TW200824026A - Variable lot size load port - Google Patents

Abstract

A variable lot size load port assembly is described having a tool interface, a port door, a latch key, an advance plate, and an elevator. The tool interface extends generally in a vertical dimension and has an aperture. The port door has a closed position wherein the port door at least partially occludes the aperture. The latch key extends from the port door and is configured to mate with a latch key receptacle of a door of a front opening unified pod (FOUP). The advance plate is configured to support a front opening unified pod (FOUP) and translate between a retracted position and an advanced position. The elevator raises and lowers the advance plate to bring the latch key receptacle of the door of the FOUP into alignment with the latch key of the port door.

Description

200824026 IX. Description of the Invention: TECHNICAL FIELD OF THE INVENTION The present invention generally relates to a wafer processing system. [Prior Art] Another brother, the processing of semiconductor wafers requires the transfer of wafers from the processing station to a lum. Because of the sensitivity of the i-semiconductor device to the contamination caused by particulate matter, the tilt of the semiconductor device refers to a container having a front opening and a substrate for accessing the processing aid. The F〇up threshold is matched with the processing unit threshold, and the hunting device removes the threshold to access F〇Up p〇up^;i;f F〇up2°5 ° ruup threshold 22, and housing 24, which are defined together屮 Visiting a 々$々^ t=(4)_. The F(10) threshold 22 includes two inserts. Figure 2 shows the conventional use of the F人口up2〇 and handlers and the ^3Q()mm population component. The population 23 is linked to the front panel 25 by means of a combing device, and t=2 can be 6; ί ! = 0 (4) and the processing tool 28 is loaded onto the advancement plate 25 to enable ' The front side 31 faces the front door sill 22 of the loading door sill 26 into the flat plate 25. When located in Ruqing, it is located in front of the hole 18. The closing position of the day, the entrance threshold includes

When the FOUP 20 first faces the loading threshold 扉% 〇 3 〇, a includes inserting the F〇up threshold 22^26 days before loading the entrance threshold 26 before the table _ genus 32. It is suitable for the key jack 33 corresponding to the ^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^^ 200824026 "This patent has been transferred to the Assisi Technology Co., Ltd. and the contents of the merger have been incorporated. In order to place the door 11 on the load sill 26, the F 〇UP sill 22 is located adjacent to the entrance door , so that the vertical latch key 32 is inserted into the latch key insertion hole 33. In addition to retracting the F〇UP threshold 22 from the F〇UP housing, the ^= lock will be locked into the respective jack 33; the bottom of the brim on the F(10) entry= is applied to the carrier 25 FOUP20, F_A arrow and element: = detector detects forward flat = BQm plate 36 forms near = in = and prevents 彳 m〗 T from remaining on the flange. The proximity seal is also mixed with ===== or roup. Higher than the surrounding pressure is provided by the filter tif (figure), the job fan _ not shown. The desired one is to connect the front surface of the FOUP threshold 22 to the surface of the =, 乂, and keep in contact to complement the particulate matter between the thresholds. Once = (10)X / r扉 makes it impossible to continue to close the hole, hole 18. For example, if the σ n wire is used, the inner surface of the BOLTS i board 200824026 36 is down. Regardless of the relative position of the desired F〇up and the loading threshold after the FOUP advances, we need to accurately and reproducibly control this relative position to ensure that the box threshold is properly transferred to the population (4) and can be prevented. The particulate matter produces a desired position, and the conventional population-carrying component system relies on the fact that the locating pin establishes a fixed and known F〇up position on the carrier assembly, and the locating pin In the state of the Qing, the factory can be oriented toward the fixed population to place the front surface of the corresponding threshold at the desired relative position. Many components of the manned gamma port 0, such as the B0LTS plate hole, the hole 18, the loading door, and the container advancing plate 25 are fixed elements that cannot be adjusted. 