TW200835603A - Self-rolling laminated sheet and self-rolling pressure-sensitive adhesive sheet - Google Patents

Abstract

The present invention relates to a self-rolling pressure-sensitive adhesive sheet, comprising a shrinkable film layer which is contractible in at least one axial direction; a restriction layer restricting a contraction of the shrinkable film layer, the restriction layer being disposed on a side of the shrinkable film layer; and a pressure-sensitive adhesive layer disposed on the side of the restriction layer which is opposite to the side on which the shrinkable film layer is disposed, the self-rolling pressure-sensitive adhesive sheet being a releasable pressure-sensitive adhesive sheet, and the self-rolling pressure-sensitive adhesive sheet rolling up either in one direction from an end or from two opposing ends toward a center of the two opposing ends to form one or two tubular rolls, when the self-rolling pressure-sensitive sheet is stimulated to induce the contraction of the shrinkable film layer in a releasing state in which a pressure-sensitive adhesive power of the pressure-sensitive adhesive sheet is lowered or lost. The self-rolling pressure-sensitive adhesive sheet can be very easily peeled off from an adherend without causing a damage or a contamination on the adherend, even when it is adhered to an adherend of a relatively low strength.

Description

200835603 IX. Description of the Invention: [Technical Field] The present invention relates to a self-rolling laminated sheet which can form a tubular reel spontaneously in a main contraction axis direction, for example, by heat spontaneously from one end, and Roll-on pressure-sensitive adhesive sheet. The self-rolling pressure-sensitive adhesive sheet is suitable for use as, for example, a pressure-sensitive adhesive sheet that can be released, such as a pressure-sensitive adhesive sheet for temporary wafer fixing, and a pressure-sensitive adhesive sheet for mutual wafer protection, for use in half. Guicaijing is in the processing of its axis. In addition, the self-rolling laminated sheet is suitable as a supporting base material for the pressure-sensitive adhesive layer in the '^' self-rolling pressure-sensitive adhesive sheet. [Previous technology] Recently, in semiconductor materials, the demand for lighter and thinner materials is increasing. . In wafers for semiconductors, I reduce the valley to 100 microns or process: small, but this thin wafer is quite brittle and prone to cracking. Therefore, on the wafer, it is known to use a method of supporting the wafer to temporarily release the pressure-sensitive adhesive sheet 'and to remove and collect the wafer after the necessary addition of the jade. Such a temporary fixing pressure-sensitive adhesive sheet is generally BMm-forced and 匕栝-target-I-ray-curable. It is used in a method comprising the following steps: after cutting the square granules, by illuminating, such as grinding Or the pressure-sensitive adhesive layer that reduces the pressure-sensitive adhesive is peeled off from the wafer. The film is still smeared by the high oxygen pressure to the wafer surface. The salty sputum y ^ ^, for peeling the viscous piece from the wafer, needs, for example, the operation of pulling the adhesive sheet apart, but the 312XP/invention manual (supplement)/97-03/96141972 6 200835603 This operation counts the j. column, for example, problems such as edge breakage or, for example, defects due to stress during operation. In addition, when the thickness of the wafer is reduced by grinding (for example, too honest, as low as about 25 microns), the pressure-sensitive adhesive sheet attached to the wafer is protruded more outward than the edge of the wafer. . Including the surface or wafer grinding surface /, clothing ▼ mouth [5 knives, etc., the risk of peeling. Dan = Patent No. 239 Revealed - a kind of pressure-sensitive adhesive sheet comprising a layered structure capable of firing, a spring-curable pressure-sensitive adhesive layer and a heat-shrinkable film, when a heat-shrinkable sheet is Irradiation energy emission (4) prevents, for example, elongation or collapse in the sheet + when irradiated with ultraviolet light. However, the peelability of this & adhesive sheet from the wafer is still insufficient.曰二A-2_-_ discloses a pressure-sensitive adhesive sheet formed by a shrinkable film, a rigid film, and an energy-sensitive layer which can be ID-formed to protect a semiconductor crystal. According to the absorbing adhesive sheet, the adhesive force of the pressure-sensitive adhesive layer is lowered by the irradiation energy ray, and the shrinkable film can be received by the desired method, thereby causing deformation in the pressure-sensitive adhesive sheet and reducing the adhesion of the wafer and the pressure-sensitive adhesive. The contact area between the layers is such that the sheet can be easily peeled off from the wafer. However, since the shrinkage of the shrinkable film occurs in a plurality of directions, the pressure-sensitive adhesive sheet after twisting is usually folded on the surface of the wafer, thereby making the peeling operation difficult. In general, even a commercially available uniaxial shrinkable film is secondary to the main shrinkage axis due to residual stress at the time of manufacture or due to stress or thermal strain applied to the magnetic adhesive sheet during the manufacturing process. Shrinkage (- or a plurality of shrinkages with relatively weak contraction forces), and 312XP/Invention Manual (Supplement)/97-03/96141972 200835603 Shrinkage occurs with this combination of equal shrinkage. When the area of the attached body is small, the deformation of the feeling caused by the contraction is small, so that the knowledge of the miscellaneous heart is #^^^ to 雔(2).尺寸 卞 卞 卞 卞 卞 , , , , , 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞 卞The heart of the direction... prone to the suppression of the contraction of the main contraction by the universal 肀, so the zhongzhong-part of the pressure-sensitive adhesive sheet is peeled off in the heart of the two kings (the uneven time of the contraction...= Still adhered to the wafer) 'Because of the _adhesive sheet; [and the wafer is cured and the substrate and the adhesive of the adhesive are used...Scene: wood. It is also found that in the layer structure of ^^^, the warp produced after grinding the wafer

The song is too big, so its handling is very poor. L Patent Reference Document 1: Japanese Patent No. 3073239 Patent Reference Document 2: JP-A-2000-129227 SUMMARY OF THE INVENTION One object of the present invention is to provide a point of strong production with a gentleman. Tian will stick it to a fairly low level: 2, it is quite easy to peel off the self-adhesive body and not cause the adhesion body (4) to be difficult. κ 鬌 , , 2 = The purpose of the factory is to provide a laminated sheet suitable for use as a base material of the pressure-sensitive adhesive H ± 1 too... The 感 轫 沾 沾 沾 沾 沾 曰曰 曰曰 曰曰 曰曰 曰曰 曰曰 曰曰 曰曰 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感For the support of the substrate. k for a laminated sheet as a pressure-sensitive adhesive sheet 312XP / invention manual (supplement purchase 3/96141972 200835603 this "monthly person" for the realization of the above-mentioned peeling function of the sensitive adhesive sheet. When the hand =,;: kind of operation with easy body peeling, first, for the feed: Ding Yi feels that the adhesive sheet self-adhesively attaches the band of the pain part and then pulls the tape out. Second take = fragile When you stick the body, you don't pick it up - and you use the brakes, and you can get rid of the wear and tear. At the beginning, the shearing of the flinging 谇 谇 曰 曰 K K K 曰 曰 曰 曰 应力 , , , , , , , , , , , , , , , 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力 应力When the peeling and W-cutting degree is maintained to be large, the attached body is peeled off. There is a self-fragile stickiness, so the inventor believes that When it is away from heat or other stimuli = when the belt is peeled off, it can be curled like a blanket to change the shape; (in the rear body is so deformed as a "tubular reel"), a suitable one can be obtained. The pressure-sensitive adhesive tape is caused by the fact that the peeling which induces the deformation is based on maintaining the peeling angle at the maximum at the time of peeling, and the peeling stress on the adhesive body is kept to a minimum, that is, the possibility of damaging the weak adhesive body is possible. To minimize the possibility of the pressure-sensitive adhesive being transferred to the adhesive body by peeling, the small peeling stress can also be reduced to the possibility of adhering the body stain (4). Moreover, the stress can be Even when the pressure sensitive adhesive adheres to the portion of the wafer grinding surface side, the risk of damage to the wafer can be reduced. Therefore, material testing is performed to understand the tubular roll formed by thermal stimulation, and it is found that when the shrinkable film is formed The layer is shrinkable in at least one direction by providing a thermal stimulus, preferably 30% or more, and a shrinkage shrinkage film layer is 312 ΧΡ / invention specification (supplement) / 97-03/96141972 9 200835603 Yu Qi Preferably, the confinement layer is composed of an elastic layer and a rigid film layer, which is known as the 埶 埶 、 、 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , =u amount, the contraction force of the pure shrink film and the confinement against the contraction film contraction force in the confinement layer # ^ a 1 " r points) drive six ^ liter outer edge part (end knife J 7 horse 5 power, hunting this inspection..,. from the end of the center or from the center of the two opposite x邛) spontaneously rolled up (where the shrinkable film layer is located inside), forming one or two tubular reels Layer: ΐ: Γΐ 可 可 的 感 感 ( ( ( ( ( ( ( ( ( 感 感 感 感 感 感 感 感 感 感 感 感 感 感 = 感 = = = = = = = = = = = = = = = = = = = = = = = = Fixation, protection, and other pre-releases such as heat or other stimuli to promote: When the film shrinks and loses its adhesion, the film is lifted in the same way, thereby accumulating the sheet in the horizontal direction. , at a = or spontaneously rolled from the opposite ends toward the center (the center of the ends) and = the film layer is on the inside), and Into one or two tubular rolls: "feel" by sheet can be very easily and cleanly peeled from the adhesive because of the stress being damaged. It was also found that this group (4) significantly reduced the contamination of the adherend due to peeling. The present invention has been completed on the basis of such ongoing research. [Embodiment] In other words, the present invention relates to the following items. (1) A self-rolling laminated sheet comprising: a shrinkable film layer that can be shrunk in at least one axial direction; and a confinement layer that limits shrinkage of the shrinkable puncture layer, the confinement layer being disposed at 312ΧΡ/invention specification (Supplement) /97-03/96141972 10 200835603 On one side of the shrinkable film layer, when the self-rolling type 奎μ ^ ^ shrinks, the self-rolling laminated sheet 曰 — 方 = = = = The tubular roll of the shrinkable film layer, or opposite the two opposite ends: the roll:: forms a tubular roll. The center is rolled up to form two (2) according to the self-rolling type of (1) ^ 70 ^ 1801 || S ^ ^ ^ ^ ^ ^ ^ ^ $ 〇Π〇 / ^ ^ , in the main shrinkage direction under the service A heat-shrinkable film having a heat shrinkage ratio of 30 to 9 (5) according to the item (1), the type of layer, wherein the layer includes the __@ layer on the side. Can be layer side opposite =, member of the self-rolling laminated sheet, wherein the elastic layer has a product of 10C (four) (four) and thickness in the range of 1 to the face of Newton 0 (5) according to (3) self-rolling a laminated sheet, wherein the rigid film layer has a product of Young's modulus and thickness at 1080 C on the 3 sides of 5 Newtons or less. (6) According to the self-rolling laminated sheet according to Item (3), wherein the elastic layer is The self-rolling laminated sheet according to the item (1), wherein the self-rolling laminated sheet is stimulated by the shrinkage of the shrinkable film layer caused by the self-rolling laminated sheet When rolled up to form a tubular reel, the formed tubular reel has a ratio (r/L) in the range of 〇.〇〇1 to /·333, wherein the diameter of the wide tubular reel and the L system The length of the self-rolling laminated sheet in the rolling direction. (8) The self-rolling laminated sheet according to item (1), wherein the self-rolling laminated sheet is in the 312/invention specification (supplement)/97·〇3/ 9614ΐ972 11 200835603 The tubular reels formed by the stimuli of the self-rolling laminated sheets induced by the shrinkage of the shrinkable film layer to form two tubular reels each have a ratio within the range of 〇·谢至U33 ( r/L), the diameter of the tubular tubular reel and the length of the L-series self-rolling laminated sheet in the rolling direction. (9) A self-rolling pressure-sensitive adhesive sheet comprising: one in at least one axial direction Shrinkable shrinkable film layer;

a limit that limits the shrinkage of the shrinkable film layer, the restraining layer is disposed on one side of the shrinkable film layer, and one of the opposite sides of the shrink film layer is disposed on the side of the restraining layer on which the pressure is disposed on the side Adhesive layer, the self-rolling pressure-sensitive adhesive sheet is a releasable pressure-sensitive adhesive sheet, wherein the layer of the pressure sensitive layer or the lower layer && κ m μ I &感 + low-viscosity treatment of pressure-sensitive adhesive ^ - money surface wafer. Peeling pull · SO0 mm / min) for Μ Newton Μ mm or less, and Bazhong ¥ self-rolling pressure sensitive adhesive sheet is hit | and to the stabbing and induce shrinkage film layer,,,,,,, The self-rolling pressure-sensitive adhesive sheet is rolled up from one end in a y ^ ^ ^ direction to form a tubular reel, or is rolled up from the center of the opposite ends from two opposite sides to form two tubular reels. (10) According to (9), self-rolling decompression Μ ^ ^ 7 ί) ζ, grade 1 i ^ piece, wherein the shrinkable film layer is included in the range of 70 to 18 ° ° c, w Itching has a shrinkage rate of 30 to 90%: & a heat shrinkable film which is sighed in the direction of shrinkage. = The self-rolling pressure-sensitive adhesive sheet according to item (9), wherein the elastic layer on the side of the shrinkable film layer and the rigid film layer on the side opposite to the shrinkable film; Sigh, value gland side 312 / invention manual (supplement) / 97-03/96141972 12 200835603 (12) According to the self-rolling pressure sensitive adhesive sheet of (11), wherein the elastic layer has a cutting mode of 80C The product of the number and the thickness is in the range of 1 to 1 Newton/meter. (13) The self-rolling pressure-sensitive adhesive sheet according to (11), wherein the rigid film layer has a product of a Young's modulus of 80 C and a thickness of 3 〇χ1〇5 Newtons/m or less. (14) The self-rolling pressure-sensitive adhesive sheet according to (11), wherein the elastic layer is formed of a cross-linked acrylic acid pressure sensitive adhesive. (15) The self-rolling pressure-sensitive adhesive sheet according to (9), wherein the pressure-sensitive adhesive layer is formed of an energy ray-curable pressure-sensitive adhesive. (10) The self-rolling pressure-sensitive adhesive sheet according to (8), wherein the self-rolling pressure-sensitive adhesive sheet is rolled up to stimulate the shrinkage of the shrinkable film layer of the self-rolling pressure-sensitive adhesive sheet to form a tubular reel The tubular roll formed has a ratio (r/L) in the range of 0.001 to 0.333, wherein the diameter of the r-shaped tubular roll and the length of the L-series self-rolling pressure-sensitive adhesive sheet in the rolling direction. The self-rolling pressure-sensitive adhesive sheet according to item (9), wherein the self-rolling type pressure-sensitive adhesive sheet is rolled up to form a stimuli of the shrinkable film layer induced by the self-rolling pressure-sensitive adhesive sheet to form In the case of two tubular reels, the tubular tubes each have a ratio (r/L) in the range of 0.001 to 0.333, wherein the diameter of the r-system and the L-series self-rolling pressure-sensitive adhesive sheet are The degree of scrolling in the direction. Long (18) - A method of processing an article, comprising: adhering a self-rolling pressure sensitive adhesive sheet according to item (9) to an object for temporary 312XP/invention specification (supplement)/97-〇3/96141972 200835603 Fixing the object, and then processing the object; reducing the pressure-sensitive adhesive force of the pressure-sensitive adhesive sheet and the stimulation of shrinkage of the shrinkable film layer of the pressure-sensitive adhesive sheet, thereby causing the pressure-sensitive adhesive sheet to spontaneously The ground is rolled up from one end in one direction to form a tubular reel, or the two opposite ends are rolled up toward the center of the opposite ends to form two tubular coils, and thus are peeled off from the article; and a finished object is obtained . According to the self-rolling pressure-sensitive adhesive sheet and the laminated sheet of the present invention, even when the length j L of the sheets is increased in the rolling direction, the same can be rolled up. In this month θ, the shrinkage rate (%) refers to the value calculated by the following equation.

