200846791 九、發明說明： 【發明所屬之技術領域】 本發明係關於液晶顯示元件之製造過程之一之配向步 驟中所使用之配向裝置，詳細而言係特別有關在大型液晶 顯示元件施以配向處理之配向裝置。 【先前技術】 液晶面板之製造過程中有配向步驟。此係以布來擦動 (rubbing :配向）形成於透明基板（例如玻璃基板）表面 之配向膜，以形成微細溝槽之步驟，用以使液晶分子之分 布均勻，且使液晶分子之配向沿著溝槽排列於特定方向， 藉此遍及液晶面板整面獲得均勻之顯示。 配向形成於玻璃基板之配向膜之一般方法係於圓筒狀 之滾筒之外周面，捲裝植設有絨毛（毛）之布（配向布） 來構成配向滾筒，一面使玻璃基板往特定方向並以特定速 度移動，一面旋轉形成於玻璃基板之配向膜，以配向滾筒 之絨毛來配向。 配向步驟中所使用之以往之配向裝置係將形成有配向 膜之玻璃基板’以該玻璃基板面之法線與重力方向大致平 行之方式保持於台面（stage)上，一面使配向滾筒之旋轉 軸及/或台面往對於重力方向大致垂直之方向移動，一面進 行配向處理。 然而，配向裝置伴隨於液晶顯示器之大型化，其配向 滾筒亦須增長增大。該情況下，隨著配向滾筒之圓筒長度 增長，配向滾筒本身重量變重，將配向滾筒之旋轉軸支持 5 200846791 於水平方向（對於重力方向垂直之方向）時，配向滾筒之 長度方向之中央部由於自重而撓曲（偏芯），無法以均句之 壓力來配向形成於玻璃基板之配向膜全體。其結果，液曰 顯示面板整面顯示出不均勻之顯示，成為顯示品質受損: 觀感不佳之液晶顯示器。200846791 IX. OBJECTS OF THE INVENTION: TECHNICAL FIELD The present invention relates to an alignment device used in an alignment step of one of manufacturing processes of liquid crystal display elements, and more particularly relates to alignment processing in large liquid crystal display elements. Orientation device. [Prior Art] There is an alignment step in the manufacturing process of the liquid crystal panel. This is a step of rubbing (aligning) an alignment film formed on the surface of a transparent substrate (for example, a glass substrate) to form fine grooves for uniform distribution of liquid crystal molecules and alignment of liquid crystal molecules. The grooves are arranged in a specific direction to obtain a uniform display across the entire surface of the liquid crystal panel. The general method of aligning the alignment film formed on the glass substrate is on the outer peripheral surface of the cylindrical drum, and the cloth (hair cloth) of the pile (hair) is wound to form the alignment roller, and the glass substrate is oriented in a specific direction. Moving at a specific speed, the alignment film formed on the glass substrate is rotated to align with the fluff of the roller. In the conventional alignment device used in the alignment step, the glass substrate on which the alignment film is formed is held on the stage such that the normal line of the glass substrate surface is substantially parallel to the direction of gravity, and the rotation axis of the alignment roller is provided. And/or the table surface is moved in a direction substantially perpendicular to the direction of gravity, and the alignment process is performed. However, with the enlargement of the liquid crystal display, the alignment roller has to be increased in diameter. In this case, as the length of the cylinder of the alignment roller increases, the weight of the alignment roller itself becomes heavier, and the rotation axis of the alignment roller supports 5 200846791 in the horizontal direction (the direction perpendicular to the direction of gravity), and the center of the longitudinal direction of the alignment roller The part is deflected by the self-weight (eccentricity), and the entire alignment film formed on the glass substrate cannot be aligned by the pressure of the uniform sentence. As a result, the liquid crystal display panel displays an uneven display on the entire surface, which is a display quality deterioration: a liquid crystal display with poor visibility.
而且，若配向滾筒如上述以撓曲狀態旋轉，則由於配 向滾1¾偏心，因此於配向滾筒產生離心力所造成之搖晃， 無法以均勻之壓力來配向形成於玻璃基板之配向膜全體。 其結果，與上述相同，液晶顯示面板整面顯示出不均句之 顯示，成為顯示品質受損之觀感不佳之液晶顯示器。 、此問4並無法藉由提南配向滚筒之加工精度來應付， 作為解決綠*提案—麵向裝置，其錢低細於由於 配向滾筒之自重所造成之撓曲，從而對於配向膜全體之不 均勻加壓，可實現顯示品質良好之液晶顯示器。' 如第6圖所示，其係將配向滾筒50之旋轉軸保持與重 力方向51平行，並將形成有配向膜之玻璃基板52以該玻 璃基板52面之法線成為與重力方向51呈垂直之方向^方 式’保持於台面53上，藉由旋轉之配向滾筒5〇與保持有 玻璃基板52之平台53之重力方向51之垂直方向之相對移 動，來進行配向處理之綠（參考例如專利文獻1)。 〔專利文獻1〕日本專利2800793號公報 【發明内容】 (發明所欲解決之問題） 而液Qg世代別之玻璃基板大小主要受到展置之處 6 200846791 理能力限制，若以液晶顯示面板開發之當初作為液晶第一 代，則約為300mmX300mm，現在之液晶世代即第七代約為 lSOOmmWOOGmm，今後之第八〜第十代預測約為· x3000mm。 如此一來，由於被施以配向處理之玻璃基板之大型 化，配向裝置必然亦變成大型，伴隨於其，配向裝置之設 置所需要之財面積錢A。