200830307 九、發明說明 【發明所屬之技術領域】 本發明係有關製造具有經黏合之光碟基板結構之光學 記錄媒體的製造方法。 【先前技術】 藉由光的照射以記錄、播放及拭除資訊的碟形光學記 錄媒體已發展完成且已實際使用。例如，現已製造具有由 二基板具有樹脂黏合層於其間所形成之結構的光碟，且在 市面上已可獲得。這些光碟中特定的例子包括DVD s及雷 射光碟。 典型的光學記錄媒體按照其功能而具有各種不同的結 構。已知有多種媒體，例如，在光學上係透明的基板上形 成有微小之凹部與凸部（凹坑及溝槽）的光學記錄媒體，以 及在基板間黏合有金屬反射層、黏合層、印刷層等的光學 記錄媒體。 在光學上係透明的基板包括玻璃、聚碳酸脂（PC)或丙 烯酸樹脂（例如聚甲基丙烯酸甲脂（PMMA))。金屬反射層包 含金、銀及鋁的合金。黏合層係由紫外線硬化型樹脂所形 成的。 在下文中，在其上形成有凹坑或溝槽之任何在光學上 爲透明的基板，在其上形成有功能性層之在光學上爲透明 的基板，及僅做爲覆蓋基板之在光學上爲透明的基板都被 稱爲基板。 -4- 200830307 在此方法中，基板黏合型之光學記錄媒體的製造方法 爲：藉由分注器（dispenser)以同心方式將紫外線硬化樹脂 液體滴注到其上形成有記錄層及/或反射層的基板上；在 該基板上覆蓋另一基板（例如其功能做爲覆蓋層之在光學 上爲透明的基板）；以適當的轉速旋轉適當的時間長度， 以旋轉排出超量的紫外線硬化樹脂；並以紫外線照射該基 板以便光硬化。 接下來，特別描述基板黏合處理。 在光碟的系統是以雷射光束從一側進入以實施記錄及 播放的情況中，爲便於說明，當雷射光束入射側係配置在 底部側時，將該底部基板稱爲La，及頂部基板則稱爲Lb 〇 在以位於二碟片間的紫外線樹脂來接合該二碟片的製 程中，從上方以紫外線照射該二基板間的紫外線樹脂型的 黏合劑。在此製程中，是以La基板之層形成側的面朝上 來運送該碟片。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an optical recording medium having a structure of a bonded optical disk substrate. [Prior Art] A dish-shaped optical recording medium for recording, playing, and erasing information by irradiation of light has been developed and has been practically used. For example, a disc having a structure in which a two-substrate has a resin adhesive layer formed therebetween has been manufactured and is commercially available. Specific examples of these discs include DVDs and laser discs. A typical optical recording medium has various structures in accordance with its function. A variety of media are known, for example, optical recording media having minute recesses and projections (pits and grooves) formed on an optically transparent substrate, and a metal reflective layer, an adhesive layer, and a printing bond between the substrates. An optical recording medium such as a layer. Optically transparent substrates include glass, polycarbonate (PC) or acrylic resins (e.g., polymethyl methacrylate (PMMA)). The metal reflective layer contains an alloy of gold, silver and aluminum. The adhesive layer is formed of an ultraviolet curable resin. In the following, any optically transparent substrate on which pits or grooves are formed, an optically transparent substrate on which a functional layer is formed, and optically only as a cover substrate The substrates that are transparent are referred to as substrates. -4- 200830307 In this method, a substrate-bonding optical recording medium is manufactured by dropping a UV-curable resin liquid onto a recording layer and/or a reflection thereof by a dispenser in a concentric manner. On the substrate of the layer; covering the substrate with another substrate (for example, an optically transparent substrate whose function is used as a cover layer); rotating at an appropriate rotation speed for a suitable length of time to rotate and discharge excess ultraviolet curing resin And irradiating the substrate with ultraviolet rays for photohardening. Next, the substrate bonding process will be specifically described. In the case of a system in which a laser beam enters from one side to perform recording and playback, for convenience of explanation, when the incident side of the laser beam is disposed on the bottom side, the base substrate is referred to as La, and the top substrate. In the process of joining the two discs with an ultraviolet resin interposed between two discs, the ultraviolet resin-type adhesive between the two substrates is irradiated with ultraviolet rays from above. In this process, the disc is transported with the surface on the layer forming side of the La substrate facing upward.
Lb基板係設置於轉動施加裝置的承台（旋轉台）上具有 阻障層（反射層及/或記錄層）的一側朝上。在旋轉枱以大約 數1 Orpm的速率旋轉之時，以分注器在基板上滴注黏度大 約500cp的紫外線硬化樹脂液，以同心方式朝向碟片的周 邊施加，其半徑大約30mm。接著，La被翻面以使正面朝 下（亦即’層的形成側朝下，且光從上方入射），並與Lb 基板重疊。此旋轉台以數百至數千rpm的速率旋轉，以將 紫外線硬化樹脂擴展到該基板的周邊端。 -5- 200830307 之後，重疊的基板被運送到照射台，接著以紫外線硬 化處理，藉以獲得到黏合型的光碟。 不過，在上述的黏合處理中，並未修正基板的變形。 因此，該基板的徑向傾斜（RD)値與圓周向傾斜（TD)値增加 ，致使經常製造出有瑕疵的產品。 爲了改善或修正RD與TD値，例如，當以紫外線照 射該基板時，藉由使用具有真空吸附功能的承台或具有基 板承接部（receiver)的承台，以固定或修正基板的形狀（變 形、RD 及 TD) 〇 這些方法對於改善RD及TD値有效。不過，這將會 導致軸向加速度（聚焦誤差（FE))與軌方向加速度（追踪誤差 (TE))之値增加的問題。關於此，吾人發現，造成此劣化 的原因有：(1)由於碟片基板附著於承台，因此，包括黏著 劑灰塵的微小灰塵被固定於碟片基板與承台間；（2)由於碟 片表面中有被吸附的接觸部分與非接觸部分，此致使其上 有微米級的凹面與凸面，該黏著劑被硬化成波形；以及（3) 承台上的真空抽氣孔在碟片基板上留下氣孔痕跡，且紫外 線硬化樹脂被如樣地硬化。 近年來，對於提升記錄速率已有強烈的要求，特別是 在DVDs的領域。改善軸向加速度與軌方向加速度的水準 被強調。 