[(Dimensions of collection, storage, etc. - size after shrinkage) / (100 W of shrinkage) In this respect, unless otherwise specified, it refers to the shrinkage ratio in the shaft. The self-rolling pressure-sensitive adhesive of the present invention After the predetermined process is performed on the adhesive body temporarily fixed by the adhesive force, it is driven by the stimuli such as sputum which induces contraction, and spontaneously rolls up under the peeling of the self-adhesive body (generally, the direction of the main contraction axis is self-adhesive) The end portion (the end portion or the opposite end portions: Γ = Γ so that it can be extremely easily moved from the surface of the adherend: ... damages the adherend or is contaminated thereon due to incomplete peeling, therefore, it is useful As a feeling of being particularly adhered to the fragile adherent (4), the self-rolling laminated sheet of the present invention is generally in the direction of the main shrinking axis from the end when stimulated by the induced shrinkage; 312ΧΡ/ BRIEF DESCRIPTION OF THE INVENTION (Spread)/97-03/96141972 14 200835603 (; 鳊 part or two opposite end parts) spontaneously rolled up to form a tubular roll = which she can be utilized as a pressure-sensitive adhesive in the aforementioned self-winding Support material for the layer. '"Self-rolling property" means a property in which the object is rolled up due to the application of the induced end. - Thermal, optical and electrical stimulation) and the self-rolling sheet is a laminated sheet with self-rolling properties. When the roll-type layering sheet is applied with a stimulus for inducing contraction, it spontaneously: - or from two opposite ends toward the center of the opposite ends: - or two tubular reels. The wedding forms a piece and the self-winding is self-rolling. The pressure-sensitive adhesive of the nature is woven and disposed on the surface of the second layer of the self-rolling laminated sheet. When the self-rolling pressure-sensitive adhesive sheet is reduced or lost, the self-rolling type is self-rolling. Sense: the force piece: the stimulus is 'in one direction from one or two = the center of the opposite end is spontaneously rolled up to form - or two tubes ^ Hereinafter, a specific example of the present invention will be described with reference to the drawings. A schematic cross-sectional view of an example of a self-winding laminated sheet of the same type of self-rolling type of self-winding type of adhesive sheet - an example of a schematic cross-section 2 series of self-rolling laminated sheets including a single axis: : limiting layer 2 for limiting the shrinkage of the shrinkable film The side of the elastic layer on the side of the shrinkable film layer is opposite to the side of the shrinkable film layer 1 and the position on the side is shown in the figure 312XP/invention specification (supplement)/97-〇3/96141972 15 200835603 The rigid laminated element of the self-winding laminated sheet of the 5 brothers in Fig. 1. In this case, the self-rolling laminated sheet is the supporting base material of the pressure-applied sheet on the side of the sheet. The shrinkable film layer 1 may be any one of a film which is shrinkable in at least the axial direction, a heat shrinkable film, a film which is contracted by light, and a (3) and is excitable. The heat shrinkable skin can be heat-shrinkable from the viewpoint that the puncture-retractable film layer 1 is better than the wood-based property. The shrinkable film layer 1 may have shrinkage properties only in one axial direction, or may have A direction in the direction of the main dragon, direction (one axis) (for example, 'the direction perpendicular to the above direction is ^ _ want, the primary shell. The shrinkable film layer 1 may be configured as a single layer, or a composite layer formed of two or more layers. ',,' constitutes a shrinkable film layer! The shrinkable film has a shrinkage ratio of preferably from 3 〇 to 9 〇 in the direction of shrinkage. In the case where the shrinkable film layer is formed fine (four), the heat shrinkable film is from 7 Å to 18. : Fan = Degree (10) 'Hungry, 14G ° C material) has a general 30 ... two! Shrinkage in the direction of shrinkage. In the retractable film constituting the shrinkable film layer, the shrinkage ratio in the direction other than the main shrinkage direction is preferably 10% or less, more preferably 5% or less, and particularly preferably A (10) or less. The heat shrinkage property of the shrink film can be provided, for example, by subjecting a film extruded by an extruder to a stretching process. Examples of the heat shrinkable film include a uniaxially stretched film prepared from a resin selected from, for example, one or more of the following: polyg is intended to be, for example, polyethylene terephthalate, polyolefin such as polyethylene or polypropylene, Poly (I), Polyimide, Polyamide, Polyurethane, Polystyrene, Polydivinylidene and Polychlorinated 312XP / Invention Specification (Supplement) / 97-03/96141972 16 200835603 Ethylene. Among them, based on satisfactory coating operability for pressure-sensitive adhesives, 'by polyester resin, polyolefin resin (including cyclic polyolefin resin) such as polyethylene, polypropylene or polyethylene, or polyamine A uniaxially stretched film formed of an acid ester resin is preferred. For such a heat shrinkable film, a commercial mouth can be used, such as Space Clean manufactured by Toyobo Co., Fancy Wrap of Gunze Ltd. 'k, manufactured by Toray Industries Ltd., Torayfan, Lumirror manufactured by Toray Industries Ltd., JSR. Arton manufactured by 10 Corp. and Zeonore manufactured by Nippon Zeon Co. In the case of using a self-rolling laminated sheet as a supporting base material for an energy ray-curable pressure-sensitive adhesive sheet, and a pressure-sensitive adhesive layer capable of curing an energy ray by irradiating an energy ray through a heat-shrinkable film layer When cured, the heat-shrinkable film layer 1 should be composed of a material (for example, a resin having transparency) which can transmit a predetermined amount or more of energy rays. The heat shrinkable film layer 1 has a thickness of usually 5 to 300 μm, preferably 1 μm to 100 μm. The excessive thickness of the heat-shrinkable film layer increases the ageing property, whereby spontaneous rolling does not occur, but separation occurs between the heat-shrinkable film layer 1 and the confinement layer 2, which may result in a laminated member. The destruction. Further, it is known that a film of high hardness has a high elastic stress caused by residual stress generated by bonding, and thus it is easy to increase warpage when the wafer is made thin. The surface of the heat-shrinkable film layer 1 can be subjected to general surface treatment such as 'chemical or physical treatment such as treatment with chromic acid, violent to self, %, exposure to flame, exposure to high voltage electric spark, utilization of free radiation Second, or coating a primer material (such as pressure sensitive adhesive material) to improve the adhesion and fixing properties to adjacent layers.曰 312XP / invention manual (supplement) / 97-03/96141972 17 200835603 Restriction layer 2 limits the contraction of 蹬β i its system 蕻, / shrinkage 'to induce - reaction force, causing ^, knot to the entire layer of force Turning into a driving force, in order to prevent the secondary shrinkage in the direction in which the main shrinkage direction of the shrinkable film layer 1 is suppressed, even if: L: square: shaft shrinkable film It is not necessarily the only one that can be concentrated in one direction. Therefore, when the laminated film-induced stimuli of the contraction:::' is used, it is considered that the repulsive force of the resistance in the confinement layer 2 and the contraction force of the true edge 1: eight becomes the external impact of the reinforced laminated sheet, the knife end Or the driving force of the opposite ends, whereby the laminated sheet is spontaneously rolled up in one direction: in the direction toward the center ("in the direction of the main shrinkable film of the heat shrinkable film, in the direction of the axis") The film layer i is on the inside) to form a tubular reel. In addition, the confinement layer 2 can prevent the shearing force generated by the shrinkable:, I/AC, from being transferred to the pressure-sensitive adhesive layer 3 or: with =α to avoid a reduced feeling when released. The adhesive feeling β, the layer of the coating (for example, the cured pressure-sensitive adhesive layer) is broken, the adhesive body is broken, or the adhesive body is ruptured by the pressure-sensitive adhesive layer. The enamel layer 2 has elasticity and adhesion to the shrinkable film layer i (including pressure-sensitive adhesive properties) in order to exhibit a function of restricting shrinkage of the shrinkable film layer i. Further, in order to smoothly form the tubular reel, the confinement layer 2 preferably has a specific toughness or rigidity. The confinement layer 2 may be constructed to have a single layer or consist of a plurality of layers in which functions are shared by a plurality of layers. In the example illustrated in FIGS. 1 and 2, the confinement layer 2 is composed of an elastic layer 21 and a rigid film layer 22. The elastic layer 21 is preferably at the shrinkage temperature of the shrinkable film household 1 (when the self-rolling laminated sheet is used as a self-winding type 312XP / invention specification (supplement) / 97-03/96141972 18 200835603 When the sheet supports the base material, the peeling temperature of the pressure-sensitive adhesive sheet is easily deformed, that is, in a rubbery state. However, the material exhibiting fluidity does not generate sufficient reaction force, and finally the shrinkable film shrinks by itself, so that deformation (spontaneous rolling) cannot be caused. Therefore, the elastic layer 21 preferably has, for example, a fluidity which is suppressed by three-dimensional crosslinking. In addition, the elastic layer 21 also exhibits a function of resisting the uneven shrinkage of the shrinkable film layer 1 and the weaker force component of the force due to its thickness to prevent the shrinkage φ deformation caused by the weaker force component, thereby achieving a transformation. For the only direction of contraction. The warpage generated after wafer polishing is considered to be caused when stress is applied to bond the pressure-sensitive adhesive sheet to the remaining wafer, and the remaining stress causes elastic deformation of the shrinkable film. However, the elastic layer also has the function of releasing this residual stress to reduce the Wei Qu. Therefore, it is desirable that the elastic layer has a pressure-sensitive adhesive property and has, for example, '50. 0: or less, preferably room temperature (25. 〇 or less and more preferably 玻璃 ° C or below). The pressure-sensitive adhesive force of the elastic layer 21 located on the sound of the shrinkable film is 18 (). Peeling test JISZ_, stretching speed mm/min, 50. 〇 obtained by ΐί is 〇 5 Newton Μ Mm or more. Too low pressure-sensitive adhesive, the number of shears G of the elastic layer 21 is preferably from the range of temperature k, from room temperature to peeling severity (for example, 80 ° C).

106Pa (especially 〇· 〇5xl06Pa to 3xl〇6pa, _ X, the shrinkage stress of the shrinkable film layer is converted to a small number to too small, the cross is insufficient 'and the other side, when the potential cut modulus is too large, in addition to the volume Kinetic energy 312XP / invention manual (supplement) /97·03/96141972 19 200835603 In addition to the fact that the force becomes insufficient and the hardness is increased, the adhesion of the laminate is generally insufficient due to its high elasticity. There may be difficulties. The thickness of the elastic layer 21 is preferably about 15 to 15 μm. When the thickness is too small, it is difficult to obtain the limiting property of shrinkage of the shrinkable film layer, and the effect of releasing stress is also reduced. When the thickness is too large, the self-rolling property will deteriorate and the processing capacity and economic efficiency will also be reduced. This is not desirable. Therefore, the die-cut modulus G (for example, the value of 8 (the value under rc) and the elastic layer U The product of the thickness of the crucible (shear modulus Gx thickness) is preferably from i to 1 〇〇〇 Newton/meter 'more preferably from 1 to 150 Newtons/meter, and even more preferably from 2 to 1 ton per meter. In addition, 'the pressure-sensitive adhesive layer formed by the energy ray-curable pressure-sensitive adhesive layer In the case of 3, in view of manufacturing properties and operational efficiency, the elastic layer is preferably formed of a material that can easily transmit energy rays, and has satisfactory properties for obtaining a film having a suitably selected thickness. Formability. "About elasticity 2 can be used, for example, a foamed material (tanning film) such as an amine group which is subjected to pressure-sensitive adhesion treatment on a surface (at least on a surface of a shrinkable film). a non-foamed resin film of a formate foam or an acrylic foam, or a non-foamed resin film of a rubber or a thermoplastic elastomer. The dust-proof adhesive to be used in the pressure-sensitive adhesive treatment is not Special limits, and its well-known pressure-sensitive adhesives such as propylene glycol-based sensation 4 occupies a piece of J rubber-type burger adhesive 齐 乙烯基 乙烯基 乙烯基 乙烯基 屡 屡 ^ ^ ^ ^ ^ ^ Adhesive Adhesive, Polyurethane Adhesive Adhesive, Polyamide Dust Adhesive, Ammonium Salty Methyl Hydrate ^ : Pressure Sensitive Adhesive and Styrene-Diene Block Copolymer One or a combination of two or more of the agents. Specific 312/_5 instructions ) /97-G3/96141972 200835603 = 2: ΐ 'Considering the adjustment of pressure-sensitive adhesive force' can advantageously use C, 糸 pressure-sensitive adhesive. In this respect, the pressure-sensitive adhesive to be used in pressure-sensitive adhesive treatment The resin of the resin and the foamed film or the non-foamed resin film is preferably of the same type to obtain high affinity. For example, in the case of pressure-sensitive adhesive treatment using a propionic acid-based pressure-sensitive adhesive, it may be advantageous. An acrylic foam is used as the resin film. Further, the elastic layer 21 may be formed of a resin composition having an adhesive property itself (such as a crosslinked acrylic pressure sensitive adhesive). The layer formed by the acid pressure sensitive adhesive or the like (pressure-sensitive adhesive layer) can be obtained by a relatively simple method without requiring an individual pressure-sensitive adhesive treatment, and it is excellent in productivity and economical properties. It is used favorably. The crosslinked acrylic pressure-sensitive adhesive has a composition in which a crosslinking agent is added to an acrylic pressure-sensitive adhesive having an acrylic polymer as a base polymer. Examples of the acrylic polymer include an alkyl (meth)acrylate such as a Cl_C2Q alkyl (meth)acrylate such as (mercapto)propane φ dilute, (mercapto)acrylic acid ethyl vinegar, (methyl a homopolymer or copolymer of butyl acrylate, 2-ethylhexyl (meth) acrylate, and octyl methacrylate; and the aforementioned (mercapto) acrylate acrylate a copolymer of a polymerizable monomer comprising a carboxyl group-containing or anhydride group-containing monomer such as acrylic acid, mercaptoacrylic acid, itaconic acid, fumaric acid or maleic anhydride; hydroxyl group-containing Monomer such as 2-hydroxyethyl ketone; amino group-containing monomer such as porphyrin (meth) acrylate; guanamine-containing monomer such as (meth) acrylamide; cyano group-containing monomer such as (Meth)acrylonitrile; or (fluorenyl) acrylate having an alicyclic hydrocarbon group such as (mercapto)acrylic acid. 312XP/Inventive Manual (Supplement)/97-03/96141972 21 200835603 For acrylic polymers, one or more (meth)acrylic acid G-Cn alkyls are used, such as acetoacetate, butyl acrylate. a copolymer of 2-ethylhexyl acrylate or at least one copolymerizable monomer selected from a hydroxyl group-containing monomer such as 2-hydroxyethyl acrylate and a carboxyl group-containing or acid anhydride group-containing monomer such as acrylic acid, or one or a plurality of (mercapto)acrylic acid Cl-Ci2 alkyl esters, (aliphatic) acrylates having an alicyclic hydrocarbon group, and at least one copolymerizable group selected from a hydroxyl group-containing monomer and a carboxyl group-containing or acid anhydride group-containing monomer a copolymer of monomers. The acryl-based polymer is prepared, for example, by photopolymerizing the above-mentioned monomer component (and polymerization initiator) in the absence of a solvent (for example, by ultraviolet light) to form a liquid prepolymer of south viscosity. The crosslinked pressure-sensitive adhesive composition can be obtained by adding a crosslinking agent to the prepolymer. The crosslinking agent can be added at the time of preparing the prepolymer. The crosslinked acrylic pressure-sensitive adhesive composition can also be obtained by adding a crosslinking agent and a solvent (not required in the case of using a solution of an acrylic polymer) to the monomer component or a solution thereof by polymerization. It is obtained by using an acrylic polymer. ^ Crosslinking agent is not particularly limited, and can be used, for example, isocyanate type chelating agent, melamine type crosslinking agent, epoxy type crosslinking agent, acrylate type, crosslinking agent (multiple A functional acrylate), or an oxime group having an isocyanate group, for use in this application. Examples of the acrylic crosslinking agent include hexanediol diacrylate, 1,4-butanediol diacrylate, trimethylolpropane triacrylate, neopentyltetraol tetraacrylate, and dipentaerythritol Acrylic acid. Examples of the (fluorenyl) acrylate having an isocyanate group include acrylic acid 2 isopropyl ketone and methacrylic acid 2-isocyanate vinegar. Wherein the ultraviolet (UV) reactive crosslinking agent such as an acrylate type crosslinking agent (polyfunctional acrylic acid 312Xp / invention specification (supplement) / 97-03/96141972 22 200835603 ester) or has an isocyanate g group (f Base) The weight of 100 parts of weight is taken into the 4th day of the horse. Relative to