因此，需要用以設置配向^ 置之廣大用地及龐大建築物，土地利用效率下降，並且對 於與配向錢之魏錢之土地、賴物之峡費用升高。 對於此問題，「專利文獻丨」所記載之配向裝置係:上 述，可對於玻璃基板之大型化實現顯示品質良好之液晶顯 示器，並且亦具有抑制隨著玻璃基板之大型化，配向裝置 之佔有面積擴大之優點。 但今後若迎向液晶第八〜第十代，則施以配向處理之 玻璃基板大小會極大化，即使不如以往配向裝置等之程 度，提案之配向裝置亦無法避免大型化。 如此一來，伴隨於配向裝置之大型化，會發生配向裝 置之組裝作業空間之確保及有關出貨時之搬運作業之效率 專問題。 ' 特別是有關搬運作業，若搬運之配向裝置達特定大小 以上，則受到道路交通法等法律限制，會發生用以行駛於 公共道路之巾請書細^紐及錢㈣業務之人事費， 亚且由於搬運日之關，錢之自由度可能受限制。 進一步而言，由於使用大型車輛，搬運成本需要大幅 7 200846791 經費’配向裝置之製作費以外之額外經費升高。 因此，本發明係有鑑於上述問題所創作者， 種咐置，錢_大纖，藉細= ϋ向域於基板之配向膜全體，仍可實 良好之液晶顯示器，並且減低與配向裝置出貨時之搬=業 務相關之_錢、成本貞擔，並可抑制設置 衫 佔有面積擴大。 貴 (解決問題之技術手段） 為了解決上述問題，本發明之申請專利範圍工所記 之^明為:種配向裝置，其特徵為：其係於形成在基板之 配°膜’藉由旋轉之配向滾筒來施以配向處理者；配 向裝置具備4要機構部，其具有i對台面控制機構，盆 係控制將形成有配向膜之i對基板之各個予以固定之工對 台面:-面均保持對於重力方向呈平行或以特定角度傾斜 之狀態，一面個別地移動；及1對輔助機構部，其且有配 向滚筒控制機構，其係控制隔著前述主要機構部^立於兩 侧i並分祕裝有配向布之配向滾筒與舰向滾筒所對向 之前述基板之麟、驗及前述配向滾筒之旋轉；前述主 要機構部與前述1對輔助機構部係可分離及連結。 而且，本發明之申請專利範圍第2項所記載之發明係 如申請專利範圍第1項，其特徵為：前述台面之傾产 大於0。且為30。以下。 又 而且，本發明之申請專利範圍第3項所記载之發明係 如申請專利麵第1或2項中任—項，其特徵為：前述主 200846791 3200咖。糊蝴恤⑽W均不超過 面控制機構之.___任項，其特徵為··前述台 (發明之效果）Further, when the alignment roller rotates in the flexed state as described above, the alignment roller 126 is eccentric, so that the alignment roller generates a centrifugal force due to the centrifugal force, and the entire alignment film formed on the glass substrate cannot be aligned with a uniform pressure. As a result, in the same manner as described above, the display of the unevenness is displayed on the entire surface of the liquid crystal display panel, and the liquid crystal display having poor display quality is poorly perceived. This question 4 cannot be dealt with by the processing precision of the Timan alignment roller. As a solution to solve the green* proposal, the device is low in weight and is deflected by the self-weight of the alignment roller, so that the alignment film is entirely Non-uniform pressurization enables a liquid crystal display with good display quality. As shown in Fig. 6, the rotation axis of the alignment roller 50 is kept parallel to the gravity direction 51, and the glass substrate 52 on which the alignment film is formed is perpendicular to the gravity direction 51 with the normal line of the surface of the glass substrate 52. The direction of the method is maintained on the mesa 53 and the alignment processing is performed by the relative movement of the rotating alignment roller 5 〇 and the gravity direction 51 of the stage 53 holding the glass substrate 52 (refer to, for example, the patent document) 1). [Patent Document 1] Japanese Patent No. 2800793 [Draft of the Invention] (Problems to be Solved by the Invention) The size of the glass substrate of the liquid Qg generation is mainly limited by the position of the display 6 200846791, and is developed by a liquid crystal display panel. Originally used as the first generation of liquid crystal, it was about 300mmX300mm. Now the liquid crystal generation is the seventh generation, which is about lSOOmmWOOGmm. The eighth to tenth generation in the future is about x3000mm. As a result, the size of the glass substrate to which the alignment treatment is applied is large, and the alignment device is also required to be large, and the amount of money A required for the arrangement of the alignment device is accompanied. Therefore, it is necessary to set up a large-scale land and large buildings for the distribution of the land, and the land use efficiency is degraded, and the cost of the land of the Wei Qian and the gorge of the property of the money is increased. In the above-mentioned problem, the alignment device described in the "Patent Document" is capable of realizing a liquid crystal display having a good display quality in order to increase the size of the glass substrate, and also suppressing the occupation of the size of the glass substrate. The advantages of expansion. However, in the future, if the