TW200827570A - Designing method of minute flow rate controller with entrance throttle groove - Google Patents

Abstract

To provide a designing method of a minute flow rate controller for accurately controlling a minute flow rate of a fluid, realizing a desired valve characteristic without inducing unstableness of a fluid flow, and having a throttle groove for controlling the minute flow rate with a simple shape. The minute flow rate controller comprises an inflow passage 12 for introducing the fluid, a valve element 2 having a main throttle groove 6 formed thereon for making the introduced fluid flow from a starting end toward a finishing end, a fluid outflow port 20 opened at an optional cross section by a flow rate adjusting member, and an outflow passage 14 for leading out the fluid flowing out from the fluid outflow port 20. In this designing method of the minute flow rate controller with the entrance throttle groove, the entrance throttle groove 8 is provided communicably preceding a starting end position of the main throttle groove 6, and based on a relational expression derived from the momentum equation of the fluid flowing in the entrance throttle groove 8 and the main throttle groove 6, the size of the entrance throttle groove 8 is determined so that a desired flow resistance is displayed.

Description

200827570 IX. Description of the Invention: [Technical Field] The present invention relates to a flow control device for controlling the flow rate of a liquid or a gas, and more particularly, relates to a very small-sized flow path and fluid action for controlling minute sizes and the like. A method of designing a small flow rate control device for a small flow rate of a fluid (liquid or gas) such as an environment or a reactor. [Prior Art] In recent years, the miniaturization and integration of chemical reaction systems have attracted attention as new technical issues in the fields of synthetic chemistry, analytical chemistry, semiconductor industry, and biotechnology industry. It is considered to be an immunoassay system, an environmental analysis system, The biochemical reaction system, the chemical vapor phase growth system, and the synthetic chemical experiment system play an important role in the high precision and efficiency of chemical reaction control. In such a technical trend, a chemical reaction in a micropore of a nanovolre to a microlitre is achieved, and a reaction yield is improved by a microreactor, and a reaction time is shortened. New research and development for the purpose of reducing the environmental load is progressing. For liquids or gases supplied to such a small space, it must have a small and correct flow control that is not available in existing technologies. Conventionally, a needle valve type is generally used in the form of a crucible for the minute flow adjustment of a fluid. Needle valve, because the flow rate will increase sharply after the opening of the valve, it should be regarded as the flow rate to the above-mentioned fine space (for example, the maximum flow rate to the liquid is lOmL/miii~ImL/min, the gas system 1~〇_01secm The use of the adjustment mechanism of the small flow rate is difficult, so the development of new micro flow control technology suitable for this purpose is required. 5 200827570 A conventional technique of a micro flow rate control valve of a different type from the needle type is disclosed in Japanese Laid-Open Patent Publication No. 2001-187977 (Patent Document 1) and Japanese Patent Laid-Open No. 2003-278934 (Patent Document 2). In the meantime, the throttle groove of the control fluid flow rate is arranged in a circle (4). [Patent Document 1] Japanese Laid-Open Patent Publication No. 2001-187977 (Patent Document 2) Japanese Laid-Open Patent Publication No. 2003-278934 21 is an exploded perspective view showing the assembly of the conventional flow control valve of Patent Document 1. The valve body has a valve seat 11A and a valve body 1〇3 centered on the central axis z, between the valve seat 110 and the valve body 1〇3. The metal valve 1〇2 in which the throttle groove 104 is formed is disposed. The outlet flow path 114 is provided in the valve seat 110, and the valve body 103 is formed as the inlet flow path groove portion 1 〇3a. The fluid flows through the inlet flow formed in the valve body 103. The road groove portion 103a is then introduced into the throttle groove 104' formed in the metal valve 1〇2 to control the flow rate by a rotation angle centering on the axis z of the outlet flow path 114 of the valve seat 110, and is formed in the valve seat. The L-shaped outlet flow path ii 4 _ is introduced to the valve outlet 114a. The valve seat 11 () The rotation system is performed by a stepping motor disposed at the upper portion. Fig. 22 is a plan view of the throttle groove 1〇4 formed in the metal valve 1〇2 of Fig. 21. The Z-axis is formed on the arc of the radius Γ. The throttle groove i 〇4 has a constant depth h, and has a width W which has a shape in which the front end portion is the largest and gradually narrows toward the rear end portion. At the beginning end of the throttle groove 1〇4, the inlet flow path is formed. The through hole 113 of the groove portion 10a (Fig. 21) is used. The flow rate of the fluid introduced from the shell hole 113 is rotated about the Z axis formed by the pre-shaped outlet flow path 114 formed in the valve seat 11 The angle is controlled. 6 200827570 Therefore, in order to make a small adjustment of the fluid flow rate, it is important to make the valve seat i! 0 slightly rotate. However, the amount of circumferential displacement caused by the rotation is combined with the radius of the circle and the angle of rotation. Proportional, so if the radius of the circle is large, the amount of rotation will be relatively small. Generally speaking, it is not limited to the needle valve, and the shape of the flow control valve is 'in order to finely control the extremely small circumferential displacement after the valve is opened. The rotation angle is finely controlled, but if the radius of the circle is large It is necessary to adjust the rotation angle more finely, which means that the micro flow control becomes more difficult. If the other half is a small day, it is necessary to correctly engrave such an arc-shaped throttle groove = it becomes difficult to reverse the ground. Therefore, in the circle The arc-shaped throttle groove, the radius of the circle must be 2 large, and the difficulty of micro flow control is difficult. The length from the start position 1〇4a of the throttle groove 104 to the end position (7) is set to L°, and the exit will be formed. The length of the opening section U4b of the throttle groove 104 of the flow path U4a to the terminal end of the throttle groove is set to L. The length L of the opening is formed to be the maximum length L. The ratio is set to l*. l* is in the range of :: change, when reading a straight line, it means the dimensionless length of the lift (also known as the relative process). Hereinafter, L* is referred to as a non-dimensional lift (nft). The inventor's need to double the valve opening degree of the micro flow control device and the flow surface: (that is, the 'flow 1 characteristic') becomes a desired special condition, and how the throttle groove along the flow path should be made.隹^ # 7 Aihua Jinyu analysis, and investigate the physical properties of the fluid, the pressure before and after the valve, f, ☆ i P machine slot cross-sectional shape, in addition, when investigating the cross-sectional shape of the rectangle, by a rating ^; slot The difference between the south angle and the aspect ratio (the aspect rati〇) and the length of the groove is the difference between the axis of the various areas and the number of the ten townships, which occurs in the throttle groove and the glaze direction change. ^ It is said that the flow characteristics of the machine adjustment valve are not the characteristics of the horse valve. The scale, linearity and equal percentage characteristics are usually designed in the way of assigning any kind of characteristics. The basic characteristics of the tiny quantity characteristics are expected to be linear. ... indicates that the physical property value of the fluid is one::: When the right-hand (four) number becomes 1G times and 2G times of the water, the change of = ι± becomes the required linear type ^ ^ ^ ^ ^ ^.