The lingering agent is generally used in a weight ratio of 0.01 to 15 P, preferably 0.05 to 12 parts by weight. Knife cross-linked acrylic acid adhesives in addition to the basic poly, can also contain appropriate additives such as cross-linking promotion = = fragrant:; raw:, _ fat, petroleum resin, two! raw fc tree tree day ), tackifiers, plasticizers, filler oxidants.刎 抗 抗 提供 交 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性 弹性It is expected that the thickness and the area of the film, and the first time to cause the crosslinking reaction (and the polymerization of the monomer) to achieve the desired energy can be obtained. The elastic property of the self-inductive pressure-bonding property thus obtained is obtained. The layer β-linked acrylic acid pressure-sensitive adhesive layer can be used by directly adhering between the shrinkable film layer 1 and the rigid film layer 22. For the cross-linked acrylic acid pressure-sensitive adhesive layer, NittQDenk can also be used. A commercial double-sided tape manufactured by Corporation such as HJ_915〇w (trade name). Further, the crosslinking reaction can be carried out by performing light irradiation again after the film-like pressure-sensitive adhesive is adhered between the shrinkable film layer 1 and the rigid film layer 22. i. The crosslinked acrylic pressure-sensitive adhesive layer as the elastic layer 21 may also be formed by dissolving a crosslinked acrylic pressure-sensitive adhesive composition by dissolving the above propylene-based polymer and a crosslinking agent. Applying in a solvent to the surface of the rigid film layer 22, and then adhering the shrinkable film layer 1 to the 312XP/invention specification (supplement)/97·03/96141972 23 200835603 and performing light irradiation thereon be made of. In the case where the pressure-sensitive adhesive layer 3 is an energy ray-curable pressure-sensitive adhesive layer, the cross-linked acrylic acid pressure-sensitive adhesive is used to cure the energy of the pressure-sensitive adhesive layer 3 which is released. Radiation (light irradiation) can be cured (crosslinked). The elastic layer 21 in the present invention may further include beads such as glass beads or tree beads. The addition of glass beads or resin beads to the elastic layer 21' facilitates the control of the pressure-sensitive adhesive properties and the shear modulus. The beads have, for example, an average particle size of from about 1 to 100 microns, preferably from 1 to 20 microns. The beads are used in an amount of from 1 to 1 Torr, preferably from 1 to 4 parts by weight, based on 100 parts by weight of the entire elastic layer 21. An excessively large amount of addition deteriorates the pressure-sensitive adhesive property, and an excessively small amount has a tendency to provide only an insufficient effect.

The rigid film layer 22 has a function of inducing a reaction force with respect to the contraction force of the shrinkable film layer by imparting rigidity or toughness of the restriction layer 2, and further generates force coupling required for scrolling. When the shrinkable film layer is applied to induce contraction, such as thermal stimulation, the presence of the rigid film layer 22 allows the laminated sheet or the pressure sensitive adhesive sheet to smoothly roll spontaneously without intermediate stop. Or moving in the direction, thus forming a tubular reel having a regular shape. Examples of the resin film constituting the rigid film layer 22 include ruthenium formed of one or more resins selected from the group consisting of polyglycols such as polyethylene terephthalate, polybutylene terephthalate, and polynaphthalene dicarboxylic acid.乙二自意;聚稀烟 such as polyethylene or polypropylene; poly g lean βw —^ 碲 to i imine, polyamine; polyamino phthalate; this fine resin such as poly styrene · x ♦ This cup, polydivinylidene; and less cloth. Among them, the resin film, the arm μ, the acryl-bonded film and the polyimide film are suitable for the pressure sensitive adhesive according to the 312 ΧΡ/invention specification (supplement)/97-03/96141972 24 200835603. Layer 22 may preferably have a coating application operability. A rigid film layer. The rigid film system that forms the composite θ formed by the two or more layers of the cortex is not shrinkable, and if it is 5% or less, it accounts for 3% or less of the qG/bucket, " More preferably 1% or with a rigid film layer 22 in the peeling (five) sore, the harvest, the rate of the product. The product of the degree (Yang's 掇 I plant ~ 歹 ' as in 80t:) Young's modulus and thickness 4 μ (Young's number x thickness) is preferably lower (for example, UxW to 3. 〇χ 1 〇 5 牛 / / or ^ V! ; 员 / water) and better 2. 8xl 〇 5 cattle. _3 To 2._5 Newtons/meter). When the product of _ 声 m m 钱 ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' ' The other female son-in-law can suppress the rolling due to the rigidity. The rigid film core;: the accumulation of ~ can be 80. The Yang Qing 媪 Zhao ± peeling temperature (for example, ^c) Yang's number of turns, better system It is 3χ. Meter, and better _8 to lxl "Newton / square ^ ^ cattle / staff / square day humble, the cone is connected ~ 曰立丄, 十方不.® Young's modulus is too small " a tubular reel that is rolled in an appropriate shape, the opposite is a two-mode When the number is too large, it is difficult to produce spontaneous scrolling. The rigid film layer has, for example, 'about 2 〇 to 150 μm, preferably 25 to 95 μm, more preferably 3 〇.

Thickness of I90 microns. When the thickness is too small, it is difficult to obtain a roll having a proper U roll. When the thickness is too large, the self-rolling property is deteriorated and the handling ability and economic efficiency are lowered, which is undesirable. In the case where pressure-sensitive adhesive is formed by the energy ray-curable pressure-sensitive adhesive, the rigid film layer is preferably formed of a material that can easily transmit energy rays, and has a function for obtaining the device. Satisfactory formability of the film of the thickness can be appropriately selected. ' 312 / invention manual (supplement) / 97-03/96141972 25 200835603 :: structure? In the embodiment, the restriction layer 2 is made of an elastic ... rigid film layer 22 which is not necessary. For example, the rigid film layer 22 has a (four) layer of 2 ι μ with appropriate (four) properties. Pressing material layer 3, can be used - the original feeling of small pressure bonding adhesive = 2, but better system - can release the pressure sensitive adhesive layer, which = adhesion of the attached body, and after the intended action is completed The adhesion can be deteriorated or the adhesion can be lost by the means (reducing the adhesive treatment). The pressure-sensitive adhesive layer that can be released and released can be known to be released in the same manner as the adhesive layer in the pressure-sensitive adhesive sheet. From the point of view of the self-rolling property, the pressure-sensitive adhesive layer of the pressure-sensitive adhesive layer or the pressure-sensitive adhesive layer with reduced adhesive treatment is focused (on the stone mirror wafer 180. The stretching speed of the peeling: 3 mm / knife buckle), the dish (25 c ) is, for example, preferably 6.5 Newtons / 1 mm or less (especially 6.0 Newtons / 1 mm or less). The pressure-sensitive adhesive layer 3 is preferably an energy ray-curable pressure-sensitive adhesive layer. The ray-curable pressure-sensitive adhesive layer can be formed of a pressure-sensitive adhesive property and forms a three-dimensional network structure by irradiating energy rays such as infrared light, visible light, ultraviolet light, X-ray or electron beam, thereby exhibiting a high elasticity material. • A pressure sensitive adhesive that is formed and that can be cured with an energy ray can be used as such a material. The energy ray-curable pressure-sensitive adhesive comprises a compound that is chemically modified by an energy ray-reactive functional group to provide an energy ray-curable property or an energy ray-curable compound (or an energy ray-curable resin). The radiation curable pressure sensitive adhesive is preferably a base component chemically modified by an energy ray-reactive functional group, or via an energy ray curable compound (or energy ray curable resin) and a base 312 / invention specification (Supplement) /97-03/96^972 26 200835603 Ingredient #Formed by the composition formed by mixing. As the base component, a pressure-sensitive adhesive such as a known pressure-sensitive adhesive (viscose) can be used. Examples of pressure-sensitive adhesives include rubber-type polymers such as natural rubber, polyisobutylene rubber, styrene-butadiene rubber, styrene-isoprene-styrene block copolymer rubber, recycled rubber, butyl rubber Polyisobutylene rubber or NBR as a base polymer rubber type pressure-sensitive adhesive; poly-oxygen type pressure-sensitive adhesive; and acrylic pressure-sensitive adhesive. Among them, an acrylic pressure sensitive adhesive is preferred. The base component may be formed of a single component or two or more components. Examples of the acrylic pressure-sensitive adhesive include an adhesive using the following components as a base polymer: an alkyl (meth) acrylate such as a C!-Cm alkyl (meth) acrylate such as decyl (meth) acrylate. , a homopolymer or a copolymer of ethyl (meth)acrylate, butyl (meth)acrylate, 2-ethylhexyl (meth)acrylate, and (mercapto)propionate; and (meth)alkyl acrylate and another copolymerizable monomer (for example, an early group containing a carboxyl group or an acid 10 anhydride group such as propionic acid, methyl acrylic acid, itaconic acid, fumaric acid Or maleic anhydride; a hydroxyl group-containing monomer such as (meth)acrylic acid 2-ethyl ester, an amine group-containing monomer such as phthalocyanine (meth) acrylate; or a brewing amine-based monomer such as (meth) propylene Copolymer of guanamine). These materials may be used singly or in combination of two or more kinds. The chemically modified energy ray-reactive functional group for energy ray curing of the pressure ray-curable or energy ray-curable compound to be used for energy ray curation is not particularly limited as long as it can utilize, for example, infrared light, visible light , ultraviolet light, X-ray or electron beam energy ray curing, 312XP / invention manual (supplement) / 97·03/96141972 27 200835603 but it is better to be able to cure the energy ray after the energy ray Efficient three-dimensional network structure (networking) in the adhesive. They may be used singly or in combination of two or more kinds. Examples of the energy ray-reactive functional group to be used for chemical upgrading include a functional group having a carbon-carbon multiple bond such as an acrylonitrile group, a methacryl fluorenyl group, a vinyl group, an allyl group, and an ethyl group group. In these functional groups, the carbon-carbon multiple bond is cleaved by energy ray to generate a radical, which constitutes a cross-linking site to form a three-dimensional network structure. Among them, in view of reactivity and operability, a (meth) acrylonitrile group is preferred because it exhibits a relatively high reactivity to energy rays, and may be selected from various acrylic pressure-sensitive adhesives and combined. use. Representative examples of the base component of the radiation-reactive functional group chemical modification in k-month b include via an acrylic polymer containing a reactive functional group (which is via a monomer which contains a reactive functional group such as a hydroxyl group or a carboxyl group) (such as 2-hydroxyethyl (meth)acrylate or (mercapto)acrylic acid) is obtained by copolymerization with (alkyl)alkyl acrylate) and contains a group reactive with reactive groups in the molecule. a compound of a group (such as an iso-acidic acid group or an epoxy group) and an energy ray-reactive functional group (such as an acrylonitrile group or a methacryloyl group) [such as ethylene isocyanate (mercapto) propylene oxime ester The polymer obtained by the reaction. In the acrylic polymer containing a reactive functional group, the ratio of the monomer having a reactive functional group to all of the monomers is, for example, from 5 to 40% by weight, preferably from 1% to 30% by weight. In the reaction with an acrylic polymer containing a reactive functional group, it has a group reactive with a reactive S-energy group in its molecule and has an I-ray-reactive functional group 312ΧΡ/invention specification (supplement /97-03/96141972 28 200835603 The amount of a reactive functional group (such as a hydroxyl group and a ruthenium) in the acrylic polymer containing a reactive functional group, for example, from 5 Q to 100 mol %, preferably from 6〇 to 95% by mole. Examples of the energy ray-curable compound include compounds having two or more carbon-carbon double bonds, such as trishydroxypropyl propane triacrylate, tetrahydroxymethane methane tetraacrylate, and neopentyl alcohol Acrylate, neopentyltetraol tetraacrylate, dipentaerythritol monohydroxypentaacrylate, dinonpentaerythritol hexaacrylate, hydrazine, 4-butanediol diacrylate, hydrazine, 6-hexane An alcohol diacrylate, and a compound containing a poly(fluorenyl) acrylonitrile group such as polyethylene glycol diacrylate. These compounds may be used singly or in combination of two or more kinds. Among them, a compound containing a poly(fluorenyl) acrylonitrile group as disclosed in, for example, JP-A-2003-292916. Hereinafter, a compound containing a poly(meth)acrylonitrile group can be referred to as a "propionate type crosslinking agent". The energy ray-curable compound may also be a mixture of an organic salt such as a phosphonium salt and a compound having a plurality of heterocyclic rings in the molecule. In such a mixture, the organic salt is cleaved by energy ray irradiation to generate ions which provide an initiating species as an open-loop reaction for inducing a heterocyclic ring, thereby forming a three-dimensional network structure. Examples of the organic salt include a phosphonium salt, a scale salt, a phosphonium salt, a phosphonium salt, and a borate, and examples of the heterocyclic ring in the compound having a plurality of 16 heterocyclic rings in the molecule include ethylene oxide, propylene oxide, and ketone oxime. (oxorane), ethylene sulfide and anthracycline. More specifically, the instructions can be used in photocuring technology: (Photocuring Technology) (2〇〇〇) , Technicai