300 dirty load [Summary] refers to - ΐ ΐ I I! The present invention solves the problem by providing a variable batch population as described. It should be understood that the present invention can be implemented in a variety of ways, including, for example, a process, a device, a system, a package, and other inventive embodiments are described below. / / X month In the -I case towel, set - variable batch load population component, 1 interface, one load threshold, one question lock key === two and production. The loading port has a closed position. The middle entrance door is closed to take a small part of the hole; and _ is opened, the hole is substantially not blocked by the entrance door threshold. The lock key is extended from the load gate ί: ί; ί, and has a tool-oriented 2-2:= setting, one of the thresholds on the Japanese and Japanese yen box (F0UP). Dry: Ρ丨 Pairing. The forward plate faces the latch key of the tool interface f to extend horizontally. Who is the former 铋 铋: Tian Shi +; 5 below the Haikong hole 'and the upper level K recognized 1 A (five) into the thousand The raft is used to support the movement between the front open position and the forward position, and the forward position is at the surface, and the retracted position is away from the tool interface. The lifter can be lowered and lowered = 200824026 into the slab to make the FOUP threshold In this way, by changing the height of the front panel, the inlet can be matched with a plurality of FQUp of different capacities, and the plurality of 4 J $ degrees has a latch key jack. In the different Nanguang embodiments, the 'variable batch loading port includes-into the flat plate, the upper sealing plate and the lower (four) flat. The guard interface is:, the surface has a front surface facing the front of the tool interface, a substantially flat 5: back surface of the surface, and a hole. The advancing plate is used to support: Kenting 2 (F〇U^) 'and move between the retracted position and the advanced position, and the retracted position is away from the tool interface. The upper end is fixed on the upper end of the tool interface and covers the part of the hole, Largely formed to form a close seal with the front flange of the FOUP;; fixed, the lower end of the tool interface and the upper plate covering the hole-shaped portion are shaped to form a close seal with the front flange of the face P. Upper; The plate closes the upper and lower portions of the hole to form a reduced hole; the plate and the lower-invention embodiment, the variable-volume manned tonnage includes a "defending forward plate, and a replaceable stationary plate. Surface, substantially The rear surface of the parallel front surface, and the hole; the closed position: the hole in which the π Η扉 is closed to the least part of the hole, and the opening, wherein the hole is substantially not blocked by the entrance screen. Ask the lock to enter the entrance and use it to The stylus is recorded on the 针 ) ) 上 闩 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 And move between the retracted position and the advanced position, and the advance position & , with the interface, the retracted position is in the position of the anal interface. The replaceable ^ board is mounted on the tool interface, and the surrounding part of the seal is _ stationary plate = and , the hole has a close connection with the F 〇 UP of the selected capacity ^ 200824026 [Embodiment] Figure 4 6 shows the configurable office with a static sealing plate, except for the East iG 〇. Here: ^ , :2 = interface r standard, usually by:: circle through. The tool interface 1 〇 2 is preferably a sealed flat ^ 工具 ^ tool interface l 〇 2 has been modified to accept any size of ήΠ ήΠ Ϊ Ϊ :: f tool, the surface is suitable for T will be further step-by-step description Two different spoons of Ο^Ρ. In this example, "Tools*1〇2 is processed to form a concave surface to provide a table for the installation of livers (more details). The tool interface 1〇2 includes an inclined surface that is converted into a concave surface 112. 14^ ", Bay is not in the cross section of the tool interface 102 in Figure 4. The concave surface 1 u is the perimeter of the Ht plate hole 104. Even in the embodiment of the loading port 100 of 81 4_5, the simple sealing plate 108 having a large capacity is still mounted in the recess 03. In the embodiment, the large-capacity F〇up& contains, for example, a solid wafer or an alumina board. In contrast, the small-capacity F〇up described below with reference to FIGS. 6 and 7 can only be used for a wafer or substrate that is less than a large-capacity F〇UP, such as 8 or 1 wafer or Substrate. The small capacity F〇Up is suitable for use in small batches, where the batch refers to the number of wafers or substrates that will be processed. Therefore, when compared to the 25-fat F0UP using a 4-ticket standard in a small batch size, it is possible that a large-capacity FOUP is more than half empty, and a small-capacity F〇up can save a considerable amount of storage space. In order to "reconstruct" the plate aperture 104 back into a uniform configuration, the sealing plate 108 includes its own inclined surface 11〇 that is converted into a recessed surface 112. In the preferred embodiment, the 'inclined surfaces 110, 110', and the recessed surfaces 112, 112 are flush. 