仃Let the cross-sectional area of the impeller slot toward the flow direction, Figure 3 is the Baizhi-type micro-flow control device, and the non-dimensional length L* of the throttling groove is used. (If the valve is fully open, L*=i The way to say the length of the gutter, L* is equivalent to the non-dimensional lift) is the horizontal axis, and the ratio of the cross-sectional area of any four places to the entrance cross-sectional area of the groove (no dimension cross-sectional area A*), and the valve The non-dimensional flow rate q* (volume flow ratio) based on the flow rate at full opening is the correlation diagram of the vertical axis. The shape of the cross section of the throttle groove is a rectangle with a total length l. The system is L〇mm, the south degree hg system is 〇5mm and is kept constant, and the aspect ratio q of the groove is 1.5 at the entrance point of the tendon tendon. Moreover, the pressure difference between the inlet and outlet of the valve is 〇.〇〇lMPa(^f^ Bf 12mL/min) ° it t » any of the characteristics and the equal percentage characteristics, assuming that the G* generated after the valve is opened ( The mass flow ratio is the same as Q* when the liquid is the same as the value of G*g, and the 1/G% of the reciprocal is equivalent to the size when the flow rate adjustment capability of the valve is expressed by the flow multiple after opening the valve. It is called the range ability (the following 'is expressed as d. Figure 23 shows the situation of Ra=2〇. That is, the cross-sectional area of the flow cell does not change monotonically for the non-dimensional lift, as shown in Figure 23. A curve with a maximum value is formed between them, and a curve with a sharper peak is formed as the viscosity increases. In general, the maximum value of the dimension-free cross-sectional area A* is reduced with the groove depth, and the groove The vertical of the entrance 8 200827570 is also larger than the increase. These facts indicate that the smaller the flow rate, the larger the A*, the microreactor (micr〇react〇r) becomes a problem or the following At the time of flow rate, even a μ body having a relatively low viscosity has a characteristic of having a sharp peak curve. The nature will not only make the tank + difficult, but also cause the flow to flow with the rapid expansion of the cross-sectional area of the flow path: from the 'there is the possibility of making the flow characteristics unstable. X, the use condition ^ to become a valve" The linear characteristic type is separated from the flow rate change. The above = the case where the 阙 characteristic is equal to the percentage characteristic also occurs and becomes a problem. Fu Yi another: Aspect 2 Japanese special open fan 3 - 278934 (Patent Document 2) = ' The dynamic flow control valve is composed of an upper valve and a lower valve, and the sealing function of the valve is improved by applying 0 @ i β _ ice body force to the lower valve by opening and closing of the upper jaw. However, since the patent document 1 ^ — The electric flow control valve that is not revealed is the same in the mechanism. Therefore, the flow is deviated as the cross-sectional area of the flow path is large, so that the flow characteristics are not #1:: expand and cause fluid flow. ~ 疋 的 上述 。 。 。 。 。 。 。 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本 本Designing a method of imparting flow resistance to the flow cell construction, and completing the method The purpose of the present invention is that &Dan Ma wants to t疋 and correctly control the tinyness of the fluid> melon $' will not be as shown in Fig. 23 _ the hall does not form an urgent expansion to cause the flow to be less than 疋The design method of the required characteristic control device is now required, and the input method for the appropriate large-scale 动L dynamic resistance is applied to the main section. The inlet side of the flow cell, whereby the desired valve characteristics can be achieved under the condition that the tip of the main flow cell changes monotonically in the direction of flow. The present invention is to solve the above problems, and the first aspect is a method for designing a micro flow rate control device having an inlet throttle groove, the micro flow rate control device having an inflow path for introducing a fluid; a main throttling groove for flowing a fluid introduced from the inflow path from a starting end to a terminal; a flow regulating member capable of sealing the main throttling groove to an arbitrary position; and a fluid outflow port by the flow regulating member Any section of the main throttle groove _ forming an opening; and an outflow path for guiding the fluid flowing out from the fluid outflow port, wherein a flow restricting flow is provided at the beginning end of the main throttle groove The size of the inlet throttle groove is determined in such a manner that the desired flow resistance is exerted based on the relationship derived from the equation of the amount of motion of the fluid flowing through the inlet throttle groove and the main throttle groove. According to a second aspect of the present invention, in the first aspect, the cross-sectional area of the main throttle groove is monotonously decreased from the beginning to the end, and The position of the fluid outflow port is determined by moving the starting end toward the terminal and monotonically reducing the flow rate of the fluid flowing out of the fluid outflow port. According to a third aspect of the present invention, in the first or second aspect, the fluid amount equation of the fluid can be expressed by the following formula: up (du/dz) + ( ^ /Dr) (2/2) u2 p +dP/dz=0 (here, u system flow fan, /0 system density, flow direction coordinate of z-system fluid, λ system friction coefficient, Dii system throttle groove The equivalent diameter of the area, P system pressure). According to a fourth aspect of the present invention, in a third aspect of the present invention, in the third aspect, the motion amount equation is calculated according to the following equation: u=G/(p A) and 44 μ A/(GDh) 1 (In this case, G-mass flow rate, density of ρ-type fluid, cross-sectional area of lanthanide fluid outflow, viscosity coefficient of lanthanide fluid). According to a fifth aspect of the present invention, in the fourth aspect of the present invention, in the fourth aspect, the final throttle position of the main throttle groove is L=〇, and the fluid flow outlet is The position is l=L, the starting position is L==L〇, the flow rate is Lm when the fluid flow outlet is at L=L〇, and the flow rate is 〇 when the fluid flow outlet is at L=L, L*=L/Lg, G *=G/GM, L*=l The value of (d G*/d L*) is (d G*/d L*)v=1, the following formula is assigned to the critical length lec of the inlet throttle: LEC= L0/(dG* /dL*) The method for designing the micro flow rate control device with the inlet throttle groove according to the sixth aspect of the present invention is the non-compressibility fluid of the flow system When the arbitrary cross-sectional shapes of the main throttle grooves are similar to each other, the critical length lec of the linear type indicated by G* = L* for the valve 4 inch performance is: LEC = L0 〇Γ The seventh aspect of the present invention has an inlet In the fourth aspect of the present invention, the end position of the main throttle groove is L=〇, the position of the fluid outflow port is L=L, and the start position is L=L0. Fluid outflow When L=L, the flow rate is Gm, and the flow rate of the fluid flow outlet is G, L*=L/L〇, G*=g/Gm, and the main throttling, the cross-sectional shape of the groove is different from each other. Similar to the shape, and the valve characteristic is linear type 200827570, the following formula gives the critical length Lec: LEc= L0/(dG* /dL·*) 微小The eighth embodiment of the present invention has a minute flow of the inlet throttle groove In the fifth or seventh aspect, the valve characteristic is: G*= G〇*+(1 _ G〇*} L* ,

"EC

(here, the G* value of L*=0) indicates a linear type, and when expressed by 〇*-1/Ra(1SRa$°°), the following formula assigns the critical length L

L L"(1 - 1/ Ra)

The design method of the micro flow rate control device with an inlet throttle groove according to the ninth aspect of the present invention is the fifth or seventh aspect of the invention, the valve characteristic, G*=G0*(i-l>, (* Thus, the Gg* is the equivalent of the G* value of L*=〇, and is expressed by g. 1/RA(1 $ RAg 〇〇), the following formula is assigned to the critical length he : Lec - L0/ In the method of the first flow rate control device of the first aspect of the present invention, the method of the first embodiment of the first to fourth aspects is provided with the inlet section/; The inlet throttle groove whose cross-sectional area is monotonously increased toward the start position of the main throttle groove. The design method of the minute flow rate control device having the inlet throttle groove according to the eleventh aspect of the present invention is the first aspect. The wearing area AE(Z) of the inlet throttle groove increases linearly along the flow direction coordinate z, and the following formula assigns the cross-sectional area AE(Z):