Compound in the Information Institute Co. 312XP/Invention Manual (Supplement)/97-03/96141972 29 200835603 Examples of the energy ray-curable resin include a polymer or a polymer containing a photosensitive group, for example, an ester (mercapto) acrylate, an amine group Formic acid (meth) propionate vinegar, epoxy (mercapto) acrylic acid, melamine (meth) acrylate, and (mercapto) acrylonitrile at the end of the molecule An acid resin (mercapto) acrylate, an alcohol-ene addition resin, a photocationic polymer resin having an allyl group at a terminal group of a molecule, a guar-containing polymer such as polyvinyl cinnamate, Azide-based phenolic epoxy 10 (novolac) resin and acrylamide-type polymer. Further, examples of the polymer which can be reacted by high energy i-ray include epoxidized polybutadiene, unsaturated polyacetate, polyglycidyl methacrylate, polypropylene decylamine, and polyethylene decane. In the case of using an energy ray curable resin, the aforementioned basic components are not essential. The bi-ray-curable pressure-sensitive adhesive is particularly preferably an acrylic polymer or an energy-reactive functional group-modified acrylic polymer in which an energy ray-reactive functional group is introduced into a side chain. A propylene-based polymer) and a combination of the aforementioned energy ray-curable compound (for example, a compound having two or more carbon-carbon double bonds). This combination is preferred in terms of reactivity and handling efficiency because it contains an acrylate group which exhibits a relatively high reactivity to energy rays, and it can be selected from various acrylic pressure-sensitive adhesives. Specific examples of such a combination include an acrylic polymer in which an acrylate group is introduced to a side chain and a compound including two or more functional groups (especially an acrylate group) having a carbon-carbon double bond. combination. Such a combination may be, for example, a combination disclosed in JP-A-2003-292916. 312XP/Invention Specification (Supplement)/97-G3/96141972 30 200835603 wherein the acrylic polymer I is introduced into the side chain, for example, by making an isocyanate compound such as acrylonitrile isocyanate or The methacrylic acid isocyanate is bonded to the urethane bond through a urethane bond; the side chain has a bismuth acrylate polymer. The amount of the energy ray-curable compound relative to 100 parts by weight of the base component (for example, the aforementioned acrylic-T compound or the energy-reactive functional group-modified acrylic polymer) is about 〇·5 to _200 in the weight, preferably from 5 to 18 parts by weight and more preferably to the weight. In the energy ray-curable pressure-sensitive adhesive, an energy ray polymerization initiator for providing a curing compound which provides energy ray-chemical properties can be blended to improve the reaction rate for forming a three-dimensional network structure. The energy ray polymerization initiator may be selected from known or commonly used polymerization initiators depending on the type of energy ray used (for example, 'infrared light, visible light, ultraviolet light, xenon rays or electron beams'). In view of operational efficiency, a compound which can initiate photopolymerization by ultraviolet light is preferred. Representative energy-emitting agents Examples of polymerization agents include ketone-type initiators such as diphenyl ketone, phenethyl hydrazine, benzoquinone, #酉昆, 慧醒, and tong; azo-type initiators such as azo Cone isobutyronitrile; and peroxide-type initiators such as benzoic acid and peroxybenzoic acid', but such examples are not superficial. Commercial products thereof include, for example, Irgacure (8) manufactured by ^a-Geigy Ltd. and (e.g., 651 (trade name)). The energy ray polymerization initiator may be used singly or in combination of two or more. Relative to 100 parts by weight of the base component, energy ray polymerization 312 ΧΡ / invention specification (supplement) / 97-03/96141972 31 200835603 hair agent is from about η Π ^ to 8 parts by weight to 10 parts by weight It is preferably used in combination with an energy ray polymerization accelerator 盥 energy ray polymerization initiator depending on the demand. Sense of tc with fertilizer (4) shot, in addition to the aforementioned ingredients, - additives, such as six magnetic seven and then add appropriate - agents, and for #, curing (crosslinking) accelerators, adhesives , vulcanization durability; tackifiers for pressure-sensitive adhesive properties, and anti-aging agents and antioxidants for improving _ f. Guan, the preferred energy ray curable component (pressure-sensitive adhesive) can be used in the base anvil, and the composition of the m-line-curable compound can be solidified. The agent contains (4) a curable pressure-adhesive agent, and the use of the sensitized acid-based salty plant containing the side chain acrylic vinegar A co-polymer (containing poly(methyl)propene or a polyfunctional acrylate), and UV-curable 0-agent UV-curable salty anti-allergic agent A method for producing a acrylic acid-based polymer of acetoacetate and a propylene-based material which can be introduced into the side bond by the acid vinegar group and used in the same manner as described above. (4) The acid-crosslinking agent is a low molecular weight compound described as one of the compounds containing a poly(fluorenyl) acrylonitrile group, T, T, >». Purple One instance.乍 is a representative energy ray polymerization initiator. In addition, as a component, the use of a pressure sensitive adhesive based on the aforementioned acrylic acid squeezing agent may also be 312 ΧΡ / invention specification (supplement) / 97-03/96141972 The non-energy ray of the house adhesive can be solid 32 200835603 sensitizing pressure adhesive, in this case, is suitable for forming a tubular reel with a pressure sensitive adhesive having a lower pressure-sensitive adhesive force than the peeling stress, for example, L , with Shi Xi mirror wafer as the adhesion body at 180. Peel test (room temperature (25 〇), can use a pressure-sensitive adhesive force of 6.5 Newtons / 1 〇 mm $ or less (for example, 0. 05 to 6.5 Newtons / 10 mm), and especially 6 Newtons a pressure sensitive adhesive of /10 mm or less (for example, 〇·〇5 to 6.00 Newtons/1 mm, - preferably 〇2 to 6.0 Newtons/10 mm) _ as this has a small pressure-sensitive adhesive force A non-energy ray-curable pressure-sensitive adhesive based on an acrylic pressure-sensitive adhesive is preferably used by adding a crosslinking agent capable of reacting with the aforementioned reactive functional group (for example, an isocyanate crosslinking agent, a tripolyamine crosslinker, an epoxy crosslinker, or the like] to an alkyl (meth)acrylate [eg, alkyl (meth) acrylate, such as (decyl) decyl acrylate, (fluorenyl) acrylate Ester, a copolymer of (meth) butyl acrylate, 2-ethylhexyl (meth) acrylate, (mercapto) acrylonitrile oxime® or the like] and having a 'reactive functional group' • Monomer (for example, a carboxyl group-containing or anhydride group-containing monomer such as acrylic acid, methacrylic acid, or Acid, fumaric acid, maleic anhydride or the like; δ-based precursor 'such as (mercapto) propaneuric acid 2 - ethyl acetonate or the like; amine-containing monomer 'such as (methyl) Acrylic acid and the like; an indigo-containing monomer such as (meth) acrylamide or the like; or an analog thereof, and optionally a copolymerizable monomer (for example, having an alicyclic ring) A (mercapto) acrylate of a hydrocarbon group such as (meth) isopropyl acrylate or the like, acrylonitrile, or the like, and the copolymer is crosslinked to prepare an acrylic pressure sensitive adhesive. 312XP/Invention Manual (Supplement)/97-03/96^972 33 200835603 The pressure-sensitive adhesive layer 3 can be formed by the general method of 祛'π, +, ^, , ^ r- as follows: : (which is prepared by applying a resist adhesive, an energy ray curable compound, and a bismuth agent) to a method of coating the restriction layer 2 (in the foregoing example, the system 22); or applying the coating (four) to Appropriate::: She is off the object to form a sticky layer and transfer it to the limit 2. In the case of the transfer method, = is in the interface with the restriction layer 2. In this case, the air (four)^: two, the heating/pressurizing process in the process is diffused and removed. The layer 3 can have a single layer structure or a composite layer structure. = Mingzhong's money adhesion layer 3 can be advanced - such as glass beads, two moons, beads! grain. Adding glass beads or resin beads to the pressure-sensitive adhesive g 3 can be further cut; the number is increased, thereby contributing to the reduction of the pressure-sensitive adhesive force. The granules have, for example, an average particle size of from about 1 to about 10 microns, preferably from 1 to 20 meters. The total pressure j is the total pressure-sensitive adhesive layer of the weight. 3: Bead: The base is used in an amount of 2 (1) 00 by weight, preferably 5 to (10) parts by weight. An excessively large amount of addition causes a dispersion of fatigue, which makes coating of the pressure-sensitive adhesive difficult. On the other hand, an excessively small amount has a tendency to provide only an insufficient effect. The pressure-sensitive adhesive layer 3 has a thickness generally from 10 to 200 μm, preferably from 2 to 1 〇〇 stomach micron, and more preferably from 30 to 6 μm. When the thickness is too small, the pressure-sensitive adhesive force becomes insufficient, and thus the support or temporary fixation of the adhesive body tends to become difficult. On the other hand, when it is too large, it is uneconomical and the handling properties deteriorate. The self-rolling laminated sheets of the present invention can be selectively overlapped according to the use of the 312 ΧΡ / invention specification (supplement) / 97-03/96141972 34 200835603 shrinkable film layer 1 and the limiting layer 2 (the aforementioned specific elastic layer 2i And just F film layer 22), and is prepared by laminating such layers using a laminating device such as a hand roller or a laminating machine or an atmospheric pressure compressing device such as an autoclave. In addition, the self-rolling pressure-sensitive adhesive sheet of the present invention can be provided on the surface of the confinement layer 2 of the self-rolling laminated sheet by the pressure-sensitive adhesive layer 3, or by providing a pressure-sensitive adhesive layer on one side thereof in advance. 3 (4) 2 (or rigid film layer Μ) overlaps and laminates with shrinkable film layer 1 (or shrinkable film layer 弹性 and elastic layer 21)

The self-rolling pressure-sensitive adhesive sheet of the present invention can be utilized as a semiconductor or its four-like protective pressure-sensitive adhesive sheet, or a fixed pressure-sensitive adhesive sheet for a semiconductor wafer or a basin analog, and it can be further A pressure-sensitive adhesive sheet for back grinding of Shishi Semiconductor is used, and a pressure-sensitive adhesive sheet for back grinding of a compound semiconductor is used, and a square of a feed conductor is cut (4) a pressure-sensitive adhesive sheet for a compound semiconductor. Pressure-sensitive adhesive sheet for pellet cutting, for square chip cutting of semiconductor package (4) Sticky adhesion, pressure-sensitive adhesive sheet for glass square grain, and pressure-sensitive adhesive for square grain cutting of ceramic pot sheet. And particularly useful as a magnetic adhesive sheet for semiconductors, such as a sensible pan-adhesive sheet for a conductor and a viscous adhesive for fixing a semiconductor wafer. The self-rolling pressure-sensitive adhesive sheet using the present invention will be described below. Processing process. The self-rolling pressure-sensitive adhesive sheet of the present invention is adhered to: the body is temporarily fixed. Subsequently, after the second work is performed on the adherend (processed article), the pressure of the adhesive layer of the self-rolling pressure-sensitive adhesive sheet is low = and provides - such as heat stimulation to induce the shrinkable film layer of cattle thereby causing self-rolling Pressure sensitive adhesive sheet in one direction (usually along the main: 312 χ ρ / invention manual (supplement) / 97-03/96141972 35 200835603 = self-wide or from the opposite end towards the center (usually along the main contraction axis ) = roll up ' thus forming one or two tubular reels and thus from::: this: to obtain the finished object. In the case of a self-rolling sense r 2 in the direction of self-rolling, forming a tubular reel

I roll off early), and in the case of the two opposite ends of the self-photographing bucket '# R Two-way scrolling peeling). Representative examples of the processed article include examples of the semiconductor wafer m including cutting, square cutting, grinding, rhyming, car making, and twisting (in the case where the layer can be a heat shrinkable film layer, It is limited to a temperature equal to or lower than the heat collection, the % starting temperature, and is not particularly limited as long as the processing is performed using the pressure-sensitive adhesive sheet. : After the edifying object is reinforced, for example, the sensory layer is the energy sound 1 = Γ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ The layer illuminates the energy ray and is heated to shrink the film layer by heating the gargle. Thus, the 'pressure-sensitive adhesive layer is cured and the wire is stressed' while the shrinkable film layer is gradually lifted in the outer edge portion thereof by shrinking the two pieces, and the inner edge portion (or from the opposite side) The outer edge portion, in one direction (or in two directions opposite each other (toward the center)) spontaneously: enters, thus forming a tubular reel (or two tubular reels). In this woodwork, The contraction direction of the sensible adhesive sheet is adjusted by the restriction layer, and the rolling occurs in a car to quickly form a tubular reel. Therefore, the pressure-sensitive adhesive sheet can be easily and cleanly peeled off from the adhered body (processed article). Root 312XP/Invention Manual (Supplement)/97-G3/96141972 36 200835603 According to the shrinkage property of the heat shrinkable film layer, it is suitably selected, for example, from 7〇^ 180 C 乂 自 to 14 (TC. The energy ray and the heating can be performed in the same manner as the η inch or stepwise. In the case of heating, the heating can be carried out not only by heating uniformly over the entire surface, but also by gradually heating the entire surface, and further by only partially Heating to provide the beginning of stripping The heating must be appropriately selected for the purpose of easy to use the peeling property. Figs. 3A to 3D are diagrams (perspective views) illustrating the self-rolling mode of the self-rolling laminated sheet or the pressure-sensitive adhesive sheet of the present invention, wherein Fig. 3 "Describes that a self-rolling laminated sheet or a magnetic adhesive sheet provides a self-rolling laminated sheet or a pressure-sensitive adhesive sheet which is provided by a stimulus which induces shrinkage of the shrinkable film layer in providing a shrinkage-inducing shrinkage film 3B. The pressure-sensitive adhesive sheet after the pressure-sensitive adhesive layer of the pressure-sensitive adhesive layer is reduced or lost starts from one: the middle (the main shrinkage axis along the shrinkable film) is rolled up from the outer edge portion (the end portion) Figure 3C is a diagram illustrating the state in which the sheet is rolled and formed into a tubular (rolled in one direction); and Figure 3D illustrates the sheet from the opposite ends toward the center (generally Spontaneously rolled up along the main shrinkage axis of the wall-receiving film, thus forming a two-rolled roll (a pattern of two-way roll state. The difference between the properties of the self-rolling laminated sheet and the self-rolling pressure sensitive adhesive sheet is extremely small. Film or sensuous adhesive film experience: scrolling or two-way volume For example, depending on the pressure-adhesive force of the confinement layer and the shear modulus of the confinement layer (especially the elastic layer), the θ is changed. 's In FIGS. 3A to 3D, L indicates the self-rolling layer. The sheet or house adhesive sheet 4 is in the direction of rolling (usually along the main shrinking axis of the shrinkable film layer) (or in the case of a circular sheet) (see Figure 3a), and 4 312XP/Invention Manual (Repair) /97-03/96141972 200835603 The straight line of the tubular roll formed is shown as "汔米々々. Wei (or although the diameter of the official roll is not uniform along the longitudinal direction of the rolling element, for example in the diameter) (Refer to Fig. 3 (: and 31)). 2 = The maximum straightness in the case of the shape of the ® is the self-rolling laminated sheet of the present invention, and the r/L is preferably in the η ηπι s Λ The best is from 0. 01 to 〇 2 〇ί 孙仓丨上1Λ $ lnnn . ^ is for example 10 to 2000 mm, preferably 300 1 〇〇〇 pen not. The laminated sheet or the pressure-sensitive adhesive sheet has a value of, for example, millimeters, preferably 300 to 1000 millimeters, which can be adjusted by the adjustable cavity Jg 1 , the fine film layer 1 , the limiting layer 2 (the elastic layer 21 and the rigid and adhesive layer) The type and composition of the material of each of the three layers are adjusted to the above range by the elastic layer 21 and the rigid film layer and the thickness of the restriction layer 2. In this specific example, the self-rolling laminated sheet or pressure-sensitive adhesive layer The shape of the sheet is a quadrangle, and (4) is not limited to such a shape, but may be appropriately adapted according to the purpose.