例如，單層DVD + /-R/RW、DVD + RW及雙層光碟的軸 向加速度（聚焦誤差）與軌方向加速度（追踪誤差）係按照橘 皮書（Orange Book)的殘餘焦點（Residual focus)與追踪誤差 200830307 來規範。現在對最外圓周處之軸向加速度的要求爲不大於 l.Om/s2，及軌方向加速度不大於0.4m/s2。 上述的軸向加速度是當轉數爲30Hz(180〇rpm)，且是 在從30Hz至1.5kHz之頻帶中所測量到記錄層垂直於參考 面的加速度。當該加速度的劣化是由於碟片基板之表面上 的凹部與凸部所導致時，這類基板具有大的加速度値，其 對於初期的響應性、後續的特性、及聚焦穩定性及追踪伺 服都有不利的影響。 聚焦誤差（FE)與追踪誤差（TE)係使用驅動器（由 Plextor公司所製造的PX-716A)的FE/TE測試功能來測量 。當基板以高速旋轉時，可測量FE/TE之每一個的振幅。 典型上，DVD + /-R/RW光碟機具有二種光學伺服功能 ，亦即，聚焦伺服（focus survo)功能與追踪伺服（tracking survo)功能。在播放期間，即使當由於光碟的彎曲導致拾 波裝置與光碟間的距離變動時，藉由聚焦伺服仍能保持拾 波裝置的聚焦。在播放期間，即使當光碟的中心孔偏心及 /或軌局部曲折，藉由追踪伺服仍能保持拾波裝置的追踪 〇 在該二伺服正作用時，用於調整物鏡的控制信號被計 算出，以精確地讀取凹坑。 這些控制信號稱爲聚焦誤差信號與追踪誤差信號，其 通常係以FE/TE來予以表示，其具有以下意義。 FE係以數位到類比轉換器（DAC)爲拾波裝置取得控制 信號（聚焦致動器控制信號）之振幅位準的値，以調整光碟 200830307 表面上之雷射的聚焦。因此，在記錄前可偵測出製造不良 的光碟及物理特性差的光碟，例如彎曲的光碟。使FE値 的變動愈窄，則光碟的彎曲愈小。 TE係以DAC爲拾波裝置取得控制信號（追踪致動器控 制信號）之振幅位準的値，以跟隨著光碟的擺動。 藉由FE/TE，可檢查媒體在高速旋轉時的加速度。 經證實’當基板置於其表面上具有數微米大小之灰塵 及/或黏著劑的照射台表面上以紫外線照射及硬化時，上 述的軸向加速度會明顯地劣化。製造軸向加速度不超過 l.Om/s2的光學記錄媒體，良率常數與設備操作比率可改 善到實用的適合水準。 關於灰塵被吸引到實施紫外線照射之承台表面的原因 ，例如，原來附著於基板上的灰塵被轉移到承枱。會對最 終目標之光學記錄媒體之品質有實際不利影響之灰塵的大 小量級爲1 微米。來自人體之灰塵的附著或轉移，或在 光碟運送及/或爲了穩定保護層之施加與基板之接合間之R 傾斜之等待時間（即至少一天）的期間所發生的灰塵附著或 轉移，是個待解決的問題。 此外，樹脂附著到承台表面的一特殊原因係當二基板 互相黏合時，樹脂從基板的周邊部分滴落，及當機械問題 致使光碟滯留時，樹脂流入內部圓孔或周邊部分。 現已有關於爲了增進最終目標（即光學記錄媒體）之品 質而對基板接合方法所做的各種硏究（例如日本專利第 3 63493號）。基於在光學記錄媒體領域中對於提高記錄速 200830307 率的預期，要求改善製造光學記錄媒體 一步降低FE/TE。 【發明內容】 基於這些理由，本發明人確認需要 錄媒體的方法，當經由光學硬化來接合 ，藉由該方法，與軸向加速度有關的聚 速度有關的追踪誤差可降低。 因此，本發明之目的在於提供一種 的方法，當經由光學硬化來接合基板以 該方法，與軸向加速度有關的聚焦誤差 關的追踪誤差可降低。 簡單地說，按以下之描述，將可更 此目的及其它目的，且可經由各別或結 記錄媒體的方法來實現，該方法包括首 有中央孔且以紫外線硬化樹脂來使彼此 第一基板與第二基板，而至少不照射該 外圓周部，以使該外圓周部之內側區域 樹脂硬化，以及，其次在以僅接觸該二 夾區的中心銷而將該二經黏合之基板以 以紫外線照射該二經黏合的基板。 較佳地是，在上述之光學記錄媒體 第一次照射係藉由光點照射而從中央朝 實施，且該經黏合的基板被轉動於該第 的對應方法，以進 有一種製造光學記 基板以製造光碟時 焦誤差及與軌向加 製造光學記錄媒體 製造光碟時，藉由 及與軌向加速度有 容易明瞭本發明的 合以下之製造光學 先以紫外線照射具 互相黏合於其間的 二經黏合之基板的 中的該紫外線硬化 經黏合之基板之鉗 靜態方式固定後， 的製造方法中，該 向外圓周部來予以 一照射期間。 -9- 200830307 更較佳地是，在上述之光學記錄媒體的製造方法中， 該第一次照射係藉由區域照射來予以實施。 更較佳地是，在上述之光學記錄媒體的製造方法中， 該外圓周部爲該二黏合之基板之周圍與從其往內至少5mm 之間所包圍的區域。 本發明的這些及其它目的、特性及優點將可從以下配 合附圖對本發明之較佳實施例的描述加以明瞭。 【實施方式】 以本發明之方法所製造的光學記錄媒體具有兩碟形基 板（第一基板與第二基板）的疊層結構，該兩基板具有中央 孔，且其間具有紫外線硬化樹脂的黏著層。 基板可使用任何已知的材料。在本發明中，由於存在 於兩基板間的紫外線硬化樹脂要被光學地硬化，因此，在 紫外線照射側的基板要以對紫外線透明的材料製成。 Φ 視光學記錄媒體（即最終目標）而定，第一與第二基板 可具有各自不同類型的結構。這些基板的特定例爲在光學 _ 上係透明的基板，例如’玻璃、聚碳酸脂（PC)或丙烯酸樹 脂（聚甲基丙烯酸甲脂）。在這類光學透明的基板上例如形 成有微小凹部與凸部（凹坑及溝槽），或堆疊有金屬反射層 、光磁記錄層及相變記錄層。 記錄層可形成在第一基板及第二基板兩者上，或當其 中一基板的功能爲覆蓋基板時，則記錄層在另一基板上。 接下來，將使用特定的例子並參考附圖來詳細描述本 -10- 200830307 發明之光學記錄媒體的製造方法，但本發明並不限於此。 例1 在例1中，如圖1中所例舉的，記錄層是在具有中心 孔的碟形基板上濺鍍而形成，以獲得到第一基板11。 第一基板1 1被真空吸附在旋轉台20上，且第一基板 1 1的記錄層側朝上。 0 接下來，在旋轉台20以大約數1 Orpm來予以旋轉時 ，藉由分注器（未顯示出）以同心方式朝向碟片的圓周在基 板上滴注黏度爲5 00cp的紫外線硬化樹脂30，其半徑相對 於第一基板11之中心大約爲30mm。 接著，以另一碟形基板（即第二基板12)與第一基板11 重疊並黏合。接著，旋轉台2 0以數百至數千rpm的速率 旋轉，以將紫外線硬化樹脂30擴展到該碟形基板的周邊 〇 • 接著，照射紫外線硬化樹脂30以使其硬化。 紫外線照射的處理是以兩個分開的步驟來予以實施。 如圖2中的說明，在圖2中，照射頭5 0係以箭頭A所指 示的方向從中心移動到基板的周邊部分，做光點的紫外線 照射。在此硬化步驟中，至少第一基板1 1的外圓周部不 被照射，且存在於外圓周部之內側的紫外線硬化樹脂3 〇 被暫時地硬化。 該外圓周部例如代表從周圍與從其往內至少5至 1 0mm所包圍的區域。在該第一硬化步驟中，存在於包括 -11 - 200830307 中心孔之半徑2 0至5 0mm環形區域中的紫外線硬化樹脂 3 0被暫時地硬化。藉由控制旋轉台2 0的轉速，可調整紫 外線硬化樹脂30的厚度以形成均勻的樹脂層。在此步驟 中，如圖3中所示，存在於基板1 1與12間位在外圓周部 的紫外線硬化樹脂3 0未被硬化。 如上所述，當基板1 1與1 2之間位於外圓周部處的紫 外線硬化樹脂3 0仍保留未被硬化時該樹脂夠軟，即使當 第一基板1 1與旋轉台2 0相接觸時，都具有修正的裕度。 其使得在製造光學記錄媒體之前，可以修正導致聚焦誤差 與追踪誤差之基板的形狀變形。 除此之外，經由在第一硬化步驟中在外圓周部被硬化 之前先暫時硬化內圓周部，該等基板是在RD(半徑傾斜或 R-傾斜）、擺動及樹脂層之厚度都不改變的情況下被轉移 至下一製程，亦即，第二照射階段。 經黏合之基板1 3係藉由運送吸頭4 0從旋轉台2 0而 被移出，並放置在光照射台21上，以便進行第二階段的 紫外線照射，如圖4至5之舉例說明。 光照射台2 1具有中心銷22 ’其從經黏合之基板1 3的 中心孔突伸出，同時僅以鉗夾區1 4與經黏合之基板1 3相 接觸，如圖1 3中所舉例說明者。在此狀態中，經黏合之 基板1 3係以靜態方式被放置在光照射枱2 1上，對於溝槽 形成的區域沒有實體的接觸負荷。 以I外線從經黏合之基板1 3上方照射，以光學硬化 基板1 1與1 2間的紫外線硬化樹脂，並獲得到黏合類型的 - 12- 200830307 光碟。 藉由使用驅動器（PX-716A)測量所獲得到之光碟的TE( 追踪誤差）/EF(聚焦誤差）。結果是，如圖7所舉例說明者 ，第一基板11與第二基板12之FE/TE的値，係相關於該 表面而在一窄的範圍內變動，且證實其穩定於一實際的適 當位準。 • 例2 在例2中’在上述的第一照射步驟中使用具有圖8所 舉例說明之結構，且能夠以紫外線照射所要照射之範圍的 照射頭5 1來取代圖2中所舉例說明的光點照射。經黏合 之基板1 3要被紫外線照射的區域，係從其中心到外圓周 部的方向。亦即，實施定點寬度範圍的照射，留下經黏合 之基板1 3的外圓周部不予照射，且此外圓周部之內側區 域中的紫外線硬化樹脂被暫時地硬化。 • 關於製造黏合型光碟的其它條件及結構，與例1中的 方法相同。 當使用驅動器（PX-7 16A)測量所獲得到之光碟的 TE/EF，第一基板11與第二基板12之FE/TE的値，如同 例1的情況，係相關於該表面而在一窄的範圍內變動，且 證實其穩定於一實際的適當位準。