200830129 九、發明說明： 【發明所屬之技術領域】 本發明係有關於應用於晶圓針測之派工方法，特別 係有關於一種可線上即時監控與更新晶圓針測狀況之 即時派工方法。 【先前技術】 在積體電路之製程中，「測試」係確保積體電路產品 Γ 良率及建立有效的資料以供工程分析使用，其中測試大 致可分為兩階段第一階段係晶圓針測，主要係測試一晶 圓上的各個晶片是否良好。第二階段則係對各個封裝件 進行功能測試。 在進行晶圓針測時’係將各批次之待測的晶圓藉由 一測試機台進行針測。然而，以往晶圓針測之派工方法 係為人工操作’其較為耗時且正確性較差。當有緊急訂 I 單的生產狀況時，無法做彈性應變且因應變化性低，導 致在操作上極為不便，以致降低生產管理效率。另，在 各批次之晶圓針測之工作進度追蹤亦造成困難。 【發明内容】 本發明之主要目的係在於提供一種應用於晶圓針測 之即時派工方法，利用網頁連結方式，使生產線上之工 乍人員可即時控管機台狀態，亦具有計畫生產的功能， 使生產線上之工作人員能提早及有充分時間對物料做 女排’並能達成無紙化派工作業。 本發明之次一目的係在於提供一種應用於晶圓針測 6 200830129 之即時派工方法，藉由一生產管理系統係結合一製造執 行系統與一設備管理系統並利用網頁連結方式，使生產 線上之工作人員不需額外輸入任何資料，並於公司内部 或外部皆可操作該生產管理系統，具有提高生產管理之 效率。200830129 IX. INSTRUCTIONS: [Technical Fields of the Invention] The present invention relates to a method for dispatching wafer needles, and more particularly to an instant dispatch method for online monitoring and updating of wafer needles on-line. . [Prior Art] In the process of integrated circuit, "test" ensures the integrity of the integrated circuit product and establishes effective data for engineering analysis. The test can be roughly divided into two stages: the first stage of the wafer needle. The test mainly tests whether the individual wafers on a wafer are good. The second phase is a functional test of each package. In the case of wafer needle testing, each batch of wafers to be tested is subjected to needle testing by a test machine. However, in the past, the method of dispatching wafer probes was manual operation, which was time consuming and less accurate. When there is an emergency order, the elastic strain cannot be made and the variability is low, resulting in extremely inconvenient operation, which reduces the efficiency of production management. In addition, the progress of the work of each batch of wafer probes has also caused difficulties. SUMMARY OF THE INVENTION The main object of the present invention is to provide an instant dispatching method for wafer needle testing, which utilizes a webpage connection method to enable workers on the production line to instantly control the state of the machine, and also has a plan production. The function of the staff on the production line can make the women's volleyball in the material early and have sufficient time to achieve the paperless work. A second object of the present invention is to provide a real-time dispatching method for wafer stitching 6 200830129, which combines a manufacturing execution system and a device management system by a production management system and utilizes a webpage connection method to make the production line The staff does not need to input any additional information, and can operate the production management system inside or outside the company, which has the efficiency of improving production management.
ί 本發明之另一目的係在於提供一種應用於晶圓針測 之即時派工方法，利用網頁連結方式，使生產線上之工 作人員僅需藉由個人數位助理即可查詢機台生產順序 以及生產狀況，亦可依實際或緊急需求做手動的調整。 本發明的目的及解決其技術問題是採用以下技術方 案來實現的。依據本發明，一種應用於晶圓針測之即時 派工方法#供一生產管理系統，該生產管理系統内之 功能皆為網路化，可經由-劉覽器連結進入。結合一晶 圓針測派u統至該生產管理系統，該晶圓針測派工系 統係能顯示測試機合峰甚灿次 生產批貪料之即時狀態，並具有手 動輸入條件、間隔播入、自私 具从 ^ 動派工、手動排工調整之功 能。最後，以瀏覽器择作太 士政η 梯作方式形成—機台派工表。 本發明的目的及解決其 措施進-步實,見。 、冑問題還可採用以下技術 在前述的應用於晶圓針 々A · /日圓#⑴ 』之即時派工方法中，可另 A f工矣 ^，割覽器操作方式更新該機 台派工表，以即時調整計劃排程。 