200842105 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種透射電鏡微柵及其製備方法。 【先前技術】 在透射電子顯微鏡中’多孔碳支持膜（微栅）係用於 承載粉末樣品’進行透射電子顯微鏡高分辨像（HRTEM)觀 祭的重要工具。隨著奈米材料研究的不斷發展，微栅在奈 米材料的電子賴學表_域的躺日益廣泛。紐技術 中，該應祕透射電子顯微鏡賴栅通常係在綱或錄網 等金屬網格上覆蓋—層多孔有機膜，再蒸鍍—層非晶碳膜 製成的。然而’在實際應用中，尤其在觀察尺寸小於5太 =的顆粒的透射電鏡高分娜時，微栅中的非晶碳膜對= X顆粒的透射電鏡高分辨像觀察的影響报大。 必要有itr ’提供—概射電賴栅及其㈣方法實為 【發明内容】 付效果更好地透射電鏡高分辨像。 -種透射電鏡微柵’其包括一金 :透射電鏡微柵進—步包括一奈米碳管薄二= 不未唆管_結構覆蓋在金I網格上。’、、、、、4〜 該奈米碳管薄膜結構包括多 又重疊設置。 不水石反官溥膜交 母層奈米石炭管薄膜為多 排列的奈Μ管束組成㈣膜結構。彳連且擇優取向 200842105 ‘ 該奈米碳管薄膜中具有多個微孔，該微孔的孔徑 為1奈米〜1微米。 一種透射電鏡微柵的製備方法，其包括以下步 * 驟：從奈米碳管陣列中拉取獲得奈米碳管薄膜；將奈 米碳管薄膜覆蓋在一金屬網格上；及使用有機溶劑處 理使該奈米碳管薄膜和金屬網格結合緊密。 進一步包括將多個奈米碳管薄膜相互交叉地重 疊形成一多層奈米碳管薄膜結構，並覆蓋在金屬網格 • 上。 該多層奈米碳管薄膜結構可預先通過有機溶劑 處理。 該有機溶劑為乙醇、曱醇、丙酮、二氯乙烷或氣 仿。 上述從奈米碳管陣列拉取獲得奈米碳管薄膜的 方法包括以下步驟：從奈米碳管陣列中選定一定寬度 0 的多個奈米碳管片斷；以及以一定速度沿基本垂直于 奈米碳管陣列生長方向拉伸該多個奈米碳管片斷，以 形成一連續的奈米碳管薄膜。 上述奈米碳管陣列的製備方法包括以下步驟：提 供一平整基底；在基底表面均勻形成一催化劑層；將 上述形成有催化劑層的基底在700〜900°C的空氣中退 火約30分鐘〜90分鐘；以及將處理過的基底置於反應 爐中，在保護氣體環境下加熱到500〜740°C，然後通 入碳源氣反應約5〜30分鐘，生長得到高度為200〜400 8 200842105 • 微米的奈米碳管陣列。 上述使用有機溶劑處理的方法包括通過試管將 有機溶劑滴落在奈米碳管薄膜表面浸潤整個奈米碳 管薄膜，或將上述形成有奈米碳管薄膜的金屬網格整 個浸入盛有有機溶劑的容器中浸潤。 相較於先前技術，所述的透射電鏡微栅及其製備 方法，其通過從超順排奈米碳管陣列可連續抽出奈米 碳管薄膜並覆蓋在金屬網格上，方法簡單、快捷，可 ^ 用於批量製備性質穩定的透射電鏡用微栅。同時，利 用奈米碳管的吸附特性，有助於觀察尺寸小於5nm的 奈米顆粒的透射電鏡南分辨像。 【實施方式】 以下將結合附圖對本發明作進一步之詳細說明。 請參閱圖1，本發明實施例透射電鏡微柵的製備方 法主要包括以下幾個步驟： 0 步驟一：提供一奈米碳管陣列，優選地，該陣列 為超順排奈米碳管陣列。 本實施例中，超順排奈米碳管陣列的製備方法採 用化學氣相沉積法，其具體步驟包括：（a)提供一平 整基底，該基底可選用P型或N型矽基底，或選用形 成有氧化層的矽基底，本實施例優選為採用4英寸的 石夕基底；（b )在基底表面均勻形成一催化劑層，該催 化劑層材料可選用鐵（Fe)、鈷（Co)、鎳（Ni)或其 任意組合的合金之一；（c)將上述形成有催化劑層的 9 200842105 基底在700〜900t的空氣中退火約30分鐘〜90分鐘； (d)將處理過的基底置於反應爐中，在保護氣體環 境下加熱到500〜740°C，然後通入碳源氣體反應約 5〜30分鐘，生長得到超順排奈米碳管陣列，其高度為 200〜400微米。該超順排奈米碳管陣列為多個彼此平 行且垂直於基底生長的奈米碳管形成的純奈米碳管 陣列。通過上述控制生長條件，該超順排奈米碳管陣 列中基本不含有雜質，如無定型碳或殘留的催化劑金 屬顆粒等。該奈米碳管陣列中的奈米碳管彼此通過凡 德瓦爾力緊密接觸形成陣列。 本實施例中碳源氣可選用乙炔等化學性質較活潑 的碳氫化合物，保護氣體可選用氮氣、氨氣或惰性氣 步驟二：從上述奈采碳管陣列中抽取獲得一定寬 度和長度的奈米碳管薄膜。 採用一拉伸工具從奈米碳管陣列中拉取獲得奈米 碳管薄膜。其具體包括以下步驟：（a)從上述奈米碳 管陣列中選定一定寬度的多個奈米碳管片斷，本實施 例優選為採用具有一定寬度的膠帶接觸奈米碳管陣 列以選定一定寬度的多個奈米碳管片斷；（b)以一定 速度沿基本垂直于奈米碳管陣列生長方向拉伸該多 個奈米碳管片斷，以形成一奈米碳管薄膜。 在上述拉伸過程中，該多個奈米碳管片斷在拉力 作用下沿拉伸方向逐漸脫離基底的同時，由於凡德瓦 200842105 爾力作用，該選定的乡個奈米碳Η斷分別與其 米碳管片斷首尾相連地連續地被拉出，從而形成―二 米碳管薄膜。該奈米碳管薄膜為定向排列的多個太: 碳管束首尾相連形成的具有—定寬度的奈米石炭;薄 膜。該奈米碳管薄財奈米碳管的排財向基本平一 于奈米碳管薄膜的拉伸方向。 本實施例中，該奈米碳管薄膜的寬度200842105 IX. Description of the Invention: [Technical Field] The present invention relates to a TEM micro-grid and a method of preparing the same. [Prior Art] In a transmission electron microscope, a 'porous carbon support film (microgrid) is used to carry a powder sample' as an important tool for observation of a high-resolution image of a transmission electron microscope (HRTEM). With the continuous development of nanomaterial research, microgrids are increasingly lie in the field of nanomaterials. In the New Technology, the TEM of the transmission electron microscope is usually made by covering a porous metal film on a metal mesh such as a mesh or a recording net, and then vapor-depositing an amorphous carbon film. However, in practical applications, especially when observing the transmission electron microscopy of particles having a size smaller than 5 too =, the effect of the amorphous carbon film in the micro-gate on the observation of the high-resolution image of the X-ray of the X-ray is large. It is necessary to have itr' provided - the generalized electric grid and its (4) method are practical. [Summary of the Invention] The TEM high resolution image is better. A TEM microgrid </ RTI> comprising a gold: TEM microgrid step comprising a carbon nanotube thin two = no untwisted tube _ structure overlying the gold I grid. ',,,,, 4~ The carbon nanotube film structure includes multiple overlapping layers. The non-water stone anti-burst film is the nano-carbon nanotube film composed of a multi-arranged tube bundle (4) membrane structure. Qilian and preferred orientation 200842105 ‘The carbon nanotube film has a plurality of micropores, and the pore size of the micropores is 1 nm to 1 μm. A method for preparing a transmission electron microstrip microgrid, comprising the steps of: drawing a carbon nanotube film from a carbon nanotube array; covering the carbon nanotube film on a metal grid; and using an organic solvent The treatment combines the carbon nanotube film and the metal mesh tightly. Further, the method comprises overlapping a plurality of carbon nanotube films on each other to form a multi-layered carbon nanotube film structure and covering the metal mesh. The multilayered carbon nanotube film structure can be previously treated with an organic solvent. The organic solvent is ethanol, decyl alcohol, acetone, dichloroethane or an imitation. The above method for extracting a carbon nanotube film from a carbon nanotube array comprises the steps of: selecting a plurality of carbon nanotube segments having a width of 0 from a carbon nanotube array; and substantially perpendicular to the nanosphere at a certain speed The carbon nanotube array grows to stretch the plurality of carbon nanotube segments to form a continuous carbon nanotube film. The method for preparing the above carbon nanotube array comprises the steps of: providing a flat substrate; uniformly forming a catalyst layer on the surface of the substrate; and annealing the substrate on which the catalyst layer is formed in air at 700 to 900 ° C for about 30 minutes to 90 Minutes; and the treated substrate is placed in a reaction furnace, heated to 500-740 ° C under a protective gas atmosphere, and then reacted with carbon source gas for about 5 to 30 minutes to grow to a height of 200 to 400 8 200842105 • Micron carbon nanotube array. The above method for treating with an organic solvent comprises: dipping an organic solvent onto a surface of a carbon nanotube film by a test tube to infiltrate the entire carbon nanotube film, or immersing the metal mesh formed with the carbon nanotube film described above in an organic solvent; Infiltrated in the container. Compared with the prior art, the TEM micro-grid and the preparation method thereof are capable of continuously extracting a carbon nanotube film from a super-sequential carbon nanotube array and covering the metal grid, and the method is simple and