liquid crystal is used in the eighth to tenth generations, the size of the glass substrate subjected to the alignment treatment is greatly increased, and even if it is not as good as the conventional alignment device, the proposed alignment device cannot be prevented from being enlarged. As a result, as the size of the aligning device increases, the assembly work space of the aligning device and the efficiency of the transport operation at the time of shipment occur. In particular, if the handling device for transportation is up to a certain size or more, it will be subject to the laws of the Road Traffic Act, etc., and the personnel expenses for the business of the towel and the money (4) for the public road will occur. Due to the transit day, the freedom of money may be limited. Further, due to the use of large vehicles, the cost of transportation needs to be increased by 7 200846791. Therefore, the present invention is based on the above-mentioned problems, the creator, the money _ big fiber, the fine = ϋ 域 于 于 于 于 于 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板 基板Time shift = business-related _ money, cost burden, and can inhibit the expansion of the installed shirt area. Expensive (technical means for solving the problem) In order to solve the above problems, the invention of the present invention is described as a kind of alignment device, which is characterized in that it is attached to a film formed on a substrate by rotating The alignment roller is provided with an alignment processor; the alignment device is provided with a 4 main mechanism portion having an i-to-surface control mechanism, and the basin control controls the work surface of each of the i-pair substrates on which the alignment film is formed: - the surface is maintained a direction in which the direction of gravity is parallel or inclined at a specific angle, and is separately moved; and a pair of auxiliary mechanism portions having an alignment roller control mechanism that is controlled by the main mechanism portion on both sides and divided The alignment of the alignment plate and the ship facing the roller and the rotation of the alignment roller are provided; the main mechanism portion and the pair of auxiliary mechanism portions are separable and connectable. Further, the invention described in claim 2 of the present invention is related to the first aspect of the patent application, characterized in that the dumping of the countertop is greater than zero. And 30. the following. Furthermore, the invention described in claim 3 of the present invention is related to any one of the first or second aspects of the patent application, and is characterized by the above-mentioned main 200846791 3200 coffee. The drapes (10) W are not more than the surface control mechanism. ___, the feature is ···the above (the effect of the invention)
對基觀有配_之】 狀離下《 1*/力心平行如狀肖賴斜，於該 ::缝筒同時於1對基板施以配向處理。而 其====運’於設置場所組裝。 之*PWI 4揮向處效率化、配城置佔有面積 :實：】搬運業務之效率化等良好效果。、 本無^之要旨，則不限於該_樣。 弟—1圖絲村關本發明之配向裝置之實施型態之立 明；，：:::弟1圖之A—A剖面圖。此外’於以下說 加A如第1圖、第2圖所示，以長邊方向方向之第一 木口 b及隔著第—架台1配設於兩舰以長邊方向為χ 9 200846791 方，之1對第二架台2係_體化而形成架台3。第一架台j 及第一木台2均呈現兩面（la、lb)、（2a、2b)約略平行 之平板形狀。 卜於第—架台1之一面la上，固定有兩面4a，4b約略平 仃之平板形狀之線性機構支持體4。線性機構支持體4係該 線性機構支持體4之約略平行面4a，4b對於第-架台1之 前述線性機構支賊4之面la呈垂直，2平面la，如與2 平面1a，4b之各個之交線L1，L2均延伸於X方向。 於線性機構支持體4之兩面4a，4b安裝有第一床台8， 其配設有：磁板6，其係藉由交互改變相鄰磁鐵5之磁極之 磁性’呈麵狀並以«隔並排配置料磁鐵5而被予以 磁化；及1對桌台滑動用導軌7，其係分別隔著磁板6，從 該磁板6約略以等間隔且平行於磁板6而配置。配設於各 個第床台8之磁板6及1對桌台滑動用導執7均延伸於 第一架台1之長邊方向（X方向）。 仏後於各個第一床台8，載置表面形成有配向膜之玻 璃基板9之桌台（table) 1〇係對峙，在與各桌台忉之第一 床台8相對向之面1〇a配設有在與磁板相對向之位置配接 空芯線圈（未圖示）並已模組化之線圈板11，在與桌台滑 動用導轨7相對向之位置配設有1對桌台滑動用滑件12 ·， 桌台1〇係介著桌台滑動用滑件12而滑動自如地由桌台滑 動用導轨7支持。 月 然後，藉由上述磁鐵及空芯線圏來構成線性機構13, 桌台係藉由線性機構13，沿著桌台滑動用導轨7而往第 200846791 一床台8之長邊方向（χ方向）移動。