200824026 or any type of handpiece (such as bolts, screws, etc.), Figure 4 shows the plate holes 1〇, ^52 fixed to the tool interface 102. This is equivalent to the degree of conventional loading of the inlet aperture and the degree I1, in the preferred embodiment, the mounting 116. Similar to the sealing plate, when the flat plate 116 F〇UP40 (Fig. 7) is sealed, the use of the cool seal batch 100 is known as the small grain 罝 116 including the safety worker = the thousand plate 16. In this embodiment, the upper end portion 124 of the sealing plate hole 104, the upper portion 124 of the surface 51, and the surface of the sealing plate 116 are converted into a concave surface 2^® 120. In the preferred embodiment, the tilt table® 122 of the recessed interface t-plate 116 of the tool interface (1) 2 is flush. Similarly, the work i is flush. The slanting surface 122 of the sealing plate 116 is preferably snail (4). The slab can be fixed with any surface (for example, bolts, face-to-face or any type of means (for example, welding to B0LTS plate) fixed to the tool. The face interface 102 does not need to have an inclined surface and a recess. However, as shown in Fig. 7, the recessed surfaces 112, 122 make the _ private movement retreat, which is preferred. The sealing plate 116 reduces the plate hole 104. Dimensions to operate the small capacity OUP40. Figure 6 shows that the height of the flat hole 1〇4 is reduced to the height of m. The lean 3 plate 116 is fixed to the concave surface 1〇3 of the tool *1〇2, and the sealing plate is effectively sealed. The hole 1〇4 is located above the concave surface m. In this embodiment, the width of the hole is maintained at the same width W]l, which is equivalent to the conventional load port width. The width W1 of the hole 104. Also 1X1 Fig. 7, a schematic representation of the operation port 1〇〇 operation small capacity F〇up4〇 in Fig. 6. In this embodiment, the small capacity 17〇111>4() is located at The container advances on the assembly 1〇6 and has advanced toward the tool interface 1〇2 to the FOUP housing 44 Forming a close seal with the recessed surface 122 of the sealing plate 116 and the recessed surface 112 of the tool interface 102. The sealing plate 116 effectively closes or covers a portion of the plate hole 1〇4. Sealing the 200824026 plate 116 reduces the need for the interior of the processing tool to be exposed The amount of the external environment. Figure 8-11 shows the population threshold 126 - the embodiment can be buckled and moved, the magic and large-capacity surface P threshold 22. The height of the large-capacity F0UP threshold (four) 42 is not the same. For the mtUt1 lock button 132, the = key 132 * month extending from the loading threshold 126 is also at the center of the F0UP threshold. The lock button 132 preferably 130 extends 'the height is between the small capacity threshold 42 and Between the 扉22. Here, the latch key 丨32 is placed at a small capacity of 1; '01;1> ϋίϋ as high as possible above the entrance threshold 130. Figure 8 shows the port p5? 3 f The height above the centerline (1) of the entrance threshold® 130 extends from the loading portal 126 (having a height H3). Figure 9 shows the loading threshold 26! 26 operating small capacity F〇up4〇. F〇up loading inlet = included Ask the lock button jack (not shown in Figure 9), tF〇up is located in the container forward group Only the last day, the latch key 132 can be aligned. As shown, the latch key 132 is not coupled to the center of the threshold 42. Figure 10 shows that the load port 126 is suitable for operating large capacity f〇 UP 20. In this embodiment, the loading door sill 126 includes an extension panel 14A. The extension panel 140 is preferably flush with the loading door sill surface 13 and is coupled by any fixture known in the art. At the entrance threshold 126, the extension height H5 increases the effective height of the entrance threshold 130 to the height H4. In the preferred embodiment, the height H4 is substantially similar to the height of the large capacity f〇up threshold 22. Further, Fig. 11 shows that the loading port 扉丨 26 operates the large giF 〇 UP2 〇. In particular, 11 indicates that the loading entry sill surface 130 and the extension plate surface 142 have substantially the same height (and surface area) as the F 〇 UP sill surface 31. In this embodiment, to align the latch key 132 extending from the load port sill 126, the latch key insertion hole in the F〇UP sill 22 is located below the center of the FOUP sill. After the latch key 132 snaps onto the door 扉 22, the load door 扉 126 moves the FOUP sill 22 into the tool (shown in the dashed line). If the loading door sill 126 does not have the extension plate HO, the upper portion of the large-capacity FOUP sill surface 31 is exposed when the loading door sill 126 is coupled to the FOUP sill 22. 200824026 The upper surface is contaminated by particles that will pass from the F〇up threshold to the wafer that may be transferred between the FOUP20 and the processing tool. Nt fi complements the particles on the F0UP door surface 31 and prevents the particles from being removed. The FOl^it counter entrance threshold 126 can also be used to buckle and the face 142 of the 14G will be exposed. The extension panel 142 may be contaminated by the F0UP threshold 42 because of the object. However, after d 1126 and F0UP threshold 42 are lowered into the processing tool, the exposure surface of the F卫up threshold is compared. Another embodiment of the inlet threshold 126 is also operable to operate the large valley summer FOUP 40. Again, the large-capacity foup 1 shown in Fig. 15 is not 2, and the height of the small-capacity F〇up threshold 42 shown in Fig. 13 is not: 3 = 2, compared to the example, the extension from the man-made alum 126 Key 132 center. The flash lock button 132 includes a ° 观 ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( ( 。 