quick. Can be used for batch preparation of stable micro-gates for transmission electron microscopy. At the same time, the adsorption characteristics of the carbon nanotubes are helpful for observing the TEM south resolution image of nanoparticles having a size of less than 5 nm. [Embodiment] Hereinafter, the present invention will be further described in detail with reference to the accompanying drawings. Referring to FIG. 1, a method for preparing a TEM micro-gate according to an embodiment of the present invention mainly includes the following steps: 0 Step 1: Providing an array of carbon nanotubes, preferably, the array is a super-sequential carbon nanotube array. In this embodiment, the method for preparing the super-sequential carbon nanotube array adopts a chemical vapor deposition method, and the specific steps include: (a) providing a flat substrate, the substrate may be selected from a P-type or N-type germanium substrate, or selected The ruthenium substrate formed with the oxide layer is preferably a 4-inch stone substrate; (b) a catalyst layer is uniformly formed on the surface of the substrate, and the catalyst layer material may be iron (Fe), cobalt (Co) or nickel. (Ni) or one of alloys of any combination thereof; (c) annealing the above-mentioned 9 200842105 substrate on which the catalyst layer is formed in air of 700 to 900 t for about 30 minutes to 90 minutes; (d) placing the treated substrate In the reaction furnace, it is heated to 500 to 740 ° C in a protective gas atmosphere, and then reacted with a carbon source gas for about 5 to 30 minutes to grow to obtain a super-aligned carbon nanotube array having a height of 200 to 400 μm. The super-sequential carbon nanotube array is a plurality of pure carbon nanotube arrays formed of carbon nanotubes that are parallel to each other and are grown perpendicular to the substrate. By controlling the growth conditions described above, the super-sequential carbon nanotube array contains substantially no impurities such as amorphous carbon or residual catalyst metal particles. The carbon nanotubes in the array of carbon nanotubes are in close contact with each other to form an array by van der Waals forces. In the present embodiment, the carbon source gas may be a chemically active hydrocarbon such as acetylene, and the protective gas may be nitrogen, ammonia or inert gas. Step 2: Extracting a certain width and length from the above-mentioned carbon nanotube array. Carbon tube film. A carbon nanotube film was obtained by pulling from a carbon nanotube array using a stretching tool. Specifically, the method comprises the following steps: (a) selecting a plurality of carbon nanotube segments of a certain width from the carbon nanotube array; in this embodiment, it is preferred to contact the carbon nanotube array with a tape having a certain width to select a certain width. a plurality of carbon nanotube segments; (b) stretching the plurality of carbon nanotube segments at a rate substantially perpendicular to the growth direction of the carbon nanotube array to