200827303 九、發明說明： ； 【發明所屬之技術領域】 本發明係關於一種電混凝反應器，更特別關於此電混 凝反應器之感應電極。 【先前技術】 半導體產業會產生大量的廢水，特別是化學賴研磨 製程(chemical mechanical polishing，cmp)。CMP 產生的 廢水中含有大量奈米級顆粒及助劑，甚至包括含碳的有機 成份。為避免環境污染及回收廢水再使用，目前的廢水處 理製程主要包括化學混凝、薄膜過濾、及電混凝等技術， 再配合離子交換樹脂或光觸媒氧化處理增加效果。化學混 旋订之已久’是最常見的廢水處理方法。化學混凝的原理 為利用化學試劑改變懸浮粒子之表面電位並破壞其穩定 性，接著藉由混凝形成絮狀膠羽聚集（aggregati〇n)水中顆粒 後，經由沉澱去除。然而此種方法的加藥量不易控制，混 凝槽的體積大，且處理後之水質較差，已慢慢被其他廢水 處理製程取代。薄膜過渡是使用微過遽膜、超過遽膜、或 陶瓷過濾膜進行處理。但薄膜過濾的問題在於容易產生膜 阻2塞、單位時間處理廢水量過少（約99升/小時*薄膜面積 m )、|法去除溶解態之矽氧化物與總有機碳(t〇tal carbon TOC) ' *且價格非常昂貴（i_4萬新台幣/每平方公 ^薄膜）。電混凝的原理為·電極釋出之金屬離子形成氫 氧化金屬之膠羽，膠羽會聚集廢水中的顆粒。但目前已知 之電混凝技術的處理時間長達數小時，奈米顆粒去除效果 〇956-A21950TWF(N2)；P55950095TW；hsuhuche 200827303 較薄膜過濾法差，且無法同時去除溶解態之矽氣化物與總 有機碳(total organic carbon，TOC)。 在美國專利第3969245號中，揭露了 —種電混凝裝 置。將廢水經過棒狀電極後，電極上會產生氣泡且形成絮 狀物，再添加凝聚劑產生尺寸更大之絮狀物，沉降後得到 澄清液。 、 在美國專利第5271814號中，利㈣膜及電混凝法移 除液體中污染物，將瘦長的電極安置在、絕緣的電混凝桶槽 中，調整溫度、壓力及流量進行電混凝。 在美國專利第5587057號中，在導電性槽體中置入導 電棒狀電極並通入直流電流，進行電混凝處理。 在美國專利第6139710號中，將板狀電極垂直放置在 電混凝反應槽體，使用泵浦進行壓力控制，藉電壓電流控 制黾/tt*旋反應，將反應中產生的氣體釋放，處理後產生污 泥。 馨 在美國專利苐WU592號中，揭露_種處理工業廢水 的溶解金屬，廢水在平行的電極板間流動，電極產生離子 化，會使用過濾器分離產生的污泥與澄清水，並監控溫度、 壓力、及酸鹼值。 在美國專利第6613217號中，由縱向細長的電極組成 反應器並進行電混凝，移除產物產生的泡沫與氣體，在反 應器下方可調整電極間的微小間距。 在美國專利第6719894號中，利用電混凝技術處理有 械及金屬污染液體’此旋後使用加壓法去除廢棄液體，減 〇956-A21950TWF(N2)；P55950095TW；hsuhuche 6 200827303 壓後產生澄清液體。. 在：0專利第6797179號中’利用電混凝技術處理含 金f的H卜將電極板通人直流電源，使其具有帶電 卜貝再14電極板進行電混;疑反應，同時控制溫 度及酸驗值條件。 上述之電混凝處理裝置仍不能有效解決半導體製程產 生之廡K #寸別疋化學機械研磨廢水。因此目前亟需新的 電混凝裝置，以及對應之廢水處理方法。200827303 IX. INSTRUCTIONS: [Technical Field of the Invention] The present invention relates to an electro-coagulation reactor, and more particularly to a sensing electrode of the electro-coagulation reactor. [Prior Art] The semiconductor industry generates a large amount of wastewater, particularly chemical mechanical polishing (cmp). The wastewater produced by CMP contains a large amount of nano-sized particles and additives, and even organic components containing carbon. In order to avoid environmental pollution and reuse of recycled wastewater, the current wastewater treatment process mainly includes chemical coagulation, membrane filtration, and electrocoagulation, and is combined with ion exchange resin or photocatalytic oxidation treatment to increase the effect. The chemical mixing has been set for a long time, which is the most common wastewater treatment method. The principle of chemical coagulation is to change the surface potential of the suspended particles by chemical reagents and to destroy the stability thereof, and then to form a flocculent agglomerated water particles by coagulation, and then remove them by precipitation. However, the dosing amount of this method is not easy to control, the volume of the coagulation tank is large, and the water quality after treatment is poor, and has been gradually replaced by other wastewater treatment processes. The film transition is treated with a micro-pass film, a ruthenium film, or a ceramic filter film. However, the problem of membrane filtration is that it is easy to produce membrane barrier 2, the amount of waste water per unit time is too small (about 99 liters / hour * membrane area m), | method to remove dissolved cerium oxide and total organic carbon (t〇tal carbon TOC ) ' * and the price is very expensive (i_40 thousand NT / per square metric film). The principle of electrocoagulation is that the metal ions released by the electrode form a gel of hydrogen oxidized metal, and the rubber feathers will collect particles in the wastewater. However, the current known electrocoagulation technology has a processing time of several hours, and the nanoparticle removal effect is 〇956-A21950TWF(N2); P55950095TW; hsuhuche 200827303 is inferior to the membrane filtration method, and it is impossible to simultaneously remove the dissolved bismuth gasification and Total organic carbon (TOC). An electrocoagulation device is disclosed in U.S. Patent No. 3,969,245. After the waste water passes through the rod electrode, bubbles are formed on the electrode to form a floc, and a flocculant is added to produce a larger floc, which is settled to obtain a clear liquid. In U.S. Patent No. 5,718,814, Lee (4) membrane and electrocoagulation method remove contaminants from liquids, place elongated electrodes in insulated, electrically coagulated barrels, and adjust temperature, pressure and flow for electrocoagulation. . In U.S. Patent No. 5,587,057, a conductive rod electrode is placed in a conductive tank and a direct current is passed to perform an electric coagulation treatment. In U.S. Patent No. 6,139,710, the plate electrode is placed vertically in the electrocoagulation reaction tank, and the pump is used for pressure control, and the 黾/tt* spin reaction is controlled by the voltage and current to release the gas generated in the reaction. Produce sludge. Xin in the US patent 苐WU592, revealing the dissolved metal of industrial wastewater treatment, the wastewater flows between the parallel electrode plates, the electrode is ionized, the sludge and clarified water are separated by the filter, and the temperature is monitored. Pressure, and pH. In U.S. Patent No. 6,613,217, the reactor is composed of longitudinally elongated electrodes and electrocoagulated to remove foam and gas from the product, and a small spacing between the electrodes can be adjusted under the reactor. In U.S. Patent No. 67,1989,4, the use of electrocoagulation technology to treat mechanically and metal-contaminated liquids is used to remove waste liquid by pressurization, minus 956-A21950TWF (N2); P55950095TW; hsuhuche 6 200827303 liquid. In: 0 Patent No. 6797179, 'U-electric coagulation technology is used to treat the gold plate containing gold f. The electrode plate is connected to a DC power source, so that it has a charged Bubei 14 electrode plate for electrical mixing; suspected reaction, while controlling temperature. And acid test conditions. The above-mentioned electric coagulation treatment device still cannot effectively solve the #K# inch 疋 chemical mechanical polishing wastewater produced by the semiconductor process. Therefore, there is a need for new electric coagulation devices and corresponding wastewater treatment methods.
