group which may be linear or have a side chain; X<1> and X<2> independently represent H, Na, K or NH4; and n represents a positive integer of 0 or greater.] [In the formula (2), X<3> and X<4> independently represent H, Na, K or NH4; and Y represents a hydrogen atom, an alkyl group or a hydroxyalkyl group.]

Description

200848552 九、發明說明: 【發明所屬之技術領域】 本發明有關於電解鍍金液、使用其而得之金膜、使用其 之鍍鎳膜上之金膜之製造方法、以及使用其而得之鍍鎳膜 上之金膜。 【先前技術】 考慮到鎳之底層金屬擴散障壁特性,金之優異之耐蝕 性、耐熱性、機械特性、電氣特性等理由,於鎳膜上進行 之鍍金(以下,簡稱為「鎳/鍍金」)被廣泛地應用於保護電 子零件之端子連接部之表面的用途中,且所應用之基板材 料亦多種多樣,有塑膠、陶瓷、金屬、薄膜等。 可於以鎳/鍍金膜被覆之連接端子部上搭載焊錫球,藉 由使該焊料溶著而將該連接端子部與其他電子零件相曰 3連7接/^於連接之焊錫球通常使用包含63質量%之錫及 37貝!/〇之錯之組成的「錫/錯共晶焊錫球」。然而,近年 來’出^環境保護之觀點,^使用受到限制,多使 /銀/銅等之組叙「無料錫球」來 錫 紹共晶焊錫球」。 使用之「錫/ :::指出:與習知之錫/錯共晶焊錫球相比 :=吏:錫炼著所需之溫度係設定為較高之;: ^充分’且擴散至鍍金膜上之底層金屬能力 者知錫球時之溫度升高,因、:使熔 97105852 使用錫/錯共晶焊錫球之情況相比,表面更=:,: 5 200848552 =錫連接強度降低。並且’若_連接強度下降,則存 =焊錫球脫落、相連接之電子零件間斷開、電子 發揮功能之問題。 …、无 另-方面,作為以改善焊錫連接強度為目的之電解鑛金 專利文獻1及專利文獻2中,揭示有可提高 =鏟性、或不易受到自夹具等混入之雜質金屬離子之 =者。然而’於用無錯嬋錫球進行連接之情況,該等之 連接強度均不充分。 專利文獻1·曰本專利特開平4_028894號公報 專利文獻2:曰本專利特開平^⑽乃以號公報 【發明内容】 (發明所欲解決之問題) 本發明係繁於上述先前技術研究而成者,其目的在於提 供即使於用無錯焊錫球進行連接之情況, 焊錫接合強度之電解鍍金液。 什彳炎/、之 (解決問題之手段) 本,明者為了解決上述問題而反覆銳意研究,結果發 現’若使用至少含有氰化金鹽、以及具有特定化學結構式 之兩種一敌酸或二致酸鹽作為構成成分的電解鑛金液來 H膜’則即使於用無錯焊錫球進行接合之情況,亦可 獲得優異之焊錫接合強度,從而完成本發明。 即’本發明提供一種電解鍍金液,其特徵在於:至少含 有氰化金鹽、以下述式⑴所示之二羧酸或二羧酸鹽、以及 以下述式(2)所示之二敌酸或二幾酸鹽。 97105852 200848552 [化1] X^OC-C^n—COOX2 (1) [式(1)中’-Cl-表示可具有直鏈或侧鏈之伸烷基;χ1 與X2相互之間可相同亦可不同,表示H、Na、K^t ΝΗ4; η表示0以上之自然數。] [化2] (2) x3ooch2c-n-ch2coox4200848552 IX. Description of the Invention: [Technical Field] The present invention relates to an electrolytic gold plating solution, a gold film obtained therefrom, a method for producing a gold film on a nickel-plated film using the same, and a plating method using the same Gold film on the nickel film. [Prior Art] Gold plating on a nickel film (hereinafter referred to as "nickel/gold plating" for the reasons of excellent corrosion resistance, heat resistance, mechanical properties, electrical properties, etc. of gold) It is widely used in the application of protecting the surface of the terminal connection portion of an electronic component, and the substrate material to be applied is also various, and there are plastic, ceramic, metal, film, and the like. A solder ball can be mounted on a connection terminal portion covered with a nickel/gold plating film, and the solder ball is connected to the other electronic component by soldering the solder, and the solder ball is usually used. 63% by mass of tin and 37 shells! The "tin/wrong eutectic solder ball" composed of the fault of 〇. However, in recent years, the concept of environmental protection has been limited, and the use of / silver/copper has been described as a "small tin ball" to the tin eutectic solder ball. The use of "tin / ::: indicates: compared with the conventional tin / wrong eutectic solder ball: = 吏: the temperature required for tin refining is set higher;: ^ fully 'and spread to the gold-plated film The underlying metal ability knows the temperature rise of the solder ball, because: the melting 97105852 uses tin/wrong eutectic solder balls compared to the surface, the surface is more =:,: 5 200848552 = tin connection strength is reduced. _If the connection strength is lowered, there is a problem that the solder ball is detached, the electronic components that are connected to each other are disconnected, and the electronic function is functioning. ..., no other aspects, as the electrolytic mineral gold patent document 1 and patent for the purpose of improving the solder joint strength. In Document 2, it is revealed that there is an increase in the shovel property or an impurity metal ion which is not easily mixed by a jig or the like. However, when the connection is made with an error-free tin ball, the connection strength is insufficient. Patent Document 1 曰 专利 专利 4 _0 _0 _0 _0 _0 _0 _0 _0 _0 _0 _0 _0 _0 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( The purpose of Providing an electrolytic gold plating solution with solder joint strength even when connected with an error-free solder ball. What is the cause of the problem? In order to solve the above problem, the researcher has repeatedly studied it and found that The use of an electrolytic gold liquid containing at least a gold cyanide salt and a two-acid or dibasic acid salt having a specific chemical structure as a constituent component to the H film', even in the case of bonding with an error-free solder ball, The present invention can also be obtained by the excellent solder joint strength. That is, the present invention provides an electrolytic gold plating solution characterized by containing at least a gold cyanide salt and a dicarboxylic acid or a dicarboxylic acid salt represented by the following formula (1). And a dibasic acid or a diacid salt represented by the following formula (2): 97105852 200848552 [Chemical Formula 1] X^OC-C^n-COOX2 (1) [In the formula (1), '-Cl- indicates An alkyl group having a straight chain or a side chain; χ1 and X2 may be the same or different from each other, and represent H, Na, and K^t ΝΗ4; η represents a natural number of 0 or more.] [Chemical 2] (2) x3ooch2c -n-ch2coox4

YY

[式⑺中,X3與相互之間可相同亦可不同,表示H、 Na、K或丽4 ’· Y表示氫原子、院基或㈣燒基。] 另外,本發明提供-種金膜,其特徵在於:其係藉由使 用上述電解鍍金液進行電解鍍金而獲得。 ^外,本發明提供—種金膜之製造方法,其特徵在於: 使用上述電解鍍金液,於鑛錄膜上進行電解鑛金。 =本發明提供一種錄膜上之金膜,其特徵在於:其 =由使用上述電解鑛金液,於鑛_上進行電解鍍金而 (發明效果) 年1艮=:明二獲得如下鍍金膜,該鑛金膜即使於用近 電子愛^ %纟兄問題之考慮而使用之無鉛焊錫球來連接 球脫:情況,亦可獲得優異之谭錫接合強度,且焊錫 電解=機率ί小。另外’藉由於鑛錄膜上進行本發明之 接合強^制上之金訪獲得特㈣異之谭錫 97105852 200848552 【實施方式】 以下,對本發明加以説明,但本發明並不限定於下述具 體之實施形態,而可於技術思想範圍内任意變形實施。 本發明係電解鍍金液,其特徵在於:至少含有氰化金 鹽、以下述式(1)所示之二羧酸或二羧酸鹽、以及以下述式 (2)所示之二羧酸或二叛酸鹽。 [化3] X1OOC - CnH2ri—COOX2 ⑴ [式(1)中’ -CnH2n-表示可具有直鏈或侧鏈之伸烷基;χ1 與X2相互之間可相同亦可不同,表示Η、Na、Κ或ΝΗ4 ; η表示〇以上之自然數。] [化4] X3OOCH2C—Ν—CH2C〇〇X4 (2)In the formula (7), X3 may be the same or different from each other, and it means that H, Na, K or 丽4'·Y represents a hydrogen atom, a hospital group or a (tetra)alkyl group. Further, the present invention provides a gold film obtained by electrolytic gold plating using the above electrolytic gold plating solution. Further, the present invention provides a method for producing a gold film, characterized in that electrolytic gold is deposited on a mineral film using the above electrolytic gold plating solution. The present invention provides a gold film on a recording film, which is characterized in that: by using the above-mentioned electrolytic gold liquid, electrolytic gold plating is performed on the ore (invention effect), the following gold plating film is obtained in the following: The gold film of the mine is connected to the ball off even with a lead-free solder ball that is used in consideration of the problem of the near-electronics. In addition, the excellent tan-join strength can be obtained, and the solder electrolysis = probability is small. In addition, the present invention is described in the following by means of a gold interview on the joint film of the present invention. The present invention is not limited to the following specific examples. The embodiment can be implemented arbitrarily within the scope of the technical idea. The present invention is an electrolytic gold plating solution characterized by containing at least a gold cyanide salt, a dicarboxylic acid or a dicarboxylic acid salt represented by the following formula (1), and a dicarboxylic acid represented by the following formula (2) or Two tartrate salts. X1OOC - CnH2ri-COOX2 (1) [In the formula (1), -CnH2n- represents an alkyl group which may have a straight chain or a side chain; χ1 and X2 may be the same or different from each other, indicating Η, Na, Κ or ΝΗ 4 ; η represents the natural number above 〇. ] [Chemical 4] X3OOCH2C—Ν—CH2C〇〇X4 (2)