Any one of shape, ellipse and polygon. ^ W 1 . The two tubular reels formed in the 'month condition' forming the two tubular reels each have a ratio (r/L) within the aforementioned range. When the self-rolling pressure-sensitive adhesive sheet of the present invention is used for the processing of the adhesive body (processed object), the workpiece can be prevented from being broken by the stress at the time of peeling, and even if it is processed (four) adhesive (four) such as thin semiconductor (four) In the case, the pressure-sensitive adhesive sheet can be easily peeled off from the adhesive without causing cracking or contamination of the one. [Examples] Hereinafter, the present invention will be further clarified by examples, but the present invention is not limited to the examples. Shear modulus and elasticity of the elastic layer and the rigid film layer 3IZXP/Invention Manual (Supplement)/97-〇3/96141972 38 200835603 The pressure-sensitive adhesive force of the layer on the shrinkable film is measured in the following manner. / Further 'The index r/L used to determine whether the sheet can be used as a tubular reel is as defined in the following description. [Measurement of Young's Modulus (80 ° C) of the rigid film layer] The Young's modulus of the 曰 rigid film layer was measured in the following manner in accordance with JIS K7127. Using a tensile tester Autograph AG-lkNG (assembly heating cover) manufactured by Shimadzu Corporation, a rigid film of 2 mm mm x 10 mm was cut and adhered at a chuck distance of 1 mm, with a heating cover After providing a temperature of 80 °c, the sample was measured at a tensile rate of 5 mm/min = open, and a stress-strain relationship was obtained. The stress was determined to be 〇·2% and 〇·45% at two points. Modulus. This measurement was repeated 5 times on the same sample and averaged. [Shear modulus of elastic layer (measurement of 80. ]) The shear modulus of the elastic layer was measured in the following manner. The elasticity described in each of the examples and the comparative examples was prepared with a thickness of 15 to 2 mm. The layer was punched by a punch with a diameter of 7.9 mm to obtain a sample for measurement. It was fabricated by a viscoelastic spectrometer (ARES) Rheometric Scientific inc., and was cut at a chuck pressure of 1 gram and i Hz. Measurements were carried out at a frequency [8 t m parallel plate made of stainless steel (manufactured by TA Instruments, manufactured by Co., Model No. 708.01 57)], and the shear modulus at 8 (rc) was used. [The feeling of the elastic layer on the shrinkable film Measurement of pressure-adhesive force] The pressure-sensitive adhesive force of the elastic layer on the shrinkable film was measured by a peel test (50 ° C). The laminated sheet was prepared in the same manner as the pressure-sensitive adhesive sheet except for No pressure-sensitive adhesive layer is provided (energy ray-curable pressure-sensitive adhesive 312/invention specification (supplement)/97-03/9614^2 39 200835603 = layer f::: curable pressure-sensitive adhesive layer) if the layer is laminated At the time of the film, the laminated film is a reactive crosslinking agent, but has not been irradiated with ultraviolet rays, and the strength is 50Oni J/cin. 2 UV 弁 私 私 私 私 你 你 你 你 你 你 你 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 切割 10 10 10 10 10 10 Round), and the detachment surface = pressure-sensitive adhesive tape adhered to the rigid support substrate (Shi Xi to shrinkable extension (4) is bonded by the pressure-sensitive adhesive tape to make the rigid support substrate and heat; =: 2 On a heating table (heater) of 5°. Pulling the tensile type at a tensile speed of 300 mm at a minute, and /, = field; 11 force when peeling occurs between the shrink film and the elastic layer ( Newton / 10 mm). The thickness of the rigid Θ support substrate is 38 μm in order to eliminate the variation of the thickness of the rigid support substrate. [Non-energy ray-curable pressure-sensitive adhesive layer for the pressure-sensitive adhesive of Shi Xi mirror wafer Measurement] " / Three types of non-energy radiation-curable pressure-sensitive adhesives obtained by the following Production Examples 4 to 6 were laminated to ethylene terephthalate using a manual roller. Substrate (thickness 38 microns), which is cut into 觅1 〇耄m size and removed to release tablets, Using a hand roller, bonding to a 4 inch mirror silicon wafer (Shin-Etsu Semiconductor

Manufactured by Co., Ltd., trade name "cz-N"). The stretch type wood of a peel tester is bonded to this combination by using a pressure-sensitive adhesive tape which is 180. The direction was pulled at a stretching speed of 3 mm/min, and the force (Newton/丨〇m) when the peeling between the shrinkable film layer and the elastic layer was generated was measured. Mao 312/Invention Manual (Supplement)/97-03/96141972 40 200835603 Similarly, each of the energy ray-curable pressure-sensitive adhesive layers obtained in the following Production Examples i to 3 was measured in the same manner as described above.感 矽 矽 ( ( (Shin-Etsu Semiconduct 〇 〇 , , , U U U U U U U U U U U U U U U U U U U U 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 As a result, when all the pressure-sensitive adhesives were peeled off at '〇. 01 Newton/10 house-meter or less, the pressure-sensitive adhesive force was sufficiently lowered-low. For this reason, the description of the pressure-sensitive adhesive force of the energy ray-curable pressure-sensitive adhesive layer for the tantalum wafer in the following examples will be omitted. [Measurement of r/L value] Each of the pressure-sensitive adhesive sheets obtained by the following examples was cut into a size of 1 mm × 100 mm, and then irradiated with an energy ray by ultraviolet light of 5 〇〇 mJ/cm 2 . The pressure sensitive adhesive is prepared by curing the pressure-sensitive adhesive, and the end portion of the pressure-sensitive adhesive sheet is immersed in hot water of 8 〇 c > c along the contraction axis of the shrinkable film to promote deformation thereof. In order to change the pressure-sensitive adhesive sheet into a tubular roll, the diameter is measured by one foot. This value is divided by 1 〇 〇 mm to obtain r/L. 10 In the self-winding property, the laminated sheet having no pressure-sensitive adhesive layer exhibits the same performance as the pressure-sensitive adhesive sheet having the pressure-sensitive adhesive layer. [Manufacturing Example of Pressure-Sensitive Adhesive Layer] [Manufacturing Example 1] [Manufacture of energy ray-curable pressure-sensitive adhesive layer (丨)] In a propionic acid-based polymer, 80% is derived from an acrylic polymer The hydroxyl group of 2-hydroxyethyl acrylate is obtained by copolymerizing a composition of butyl acrylate: ethyl acrylate: 2-hydroxyethyl acrylate = 50 ·· 50 ··20 (weight ratio) Methyl methacrylate oxime ethyl ester (2-isocyanatoethyl methacrylate) 312XP / invention specification (supplement) /97·〇3/96141972 41 200835603 Bonding, resulting in thiol acrylic acid in the side chain An ester-based acrylic polymer. 50 parts by weight of pentaerythritol tetraacrylate as a compound containing two or more compounds having a carbon-carbon double bond, 6 parts by weight of a photoinitiator (manufactured by Ciba-Geigy Ltd., Trade name "Irgacure 184"), 1 · 5 parts by weight of crosslinker (trade name "Coronate L"), and 40 parts by weight of tackifier (manufactured by G〇ken Chemical Co. Ltd., 'Polymethacrylate An oxime ester bead, trade name "MX500") is mixed with 100 parts by weight of an acrylic polymer having a methacrylate group in a side chain to produce an energy ray-curable pressure-sensitive adhesive. The prepared energy ray-curable pressure-sensitive adhesive is applied to a release sheet (manufactured by Mitsubishi Polyester Film Co., trade name "MRF38") by a coater, and dried to remove volatile substances such as a solvent. A laminate element having an energy ray-curable pressure-sensitive adhesive layer having a thickness of 3 μm on the release sheet is obtained. [Manufacturing Example 2] 制造 [Production of energy ray-curable pressure-sensitive adhesive layer (2)] In an acrylic polymer, 8% by weight of acrylonitrile polymer derived from acrylic acid polymer The hydroxyl group [obtained by copolymerizing a composition of butyl acrylate: ethyl acrylate: 2-hydroxyethyl acrylate = 5 〇: 5 〇: 2 〇 (by weight)] with methyl isocyanate Propylene oxirane (2-ethyl isocyanate methacrylate) is bonded to form an acrylic polymer having a methyl acrylate acrylate in the side bond. 100 parts by weight of two or more compounds having a carbon-b-back bond of the g-b-b group by Nipp〇n Synthetic

"ultravi〇iet uvi7〇〇" manufactured by Industry Co., Ltd. (Business 312 / invention manual (supplement) / 97-03/96141972 42 200835603 product name), 3 parts by weight of photoinitiator (manufactured by Ciba_Geigy Ud•) , Shangkou mouth name "Irgacure 184"), and 1.5 parts by weight of cross-linking agent (trade name "C〇ronate L") and 10 parts by weight of acrylic acid having a mercapto acrylate group in the side chain The polymer is mixed to produce an energy ray curable adhesive. The prepared energy ray-curable pressure-sensitive adhesive is applied to a release sheet (manufactured by Mitsubishi Polyester Film Co., manufactured by Mitsubishi Polyester Film Co., Ltd., 10 crcr "MRF 3 8") by a coater and dried to remove such The volatile material of the solvent provides a laminate element having a 30 micron thick energy ray curable pressure sensitive adhesive layer on the release sheet. [Manufacturing Example 3] [Production of energy ray-curable pressure-sensitive adhesive layer (3)] In an acrylic polymer, 80% of a hydroxyl group derived from 2-hydroxyethyl acrylate derived from an acrylic polymer [via making acrylic acid Butyl ester··ethyl acrylate: 2-hydroxyethyl acrylate=50: 50·· 20 (weight ratio) of the composition of copolymerization of 10] and isocyanate propylene oxyethyl ester (methacrylic acid 2 -ethyl isocyanate is bonded to produce an acrylic polymer having a methacrylate group in the side chain. 50 parts by weight of a compound having two or more functional groups having a carbon-anthracene double bond by Nippon Synthetic Chemie & l

"Ultraviolet UV1700" (trade name) manufactured by Industry Co., Ltd., 3 parts by weight of photoinitiator (manufactured by Ciba-Geigy Ltd., trade name "Irgacurel 84"), and 1.5 parts by weight of a crosslinking agent (trade name "Coronate L") mixed with 100 parts by weight of a bismuth acrylate polymer having a mercapto acrylate acrylate in the side chain to produce an energy ray curable 312 / invention specification (supplement) / 97- 03/96141972 43 200835603 Pressure-sensitive adhesive. The prepared energy ray-curable pressure-sensitive adhesive is applied to a release sheet (manufactured by Mitsubishi P〇lyester Film Co., trade name "MRF38") by a coater, and dried to remove a solvent such as a solvent. A volatile material is obtained, and a laminate element having a 30 um thick energy ray-curable pressure-sensitive adhesive layer on the release sheet is obtained. • [Manufacturing Example 4] Boxing [Manufacture of non-energy ray-curable pressure-sensitive adhesive layer (i)] 0. 7 Injury by Mitsubishi Gas Chemical Company,

"Tetrad c" (trade name) manufactured by Inc. and 2 parts by weight of cross-linking agent (trade name "Coronate L"), and 1 part by weight of acrylic copolymer [via butyl acrylate: acrylic acid = 1 〇〇: 3 (by weight) copolymerized to be mixed to produce a non-energy ray-curable pressure-sensitive adhesive. The prepared non-energy ray-curable pressure-sensitive adhesive is applied to a release sheet (manufactured by Mitsubishi Polyester Film Co., trade name "MRF38") by a coater, and dried to remove a volatile such as a solvent. A material, and a laminate element having a non-energy ray curable pressure-sensitive adhesive layer having a thickness of 3 μm on the release sheet. [Production Example 5] [Manufacture of non-energy ray-curable pressure-sensitive adhesive layer (2)] "Tetrad C" (trade name) manufactured by Mitsubishi Gas Chemical Company, Inc., 14 parts by weight, 2 Cross-linking agent (trade name "(:〇1^仙忭1"), and 〇.〇5 parts by weight 1)& Bu 1(:1^1(〇灯〇

"Epan 710" (trade name) manufactured by Seiyaku Co., Ltd., and 100 312 / invention specification (supplement) / 97-03/9610972 44 200835603 parts by weight of acrylic copolymer [via 2-ethyl acrylate Hexyl ester: porphyrin acrylate: acrylic acid: 2-hydroxyethyl acrylate = 75 : 25 : 3 : 0.1 (by weight) copolymerization to obtain a non-energy ray-curable pressure-sensitive adhesive. The obtained non-energy ray-curable pressure-sensitive adhesive is applied to a release sheet (manufactured by Mitsubishi Polyester Film Co., trade name "MRF38") by a coater, and dried to remove such as The volatile volatile material of the solvent provides a laminate element having a 30 micron thick non-energy ray curable pressure sensitive adhesive layer on the release sheet. [Manufacturing Example 6] [Production of non-energy ray-curable pressure-sensitive adhesive layer (3)] 0.5 parts by weight of "Tetrad C" (trade name) manufactured by Mitsubishi Gas Chemical Company, Inc. and 8 a cross-linking agent (trade name "Coronate L") mixed with 100 parts by weight of a propionic acid copolymer (by Dai-ichi Lace Mfg Co., Ltd., trade name "Rheocote 10R1 020S"). A non-energy ray-curable pressure-sensitive adhesive is produced. The obtained non-energy ray-curable pressure-sensitive adhesive is applied to a release sheet (manufactured by Mitsubishi Polyester Film Co., trade name "MRF38") by a coater, and dried to remove volatility such as solvent^ Substance to obtain a laminate element having a non-energy ray curable pressure-sensitive adhesive layer of 30 microns thickness on the release sheet. [Manufacturing Example 7] [Manufacture of non-energy ray-curable pressure-sensitive adhesive layer (4)] 0.5 parts by weight of Mitsubishi Gas Chemical Company, 312/invention specification (supplement)/97-03/96141972 45 200835603