【發明内容】 本發明提供一種電混凝反應器，包括陽極與陰極；複 數個導電極，分別連接至陽極與陰極；複數個鋁感應電極， 位於該些導電極之間；以及複數個鐵感應電極，位於該些 導電極之間。 本lx明亦挺供一種廢水處理方法’包括將廢水導入上 述之電混凝反應器；導入直流電源，使導電極之間的鋁感 應電極與鐵感應電極產生感應電流，產生鐵離子與銘離子 後形成膠羽，膠羽與廢水之懸浮微粒聚集；去除膠羽與廢 水之懸浮微粒聚集。 【實施方式】 在第1圖甲，係本發明較佳實施例之電混凝反應器1 的示意圖。電源供應器1 〇分為陽極1 〇 A與陰極10B。陽極 10A連接至導電極11A，陰極連接至導電極ΠΒ。導電接 11A與11B之材質可為鋁、鐵、鋼、或不鏽鋼等材質。在 導電極11A與11B之間，夾設複數個鋁感應電極13a與鐵 0956-A21950TWF(N2)；P55950095TW；hsuhuche 7 200827303 感應電極13B，上述之兩感應電極及與導電極 以ο·1⑽至1⑽為佳。鐵感應電極13B之材=的距雜 =:鋼。在第1圖中，電混凝反應器二Ϊ鐵、 R肢刀為5個區塊，每一區塊中呈 ϋ ^電極 間的區塊全為銘感應電極13Α，而:：「片感應電極，中 別。但可以理解的是，區塊軌目、严塊為鐵感應電極 鐵感應電極13Β的數目、感應、銘感應電接13八邀SUMMARY OF THE INVENTION The present invention provides an electro-coagulation reactor comprising an anode and a cathode; a plurality of conductive electrodes connected to the anode and the cathode, respectively; a plurality of aluminum sensing electrodes located between the conductive electrodes; and a plurality of iron sensing An electrode is located between the conductive electrodes. The lx Ming is also suitable for a wastewater treatment method 'including introducing waste water into the above-mentioned electrocoagulation reactor; introducing a DC power source to cause an induced current between the aluminum induction electrode and the iron induction electrode between the conductive electrodes to generate iron ions and ions After the formation of the rubber feathers, the rubber feathers and the suspended particles of the wastewater are aggregated; the accumulation of suspended particles of the rubber feathers and the waste water is removed. [Embodiment] Fig. 1 is a schematic view showing an electrocoagulation reactor 1 of a preferred embodiment of the present invention. The power supply 1 is divided into an anode 1 〇 A and a cathode 10B. The anode 10A is connected to the lead electrode 11A, and the cathode is connected to the lead electrode ΠΒ. The materials of the conductive joints 11A and 11B may be made of aluminum, iron, steel, or stainless steel. Between the conductive electrodes 11A and 11B, a plurality of aluminum sensing electrodes 13a and iron 0956-A21950TWF (N2); P55950095TW; hsuhuche 7 200827303 sensing electrodes 13B are interposed, and the above two sensing electrodes and the conducting electrodes are ο·1(10) to 1(10) It is better. The material of the iron induction electrode 13B = the distance =: steel. In Fig. 1, the electrocoagulation reactor has two blocks of bismuth iron and R limb knives. In each block, the blocks between the electrodes are all the electrodes 13 Α, and:: Electrode, middle, but it is understandable that the block rails and the block are the number of iron induction electrodes 13 Β, the induction, the induction induction
行調整:舉例來說，不只-個區％，置方式可视情況進 在其他貫施例中，銘感應電極 為銘感應電極似。 第2圖）’而非如第i圖所示之同2 ^應電極可交錯設置(如 塊。在其他實施例中，導電極llA、鐵應電極設置於同—區 及鐵感應電極13B之形狀除 他、紹感應電極13八、 柱狀或管狀。 、夕卜’更可為其他形狀如 將廢水導入電混凝反應器 電至導電極11A與11B。利用感：，電源供應器提供直流 11B之間的鋁感應電極13A與:方式可使導電極11A與 使電極氧化形成鐵離子與_=應電極加產生電場， 與氫氧化鋁之膠羽。膠羽將與廢呔迤而與水產生氲氧化鐵 大尺寸之顆粒，較易以沉降或過沪=的懸浮顆粒聚集成較 電混凝器中，陽極之反庫=等程序去除。 