在前述的應用於晶圓針測 產管理系統可另包含有一製_日、派工方法中’該生 & 執行系統（Manufacturing 200830129Another object of the present invention is to provide an instant dispatch method for wafer needle testing, which utilizes a webpage connection method to enable a staff member on a production line to query the machine production sequence and production only by a personal digital assistant. The situation can also be manually adjusted according to actual or urgent needs. The object of the present invention and solving the technical problems thereof are achieved by the following technical solutions. According to the present invention, an instant dispatch method for wafer needle testing is provided for a production management system, and the functions in the production management system are all networked and can be accessed via a link. Combined with a wafer needle measurement system to the production management system, the wafer needle measurement dispatching system can display the real-time status of the test machine and the production batch, and has manual input conditions and interval broadcast. Self-employed with the function of dispatching work and manual shifting. Finally, the browser is selected as the Taishizheng η ladder to form a machine-to-machine dispatch table. The object of the present invention and the solution to the measures are further described.胄 胄 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 还可 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆 晶圆Table to schedule the schedule in real time. In the foregoing application to the wafer needle measurement management system, there may be another system, the dispatch method, and the implementation system (Manufacturing 200830129)
Execution System，MES)與一設備管理系統（Equipment Management System，EMS) 〇 在前述的應用於晶圓針測之即時派工方法中，可另 包含：無線傳輸該機台派工表至個人數位助理（PDA)之 網頁内。 【實施方式】 請參閱所附圖式，本發明將列舉以下之實施例說明： 為了易於了解目前機台作業進度及更新機台作業順 序，依本發明之應用於晶圓針測之即時派工方法，第i 圖係為應用於應用於晶圓針測之即時派工方法之流程 圖。 依據該方法’提供一生產管理系統，該生產管理系 統内之功能皆為網路化，可經由一瀏覽器連結進入。並 且，一晶圓針測派工系統（Cp Dispatch System)係結合 至該生產管理系統。 請參閱第2圖所示，在連接該生產管理系統須先確 認權限’在本實施例中，該確認權限之操作界面係為一 網頁’可開啟一網路割覽器，如lnternet EXpi〇rer或 Netscape等等，在輸入正破網址之後以網際網路連接到 該確認權限之網頁，在本實施例中，可在任意具有網路 連線功能之電腦上，開啟瀏覽器網頁，輸入 ，再點選右上角之MyPTI攔位便 可進入生產管理系統之登入網頁。並在輸入使用者名稱 及密碼後按、、確定〃，在確認權限之後，請參閱第3圖 8 200830129 所示，方可進入該生產管理系統，以執行派工工作或進 行瀏覽監控。在本實施例中，該生產管理系統可另包含 有一製 ie 執行系統（Manufacturing Execution System， MES)與一 5又備管理系統（EqUipment Management System，EMS)。因此，生產線上之工作人員不需額外輸 入任何資料，並於公司内部或外部皆可操作該生產管理 系統，具有提高生產管理之效率。 〇 請參閱第4圖所示，在該生產管理系統之網頁介面 中點取該晶圓針測派工系統（CP Dispatch System)，以 開啟該晶圓針測派工系統之程式。其中，該晶圓針測派 工系統係能顯示測試機台生產批資料之即時狀態。 請參閱第5圖所示，進入該晶圓針測派工系統之首 頁’頁面之右半部係顯示出所有機台目前之狀態，當機 台之狀態係顯示為生產中（Running)或重測（Retest)，則 顯示出每一機台上之生產批資料。例如，機台機種（EQ G TyPe)、客戶名稱（Cust·)、生產批型名（Device)、機台編 號（Tester)、機台狀態（status)、目前生產批製程站別 (Stage)、在製品生產順序編號（Seq)、廠内批號（I/L〇t)、 預估完成日期與時間（FinDate)以及投入量（Left Qty)。 若機台之狀態係顯示為閒置（Idle)，顯示於「機台狀態」 (Status)之欄位，則僅顯示機台機種（Eq Type)、機台編 號（Tester)與在製品生產順序編號（Seq)。 當在製品生產順序編號（即Seq攔位）係為、、〇，係為 表示目前機台機況，若有排定待生產批則會依序顯示出 200830129 M〃、'、2'、、3〃等等。其中，預估完成日期與時間 針對機台上生產批，以計算並預估出的完成日期與 間。投入量之分子部分係表示未完成之晶圓片數，分 部分係表示總投入之晶圓片數，若為待生產批，則會 示出當站投入總數。 此外，該晶圓針測派工系統另具有手動輸入條件 間隔插入、自動派工、手動排工調整之功能。較佳地 在晶圓針測過程中，以瀏覽器操作方式更新該機台派 表，以即時調整計劃排程。請再參閱第5圖所示，在 晶圓針測派工系統之首頁之左半部係為手動設定，其 該手動輸入條件之設定科目可包含客戶名 (Customer)、生產批型名（Device)、目前生產批製程 別（Stage)以及機台狀態（status)。在輸入條件後， 、Query"可得待派工在製品之功能。其中該插入間 之功能係為機台於派工時可插入一段非生產的時間， 更改機台或保養機台等等。該插入間隔之操作係先勾 、插入間隔"並輸入時間，接著按、、pick，，使 凡— 間隔插入機台預定使用排程中。 請再參閱第5圖所示，在該晶圓針測派工系統之 面中點取、、Auto Dispatch"，即可進入一機台設定之 面0 請參閱第6圖所示，在進入該機台設定之晝面， 針對機台上有生產批之機台，該機台設定會自動顯示 供目前生產批的設定。若機台目前不為生產，則該機 係 時 母 顯 工 該 中 稱 站 按 隔 如 選 之 頁 晝 可 以 台 10 200830129 設定可經由右半部的科目以手動之方式設定選項，其選 項科目可包含客戶名稱、生產批型名以及目前生產批製 程站別。在完成所有機台設定後按、、確定儲存〃，再次 確立所有機台皆設定後再按右上方之、Auto Dispatch GO ! 〃，並進行自動派工。 最後，以割覽器操作方式形成一機台派工表，包含 了自動派工與手動派工調整。該晶圓針測派工系統會將 所有符合機台設定的當站排入批次（queuing lots)按昭 ’ *'、、 下線時間長短以及機台完工時間早晚之規則自動排入 機台排程。在本實施例中，係以批次（lot)下線時間越長 為優先排入。在機台排入新批次（new lot)後，所有機台 係以越早完工為優先排入。當該晶圓針測派工系統完成 以上派工後，即自動形成該機台派工表。因此，該派工 方法亦具有計晝生產的功能，使生產線上之工作人員能 提早及有充分時間對物料做安排。 ί 此外’派工人員可再以手動之方式做調整，請參閱 第7圖所示，點選、、刪除〃可將機台上排入的在製品移 除。另可加入新批次或插入間隔於機台上。請參閱第8 圖所示’機台上生產批次可因應需求做調整，如調整職 缺順序。因此，最後會形成一完整機台派工表，以供生 產線上之工作人員進行查詢與更換，並能達成無紙化派 工作業。 