The Lb substrate is provided on the stage (rotary table) of the rotation applying device, and the side having the barrier layer (reflecting layer and/or recording layer) faces upward. While the rotary table was rotated at a rate of about 10 rpm, the ultraviolet curable resin liquid having a viscosity of about 500 cp was dropped on the substrate by a dispenser to be applied concentrically toward the periphery of the disk, and the radius was about 30 mm. Next, La is turned over so that the front side faces downward (i.e., the formation side of the layer is downward, and light is incident from above), and overlaps with the Lb substrate. This rotary table is rotated at a rate of several hundred to several thousand rpm to expand the ultraviolet curable resin to the peripheral end of the substrate. -5- 200830307 After that, the overlapping substrates are transported to the irradiation table, and then hardened by ultraviolet rays to obtain a bonded type of optical disk. However, in the above bonding process, the deformation of the substrate was not corrected. Therefore, the radial inclination (RD) 値 and the circumferential inclination (TD) 该 of the substrate are increased, so that a defective product is often manufactured. In order to improve or correct RD and TD, for example, when the substrate is irradiated with ultraviolet rays, the shape of the substrate (deformation) is fixed or corrected by using a cap having a vacuum suction function or a cap having a substrate receiver. , RD and TD) These methods are effective for improving RD and TD. However, this will cause an increase in axial acceleration (focus error (FE)) and rail direction acceleration (tracking error (TE)). In this regard, we have found that the causes of this deterioration are: (1) since the disc substrate is attached to the cap, so that minute dust including adhesive dust is fixed between the disc substrate and the cap; (2) due to the dish There are adsorbed contact portions and non-contact portions in the surface of the sheet, so that the micro-scale concave and convex surfaces are formed thereon, the adhesive is hardened into a wave shape; and (3) the vacuum suction holes on the cap are on the disc substrate. The pore marks are left, and the ultraviolet curable resin is hardened as it is. In recent years, there has been a strong demand for increasing the recording rate, especially in the field of DVDs. The level of improvement in axial acceleration and rail direction acceleration is emphasized. For example, the axial acceleration (focus error) and the track direction acceleration (tracking error) of a single-layer DVD + /-R/RW, DVD + RW, and dual-layer disc are in accordance with the residual focus of the Orange Book (Residual focus). ) Specification with tracking error 200830307. The axial acceleration requirement at the outermost circumference is now not more than 1.0 m/s2, and the rail direction acceleration is not more than 0.4 m/s2. The above axial acceleration is when the number of revolutions is 30 Hz (180 rpm), and the acceleration of the recording layer perpendicular to the reference plane is measured in a frequency band from 30 Hz to 1.5 kHz. When the deterioration of the acceleration is caused by the concave portion and the convex portion on the surface of the disc substrate, such a substrate has a large acceleration 値, which is suitable for initial responsiveness, subsequent characteristics, focus stability, and tracking servo. There are adverse effects. The focus error (FE) and tracking error (TE) are measured using the FE/TE test function of the driver (PX-716A manufactured by Plextor). When the substrate is rotated at a high speed, the amplitude of each of the FE/TE can be measured. Typically, a DVD+/-R/RW disc drive has two optical servo functions, namely, a focus survo function and a tracking survo function. During playback, even when the distance between the pickup device and the optical disk varies due to the bending of the optical disk, the focus of the pickup device can be maintained by the focus servo. During playback, even when the center hole of the optical disc is eccentric and/or the rail is partially tortuous, the tracking servo can maintain the tracking of the pickup device. When the two servos are positively acting, the control signal for adjusting the objective lens is calculated. To accurately read the pits. These control signals are referred to as focus error signals and tracking error signals, which are typically expressed in terms of FE/TE, which has the following meanings. The