Ae(z)-> aeq + { (Ae〇~ Aeq)/Leq } . z (here, the cross-sectional area at the beginning of the AEQ inlet chute is the closest to the beginning of the 12 200827570 main division "il trough The terminal cross-sectional area of the inlet chute of the position 'LEQ is the length of the inlet chute, the flow direction coordinate of the z-system fluid). According to a twelfth aspect of the present invention, in the eleventh aspect of the present invention, the end position of the main throttle groove is L=〇, and the start position is l=Lg. The fluid flow outlet is located at L == 之 when the flow rate is G 〇 and the fluid flow outlet is at L = L. The flow rate is GM, G〇*=G0/GM, RA=l/g0*, and the friction pressure in the inlet throttle is lowered, which is the same as the inlet section of the same length as the LEC. The current frictional pressure drops by the equivalent size and has the following inlet throttle slot length:

Leq=( Aeq / aeo) { L〇/ (1 - G〇* ) } (Aeq / AE〇) { L. / (1 - 1/ RA) }. According to the first aspect of the present invention, the inlet throttle groove is determined based on the relational expression derived from the movement of the fluid in the flow throttle groove (the main throttle groove is provided at the beginning of the micro/guai technology garment installation). Since the position is connected to the size of the front flow, the inlet throttle groove designed by the design method of the present invention can have a simple structure and determine the size of the main throttle groove cross section for realizing the desired valve characteristics. In other words, since the size of the inlet throttle groove (which can exhibit the flow resistance suitable for the desired valve characteristic) is determined according to the above relational expression, it is necessary to make the cross-sectional area of the main throttle groove toward the axis. The direction changes sharply or subtly, and it is possible to determine the size of the cross-sectional area of the main throttle that changes early in the direction of the glaze toward the glaze. In addition, the relationship between the size of the 4th and 8th, that is, the size of the flow cell, is based on the remaining W-mountain of the desired valve characteristics, and can be released by the aforementioned exercise amount. The inlet 13 200827570 throttle groove designed by the design method of the present invention can easily perform a high-precision micro flow control system with a small flow rate control device having a simple throttle groove. Furthermore, since the main flow cell has a simple structure, it is possible to easily manufacture a high-precision micro flow control I, and it is possible to reduce the manufacturing cost of the micro flow control device. The micro flow rate control device that reduces the main throttle groove from the beginning to the end of the terminal by a single cycle can accurately flow the flow. As described above, in the conventional micro flow rate control device, in order to move the flow rate adjusting member In order to achieve a monotonous reduction in flow rate, the vicinity of the beginning of the main 1 flow cell must be sharply shortened. However, by providing the inlet chute groove of this month in communication, the main throttling groove which can be monotonously changed in cross-sectional area can be realized. Expected flow The main throttle groove is monotonically reduced, and the main throttle groove is formed in the valve body, and the designed main throttle groove shape can be processed with high precision. Therefore, a high-precision micro flow control device can be provided, and According to the third aspect of the present invention, the equation of motion of the fluid is applied: u P (dU/dz) + ( λ /DH) (1/2) V p +dp /dz=〇...(1) (here, u-flow velocity, p-system density, flow direction coordinate of z-system fluid, coefficient of friction, equivalent diameter of cross-sectional area of DH throttle groove, p-system pressure), In the above relational expression, the equivalent diameter Dw defined by =4 A/U is used for the throttle groove having an arbitrary cross-sectional shape. According to the fourth aspect of the present invention, 因)). ............................. Indicates the flow velocity U, so the above relationship can throttle the cross-sectional area A and the mass flow 14 200827570 The quantity G is included as a variable or a parameter, and can clearly indicate the relationship between the desired valve characteristic and the size of the inlet throttle groove. Furthermore, by considering the flow in the aforementioned throttle groove as laminar flow, the friction coefficient λ is only dependent on The Reynolds number of the fluid (Reynold's number) Re:

λ = 64 / Re ............... Here, the Reynolds number is defined by the following formula: Re = DH u / ( β / ρ )...·, therefore, becomes: (3) ( 4) λ = 64# ............................... The above friction coefficient can be easily derived. According to a fifth aspect of the present invention, the end position of the main throttle groove is L-0, the position of the fluid outflow port is L=L, the start position is b, and the cross-sectional area of the main throttle groove of the front L=^ is A, the flow rate of the fluid outflow outlet at L=L〇 is GM, and the flow rate of the fluid outflow outlet at L=L is °G*=G/GM, and L* is called (off*/d L*) Set to (make *time, (, (5)

JEC

VU.VJ is assigned to the inlet throttling groove at the length of the he^ boundary, in the desired valve characteristics, by unraveling the aforementioned hunters

* Μ / Λ, the program can determine the dimensionless cross-sectional area of the main throttle slot A

* = (A/AE). Thus, the % π ^ p beer back 槚 A 雄一 + 八 has the characteristic that the L*=1 becomes G*=A*, ^ the moon axis direction changes monotonically. This kind of 3 不论 regardless of the fluid has a helmet 懕 _ 禋 禋 方法 , ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... ... 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋 禋Or equal percentage type can be applied. According to the form of the invention, the flow system is a non-compressible fluid, and the arbitrary cross-sectional shape of the main 15 200827570 throttle groove is "1 * the main-like system is similar to each other, and the valve characteristic is represented by Γ*=τ Linear type critical length lec

Lec=L ‘ (7) By making A*=L*, it is possible to implement § * ... E ^ to the valve characteristics of G < If the length of the pair-Fanning A-LEC is LEC=L, the flow path formed by the entrance and the threshold is applied to the helmet of the k-slot throttle groove and the 维* is used as the valve characteristic and the main dimension. The relationship of the cross-sectional area Α* can lead to G*. Therefore, the aforementioned inlet production A-L is set. The cross-sectional dimension of the groove is such that it becomes A:_= Lec=l. 'The simple valve characteristic that can reduce the flow rate G to a small flow rate by the above-mentioned main throttle is the two-child flow of the fluid flow outlet, and the above-mentioned flow control.

_, the position of the fluid outflow port; 'the end position of the main throttling groove is L, L is L, L is L, L is L = L, and the outflow is L = L. When the time comes, the first time, the body

The flow rate is G, L*=L:T is ~, the fluid outlet is located at L=L, and G> G 'G*=G/GM, and the main throttle is W> When the valve characteristics are linear, the critical length L - () ^ ^ . is assigned to LEc=:L/(dG* /d L) _________ , EC, the car is unwound under the desired valve characteristics. The equation in the aforementioned motion can determine the cross-sectional area A*. According to the eighth aspect of the present invention, when the main throttle groove is changed in the direction of the early change, the linear characteristic G*=G〇*+(1−G*) is expressed by the following equation... ...............(9) 16 200827570 L__EC=1/L〇+(1-1/R^> ............ (1 〇) Given the above-mentioned critical length L, τ % , Nuwa EC, and the length of the main throttling groove Μ Z (4) The ability RaH simply determines the critical length of the two-dimensional throttling groove of the linear type. Dimensions...*. Equivalent to width::篁Adjustment ability to adjust the capacity of the straight line after the straight line 々 'L adjustment ability Ra, defined by the reciprocal of G*0 1 / G * 0 *, the table is not fully closed (L*=0) The amount of characteristic characteristics of the valve nearby.