較佳地，該即時派工方法可另包含：無線傳輸該機 台派工表至個人數位助理（PDA)之網頁内。由於機台派 11 f Ο 200830129 工表係為網頁開啟’故生產線上之工作人員可藉由所 帶之個人數位助理查詢機台派工表，故生產線上之工 人員可即時知道機台生產順戽 生丨貝序μ及生產狀況等等。尤 地，每次更新網頁時，即為 程式重新彳于知目前機台 產狀況及重新計算完 、曰〗’並以圖樣顯示出最新的 產順序。 以上所述，僅是本發明的較佳實施例而已，並非 本發月作任何形式上的限制，雖然本發明已以較佳實 例揭露如上’然而並非用以限定本發明，任何熟悉本 業的技術人員，在不脫離本發明技術方案範圍内，告 田 利用上述揭示的技術内容作出些許更動或修飾為等 變化的等效實施例，但凡是未脫離本發明技術方案的 谷’依據本發明的技術實質對以上實施例所作的任何 單修改、等同變化與修飾，均仍屬於本發明技術方案 範圍内。 【圖式簡單說明】 第1圖··依據本發明，一種應用於應用於晶圓針測之 時派工方法之流程圖。 第2囷：依據本發明，以一瀏覽器開啟用以確認權限 網頁示意圖。 第3圖·依據本發明，在進入生產管理系統時該網頁 操作界面示意圖。 第4圖：依據本發明，在點選晶圓針測派工系統時該 頁之操作界面示意圖。 攜 作 佳 生 生 對 施 專 可 同 内 簡 的 即 之 之 網 12 200830129 第5圖：依據本發明，在進入晶圓針測派工系統時該網 頁之操作界面示意圖。 第6圖：依據本發明，在進入機台設定時該網頁之操作 界面示意圖。 第7圖：依據本發明，在手動調整時該網頁之操作界面 示意圖。 第8圖··依據本發明，在調整職缺順序時該網頁之操作 界面示意圖。 【主要元件符號說明】 13Execution System (MES) and an Equipment Management System (EMS). In the aforementioned instant dispatch method for wafer needle testing, the method may further include: wirelessly transmitting the machine dispatching table to the personal digital assistant. (PDA) on the web page. [Embodiment] Referring to the drawings, the present invention will be described in the following embodiments: In order to easily understand the current progress of the machine and update the operation sequence of the machine, the instant application of the wafer needle measurement according to the present invention Method, the i-th diagram is a flow chart applied to an instant dispatch method applied to wafer needle testing. According to the method, a production management system is provided, and the functions in the production management system are all networked and can be accessed via a browser. Moreover, a Cp Dispatch System is integrated into the production management system. Please refer to FIG. 2, the permission must be confirmed before connecting to the production management system. In this embodiment, the operation interface of the confirmation authority is a webpage, and a network viewer can be opened, such as lnternet EXpi〇rer. Or Netscape, etc., after entering the broken URL, the Internet is connected to the webpage of the confirmation permission. In this embodiment, the browser webpage can be opened, input, and then on any computer with the network connection function. Click on the MyPTI block in the upper right corner to enter the login page of the production management system. After entering the user name and password, press , and confirm 〃. After confirming the permission, please refer to Figure 3 200830129 to enter the production management system to perform the dispatch work or browse monitoring. In this embodiment, the production management system may further include a Manufacturing Execution System (MES) and an Equipment Management System (EMS). Therefore, the staff on the production line does not need to input any additional information, and the production management system can be operated inside or outside the company, which has the efficiency of improving production management. 〇 Refer to Figure 4 to locate the CP Dispatch System in the web interface of the production management system to open the program for the wafer needle surveying system. Among them, the wafer needle survey dispatching system can display the real-time status of the test batch production batch data. Please refer to Figure 5, enter the right half of the page of the wafer needle surveying system. The right half of the page shows the current status of all the machines. When the status of the machine is displayed as running or heavy Test (Retest), the production batch data on each machine is displayed. For example, machine model (EQ G TyPe), customer name (Cust·), production batch name (Device), machine number (Tester), machine status (status), current production batch process station (Stage), WIP production order number (Seq), in-plant lot number (I/L〇t), estimated completion date and time (FinDate), and input quantity (Left Qty). If the status of the machine is displayed as idle (Idle) and displayed in the "Status" field, only the machine model (Eq Type), machine number (Tester) and work in process order number are displayed. (Seq). When the in-process production order number (ie Seq block) is 、, 〇, it means the current machine condition, if there is a scheduled batch to be produced, it will display 200830129 M〃, ', 2', 3〃 and so on. Among them, the estimated completion date and time are for the production batch on the machine to calculate and estimate the completion date and time. The molecular part of the input indicates the number of unfinished wafers, and the part indicates the total number of wafers to be put into production. If it is a batch to be produced, the total number of stations in the station will be shown. In addition, the wafer needle surveying system has the functions of manual input condition interval insertion, automatic dispatch, and manual shift adjustment. Preferably, during the wafer pinning process, the machine schedule is updated in a browser operation to adjust the schedule schedule in real time. Please refer to Figure 5 again. The left half of the top page of the wafer needle surveying system is manually set. The manual input condition setting account can include the customer name (Customer) and the production batch type name (Device). ), the current production batch (Stage) and the machine status (status). After entering the conditions, Query" can be assigned to work in the product. The function of the insertion room is that the machine can insert a non-production time, change the machine or maintain the machine, and the like when the machine is dispatched. The operation of the insertion interval is to first check, insert the interval " and enter the time, then press , , pick, so that the interval is inserted into the machine to use the schedule. Please refer to Figure 5, in the plane of the wafer needle surveying system, click Auto, and Auto Dispatch", you can enter the setting of a machine. See Figure 6 for the entry. After the machine is set up, for the machine with the production batch on the machine, the machine setting will automatically display the settings for the current production batch. If the machine is not currently in production, then the machine is shown in the middle of the station. The station can be placed on the page. Page 10 200830129 The option can be set manually via the right half of the subject. Contains the customer name, production batch name, and current production batch process site. After completing all the settings of the machine, press , to confirm the storage 〃, and then establish that all the machines are set, then press the top right, Auto Dispatch GO ! 〃, and perform automatic dispatch. Finally, a machine dispatching table is formed by the operation of the viewer, which includes automatic dispatching and manual dispatching adjustment. The wafer needle surveying and dispatching system will automatically discharge all the queues that meet the machine settings into the machine row according to the rules of Zhao '*', the length of the offline time, and the completion time of the machine. Cheng. In this embodiment, the longer the lottery time is, the higher the priority is. After the machine has placed a new lot, all machines are prioritized for early