FE system uses a digital-to-analog converter (DAC) to obtain the amplitude of the amplitude of the control signal (focus actuator control signal) for the pickup device to adjust the focus of the laser on the surface of the disc 200830307. Therefore, it is possible to detect a defective optical disc and a disc having poor physical properties, such as a curved optical disc, before recording. The narrower the change in FE値, the smaller the curvature of the disc. The TE uses the DAC as the pick-up device to obtain the amplitude of the control signal (tracking the actuator control signal) to follow the oscillation of the disc. With FE/TE, the acceleration of the media at high speeds can be checked. It has been confirmed that the above axial acceleration is remarkably deteriorated when the substrate is placed on the surface of the irradiation table having dust and/or an adhesive of several micrometers on the surface thereof by ultraviolet irradiation and hardening. For optical recording media with an axial acceleration not exceeding l.Om/s2, the yield constant and equipment operation ratio can be improved to a practical level. The reason why the dust is attracted to the surface of the stage where the ultraviolet ray is irradiated is, for example, the dust originally attached to the substrate is transferred to the pedestal. The size of the dust that has a practical adverse effect on the quality of the optical recording medium of the final target is 1 micron. The adhesion or transfer of dust from the human body, or the adhesion or transfer of dust occurring during the transport of the optical disc and/or the stabilization of the R tilt between the application of the protective layer and the bonding of the substrate (ie at least one day), is awaiting solved problem. Further, a special reason why the resin adheres to the surface of the cap is that when the two substrates are bonded to each other, the resin drip from the peripheral portion of the substrate, and when mechanical problems cause the disc to remain, the resin flows into the inner circular hole or the peripheral portion. Various studies have been made on the substrate bonding method in order to improve the quality of the final object (i.e., optical recording medium) (e.g., Japanese Patent No. 3 63493). Based on the expectation of increasing the recording speed of 200830307 in the field of optical recording media, it is required to improve the manufacture of optical recording media to reduce FE/TE in one step. SUMMARY OF THE INVENTION For these reasons, the inventors have confirmed that a method of recording a medium is required to be joined by optical hardening, by which the tracking error related to the acceleration speed associated with the axial acceleration can be lowered. SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a method in which, when the substrate is bonded via optical hardening, the tracking error of the focus error associated with the axial acceleration can be reduced. Briefly, as will be described below, this and other objects will be attained, and may be achieved by separate or knot recording media methods, including first central apertures and ultraviolet curable resins to cause first substrates to each other. And the second substrate, at least not irradiating the outer circumferential portion to harden the inner region of the outer circumferential portion, and secondly, bonding the two bonded substrates with the center pin contacting only the two clamping regions The two bonded substrates are irradiated with ultraviolet rays. Preferably, the first illumination of the optical recording medium is performed from the center by light spot illumination, and the bonded substrate is rotated in the first corresponding method to fabricate an optical recording substrate. In the manufacture of optical discs for the production of optical discs and the production of optical discs by optical alignment, it is easy to understand that the manufacturing opticals of the present invention are bonded to each other by ultraviolet ray illuminators. In the manufacturing method of the ultraviolet curing of the bonded substrate by the clamped static method in the substrate, the outer circumferential portion is irradiated for one irradiation