"Tetrad C" (trade name) manufactured by Inc., 2 parts by weight of cross-linking agent (trade name "Coronate L"), and 0.05 parts by weight of cross-linking agent (trade name "Coronate L"), and 100 Parts by weight of acrylic copolymer [by making 2-ethylhexyl acrylate: porphyrin acrylate·acrylic acid: 2-hydroxyethyl acrylate = 75: 25: 3: 0.1 (weight ratio) copolymerization Mixing, resulting in a non-energy ray-curable pressure-sensitive adhesive. The prepared non-energy ray-curable pressure-sensitive adhesive is applied to a release sheet (manufactured by Mitsubishi Polyester Film Co., trade name "MRF38") by a coater, and dried to remove volatile substances such as a solvent. A laminate element having a non-energy ray curable pressure-sensitive adhesive layer having a thickness of 3 μm on the release sheet is obtained. [Manufacturing Example of Pressure-Sensitive Adhesive Sheet] [Example 1] 45 parts by weight of isobutyl acrylate, 45 parts by weight of 2-ethylhexyl acrylate, 10 parts by weight of acrylic acid, 〇·1 part by weight Diol diacrylate, 0.05 parts by weight of "Irgacure 651" (photoinitiator, manufactured by Ciba-Geigy Ltd.) and 〇·05 parts by weight of "Irgacure 184" (photoinitiator, manufactured by Ciba-Geigy Ltd.) The prepolymer was obtained by mixing and irradiating ultraviolet light for 1 hour. The prepolymer was applied to one surface of a polyethylene terephthalate film (PET film, thickness: 38 μm, trade name; L_Kirr〇r S10, manufactured by Toray Industries, Inc.) as a rigid film layer. Further, a heat shrinkable film (uniaxially stretched polyester film, thickness: 6 μm, trade name "Space Clean S7053", manufactured by T〇y〇bo Co.) was superposed thereon and laminated by hand roller. . Final curing from both sides by UV irradiation, 312XP/Invention Manual (Supplement y97_03/96141972 46 200835603) = Get laminated sheets (thickness of the adhesive layer of the B-guar acid-based adhesive layer: i() 5 μm). The energy ray of the laminate obtained in Example 1 can be cured: the side of the pressure-adhesive layer (1) is laminated on the side of the rigid film which is obtained by the above-mentioned embossing. The laminating machine makes the laminated layer tightly and visibly adhered, thereby obtaining a viscous sheet, which comprises a laminarly laminated ", r + j heat-receiving film layer, a limiting layer [propylene-plutonium] Sense (4) enamel layer (elastic layer) / PET film layer (rigid film layer)], energy ray curable pressure-sensitive adhesive layer (1) and release sheet. Heat shrinkable film has 70% at 100 〇c热 夕 Xi Lu + # U / ° ^ u on the main shrinkage direction of the heat shrinkage rate. Acrylic pressure sensitive adhesive layer (elastic layer) has a shear modulus of 〇 126 χ 1 〇 6 Newton / square meter (m :) 'and the product of the shear modulus and the thickness of 13.2 Newtons/meter. The pressure-sensitive adhesive layer of the acrylic pressure-sensitive adhesive layer (elastic layer) on the heat-shrinkable film layer (5 (TC) is 4.9 Newtons / 10 mm.... PET film layer (rigid film layer) has 8 (Young's modulus of rc is 3 72 χΐ〇 9 Newtons / square meter, and 1.41 Χ 105 Newtons) Φ product of the Young's modulus of the meter and the thickness Φ. The value of r/L is 〇. 〇 6. [Example 2] A pressure-sensitive adhesive sheet was produced in the same manner as in Example 1, except that except for Example 1. The PET film is replaced by "Lumirror Slh (trade name), manufactured by Toray Industries, Inc. having a thickness of 25 μm. The PET film layer (rigid film layer) has a Young's modulus of 3.72χι〇9 Newton at 80 °C. /m2, and the product of the Young's modulus of 0.93χ105 Newtons/meter and the thickness. 3Π/Invention Manual (supplement)/97-03/96141972 47 200835603 The value of r/L is 〇·06. [Examples 3] Dissolving 1 part by weight of acrylic polymer in toluene (by making 1 part by weight of acrylic acid 2 - ethyl ester, 70 parts by weight of butyl acrylate, 30 parts by weight of ethyl acrylate) And 5 parts by weight of acrylic acid copolymerized with · 10 parts by weight of neopentyl alcohol hexaacrylate, 1 part by weight - "Tetrad C" (crosslinking agent, Mitsubishi Gas Che Mical Co. Ltd. manufactured by Lu, 2 parts by weight of "Coronate L" (crosslinking agent, manufactured by Nippon Polyurethane Industry Co. Ltd.) and 3 parts by weight of "Irgacure 651" (photoinitiator, Ciba-Geigy Ltd.) The polymer solution obtained by coating was applied to a polyethylene terephthalate film (PET film, thickness: 38 μm, trade name r Lumirr〇r S10) as a rigid film layer, Toray Industries, Inc. On one surface, and "Space Clean S5630" (trade name) having a thickness of 60 μm, manufactured by Toysb〇Co. (uniaxially stretched polyester film) is superposed thereon and using a manual roller _ Lamination to obtain a laminated sheet (thickness of the acrylic pressure-sensitive adhesive layer: 3 μm). " • The side of the laminated energy ray-curable pressure-sensitive adhesive layer (1) produced in Example 1 was laminated on the side of the rigid film layer of the laminated sheet prepared above. The laminated layer is closely adhered by a laminating machine, thereby obtaining a pressure-sensitive adhesive sheet comprising a heat-shrinkable film layer laminated in sequence, and a limiting layer [acrylic pressure-sensitive adhesive layer (elastic layer)/PET Film layer (rigid film layer)], a pressure-sensitive adhesive layer (1) capable of curing by 1 ray, and a release sheet. The heat shrinkable film has a heat shrinkage ratio of 70% or more under the loot: in the main shrinkage side 312 / invention specification (supplement) / 97-03 / 96141972 48 200835603. The acrylic pressure-sensitive adhesive layer (elastic layer) has a shear modulus of 〇·689×1 06 Newtons/m 2 (80 〇, and a product of shear modulus and thickness of 20·67 Newtons/m. Acrylic sensation) The pressure-sensitive adhesive layer of the pressure-adhesive layer (elastic layer) on the heat-shrinkable film layer (5 (TC) is 4.9 Newtons / 1 mm. * The value of r / L is 〇. 〇 55. * [Example 4] Φ 100 parts by weight of an acrylic polymer (trade name "Rheocote R1020S", manufactured by Dai-ichi Lace Mfg. Co.) and 10 parts by weight of a neopentyl alcohol denatured acrylate crosslinker (100 parts by weight) were dissolved in methyl ethyl ketone. Product name "DPHA40H", manufactured by Nippon Kay aku Co., Ltd.), 0.25 parts by weight of "Tetrad C" (crosslinking agent, manufactured by Mitsubishi Gas Chemical Co., Ltd.), and 2 parts by weight of "Coronate L" ( A cross-linking agent, manufactured by Nippon Polyurethane Industry Co., Ltd., and 3 parts by weight of "Irgacure 651" (photoinitiator, manufactured by Ciba-Geigy Ltd.), which was applied as a rigid film. Layer of polyethylene terephthalate film (PET film, thickness: 38 microns, commodity One of the "Lumirror S10", manufactured by Toray Industries, Inc., and a heat shrinkable film (uniaxially stretched polyester film, thickness: 60 μm, trade name "Space Clean S5630", manufactured by Toyobo Co. The laminate was superposed thereon and laminated by hand-rolling to obtain a laminated sheet (thickness of the acrylic-based pressure-sensitive adhesive layer: 30 μm). The energy ray curable pressure-sensitive adhesive layer of the laminate produced in Example 1 was produced. The side of the layer (1) is laminated on the rigid film layer 312 of the laminated sheet prepared above/invention specification (supplement)/97-03/96141972 49 200835603: the laminate is made through a laminator Adhesive, can = adhesive sheet, which includes a layer of heat-shrinkable film in sequence, limiting the pressure-sensitive adhesive layer (elastic layer) / PET film layer (rigid film, ray-curable pressure) Adhesive layer (1) and release sheet. Acrylic adhesive layer (elastic layer) has 0·72χΐ;=cutting modulus (10). C), and Newton/meter shear modulus: product. Acrylic acid It is the adhesion of the adhesive layer (elastic layer) to the heat-shrinkable film layer (at 5 (rcT) is 44 Newton A mm. The value of r/L was 〇. 〇〇 45. [Example 5] A pressure-sensitive adhesive sheet was produced in the same manner as in Example 4 except that the polyethylene terephthalate was used as the rigid film layer. The product of the film-based film layer (rigid paste J ο, 5·^ xiao/m2) and Young's modulus and thickness is 1.86 x l 〇 5 N/m. The value of r/L is 〇· 〇6. [Example 6] /, a pressure-sensitive adhesive sheet was obtained in the same manner as in Example 4 except that the polyethylene terephthalate film having a rigid tantalum layer was thick and had a thickness of 75 μm. The PET film layer (rigid film layer) has a Young's modulus of 8 〇〇c = 3.72 χ 1 〇 9 Newtons per square meter, and a Young's modulus and thickness of 2.79 χ 1 〇 5 Newtons/meter. The value of r/L is 〇·095. [Example 7] 312XP/Invention Manual (Supplement)/97-03/96141972 50 200835603 A pressure-sensitive adhesive sheet was produced in the same manner as in Example 5 except that the production example 2 was used in the same manner as in Example 5. The energy ray can cure the pressure sensitive adhesive layer (2). The value of r/L is 0. 065. [Example 8] A pressure-sensitive adhesive sheet was produced in the same manner as in Example 7 except that the polyethylene terephthalate film system as a rigid film layer in Example 7 had a thickness of 75 μm. The value of r/L is 0·1. [Example 9] 100 parts by weight of an acrylic polymer (manufactured by Dai-ichi Lace Mfg Co., trade name "Rheocote R1 020S"), and 10 parts by weight of a neopentyl four were dissolved in mercaptoethyl ketone. Alcohol-denatured acrylate cross-linking agent (manufactured by Nippon Kayaku Co., Ltd., trade name "DPHA40H"), 0.25 parts by weight of "Tetrad C" (crosslinking agent, Mitsubishi Gas 10 Chemical Co., Ltd. Manufactured, 2 parts by weight of "Coronate L" (crosslinking agent, manufactured by Nippon Polyurethane Industry, Co., Ltd.) and 3 parts by weight of "Irgacure 651" (photoinitiator, manufactured by Ciba-Geigy, ' Ltd.) The polymer solution obtained was applied to a polyethylene terephthalate film (PET film, thickness: 38 μm, manufactured by Toray Industries, Inc., trade name "Lumirror S10") as a rigid film layer. On one surface, and a heat shrinkable film (uniaxially stretched polyester film, thickness: 60 μm, manufactured by Toyobo Co., trade name "Space Clean S7053") was superposed thereon and laminated by hand roller Obtain a laminated sheet (acrylic 312XP / invention manual (fill ) / 97-03 / 9,614,197,251,200,835,603: 30 microns).

糸 pressure-sensitive adhesive layer (elastic layer) / ΡΕτ

The thickness of the 糸 迁 adhesion layer ··········································· The pressure-sensitive adhesive layer (3) and the release sheet. _ The pressure-sensitive adhesive force of the acrylic pressure-sensitive adhesive layer (elastic layer) on the heat-shrinkable film layer (50 〇 is 4·4 Newtons/10 mm. The value of r/L is 〇. 〇 5. [Example 10 A pressure-sensitive adhesive sheet was produced in the same manner as in Example 9, except that the polyethylene terephthalate film as the rigid film layer of Example 9 had a thickness of 50 μm. The value of r/L was 〇·〇45. 10 [Example 11] 100 parts by weight of an acrylic polymer material (manufactured by Dai-ichi Lace Mfg Co., trade name "Rheoc〇te R1020S") was dissolved in mercaptoethyl ketone. 1 part by weight of a pentaerythritol-denatured acrylate cross-linking agent (manufactured by Nippon Kayaku Co., Ltd., trade name "DPHA40H"), and 25 parts by weight of "Tetrad C" (crosslinking agent, Mitsubishi) 2 parts by weight of "Coronate L" (crosslinking agent, manufactured by Nippon Polyurethane Industry, Co., Ltd.) and 3 parts by weight of "Irgacure 651" (photoinitiator, Ciba-, manufactured by Gas Chemical Co., Ltd.) Geigy, 312XP / invention manual (supplement) / 97-03/96141972 52 200835603 = manufactured) polymer solution, Coated with a release film "= (Mltsubishi PQlyester FUm. Manufactured, trade name: 38"), sub-rolled to remove volatile substances such as solvents, and obtained on the release sheet 3积Micron thick layer of acrylic acid-sensitive adhesive layer + As a rigid film containing ethylene-vinyl acetate copolymer (eva) = f thickness of 115 microns, using a manual roller bonding to it上,, after the release of the sheet, the heat shrinkable film (uniaxially stretched vinegar = degree: 60 μm, manufactured by Toyob 〇c〇., trade name “如(4) to discuss (10)”)) Overlapping on the side of the (4) acid-based pressure-sensitive adhesive layer: t The non-energy ray-curable pressure-sensitive (four) layer (1) of the laminate in Example 4 is laminated on the rigid film side of the laminated sheet prepared above. The top layer is adhered to the laminate to make the layer tightly adhered, (4) obtaining - pressure-sensitive = two, including the sequentially heat-shrinkable film layer, the limiting layer [propylene 2 viscous layer (elastic layer) ) Ship film layer (rigid film layer), non-energy ray curable pressure-sensitive adhesive layer (1) and release sheet. EVA film layer The rigid film layer is 8 〇. The Young's modulus is ι 〇8 sen 7 N/m2 and the product of Young's modulus and thickness is Ι24χΐ()3 Newton/m0, acrylic pressure-sensitive adhesive layer (elastic layer) adhesion to the heat shrinkable film (50. 〇 is 4.4 Newtons / 1 () mm. The non-energy ray-curable viscous adhesive layer has a sticky adhesion to the stone wafer. 312ΧΡ/Invention Manual (supplement)/97·03/96141972 53 200835603 is 0.38 Newton/10 mm. The value of r/L is 〇. 055. [Example 12] Dissolve 1 part by weight of an acrylic polymer (90 parts by weight of 2-ethylhexyl acrylate and 1 part by weight of acrylic acid) in ethyl acetate, 1 part by weight of a new pentane A polymer solution obtained by coating tetraol hexapropionate vinegar and 3 parts by weight of "I rgacure 651" (photoinitiator, manufactured by Ciba-Geigy Ltd.) on polyphenylene terephthalate as a rigid film layer Ethylene phthalate film (PET film, thickness: 38 μm, trade name “Luroirr〇r sl〇”, T〇ray

On one surface of Industries, Inc., and a heat shrinkable film (uniaxially stretched polyester film, thickness: 6 μm, trade name "Space Clean S5630", manufactured by Toyobo Co.) are superposed thereon. The laminated sheet was obtained by manual roll lamination (the thickness of the acrylic adhesive layer was 3 m). The side of the energy ray-curable pressure-sensitive adhesive layer of the Jg + & e A i ^ & 仵 仵 layer produced in Example 1 was laminated on the above radish L ^ 上 传The side of the rigid film layer of the laminated sheet. Through the laminating machine, the obtained laminate is tightly affixed to the ground, thereby obtaining a salty pressure-sensitive adhesive sheet, which comprises a sequential laminated " olefinic pressure-sensitive adhesive layer (elastic layer) / p 曰1•Bing 曰u仏π ΡΕΤ boat layer (rigid film layer)], energy! ray curable pressure-sensitive adhesive layer (1) and release sheet. : Dilute acid pressure-sensitive adhesive layer (elastic layer) with 胄4. Fang bought the cutting modulus, and 144 cattle dry page / thousand product. B-glycophoric acid adhesion layer (elastic film: degree: pressure adhesion force (50. 〇 is U.4 Newton / 1 〇 mm.... Receiving, sensation of pancreatic layer 312 / invention manual 0 54 piece 54 200835603 r/ The value of L is 0·055. [Example 13] 100 parts by weight of an ester polymer (by 100 parts by weight of Daicel)

PLACCEL CD220PL manufactured by Chemical Industries, Ltd. and 10 parts by weight of a polymer obtained from sebacic acid), and 4 parts by weight of "Coronate L" (crosslinking agent, Nippon Polyurethane Industry,