According to the ninth aspect of the present invention, when the valve characteristic is a percentage value of G* == G0* (κ* ) ....., the percentage value: cv is (=RA $ 〇 〇) When expressing, because LEC = L°/lnRA ........................ (12) The length of the boundary, lec ', determines the length of the inlet orifice that achieves the valve characteristics of the equal percentage type. According to a tenth aspect of the present invention, when the cross-sectional area of the end position of the inlet throttle groove is the same, the cross-sectional area of the population throttle groove is monotonously increased toward the start position of the main throttle groove, gp, By entering the population throttling trough: monotonously reducing, the flow resistance of the aforementioned population throttling trough can be increased, so that the length of the aforementioned population throttling trough can be shortened. @A, the micro flow control device can be miniaturized. According to the u-th aspect of the invention, since the cross-sectional area of the inlet throttle groove increases linearly along the flow direction coordinate z, the following equation gives the cross-sectional area: Ae(z) = Aeq + { (Ae〇_ Aeq)/Leq } ·ζ .........(13) Therefore, the flow resistance of the inlet throttle groove can be increased, and the fluid pressure loss of the inlet throttle groove can be easily estimated 17 200827570. That is, the size of the inlet throttle groove that gives the desired valve characteristics can be easily determined. According to the twelfth aspect of the present invention,

Aeq / Aeo) { L0/ (1 - G〇* ) } =(AEq / AE.){ L0/ (1 - 1 / RA) } ......... (14) Assign the aforementioned entry section Since the length of the flow cell is such that it is easy to determine the length of the linear valve characteristic and the length of the inlet throttle groove of the minute flow control device. [Embodiment] FIG. 1 is a schematic explanatory diagram of a minute flow rate control device according to the present invention. The basic structure of the micro flow rate control device includes a valve body 2 in which the throttle groove 4 is formed and a flow rate adjusting slider that slides over the valve body 2. The throttle groove 4 includes a main throttle groove 6 and an inlet throttle groove 8, and the flow regulating/monthly member 10 is slidably attached to the upper surface of the valve body to make the main throttle groove 6 and the inlet throttle groove 8 flow. road. When the flow regulating slider 丨〇 is located at the sliding position 10a above the valve body 2, the fluid flowing from the inflow path 12 flows from the fluid flow from the inflow portion 15 to the inlet//IL groove 8' through the main throttle groove 6. The outlet 20 exits, and the k-machine exit 22 flows into the outflow path 4. The flow rate adjustment slider 1 is slid in the direction of the head 10b, and the length of the main throttle groove 6 is changed to adjust the flow rate of the fluid. A schematic cross-sectional view of the minute flow control device of the present invention. The f-adjustment slider 1〇 is slidably attached to the upper surface of the valve body 2 so as to be movable in the sliding range 24 from the king open position 24a to the fully closed position 24b. Although not shown, the drive mechanism for moving the flow rate adjustment/month according to the set flow rate is provided in the small-sized summer control device, and the drive mechanism can use the jog control of the step 18 200827570 motor or piezoelectric element. mechanism. Fig. 3 is a schematic cross-sectional view showing the minute flow control device of the present invention in a fully open state. When the flow regulating slider 1 is located at the fully open position 24a in the aforementioned sliding range 24, the cross-sectional area of the fluid outflow port 20 becomes the largest, and the maximum flow rate is supplied from the outflow portion 22 to the outflow path 14.

Fig. 4 is a schematic cross-sectional view showing the minute flow control device of the present invention in a fully closed state. When the end surface of the flow rate adjusting slider 1 is located at the fully closed position 24b in the sliding range 24, the outflow portion is closed by the flow rate adjusting slider, and the flow rate becomes 〇. Fig. 5 is a schematic plan view of a micro flow rate control device. The aforementioned motion quantity equation (1): P (du/dz) + ( λ /Dh) (1/2) u2 p +dP/dz=〇(1) (here, U-system flow rate, p-system density, z-system fluid The flow direction coordinates, the λ-based friction coefficient, the equivalent diameter of the Dh-type throttle groove cross-sectional area, and the P-system pressure) are suitable for the throttle groove 4 of the present invention. Let u be the average flow velocity in the throttle groove, P is the density, and the flow direction of the fluid is 2 axes (referred to as the flow direction coordinate is smaller) and the length of the main throttle groove is set to L. The aforementioned inlet The length of the knot is Le 'the flow adjustment slider 1 & the coordinate [[called "lift"), at the end of the population throttle slot, the position is at the beginning, L = L. Further, the position of the flow adjustment slider 1〇 is borrowed. The normalized non-dimensional lift L, L/L, and the position of the main throttle groove as the origin are normalized by L(). Fig. 6 is a schematic view of the throttle groove 4 of the present invention. The fluid motion amount equation (1) in Fig. 19 200827570 is applied to the throttle groove of the present invention. :, the equivalent diameter in the formula uses the cross-sectional area of the flow path...: body. Long fixed /, indicates the flow path of the object and the diameter: the representative length of the round tube. For example, cut U & ^ A-(10),,... When the radius D is semicircular, by (7) ah and, 兀 (d/2), equivalent

Dh={(2 兀)❽·5/(1+兀/2)} · aQ 5 η becomes the cross-sectional shape other than the two semicircles, if the system does not have two:: it is like r-shaped, because of the circumference DH〇c AG.5, which is a ratio of υ to 2). The following equation (15) is based on the basic relationship between the desired valve characteristic and the critical length of the inlet, that is, the flow channel, by the aforementioned motion amount square 々 〇 - ^ ^ ^ - w spear type (1). Fig. 7 is a diagram showing the calculation process of the exercise amount equation of the present invention. The aforementioned motion quantity equation (1) is taken as the formula (I-disclosed again. The flow rate continued condition is related to the mass flow G by the following equation: the u=G/( p A) friction coefficient 层 of the laminar flow, Representation: λ =64//A/(uDh) ................. Substituting equations (2) and (5) into the aforementioned equation of motion (1 (1 - 2) (2) · (5) 1) Finishing can be followed by applying the above-mentioned exercise amount equation (Bu 2) to the flow in the inlet throttle groove when fully open. Multiply p on both sides and set the maximum flow rate as the heart. The cross-sectional area of the inlet throttling (four) is 4, and the above-mentioned exercise quantity equation (1 - 2) is integrated into the total length of the population throttling trough, and the formula (i Xiao and the integral symbol of the formula (Bu 3) is represented by i and 2, indicating The state of the flow section and the outflow section. Further, 20 200827570 The upper limit F(Le) of the integral of the first item indicates the value of the exit end face of the inlet throttle groove of the parameter {1/(pa)}.