period. More preferably, in the above method of manufacturing an optical recording medium, the first irradiation is performed by area irradiation. More preferably, in the above method for manufacturing an optical recording medium, the outer circumferential portion is a region surrounded by the periphery of the two-bonded substrate and at least 5 mm therebetween. These and other objects, features and advantages of the present invention will become apparent from [Embodiment] An optical recording medium manufactured by the method of the present invention has a laminated structure of two-disc substrates (a first substrate and a second substrate) having a central hole with an adhesive layer of an ultraviolet curing resin therebetween . Any known material can be used for the substrate. In the present invention, since the ultraviolet curable resin existing between the two substrates is to be optically cured, the substrate on the ultraviolet irradiation side is made of a material transparent to ultraviolet rays. Φ Depending on the optical recording medium (i.e., the final target), the first and second substrates may have different types of structures. Specific examples of these substrates are substrates which are transparent on the optical surface, such as 'glass, polycarbonate (PC) or acrylic resin (polymethyl methacrylate). On such an optically transparent substrate, for example, minute concave portions and convex portions (pits and grooves) are formed, or a metal reflective layer, a magneto-optical recording layer, and a phase change recording layer are stacked. The recording layer may be formed on both the first substrate and the second substrate, or when one of the functions of the substrate covers the substrate, the recording layer is on the other substrate. Next, a method of manufacturing the optical recording medium of the present invention will be described in detail using a specific example and with reference to the accompanying drawings, but the present invention is not limited thereto. Example 1 In Example 1, as exemplified in Fig. 1, a recording layer was formed by sputtering on a dish substrate having a center hole to obtain a first substrate 11. The first substrate 11 is vacuum-adsorbed on the rotary table 20, and the recording layer side of the first substrate 11 faces upward. 0 Next, when the rotary table 20 is rotated at about 10 rpm, the ultraviolet curable resin 30 having a viscosity of 500 cp is dripped onto the substrate in a concentric manner toward the circumference of the disk by a dispenser (not shown). The radius is about 30 mm with respect to the center of the first substrate 11. Next, another disk-shaped substrate (ie, the second substrate 12) is overlapped and bonded to the first substrate 11. Next, the rotary table 20 is rotated at a rate of several hundreds to several thousands of rpm to expand the ultraviolet curable resin 30 to the periphery of the disk substrate. Next, the ultraviolet curable resin 30 is irradiated to be hardened. The treatment of ultraviolet radiation is carried out in two separate steps. As illustrated in Fig. 2, in Fig. 2, the irradiation head 50 is moved from the center to the peripheral portion of the substrate in the direction indicated by the arrow A to perform ultraviolet irradiation of the spot. In this hardening step, at least the outer circumferential portion of the first substrate 11 is not irradiated, and the ultraviolet curable resin 3 存在 existing inside the outer circumferential portion is temporarily hardened. The outer circumferential portion represents, for example, an area surrounded by the surroundings and at least 5 to 10 mm from there. In the first hardening step, the ultraviolet curable resin 30 present in the annular region of the radius of 20 to 50 mm including the center hole of -11 - 200830307 is temporarily hardened. By controlling the rotational speed of the rotary table 20, the thickness of the ultraviolet curable resin 30 can be adjusted to form a uniform resin layer. In this step, as shown in Fig. 3, the ultraviolet curable resin 30 which is present at the outer circumferential portion between the substrates 1 1 and 12 is not hardened. As described above, when the ultraviolet curable resin 30 at the outer