The polymer solution obtained by Co., Ltd. was applied to a polyethylene terephthalate film (PET film, thickness: 5 μm, manufactured by Toray Industries, Inc.) as a rigid film layer. On one surface of the name "Lumirror S10", a heat shrinkable film (uniaxially stretched polyester film, thickness: 60 μm, manufactured by Toyobo Co., trade name r Space Clean S5630) was superposed thereon. A laminate sheet was obtained by manual roll lamination (the thickness of the ester-based pressure-sensitive adhesive layer was 3 μm). The side of the laminated non-energy ray-curable pressure-sensitive adhesive layer (1) obtained in Production Example 4 was laminated on the side of the rigid film layer of the laminated sheet prepared above. ^The laminating machine adheres the obtained laminate tightly, thereby obtaining a pressure-sensitive adhesive sheet comprising a heat-shrinkable film layer laminated in sequence, a limiting layer [ester f pressure-sensitive adhesive layer (elastic layer) / PET臈 layer (rigid film layer)], 曰 曰 ray radiation curable adhesive layer (丨) and release sheet. The adhesive layer (elastic layer) has a shear modulus of 2 88 χΐ〇 5 Newtons per square meter, and a shear modulus and thickness multiplication of 8 64 Newtons / ^. The ester-based pressure-sensitive adhesive layer (elastic layer) has a heat-collecting force (50. 〇 is 13 Newton Λ. mm. (3) The value of r/L is 〇· 〇 5. 312XP/Invention Manual (Supplement)/ 97 Norm 96141972 55 200835603 [Example 14] A pressure-sensitive adhesive sheet was produced in the same manner as in Example 13 except that the polyethylene terephthalate film (PET film) as the rigid film layer in Example 13 was used. Thickness: 38 μm, manufactured by Toray Industries, Inc., trade name "Lumirror S10"). The value of r/L was 0. 045. [Example 15] A pressure-sensitive adhesive sheet was obtained in the same manner as in Example 13. The energy ray-curable pressure-sensitive adhesive layer (3) obtained in Production Example 3 was used as the pressure-sensitive adhesive layer in Example 13. The value of r/L was 0.05 hr. [Example 16] 100 parts by weight of vinegar polymer (polymer obtained from 100 parts by weight of PLACCEL CD220PL manufactured by Dai ce 1 Chemical Industries, Ltd. and 10 parts by weight of sebacic acid), and 4 parts by weight of r Coronate L" a polymer solution obtained by (crosslinking agent, manufactured by Nippon Polyurethane Industry, Co., Ltd.), It is coated on the surface of one of polyethylene terephthalate film (PET film, thickness: 50 μm, manufactured by Toray Industries, Inc., trade name “Lumirror SI 0”) as a rigid film layer, and A heat shrinkable film (uniaxially stretched polyester film, thickness: 60 μm, manufactured by Toyobo Co., trade name "Space Clean S7053") was superposed thereon and laminated by hand roll to obtain a laminated sheet (ester-based adhesive layer) The thickness is 30 μm. The energy ray-curable pressure-sensitive adhesive 312XP produced in the production example 1 is manufactured 312XP/invention specification (supplement)/97-03/96141972 56 200835603 The laminated layer on the side of the rigid film layer obtained above is closely adhered to the obtained laminate through a laminator, thereby obtaining a pressure-sensitive adhesive sheet comprising a heat-shrinkable film layer and a limiting layer which are sequentially laminated. Base pressure-sensitive adhesive layer (elastic layer) / PET film layer (rigid film layer), energy-emitting line-curable pressure-sensitive adhesive layer (1) and release sheet. - Ester-based pressure-sensitive adhesive layer (elasticity) Layer) The pressure-sensitive adhesive force (50QC) for the heat shrinkable film layer is 13 Newtons/10 mm The value of r/L was 0.06. [Example 17] 100 parts by weight of an ester polymer (PLACCEL CD220PL manufactured by 100 parts by weight of Dai ce 1 Chemical Industries, Ltd.) and 10 parts by weight of azelaic acid were mixed. The obtained polymer), and a solution obtained by 10 parts by weight of r Coronate L" (crosslinking agent, manufactured by Nippon Polyurethane Industry, Co., Ltd.), was applied to polyphenylene terephthalate as a 10 layer of a rigid film. Ethylene phthalate film (PET film, thickness 50 μm, manufactured by Tor ay Industries, Inc., trade name "Lumirror S10"), and a heat shrinkable film (uniaxially stretched polyester film) Thickness: 60 μm, manufactured by Toyobo Co., trade name "Space Clean S5630" ^ was laminated thereon and laminated by hand-rolling to obtain a laminated sheet (the thickness of the ester-based pressure-sensitive adhesive layer was 30 μm). The side of the laminated non-energy ray-curable pressure-sensitive adhesive layer (1) obtained in the production example 4 was laminated on the rigid film layer side of the laminated sheet prepared above. 0 312XP/Invention Manual (Supplement)/ 97-03/96141972 57 200835603 The machine made the laminate layer tightly adhered, thus obtaining a station piece, which consists of a layered core (4) layer (elasticity) / PET film, (4), limit Layer [vine-based ray-curable dust-adhesive layer (1) and release sheet. )] Non-criminal vinegar-like tumbling layer (elastic layer) has a shear modulus of 6 μd/m2, and the product of shear modulus and thickness is 19 5 vinegar woven layer (elastic layer) She can focus on the heat shrinkable film layer (50. 8.2 is 8.2 Newtons/1 (mm). The value of the viscosity r/L is 〇. 05. [Example 18] The feeling was obtained in the same manner as in Example 14. The non-energy ray curable layer (2) obtained by the production of Example 5 was used as the pressure-sensitive adhesive layer in Example 14. 's ^ Pressure-sensitive adhesive layer-pressure-sensitive adhesive r/ The value of L was 〇. 〇 5. [Example 19] A pressure-sensitive adhesive sheet was produced in the same manner as in Example 14 = the non-energy ray-stable layer (3) obtained in Production Example 6 was used as an implementation. The pressure-sensitive adhesive layer in Example 14. The pressure-sensitive adhesive force of the sturdy wire-like layer wafer of the occupant line is 3.17 Newtons/10 house meters. The value of r/L is 〇· 〇45. [Comparative Example 1] 312XP/Invention Manual (supplement)/97-03/96141972 200835603 The same square or system U &lt; Λ Λ 感 感 感 感 感 , , , , 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感 感"Merinex |( Mody ,, ·· r \ Shang Shang uex "<name providers mouth), Teijln - Dup〇nt Fnm

Co. was made as a pet film of Example 1. . The PET film layer (rigid film layer) has a Young's modulus of 3 38 x 1 〇 9 Newtons per square meter at 8 ° C, and a product of Young's modulus and thickness of 3.38 X 1 G 5 Newtons per meter. After measuring iVL, the shrinkable substrate was peeled off from the elastic layer (the attachment point was broken), so that the tubular roll could not be obtained. The reason is considered to be due to the rigidity of the rigid film being too high. [Comparative Example 2] 45 parts by weight of isobutyl acrylate, 45 parts by weight of ethyl hexyl acrylate, 10 parts by weight of acrylic acid, 1 part by weight of hexanediol diacrylate, and 0.05 part by weight of rIrgacure 651" ( Photoinitiator, manufactured by Ciba-Geigy, Ltd., 〇. 〇 5 parts by weight of "Ovum (3)" 184" &lt; (photoinitiator, manufactured by Ciba-Geigy, Ltd.), and 8 parts by weight of acrylic acid 2 Ethyl isocyanate (manufactured by Showa Denko Co., Ltd., trade name "Karenz AOI"), and the mixture was irradiated with ultraviolet light for 1 hour to produce a prepolymer. The prepolymer was applied onto one surface of a polyethylene terephthalate film (PET film, thickness: 38 μm, manufactured by T〇ray Industries, Ltd., trade name “Lumirror S10”) as a rigid film layer. And a heat shrinkable film (uniaxially stretched polyester film, thickness: 60 μm manufactured by Toyobo Co., trade name "Space Clean S7053") was superposed thereon and laminated by hand roll. The final curing was carried out from both sides by ultraviolet irradiation, thereby obtaining a laminated sheet (the thickness of the acrylic adhesive layer was 1 〇 5 μm). 312/Invention Manual (Supplement)/97-03/96141972 59 200835603 The side of the 1 ray curable pressure-sensitive adhesive layer (1) which is produced in the production of the reed layer- ly Above the side of the rigid film layer of the layer of the film. The laminated layer is made tightly by a laminating machine, (4) obtaining a pressure-sensitive adhesive sheet of -4, which comprises a heat-shrinkable film layer laminated in sequence, and a limiting layer [acrylic-based pressure-sensitive adhesive layer (elasticity; / ΡΪ?Τ 曰, 5 flat f玍 layer) / ΡΕΤ film layer (rigid film layer)], energy ray curable pressure sensitive adhesive layer (1) and release sheet. Heat shrinkable film has 1G (^ (10) or above in the main contraction

The heat shrinkage rate in the middle. The shear modulus (8 〇〇 c) of the acrylic acid-based pressure-sensitive adhesive layer (elastic layer) is 1. 8 x 10 Newtons per square meter, and the product of the shear modulus and the thickness is Newtons/meter. The pressure-sensitive adhesive force of the acrylic pressure-sensitive adhesive layer (elastic layer) on the heat-shrinkable film layer (50. 〇·3 Newton/10 mm. After measuring r/L, the shrinking substrate is peeled off from the elastic layer (attachment) The point of the fracture was not able to obtain the tubular reel, which was considered to be due to the rigidity of the rigid film being too high. φ [Comparative Example 3] A pressure-sensitive adhesive sheet was produced in the same manner as in Example 4 except that the thickness was used. 100 micron "Merinex" (trade name), manufactured by Tei j in-Dupont Fi lm 'CO., as the PET film of Example 4. After measuring r/L, the shrinking substrate was peeled off from the elastic layer (attachment point) The fracture is not obtained, so that the tubular reel cannot be obtained, which is considered to be caused by the rigidity of the rigid film being too high. [Comparative Example 4]

Polyester-based adhesive "Vylon 63SS" manufactured by Toyobo Co., Ltd. 312XP / invention manual (supplement) / 97-03/96141972 60 200835603 coated with poly-terephthalic acid as a rigid film layer by an applicator The ethylenediester film (PET film, thickness: 100 μm, manufactured by Teijin-Dupont Film Co., trade name "Merinex") has a thickness of 5 μm on the surface, and a heat shrinkable film (uniaxially stretched polyester) Membrane, thickness: 6 〇 micron, T〇y〇b〇

Co., manufactured under the trade name "Space Clean S7053", is superimposed and used. • Manual roller is laminated on it. - The side of the energy ray-curable pressure-sensitive adhesive layer (3) of the laminated layer produced in Example 3 was laminated on the side of the rigid film layer of the laminated sheet prepared above. The laminated layer is closely adhered by a laminating machine, thereby obtaining a pressure-sensitive adhesive sheet comprising a heat-shrinkable film layer laminated in sequence, a limiting layer [polyester-based adhesive layer (elastic layer) / PET film layer (rigid film layer)], energy ray curable pressure-sensitive adhesive layer (3) and release sheet. The modulus of shear of the polyester-based adhesive layer (elastic layer) (8 〇. 〇 is 14 ΐχ ίο 5 Newtons per square meter, and the product of shear modulus and thickness is 〇71 N/m. Polyester-based adhesive layer (elasticity) The pressure-sensitive adhesive force (50 ° C) of the heat-shrinkable film layer is 7.9 Newtons / 1 mm. After the measurement of r / L, the shrinking substrate is peeled off from the elastic layer (attachment breaks, cracks), Therefore, the tubular reel cannot be obtained because the rigidity of the rigid film is too strong, or the elasticity of the elastic layer (shear modulus χ thickness) is insufficient. [Comparative Example 5] In the same manner as in Example 19 The adhesive sheet was pressure-sensitive, except that the non-energy ray curable pressure-sensitive adhesive of the seventh embodiment was used as the adhesive layer in Example 19. The pressure-sensitive adhesive layer of the non-energy ray-solidified pressure-sensitive adhesive layer on the Shixi wafer 312ΧΡ/invention specification (supplement)/97-03/96141972 200835603 The force is 6.93 Newton/10 mm. The value of r/L is 0.05. The outlines of the above examples and comparative examples are as described in Table 1, and the measured values of r/L are as described in Table 2.

312XP/发明发明(补件)/97-03/96141972 62 2 538 bee j pressure-sensitive adhesive force (N/10mm 'on wafer 'room temperature) 0.01 or less 0.01 or less 0.01 or less 0.01 or less 0. 01 or The following 0.01 or less 0.01 or less 0.01 or less 1 0.01 or less 0.01 or less composition manufacturing Example 1: Curable (1) Manufacturing Example 1: Curable (1) Manufacturing Example 1: Curable (1) Manufacturing Example 1 : Curable (1) Manufacturing Example 1: Curable (1) Manufacturing Example 1: Curable (1) Manufacturing Example 2: Curable (2) Manufacturing Example 2: Curable (2) Rigid film (PET) ) Young's modulus X thickness (N/m) 1.41E+05 9. 30E+04 1.41E+05 1.41E+05 1.86E+05 1__ 2. 79E+05 1. 86E+05 2. 79E+05 Young's modulus (GPa, 80°〇3. 72 CO CO CO CO CO CO CO Thickness (^m) LTD CNI oo CO OO CO § L〇§ LO Elastic layer _々P system is ig| 4. 90 4.90 4.90 4.40 4.40 4.40 1 4.40 inch · Shear modulus X thickness) (N/m) 13.23 13. 23 20.67 § 21.60 21.60 21.60 21.60 Shear modulus (MPa, 80°〇0.126 0.126 0.689 0. 720 0. 720 0.720 0 . 720 0.720 Thickness (//m) gsi—H Thickness (_) § § § § § § § § Example 1 Example 2 Example 3 Example 4 Example 5 Example 6 Example 7 Example 8 2 (N Bu 61H 96/eo-16/ffsi) iIl &amp; Ki ^ Lin / π e 200835603

i 压 粘 粘 Q Q Q Q Q Q Q Q Q Q 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 01 Production Example 3: Curable (3) Manufacturing Example 3: Curable (3) Manufacturing Example 4: Non-curable (1) Manufacturing Example 1: Curable (1) Manufacturing Example 4: Non-curable ( 1) 丨 Manufacturing Example 4: Non-curable (1) Manufacturing Example 3: Curable (3) Manufacturing Example 11: Non-curable (1) Rigid film (PET) layer Young's modulus X thickness (N/ m) 1.41E+05 1. 86E+05 1. 24E+03 1.41E+05 1.86E+05 1.41E+05 1.86E+05 1.41E+05 Young's modulus (GPa, 80°〇CO 〇6 0.0108 c^a CO CO CO cva CO cva CO Thickness (_) oo CO 115 (EVA) oo CO g oo CO s oo CO Elastic layer ^ system 3 3 3⁄4 2 inch · inch · inch · 11.40 13. 00 13. 00 13.00 13. 00 Silk 輙 x 21.60 21.60 21.60 r—H CO OO CD OO CO 〇〇· CO oo UP 鹚§ Swallow cd 0.720 0. 720 0.720 0.048 0. 288 0.288 Γ 0.288 0. 288 Thickness (//m Heat shrinkable film thickness (//m) § § § § § s § § Example 9 Example 1 0 Example 11 Example 12 Example 13 Example 14 Example 15 Example 16 s p6IH96/e9A6/ffsi)_Kli^ emblem/(NIe 200835603 Pressure-sensitive adhesive layer pressure-sensitive adhesive (N/10_ 'on wafer 5 Room temperature) 0. 01 or below 5. 68 3.17 0. 01 or below 0. 01 or below "0. 01 or below 0. 01 or below CO 05 cd Composition Manufacturing Example 3: Curable (3) Manufacturing implementation Example 5: Non-curable (2) Manufacturing Example 6: Non-curable (3) Manufacturing Example 1: Curable (1) Manufacturing Example 1: Curable (1) Manufacturing Example 1: Curable (1) Manufacturing Example 3: Curable (3) Manufacturing Example 7: Non-curable (4) Rigid film (PET) layer Young's modulus X thickness (N/m) 1.86Ε+05 1.41E+05 1.41E+05 3. 38E+05 1.41E+05 3. 38E+05 3.38E+05 1.41Ε+05 Up 鹚§ ^ cd CO CO 〇6 〇〇CO CO CO CO 〇〇CO CO 〇〇 Thickness (#m) g oo CO 〇〇CO g rH oo CO gg ί—Η 〇〇CO Elastic layer escape? P 〇οα od 13. 00 13. 00 § 呀·◦·inch·§ Bu· 13.00 Shear modulus X thickness) (N/m) 19·50 CO od CD 〇〇· 13.23 1 189.00 ί_ § rH 〇· CO oo Shear modulus (MPa, 80°〇0.650 0. 288 0. 288 0.126 1.800 0. 720 0.141 0.288 Thickness (^m) S 1 is in Heat shrinkable film thickness (βϊύ § § § § § § § § Example 17 Example 18 Example 19 Comparative Example 1 Comparative Example 2 Comparative Example 3 Comparative Example 4 Comparative Example 5 rsi Bu 61 inch I96/s-L6/ff}w)_wliK ore/sfn 200835603 [Peel test] The pressure-sensitive adhesive sheets prepared in each of the examples and the comparative examples were cut into the same size circular shape as the 4-inch wafer, and then bonded to a 4-inch wafer (thickness 525 μm). The back side of the wafer is ground to 1 μm j. The pressure-sensitive adhesive sheet having the energy ray-curable pressure-sensitive adhesive layer as a pressure-sensitive adhesive layer, and the pressure-sensitive adhesive sheet of the embodiment jj are used 2 The strength of the pressure-adhesive sheet side is 500 mJ/cm 2 (if there is a ray-curable pressure-sensitive layer with a certain amount of radiation), and the material is coated with a light-sensitive layer. When the cross-linking agent is applied to the elastic layer towel, but the ultraviolet ray is not irradiated by the cross-linking agent, the ray-sensitive layer of the pressure ray curable layer is cured by ultraviolet light (the elastic layer of the pressure-sensitive adhesive sheet of Embodiment 11) Curing, the pressure-sensitive adhesive sheet is heated on the heating table with the suction-proof head contacted by the pressure-sensitive adhesive layer and the heating table, and heated to green: the heat of the heat-shrinkable film layer constituting the pressure-sensitive adhesive sheet (4). = Sense: The pressure-sensitive adhesive sheet is heated in one direction from the outer edge portion (one:: and the outer edge portion of the knife is rolled up into a tubular shape (four) is defined as a crack (single (four) rupture (two-way scrolling amp &amp; 皞 also Stripped from the day of the day without the wafer 2:::= condition as %; and the affixed sheet is evaluated in the form of a morphable r layer: interrupted or unrolled into a tubular shape as described above as "A" |^"R - the diameter of the reel is regarded as the heart of the meter] "2 has 1 · b 1 pen not] (circular sheet 312 / invention manual (supplement) / 97-03/96141972 66 200835603 diameter) The value is in the range of 0.001 to 0 qQQ &gt; _ • 3 3 3. Table 2 J;