The base is equipped with _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ _ And its ====yun' is assembled at the installation site. *PWI 4 is efficient in the direction of the market, and the area occupied by the city is: Actual:] The efficiency of the handling business is good. The meaning of this is not limited to this. Brother-1, Tusi Village, the implementation of the alignment device of the invention;;:::: A-A cross-sectional view of the brother 1 map. In addition, as shown in the first and second figures, the first wooden opening b in the longitudinal direction and the first gantry 1 are disposed in the longitudinal direction of the two ships as χ 9 200846791. The first gantry 2 is _formed to form the gantry 3. The first stage j and the first table 2 each have a substantially parallel plate shape on both sides (la, lb), (2a, 2b). On one side la of the first stage 1, a linear mechanism support body 4 having a flat shape of two sides 4a, 4b is fixed. The linear mechanism support 4 is about the substantially parallel faces 4a, 4b of the linear mechanism support 4, and the face la of the linear mechanism thief 4 of the first gantry 1 is vertical, 2 planes la, as with the 2 planes 1a, 4b. The intersection lines L1, L2 all extend in the X direction. A first bed 8 is mounted on both sides 4a, 4b of the linear mechanism support 4, and is provided with a magnetic plate 6 which changes the magnetic shape of the magnetic poles of the adjacent magnets 5 by interaction and is separated by The material magnets 5 are magnetized side by side, and a pair of table slide rails 7 are disposed between the magnetic plates 6 at approximately equal intervals and parallel to the magnetic plates 6 via the magnetic plates 6. The magnetic plate 6 and the pair of table sliding guides 7 disposed on each of the bed platforms 8 extend in the longitudinal direction (X direction) of the first gantry 1. Then, on each of the first beds 8, a table 1 on which the glass substrate 9 having the alignment film is formed is placed, and the surface of the table 8 is opposite to the first bed 8 of each table. a is provided with a coil plate 11 which is fitted with an air-core coil (not shown) at a position facing the magnetic plate and is modularized, and is provided with a pair of positions facing the table slide rail 7 The table slide slider 12 is slidably supported by the table slide rail 7 via the table slide slider 12 via the table slide slider 12. Then, the linear mechanism 13 is formed by the magnet and the hollow core ,, and the table is moved along the table slide rail 7 by the linear mechanism 13 to the long side direction of the bed 8 of the 200846791 (χ direction) )mobile.
接著，於1對第二架台2分別立設有1對第二床台支 持體15a，15b ’其係固定、支持第二床台14 ;丨對第二床台 支持體15a，15b彼此間分別藉由位於線性機構支持體4上 之橫向架材16a，16b來橫向架起並連結。此外，設立於各 第=架台2之第二床台支持體⑸，⑼彼此係並排設置於 該第二架台2之長邊方向（X方向），並且分觀置為與線 性機構支持體4所相對向之面4a，牝約略平行。 於線性機構支持體4 _固定、支持於第二床台支持 體15a，15b之各第二床台14，設置有使配向滾筒支^體口 往Θ方向迴旋之配向滾筒角度可變用驅動部ΐ8，並且在與線 性機構支持體4相對向之面17a上，呈、’、 向滾筒支持體迴旋滑動用導執19。 、 -叹配 ^各個第二床台14，支持配向滾筒20之配向滾 :支持體17係對峙，在與各配向滾筒支持體17之 床台14相對向之面17 配向乎衿 ” 一 成圓弧狀地配置在盥配體迴旋滑動用滑件 ==而由配向滚筒支持體迴旋滑動用導㈣ 件I己向滾筒甘支持體17之兩端部設置有：主軸滑動用導 件（未圖不），其係將配向滾筒2 = (未圖示）旋轉自如地支持之^同夾具 往卓么10夕古f 王軸22a, 22b之各個， 桌之方向誘導；主軸滑動用驅動部（未圖示），其 200846791 =使f輛A 22b沿著主軸滑動用導件滑動；及配向滾筒 距肩整部（未圖不），其係控制主軸取挪往桌台仞 方向之滑動距離。 1對主軸22a，22b係往各個之旋轉朝互相對向之方向延 伸（驅動侧）主軸22a之旋轉軸之配向滾筒2〇未被支 持側之K5係甘欠合固定於對於配向滾筒2〇賦予旋轉運動之 配向滾筒旋轉驅動部23，另—（從動侧）主軸挪之旋轉 軸係旋轉自如地嵌合於配向滾筒20。 接著，說明有關使用上述結構之配向裝置之配向方 法。首先，於桌台1〇之與第一床台8相反侧之面1〇b上， 藉由真空吸附等方法來固定、保持表面形成有配向膜之玻 璃基板9。 然後’驅動配向滾筒角度可變用驅動部，使配向滾 筒支持體17介著配設於配向滾筒支持體17之配向滾筒支 持體迴旋滑動用滑件21，來沿著配設於第二床台14之配向 滾筒支持體迴旋滑動用導執19迴旋滑動，將配向滾筒2〇 設定於所需之配向角度。 接著，個別地驅動設置於各配向滾筒支持體17之各個 主軸滑動用驅動部，一面以主軸調整部控制滑動距離，一 面使主軸22a，22b沿著主軸滑動用導件往玻璃基板9方向 滑動，設定配向滚筒20與玻璃基板9之距離，以便遍及形 成於玻璃基板9之配向膜整面，以所需壓力均勻地施加配 向處理。 如此，若配向滚筒20對於玻璃基板9之角度及距離之 12 200846791 設定完成，旋轉配向滾筒旋轉驅動部23，介著嵌合固定於 配向滾筒旋轉驅動部23之主軸22a，將旋轉運動傳遞至配 向滚筒20 ’以所需之旋轉速度來使配向滚筒2〇旋轉。 