circumferential portion between the substrates 11 and 12 remains unhardened, the resin is soft enough even when the first substrate 11 is in contact with the rotary table 20 , all have a margin of correction. This makes it possible to correct the shape deformation of the substrate which causes the focus error and the tracking error before the optical recording medium is manufactured. In addition, by temporarily hardening the inner circumferential portion before the outer circumferential portion is hardened in the first hardening step, the substrates are not changed in RD (radial inclination or R-tilt), oscillation, and thickness of the resin layer. In this case, it is transferred to the next process, that is, the second irradiation stage. The bonded substrate 13 is removed from the rotary table 20 by the transport tip 40 and placed on the light irradiation stage 21 for the second stage of ultraviolet irradiation, as exemplified in Figs. The light irradiation table 2 1 has a center pin 22' which protrudes from the center hole of the bonded substrate 13 while contacting only the bonded substrate 13 with the clamping region 14 as shown in FIG. Illustrator. In this state, the bonded substrate 13 is placed on the light irradiation stage 21 in a static manner, and there is no physical contact load on the area formed by the grooves. The outer line of I is irradiated from above the bonded substrate 1 3 to optically harden the ultraviolet curable resin between the substrates 1 1 and 12, and to obtain a bonded type of - 12-200830307. The TE (tracking error) / EF (focus error) of the obtained optical disk is measured by using a driver (PX-716A). As a result, as exemplified in FIG. 7, the enthalpy of the FE/TE of the first substrate 11 and the second substrate 12 varies with respect to the surface within a narrow range, and it is confirmed that it is stable at an actual appropriate level. Level. • Example 2 In Example 2, the light exemplified in Fig. 2 was replaced by the irradiation head 51 having the structure illustrated in Fig. 8 and capable of irradiating with ultraviolet rays to be irradiated in the first irradiation step. Point illumination. The area of the bonded substrate 13 to be irradiated with ultraviolet rays is from the center to the outer circumferential direction. That is, the irradiation of the fixed-width range is carried out, leaving the outer circumferential portion of the bonded substrate 13 not irradiated, and further, the ultraviolet-curable resin in the inner region of the circumferential portion is temporarily hardened. • The other conditions and structures for manufacturing a bonded disc are the same as those in Example 1. When the TE/EF of the obtained optical disk is measured using a driver (PX-7 16A), the FE/TE of the first substrate 11 and the second substrate 12, as in the case of Example 1, is related to the surface It varies within a narrow range and is confirmed to be stable at an appropriate level.
以下描述例3。如圖9所舉例說明者，紫外線硬化樹 -13- 200830307 脂係施加於第一基板1 1與第二基板1 2，並藉由旋轉該兩 基板以將紫外線硬化樹脂擴散開。第一基板1 1與第二基 板12重疊並在真空中使彼此互相黏合，同時防止氣泡的 混入。 關於製造黏合型光碟的其它條件及結構，與例2中的 方法相同。 當使用驅動器（PX-7 16A)測量所獲得到之光碟的 TE/EF，第一基板1 1與第二基板12之FE/TE的値，如同 例1的情況，係相關於該表面而在一窄的範圍內變動，且 證實其穩定於一實際的適當位準。 比較例1 如圖1所舉例說明者，準備具有中心孔的碟形基板， 並其上濺鍍記錄層以獲得到第一基板1 1。第一基板1 1被 真空吸附在旋轉台20上，且第一基板1 1的記錄層側朝上 〇 接下來，在旋轉台20以大約數lOirprn來予以旋轉時 ，以分注器（未顯示出）在基板上滴注黏度爲500cP的紫外 線硬化樹脂3 〇，以同心方式朝向碟片的周邊，其半徑相對 於第一基板1 1之中心大約爲3 0 m m。 接著，以重疊的方式與另一碟形基板（即第二基板1 2) 黏合。接著，旋轉台20以數百至數千rpm的速率旋轉， 以將紫外線硬化樹脂3 0擴展到該碟形基板的周邊。 接著，實施紫外線照射處理。 -14- 200830307 在兩基板間的紫外線硬化樹脂未被硬化的情況下從旋 轉台20上取下經黏合的基板。經黏合的基板被放置於如 圖10所舉例說明的光照射台60上，在光照射台的外圓周 部與內圓周部分別具有承接部。接著，從上方以紫外線對 整個經黏合的基板照射，以硬化該紫外線樹脂，並獲得到 光碟。在此例中，光照射台60的承接部61及62不與光 碟的溝槽形成區相接觸，且因此對該區域沒有負荷。 使用驅動器（PX-716A)測量所製造之光碟的TE/EF。 如圖1 1所舉例說明者，其結果是，特別是該內圓周部與 外圓周部有大的變形，且證實TE與FE的劣化。 比較例2 第一基板1 1 (其上濺鍍有記錄層的基板）被真空吸附在 旋轉枱20上，且第一基板1 1的記錄層側朝上。 接下來，在旋轉台20以大約數l〇rpm旋轉時，以分 注器（未顯示出）在基板上滴注黏度爲500cp的紫外線硬化 樹脂3 0，以同心方式朝向碟片的周邊，其半徑相對於第一 基板1 1之中心爲大約30mm。 接著，以重疊的方式與另一碟形基板（即第二基板12) 黏合。接著，旋轉枱20以數百至數千rpm的速率旋轉， 以將紫外線硬化樹脂30擴展到該碟形基板的周邊。接著 ，控制旋轉枱20的轉數，以使該兩基板間的層具有均句 一致的厚度。 如圖1 2所示，將經黏合之基板1 3設置在光照射抬70 -15- 200830307 上，且經黏合之基板13與基板承接部65整體 外線照射頭從黏合之基板1 3的內圓周部移至 向著外圓周部藉由光點照射以便光學地硬化該 ，且因此獲得到光碟。 因此所獲得到之光碟的溝槽形成部，在該 樹脂被硬化之前，被該溝槽形成部與基板承接 觸影響。黏附於光照射台7 0表面上的細微灰 φ 成基板11與12間之樹脂層的凹部與凸部。