[Grinding test of thickness 25 micron wafer (8 箪, -7 ΙΓ., inch)] The results of the 笪本χ日山^ peeling test in the above peeling test are shown in Table 2. . "η 下 发生 * * 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 3 表 表 表 表 表 表 η η η η η η η η η η η η η η η η η η η η The thickness of 2" ^, 0 is given to the wafer by the following method. Example 1, 2, 4, 5, 7» δ 士 &amp; a m ^ ^ ^ ^ 〇., and 8 The pressure-sensitive adhesive tape shown is then applied with precision coating. § Mechanical preparation, 1 + clothing says u increases the accuracy of the thickness. 312 / invention manual (supplement) / 97-〇3/96141972 67 200835603 The pressure-sensitive adhesive tape is bonded to a 9-inch mirror wafer using DR8500II manufactured by Nitto Seiki Co., Ltd., and a Disc is used.

The wafer grinding equipment DFG8560 manufactured by Corporation is ground to a thickness of 25 microns. After grinding, those having no crack on a wafer and having an edge crack size of 3 μm or less were rated as “1”; those having no crack on the wafer and having an edge crack size of 30 μm or more were rated as “2”; A crack on a wafer is rated as "3".

Next, the warpage of the polished wafer is checked. If the polishing result is "i" or "2", the wafer is mounted to a molding platform, and the two farthest positions of the self-molding platform are measured. The distance from the far wafer. The amount of warpage is the amount of warpage of the good pressure-sensitive adhesive sheet is "1 good", which is 7 mm. The results of the grinding test are shown in Table 3 - in order to confirm its capacity by self-winding properties (4) The function of the ability is to use κ instances 4, 5 and 7 to check the pressure-sensitive adhesive sheet from grinding to a 25 micron wafer = returning the circle to a pure body from JE. Exposing the pressure-sensitive adhesive tape to the milli After the Joule/m2 is carried out, it is attached to the suction heating stage that is heated to the sensation. The detachment and the wafer can be recovered without manual operation by the self-rolling type typically takes 10 minutes or more. It is easy to cry under a specific instrument: the eternal system can be determined to be displayed without using the fruit; = 仃 (in the table, it is indicated by "good"). Knot [Comparison of Residual Wafer Glue After Pressure-Resistant Adhesive Stripping] 312ΧΡ/Inventive Manual (Supplement) of the amount of wafer contamination capability/97-03/96141972 68 200835603 The following method was used to investigate the separation of tubular reels ( The difference between rolling peeling) and peeling by manual operation. Only the pressure-sensitive adhesive tapes of Examples 4 and 19 were bonded to a 4 Yingke mirror (Shin-Etsu Semiconductor Co., Ltd. fi-, trade name: "CZ-Nj") for evaluation of pollution capacity. And the combination is treated with Reli da da 40 C to increase the adhesion. Regarding the manufactured samples, the sensor sheets used in the second embodiment 4 and 7 are exposed to light (about 500 mJ). /m2), then the wafer is heated by the self-rolling stripping' and the wafer is heated at room temperature or heated to the ground, using __^ (manufactured by U Tenc〇r Corporation) to measure the on-crystal derivative The number of particles from the residual glue (these have micro or more). ^ The result of the wood is found to be all the test money. The traces of the wafer are small, and the result of the wafer contamination ability is shown in the table. 3: Table 3

[Assessment of self-rolling pressure-sensitive adhesive tape application] In order to evaluate the applicability of current wafer grinding methods, it is determined.疋仃The following review 312XP/inventive book (supplement)/5) 7-03/96141972 69 200835603 In the above grinding test of thickness 25 micron wafer, the pressure-sensitive adhesive sheet of Example 7 is adhered to a thickness of 25 μm, &quot ; : = 获 = 感 感 - ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( Peel and recovery test and (4) ^ Nltt of Example 7. The dicing tape bond made by Seiki~, Ltd. is prepared by "__". For the self-rolling peeling ":: month", no: - a heating source (industrial dryer) for displaying the self-rolling property is attached to the stripping/recovering device part and a mouthpiece, and The heating source is adjusted to heat the day wafer to about 80. (: to 1 〇〇〇c. Using the "MA3000II", the cutting 胄, manufactured by Niu〇 Corporation, the trade name "EM5〇〇M2A", is bonded to the grinding surface side of a 8-inch Shishi wafer. And a cutting ring is provided. When the dicing tape is bonded, the wafer is heated to 5 〇 to 6 〇〇 c, but the pressure-sensitive adhesive sheet of Example 7 is not spontaneously peeled off under the heating and does not The main method is completed by any difficulty (for example, the peeling tape is caught in the conveying path, etc.). Therefore, when the sample is transferred to the stripping/recovering apparatus "Cai 3〇〇〇11", the hot air is blown from the heating source to The pressure-sensitive adhesive sheet side of Example 7 was used to heat the edge portion of the wafer. As a result, the pressure-sensitive adhesive sheet of Example 7 was peeled off from the wafer by a tape peeling apparatus "ΜΑ3000ΙΙ". Produces any cracking or cracking. In addition, there is any adverse effect on the heating of the dicing tape during peeling (for example, an increase in pressure-sensitive adhesive force, etc.), and the dicing tape of the sample is also evaluated for functionality after peeling, but there is no Any problem. 312ΧΡ/invention Book (supplement) / 97-03/96141972 70 200835603 From this, I can determine the pressure-sensitive adhesive sheet # of the present invention can be applied to the actual method. Although the present invention has been described in detail and with reference to its specific For example, it is obvious to those skilled in the art that various changes and modifications can be made without departing from the scope of this application. ' This application is based on Japanese Patent Application No. 2006-305671 and 2007, filed on November 1, 2006. The entire contents of all of the references cited in the text are incorporated herein by reference in its entirety. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic cross-sectional view showing an example of a self-rolling laminated sheet of the present invention. Fig. 2 is a schematic cross-sectional view showing an example of a self-rolling pressure-sensitive adhesive sheet of the present invention. 3A to 3D are views (perspective views) illustrating a self-rolling mode of a self-rolling laminated sheet or a pressure-sensitive adhesive sheet of the present invention, wherein FIG. 3A illustrates a self-rolling type 2 layer or a pressure sensitive adhesive sheet. Inducible shrinkable film The pattern before the stimulation of the contraction; FIG. 3B illustrates the self-rolling laminated sheet or the pressure-sensitive adhesive sheet provided by the stimulation of the contraction of the induced shrinkable film layer (the pressure-sensitive adhesive force in the pressure-sensitive adhesive layer is lowered or The lost pressure-sensitive adhesive sheet) starts from a state in which the film is rolled up from the outer edge portion in a direction (generally along the main shrinkage axis of the shrinkable film); FIG. 3C illustrates that the sheet is rolled and formed 312. /Invention Manual (Supplement)/97-03/96^972 71 200835603 Schematic diagram of the state of the S-shaped reel (single-direction scrolling); and Figure 3D shows the sheet from the opposite ends toward the center (general lineage) The main shrinkage axis of the shrinkable film) spontaneously winds up the pattern of the state of the two tubular reels (two-way scrolling). [Explanation of main component symbols] 1 Shrinkable film layer 2 Restricted layer 3 Pressure-sensitive adhesive layer 21 Elastic layer 22 Rigid film layer

312XP/Invention Manual (supplement)/97-03/96141972 72

Claims (1)

200835603 X. Patent application scope: 1. A self-rolling laminated sheet comprising: - a shrinkable film which can be contracted in at least one axial direction to limit the shrinkage of the shrinkable film layer on one side of the shrinkable film layer, The confinement layer is formed by rolling up at the end of the inducing shrinkable film layer to form a center thereof, and forming a self-rolling laminated sheet in a direction when the self-rolling laminated sheet is subjected to stimulation opening and contraction. A tubular reel, or from opposite ends toward the two opposing pairs of tubular reels. 2. The self-winding accumulating film layer of the ninth aspect of the patent scope includes: the thermal heart rate of the main shrinkage direction: the heat shrinkable film of 30 to _ in the range of warfare:. 0 to 3· If you apply for a patent range! The self-made layer of the item comprises - an elastic layer on the side of the shrinkable film layer and a rigid film layer on the side opposite to the side of the two shrink film layers. In the 积 ^ 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请 申请The dry laminated sheet, wherein the product of the rigid one is 3·Οχΐ 〇 5 cattle 5· The self-rolling film layer of the third item of the patent application has a Young's modulus of 80 and a thickness of ton/meter or less. 6. The self-rolling laminated sheet according to claim 3, wherein the elastic layer is made of a cross-linked acrylic pressure-sensitive adhesive μ7, such as a self-rolling layer of the patent application range U: When the self-rolling laminated sheet is rolled up to form a tubular reel after stimulating the shrinkage of the shrinkable film layer by the self-rolling laminated sheet, the 312/invention specification (supplement)/97-03/96141972 73 200835603 The formed tubular reel has a ratio (r/L) in the range of 0.001 to 0.333, wherein the diameter of the r-series tubular coil and the long sound of the L-series self-rolling laminated sheet in the rolling direction. 8. The self-rolling laminated sheet according to claim 1, wherein the self-rolling laminated sheet is rolled up to form a tubular shape after inducing the shrinkable film layer in the self-rolling laminated sheet. In the case of a reel, the formed tubular reel 10 has a ratio (r/L) in the range of 0.001 to 〇·333, wherein the r-shaped tubular coil has the same diameter and the L-series self-rolling laminated sheet is rolled. Long-term production. A self-rolling pressure-sensitive adhesive sheet comprising: a shrinkable film layer that can be contracted in at least one axial direction; a restraining layer that limits shrinkage of the shrinkable film layer, the restraining layer being disposed on the shrinkable film On one side of the layer; and, a pressure-sensitive adhesive layer disposed on the side opposite to the side of the constricted pancreatic layer, which is disposed on the confinement layer, and the self-rolling pressure-sensitive adhesive layer The film is a release pressure sensitive adhesive sheet, the pressure-sensitive adhesive layer or the pressure-sensitive adhesive after the adhesive treatment is reduced=feeling (four) force (for the stone mirror wafer (10). peeling, stretching speed: The bristles of the pressure-sensitive adhesive sheet is 6.5 Newtons/10 mm or less, and when the self-rolling pressure-sensitive adhesive sheet is stimulated to induce shrinkage of the shrinkable film layer, the self-rolling pressure-sensitive adhesive sheet, -, _ The n, W pieces are rolled up from one end in the direction and rolled into a tubular reel, or two tubular reels are formed by rolling up the center of the opposite ends from the two phases. In the case of the self-rolling pressure-sensitive adhesive sheet of claim 9, the 312/invention specification (supplement)/9103/96141972 74 200835603, the shrinkable film layer includes - the main shrinkage direction of the shrinkage The heat shrinkable film is 30 to 9 % by weight in the range of 70 to 180 C. [11] The self-rolling pressure-sensitive adhesive sheet of claim 9, wherein the limiting layer comprises an elastic layer on the side of the shrinkable film layer and a side on the side opposite to the side of the shrinkable film layer. A rigid film layer. * For example, please apply the white-rolled θ pressure-sensitive adhesive sheet of the scope of the patent, in which the elastic layer has a product of 8 (the shear modulus of rc and the thickness is 10 to 1 000 N/m). 13. The self-rolling pressure-sensitive adhesive sheet of the nth item of the patent application, wherein the 'distal rigid film layer has a force of 8 (the product of the Young's modulus of the rc and the thickness is 3. 0x105 Newtons/meter or less) 14. The self-rolling pressure-sensitive adhesive sheet of claim U, wherein the elastic layer is formed of a cross-linked acrylic pressure-sensitive adhesive. 15. The self-volume of claim 9 a pressure-sensitive adhesive sheet, wherein the pressure-sensitive adhesive layer is formed by an energy ray-curable pressure-sensitive adhesive. 16. A self-rolling pressure-sensitive adhesive sheet according to claim 9 of the patent application, wherein When the self-rolling pressure-sensitive adhesive sheet is induced by the stimulating self-rolling pressure-sensitive adhesive sheet, and the shrinkable film layer is rolled up to form a tubular reel, the formed tubular reel has the 卷·〇比1 to 0.333 ratio (r/L), where r is the diameter of the tubular reel and l-series self-rolling pressure-sensitive adhesive sheet The length of the scrolling direction. 17· The self-rolling pressure sensitive adhesive sheet according to claim 9 of the patent application, wherein the self-rolling pressure sensitive adhesive sheet is induced by the self-rolling pressure sensitive adhesive sheet 312/invention specification (Supplement) /97-03/96141972 75 200835603 When the shrinkable film layer is rolled up and rolled up to form two tubular reels, the tubular reels each have a ratio in the range of 0·001 to 〇·333 (r/L): wherein the diameter of the r-shaped official roll and the length of the L-series self-rolling pressure-sensitive adhesive sheet in the second direction of the roll. Lewan 18 - a method of processing an object, including... The self-rolling pressure-sensitive adhesive sheet of the ninth patent of the patent is adhered to the object to temporarily fix the object, and then the object is further added; Reducing the tablet of the pressure-sensitive adhesive sheet. The pressure of the pressure-sensitive adhesive and the pressure-sensitive adhesive for the contraction of the shrinkable film layer 钊^, 4,,, and times of stimulation, worse So that the pressure-sensitive adhesive sheet spontaneously flies from the opposite end of the moon to the opposite ends in a direction, thereby peeling off from the article; and obtaining a finished article. 312/Invention Manual (supplement)/97-03/96141972