然後，藉由線性機構13，將固定、保持表面形成有配 向膜之玻璃基板9之桌台1〇，介著桌台滑動用滑件12來沿 著桌台滑動用導執7，以特定之一定速度移動於玻璃基板， 同日守藉由安裝於旋轉之配向滾筒20之配向布（未圖示）， φ 均勻地配向形成於玻璃基板9之表面之配向膜。 其後，若遍及形成於玻璃基板9之配向膜整面結束配 向處理，則驅動主軸滑動用驅動部，使主軸22a，22b沿著 主軸滑動用導件’往與玻璃基板9相反之方向滑動，使兩 端部由主軸22a，22b支持之配向滾筒2〇移動至退避位置。 最後’從桌台10上，取下經施以配向處理之玻璃基板， 結束一連串之配向步驟。之後，藉由重複該步驟，進行許 多玻璃基板之配向處理。 _ 此情況下，若配向裝置之第一架台1設置於與重力方 向呈垂直之面上，則固定、保持玻璃基板9之桌台1〇之面 10b會與重力方向平行，故玻璃基板9係於與重力平行之狀 態下被施以配向處理。 然而，本發明之配向裝置為了可對應伴隨於玻璃基板 大型化之裝置大型化’構成為可自如地分離及連結，以減 低有關搬運之時間負擔、成本負擔。 具體而s，於本實施型態，如第3圖所示而成為配向 裝置主要分料3部分之結構。丨個部分絲機構部24， 13 200846791 =備^第架台丨；線性機構支持體4 ’其係固定於 trrt台8’其係配設於線性機構支持體4之兩二 及桌口 1G’其係介著線性機構13而由第—床台8 。’ 其他2個部分為辅助機構部^，位於 主 其具備:1對第二架台2;第二床 :二说’係立設於各個第二架台2 ;第二床台μ 由弟二床台鱗體以，15b支持；配向 j =，22b而支持於配向滾筒：^ 向滾同肢可_驅動部18，其係由第二床台14配 將迴旋運動賦予配向滚筒支持體17。 、玉 力入離之1個主機構部24及2個輔助機構部乂 加入松向緒16a，16b來予以連結，藉此可於交貨去 將分離搬運之_裝倾裝射供仙之狀能。 炎丨t果:^各個機構部係作為配向震置全體來謀 求小型化、輕1化，刪減搬運時之人从勞力，改 制是本㈣之配向裝置係__翁配向默 ^璃基板對於架台保持垂直之狀態下，進行配向處理之機 構，因此即使玻璃基板大型化，仍可抑制配向裝置之短邊 ^之充分涵蓋在減道路交触之需要特別申請 業務之覓度3200mm以内。因此，认板、中山 丰㈣玫㈣女^ 搬運時不需要繁雜的 手績業務，絲有分離之各機構部之車輛可鎌制地行駛 於公共道路而搬運至搬運去處。 14 200846791 、此外配向裝置之分離數越多越容易處理，但分離及 連結之人与隨其增加。因此，綜合地觸處理、分離及 連、。搬運等之作業效率，來決定將配向裝置分離為多少Next, a pair of second bed supports 15a, 15b' are fixed to the second gantry 2, and the second bed 14 is fixed and supported; and the second bed support bodies 15a, 15b are respectively separated from each other. The transverse frames 16a, 16b on the linear mechanism support 4 are laterally erected and joined. Further, the second bed support members (5), which are provided on the respective gantry 2, are arranged side by side in the longitudinal direction (X direction) of the second gantry 2, and are placed in opposition to the linear mechanism support body 4. Relative to the face 4a, the 牝 is approximately parallel. The linear mechanism support 4 _ fixed and supported by the second bed 14 of each of the second bed support bodies 15a, 15b is provided with a matching drum angle variable drive portion for rotating the alignment roller support body in the Θ direction Ϊ́8, and on the surface 17a facing the linear mechanism support 4, the guide 19 is slid to the drum support. - sighing each of the second beds 14 and supporting the aligning rollers of the aligning rollers 20: the supporting bodies 17 are facing each other, and the opposing faces 17 of the bed 14 of the respective directional roller supports 17 are aligned with each other. Arranged in an arc shape in the 盥 ligand rotation sliding slider == and the directional roller support is used to slewing the sliding guide (4). I have provided a guide for the spindle sliding support at both ends of the roller shank support 17 (not shown) No), the aligning roller 2 = (not shown) is rotatably supported by the same clamp to the Zhuo 10 10 夕 古 f Royal axles 22a, 22b, the direction of the table is induced; the spindle sliding drive unit (not As shown in the figure), its 200846791 = sliding the f A 22b along the guide for sliding the spindle; and the alignment roller to the entire shoulder (not shown), which controls the sliding distance of the spindle to the table. The main shafts 22a, 22b are rotated toward the mutually opposing directions (the driving side) of the rotating shaft of the main shaft 22a, and the K5 system of the unsupported side is fixed to the rotation of the counter roller 2 The moving alignment roller rotates the driving portion 23, and the other (slave side) spindle The rotating shaft is rotatably fitted to the aligning cylinder 20. Next, an alignment method using the aligning device having the above configuration will be described. First, on the opposite side of the table 1 from the first bed 8 The glass substrate 9 having the alignment film formed on the surface is fixed and held by a method such as vacuum adsorption. Then, the driving roller having the variable angle of the alignment roller is