YY

[式(2)中,X3與χ4相互之間可相同亦可不同,表示η、 Na、Κ或NHU ; Υ表示氫原子、烷基或羥基烷基。] 本發明之電解鍍金液必須含有氰化金鹽。該氰化金鹽係 用作本發明之電解鍍金液之金源。此處,所謂「氰化金 产」-、氰化金酸鹽」、「四氰基金酸鹽」之含義相同。 氰化金鹽並不限定於使用一種,亦可併用兩種以上。 作為忒氰化金鹽,較佳為氰化金鹼金屬或氰化金銨。另 ^卜二作為該氰化金鹽之金之價數(氧化數),可使用丨價或 西扣中之任一者,就金之析出效率之觀點而言,較佳為1 價。即較佳為氰化亞金鹽。 97105852 8 200848552 作為該氰化金鹽之具體例,例如可舉出:氰化亞金納、 氰化亞金卸、氰化亞金録、氰化金納、氛化金卸、氛化金 铵等。其中,就金之析出效率等電鍍性能、成本、容易择 得性等觀點而言,較佳為氰化亞金納、氛化亞金卸或氛^ 亞金銨’進而就相同之觀點而言,特佳為氰化亞金鉀。 對本發明之電解鍍金《中該氛化金鹽 &lt;含量並益特別 限定,下述閃熔電解鍍金與厚層電解鍍金之最佳含量並不 相同,但通常無論哪一種,相對於電解鍍金液整體,金屬 金均為0.05 g/L〜50 g/L,較佳為〇」g/L〜% -,特佳 為〇.5 g/L〜20 g/L。若電解鍍金液中之金屬金之含量過 少,則有時難以實現金黃色之鑛金,另外,有時亦難以用 作閃溶電解鍍金液。另一方面,於電解鍛金液中之金屬金 =含量過多之情況,作為電解鍍金液之性能並無特別問 ',但金屬金係價格非常昂貴之金屬,有時,以含有於電 解液中之狀態下加以保存並不經濟。 上述關於氰化金鹽之記載規定了氰化金鹽在本發明之 電解鐘金液中之存在形離,^ a田制 m 、 製本發明之電解鍍金液 夺使用上述氰化金鹽作為溶解原料亦較佳。 本發明之電解鍍金液中必須含有上述式(1)所示之二 【线二幾酸鹽(以下’有時將「二㈣或二 _ =二竣酸(鹽)」)、以及上述式⑺所示之二_(鹽)。該 專二於電解鑛金液中發揮至少導電鹽之功能。若 所不之二羧酸(鹽)及式(2)所示之二羧酸⑷兩者 於使用無錯焊錫球之情況,亦可獲得具有優異之焊錫接合 97105852 9 200848552 強度之鍍金犋, 合強度改良。 ;鎳膜上之金膜,實現優異之焊錫接 上述式(1)所示 一 f 之伸烧基,即既可f緩酸(鹽)m-表示可具有側鏈 另外,X1與〃、直鏈構造亦可為侧鏈構造之伸烷基。 K或νη4Γη、ν目互之間可相同亦可不同’表示H、Na、 「式(2)所*之〖或聰4可以與上述氰化金鹽或下述 存在於電解鍍^,m)」等進行陽離子交換後之狀態而 數,卓31!)所7^二竣酸(鹽)中’ n表*0以上之自缺 數,較佳為〇〜8 工〈曰…、 内之自然數,更二Λ圍内之自然數’特佳為0〜6之範圍 則存在對水之容^ 範圍内之自然數4 η過大, 獲得之情況。’解度下降而無法形成特定之濃度、或難以 等方面而t良好之、電鑛性能、對水之溶解度、容易獲得性 中之_r :上述式(1)所示之二羧酸(鹽)較佳為,式(1) 、、η、2n-係具有直鏈構造之伸烷基。 併用ίί(ΐ)所不之二緩酸(鹽)並不限定於使用—種,亦可 1幵用兩種以上。 可述式(:)所示之二羧酸(鹽)之具體例,較佳者例如 ^工-乙、乙二酸鈉、乙二酸鉀、乙二酸銨、丙二 丁一於酉夂鈉、丙二酸鉀、丙二酸銨、丁二酸、丁二酸鈉、 - ^卸、丁二酸錢、戊二酸、戊二酸鉀、戊二酸納、戊 —0夂麵、p —缺 ^ 酸、庚二酸二酸鈉、己二酸鉀、己二酸銨、庚二 、’庚一酸鉀、庚二酸銨、辛二酸、辛二酸鈉、 97105852 200848552 辛一 g义鉀辛一酸銨、壬二酸、壬二酸鈉、壬二酸鉀、壬 二酸銨、癸二酸、癸二酸納、癸二酸卸、癸二酸銨、&quot; 基乙一甲酉文κ甲基乙二甲酸鈉、1·曱基乙二甲酸鉀、^ 曱基乙二甲酸銨 ' “甲基_1,3_丙二甲酸、1_曱基],3_丙二 曱酸鈉、1·曱基-u_丙二甲酸鉀、卜甲基],3_丙二甲酽 錢、1小二甲基十3_丙二甲酸、u二甲基彳弘丙二甲‘ 鈉U —甲基-1,3-丙二甲酸鉀、二甲基丙二 酸銨、2-甲基],3,二曱酸、2-曱基-1,3_丙二曱酸鈉、2_ 曱基-1,3-丙二甲酸鉀或2_曱基“,^丙二曱酸銨等。 遠等之中,就良好之電鑛性能、對水溶解之容易性、益 鉛焊錫球之優異之焊錫接合強度、容易獲得性、低成本 觀”沾而&amp;,特佳為:乙二酸鈉、乙二酸鉀、乙二酸銨、丙 二酸鈉、丙二酸鉀、丙二酸銨、丁二酸鈉、丁二酸鉀、丁 -酸銨、戊二酸納、戊二酸鉀、戊二酸銨、己二酸納、己 二酸鉀、己二酸銨等。 對,發明之電解鍍金液中上述式⑴所示之二竣酸 之含1並無特別限定,相對於電解鍍金液整體,較佳 g/L〜500 g/L ’更佳為10 g/L〜3〇〇 g/L,特佳為5〇机〜 g/L。再者’當使用兩種以上之上述式⑴所示之 酸(鹽)時,上述數値表示彼等之合計含量4含量過 則存在以下情H法獲得無錯料球之❹之焊錫 強度,或由於形成導電鹽成分 口 率下咚S古而-入狀悲而使金之析出效 革下降。另-方面,若含量過多,則存在以 式⑴所示之二鑛鹽)難以溶解於水,並且,由於並無ί 97105852 200848552 使本發明之上述效果進一步增加,故而不經濟。 上述關於「式(1)所示之二羧酸(鹽)」之記載,規定了「 (1)所不之二羧酸(鹽)」在本發明之電解鍍金液中之存在形 態,但調製本發明之電解鍍金液時,使用上述「式(1)所^ 之二缓酸(鹽)」作為溶解原料亦較佳。 Μ 本發明之電解鍍金液除含有上述式⑴所示之二鲮酸 =外,還含有上述式(2)所示之二羧酸(鹽)作為必需成分二 藉由併用構造不同之兩種二羧酸(鹽),即使於使用無鉛焊 錫球之^況,鎳膜上之鍍金膜亦可獲得優異之焊錫接合強 上述式(2)所示之二羧酸(鹽)中,又3與χ4相互之間可相 同亦可不同,表示Η、Na、K或NH4。Η、Na、K或Nh4 I以與上述氰化金鹽或「式(1)所示之二羧酸(鹽)」等進行 陽離子交換後之狀態存在於電解鍍金液中。 上述式(2)所示之二羧酸(鹽)並不限定於使用一種,[In the formula (2), X3 and χ4 may be the same or different from each other, and represent η, Na, Κ or NHU; Υ represents a hydrogen atom, an alkyl group or a hydroxyalkyl group. The electrolytic gold plating solution of the present invention must contain a gold cyanide salt. The gold cyanide salt is used as a gold source for the electrolytic gold plating solution of the present invention. Here, the terms "cyanide gold" - "cyanide gold salt" and "tetracyano acid salt" have the same meaning. The gold cyanide salt is not limited to one type, and two or more types may be used in combination. As the bismuth cyanide gold salt, a gold cyanide metal or a gold ammonium cyanide is preferred. In addition, as the valence (oxidation number) of the gold of the cyanide gold salt, either one of the valence or the valence can be used, and from the viewpoint of the precipitation efficiency of gold, it is preferably one valence. That is, a gold cyanide salt is preferred. 97105852 8 200848552 Specific examples of the gold cyanide salt include cyanide cyanide, cyanide gold removal, cyanide gold, cyanide gold, atmospheric gold, and ammonium chloride. Among them, from the viewpoints of electroplating performance, cost, and ease of selection such as the precipitation efficiency of gold, it is preferable that the cyanide chlorinated sodium, the condensed argon hydride or the argon ammonium arsenic Particularly preferred is potassium cyanide. The content of the electrolytic gold plating in the electrolytic gold plating of the present invention is particularly limited, and the optimum content of the following flash electrolytic electrolytic gold plating and thick electrolytic gold plating is not the same, but generally, regardless of which one, relative to the electrolytic gold plating liquid As a whole, the metal gold is 0.05 g/L to 50 g/L, preferably 〇"g/L~%-, and particularly preferably 〇5 g/L to 20 g/L. If the content of the metal gold in the electrolytic gold plating solution is too small, it may be difficult to realize the golden gold ore, and it may be difficult to use it as a flash electrolytic gold plating solution. On the other hand, in the case where the amount of metal gold in the electrolytic forging gold liquid is too large, there is no particular problem as the performance of the electrolytic gold plating solution. However, metal gold is a very expensive metal, and may be contained in the electrolyte. It is not economical to save it in the state. The above description of the gold cyanide salt stipulates that the gold cyanide salt is present in the electrolysis gold liquid of the present invention, and the electrolytic gold plating liquid of the present invention uses the above-mentioned cyanide gold salt as a dissolved raw material. Preferably. In the electrolytic gold plating solution of the present invention, it is necessary to contain the above-mentioned two-line acid salt represented by the above formula (1) (hereinafter, 'sometimes "two (four) or two _ = di-decanoic acid (salt)"), and the above formula (7) The two shown _ (salt). The special two functions as at least a conductive salt in the electrolytic gold liquid. If both the dicarboxylic acid (salt) and the dicarboxylic acid (4) represented by the formula (2) are used in the case of using a solder-free solder ball, a gold-plated crucible having excellent solder bonding strength of 97105852 9 200848552 can be obtained. Strength improvement. The gold film on the nickel film achieves excellent soldering and is connected to the stretching group of the above formula (1), that is, it can be used as a slow acid (salt) m-indicating that it can have a side chain, and X1 and 〃, straight The chain structure may also be an alkyl group of a side chain structure. K or νη4Γη, ν mesh may be the same or different from each other 'representing H, Na, or the formula (2) * or Cong 4 may be present with the above-mentioned cyanide gold salt or the following in electrolytic plating, m) The number of cation exchanges, etc., Zhuo 31!) 7 ^ diterpenic acid (salt) in the 'n table * 0 or more of the number of defects, preferably 〇 ~ 8 workers < 曰 ..., the nature The number, the number of the natural numbers in the second circle is particularly good, and the range of 0 to 6 is that the natural number 4 η in the range of water is too large to be obtained. 'The degree of solution is not sufficient to form a specific concentration, or it is difficult to be equal, and it is good, such as electric ore performance, solubility in water, and easy availability. _r: Dicarboxylic acid (salt) represented by the above formula (1) Preferably, the formula (1), η, 2n- has an alkylene group having a linear structure. The use of ίί (ΐ) is not limited to the use of the type of salt, but also can be used in two or more. Specific examples of the dicarboxylic acid (salt) represented by the formula (:), preferably, for example, s-ethyl, sodium oxalate, potassium oxalate, ammonium oxalate, and propylene dibutide Sodium, potassium malonate, ammonium malonate, succinic acid, sodium succinate, - ^ unloading, succinic acid, glutaric acid, potassium glutarate, sodium glutarate, pentyl pentoxide p — deficiency acid, sodium pimelate diphosphate, potassium adipate, ammonium adipate, heptane, potassium heptanoate, ammonium pimelate, suberic acid, sodium dioctate, 97105852 200848552 G-sodium octanoic acid ammonium, sebacic acid, sodium sebacate, potassium sebacate, ammonium sebacate, sebacic acid, sodium sebacate, azelaic acid, ammonium sebacate, &quot;酉 酉 κ κ 甲基 甲基 甲基 、 、 、 κ κ 1 1 “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ “ 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基 甲基Sodium, 1·decyl-u-malonate, potassium methyl, 3_propyl dimethyl hydrazine, 1 small dimethyl decyl 3-propane dicarboxylic acid, u dimethyl hydrazine -methyl-1,3-propanedicarboxylate, ammonium dimethylmalonate, 2-methyl],3,didecanoic acid, 2-mercapto-1,3-propane Sodium, potassium 2_ Yue-1,3-dimethyl propyl group or 2_ Yue, "^ Yue and ammonium malonate. In the far-end, good soldering performance, ease of water dissolution, excellent solder joint strength, easy accessibility, and low cost of lead-free solder balls. Sodium, potassium oxalate, ammonium oxalate, sodium malonate, potassium malonate, ammonium malonate, sodium succinate, potassium succinate, ammonium butyrate, sodium glutarate, glutaric acid Potassium, ammonium glutarate, sodium adipate, potassium adipate, ammonium adipate, etc. The content of the dicarboxylic acid represented by the above formula (1) in the electrolytic gold plating solution of the invention is not particularly limited, and The overall thickness of the electrolytic gold plating solution is preferably g/L to 500 g/L 'more preferably 10 g/L to 3 〇〇g/L, and particularly preferably 5 〇 machine to g/L. Further, when using two or more types In the case of the acid (salt) represented by the above formula (1), the above number indicates that the total content of the content of 4 is excessive, and there is a solder strength of the following method in which the error-free ball is obtained, or a channel ratio of the conductive salt is formed. The lower 咚S is ancient and the sorrow is sorrowful, and the precipitation of gold is reduced. On the other hand, if the content is too much, there is a di-mineral salt represented by the formula (1) which is difficult to dissolve in water, and Since the above-described effects of the present invention are further increased by the absence of ί 97105852 200848552, it is uneconomical. The above description of the "dicarboxylic acid (salt) represented by the formula (1)" stipulates that "(1) is not a dicarboxylic acid. The acid (salt) is present in the electrolytic gold plating solution of the present invention. However, in the preparation of the electrolytic gold plating solution of the present invention, it is preferred to use the above-mentioned "di-acid (salt) of the formula (1) as a solvent for dissolving. .电解 The electrolytic gold plating solution of the present invention contains, in addition to the dicarboxylic acid represented by the above formula (1), a dicarboxylic acid (salt) represented by the above formula (2) as an essential component, and two different structures are used in combination. The carboxylic acid (salt), even in the case of using lead-free solder balls, the gold-plated film on the nickel film can obtain excellent solder joint strength in the dicarboxylic acid (salt) represented by the above formula (2), and 3 and χ4 They may be the same or different from each other and represent Η, Na, K or NH4. The ruthenium, Na, K or Nh4 I is present in the electrolytic gold plating solution in a state of being subjected to cation exchange with the above-mentioned gold cyanide salt or "dicarboxylic acid (salt) represented by the formula (1)". The dicarboxylic acid (salt) represented by the above formula (2) is not limited to the use of one type.