form a carbon nanotube film. During the above stretching process, the plurality of carbon nanotube segments are gradually separated from the substrate in the stretching direction under the action of tension, and the selected carbon nanotubes of the selected towns are separated from each other by the van der Waals 200842105 The carbon nanotube segments are continuously pulled out end to end to form a "m 2 carbon nanotube film." The carbon nanotube film is a plurality of aligned rows: a carbon nanotube bundle formed by end-to-end formation of a carbon nanotube having a constant width; a thin film. The carbon nanotubes of the carbon nanotubes are basically flattened in the direction of stretching of the carbon nanotube film. In this embodiment, the width of the carbon nanotube film
陣列所生㈣絲的尺寸制，該奈米碳管薄膜= 度不限，可根據實際f求制得。本實_中採用4英 寸的基底生長超順排奈米碳管陣列，該奈米硬管薄膜 的見度可為1cm〜10cm。 可以理解的係，可將多層上述獲得的奈米碳管薄 膜以預定的角度層層堆疊形成多層奈米後管薄膜結 ，’進-步地’可使时機溶劑處理該多層奈米碳管 薄膜形成微孔薄膜結構。 由於本實施例步驟一中提供的超順排奈米碳管陣 列中的奈米&官非常純淨，且由於奈米碳管本身的比 表面積非常大，所以該奈米碳管薄膜本身具有較強的 枯性。多層奈米碳管薄膜之間由於凡德瓦爾力緊密連 接形成穩定的多層奈米碳管薄膜結構。該駭的角度 可根據而求5又定為相同的角度或不同的角度。該奈米 碳管薄膜結構的層數不限。 、…可>以理解的係’可通過試管將有機溶劑滴落在奈 求碳管薄膜表面浸潤整個奈米後管薄膜。或者，也可 11 200842105 將上述奈米碳管薄膜通過一固定框架固定，然後整個 浸入盛有有機溶劑的容器中浸潤。該有機溶劑為揮發 性有機溶劑，如乙醇、甲醇、丙酮、二氯乙烷或氯仿， 本實施例中採用乙醇。該多層奈米碳管薄膜經有機溶 劑浸潤處理後，在揮發性有機溶劑的表面張力的作用 下，奈米碳管薄膜中的平行的奈米碳管片斷會部分聚 集成奈米碳管束。另外，該奈米碳管薄膜中奈米碳管 聚集成束，使得該奈米碳管薄膜中平行的奈米碳管束 之間基本相互間隔，且多層奈米碳管薄膜中的奈米碳 管束交叉排列形成微孔結構。這些微孔係由順序排列 而又互相交疊的奈米碳管，以及奈米碳管束構成的。 本技術領域技術人員應明白，本實施例奈米碳管 薄膜結構中的微孔結構與奈米碳管薄膜的層數有 關，當層數越多時，所形成的微孔結構的孔徑越小。 例如，當層數為四層時，微孔的尺寸分佈範圍大約從 幾個奈米到幾百奈米。這些微孔可以支持奈米顆粒， 奈米線，奈米棒等，以用來進行透射電鏡觀察分析。 另外，本實施例還可利用將多層奈米碳管薄膜部 分堆疊形成具有任意寬度和長度的微孔薄膜結構，不 受本實施例上述方法從奈米碳管陣列直接拉出的奈 米碳管薄膜的寬度限制。 步驟三：將上述獲得的奈米碳管薄膜結構覆蓋在 一用於透射電鏡中的金屬網格上，並使用有機溶劑處 理使該微孔薄膜結構和金屬網格結合緊密。 12 200842105 該金屬網格材料為銅或其他金屬材料，該金屬網 格的孔徑遠大于奈米碳管薄膜的微孔孔徑。該有機溶 劑為揮發性有機溶劑，如乙醇、曱醇、丙酮、二氯乙 烷或氣仿。該有機溶劑可直接滴在奈米碳管薄膜上， 使該微孔薄膜結構和金屬網格結合緊密。 步驟四：待有機溶劑揮發後，沿金屬網格邊沿去 除多餘的微孔薄膜，即製成透射電鏡微柵。 可以理解，本實施例透射電鏡微柵結構的製備方 法也可直接將抽取獲得的一奈米碳管薄膜直接覆蓋 在金屬網格上，再將另一或更多的奈米碳管薄膜依次 交叉地覆蓋上一奈米碳管薄膜。然後再使用有機溶劑 處理上述奈米碳管薄膜從而得到透射電鏡微柵結構。 請參閱圖2及圖3,本實施例依照上述方法製備得 到的透射電鏡微柵結構20，其包括一金屬網格22及 覆蓋在金屬網格22表面的奈米碳管薄膜結構24。該 奈米碳管薄膜結構24包括一層奈米碳管薄膜，或者 也可為多層奈米碳管薄膜按照預定的角度堆疊形成 的微孔薄膜結構。該微孔薄膜的孔徑與奈米碳管薄膜 的層數有關，可為1奈米〜1微米。 請參閱圖4,為本發明實施例透射電鏡微栅結構中 採用的多層奈米碳管薄膜的掃描電鏡照片。該多層奈 米碳管薄膜以90°角重疊形成微孔薄膜結構，每一層 奈米碳管薄膜中的奈米碳管均定向排列，兩奈米碳管 薄膜之間通過凡德瓦爾力結合。該奈米碳管薄膜中的 13 200842105 * 奈米礙管聚集成束，該奈米碳管薄膜中奈米碳管束交 叉形成多個微孔結構，其中微孔直徑為1奈米〜1微米。 本實施例透射電鏡微栅在應用時，可利用這些小 ^ 尺寸的微孔支持具有較大尺寸的奈米顆粒，奈米線， 奈米棒等來進行透射電鏡觀察分析。對於尺寸小於 5nm的單個存在的奈米顆粒來說，微孔的作用不係太 大，起作用的主要係奈米碳管的吸附作用，這些尺寸 極小的奈米顆粒能夠被穩定地吸附在奈米碳管管壁 • 邊沿，便於進行觀察。請參閱圖5和圖6，圖中黑色 顆粒為待觀察的奈米金顆粒。該奈米金顆粒穩定地吸 附在奈米碳管管壁邊沿，有利於觀察奈米金顆粒的高 分辨像。 另外，由於用於抽取奈米碳管薄膜的超順排奈米 碳管陣列中的碳管純淨度高，尺寸均一，管壁缺陷 少。本實施例透射電鏡微柵對承載於其上的待觀測樣 ¥ 品的形貌和結構分析等干擾小，對吸附於其上的奈米 顆粒的高分辨像影響很小。 本發明實施例所提供的透射電鏡微栅及其製備方 法，其通過從超順排奈米碳管陣列可連續抽出奈米碳 管薄膜並覆蓋在金屬網格上，方法簡單、快捷，可用 於批量製備性質穩定的透射電鏡用微柵。同時，利用 奈采碳管的吸附特性，有助於觀察尺寸小於5nm的奈 米顆粒的透射電鏡高分辨像。 綜上所述，本發明確已符合發明專利之要件，遂 14 200842105 ' 依法提出專利申請。惟，以上所述者僅為本發明之較 佳實施例，自不能以此限制本案之申請專利範圍。舉 凡熟悉本案技藝之人士援依本發明之精神所作之等 ‘ 效修飾或變化，皆應涵蓋於以下申請專利範圍内。 【圖式簡單說明】 圖1為本發明實施例透射電鏡微栅的製備方法的 流程示意圖。 圖2為本發明實施例透射電鏡微柵的結構示意 ⑩ 圖。 圖3為本發明實施例透射電鏡微柵的掃描電鏡 (SEM)照片。 圖4為本發明實施例透射電鏡微栅中奈米碳管薄 膜的掃描電鏡照片。 