。 。 () (for example, to cover the plate 116, (as shown in Figure 16) the load port component. Since i ί want it white? 115 threshold 42 in the lock button jack and flash relay 132, borrow - Adjusting the container advancement assembly ι〇6 vertically or manually. The adapter includes an adapter 107 that can be manually applied between the container advancement group (4) 6 and the plate f (as shown in Figure 13). The adapter 107 has The exact feature is 'so no adjustment is required after connecting to the support plate 106. Or the 'container advancement assembly 106 can be mounted to an automated lifter. For example, 12 200824026 The load port can contain shares such as the transfer of the Assisi technology Limited (Asyst)

A direct loading tool as disclosed in U.S. Patent Application Serial No. 11/177,645, the disclosure of which is incorporated herein by reference. In this case, the direct load tool automatically adjusts the height of the container advancement assembly 106 in accordance with whether the FOUP is a small capacity FOUP 40 or a large capacity FOUP 20. Figures 14-15 show a load port threshold 126 suitable for operating a large capacity f〇uP20. In this embodiment, the load port sill 126 includes a first extension panel 144 and a second extension panel 146. The face 148 of the extension panel 144 and the face 150 of the extension panel 146 are preferably flush with each other. Extension plates 144 and 146 are secured to load port sill 126 by any securing means known in the art. The height H6 of the first extension plate 144 and the height H7 of the second extension plate increase the height of the entrance door sill 13 〇 to H4. In the preferred embodiment, the height H4 is substantially similar to the height of the large capacity 〇22. Figure 15 shows the loading threshold 126 operating a large capacity 1^0111>2〇. Figure 14 shows that the loading door sill surface 13 with extension plates 144 and 146 has substantially the same height (and surface area) as the foup sill surface 31. To align the latch key 132 extending from the load port sill 126, the latch key receptacle in the FOUP threshold 22 is located at the center of the F〇up threshold 22. After the latch key 132 snaps over the FOUP threshold 22, the load portal 126 moves the FOUP threshold 22 into the tool. Figures 16-17 show other embodiments with a stationary sealing plate. In these embodiments, each sealing plate includes a single plate having an opening that can accommodate a small capacity FQUP or a large capacity FQUP. As a result of this, each of the stencils 116 or 116' may be included in the holes 118, and the depressed shoulders of the perimeter, such as 616 and 614 in Figure 26. Figure 16 shows the tool interface with flat holes 102. A static sealing plate 116' is used when the loading port operates a small capacity F〇up4. The sealing plate"plate 116' is mounted to the tool interface 1() by any means known in the art (e.g., bolts) Within the hole 1 () 4 of the hole 2. Sealing the plate ΐ6, reducing the size of the hole 104 to the size of the opening 118. In this embodiment, the hole 118 is located at the center of the sealing plate 116'. The hole 118, which may be located on the sealing plate 116, the location of his 。 13 200824026 板 116" ° # 载 population operation large capacity 丽 使 丨 丨 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 116 Sealing the flat plate 116, reducing the size of the hole 104 to the opening 118, the size 1, the hole 118 of the sealing plate 116", is located at the sealing plate un116, ^W^ ° tf the height and width of the plates 116 and 116 are the same Therefore, the tablet can be easily interchanged. Figure 17 shows a different embodiment of the extension plate 140 carrying the inlet sill 126. The extension plates 140' and 140" allow the load port 扉 126 to operate at a large capacity only ^^ and small capacity = ^ The climate threshold 126 includes a bottom 127 and a rising flash lock cover 129. The circumference of the magnetic portion 127. The lock extension plate 14 (the cymbal has a thickness 汜 and includes a hole 128, the extension plate 14 〇, the thickness ^ is preferably the same as the depth dl of the latch key cover 129. Therefore, when the extension plate 14 is closed, it is fixed When the port door 126 is loaded, the extension plate surface 144 is flush with the latch key cover 丨 31. The L extension plate 140 has a thickness (J3 and includes a hole 128". The extension plate 14 〇" is a thick product d3, preferably The depth dl is the same as the depth dl of the latch key cover 129. Therefore, when the extension plate is hooked to the loading door sill 126, the extension plate surface 144" and the latch key cover