併用兩種以上。 上述式(2)中,Y表示氫原子、院基或經基烧基,就良好 之電鍍性能、對水溶解之容易性、無鉛焊錫球之優異之焊 錫接合強度、容易獲得性、低成本等觀點而言,佳 原子、碳數為卜5個之烧基或碳數為卜5個之經^ 基,特佳為氫原子、碳數為丨〜3個之烷基或碳數為丨〜3 個之羥基烷基。具體而言,γ特佳為氫原子、甲基、乙基、 丙基羥基甲基、2-羥基乙基、3-羥基丙基等。另外,上 述式(2)所示之二羧酸(鹽)較佳為亞胺基二羧酸衍生物、或 97105852 12 200848552 其鹽。 作為上述式(2)所示之二羧酸(鹽)之具體例,就良好之電 鍍性能、對水溶解之容易性、無鉛焊錫球之優異之焊錫接 合強度、容易獲得性、低成本等觀點而言,較佳者例如可 舉出·亞胺基一^乙酸、亞胺基二乙酸二納、亞胺基二乙酸 • ^一卸、亞胺基二乙酸二錢、曱基亞胺基二乙酸、甲基亞胺 基^一乙酸—納、曱基亞胺基^一乙酸二、曱基亞胺基二乙 酸二銨、乙基亞胺基二乙酸、乙基亞胺基二乙酸二鈉、乙 基亞胺基^一乙酸·一斜、乙基亞胺基二乙酸二錢、丙基亞胺 基—乙酸、丙基亞胺基^一乙酸^一納、丙基亞胺基二乙酸二 鉀、丙基亞胺基二乙酸二銨、丁基亞胺基二乙酸、丁基亞 胺基二乙酸二鈉、丁基亞胺基二乙酸二鉀、丁基亞胺基二 乙酸二銨、戊基亞胺基二乙酸、戊基亞胺基二乙酸二鈉、 戊基亞胺基二乙酸二鉀、戊基亞胺基二乙酸二銨、羥基甲 基亞胺基二乙酸、羥基曱基亞胺基二乙酸二鈉、羥基甲基 ( 亞胺基二乙酸二鉀、羥基曱基亞胺基二乙酸二銨、羥基乙 基亞胺基二乙酸、羥基乙基亞胺基二乙酸二鈉、羥基乙基 亞胺基二乙酸二鉀、羥基乙基亞胺基二乙酸二銨、羥基丙 基亞胺基二乙酸、羥基丙基亞胺基二乙酸二鈉、羥基丙基 . 亞胺基二乙酸二鉀、羥基丙基亞胺基二乙酸二銨、羥基丁 基亞胺基二乙酸、羥基丁基亞胺基二乙酸二鈉、羥基丁基 亞胺基二乙酸二鉀、羥基丁基亞胺基二乙酸二銨、羥基戊 基亞胺基二乙酸、羥基戊基亞胺基二乙酸二鈉、羥基戊基 亞胺基二乙酸二鉀、羥基戊基亞胺基二乙酸二銨等。 97105852 13 200848552 對本發明之電解鍍金液中上述式(2)所示之二羧酸(鹽) 之合里並無特別限定,相對於電解鍍金液整體,上述式(幻 斤示之一羧酸(鹽)較佳為0·1 g/L〜200 g/L,更佳為〇·5 g/L 〇 g/L、’特佳為1 g/L〜50 g/L。再者,當使用兩種以 土之上述式(2)所示之二羧酸(鹽)時,上述數値表示彼等之 δ什g 1。若電解鑛金液中之含量過少,則存在以下情 況·無法獲得無鉛焊錫球之優異之焊錫接合強度,或由於 y成‘電鹽成分不足之狀態而使金之析出效率下降。另一 方面,若含量過多,則存在由於無法使本發明之效果進一 步增加而為不經濟之情況。 上述關於「式(2)所示之二羧酸(鹽)」之記載規定了「式 所示之二羧酸(鹽)」在本發明之電解鍍金液中的存在形 恶,但調製本發明之電解鍍金液時,使用上述「式所示 之二叛酸(鹽)」作為溶解原料亦較佳。 對上述式(1)所示之二羧酸(鹽)與上述式(2)所示之二羧 酸(鹽)在本發明之電㈣金液中的含有比並無特別限定, 就無錯焊錫球之優異之焊錫接合強度的觀點而言,較佳 為,上述式(1)所示之二羧酸(鹽)之含量為上述式所示之 二幾酸(鹽)之含量的質量倍,更佳為15〜5〇質 倍’特佳為2〜20質量倍。 、 本發明之電解鍍金液之特徵在於:電解鍍金液中同時含 ^上述式(1)所示之二叛酸(鹽)、以及上述式⑺所示之二緩 酉夂(鹽)。藉此,即使於使用無料錫球之情況,亦可於特 別是錄膜上,獲得具有優異之焊錫接合強度之鍍金膜。、進 97105852 200848552 而,於上述各含量及/或含量比下該效果較為顯著。 本發明之電解鍍金液中,除上述必需成分以外,亦可視 需要適當含有下述各劑而使用:用以將電鍍液之pH保持 為固定值之緩衝劑、用以調整鍍金膜之金結晶徑之結晶調 正背]用以充分除去鍍金膜之針孔或使電鑛液充分消泡之 界面活性劑、用以使鍍金膜平滑之亮光劑等。 、作為本發明之電解鍍金液中視需要所含有之緩衝劑,若 為眾所周知之緩衝劑則無特別限定,可舉出:硼酸、磷酸 等無機酸,·檸檬酸、酒石酸、蘋果酸等羥基羧酸等。該等 可使用一種或混合使用兩種以上。另外,亦可使用該等之 —對本發明之電解鍍金液中之緩衝劑之含量並無特別限 定,通常為1 g/L〜500 g/L,較佳為1〇g/L〜1〇〇g/L。若 電鑛液中之緩衝劑之含量過少,則存在難以發揮緩衝效果 另:方面,若含量過多,則存在由於緩衝效果並 不δ上升而導致不經濟之情況。 =為結晶調整劑,若為眾所周知之結晶調整劑則無特別 限疋’可舉出:m錄n、碲等金屬之趟; 或含有該等金屬之化合物等。該等可使 ^ 兩種以上。 4了使用-種或混合使用 對本發明之電解鍍金液中之結晶調_之含 無特別限定’通常為lppm〜5Gppm,較佳為2啊〜)2〇 PPm。若電鍍液中之結晶調整劑 發揮結晶調整效果之情況,二:二含:在難以 右3里過多,則存 97105852 200848552 在由於結晶調整效果並不會上升而導致不經濟之情況。 作為界面活性劑,若為眾所周知之界面活性劑則無特別 限定’可使用··非離子系界面活性劑、陰離子系界面活性 劑、兩性界面活性劑或陽離子系界面活性劑。該等可使用 一種或混合使用兩種以上。 作為非離子系界面活性劑,可舉出··壬基紛聚炫氧基化 物、萘紛聚炫氧基化物、1 丁基|萘紛聚烧氧基化 物、苯乙烯化苯酚聚烷氧基化物等醚型非離子系界面活性 劑,辛基胺聚烧氧基化物、己块基胺聚烧氧基化物、亞油 基胺聚烷氧基化物等胺型非離子系界面活性劑等。 作為陰離子系界面活性劑,可舉出··十二烧基硫酸納等 ㈣硫酸鹽;聚氧乙硫酸納等聚氧乙烯朗硫酸 鹽,聚氧乙烯烷基苯醚硫酸鹽;烷基苯磺酸鹽等。 作為兩性界面活性劑,可舉出·· 1十一烷基_丨_鲮基甲基 •1-羥基乙基咪唑鑌甜菜鹼、Ν_十八烷基氺,义二甲基_二 羧基甲基甜菜鹼、十二烷基二甲基氧化胺等。 作為陽離子界面活性劑,可舉出:十二烷基三甲基銨 ^十一燒基一甲基録甜菜驗、十二烧基σ比咬鑌鹽、油基 咪唑鏘鹽或十八烷胺乙酸酯等。 該等可使用一種或混合使用兩種以上,較佳為非離子系 界面活性劑或兩性界面活性劑。 本發明之電解鑛金液中界面活性劑之含量較佳為〇 〇 1 g/L〜20 g/L,只要發揮出所需之性能即可,並不特別限 含量。 97105852 16 200848552 作為免光劑’若為幕所周知之亮光劑則無特別限定,可 舉出具有吡啶骨架之胺化合物等。該等可使用一種或混合 使用兩種以上。 作為具有吡啶骨架之胺化合物,可舉出2_胺基吡啶、3· • 胺基吡啶、4-胺基吡啶等。 • 本發明之電解鍍金液中亮光劑之含量較佳為0·01 g/L〜 20 g/L ’只要發揮出所需之性能即可,並不特別限定含量。 f 使用本發明之電解鍍金液進行電解鍍金時,較佳為預先 形成2鎳膜,作為底層電鍍處理。對此時之鍍鎳液並無特 別限疋,較佳為常用之瓦特浴、胺基磺酸浴、溴化鎳浴等。 另外,所使用之鍍鎳液中,可視需要含有抗凹劑、一次亮 光劑或二次亮光劑。鍍鎳浴之使用方法並無特別限定,可 根據#規方法而加以使用。另外,對鍍鎳膜之膜厚亦無特 別限疋,較佳為〇·5 # m〜2〇 # m,特佳為工#爪〜“ m ° [、上述本發明之電解鍍金液之電鍍條件並無特別限定,作 為溫度條件,較佳為20°C〜80°C,特佳為25°C〜60°C。 另外,電鍍液之pH較佳為pH2〇〜pH9〇,特佳為pH3〇 〜pH8·0。另外,陰極電流密度較佳為0.1 A/dm2〜1〇 A/dm ’ 特佳為 〇 3 A/dm2 〜5 A/dm2。 本發明之電解鍍金液可較好地用作為以使鍍金膜與底 層金屬良好密著為目的而進行之閃熔電解鍍金(亦稱為 「薄層鍍金」、「金衝擊鍍(Gold Strike Plating)」)之電解鍍 金液(以下,有時簡稱為「閃熔電解鍍金液」)。另外,亦 97105852 17 200848552 可較好地用作於該閃料解鍍金膜上進—步實施厚層電 解鍍金處ί里,直至達到所需之金膜厚度為止的電解鑛金液 (以下’有時簡記為「厚層電解鍍金液」)。進而,亦可較 好地用作並不實施閃熔電解鍍金而直接於底層金屬上進 行厚層電解鍵金處理之電解鑛金液。 • 於使用本發明之電解鍍金液進行電解鍍金時,無論係用 作閃熔電解鍍金液或用作厚層電解鍍金液,無鉛焊錫球之 (知^連接強度白良好,就進一步提升無錯焊錫球連接強度 之觀點而言,較佳為該兩者皆使用本發明之電解鍍金液。 於將本發明之電解鍍金液用於閃熔電解鍍金(薄層鍍 金、金衝擊鍍)之情況,金膜之厚度並無特別限定,較佳 為0.001 //m〜(U &quot;m,特佳為〇 01以茁〜〇 〇5 #m。另 外,於其上進一步實施厚層電解鍍金處理直至達到所需之 金膜厚度為止之情況,或者於底層金屬上直接進行厚層電 解鍍金處理之情況的金膜之膜厚並無特別限定,較佳為 [〇·01 # m〜20 // m,特佳為 0.05 // m〜5 // m。 實施例 以下’舉出實施例及比較例來更具體地說明本發明,但 只要不超出其主旨,則本發明並不限定於該等實施例。另 外,至於電解電鍍液之組成中之濃度之數値,於其成分中 含有結晶水之情況,係根據不包括結晶水之質量所求得之 濃度之數値。 另外’以下,對在實施閃熔電解鍍金處理後,於其上進 一步實施厚層電解鍍金處理直至達到所需之金膜厚度 97105852 18 200848552 時,「閃熔電解鍍金液」與「厚層電解鍍金液」之任一者 皆使用本發明之電解鍍金液之實施例丨〜3及實施例6〜 8僅閃私電解鏟金液」使用本發明之電解鍍金液之實 施例4、僅「厚層電解鍍金液」使用本發明之電解鍍金液 之貫施例5加以說明。即使僅其中一者使用本發明之電解 • 鍍金液,亦可充分發揮本發明之效果。 [實施例1] ( 於焊錫接合強度之評價中,使用圖1所示之焊錫球測試 基板。該焊錫球測試基板中,光阻厚度為2〇 # m,銅材 厚度為12 /zm,基板尺寸為lmm(厚度)x4〇mmx4()mm。 對於该焊錫球測試基板,使用pAC2〇〇 (村田(MURATA) 股份有限公司製造商品名),於5(rc進行10分鐘脫脂處 理其後進行水洗。接著,使用MEOX(村田股份有限公 司製造商品名),於3(TC進行i分鐘蝕刻處理,其後進行 水洗。然後使用10容量%之稀硫酸,於25π進行丨分鐘 C,,酸洗,其後進行水洗。 接著,使用以如下濃度建浴之胺基磺酸鎳電鍍液,即, 月女基%酸鎳電鍍液SNConc(村田股份有限公司製造商品 名)為500 mL/L、市售之氣化鎳為1〇 g/L、市售之硼酸為 • 3〇 g/L抗凹知彳# 82(?壬原優萊特(Ebara_Udylite)股份有限 公司製造商品名)為2 mL/L,且設定陰極電流密度為2 W:於5(TC進行12分鐘鍍鎳處理,形成”㈤之鎳 膜,其後進行水洗。接著使帛1〇容量%之稀硫酸,於乃 °C進行1分鐘酸洗,其後進行水洗。 97105852 19 200848552 將1L·之下述組成之閃熔電解鍍金液裝入至燒杯中,於 其中设定陰極電流密度為2 A/dm2,於25°C進行30秒閃 熔電解鍍金處理,其後進行水洗。 [實施例1之閃熔電解鍍金液之組成] 氰化亞金鉀 丙二酸納 亞胺基二乙酸 檸檬酸卸 pH 為 6.0 1 g/L(以金屬金計)Use two or more. In the above formula (2), Y represents a hydrogen atom, a hospital base or a base group, and has excellent plating performance, ease of dissolution in water, excellent solder joint strength of lead-free solder balls, easy availability, low cost, and the like. In view of the above, a good atom, a carbon number of five, or a carbon number of five, is particularly preferably a hydrogen atom, an alkyl group having a carbon number of 丨~3 or a carbon number of 丨~ 3 hydroxyalkyl groups. Specifically, γ is particularly preferably a hydrogen atom, a methyl group, an ethyl group, a propylhydroxymethyl group, a 2-hydroxyethyl group, a 3-hydroxypropyl group or the like. Further, the dicarboxylic acid (salt) represented by the above formula (2) is preferably an imidodicarboxylic acid derivative or a salt thereof of 97105852 12 200848552. Specific examples of the dicarboxylic acid (salt) represented by the above formula (2) are excellent in plating performance, ease of dissolution in water, excellent solder joint strength in lead-free solder balls, availability, and low cost. Preferably, for example, an imido-acetic acid, an imidodiacetic acid di-nano, an imidodiacetic acid, a unloading, an imidodiacetic acid, a mercaptoimine group Acetic acid, methylimido-monoacetic acid-nano, decyl imido-monoacetic acid diammonium, mercaptoimido diacetic acid diammonium, ethylimidodiacetic acid, ethyl iminodiacetic acid disodium Ethylimido-acetic acid·monoclinic, ethyliminodiacetic acid diacetate, propylimino-acetic acid, propylimido-monoacetic acid, monopropanyl, propyliminodiacetic acid Dipotassium, propyliminodiacetic acid diammonium, butyliminodiacetic acid, disodium butylimidodiacetic acid, dipotassium butylimidodiacetic acid, diammonium butylenimine diacetate , amyl iminodiacetic acid, disodium pentylimidodiacetic acid, dipotassium pentyliminodiacetic acid, diammonium pentylimidate diacetate, hydroxyl group Iminodiacetic acid, disodium hydroxymercaptodiacetate, hydroxymethyl (dipotassium iminodiacetic acid, diammonium hydroxymercaptodiamine diacetate, hydroxyethyliminodiacetic acid, hydroxyl Disodium ethylimidodiacetic acid, dipotassium hydroxyethyliminodiacetic acid, diammonium hydroxyethyliminodiacetic acid, hydroxypropyliminodiacetic acid, hydroxypropyliminodiacetic acid Sodium, hydroxypropyl. Iminodiacetic diacetate, hydroxypropyliminodiacetic acid diammonium, hydroxybutylimidodiacetic acid, hydroxybutylimidodiacetic acid disodium, hydroxybutylimine Dipotassium diacetate, diammonium hydroxybutylimidodiacetic acid, hydroxypentyliminodiacetic acid, disodium hydroxypentylimidate diacetate, dipotassium hydroxypentylimidate diacetate, hydroxypenta In the electrolytic gold plating solution of the present invention, the dicarboxylic acid (salt) represented by the above formula (2) is not particularly limited, and the above is the same as the entire electrolytic gold plating solution. The formula (maximum carboxylic acid (salt) is preferably from 0. 1 g/L to 200 g/L, more preferably · 5 g / L 〇 g / L, 'excellently 1 g / L ~ 50 g / L. In addition, when using two kinds of dicarboxylic acid (salt) shown by the above formula (2), The above number indicates the δg g 1 of the same. If the content in the electrolytic gold liquid is too small, the following conditions may occur: the excellent solder joint strength of the lead-free solder ball cannot be obtained, or the state of y into the 'electric salt component is insufficient. On the other hand, if the content is too large, it may be uneconomical because the effect of the present invention cannot be further increased. The above-mentioned "dicarboxylic acid (salt) represented by the formula (2)" The description stipulates that the dicarboxylic acid (salt represented by the formula) is present in the electrolytic gold plating solution of the present invention, but when the electrolytic gold plating solution of the present invention is prepared, the above-mentioned two types of tickic acid represented by the formula are used. (Salt) is also preferred as a raw material for dissolution. The content ratio of the dicarboxylic acid (salt) represented by the above formula (1) to the dicarboxylic acid (salt) represented by the above formula (2) in the electric (iv) gold liquid of the present invention is not particularly limited, and it is not wrong. It is preferable that the content of the dicarboxylic acid (salt) represented by the above formula (1) is the mass of the content of the diacid (salt) represented by the above formula from the viewpoint of the excellent solder joint strength of the solder ball. More preferably, it is 15 to 5 〇 quality times 'te good for 2 to 20 times the mass. The electrolytic gold plating solution of the present invention is characterized in that the electrolytic gold plating solution contains both the second tickic acid (salt) represented by the above formula (1) and the second retarded salt (salt) represented by the above formula (7). Thereby, even in the case of using a solderless ball, a gold plating film having excellent solder joint strength can be obtained particularly on a recording film. Into 97105852 200848552, the effect is more significant at each of the above contents and/or content ratios. In the electrolytic gold plating solution of the present invention, in addition to the above-mentioned essential components, the following agents may be appropriately used as needed: a buffer for maintaining the pH of the plating solution at a fixed value, and a gold crystal diameter for adjusting the gold plating film. The crystal modulating back is a surfactant for sufficiently removing the pinhole of the gold plating film or sufficiently defoaming the electroplating liquid, a brightening agent for smoothing the gold plating film, and the like. The buffering agent to be contained in the electrolytic gold plating solution of the present invention is not particularly limited as long as it is a well-known buffering agent, and examples thereof include inorganic acids such as boric acid and phosphoric acid, and hydroxycarboxylic acids such as citric acid, tartaric acid, and malic acid. Wait. These may be used alone or in combination of two or more. Further, the content of the buffering agent in the electrolytic gold plating solution of the present invention is not particularly limited, and is usually 1 g/L to 500 g/L, preferably 1 〇g/L to 1 〇〇. g/L. If the content of the buffer in the electro-mineral liquid is too small, it is difficult to exert a buffering effect. On the other hand, if the content is too large, there is a case where the buffering effect does not increase due to the increase in the damping effect. = is a crystal modulating agent, and is not particularly limited as long as it is a well-known crystal modifier. Examples thereof include a metal such as n or a metal such as ruthenium; or a compound containing the metal. These can be ^ two or more. 4. Use-type or mixed use The content of the crystal modulo in the electrolytic gold plating solution of the present invention is not particularly limited, and is usually 1 ppm to 5 Gppm, preferably 2 Å to 2 Å PPm. If the crystallizing agent in the plating solution exerts the effect of crystallization adjustment, the second: two inclusions: if it is difficult to be too much in the right 3, then 97105852 200848552 is uneconomical due to the fact that the crystallization adjustment effect does not rise. The surfactant is not particularly limited as long as it is a well-known surfactant. A nonionic surfactant, an anionic surfactant, an amphoteric surfactant or a cationic surfactant can be used. These may be used alone or in combination of two or more. Examples of the nonionic surfactant include a thiol condensate, a naphthalene polyoxylate, a butyl phthalene polysiloxane, and a styrenated phenol polyalkoxy group. An ether type nonionic surfactant such as an amide group, an amine type non-ionic surfactant such as an octylamine polysiloxane, an hexamethylene amine polysiloxane, or a linoleylamine polyalkoxylate. Examples of the anionic surfactant include (IV) sulfates such as sodium dodecyl sulfate; polyoxyethylene sulphates such as polyoxyethylene sulphate; polyoxyethylene alkyl phenyl ether sulfate; and alkyl benzene sulfonate. Acid salt, etc. Examples of the amphoteric surfactant include 1-undecyl-indole-methylmethyl-1-hydroxyethylimidazolium betaine, hydrazine-octadecylphosphonium, and dimethylidene-dicarboxyl Betaine, dodecyldimethylamine oxide, and the like. As the cationic surfactant, there may be mentioned lauryl trimethylammonium eleven alkyl monomethyl beet test, twelve alkyl σ ratio biting salt, oleyl imidazolium salt or octadecylamine. Acetate and the like. These may be used alone or in combination of two or more, preferably a nonionic surfactant or an amphoteric surfactant. The content of the surfactant in the electrolytic gold liquid of the present invention is preferably 〇 〇 1 g / L 〜 20 g / L, as long as the desired performance is exerted, and is not particularly limited. 97105852 16 200848552 The light-reducing agent is not particularly limited as long as it is a brightening agent known in the art, and an amine compound having a pyridine skeleton or the like can be given. These may be used alone or in combination of two or more. Examples of the amine compound having a pyridine skeleton include 2-aminopyridine, tris-aminopyridine, and 4-aminopyridine. The content of the brightener in the electrolytic gold plating solution of the present invention is preferably from 0. 01 g/L to 20 g/L. The content is not particularly limited as long as the desired performance is exhibited. f When electrolytic gold plating is performed using the electrolytic gold plating solution of the present invention, it is preferred to form 2 nickel films in advance as the underlayer plating treatment. The nickel plating solution at this time is not particularly limited, and is preferably a commonly used Watt bath, an amine sulfonic acid bath, a nickel bromide bath, or the like. Further, the nickel plating liquid to be used may optionally contain an anti-cavity agent, a primary brightener or a secondary brightener. The method of using the nickel plating bath is not particularly limited and can be used according to the # gauge method. In addition, there is no particular limitation on the film thickness of the nickel-plated film, and it is preferably 〇·5 #m~2〇# m, especially good for the work #爪~“m ° [, the plating of the electrolytic gold plating solution of the present invention described above The conditions are not particularly limited, and the temperature is preferably from 20 ° C to 80 ° C, particularly preferably from 25 ° C to 60 ° C. Further, the pH of the plating solution is preferably from pH 2 pH to pH 9 〇, particularly preferably Further, the cathode current density is preferably 0.1 A/dm 2 to 1 〇A/dm ', particularly preferably 〇3 A/dm 2 〜5 A/dm 2 . The electrolytic gold plating solution of the present invention can be preferably used. Electrolytic gold plating solution for flash-melting electrolytic gold plating (also referred to as "thin-plating gold plating" or "Gold Strike Plating") for the purpose of making the gold-plated film and the underlying metal adhere well (hereinafter, This is simply referred to as "flash-melting electrolytic gold plating solution"). In addition, 97105852 17 200848552 can be preferably used as an electrolytic gold liquid until the desired gold film thickness is advanced on the flash gold plating film (the following 'has The time is simply referred to as "thick layer electrolytic gold plating solution"). Further, it can be preferably used as an electrolytic gold liquid which is subjected to thick electrolytic bond gold treatment directly on the underlying metal without performing flash electrolytic gold plating. • When performing electrolytic gold plating using the electrolytic gold plating solution of the present invention, whether it is used as a flash electrolytic electrolytic gold plating liquid or as a thick layer electrolytic gold plating liquid, a lead-free solder ball (it is known that the joint strength is good white, and the error-free solder is further improved) From the viewpoint of ball joint strength, it is preferred that both of them use the electrolytic gold plating solution of the present invention. In the case where the electrolytic gold plating solution of the present invention is used for flash electrolytic electrolytic gold plating (thin layer gold plating, gold impact plating), gold The thickness of the film is not particularly limited, but is preferably 0.001 //m~(U &quot;m, particularly preferably 〇01茁茁5〇〇5#m. Further, a thick layer electrolytic gold plating treatment is further performed thereon until reaching The film thickness of the gold film required for the thickness of the gold film required or the thick layer electrolytic gold plating treatment directly on the underlying metal is not particularly limited, and is preferably [〇·01 #m~20 // m, The present invention is more preferably 0.05 // m to 5 // m. EXAMPLES Hereinafter, the present invention will be more specifically described by way of examples and comparative examples, but the present invention is not limited to the examples as long as the gist of the invention is not exceeded. In addition, as for the composition of the electrolytic plating solution The number of concentrations is 结晶, in the case where the component contains crystal water, the number is determined based on the mass which does not include the mass of the crystal water. In addition, the following is performed on the flash-melting electrolytic gold plating treatment. Further performing the thick-layer electrolytic gold plating treatment until the desired gold film thickness of 97105852 18 200848552 is reached, and any of the "flash-melting electrolytic gold plating liquid" and the "thick-layer electrolytic gold plating liquid" use the electrolytic gold plating liquid of the present invention.丨~3 and Examples 6 to 8 are only the singapore electroless gold liquid. The fourth embodiment of the electrolytic gold plating solution of the present invention, and only the "thick-layer electrolytic gold plating liquid" are used in the fifth embodiment of the electrolytic gold plating solution of the present invention. Note that even if only one of the electroless gold plating liquids of the present invention is used, the effects of the present invention can be sufficiently exerted. [Example 1] (In the evaluation of the solder joint strength, the solder ball test substrate shown in Fig. 1 was used. In the solder ball test substrate, the photoresist has a thickness of 2 〇 # m, the thickness of the copper material is 12 /zm, and the substrate size is 1 mm (thickness) x 4 〇 mm x 4 () mm. For the solder ball test substrate, pAC2 〇〇 ( Murata (MU RATA) Co., Ltd., manufactured by Nippon Co., Ltd., was subjected to degreasing treatment for 5 minutes at rc, and then washed with water. Then, MEOX (manufactured by Murata Co., Ltd.) was used, and 3 (TC was subjected to i minute etching treatment, followed by Water washing is carried out, and then 10% by volume of dilute sulfuric acid is used, and 25 minutes is carried out at 25 π, pickling, followed by washing with water. Next, using a nickel sulfonic acid electroplating solution which is bathed at the following concentration, that is, The % acid nickel plating solution SNConc (manufactured by Murata Co., Ltd.) is 500 mL/L, the commercially available vaporized nickel is 1 〇g/L, and the commercially available boric acid is • 3〇g/L anti-concave 彳# 82 (named by Ebara_Udylite Co., Ltd.) is 2 mL/L, and the cathode current density is set to 2 W: at 5 (TC is nickel-plated for 12 minutes to form a nickel film of (5), It is then washed with water. Next, dilute sulfuric acid of 帛1〇% by volume was acid-washed at °C for 1 minute, and then washed with water. 97105852 19 200848552 A flash fusion electrolytic gold plating solution of the following composition of 1 L· was placed in a beaker, in which a cathode current density of 2 A/dm 2 was set, and a flash fusion electrolytic gold plating treatment was performed at 25 ° C for 30 seconds, followed by Washed with water. [Composition of the flash-melting electrolytic gold plating solution of Example 1] Potassium cyanide, sodium malonate, imine diacetic acid, pH of citric acid, 6.0 1 g/L (calculated as metal gold)