Next, if the lift L is an arbitrary value (L=L), the flow rate of the assigned lift characteristic L is assumed to be G, multiplied by the equation (1-2), and integrated from the inflow to the outflow. Department, you can get the formula (1_ 4). The left side of the formula (1–4) is the integral of the second term, and the entrance chute is to be completed, and the inlet from the main chute to the lift L. That is, the range of z is 〇~{Le+(L0-L) }, which can be divided into 入口~; the entrance area of l£ and the main area of Le - (L(rL). For the integration of this main area, use The dimension-free coordinates with the starting position of the main throttle slot as the origin (and the aforementioned dimensionless coordinate Γ *(==1-L*). The dimensionless coordinate t is defined as: Converting the dz variable to d C, then 17) dz= L〇d 第 The second term of the formula (1 - 4) is divided into the two parts of the above main area (variable Γ: divination) and the entrance area (variable z: o ~ le), and the formula ( 1 - 5). This formula (1 - 〇 is substituted into (1 - 4), then the formula (1 - 6). Again, because of the function of the left side of the formula (1 - 4), the A system (a function, Therefore, the upper limit of the integral can be written as 1? ((", that is, the integral of the parameter {l/(p A)} from the inflow part to (*. Factor (1 _ of the 3rd term and the formula (1) - 4) The fourth item is equal, so if it is made equal, the formula (1-7) can be obtained, G can be divided by this formula (Bu 7), and if g*=g/Gm, then it becomes the formula (Bu 8) Figure 8 is a diagram showing the derivation process of the relational expression of the present invention. If the above formula 〇8) is paired (*differentiated, it becomes the equation (2-丨). Because of the dimensionless coordinates: *卜} a l *), if Γ* is rewritten as L*, then the formula (2-2) is obtained. Let Le satisfy the condition (2-2) 21 200827570 The condition of the left side is the conditional formula (2_3) Le is critical The critical length lec has a meaning suitable for the length of the realization of the desired enthalpy characteristic. In other words, the aforementioned conditional expression (2_3) can be regarded as the heart: the valve characteristic and the shape of the main orifice are derived from the critical length [π ( The relational expression of the length of the optimum inlet throttle groove is used. Therefore, the aforementioned critical length LEe of the above formula (2-3) can be expressed by the relationship (Η). Since the relation (r 4) does not contain the physical property value, Therefore, the flow system liquid or gas is not limited, and the above relationship ^ (2 - 4) is applicable to various fluids. Further, if the left side of the formula (2_ 2) is 〇, since the right side is also 0, the formula (2 - 5) Fig. 9 is a diagram showing the derivation process of the relationship of the non-compressible fluid. The formula (3_ ” represents the formula (2_5) shown in Fig. 8. When the fluid system is liquid and non-shrinkage, the first item: And the sub-portion, assuming that the cross-sectional area of the inflow portion (1) is much larger than the cross-sectional area of the nodal groove, the formula (3 _2). On the other hand, the second formula of the above formula (3-υ can be changed Formula (3_3). By formula (3_2) and = (3-3) on behalf of the human form (3 - 丨), we can get the formula (3_4). Here, if we use the non-dimensional cross-sectional area Α*=Α/ If Αε is rewritten, it can be expressed as (3-5). Therefore, since the differential value of [(G"A*2)-(1/G*)...* is 0, as in the formula (3-^ no, [(g*/a*2)-(i/g*)] represented by the formula (3_5) is represented by a system c. Furthermore, when the valve is fully open, the constant c becomes 因 due to g*=i, a*2=i. Therefore, the above formula (3_6) at the time of full opening becomes the formula (3-7)', and the relational formula (3 to 8) of the incompressible fluid can be obtained. Fig. 1 is a schematic view of a throttle groove 4 having a similarly shaped cross section. As described above, if the cross section of the throttle groove 4 is similarly shaped, the equivalent diameter Dh of the throttle groove 4 is proportional to 0.5 of the sectional area A, and becomes Dh〇ca". As shown in the picture 22 200827570

Relationship between Dji00 AG·5 When the cross-sectional shape is trapezoidal, only the coefficient is changed and it is still established. As shown in the formula (3 _ 9), the right side of the formula (2 _ 4) (AeDhe2) / (ADh2) becomes 1 / A * 2, if the formula (Bu 9) is substituted into the formula ( 2 _ 4), can obtain the relationship (9) which gives the critical length in the similar section. In addition, when the system is contracted, the relationship between the similar shaped sections (3_ ι〇) and the non-sexual fluid (3 _ 8) can be obtained, so that non-dusting & The relationship of the section (3 _丨). Fig. 2 is a classification diagram of the critical length when the 阙 characteristic is linear. In the former ^ (4), the relationship between G* and (dGVL*) HL* is included. The valve characteristics that can be represented are linear and equal percentages. The case of the linear type is described in detail in the two valve characteristics. When the valve characteristics are linear, G*=G〇*+〇- 〇〇*)· L* ............ (4 Fu:: Dimensional flow G*, here' The G* values of G, l, and , have the following relationship with the flow capacity RA. /, G〇* = 1 /Ra ................... If the terminal of the main throttle slot has an ideal shape, the full-closed (the flow near the 2:) is close to g according to the _ sex (4), and the terminal shape is practically impossible. When the reading characteristic is expressed by the formula, the flow rate A or the flow rate adjustment capability Ra is entered. The linearity 2 flow rate adjustment capability ra is expressed as: 1 The characteristic is G* = l/RA + (i - 1/Ra) · l*. ......... (4 If (dG*/L*) of this formula (4-3) is obtained, it becomes: 4 3) 23 200827570 (d G* / L* )= (1 1/Ra).............. (4 - 4) Substituting the formula (4 - 3) and the formula (4 - 4) into the relational expression (2 - 4), can be exported without limitation The type of fluid and the shape of the throttling groove, and the general relationship of the critical long sound to the linear valve characteristics (4 - 5).

When the above-mentioned main throttle groove is similarly shaped, if the equations (3-9), (4, and (4 - 4) are substituted into the above relation (2 _ 4), the characteristics of the linear valve can be similar. The relationship between the critical lengths of the cross-sections (4-6). Further, if the non-compressible fluid/similar cross-section is defined, the equation (4 - 4) is substituted into the aforementioned critical length (3 - 11). The relationship between the incompressible fluid/similar cross section of the linear valve characteristic can be derived (4-7). In addition, when the non-compressible fluid/similar cross section is obtained by the above formula (3-8) and formula (4) — 3) For the inlet throttle with a critical length of the sinus, the cross-sectional area of the main throttle has the following relationship: A*="Ra+(1- 1/RA)· L* ...... ......... (4- 8) Furthermore, when the flow adjustment capability is infinite, from the above relationship (4 - is the critical length LEC becomes: therefore 'If you are using a small amount of non-compressible fluid The flow control device assigns a characteristic of the t-valve such that the cross-sectional shape of the main throttle groove is similar, and the length LG thereof is equal to the critical length lec of the inlet throttle groove. Correlation diagram between the cross-sectional area A of the main throttle groove and the flow rate Q of the micro-flow control device of the characteristic valve characteristics. The flow system viscosity is 1.01χ 1〇^Pa· S, and the pressure difference between the inlet and the outlet is set. O.IMPa, > The length of the melon groove is 1 Omm, the cross-sectional shape has a similar semicircle, and the adjustment ability is set to infinity. gp 'satisfying the condition of non-compressible fluid/similar 24 200827570 The flow rate adjustment slider is designed to be linearly changed from 0 to the maximum flow rate by sliding the fluid flow regulating slider from the fully closed state (L*=0) of the fluid outflow port to the fully open state (L*=1).