completion. When the wafer needle surveying and dispatching system completes the above dispatching, the machine dispatching table is automatically formed. Therefore, the dispatch method also has the function of counting production, so that the staff on the production line can arrange the materials early and in sufficient time. ί In addition, the dispatcher can make adjustments manually. Please refer to Figure 7, click and delete to remove the WIP from the machine. You can also add new batches or insert intervals on the machine. Please refer to Figure 8 for the production batches on the machine that can be adjusted according to the needs, such as adjusting the job order. Therefore, a complete machine dispatching form will be formed in the end for the staff on the production line to inquire and replace, and to achieve a paperless job. Preferably, the instant dispatch method may further comprise: wirelessly transmitting the dispatching table of the machine to a webpage of a personal digital assistant (PDA). Since the machine station 11 f Ο 200830129 is open to the webpage, the staff on the production line can use the personal digital assistant to send the worktable to the machine, so the workers on the production line can immediately know the production of the machine.丨 丨 丨 序 及 及 and production status and so on. In particular, each time the web page is updated, the program re-examines the current state of the machine and recalculates it, and displays the latest production sequence in a pattern. The above description is only a preferred embodiment of the present invention, and is not intended to limit the present invention in any way. Although the present invention has been disclosed by the preferred embodiments as described above, however, it is not intended to limit the invention. In the scope of the technical solutions of the present invention, the present invention makes some modifications or modifications to the equivalent embodiments of the above-described technical contents, but the technology according to the present invention does not deviate from the technical solution of the present invention. Any single modification, equivalent change and modification to the above embodiments are still within the scope of the technical solutions of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a flow chart of a method for dispatching a wafer to be applied to a wafer needle according to the present invention. Section 2: According to the present invention, a schematic diagram of a web page for confirming authority is opened in a browser. Fig. 3 is a schematic diagram of the webpage operation interface when entering the production management system according to the present invention. Figure 4: Schematic diagram of the operation interface of the page when clicking on the wafer needle measurement dispatching system in accordance with the present invention. A network that is the same as that of the student and the student. 12200830129 Fig. 5 is a schematic diagram of the operation interface of the screen when entering the wafer needle surveying and dispatching system according to the present invention. Figure 6 is a schematic diagram of the operation interface of the web page when entering the machine setting according to the present invention. Figure 7 is a schematic diagram of the operation interface of the web page in manual adjustment according to the present invention. Fig. 8 is a schematic diagram showing the operation interface of the web page in the order of adjusting the job title according to the present invention. [Main component symbol description] 13