60g/L(上述式(1)中 η=ι) 30g/L(上述式(2)中 Y=H) 80 g/L (利用10容量%之硫酸及1 N氫氧化鉀對pH進行調整, 使之達到6.0。) 接著將1 L·之下述組成之厚層電解鍍金液裝入至燒杯 中,於其中設定陰極電流密度為0.2 A/dm2,於65°C進行 2分10秒鍍金處理,其後進行水洗。 [實施例1之厚層電解鍍金液之組成] 氰化亞金鉀 丙二酸鈉 亞胺基二乙酸 檸檬酸鉀 8 g/L(以金屬金計)60 g/L (η=ι in the above formula (1)) 30 g/L (Y=H in the above formula (2)) 80 g/L (pH is adjusted by using 10% by volume of sulfuric acid and 1 N potassium hydroxide, Let it reach 6.0.) Next, a thick layer of electrolytic gold plating solution of the following composition of 1 L· was placed in a beaker, in which a cathode current density of 0.2 A/dm 2 was set, and gold plating was performed at 65 ° C for 2 minutes and 10 seconds. Then, it is washed with water. [Composition of thick layer electrolytic gold plating solution of Example 1] Potassium cyanide sodium malonate Iminodiacetic acid potassium citrate 8 g/L (calculated as metal gold)