To achieve the above design goals, the critical length Lec of the inlet orifice is calculated using the equation (4-1) of the non-compressible fluid/similar profile. However, in this h-shape, since the set flow adjustment capability is infinite, the above-mentioned critical length LEC is equal to L. The length is set to ι〇. As shown by the figure (4) By providing the inlet throttle groove having the aforementioned critical length, the cross-sectional area Α(ϋ) of the main throttle groove is linearly increased, and the linear control valve characteristic of the micro-J々IL control device can be imparted with high precision. On the other hand, when there is no inlet throttle groove (Le = 〇) indicated by a thick line, the front sectional area A (thick line) monotonously increases to the vicinity of l 〇·5 with the increase of the aforementioned lift L*. In order to realize the linear valve characteristics described above, the closer to the fully open shape H (L* = 1), the smaller the reduction in the cross-sectional area a is required, and the maximum value of the cross-sectional area is obtained in the vicinity of the dimensionless (four) L* = Q.7. In the small flow control device without the inlet throttle groove, it becomes in the main throttle groove: most of it. To form the fine main throttle groove in which such an amplifying portion is formed in the valve, a very high degree of I technology is required, and at the same time It is very difficult to form a throttle groove that can stabilize the flow and supply accuracy. It is a correlation diagram between the cross-sectional area A of the main section and the flow rate q of the micro-flow control device with linear valve characteristics. The viscosity of the flow system is about 30 times larger than the above (for example, 3·16χ ι〇. 2ρ" transformer oil), the condition is set to be the same value as the water used in the head 12. That is, the pressure difference between the inlet and outlet of the inlet is 〇.1MPa, the length of the main throttle is W(7)匪, 25 200827570 The cross-sectional shape has a similar semicircular shape, and the flow adjustment capability is set to be infinite. The flow rate Q flowing out of the micro flow control device is also increased linearly from the 无 change to 1 without the dimension L*, and the main throttle groove has Linear valve characteristics. Here, since the inlet throttle groove Le is set to a critical length, the flow adjustment capability is set to be infinite with the condition of the non-compressible fluid/similar profile section. The critical length is set by the formula (4 _ 7). k is an equal length of l〇mm with L. As shown in the figure, even if a transformer oil having a viscosity greater than the water number is used, the inlet throttle groove having the aforementioned critical length can be provided. Purely constructed throttling The high-precision linear valve is characterized by a small flow control device. On the other hand, when there is no inlet throttle groove (Le=〇) indicated by a thick line, the front cross-sectional area A (thick line) is accompanied by the aforementioned lift L*. Increasing monotonously increases to [near the vicinity, but the closer to the fully open state (L * == 1), the sharper the decrease; the main section of the flow trough. The sharp change of the main throttling section is not as shown in Figure 12. In the case of water, it is caused by the viscosity of the transformer oil: (Figure 23 of Maizhao). Because of this, the micro flow control device of the present invention has an inlet throttle groove set to the aforementioned critical length. The abrupt change in the cross-sectional area of the main throttle trough, even if the flow control of the high-viscosity fluid is required, can give the desired valve characteristics. Figure 14 is a schematic view of a throttle groove having a non-similar cross section. The throttle groove has a rectangular cross section, the height is constant, and the width w of the throttle groove decreases toward the flow direction. That is, the sound μ, the cross section of the L body outlet 20 changes in a non-similar shape as the flow rate adjustment slider slides. For &, to determine the aforementioned critical length 26 200827570 degrees, it must be derived from the above relation _ 5) shown in Figure π. However, in the above relation (4 - 5), the LEC is a function of the cross-sectional area A, the equivalent diameter Dh, and the non-dimensional lift L, even if Lec is changed according to the valve opening degree, or [a is a constant cross-sectional area A, The relationship between the equivalent diameter Dh and the non-dimensional lift L*, in the l value residual uncertainty, can not blindly determine the value of lec. Ec

As shown in Fig. 12 and Fig. 13, the meaning of the inlet throttle groove set to the critical length l is the cross section of the throttle groove near #L*=1: it can be avoided when it is suddenly expanded. If <, if the main throttle slot is non-similar, let L*=1 ' and other parameters take the value of L*=i, and the length obtained by the above relation (4-5) is called The critical length, by the quasi-critical length Lec = l 〇 / shown in Figure u (b / 1 / RJ determines the length of the inlet throttle

degree. X

Solid JL -----~μ卞 The relationship between the cross-sectional area a and the flow rate q of the small flow control device of LEC. Flow system viscosity 3.16X 10, · s transformer oil, flow inlet turbulent outlet The pressure difference is called 1.1MPa, the length of the main throttle groove L. For 1 brewing, the maximum flow rate of quasi-critical length is QM=456ml/m, the cross-sectional shape has a non-similar rectangle as shown in Fig. 2, and the flow adjustment capability is 2系. Furthermore, the aforementioned main throttle slot is purely money-fixed 4Q to become the solid line in the line). If the length of the inlet throttle groove is set to the quasi-critical length ^ (6), the cross-sectional area A monotonically increases with respect to the lift L*. Therefore, by setting the length of the population throttle groove to the aforementioned quasi-critical length and applying a suitable flow resistance to the fluid, it is possible to avoid the necessity of rapidly expanding the throttle groove. Force surface, no inlet 27 200827570 When the flow cell (!^0) (port), with the increase of the aforementioned lift l*, the cross-sectional area A of the main throttle groove increases monotonically to the vicinity of L* 〇·5. However, the closer to the fully open state (L* =1), the more the main section, ie the cross-sectional area of the melon trough, is reduced. Therefore, the use of full opening, the quasi-critical length ' is effective for the length of the aforementioned inlet throttle groove when the main throttle groove is not similar. Fig.: “Classification diagram of the critical length when the valve characteristic is equal percentage (EQ) type. The details of the desired valve characteristics are equal percentage. When the valve characteristics are equal percentage type, ...=( 1/Ra)1."................ (4.1〇) Fu Wu Weiwei flow G*, from this formula (4_ 1〇) seeking (dG*/L*) becomes : —(dG*/L*)=-G* · lnG〇*=G* · lnRA ...(4_ u) Right this formula (4- 11) is a human (2_ 4), then the flow is not limited Type and throttling (four) shape - the general relationship of the critical length of the equal percentage valve characteristics shown in Figure 16 (4 - 12). The relationship (4 - 13) and (4 _ 14) of Fig. 16 can be obtained by the same method as the linear type. When the valve characteristics are of the equal percentage type, the critical length Lec of all the general, non-compressible fluids and " or similar shapes becomes a function of L*. Therefore, the same percentage valve type is also used as the critical length when fully open. The quasi-critical length of the equal-percentage valve characteristic is: .... (4 - 15) is the phase regardless of the cross-sectional shape