圖5為應用本發明實施例透射電鏡微柵觀察奈米 金顆粒的透射電鏡南分辨像。 0 圖6為圖5的局部放大示意圖。 【主要元件符號說明】 透射電鏡微柵結構 20金屬網格 22 奈米碳管薄膜結構 24 15The size of the (four) wire produced by the array, the carbon nanotube film = degree is not limited, can be obtained according to the actual f. In this embodiment, a 4 inch substrate super-aligned carbon nanotube array is used, and the nano tube film can be viewed from 1 cm to 10 cm. It can be understood that the plurality of carbon nanotube films obtained above can be stacked at a predetermined angle to form a multi-layered nano-tube film junction, and the solvent can be treated by the solvent in a step-by-step manner. The film forms a microporous film structure. Since the nano-amplifier in the super-sequential carbon nanotube array provided in the first step of the embodiment is very pure, and since the specific surface area of the carbon nanotube itself is very large, the carbon nanotube film itself has a relatively high Strong dryness. The multi-layered carbon nanotube film is closely connected by van der Waals force to form a stable multi-layered carbon nanotube film structure. The angle of the cymbal can be determined to be the same angle or a different angle. The number of layers of the carbon nanotube film structure is not limited. , can be > in an understanding of the system can be used to drip the organic solvent through the test tube to wet the surface of the carbon nanotube film to infiltrate the entire nano-tube film. Alternatively, the above-mentioned carbon nanotube film may be fixed by a fixing frame and then immersed in a container containing an organic solvent. The organic solvent is a volatile organic solvent such as ethanol, methanol, acetone, dichloroethane or chloroform, and ethanol is used in this embodiment. After the multilayered carbon nanotube film is infiltrated with an organic solvent, the parallel carbon nanotube segments in the carbon nanotube film partially aggregate into the carbon nanotube bundle under the surface tension of the volatile organic solvent. In addition, the carbon nanotubes in the carbon nanotube film are gathered into a bundle, so that the parallel carbon nanotube bundles in the carbon nanotube film are substantially spaced apart from each other, and the carbon nanotube bundles in the multilayer carbon nanotube film are The cross arrangement forms a microporous structure. These micropores are composed of carbon nanotubes arranged in series and overlapping each other, and a bundle of carbon nanotubes. It will be understood by those skilled in the art that the microporous structure in the structure of the carbon nanotube film of the present embodiment is related to the number of layers of the carbon nanotube film. When the number of layers is larger, the pore size of the formed microporous structure is smaller. . For example, when the number of layers is four, the size distribution of the micropores ranges from a few nanometers to several hundred nanometers. These micropores can support nanoparticle, nanowires, nanorods, etc., for transmission electron microscopic observation