F —2、）+ 2e-(式： e (aq) Fe (aq) + e (式 2) 4Fe (aq) + 1〇H20(i) + 〇2(g)^ A1⑴-> Al3+(aq) + 3e·(式 4) {(0¾ (s) + 8H+ (式 3) 0956-A21950TWF(N2)；P55950095TW；hsuhuche 200827303Line adjustment: For example, not only the area %, but also the way to be placed. In other examples, the sensing electrode is similar to the sensing electrode. Figure 2) ' Instead of the same as shown in Figure i, the electrodes may be staggered (such as a block. In other embodiments, the conductive electrode 11A, the iron electrode is disposed in the same region and the iron sensing electrode 13B In addition to the shape, the sensing electrode 13 is eight, columnar or tubular. The other shape can be other shapes such as introducing waste water into the electric coagulation reactor to the electrodes 11A and 11B. The sense of use: the power supply provides DC The aluminum sensing electrode 13A between 11B and the method can make the electrode 11A and the electrode oxidize to form iron ions and _= the electrode should be added to generate an electric field, and the rubber feather of the aluminum hydroxide. The rubber feather will be dehydrated and water Producing particles of large size of cerium oxide, it is easier to settle into the electric coagulator by the suspended particles of sedimentation or over-Shanghai=, and the anti-reservoir of the anode is removed by the program. F-2,)+ 2e-(Form: e (aq) Fe (aq) + e (Formula 2) 4Fe (aq) + 1〇H20(i) + 〇2(g)^ A1(1)-> Al3+(aq) + 3e·(Formula 4) {(03⁄4 ( s) + 8H+ (Formula 3) 0956-A21950TWF(N2); P55950095TW; hsuhuche 200827303
Al3+㈣+ 3H2〇⑴A1(0H)3 ⑷ +3H+(式 5) 陰極之反應式如下： 2H ⑽ + 2e — H2(g)(式 6) 除了直接將廢水通入本發明之電混凝反應器處理外， 亦可在開始電混凝前先加入氧化劑以氧化廢水中之有機物 質。氧化劑可為氧氣、臭氧、過氧化氫、氟氣、氯氣或上 述之組合，在較佳實施例中以過氧化氫為佳。加入氧化劑 可有效解決TOC的問題，並增加Fe2+之氧化效率。整個氧 Φ 化反應之反應式如下：Al3+(tetra)+3H2〇(1)A1(0H)3 (4) +3H+(Formula 5) The reaction formula of the cathode is as follows: 2H (10) + 2e - H2(g) (Formula 6) In addition to directly introducing wastewater into the electrocoagulation reaction of the present invention In addition to the treatment, an oxidant may be added to oxidize the organic matter in the wastewater before starting the electrocoagulation. The oxidizing agent may be oxygen, ozone, hydrogen peroxide, fluorine gas, chlorine or a combination thereof, and hydrogen peroxide is preferred in the preferred embodiment. The addition of an oxidant can effectively solve the problem of TOC and increase the oxidation efficiency of Fe2+. The reaction formula of the entire oxygen Φ reaction is as follows:
Fe2+(aq) + H202^Fe3+(aq) + OH' + ·ΟΗ (式 7) •OH +有機碳一>降解後產物+ C〇2+Η20⑴（式8) 由於導電極1 ΙΑ、11Β、紹感應電極13Α、與鐵感應電 極13Β會隨著電化學反應慢慢鈍化消耗，因此在隔一段時 間後必需進行再生處理，甚至直接換新的電極。為了平均 電極損耗’本發明之電源供應器之直流電源經間隔時間後 即反轉極性，使陰極與陽極之電性反轉。較佳之間隔時間 介於約為1 - 5分鐘’而直流電之電流約介於10 - 2 5安培之 間。 上述處理後之廢水可先調整酸驗值，較佳之酸驗值介 於5至7，接著以沉殿、過濾、浮除、溢流或上述之組合 步驟去除廢水之膠羽與懸浮微粒之聚集，比如導入沉殿池 進行膠羽沉降後，接著將沉降後之廢水導入溢流槽，取上 層水樣檢測。結果証明，本發明之電混凝反應器可大幅降 低濁度、溶解性矽濃度、TOC，同時將奈米級的懸浮物變 0956-A21950TWF(N2)；P55950095TW；hsuhuche 9 200827303 成23.00 nm以土之沉殿物。最重要的是，在較佳實施例中， 本發明之電混凝反應器可連續處理5小時而不需再生處 理。 在本發明之其他比較實施例中，所有的感應電極均為 鋁感應電極。此種作法的缺點在於鋁的成本較鐵貴，且再 生損耗快，將大幅提高廢水處理的材料成本。在本發明另 一比較實施例中，所有的感應電極均為鐵感應電極。此種 作法雖可降低材料成本，但鐵電極需要常常拆卸再生，將 • 大幅提高作業及時間成本。而本發明可延長鐵感應電極之 再生時間，並降低鋁感應電極之損耗率。 為使本技藝人士更清楚本發明之特徵，特舉例於下述 之較佳實施例。 實施例1 將研磨廢液以氧化物/金屬離子（3/1)之比例均勻混合 後，將過氧化氫(0.04%)添加至槽中並攪拌均勻。由泵浦導 入電混凝槽後，通入直流電（70V / 25A)，且直流電在每分 _ 鐘均進極性互換，廢水之流量為12 L/分鐘。接著將廢水導 入後處理槽調控酸鹼值，再導入沉澱池進行膠羽沉降，最 後導入溢流槽，取上層水樣進行檢測。如第1圖所示，電 混凝槽以5片鐵電極作為導電極^並將槽體分為4個區域。 其中一個區域包含16片鋁電極板作為感應電極，其他三個 區域包含16片鐵電極板作為感應電極’極板間隔0.3 cm。 此實施例之廢水處理前後的水質分析如表一。 