60 g/L(上述式(1)中 n= 1) 30 g/L(上述式(2)中 Y=H) 80 g/L 硫酸銘 15 ppm(以金屬銘計) pH 為 6·0 (利用1〇谷里%之硫酸及1 Ν氮氧化钟對pH進行調整, 使之達到6.0。) 電鑛處理後’進行水洗、乾燥,利用下述測定方法進行 97105852 20 200848552 評價。結果示於表1。 [金膜之厚度之測定方法] X ί Γ之焊錫球測試基板之銅墊部分’使用螢光 制、告;,刀 \ SFT9255(Seik〇 Instruments 股份有限公司 衣k ),根據¥規方法測定金膜及鎳膜之厚度。 [焊錫球接合強度之測定方法] 於化成有金膜之焊錫球測試基板之銅塾部分上塗佈助60 g / L (n = 1 in the above formula (1)) 30 g / L (Y = H in the above formula (2)) 80 g / L sulfuric acid Ming 15 ppm (in terms of metal) pH is 6 · 0 ( The pH was adjusted to 6.0 by using 1% sulphuric acid and 1 Ν nitrous oxide clock.) After the electro-mine treatment, it was washed with water and dried, and evaluated by the following measurement method: 97105852 20 200848552. The results are shown in Table 1. [Method for measuring the thickness of gold film] X ί Γ 铜 焊 solder ball test substrate copper pad part 'Using fluorescent system, singer\SFT9255 (Seik〇Instruments Co., Ltd. clothing k), according to The thickness of the film and the nickel film. [Method for Measuring the Bond Strength of Solder Balls] Coating on the copper enamel portion of the solder ball test substrate with a gold film

熔劑後,搭載直徑為〇.76mm之無絡焊錫球咖為95 5質 量% ’ Ag為4質量%,Cu為0.5質量%),以圖2所示之 方式,於常溫下,敎在25代之波峰溫度條件下進行迴 焊而熔著之焊錫球的拉伸強度,作為「焊錫球接合強度 (gf)」。測定時使用Dage #4〇〇〇(Dage公司製造),另外, 拉伸速度設定為5〇〇〇 # m/s。 [焊錫球接合強度之顯著差之判定方法] 對藉由上述焊錫球接合強度之測定方法所測定之拉伸After the flux, the coreless solder ball with a diameter of 〇.76 mm was 95 5 mass% 'Ag was 4 mass%, Cu was 0.5 mass%), and in the manner shown in Fig. 2, at room temperature, the crucible was 25 generations. The tensile strength of the solder ball that is reflowed under the peak temperature condition is referred to as "solder ball joint strength (gf)". Dage #4〇〇〇 (manufactured by Dage Co., Ltd.) was used for the measurement, and the stretching speed was set to 5 〇〇〇 # m/s. [Method for Determining Significant Difference in Bond Strength of Solder Balls] Stretching by Measurement Method for Bond Strength of Solder Balls

強度資料’使用統計分析軟體JMP(S AS Institute JAPAN 股份有限公司製造),利用學生(student)t檢驗,將顯著性 水平未滿5%之情況判定為存在顯著差。所謂顯著性水平 未滿5%,意指錯誤概率未滿5%,係統計處理上認為比較 樣品間存在顯著差的基準。 [實施例2] 除將實施例1中之閃熔電解鍍金液及厚層電解錢金液 替換為具有以下之組成者以外,以與實施例1相同之方式 進行電鑛處理。其後,利用與實施例1相同之測定方法進 97105852 21 200848552 行評價。結果一併示於表1。 [實施例2之閃熔電解鍍金液之組成] 氰化亞金鉀 1 g/L(以金屬金計) 丙二酸鈉 60 g/L(上述式(1)中n = 1) 羥基乙基亞胺基二乙酸 30 g/L(上述式(2)中Y = C2H4OH)In the case of the intensity data, the statistical analysis software JMP (manufactured by S AS Institute JAPAN Co., Ltd.) was used, and the student's t test was used to determine that the significance level was less than 5%, and there was a significant difference. The so-called significance level is less than 5%, which means that the error probability is less than 5%, and the system calculates that there is a significant difference between the comparison samples. [Example 2] An electric ore treatment was carried out in the same manner as in Example 1 except that the flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold liquid in Example 1 were replaced with the following composition. Thereafter, evaluation was carried out by the same measurement method as in Example 1 at 97105852 21 200848552. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Example 2] Potassium cyanide 1 g/L (calculated as metal gold) Sodium malonate 60 g/L (n = 1 in the above formula (1)) Hydroxyethyl Iminodiacetic acid 30 g/L (Y = C2H4OH in the above formula (2))

檸檬酸鉀 80 g/L pH 為 6·0 (利用10容量%之硫酸及丨Ν氫氧化鉀對ρΗ進行調整, 使之達到6.0。) [實施例2之厚層電解鍍金液之組成] 氰化亞金鉀 丙二酸納 經基乙基亞胺基二乙酸 C2H4OH) 檸檬酸鉀 硫酸鉈 pH 為 6.0 8 g/L(以金屬金計) 60 g/L(上述式(1)中^ 30 g/L(上述式(2)中 80 g/L 15 ppm(以金屬鉈計) (利用10容量%之硫酸及1N氫氧化鉀對?11進行調敕 使之達到6.0。) °°二 [實施例3] 除將實施例1中之閃熔電解鍍金液及厚層電解鍍金、、 替換為具有以下之組成者以外,以與實施例丨相同之方液 進行電鍍處理。其後,利用與實施例丨相同之测定方、去式 97105852 22 200848552 行評價。結果一併示於表1。 [實施例3之閃熔電解鍍金液之組成]Potassium citrate 80 g/L pH was 6.0 (using 10% by volume of sulfuric acid and barium hydroxide to adjust ρΗ to 6.0). [Composition of thick layer electrolytic gold plating solution of Example 2] Cyanide Potassium sulphate, sodium sulphate, sulphate, sulphate, sulphate, sulphate, sulphate, sulphate, sulphate, sulphate, sulphate, sulphate, sulphate, sulphate, sulphate, sulphate g/L (80 g/L 15 ppm (in terms of metal ruthenium) in the above formula (2) (using 10% by volume of sulfuric acid and 1N potassium hydroxide to modulate ?11 to 6.0.) °°[ [Example 3] The electroplating treatment was carried out in the same manner as in Example 除 except that the flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold plating in Example 1 were replaced with the following composition. The same measurement method and the evaluation formula of the formula 97105852 22 200848552 are shown in Table 1. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Example 3]

氰化亞金鉀 乙二酸鈉 亞胺基二乙酸 檸檬酸斜 pH 為 6.0 (利用10容量%之硫酸及1 使之達到6.0。) 1 g/L(以金屬金計)Potassium cyanide sodium oxalate iminodiacetic acid citrate pH 6.0 (using 10% by volume of sulfuric acid and 1 to achieve 6.0.) 1 g/L (calculated as metal gold)

60 g/L(上述式(1)中 ^=0) 30 g/L(上述式(2)中 γ=Η) 80 g/L N氫氧化鉀對pH進行調整, [實施例3之厚層電解鍍金液之組成] 氰化亞金舒 乙二酸鈉 亞胺基二乙酸 檸檬酸鉀 硫酸鉈 pH 為 6.060 g/L (^=0 in the above formula (1)) 30 g/L (γ=Η in the above formula (2)) 80 g/LN potassium hydroxide adjusts the pH, [thick layer electrolysis of Example 3] Composition of gold plating solution] Cyanide sulphate sodium sulphate imide diacetic acid citrate potassium sulphate pH 6.0

8 g/L(以金屬金計)8 g/L (calculated in metal gold)

6〇 g/L(上述式〇)中〇) 3〇g/L(上述式(2)中 γ=Η) 80 g/L 15 ppm(以金屬鉈計) (利用1〇容量%之硫酸A1N氫氧化鉀對pH進行調整, 使之達到6.0。) £ [實施例4] 除將實施例1中之厚層電解錢金液替換為具有以下之 組成者以外’以與實施例1相同之方式進行電鑛處理。复 後,利用與實施例1相同之測定方法進行評價。結果一併 [實施例4之厚層電解鍍金液之組成] 97105852 23 2008485526〇g/L (in the above formula) 〇3〇g/L (γ=Η in the above formula (2)) 80 g/L 15 ppm (calculated as metal ruthenium) (Using 1〇% by volume of sulfuric acid A1N Potassium hydroxide was adjusted to pH to 6.0.) £ [Example 4] In the same manner as in Example 1, except that the thick layer electrolytic gold liquid in Example 1 was replaced with the following composition Conduct electric ore processing. Thereafter, the evaluation was carried out by the same measurement method as in Example 1. The result is the same [Composition of thick layer electrolytic gold plating solution of Example 4] 97105852 23 200848552