Lec=L〇/ 1 n Ra ..................... The quasi-critical length of the aforementioned inlet throttle groove is similar to or not similar, or non-compressed by fluid The availability of sex and compressibility is practical and effective. 28 200827570 Figure 17 is a correlation diagram of the cross-sectional area A and the flow rate Q of the ML groove of the micro flow control device with the equal percentage valve characteristics. The viscosity of the flow system is 6 x Pa S transformer oil. The pressure difference between the inlet and the outlet is O.IMPa, the quasi-critical length of the inlet orifice is LEc=3 34mm, and the length of the main orifice is “1 Omm. Furthermore, the cross-sectional shape has a similar semicircular shape, and the flow adjustment capability Ra is set to 20. The characteristic of the percentage valve type of the body is that the flow rate Q is as shown by the formula (4 - 1 〇), _ with the slave without the dimension L The increase of * increases the exponential function gradually. The length of the inlet throttling groove is determined by the quasi-critical length relationship of the equal percentage valve characteristics (4 - 丨 5). When the inlet throttling groove is set, The cross-sectional area A(□) of the main throttle groove is monotonously increased, and the equal-percentage type valve is characterized by a small flow rate control device by a simple-structured throttle groove. On the other hand, the thick line shows no inlet. In the throttle groove (le = 〇), the cross-sectional area A (thick line) monotonically increases to the vicinity of l* - 〇.9 with an increase in the aforementioned lift L*. However, it becomes maximum near L*=〇95. Value, sharp φ i also reduces the cross-sectional area. That is, the cross-sectional area of the aforementioned main throttle groove needs to be from the beginning The position is rapidly expanding. To form such an augmented enlargement in the throttle groove, a very high degree of machining technology is required. Figure 1 8 is a non-dimensional section of the main throttle groove that imparts a small flow control device with equal percentage valve characteristics. Correlation diagram between area A* and dimensionless flow Q*. This figure shows the correlation between the dimensionless cross-sectional area A* of the length of the different inlet throttle slots and the non-dimensional flow rate Q*, ie the length of the aforementioned inlet throttle groove The case of the quasi-critical length lec determined by the formula (4 _ 15) (◊: LEc=3 34mm), the length of which is shorter than the quasi-critical length LEC (: LE=2 23mm) and its length 29 200827570 The case where the quasi-critical length Lec is long (Lu: 1^=5.01111 twist). That is, the survey has a length of the quasi-six-segment, a length of K5, and a length of 1.5 times. What is the difference? The pressure difference between the inlet and the outlet of the under-pressure oil of 0_0316Pa · s is 〇, the length L0 of the main throttle is i〇mm, and the flow adjustment capability is as shown in the figure. P is matched, and the inlet throttle groove is not mentioned. If the length is different from the critical length determined by the formula (4 - 丨 5), The dimension-free cross-sectional area A* does not become a monotonous change. If the critical length of φ ^ is short, the cross-sectional area A* of the main throttle groove needs to be rapidly expanded. If the critical length is longer, the cross-sectional area A* must be sharply reduced. Figure 19 is a schematic view of a throttle groove 4 having a short inlet throttle groove 8. In the late inlet throttle groove 8, the cross-sectional area Aeq of the starting end section 16 is compared with the end by forming the inlet throttle groove into a tapered shape. The cross-sectional area Ae of the section 19 is small, so that the flow resistance generated by the inlet throttle groove 8 is increased, and the length of the inlet throttle block 8 is shortened. The length of the short inlet throttle groove is set to be. ^ is the frictional pressure drop APEF equivalent to the inlet art flow cell having the same cross-sectional area AE as the length LEC, which is generated in the short inlet throttle groove 8 and is semi-circular in cross-sectional shape as an example. The method of determining the cross-sectional area AEQ and the length LEQ is as follows. Figure 20 is a diagram showing the derivation process of the length of the short inlet throttle groove of the present invention. The frictional pressure dp between the minute regions dz of the inlet throttle groove having the section % A becomes the equation (5_丨) as shown in Fig. 2 . Here, the flow velocity u, the friction coefficient λ, and the equivalent diameter DH are set to the following relationship: u==G/( p A) ··· _ ^ =64 μ A/(uDh) (5) 30 200827570 dh={(2 π )0 5/(1+π /2)} · a〇.5 ............... (15) Substitute (5-丨), Then get the formula (5_2). If the formula (5_2) relates to the inlet section/guar groove king length integral, the expression (5-3) indicating that the frictional pressure of the inlet throttle groove is decreased by Δ is obtained. Here, if the cross-sectional area A is linear to the flow direction coordinate z, and the cross-section is given by the formula (5 - 4), the cross-sectional area a ' is given by the formula (5-5). - 3) Variable conversion to perform integral, the final friction pressure drop type (5 -6). Similarly, the cross-sectional area of the inlet throttle groove can be obtained by the formula (5_7) of the timing and the frictional pressure drop. The equation (5-8) which gives the length of the short inlet throttle groove can be obtained from the equation (5-6) and the equation 7 by lowering the pressure ΛΡ ε and the previously obtained equivalent value. As described in the above formula (5-8), the cross-sectional area of the inlet throttle groove is reduced toward the starting end section, and the length of the inlet throttle groove can be shortened by a factor of eight when the cross-sectional area is constant. The present invention is not limited to In the above-described embodiments, various modifications and design changes within the scope of the technical idea of the present invention are included in the technical scope of the present invention. It is needless to say that the design method of the micro flow rate control device according to the present invention can be designed high. A micro flow control device for precision, which is a microchemical treatment technology that has attracted attention in the fields of synthetic chemistry, analytical chemistry, semiconductor industry, and biotechnology industry in recent years, and is used in immunoassay systems, environmental analysis systems, and cell biochemistry. It is necessary to carry out the development of experimental systems, chemical vapor growth systems, and synthetic chemical experimental systems. Furthermore, by providing the reaction yields of these systems, shortening the reaction time, and reducing the environmental load, Sb makes chemistry. The reaction control is extremely high-precision and efficient. In addition, it is possible to realize a small and positive process that is considered impossible with existing technologies. Fig. 1 is a schematic explanatory view of a micro flow rate control device according to the present invention. Fig. 2 is a schematic view of a minute flow rate control device according to the present invention. Fig. 3 is a schematic cross-sectional view showing the micro flow rate control device of the present invention in a fully open state.

Fig. 4 is a cross-sectional view showing the minute flow control of the present invention. FIG. 6 is a schematic plan view of a schematic diagram of a throttle groove of the present invention. FIG. 7 is a schematic diagram of a calculation process of the motion amount equation of the present invention. FIG. A diagram of the derivation process of the relationship of the present invention. Figure 9 is a diagram showing the derivation process of the relationship of non-compressed fluids. Figure 1 is a schematic view of a throttle groove having a similar cross section. Figure U is a classification diagram of the critical length when the valve characteristic is linear.