0956-A21950TWF(N2)；P55950095TW；hsuhuche 10 200827303 表一 里時間 水質項目 原液 100分鐘 180分鐘 240分鐘 300分鐘 酸驗值 8.9 5.78 5.52 5.50 5.64 濁度（NTU) 236 3.58 2.65 3.01 2.89 導電度（ps/cm) 333 562 436 440 415 溶解性矽濃度（mg/L) 151.2 22.3 45.4 35.7 48.9 平均粒徑（nm) 159 6650 2360 7210 3120 界達電位（mV) -42.7 -3.96 -6,4 -L72 -20.3 總有機碳(ppb) 2781 425 431 747 687 實施例2Fe2+(aq) + H202^Fe3+(aq) + OH' + · ΟΗ (Formula 7) • OH + organic carbon one > Degraded product + C〇2+Η20(1) (Formula 8) Since the electrode 1 ΙΑ, 11Β, The sensing electrode 13Α and the iron sensing electrode 13Β are slowly passivated and consumed with the electrochemical reaction, so it is necessary to carry out regeneration treatment after a period of time, or even directly replace the new electrode. In order to average the electrode loss, the DC power supply of the power supply of the present invention reverses the polarity after the interval, so that the electrical properties of the cathode and the anode are reversed. Preferably, the interval time is between about 1-5 minutes and the direct current is between about 10 and 25 amps. The treated wastewater may be adjusted for acid value first, preferably with an acid value of 5 to 7, and then the agglomeration of the colloidal and suspended particles of the wastewater may be removed by a combination of sedimentation, filtration, flotation, overflow or the combination of the above steps. For example, after the sinking pool is introduced to carry out the sedimentation of the rubber feather, the settled wastewater is then introduced into the overflow tank, and the upper water sample is taken for detection. The results show that the electrocoagulation reactor of the invention can greatly reduce the turbidity, the solubility enthalpy concentration, the TOC, and the nano-scale suspension can be changed to 0956-A21950TWF (N2); P55950095TW; hsuhuche 9 200827303 to 23.00 nm. The sinking temple. Most importantly, in the preferred embodiment, the electrocoagulation reactor of the present invention can be continuously treated for 5 hours without regeneration treatment. In other comparative embodiments of the invention, all of the sensing electrodes are aluminum sensing electrodes. The disadvantage of this method is that the cost of aluminum is more expensive than iron, and the regeneration loss is fast, which will greatly increase the material cost of wastewater treatment. In another comparative embodiment of the invention, all of the sensing electrodes are iron sensing electrodes. Although this method can reduce the cost of materials, the iron electrode needs to be dismantled and regenerated frequently, which will greatly increase the cost of operation and time. The invention can prolong the regeneration time of the iron sensing electrode and reduce the loss rate of the aluminum sensing electrode. To make the skilled person more aware of the features of the present invention, the preferred embodiments are exemplified below. Example 1 After the grinding waste liquid was uniformly mixed in the ratio of oxide/metal ion (3/1), hydrogen peroxide (0.04%) was added to the tank and stirred uniformly. After the pump is introduced into the electric coagulation tank, direct current (70V / 25A) is applied, and the direct current is exchanged in polarity every minute, and the flow rate of the waste water is 12 L/min. Then, the wastewater is introduced into the post-treatment tank to adjust the pH value, and then