當 (PX-716A)測量所製造之光碟的TE/EF時，如B 就整體而論，由於經黏合之基板1 3有大的變 實際上不令人滿意。 在上述的各例中，描述了製造疊合基板類 係從該光碟內側開始受光。本發明的方法並不 可應用於單層光碟，或希望將黏合型之加速度 準確度水準的其它種類或製程。 Φ 本文件主張優先權，且包含關於2006年： 出申請之日本專利申請案No. 2006-201 787的 部內容倂入本文參考。 現已完整地描述了本發明，熟悉一般技術 瞭，可對其做諸如的改變及修改，不會偏離本 之本發明的精神與範圍。 【圖式簡單說明】 從以下配合附圖的詳細描述將可充分明瞭 地接觸。紫 外圓周部， 紫外線樹脂 紫外線硬化 部65的接 麈及樹脂造 使用驅動器 1 1 3所示， 形，其結果 型的光碟， 限於此，且 降低到一高 月25日提 標的，該全 之人士應明 文中所說明 本發明之各 -16- 200830307 種的其它目的、特徵及附屬的優點，其中，在全文中相同 的參考字符指示相同的對應部分，且其中： 圖1係舉例說明例1中之光學記錄媒體之製程的圖形 f 圖2係舉例說明例1之第一次紫外線照射之處理的圖 形； 圖3係舉例說明例1中之光學記錄媒體之製程的圖形 f 圖4係舉例說明將經黏合之基板傳送至光照射承台的 圖形； 圖5係舉例說明經黏合之基板被放置在光照射承台上 之狀態的圖形； 圖6係舉例說明在第二步驟中紫外線照射的處理的圖 形； 圖7係舉例說明追踪誤差（TE)與聚焦誤差（FE)的結果 9 圖8係舉例說明例2之光學記錄媒體之製程的圖形； 圖9係舉例說明例3之光學記錄媒體之製程的圖形； 圖1 0係舉例說明比較例1之光學記錄媒體之紫外線 照射之處理的圖形； 圖11係舉例說明比較例1之追踪誤差（TE)與聚焦誤 差（FE)之結果的圖形； 圖1 2係舉例說明比較例2之光學記錄媒體之紫外線 照射之處理的圖形； -17- 200830307 圖13係舉例說明比較例2之追踪誤差（TE)與聚焦誤 差（FE)之結果的圖形。 【主要元件符號說明】 1 1 :第一基板 1 2 :第二基板 1 3 :經黏合之基板 14 :鉗夾區 2 0 :旋轉台 2 1 :光照射台 22 :中心銷 3 0 :紫外線硬化樹脂 40 :運送吸頭 5 〇 :照射頭 5 1 :照射頭 6〇 :光照射台 61、62 :承接部 70 :光照射台 65 :基板承接部 -18-Example 3 is described below. As exemplified in Fig. 9, a UV-curable tree-13-200830307 is applied to the first substrate 11 and the second substrate 12, and the ultraviolet curing resin is diffused by rotating the two substrates. The first substrate 1 1 overlaps with the second substrate 12 and is bonded to each other in a vacuum while preventing the incorporation of air bubbles. Other conditions and structures for manufacturing a bonded optical disc are the same as those in the second embodiment. When the TE/EF of the obtained optical disk is measured using a driver (PX-7 16A), the FE/TE of the first substrate 11 and the second substrate 12, as in the case of Example 1, is related to the surface. It varies within a narrow range and is confirmed to be stable at an appropriate level. Comparative Example 1 As illustrated in Fig. 1, a disk-shaped substrate having a center hole was prepared, and a recording layer was sputtered thereon to obtain a first substrate 11. The first substrate 11 is vacuum-adsorbed on the rotary table 20, and the recording layer side of the first substrate 11 is facing upward, and then, when the rotary table 20 is rotated by about 10 irprns, the dispenser is not shown (not shown) The ultraviolet curable resin 3 黏 having a viscosity of 500 cP was dropped on the substrate, and faced concentrically toward the periphery of the disc, and its radius was about 30 mm with respect to the center of the first substrate 11. Next, the other disk-shaped substrate (ie, the second substrate 12) is bonded in an overlapping manner. Next, the rotary table 20 is rotated at a rate of several hundreds to several thousands of rpm to expand the ultraviolet curable resin 30 to the periphery of the dish substrate. Next, ultraviolet irradiation treatment is performed. -14- 200830307 The bonded substrate is removed from the rotary table 20 without curing the ultraviolet curable resin between the substrates. The bonded substrate is placed on the light irradiation table 60 as exemplified in Fig. 10, and has a receiving portion at the outer circumferential portion and the inner circumferential portion of the light irradiation table, respectively. Next, the entire bonded substrate is irradiated with ultraviolet rays from above to harden the ultraviolet resin and obtain the optical disk. In this example, the receiving portions 61 and 62 of the light irradiation stage 60 are not in contact with the groove forming region of the optical disk, and thus there is no load on the region. The TE/EF of the manufactured disc was measured using a driver (PX-716A). As exemplified in Fig. 11, as a result, in particular, the inner circumferential portion and the outer circumferential portion were largely deformed, and deterioration of TE and FE was confirmed. Comparative Example 2 The first substrate 1 1 (the substrate on which the recording layer was sputtered) was vacuum-adsorbed on the rotary stage 20, and the recording layer side of the first substrate 11 was directed upward. Next, when the rotary table 20 is rotated at about several rpm, the ultraviolet curable resin 30 having a viscosity of 500 cp is dropped onto the substrate by a dispenser (not shown), and is concentrically oriented toward the periphery of the disk. The