driven to dispose the alignment roller support 17 to the alignment roller support 17 . The alignment roller support body is slidably slid along the guide roller 19 of the aligning roller support disposed on the second bed 14 to set the aligning roller 2 to a desired alignment angle. Then, the main shafts 22a and 22b are slid in the direction of the glass substrate 9 along the main shaft sliding guides while controlling the sliding distance by the main shaft adjusting unit while individually driving the main shaft sliding drive units provided in the respective aligning roller supports 17 . The distance between the alignment roller 20 and the glass substrate 9 is set so as to uniformly apply the alignment treatment at a desired pressure throughout the entire surface of the alignment film formed on the glass substrate 9. Thus, The setting of the angle of the roller 20 to the glass substrate 9 and the distance 12 200846791 is completed, and the rotary alignment drum rotation driving unit 23 is fitted and fixed to the main shaft 22a of the alignment drum rotation driving unit 23, and the rotational motion is transmitted to the alignment roller 20'. The alignment roller 2 is rotated at a desired rotation speed. Then, the table 1 is formed by the linear mechanism 13 to form the glass substrate 9 on which the alignment film is formed, and the table slide slider 12 is interposed. The guide 7 for sliding along the table is moved to the glass substrate at a specific constant speed, and the aligning cloth (not shown) attached to the rotating alignment roller 20 on the same day is uniformly formed on the glass substrate 9 by φ. The alignment film of the surface. Then, when the alignment treatment is completed over the entire surface of the alignment film formed on the glass substrate 9, the spindle sliding drive unit is driven to slide the spindles 22a and 22b in the opposite direction to the glass substrate 9 along the spindle slide guides. The alignment rollers 2, which are supported by the main shafts 22a, 22b, are moved to the retracted position. Finally, from the table 10, the glass substrate subjected to the alignment treatment is removed, and a series of alignment steps are completed. Thereafter, by repeating this step, the alignment treatment of many glass substrates is performed. _ In this case, if the first stage 1 of the alignment device is disposed on a surface perpendicular to the direction of gravity, the surface 10b of the table 1 that fixes and holds the glass substrate 9 is parallel to the direction of gravity, so the glass substrate 9 is The alignment treatment is applied in a state parallel to gravity. However, the alignment device of the present invention can be freely separated and connected in order to increase the size of the device in accordance with the increase in the size of the glass substrate, so as to reduce the time burden and cost burden of the transportation. Specifically, in the present embodiment, as shown in Fig. 3, it becomes a structure in which the main portion of the alignment device is divided into three parts. One part of the wire mechanism part 24, 13 200846791 = the second stage support; the linear mechanism support 4' is fixed to the trrt table 8' which is disposed on the two of the linear mechanism support 4 and the table 1G' The first bed 8 is connected to the linear mechanism 13. 'The other two parts are the auxiliary mechanism department ^, which is located in the main: 1 pair of second pedestal 2; the second bed: two said 'the system is set up on each second gantry 2; the second bed y is from the second pedestal The scale is supported by 15b; the alignment j =, 22b is supported by the alignment roller: ^ The same leg can be driven by the second leg 14 to impart a swirling motion to the alignment roller support 17. The main body department 24 and the two auxiliary agencies of Yuli are joined by Song Xiangxu 16a, 16b to connect them, so that they can be dumped and transported for delivery. can.