introduced into the sedimentation tank for sedimentation, and finally introduced into the overflow tank, and the upper water sample is taken for detection. As shown in Fig. 1, the electric kneading tank uses five iron electrodes as the conductive electrodes and divides the tank into four regions. One of the areas contained 16 aluminum electrode plates as the sensing electrodes, and the other three areas contained 16 iron electrode plates as the sensing electrodes. The plate spacing was 0.3 cm. The water quality analysis before and after the wastewater treatment of this example is shown in Table 1. 0956-A21950TWF(N2);P55950095TW;hsuhuche 10 200827303 Table 1 time water quality project stock solution 100 minutes 180 minutes 240 minutes 300 minutes acid test value 8.9 5.78 5.52 5.50 5.64 turbidity (NTU) 236 3.58 2.65 3.01 2.89 Conductivity (ps/ Cm) 333 562 436 440 415 Solubility concentration (mg/L) 151.2 22.3 45.4 35.7 48.9 Average particle size (nm) 159 6650 2360 7210 3120 Bound potential (mV) -42.7 -3.96 -6,4 -L72 -20.3 Total Organic Carbon (ppb) 2781 425 431 747 687 Example 2
在實施例2中，如第2圖所示，電混凝槽以5片鐵電 極作為導電極’並將槽體分為4個區域。其中兩個區域包 含8片銘電極板及8片鐵電極板作為感應電極’其他兩個 區域包含16片鐵電極板作為感應電極’四個區域交錯設 置，極板間隔0.3 cm。其廢水處理前後的水質分析如表二。 表二 理時間 水質項目^ 原液 100分鐘 180分鐘 240分鐘 300分鐘 酸鹼值 8.9 6.47 6.54 6.62 6.58 濁度（NTU) 236 11.5 21.8 32.2 33.5 導電度（ps/cm) 333 882 765 704 780 溶解性矽濃度（mg/L) 151.2 28.8 24.7 20.1 25.1 平均粒徑（nm) 159 8310 2300 1710 1540 0956-A21950TWF(N2)；P55950095TW；hsuhuche 11 200827303 界達電位（mV) -42.7 -16.5 -34.7 -36.6 -32.5 總有機碳(ppb) 2781 419 527 549 806 比較實施例 在此實施例中，電混凝槽以5片鐵電極作為導電極， 並將槽體分為4個區域。將64片鐵電極板作為感應電極， 每個區域均具有16片鐵電極板，極板間隔0.3 cm。其廢水 處理前後的水質分析如表三。 ⑩表三 理時間 水質項目^ 原液 100分鐘 180分鐘 240分鐘 300分鐘 酸驗值 8.9 6.74 6.35 6.34 電 極 鈍 化 無 法 作 用 濁度(NTU) 236 11.1 32.9 33.2 導電度（ps/cm) 333 842 788 783 溶解性矽濃度（mg/L) 151.2 32.5 52.4 51 平均粒徑（nm) 159 3300 1100 715 界達電位（mV) -42.7 -30.5 -30.5 -34.3 總有機碳(ppb) 2781 738 945 1100In the second embodiment, as shown in Fig. 2, the electric kneading tank has five ferroelectric electrodes as the conducting electrodes' and divides the tank into four regions. Two of the areas contain 8 electrodes and 8 iron plates as sensing electrodes. The other two regions contain 16 iron electrodes as sensing electrodes. The four regions are staggered and the plates are spaced 0.3 cm apart. The water quality analysis before and after wastewater treatment is shown in Table 2. Table 2 Time Water Quality Project ^ Stock solution 100 minutes 180 minutes 240 minutes 300 minutes pH 8.9 6.47 6.54 6.62 6.58 Turbidity (NTU) 236 11.5 21.8 32.2 33.5 Conductivity (ps/cm) 333 882 765 704 780 Solubility (mg/L) 151.2 28.8 24.7 20.1 25.1 Average particle size (nm) 159 8310 2300 1710 1540 0956-A21950TWF(N2); P55950095TW; hsuhuche 11 200827303 Boundary potential (mV) -42.7 -16.5 -34.7 -36.6 -32.5 Organic Carbon (ppb) 2781 419 527 549 806 Comparative Example In this example, an electric coagulation tank was used with five iron electrodes as a conducting electrode, and the tank was divided into four regions. 64 iron electrode plates were used as the sensing electrodes, and each region had 16 iron electrode plates with a plate spacing of 0.3 cm. The water quality analysis before and after wastewater treatment is shown in Table 3. 10 Table three time water quality project ^ stock solution 100 minutes 180 minutes 240 minutes 300 minutes acid test value 8.9 6.74 6.35 6.34 electrode passivation can not work turbidity (NTU) 236 11.1 32.9 33.2 conductivity (ps / cm) 333 842 788 783 solubility矽 concentration (mg / L) 151.2 32.5 52.4 51 average particle size (nm) 159 3300 1100 715 boundary potential (mV) -42.7 -30.5 -30.5 -34.3 total organic carbon (ppb) 2781 738 945 1100