8 g/L(以金屬金計) 100 g/L 15 ppm(以金屬鉈計) (利用10谷1 %之硫酸及1 N氫氧化鉀對pH進行調整, 使之達到6.0。) [實施例5]8 g/L (calculated as metal gold) 100 g/L 15 ppm (calculated as metal ruthenium) (pH adjusted with 10% 1% sulfuric acid and 1 N potassium hydroxide to achieve 6.0.) [Examples] 5]

氰化亞金鉀 檸檬酸鉀 硫酸鉈 pH 為 6.0 除將實施例1中之閃熔電解鍍金液替換為具有以下之 組成者以外,以與實施例1相同之方式進行電鍍處理。其 後,利用與實施例1相同之測定方法進行評價。結果一併 示於表1。 [實施例5之閃熔電解鍍金液之組成] 氰化亞金鉀 1 g/L(以金屬金計)Potassium cyanide potassium citrate Barium sulphate pH was 6.0. The plating treatment was carried out in the same manner as in Example 1 except that the flash-melting electrolytic gold plating solution of Example 1 was replaced with the following composition. Thereafter, the evaluation was carried out by the same measurement method as in Example 1. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Example 5] Potassium cyanide 1 g/L (calculated as metal gold)

檸檬酸卸 100 g/L pH 為 6.0 (利用10容量%之硫酸及1 N氳氧化鉀對pH進行調整, 使之達到6.0。) [實施例6] 除將實施例1中之閃熔電解鍍金液及厚層電解錢金液 替換為具有以下之組成者以外,以與實施例1相同之方气 進行電鍍處理。其後,利用與實施例1相同之測定方法^ 行评價。結果一併示於表1。 、 [實施例6之閃熔電解鍍金液之組成] 氰化亞金鉀 1 g/L(以金屬金計) 97105852 24 200848552 丁二酸鈉 亞胺基二乙酸 檸檬酸鉀 pH 為 6.0The citric acid was discharged at 100 g/L and the pH was 6.0 (pH was adjusted with 10% by volume of sulfuric acid and 1 N of potassium oxyhydroxide to achieve 6.0.) [Example 6] In addition to the flash-melting electrolytic gold plating in Example 1. The liquid and the thick layer electrolytic gold liquid were replaced with the same composition as in Example 1, and the plating treatment was carried out in the same manner as in Example 1. Thereafter, the evaluation was carried out by the same measurement method as in Example 1. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Example 6] Potassium cyanide 1 g/L (calculated as metal gold) 97105852 24 200848552 Sodium succinate Iminodiacetic acid Potassium citrate pH 6.0

60 g/L(上述式(1)中 n=2) 3〇g/L(上述式(2)中 γ=Η) 80 g/L (利用10容量%之硫酸及1 N氫氧化鉀對pH進行調整, 使之達到6.0。) [實施例6之厚層電解鍍金液 氰化亞金卸 丁二酸鉀 亞胺基二乙酸 檸檬酸鉀 硫酸鉈 pH 為 6·0 之組成] 8 g/L(以金屬金計) 60 g/L(上述式(1)中 n==2) 30 g/L(上述式(2)中 γ=Η) 80 g/L 15 ppm(以金屬鉈計) (利用10容量%之硫酸及1 N氫氧化鉀對pH進行調整 使之達到6.0。)60 g / L (n = 2 in the above formula (1)) 3 〇 g / L (γ = Η in the above formula (2)) 80 g / L (using 10% by volume of sulfuric acid and 1 N potassium hydroxide versus pH Adjust to make it reach 6.0.) [Example 6 thick layer electrolytic gold plating liquid cyanide gold removal succinate potassium iminodiacetic acid potassium citrate sulphate pH 6.8 composition] 8 g / L (in terms of metal gold) 60 g/L (n==2 in the above formula (1)) 30 g/L (γ = Η in the above formula (2)) 80 g/L 15 ppm (in terms of metal ruthenium) ( The pH was adjusted to 6.0 by using 10% by volume of sulfuric acid and 1 N of potassium hydroxide.)

[實施例7] 除將實施例1中之閃熔電解鍍金液及厚層電解錢金、、夜 替換為具有以下之組成者以外,以與實施例1相同之方气 進行電鍍處理。其後,利用與實施例1相同之測定方法進 行評價。結果一併示於表1。 [實施例7之閃熔電解鍍金液之組成] 氰化亞金鉀 戊二酸納 亞胺基二乙酸 1 g/L(以金屬金計) 60g/L(上述式(1)中 30g/L(上述式(2)中只) 97105852 25 200848552[Example 7] A plating treatment was carried out in the same manner as in Example 1 except that the flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold-plated liquid of Example 1 were replaced with the following composition. Thereafter, the evaluation was carried out by the same measurement method as in Example 1. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Example 7] Gold cyanide potassium glutaric acid n-iminodiacetic acid 1 g/L (calculated as metal gold) 60 g/L (30 g/L in the above formula (1) (only in the above formula (2)) 97105852 25 200848552

檸檬酸鉀 80 g/L pH 為 6.0 (利用10容量%之硫酸及IN氫氧化鉀對pH進行,敕, 使之達到6·0。) &quot;正 [實施例7之厚層電解鍍金液之組成] 氰化亞金鉀 戊二酸鉀 亞胺基二乙酸 檸檬酸卸 硫酸鉈 pH 為 6·0 8 g/L(以金屬金計) 6〇g/L(上述式(1)中 n=3)Potassium citrate 80 g / L pH 6.0 (using 10% by volume of sulfuric acid and IN potassium hydroxide to pH, 敕, to reach 6.00.) &quot; 正 [Example 7 thick layer electrolytic gold plating solution Composition] Potassium cyanide potassium glutarate iminodiacetic acid diacetic acid citrate barium sulfate pH is 6.8 g / L (calculated as metal gold) 6 〇 g / L (n = n in the above formula (1) 3)

30 g/L(上述式(2)中γ==抝 80 g/L 15 ppm(以金屬鉈計) (利用10容量%之硫酸及1 N氫氧化鉀對pH進行々周敕 使之達到6.0。) [實施例8]30 g / L (γ == 拗 80 g / L 15 ppm (in terms of metal ruthenium in the above formula (2)) (using 10% by volume of sulfuric acid and 1 N potassium hydroxide to pH around 敕 to 6.0 .) [Embodiment 8]

除將實施例1中之閃熔電解鍍金液及厚層電解鑛金、、夜 替換為具有以下之組成者以外,以與實施例1相同之方气 進行電鑛處理。其後’利用與實施例1相同之測定方、、套、 行評價。結果一併示於表1。 [實施例8之閃熔電解鍍金液之組成] 氣化亞金卸 己二酸鈉 亞胺基二乙酸 檸檬酸鉀The electric ore treatment was carried out in the same manner as in Example 1 except that the flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold in the first embodiment were replaced with the following components. Thereafter, the evaluation was carried out by the same measurement, and the evaluation as in Example 1. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Example 8] Gasification gold removal sodium adipate iminodiacetic acid potassium citrate

1 g/L(以金屬金計) 60 g/L(上述式⑴中 3〇g/L(上述式(2)中 80 g/L pH 為 6·0 97105852 26 200848552 (利用10容量%之硫酸及1 N氫氧化鉀對pH進行調整, 使之達到6.0。) [實施例8之厚層電解鍍金液之組成] 氰化亞金鉀 己二酸鉀 亞胺基二乙酸 擰檬酸鉀 硫酸鉈 8 g/L(以金屬金計)1 g/L (calculated as metal gold) 60 g/L (3 〇g/L in the above formula (1) (80 g/L in the above formula (2) pH is 6.9 97105852 26 200848552 (using 10% by volume of sulfuric acid) And 1 N potassium hydroxide adjusted the pH to 6.0.) [Composition of thick layer electrolytic gold plating solution of Example 8] Potassium cyanide potassium adipate imino diacetic acid potassium citrate 8 g/L (calculated in metal gold)

60 g/L(上述式(1)中 n===4) 30 g/L(上述式(2)中 γ: η) 80 g/L 15 ppm(以金屬鉈計) pH 為 6.0 (利用10容量%之硫酸及1 N氳氧化鉀對pH進行調整, 使之達到6.0。) [比較例1] 除將實施例1中之閃熔電解鍍金液及厚層電解鑛金液 替換為具有以下之組成者以外,以與實施例1相同之方式 進行電鍍處理。其後,利用與實施例1相同之測定方法進 ( 行評價。結果一併示於表1。 [比較例1之閃熔電解鍍金液之組成] 氰化亞金鉀 1 g/L(以金屬金計)60 g/L (n===4 in the above formula (1)) 30 g/L (γ: η in the above formula (2)) 80 g/L 15 ppm (calculated as metal ruthenium) pH is 6.0 (using 10 The % of sulfuric acid and 1 N of potassium oxide were adjusted to pH to 6.0. [Comparative Example 1] The flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold liquid in Example 1 were replaced with the following The plating treatment was carried out in the same manner as in Example 1 except for the composition. Thereafter, the same measurement method as in Example 1 was carried out (the evaluation was carried out. The results are shown together in Table 1. [Comparison of the flash-melting electrolytic gold plating solution of Comparative Example 1] Potassium cyanide 1 g/L (with metal) Gold meter)

亞胺基二乙酸 30 g/LIminodiacetic acid 30 g/L

. 檸檬酸鉀 100 g/L (無上述式(1)之化合物) pH 為 6.0 (利用10容量%之硫酸及i N氫氧化鉀對PH進行調整, 使之達到6.0。) i 97105852 27 200848552 [比較例1之厚層電解鍍金液之組成] 氰化亞金鉀 亞胺基二乙酸 檸檬酸鉀 硫酸I它Potassium citrate 100 g/L (no compound of the above formula (1)) pH 6.0 (pH adjusted with 10% by volume of sulfuric acid and i N potassium hydroxide to achieve 6.0.) i 97105852 27 200848552 [ The composition of the thick layer electrolytic gold plating solution of Comparative Example 1] potassium cyanide iminodiacetic acid potassium citrate sulfate I

8 g/L(以金屬金計) 30 g/L 100 g/L 15 ppm(以金屬I它計) (無上述式(1)之化合物) pH 為 6.0 (利用10容量%之硫酸及1 Ν氫氧化鉀對pH進行調整, 使之達到6·0。) [比較例2] 除將實施例1中之閃熔電解鍍金液及厚層電解鍍金液 替換為具有以下之組成者以外,以與實施例1相同之方式 進行電鍍處理。其後,利用與實施例1相同之測定方法進 行評價。結果一併示於表1。 [比較例2之閃熔電解鍍金液之組成] 氰化亞金鉀 1 g/L(以金屬金計)8 g/L (calculated as metal gold) 30 g/L 100 g/L 15 ppm (based on metal I) (no compound of formula (1) above) pH 6.0 (using 10% by volume of sulfuric acid and 1 Ν The pH of the potassium hydroxide was adjusted to 6.0. [Comparative Example 2] Except that the flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold plating liquid in Example 1 were replaced with the following components, The plating treatment was carried out in the same manner as in Example 1. Thereafter, the evaluation was carried out by the same measurement method as in Example 1. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Comparative Example 2] Potassium cyanide 1 g/L (calculated as metal gold)

檸檬酸鉀 100 g/L (無上述式(1)及上述式(2)之化合物) pH 為 6.0 (利用10容量%之硫酸及1N氩氧化鉀對pH進行調整, 使之達到6.0。) [比較例2之厚層電解鍍金液之組成] 氰化亞金鉀 8 g/L(以金屬金計)Potassium citrate 100 g/L (the compound of the above formula (1) and the above formula (2)) has a pH of 6.0 (the pH is adjusted by using 10% by volume of sulfuric acid and 1N of potassium aroxide to bring it to 6.0.) Composition of thick layer electrolytic gold plating solution of Comparative Example 2] Potassium cyanide 8 g/L (calculated as metal gold)

檸檬酸鉀 100 g/L 97105852 28 200848552 硫酸鉈 15 ppm(以金屬鉈計) (無上述式(1)及上述式(2)之化合物) PH 為 6.0 (利用10容量%之硫酸及1 N氫氧化鉀對pH進行調整, 使之達到6.0。) [比較例3] 除將實施例1中之閃熔電解鍍金液及厚層電解鍍金液 替換為具有以下之組成者以外,以與實施例1相同之方式 進行電鑛處理。其後,利用與實施例1相同之測定方法進 行評價。結果一併示於表1。 [比較例3之閃熔電解鍍金液之組成] 氰化亞金卸 乙二酸納 次氮基三乙酸 1 g/L(以金屬金計) 60 g/L(上述式⑴中η二〇) 30 g/L(上述式(2)所示之 化合物並非二羧酸而為三羧酸)(並不滿足上述式(2)中Y ( 之要素)Potassium citrate 100 g/L 97105852 28 200848552 Barium sulphate 15 ppm (calculated as metal ruthenium) (The compound of the above formula (1) and the above formula (2)) PH is 6.0 (using 10% by volume of sulfuric acid and 1 N hydrogen) Potassium oxide was adjusted to pH to 6.0. [Comparative Example 3] Except that the flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold plating liquid in Example 1 were replaced with the following components, The electric ore treatment is carried out in the same manner. Thereafter, the evaluation was carried out by the same measurement method as in Example 1. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Comparative Example 3] Gold cyanide unloading oxalic acid nitrilotriacetic acid 1 g/L (calculated as metal gold) 60 g/L (η 〇 in the above formula (1)) 30 g/L (the compound represented by the above formula (2) is not a dicarboxylic acid but a tricarboxylic acid) (the element of the above formula (2) is not satisfied)