丨 丨 果 : ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ Since the gantry is kept in a vertical state and the aligning mechanism is performed, even if the glass substrate is enlarged, the short side of the aligning device can be suppressed to fully cover the need for a special application service within 3,200 mm. Therefore, the identification board, Zhongshan Feng (4) Mei (4) female ^ do not need to carry out complicated business operations when transporting, and the vehicles of the various agencies that are separated from each other can be transported to the public roads and transported to the place of transportation. 14 200846791 In addition, the more separations of the aligning devices, the easier it is to handle, but the number of people who are separated and connected increases. Therefore, comprehensive treatment, separation and connection. How to separate the alignment device by the efficiency of handling, etc.
—本發_將2片麵基板，以侧之配向滾筒同時進 订配向處理之機構’因此配向處理相對魏向裝置之佔有 面積之作業效率高，成為可壓低製造成本之裝置。 斤而且，採與上述本實施型態相同之結構，亦可實現如 =圖所示之型態之配向裝置。其係使固定、保持有由線 性機構支持體4之兩侧所支持之1對桌台1〇之玻璃基板9 之面1%，傾斜為對於架台1G之垂線X往架台1開放之狀 態，於形成有配向膜之玻璃基板對於重力方向傾斜之狀態 下進行配向處理。 藉此減輕知加在玻璃基板之重力方向侧之端面上， 朝向與玻璃基板面平行之方向之自重，可於玻璃基板挽 曲、配向裝置撓曲及配向賴撓曲甚少之狀態下施以配向 處理。 、此情況下，若考慮_基板撓曲、配向裝置撓曲及配 向滾筒撓曲所造成之配向處理之面不均句之極限、與配向 農置之短邊方向之尺寸之極限，則桌台1〇之蚊、保持玻 璃基板9之面l〇b對於架台1之垂線之傾斜角以宜大於〇。 且為30。以下。 、此外，此型態之配向裝置亦如第5圖所示，可採分離 為1個主機構部24、2個輔助機構部25及橫向架材16a，16b 15 200846791 及連結自如之結構。藉此，配向裝置可減低出貨時之搬運 業務相關之時間負擔、成本負擔’可抑制設置時所必要之 佔有面積擴大，藉由該配向裝置可實現顯示品質良好之液 晶顯示器。 如以上所說明，本發明之配向裝置之效果係藉由分離 大型化及重量化之配向裝置，來謀求搬運之效率化，並且 可抑制設置時所必要之佔有面積擴大。 而且，即使被施以配向處理之玻璃基板大型化，仍可 減低配向滾筒之自重所造成之撓曲、及固定、保持玻璃基 板之台面之自重所造成之撓曲之影響，即使為大型玻璃基 板，由於能以均勻之壓力來配向形成於玻璃基板之配向膜 全體’因此可實現顯示品質良好之液晶顯示器。 而且，由於在使形成於玻璃基板之配向膜對於重力方 向呈平行或以特定角度傾斜之狀態下，進行配向處理，因 此可減低配向處理時所產生之來自配向布等之塵埃附著於 配向膜，可確保良好品質。 進一步而言，於配向滾筒交換時，可維持安裝於配向 哀置之妥勢來取下並保管配向滾筒，而且可維持保管姿勢 ^將配向滾筒安裝於配向裝置。因此，發揮於配向滾筒之 乂換作業巾’以少許作業空間即可完成，且由於配向滾筒 之姿勢變化少，因此容祕理等良好效果。 16 200846791 【圖式簡單說明】 第1圖係表7F有關本發明之配向裝置之實施型態之立體 圖。 第2圖為第1圖之A-A剖面圖。 第3圖係时雜態來表衬關本發明之_裝置之 施型態之說明圖。 、 側=圖絲示有關本翻之配崎置之其他實施型態之 侦Ϊ 以刀離狀悲來表示有關本發明之配向裝置之豆 他貫施型態之說明圖。 f置八 第6圖係表示以往例之立 體圖 【主要元件符號說明】 1 第一架台 la、lb 第一架台面 2 第二架台 2a、2b 第二架台面 3 架台 4 線性機構支持體 4a、4b 線性機構支持體 5 磁鐵 6 磁板 7 桌台滑動用導執 8 第一床台 200846791- The present invention is a mechanism for simultaneously aligning the two sides of the substrate with the alignment roller on the side. Therefore, the alignment process has a high work efficiency with respect to the occupied area of the device, and the device can be reduced in manufacturing cost. Further, in the same configuration as the above-described embodiment, an alignment device of the type shown in Fig. can be realized. This is to fix and hold 1% of the surface of the glass substrate 9 of one pair of tables supported by the both sides of the linear mechanism support 4, and is inclined to be open to the gantry 1 for the perpendicular X of the gantry 1G. The glass substrate on which the alignment film is formed is subjected to an alignment treatment in a state where the direction of gravity is inclined. Therefore, the self-weight in the direction parallel to the surface of the glass substrate can be reduced on the end surface on the gravity direction side of the glass substrate, and can be applied in a state in which the glass substrate is bent, the alignment device is deflected, and the alignment is less. Orientation processing. In this case, if the limit of the surface unevenness sentence of the alignment treatment caused by the deflection of the substrate, the deflection of the alignment device, and the deflection of the alignment roller, and the limit of the dimension of the short side direction of the