由表一、表二與表三的比較可清楚發現，比較實施例 之全鐵感應電極板因電極鈍化無法進行5小時以上之廢水 處理。與比較實施例相較，本發明之實施例1及2在5小 時後，電極仍可正常運作。而區段設置之感應電極（實施例 1)與交錯設置之感應電極（實施例2)相較，區段設置之表現 0956-A21950TWF(N2)；P55950095TW；hsuhuche 12 200827303 又較交錯設置佳。綜上所述，本發明之鐵感應電極配合鋁 感應電極的設計較所有的感應電極皆為單一材質時佳。在 較佳實施例中’鐵感應電極與铭感應電極配置係以區段設 置的實驗結果最好。 雖然本發明已以數個較佳實施例揭露如上，然其並非 用以限定本發明，任何所屬技術領域中具有通常知識者， 在不脫離本發明之精神和範圍内，當可作任意之更動與潤 飾，因此本發明之保護範圍當視後附之申請專利範圍所界 ⑩定者為準。From the comparison of Table 1, Table 2 and Table 3, it is clear that the all-iron induction electrode plate of the comparative example cannot be subjected to wastewater treatment for more than 5 hours due to electrode passivation. Compared with the comparative examples, the electrodes of Examples 1 and 2 of the present invention were still functioning normally after 5 hours. The segmented sensing electrodes (Embodiment 1) are compared with the staggered sensing electrodes (Example 2), and the segment setting performances are 0956-A21950TWF(N2); P55950095TW; hsuhuche 12 200827303 is better than the staggered setting. In summary, the design of the iron sensing electrode of the present invention in combination with the aluminum sensing electrode is better than when all the sensing electrodes are of a single material. In the preferred embodiment, the experimental results of the arrangement of the 'iron-sensing electrode and the sensing electrode configuration are the best. While the invention has been described above in terms of several preferred embodiments, it is not intended to limit the scope of the present invention, and it is possible to make any changes without departing from the spirit and scope of the invention. And the scope of protection of the present invention is subject to the scope of the patent application.
0956-A21950TWF(N2)；P55950095TW；hsuhuche 13 200827303 【圖式簡單說明】 第1圖係本發明較佳實施例之電混凝反應器的示意 圖’其中銘感應電極與鐵感應電極係區段設置； 第2圖係本發明實施例2之電混凝反應器的示意圖， 其中感應電極與鐵感應電極交錯設置； 第3圖係本發明比較實施例之電混凝反應器的示意 圖，其中只有鐵感應電極。 【主要元件符號說明】 • 1〜電混凝反應器； 10〜電源供應器； 10A〜陽極； 10B〜陰極； 11A、11B〜導電極； 13A〜鋁感應電極； 13B〜鐵感應電極。0956-A21950TWF(N2); P55950095TW; hsuhuche 13 200827303 [Simplified Schematic] FIG. 1 is a schematic view of an electrocoagulation reactor of a preferred embodiment of the present invention, wherein a portion of the sensing electrode and the iron sensing electrode are disposed; 2 is a schematic view of an electrocoagulation reactor of Embodiment 2 of the present invention, wherein the sensing electrode is interleaved with the iron sensing electrode; and FIG. 3 is a schematic view of the electrocoagulation reactor of the comparative example of the present invention, wherein only the iron sensing electrode. [Main component symbol description] • 1 to electrocoagulation reactor; 10 to power supply; 10A to anode; 10B to cathode; 11A, 11B to conduction electrode; 13A to aluminum induction electrode; 13B to iron induction electrode.
0956-A21950TWF(N2)；P55950095TW：hsuhuche 140956-A21950TWF(N2); P55950095TW: hsuhuche 14