檸檬酸鉀 100 g/L pH 為 6·0 (利用10容量%之硫酸及1 Ν氫氧化鉀對ΡΗ進行調敕, 使之達到6.0。) i ’ [比較例3之厚層電解鍍金液之組成] 氰化亞金鉀 乙二酸鈉 次氮基三乙酸 8 g/L(以金屬金計) 6〇g/L(上述式(1)中n==… 3〇 g/L(上述式(2)所示之 97105852 29 200848552 化合物並非二羧酸而為三羧酸)(並不滿足上述式(2)中γ 之要素)Potassium citrate 100 g/L pH was 6.0 (using 10% by volume of sulfuric acid and 1 Torr of potassium hydroxide to sputum to 6.0.) i ' [Comparative Example 3 thick layer electrolytic gold plating solution Composition] Potassium cyanide potassium oxalate nitrilotriacetic acid 8 g / L (calculated as metal gold) 6 〇 g / L (n ==... 3 〇 g / L in the above formula (1) (the above formula (2) 97105852 29 200848552 The compound is not a dicarboxylic acid but a tricarboxylic acid) (the element of γ in the above formula (2) is not satisfied)

檸檬酸鉀 80 g/L 硫酸鉈 15 PPm(以金屬鉈計) pH 為 6.0 (利用10容量%之硫酸及i N氫氧化鉀對pH進行調整, 使之達到6.0。) i [比較例4] 除將實施例1中之閃熔電解鍍金液及厚層電解錢金液 替換為具有以下之組成者以外,以與實施例1相同之方式 進行電鍵處理。其後’利用與實施例1相同之測定方、去進 行評價。結果一併示於表1。 [比較例4之閃熔電解鍍金液之組成] 氰化亞金鉀 1 g/L(以金屬金計) 乙酸鈉 60 g/L(上述式(1)所示之 化合物並非二羧酸而為單羧酸) 亞胺基二乙酸 30g/L(上述式(2)中γ=ΗPotassium citrate 80 g/L barium sulphate 15 PPm (calculated as metal ruthenium) pH 6.0 (pH was adjusted with 10% by volume of sulfuric acid and i N potassium hydroxide to achieve 6.0.) i [Comparative Example 4] The electric key treatment was carried out in the same manner as in Example 1 except that the flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold liquid in Example 1 were replaced with the following composition. Thereafter, the evaluation was carried out by the same measurement as in Example 1. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Comparative Example 4] Potassium cyanide 1 g/L (calculated as metal gold) Sodium acetate 60 g/L (The compound represented by the above formula (1) is not a dicarboxylic acid. Monocarboxylic acid) iminodiacetic acid 30g/L (γ = Η in the above formula (2)

檸檬酸鉀 80 g/L pH 為 6.0 (利用10容量%之硫酸及1 N氳氧化鉀對pH進行,敕 使之達到6.0。) i ’ [比較例4之厚層電解鍍金液之組成] 氰化亞金鉀 1 g/L(以金屬金計) 乙酸納 6〇 §/L(上述式(1)所示之 97105852 30 200848552 化合物並非二羧酸而為單羧酸) 亞胺基二乙酸 30 g/L(上述式(2)中γ=Η)Potassium citrate 80 g/L pH 6.0 (pH was carried out using 10% by volume of sulfuric acid and 1 N of potassium oxide, and the ratio was 6.0.) i ' [Comparative Example 4 Thick Layer Electrolytic Gold Plating Composition] Cyanide Potassium gold 1 g / L (calculated as metal gold) sodium acetate 6 § / L (97105852 30 200848552 compound represented by the above formula (1) is not a dicarboxylic acid but a monocarboxylic acid) iminodiacetic acid 30 g/L (γ = Η in the above formula (2))

擰檬酸鉀 80 g/L 硫酸銘 15 ppm(以金屬錄計) pH 為 6.0 (利用10容量%之硫酸及1 N氫氧化鉀對pH進行調整, 使之達到6.0。) f [比較例5] 除將實施例1中之閃熔電解鍍金液及厚層電解錢金液 替換為具有以下之組成者以外,以與實施例1相同之方气 進行電鍍處理。其後,利用與實施例1相同之測定方法、 行評價。結果一併示於表1.Potassium citrate 80 g/L Sulfuric acid 15 ppm (according to metal) pH 6.0 (pH adjusted with 10% by volume of sulfuric acid and 1 N potassium hydroxide to achieve 6.0.) f [Comparative Example 5 The electroplating treatment was carried out in the same manner as in Example 1 except that the flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold liquid in Example 1 were replaced with the following composition. Thereafter, the same measurement method as in Example 1 was used for evaluation. The results are shown together in Table 1.

[比較例5之閃熔電解鍍金液之組成] 氰化亞金鉀 1 g/L(以金屬金計) 檸檬酸鈉 60 g/L(上述式(1)所示之 化合物並非二羧酸而為三羧酸) 亞胺基二乙酸 30g/L(上述式(2)中[Composition of the flash-melting electrolytic gold plating solution of Comparative Example 5] Potassium cyanide 1 g/L (calculated as metal gold) Sodium citrate 60 g/L (The compound represented by the above formula (1) is not a dicarboxylic acid. Is a tricarboxylic acid) imine diacetic acid 30g / L (in the above formula (2)

檸檬酸鉀 80 g/L pH 為 6.0 (利用10容量%之硫酸及1 Ν氫氧化鉀對ρΗ進行調整, 使之達到6.0。) ι ’ [比較例5之厚層電解鍍金液之組成] 氰化亞金鉀 捧樣酸納 1 g/L(以金屬金計) 6〇 g/L(上述式(1)所示之 97105852 31 200848552 化合物並非二羧酸而為三羧酸) 亞胺基二乙酸 檸檬酸鉀Potassium citrate 80 g/L pH 6.0 (pH Η was adjusted with 10% by volume of sulfuric acid and 1 Torr of potassium hydroxide to achieve 6.0.) ι ' [Comparative Example 5 Thick Electrolytic Gold Plating Composition] Cyanide Potassium citrate 1 g / L (calculated as metal gold) 6 〇 g / L (97105852 31 200848552 compound represented by the above formula (1) is not a dicarboxylic acid but a tricarboxylic acid) Potassium citrate acetate

30 g/L(上述式(2)中 γ=Η) 80 g/L 硫酸鉈 pH 為 6·0 15 ppm(以金屬鉈計) (利用10容量%之硫酸及1N氫氧化鉀對pH進行調整, 使之達到6.0。) [比較例6] 除將實施例1中之閃熔電解鍍金液及厚層電解鍍金液 替換為具有以下之組成者以外,以與實施例丨相同之方 進行電鍍處理。其後,利用與實施例丨相同之測定方法= 行評價。結果一併示於表1。 [比較例6之閃熔電解鍍金液之組成] 氰化亞金鉀 丁二酸鈉 甘胺酸 1 g/L(以金屬金計) 6〇g/L(上述式⑴中n&gt;2) M g/L(上述式(2)所示 化合物並非二羧酸而為單羧酸)30 g / L (γ = Η in the above formula (2)) 80 g / L barium sulfate pH is 6 · 0 15 ppm (based on metal ruthenium) (Adjust pH with 10% by volume of sulfuric acid and 1N potassium hydroxide (Comparative Example 6) Electroplating treatment was carried out in the same manner as in Example 除 except that the flash-melting electrolytic gold plating solution and the thick-layer electrolytic gold plating liquid in Example 1 were replaced with the following components. . Thereafter, the same measurement method as in Example = was used for evaluation. The results are shown together in Table 1. [Composition of the flash-melting electrolytic gold plating solution of Comparative Example 6] Potassium cyanide potassium succinate glycine 1 g/L (calculated as metal gold) 6 〇 g / L (n> in the above formula (1) 2) M g/L (the compound represented by the above formula (2) is not a dicarboxylic acid but a monocarboxylic acid)

檸檬酸鉀 80 g/L pH 為 6·0 (利用10容量%之硫酸及1 Ν氫氧化鉀對pH進行 使之達到6 · 0。) 。$ [比較例6之厚層電解鍍金液之組成] 氰化亞金鉀 1 g/L(以金屬金計) 丁二酸鈉 60 g/L(上述式⑴中 97105852 32 200848552 甘胺酸 30 g/L(上述式(2)所示之 化合物並非二羧酸而為單羧酸)Potassium citrate 80 g/L pH was 6.0 (using pH 10% by weight of sulfuric acid and 1 Torr of potassium hydroxide to bring the pH to 6 · 0.). $ [Compound composition of thick layer electrolytic gold plating solution of Comparative Example 6] Potassium cyanide 1 g/L (calculated as metal gold) Sodium succinate 60 g/L (97105852 32 in the above formula (1) 200848552 Glycine 30 g /L (the compound represented by the above formula (2) is not a dicarboxylic acid but a monocarboxylic acid)

檸檬酸鉀 80 g/L 硫酸鉈 15 ppm(以金屬鉈計) pH 為 6.0 (利用10容量%之硫酸及1 N氩氧化鉀對pH進行調整, 使之達到6 · 0。) [表1]Potassium citrate 80 g/L Barium sulphate 15 ppm (based on metal ruthenium) pH 6.0 (pH adjusted with 10% by volume of sulfuric acid and 1 N argon oxynitride to achieve 6 · 0.) [Table 1]