and analysis. In addition, the embodiment can also utilize a portion of a plurality of layers of carbon nanotube film stacked to form a microporous film structure having an arbitrary width and length, and is not directly extracted from the carbon nanotube array by the above method of the embodiment. The width of the film is limited. Step 3: The carbon nanotube film structure obtained above is covered on a metal mesh used in a transmission electron microscope, and the organic solvent treatment is used to bond the microporous film structure and the metal mesh tightly. 12 200842105 The metal mesh material is copper or other metal material, and the pore size of the metal mesh is much larger than the micropore diameter of the carbon nanotube film. The organic solvent is a volatile organic solvent such as ethanol, decyl alcohol, acetone, dichloroethane or gas. The organic solvent can be directly dropped on the carbon nanotube film to make the microporous film structure and the metal mesh tightly combined. Step 4: After the organic solvent is volatilized, the excess microporous film is removed along the edge of the metal mesh to form a transmission electron microstrip. It can be understood that the preparation method of the TEM micro-gate structure of the embodiment can directly directly cover the extracted carbon nanotube film on the metal grid, and then cross the other or more carbon nanotube films in turn. The ground is covered with a carbon nanotube film. Then, the above carbon nanotube film is treated with an organic solvent to obtain a transmission electron microstrip structure. Referring to FIG. 2 and FIG. 3, the TEM micro-gate structure 20 is prepared according to the above method, and comprises a metal mesh 22 and a carbon nanotube film structure 24 covering the surface of the metal mesh 22. The carbon nanotube film structure 24 comprises a layer of carbon nanotube film or a microporous film structure in which a plurality of layers of carbon nanotube film are stacked at a predetermined angle. The pore diameter of the microporous film is related to the number of layers of the carbon nanotube film, and may be from 1 nm to 1 μm. Please refer to FIG. 4, which is a scanning electron micrograph of a multilayer carbon nanotube film used in a TEM micro-gate structure according to an embodiment of the present invention. The multi-layered carbon nanotube film is overlapped at a 90° angle to form a microporous film structure, and the carbon nanotubes in each layer of the carbon nanotube film are aligned, and the two carbon nanotube films are bonded by van der Waals force. The 13 200842105 * nano tube in the carbon nanotube film aggregates into a bundle, and the carbon nanotube bundle crosses in the carbon nanotube film to form a plurality of microporous structures, wherein the micropore diameter is 1 nm to 1 μm. In the application of the TEM micro-gate, the small-sized micropores can be used to support nano-sized particles, nanowires, nanorods, etc. for transmission electron microscopy observation and analysis. For a