radius is about 30 mm with respect to the center of the first substrate 11. Next, it is bonded to another disc substrate (ie, the second substrate 12) in an overlapping manner. Next, the rotary table 20 is rotated at a rate of several hundreds to several thousands of rpm to expand the ultraviolet curable resin 30 to the periphery of the dish substrate. Next, the number of revolutions of the rotary table 20 is controlled so that the layers between the two substrates have a uniform thickness. As shown in FIG. 12, the bonded substrate 13 is disposed on the light irradiation 70 -15-200830307, and the bonded substrate 13 and the substrate receiving portion 65 are integrally irradiated with the head from the inner circumference of the bonded substrate 13 The portion is moved to be irradiated toward the outer circumference by the light spot to optically harden it, and thus to the optical disc. Therefore, the groove forming portion of the obtained optical disk is affected by the groove forming portion and the substrate before the resin is hardened. The fine ash φ adhered to the surface of the light irradiation stage 70 is a concave portion and a convex portion of the resin layer between the substrates 11 and 12. When (PX-716A) measures the TE/EF of the manufactured disc, as B as a whole, it is actually unsatisfactory because of the large change of the bonded substrate 13. In each of the above examples, it is described that the manufacture of the laminated substrate type receives light from the inside of the optical disk. The method of the present invention is not applicable to single-layer optical discs, or other types or processes that desire to accurately match the acceleration of the adhesive type. Φ This document claims priority and contains the contents of the Japanese Patent Application No. 2006-201 787, which is incorporated herein by reference. The present invention has been described in its entirety, and it is understood that the invention may be modified and modified without departing from the spirit and scope of the invention. BRIEF DESCRIPTION OF THE DRAWINGS A detailed description will be made in the following detailed description in conjunction with the accompanying drawings. The ultraviolet peripheral portion, the ultraviolet resin curing portion 65 of the ultraviolet resin, and the resin-made driver 1 1 3 are used, and the resulting optical disc is limited thereto, and is reduced to a high moon 25th, and the whole person Other objects, features, and advantages of the present invention will be apparent from the description of the accompanying drawings. FIG. 2 is a diagram illustrating the processing of the first ultraviolet irradiation of Example 1; FIG. 3 is a diagram illustrating the process of the optical recording medium in Example 1. FIG. 4 is an illustration of The bonded substrate is transferred to the pattern of the light irradiation stage; FIG. 5 is a view illustrating a state in which the bonded substrate is placed on the light irradiation stage; FIG. 6 is an example of the treatment of the ultraviolet irradiation in the second step. Figure 7 is a graph illustrating the results of tracking error (TE) and focus error (FE). Figure 8 is a graph illustrating the process of the optical recording medium of Example 2; A graph of the process of the optical recording medium of Example 3; FIG. 10 is a graph illustrating the processing of ultraviolet irradiation of the optical recording medium of Comparative Example 1; and FIG. 11 is a diagram illustrating the tracking error (TE) and focus error of Comparative Example 1. (FE) FIG. 1 is a graph illustrating the treatment of ultraviolet irradiation of the optical recording medium of Comparative Example 2; -17- 200830307 FIG. 13 is a diagram illustrating the tracking error (TE) and focus error of Comparative Example 2. A graph of the results of (FE). [Description of main component symbols] 1 1 : First substrate 1 2 : Second substrate 1 3 : Bonded substrate 14 : Clamping area 2 0 : Rotating table 2 1 : Light irradiation table 22 : Center pin 3 0 : UV curing Resin 40: transporting head 5 〇: illuminating head 5 1 : illuminating head 6 〇: light irradiation stage 61, 62: receiving part 70: light irradiation stage 65: substrate receiving part -18-