alignment, the table is considered. The angle of inclination of the surface of the glass substrate 9 to the vertical line of the gantry 1 is preferably greater than 〇. And 30. the following. Further, as shown in Fig. 5, the alignment device of this type can be separated into one main mechanism portion 24, two auxiliary mechanism portions 25, and lateral frame members 16a, 16b 15 200846791 and a freely coupled structure. As a result, the aligning device can reduce the time burden and cost burden associated with the transportation business at the time of shipment. The occupied area required for the installation can be suppressed, and the liquid crystal display having good display quality can be realized by the aligning device. As described above, the effect of the aligning device of the present invention is to improve the efficiency of transportation by separating the aligning device which is increased in size and weight, and it is possible to suppress an increase in the occupied area necessary for installation. Further, even if the glass substrate subjected to the alignment treatment is increased in size, the deflection caused by the self-weight of the alignment roller and the deflection caused by the self-weight of the mesa of the glass substrate can be reduced, even if it is a large glass substrate. Since the entire alignment film formed on the glass substrate can be aligned with a uniform pressure, a liquid crystal display having good display quality can be realized. In addition, since the alignment treatment is performed in a state where the alignment film formed on the glass substrate is parallel to the direction of gravity or inclined at a specific angle, the dust from the alignment cloth or the like generated during the alignment treatment can be reduced from adhering to the alignment film. It ensures good quality. Further, when the alignment drum is exchanged, the alignment roller can be removed and stored, and the alignment roller can be removed and the storage position can be maintained. The alignment roller is attached to the alignment device. Therefore, the change of the work towel which is applied to the aligning roller can be completed in a small working space, and since the posture of the aligning roller is small, the effect is good. 16 200846791 [Simplified description of the drawings] Fig. 1 is a perspective view showing an embodiment of the alignment device of the present invention. Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1. Fig. 3 is an explanatory view showing the mode of the apparatus of the present invention. , Side = Figure shows the other types of implementations of the 配 之 配 置 置 Ϊ Ϊ Ϊ Ϊ Ϊ Ϊ 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 f 八八图图 shows a perspective view of a conventional example [Description of main component symbols] 1 First stage la, lb First stage 2 Second stage 2a, 2b Second stage 3 Stand 4 Linear mechanism supports 4a, 4b Linear mechanism support 5 magnet 6 magnetic plate 7 table slide guide 8 first bed 200846791
9 玻璃基板 10 桌台 10a、10b 桌台面 11 線圈板 12 桌台滑動用滑件 13 線性機構 14 第二床台 14a 第二床台面 15a、15b 第二床台支持體 16a、16b 橫向架材 17 配向滾筒支持體 17a 配向滾筒支持體面 18 配向滾筒角度可變用驅動部 19 配向滾筒支持體迴旋滑動用導軌 20 配向滾筒 21 配向滾筒支持體迴旋滑動用滑件 22a、22b 主轴 23 配向滾筒旋轉驅動部 24 主機構部 25 輔助機構部 189 Glass substrate 10 Table table 10a, 10b Table top 11 Coil plate 12 Table slide slider 13 Linear mechanism 14 Second bed 14a Second bed surface 15a, 15b Second bed support 16a, 16b Horizontal frame 17 Alignment roller support body 17a Alignment roller support body surface 18 Alignment roller angle variable drive unit 19 Alignment roller support body Swirling slide guide rail 20 Alignment roller 21 Alignment roller support body Swirling slide sliders 22a, 22b Spindle 23 Alignment drum rotation drive unit 24 main mechanism unit 25 auxiliary mechanism unit 18