single nanoparticle having a size of less than 5 nm, the effect of the micropores is not too large, and the main function is the adsorption of the carbon nanotubes. These extremely small nanoparticles can be stably adsorbed on the naphthalene. The carbon tube wall • edge for easy viewing. Referring to Figures 5 and 6, the black particles are the nano gold particles to be observed. The nano gold particles are stably adsorbed on the edge of the carbon nanotube wall, which is advantageous for observing the high resolution image of the nano gold particles. In addition, since the carbon tubes in the super-sequential carbon nanotube array for extracting the carbon nanotube film are high in purity, uniform in size, and have few wall defects. In the present embodiment, the transmission electron microscopy microgrid has little interference to the morphology and structural analysis of the sample to be observed, and has little influence on the high resolution image of the nanoparticle adsorbed thereon. The TEM micro-grid and the preparation method thereof are provided by the embodiment of the invention, which can continuously extract the carbon nanotube film from the super-aligned carbon nanotube array and cover the metal grid, and the method is simple and quick, and can be used for Micro-gates for transmission electron microscopy with stable properties are prepared in batches. At the same time, the use of the adsorption characteristics of the carbon nanotubes helps to observe the high-resolution image of the TEM of nanoparticles with a size of less than 5 nm. In summary, the present invention has indeed met the requirements of the invention patent, 遂 14 200842105 'Proposed patent application according to law. However, the above is only a preferred embodiment of the present invention, and it is not possible to limit the scope of the patent application in this case. Any modification or variation made by a person familiar with the art of the present invention in accordance with the spirit of the present invention shall be covered by the following claims. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart showing a method of preparing a transmission electron microstrip micro-gate according to an embodiment of the present invention. 2 is a schematic view showing the structure of a TEM micro-gate according to an embodiment of the present invention. 3 is a scanning electron microscope (SEM) photograph of a TEM microgrid according to an embodiment of the present invention. Fig. 4 is a scanning electron micrograph of a carbon nanotube film in a transmission electron microstrip micro-gate according to an embodiment of the present invention. Fig. 5 is a transmission electron microscope south resolution image of a nano-particle for observation of a transmission electron microstrip micro-gate according to an embodiment of the present invention. 0 Figure 6 is a partially enlarged schematic view of Figure 5. [Main component symbol description] Transmission electron micro-gate structure 20 metal mesh 22 Carbon nanotube film structure 24 15