= is a correlation diagram between the cross-sectional area A and the flow rate Q of the main throttle groove of the micro flow rate control device of the present invention which is characterized by linear valve characteristics. The figure is a correlation diagram between the cross-sectional area A of the main throttle groove and the flow rate Q of the micro flow control device of the present invention which is characterized by linear valve characteristics. Figure 14 is a schematic view of a throttle groove having a non-similar cross section. The cross-sectional area A and the flow rate q of the length of the throttle groove are the quasi-critical length. Fig. 15 is a diagram showing the micro flow control device of the present invention when the inlet LEC of the present invention is set. Figure 16 is a classification of critical lengths when the valve characteristics are equal to the percentage (EQ). 32 200827570 Figure. Fig. 17 is a correlation diagram of the cross-sectional area A and the flow rate q of the main throttle groove of the micro flow rate control device of the present invention which is given the equal percentage type valve characteristics. Fig. 8 is a correlation diagram of the cross-sectional area A and the flow rate q of the main throttle groove of the micro flow rate control device of the present invention which is given the characteristics of the equal-knife ratio type. Outline of the throttle groove of the throttle groove 19 has the short inlet of the present invention

Figure 20 is a diagram showing the derivation process of the length of the short population throttle of the present invention. Figure h is an assembled exploded perspective view of a conventional flow control valve. Fig. 22 is a plan view showing a flow groove formed in the metal ruthenium layer of Fig. 21. Fig. 2 shows the influence of the fluid viscosity on the relationship between the cross-sectional area of the trough and the flow rate in the process of the rise of the king. Related diagrams. [Main component symbol description] 2 Valve body 4 Throttle groove 6 Main throttle groove 8 Inlet throttle groove 10 Flow adjustment slider 10a Sliding position 10b Arrow 12 Inflow path 14 Outflow path 15 Inflow part 33 200827570 16 Inlet throttle groove Starting end section 18 Starting end face of main throttling groove 19 End section of inlet chute 20 Fluid outflow port 22 Outflow section 24 Sliding range 24a Fully open position 24b Fully closed position

26 Piping 26a Tiny cylinder 102 Metal valve 103 Valve body 103a Inlet flow channel groove 104 Throttle groove 110 Valve seat 113 Through hole 114 Outlet flow path 114a Valve outlet 34

Claims (1)

200827570 X. Patent application scope·· An arbitrary cross section of the groove forms an opening; the cross-section integral member 'closes the main throttle groove to the main throttle and the outflow path by the flow regulating member for guiding the fluid flowing out from the fluid y outflow port And characterized in that: at the beginning end of the main throttle groove, a flow path is formed which is connected to the front inlet throttle groove, and is derived from a motion amount equation of a fluid flowing through the inlet throttle groove and the main throttle groove, The size of the inlet chute is determined in such a way as to exert the desired flow resistance. 2. The method for designing a micro flow control device with an inlet throttle groove according to the first aspect of the patent application, wherein the cross-sectional area of the main throttle groove monotonically decreases from the beginning end toward the terminal to follow the fluid flow outlet The position of the inlet throttle groove is determined by moving the position from the beginning to the end and monotonically reducing the flow of the fluid flowing out of the fluid outflow port. 3. The design method of the micro flow control device with the inlet throttle groove according to item 1 or item 2 of the patent application, wherein the fluid motion equation can be expressed by the following formula: up (du/dz)+( Λ / Dh) (1/2) u2 P +dP/dz=〇 (here, 11 series flow rate, p-system density, flow direction coordinate of z-system fluid, λ-system friction coefficient, equivalent diameter of cross-sectional area of throttle groove , p system pressure). 4 · The micro flow rate of the inlet throttle groove according to item 3 of the patent application scope. The design method of the control device, wherein the motion quantity equation is based on the following formula u=G/( p A) Α χ ^64 β a /(GDh) (here, the G mass flow rate, "the density of the helium fluid, the cross-sectional area of the lanthanide fluid outflow, / / the viscosity coefficient of the fluid). 5. The design method of the micro flow control device with the inlet throttle groove according to item 4 of the patent application scope, wherein 'the end position of the main throttle groove is $ L = 〇, and the position of the fluid flow outlet is L=L, The starting position is that the flow rate of the fluid outflow port is Lm when L=L〇, and the flow rate of the fluid outflow port is G, L*=L/LG, G*=G/GM, at L*=1 (( The value of 1 G*/d is (d G* /d L* ) ri.) When L * =1, the following formula is assigned to the critical length of the inlet throttle groove B·LEC= Lo/WG^dL*). . EC 6_ is a design method of a micro flow control device with an inlet throttle groove according to item 5 of the patent application scope, wherein the flow system is a non-compressible fluid, and the arbitrary shape of the main throttle groove is similar to each other. The critical length lec of the linear type represented by G*=L* for the valve characteristic is: 匕Lec^ L0 〇7. The design method of the micro flow control device with the inlet throttle groove according to the patent scope f 4 'where' the end position of the main throttle groove is L=0', the position of the fluid flow outlet is L=L, and the start position is L=L. The flow rate of the fluid flow outlet at L=L0 is GM, the flow rate of the fluid flow outlet at l=l is AG, L*=L/L〇, G*=G/Gm, and any cross-sectional shape of the main throttle groove When the valve characteristics are non-similar, and the valve characteristic is linear, the following formula assigns 36 200827570 with the critical length lec : LEC = L0 / (dG * / dL *). 8. If the design method of the small flow control device with the inlet throttle groove is 5 or 7 and 13 * of the patent application scope, the pot, the valve and the valve are characterized by G " G〇*+( l - G〇*) L* (here, G0* is L* = 〇 〇 * value, 矣-> from) is not linear, and is G0* -1/RA (1 out. 〇) When expressed, the following formula assigns the critical length LEC = L. / (1 - 1/ Ra). EC 9. For example, the design method of the small control device with the inlet throttle groove of item 5 or ^ τ ^ β 乂 乂 7, GW), and the 'valve characteristics are (in this 'CV system !^0's G* value) indicates the equal percentage type and is G. M/RaMUoo) indicates that the following formula assigns the critical length he: Lec = L〇/ In Ra 〇10·If the patent application range is 1 to 4, the entrance turbulence of any one of Gubeijia The design of the micro flow control device of the trough is a straight-through method, wherein the cross-sectional area of the inlet throttling groove is toward the main throttling groove ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ^ ~ Yang % position A monotonically increasing inlet throttle. η· The design method of the micro flow control ancient device with the inlet throttle groove according to the tenth item of the patent application scope, wherein the cross section area of the mantle chute is Α ε (8) / mouth & L moving direction coordinate; Sexually do six kings deep f raw ~ plus 'the following formula gives the cross-sectional area Ae(z) · Ae(z)=Aeq+{(Ae〇.Aeq)/Leq} (in this 'AEq system entrance throttle That is, the initial & cross-sectional area of the melon heart, AE0 is the closest to the terminal cross-sectional area of the inlet throttling groove at the beginning of the 37 200827570 main throttling trough, the length of the Leq-type inlet throttling trough, and the flow direction of the z-system fluid coordinate). 12 · The design method of the micro flow control device with the inlet throttle groove according to the scope of the patent application, wherein the end position of the main throttle groove is L = 0 'the starting position is, the fluid outflow port is located When L = 0, the flow rate is G〇, and the flow rate of the fluid flow outlet at L=L〇 is G〇*2g〇/Gm, RA-1 / G.犄 'The frictional pressure drop in the inlet orifice is the size of the IV special mussel under the frictional pressure presented by the inlet orifice of the critical section length LEC. Throttle length: LEq=( AEq / AE0) { L0/ (1 - G0* ) } =(AEQ / AE0) { L〇/ (1 - w Ra) }. XI. National style: as the next page 38