No. 實施例1 實施例2 實施例3 實施例4 實施例5 實施例6 實施例7 實施例8 0.30 0.30 0.31 0.30 0.31 0.30 0.30 0.30 金膜之膜厚 β m β m β m β m β m β m β m β m 焊錫球之測定個數 70個 70個 70個 70個 70個 70個 70個 70個 焊錫球接合強度之 平均值 2090 g 2044 g 2077 g 2038 g 2031 g 2093 g 2055 g 2054 g No. 比較例1 比較例2 比較例3 比較例4 比較例5 比較例6 0.29 0.30 0.30 0.31 0.30 0.30 金膜之膜厚 μ m β m β m β m β m β m 焊錫球之測定個數 70個 70個 70個 70個 70個 70個 焊錫球接合強 1906 g 1924 g 1874 g 1875 g 1863 g 1814 g 度之平均值 將根據上述「焊錫球接合強度之顯著差之判定方法」所 測定•判定之結果示於圖3。圖3中,所謂「每對Student t檢驗0.05」,係表示對間之相互關係、平均値間之差、對 間之差之測定。圖3中,以焊錫球接合強度2000(gf)明確 地區分實施例與比較例。其表示實施例與比較例之焊錫球 接合強度存在顯著差,實施例之焊錫球接合強度明顯高於 比較例之焊錫球接合強度,而並不專注於實施例中之焊錫 球接合強度之不均。 97105852 33 200848552 根據測定結果可知,閃溶電解鍍金液、厚層電解鑛金液 兩者皆使用本發明之電解錢金液的實施例1〜3及實施例 6〜8中之任一者,即便使無鉛焊錫球熔著,焊錫接合強 度亦均明顯優於習知技術之比較例1至比較例6。 進而可知,當閃熔電解鍍金液、厚層電解鍍金液中之任 一者使用本發明之電解鍍金液時,亦與閃熔電解鍍金液、 厚層電解鍍金液兩者皆使用本發明之電解鍍金液之情況 相同’無錯焊錫接合強度上升(實施例4及實施例5)。 另外可知,由於比較例丨至比較例6之電解鍍金組成 中,閃熔電解鍍金液、厚層電解鍍金液中之任一者均不使 用本發明之電解鍍金液,故無鉛焊錫接合強度較差。 (產業上之可利用性) 即使將本發明之電解鍍金液用於閃熔電解鍍金液、厚層 電解鍍金液巾之任—者時,亦可使湘無料錫球之焊锡 接合強度$於習知技術,故本發明之f解鍍金液被廣泛地 應用於目前#遍採用的出於對環境之考慮而使 錫的電子零件之電解鍍鎳/鍍金領域中。 ”° 本申請案係基於2007年2月23曰申請之曰本專利申請 案之日本相制2GG7_G43748,該等^案之所有内容 =引用於此,並作為本發明之說明書之揭示内容而併入其 【圖式簡單說明】 測定焊錫球接合強度 圖1係表示於實施例與比較例中 牯所使用之焊錫球测試基板之圖。 97105852 34 200848552 圖2係表示測定焊錫球接合強度時之焊錫球搭載方法 及拉伸方向之圖。 圖3係表示使用統計分析軟體對實施例及比較例中所 測定之焊錫球接合強度進行統計計算之結果的圖。No. Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 0.30 0.30 0.31 0.30 0.31 0.30 0.30 0.30 Film thickness of gold film β m β m β m β m β m β m β m β m solder ball determination number 70 70 70 70 70 70 70 70 solder balls joint strength average 2090 g 2044 g 2077 g 2038 g 2031 g 2093 g 2055 g 2054 g No. Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 Comparative Example 6 0.29 0.30 0.30 0.31 0.30 0.30 Film thickness of gold film μ m β m β m β m β m β m Number of solder balls 70 The average value of 70 70 70 70 70 70 solder balls 1906 g 1924 g 1874 g 1875 g 1863 g 1814 g degree will be determined according to the above "Method for Judging the Significant Difference of Solder Ball Bond Strength" The results are shown in Figure 3. In Fig. 3, "each pair of Student's t-test 0.05" is a measure of the relationship between the pairs, the difference between the average turns, and the difference between the pairs. In Fig. 3, the examples and comparative examples were clearly distinguished by solder ball bonding strength 2000 (gf). It shows that the bonding strength of the solder balls of the embodiment and the comparative example is significantly inferior. The solder ball bonding strength of the embodiment is significantly higher than that of the solder ball of the comparative example, and does not concentrate on the uneven bonding strength of the solder balls in the embodiment. . 97105852 33 200848552 According to the measurement results, it is understood that either the flash electrolytic gold plating solution or the thick layer electrolytic gold liquid is used in any of Examples 1 to 3 and Examples 6 to 8 of the electrolytic gold liquid of the present invention, even if The lead-free solder balls were fused, and the solder joint strength was also significantly better than Comparative Examples 1 to 6 of the prior art. Further, it is understood that when either the flash-melting electrolytic gold plating solution or the thick-layer electrolytic gold plating liquid uses the electrolytic gold plating solution of the present invention, the electrolytic solution of the present invention is also used for both the flash-melting electrolytic gold plating liquid and the thick-layer electrolytic gold plating liquid. In the case of the gold plating solution, the same was true for the error-free solder joint strength (Example 4 and Example 5). Further, in the electrolytic gold plating composition of Comparative Example to Comparative Example 6, neither the flash-melting electrolytic gold plating solution nor the thick-layer electrolytic gold plating liquid used the electrolytic gold plating liquid of the present invention, so that the lead-free solder joint strength was inferior. (Industrial Applicability) Even when the electrolytic gold plating solution of the present invention is used for either a flash electrolytic electrolytic gold plating liquid or a thick electrolytic gold plating liquid towel, the solder joint strength of the Xiang Wu solder ball can be made. Knowing the technology, the f-plating solution of the present invention is widely used in the field of electrolytic nickel plating/gold plating of electronic parts which are used for environmental considerations. The present application is based on Japanese Patent Application No. 2GG7_G43748 filed on Feb. 23, 2007, the entire contents of which are hereby incorporated by reference in its entirety in BRIEF DESCRIPTION OF THE DRAWINGS [Measurement of Solder Ball Bonding Strength] FIG. 1 is a view showing a solder ball test substrate used in Examples and Comparative Examples. 97105852 34 200848552 FIG. 2 is a view showing solder when measuring solder ball joint strength. Fig. 3 is a view showing the results of statistical calculation of the solder ball joint strength measured in the examples and the comparative examples using the statistical analysis software.

97105852 3597105852 35

Claims (1)

200848552 十、申請專利範圍: i一種電解鍍金液,其特徵在於 =述式⑴心之福酸或4酸鹽、以及以下述式⑺ 所示之一羧酸或二羧酸鹽, [化1] X1OOC~CnH2n〜COOX2 ⑴200848552 X. Patent application scope: i An electrolytic gold plating solution characterized in that: (1) a heart acid or a 4 acid salt, and a carboxylic acid or a dicarboxylic acid salt represented by the following formula (7), [Chemical Formula 1] X1OOC~CnH2n~COOX2 (1) [式2⑴中’ _CnH2n_表示可具有直鏈或侧鏈之伸烧基;χ1 與X相互之間可相同亦可不同,表示H、NmNH4; η表不0以上之自然數] [化2] (2) X3OOCH2C - Ν-CH2COOX4 Y [式(2)中’X3與X4相互之間可相同亦可不同,表示h、 Na ' K或NH4 ; Y表示氫原子、烧基或經基烧基]。 2. 如申請專利範圍第丨項之電解鍍金液,其中,該氰化 金鹽為氰化金鹼金屬或氰化金銨。 3. 如申請專利範圍第2項之電解鍍金液,其中,該氰化 盘鹽為氰化亞金鈉、氰化亞金鉀、氰化亞金銨、氰化金鈉、 氧化金卸或氰化金I安。 4. 如申請專利範圍第1項之電解鍍金液,其中,上述式 (1)所示之二羧酸或二羧酸鹽為乙二酸、乙二酸鈉、乙二酸 鉀、乙二酸銨、丙二酸、丙二酸鈉、丙二酸鉀、丙二酸銨、 丁二酸、丁二酸鈉、丁二酸鉀、丁二酸銨、戊二酸、戊二 酸鉀、戊二酸鈉、戊二酸銨、己二酸、己二酸鈉、己二酸 97105852 36 200848552 鉀、己二酸銨、庚二酸、庚二酸鈉、庚二酸鉀、庚二酸銨、 辛二酸、辛二酸鈉、辛二酸鉀、辛二酸銨、壬二酸、壬二 酸鈉、壬二酸鉀、壬二酸録、癸二酸、癸二酸鈉、癸二酸 鉀或癸二酸銨。 • 5·如申請專利範圍第1項之電解鍍金液,其中,上述式 • (2)所示之二羧酸或二羧酸鹽為亞胺基二乙酸、亞胺基二乙 酸二鈉、亞胺基二乙酸二鉀、亞胺基二乙酸二銨、曱基亞 胺基二乙酸、曱基亞胺基二乙酸二鈉、曱基亞胺基二乙酸 f -一卸、曱基亞胺基二乙酸二錢、乙基亞胺基二乙酸、乙基 亞胺基二乙酸二鈉、乙基亞胺基二乙酸二鉀、乙基亞胺基 二乙酸二銨、丙基亞胺基二乙酸、丙基亞胺基二乙酸二 鈉、丙基亞胺基二乙酸二鉀、丙基亞胺基二乙酸二銨、丁 基亞胺基二乙酸、丁基亞胺基二乙酸二鈉、丁基亞胺基二 乙酸二鉀、丁基亞胺基二乙酸二銨、戊基亞胺基二乙酸、 戊基亞胺基二乙酸二鈉、戊基亞胺基二乙酸二鉀、戊基亞 I 胺基二乙酸二銨、羥基曱基亞胺基二乙酸、羥基甲基亞胺 基二乙酸二鈉、羥基甲基亞胺基二乙酸二鉀、羥基甲基亞 胺基二乙酸二銨、羥基乙基亞胺基二乙酸、羥基乙基亞胺 基二乙酸二鈉、羥基乙基亞胺基二乙酸二鉀、羥基乙基亞 胺基二乙酸二銨、羥基丙基亞胺基二乙酸、羥基丙基亞胺 基二乙酸二鈉、羥基丙基亞胺基二乙酸二鉀、羥基丙基亞 胺基二乙酸二銨、羥基丁基亞胺基二乙酸、羥基丁基亞胺 基二乙酸二鈉、羥基丁基亞胺基二乙酸二鉀、羥基丁基亞 胺基二乙酸二銨、羥基戊基亞胺基二乙酸、經基戊基亞胺 97105852 37 200848552 基二乙酸二鈉、經基戊基亞胺基二乙酸二鉀或羥基戊基亞 胺基二乙酸二銨。 6·—種金膜,其特徵在於··其係藉由使用申請專利範圍 第1至5項中任一項之電解鍍金液進行電解鍍金而獲得。 7·—種金膜之製造方法,其特徵在於:使用申請專利範 圍第1至5項中任一項之電解鍍金液,於鍍鎳膜上進行電 解鑛金。 ’其特徵在於:其係藉由使用申請 任一項之電解鍍金液,於鍍鎳膜上[In the formula 2 (1), _CnH2n_ represents a stretching group which may have a straight chain or a side chain; χ1 and X may be the same or different from each other, and represent H, NmNH4; η represents a natural number above 0] [Chemical 2] (2) X3OOCH2C - Ν-CH2COOX4 Y [In the formula (2), 'X3 and X4 may be the same or different from each other, and represent h, Na ' K or NH 4 ; Y represents a hydrogen atom, a burnt group or a thiol group] . 2. The electrolytic gold plating solution according to the scope of the patent application, wherein the gold cyanide salt is a gold cyanide metal or a gold ammonium cyanide. 3. The electrolytic gold plating solution according to item 2 of the patent application, wherein the cyanide disk salt is sodium cyanide sodium, potassium cyanide, ammonium gold cyanide, gold sodium cyanide, gold oxide or cyanide Gold I. 4. The electrolytic gold plating solution according to claim 1, wherein the dicarboxylic acid or dicarboxylic acid salt represented by the above formula (1) is oxalic acid, sodium oxalate, potassium oxalate or oxalic acid. Ammonium, malonic acid, sodium malonate, potassium malonate, ammonium malonate, succinic acid, sodium succinate, potassium succinate, ammonium succinate, glutaric acid, potassium glutarate, pentane Sodium diacid, ammonium glutarate, adipic acid, sodium adipate, adipic acid 97105852 36 200848552 Potassium, ammonium adipate, pimelic acid, sodium pimelate, potassium pimelate, ammonium pimelate, Suberic acid, sodium dioctylate, potassium suberate, ammonium suberate, azelaic acid, sodium sebacate, potassium sebacate, sebacic acid, azelaic acid, sodium azelaic acid, sebacic acid Potassium or ammonium sebacate. • 5. The electrolytic gold plating solution according to item 1 of the patent application, wherein the dicarboxylic acid or dicarboxylic acid salt represented by the above formula (2) is iminodiacetic acid, disodium iminodiacetic acid, or sub Dipotassium aminodiacetic acid, diammonium iminodiacetic acid, decyl imidodiacetic acid, disodium decyl imidodiacetic acid, fluorenyl imidodiacetic acid f-unloaded, fluorenyl imido Diacetic acid diacetate, ethylimidodiacetic acid, disodium ethylimidodiacetic acid, dipotassium ethyliminodiacetic acid, diammonium ethylimidodiacetic acid, propyliminodiacetic acid , disodium propyliminodiacetic acid, dipotassium propyliminodiacetic acid, diammonium propyliminodiacetic acid, butyliminodiacetic acid, disodium butyliminodiacetic acid, butyl Dipotassium iminodiacetate, diammonium butylimidodiacetic acid, pentyliminodiacetic acid, disodium pentylimidodiacetic acid, dipotassium pentylimidate diacetate, amyl Idiammonium diamine diamine, hydroxymercapto iminodiacetic acid, disodium hydroxymethyliminodiacetic acid, dipotassium hydroxymethyliminodiacetic acid, hydroxymethylimine Diammonium diacetate, hydroxyethyliminodiacetic acid, disodium hydroxyethyliminodiacetic acid, dipotassium hydroxyethyliminodiacetic acid, diammonium hydroxyethyliminodiacetic acid, hydroxypropyl Iminodiacetic acid, disodium hydroxypropylimidodiacetic acid, dipotassium hydroxypropyliminodiacetic acid, diammonium hydroxypropyliminodiacetic acid, hydroxybutylimidodiacetic acid, hydroxyl Disodium butyl iminodiacetic acid, dipotassium hydroxybutyl iminodiacetic acid, diammonium hydroxybutyl iminodiacetic acid, hydroxypentylimido diacetic acid, transylpentyl imine 97105852 37 200848552 Disodium bisacetate, dipotassium pentyl iminodiacetate or diammonium hydroxypentylimidate diacetate. A gold film obtained by electrolytic gold plating using an electrolytic gold plating solution according to any one of claims 1 to 5 is obtained. 7. A method of producing a gold film, characterized in that the electroless gold is deposited on a nickel plating film using an electrolytic gold plating solution according to any one of claims 1 to 5. 'It is characterized in that it is applied to the nickel-plated film by using the electrolytic gold plating solution of any one of the applications. 8·—種鎳膜上之金臈 專利範圍第1至5項中 進行電解鍍金而獲得。 97105852 388. The gold enamel on the nickel film is obtained by electrolytic gold plating in the first to fifth patent ranges. 97105852 38
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