surface 131 are flush. The area of the extension plate surface 144" (plus The upper cover 131) preferably has the same or similar area of the *F〇up sill surface 31. Figures 18-25 show different embodiments of the adjustable sealing plate. Figure 18 shows a loading port 200. Among other things, The loading port 2 (8) further includes a tool interface 202 having a flat hole 2〇4, a sealing plate 208, a loading port 226, and a container advancement assembly 206. The sealing plate 208 includes a sealing plate vertically adjustable. Hole 2〇4 The lower tool interface 202 includes an inclined surface 210 that is converted into a recessed surface 212. The loading gate shown in Figure 18 226 is similar to the load port threshold 126 shown in Figures 7 and η. However, the load port 200 is not limited to such a load port threshold. In operation, the small volume FOUP 40 is placed on the container advancement assembly 206. The W-in assembly 206 moves the FOUP 40 toward the tool interface 202 to position 14 200824026 shown in Figure 18. In the previous it position, the F0UP upper flange 43 is adjacent to the lower surface of the fOUP flange 45 near the recessed surface 212 of the plate (e.g. The key 44 is also located close to the entrance door surface 230. ίί 锁 锁 (not shown) loose and buckle! 7〇1; 1> threshold 42. Receiver latch or P 扉 42 Contact with the inlet port ^1^ flange 43 and when / when in the closed position (as shown in Figure 18), load = minute hole _. Seal the plate with the arrow ^ === adjustment. When loading When the alum 226 is in the closed position and the sealing plate i is in the part of the farm (not shown), the upper side of the Π 〇 face 23 Π is in the surrounding %. In the moving] ρ 〇υ ρ4 〇 to the forward position 々^ or when the F0UP4G is moving to the forward position, the loading port 226 to the figure 18 of the i stand-up sealing plate 208 is preferably at ?08 - move to the position as shown in Figure 18 before entering the tool. The plate 208 moves downward and is 'seal' with the upper surface of the upper flange 43 of the F〇up and covers the upper surface of the loading door sill (10). After the 扉 口 mouth ^ 2226 buckle (four) UP sill 42 , the loading port 扉 226 moves, the sealing plate 2 〇 8 is preferably kept in the lowered position; prevent the ^ household workers 4 in 2. Sealing plate 2 〇 8 Effectively reduce the size of the plate hole. After 2FC2 returns FC^0 to Y〇UP40, the container advancement assembly 206 is removed from the tool interface Πf. If the next F〇UP placed on the component 2〇6 is the same size, the ίίΐ of ^19 can be kept in the lowered position. Otherwise, the sealing plate 208 may be lowered again when it reaches the forward position. The iW^ sealing plate may form a close seal with the same size of the F〇T?pUP only in a manner that is lowered to the F〇UP housing. Therefore, the load inlet 200 can be operated without 2:6. The disadvantage of the inlet 200 of Fig. 18 is that when the inlet threshold is

Upper flange 43. When the sills 42 are paired, the loading portal 226 may collide with F〇UP. Figure 19 shows another embodiment of an inlet 200 with an adjustable sealing plate 208 and a loading port 226. In this embodiment, the sealing plate includes a flat surface 212a and an inclined surface 215 that is converted into a concave surface. The sealing plate 2〇8 is vertically moved by the tool interface 202 (as indicated by the arrow in Fig. 19). when? (兀1? is located at the advanced position (as shown in Fig. 19), and the sealing plate forms a close seal with the positive 46 of the upper flange 43 of the F〇up. The F0UP lower flange 45 forms a recessed surface 212 with the tool interface 2〇2. Proximity seal. The proximity seal allows some air 19 that is maintained above ambient air pressure to escape from the rear side of the tool interface 202, thereby preventing particles and other contaminants from entering the processing tool. In operation, the FOUP 40 is placed in the container advancement assembly 2 When the loading port 226 is in the closed position (as shown in Fig. 19), the F〇up4〇 moves forward to the position shown in Fig. 19. The sealing plate 208 moves downward to approach the FOUP4 until the concave surface 213 is located at the FOUP. In front or adjacent to the front face 46 of the upper flange 43. In the preferred embodiment, the population threshold 226 is not contacted. The velocity of the air passing through the proximity is fortunately sufficient to ensure any particles on the front surface 46 of the FOUP housing. It is known to be removed into the surrounding environment, rather than into the tool. In order to cooperate with the inclined surface 215 and the recessed surface 213 of the sealing plate, the upper portion of the loading port 226 has a concave surface 243. The concave surface 243 is from the loading threshold The back side of the face 230 When the population threshold and F〇upn扉 are combined to supplement the particles on the FOUP threshold and the population threshold, the population threshold covers the entire FOUP threshold. Figure 19 shows the entrance gate. When the F〇up threshold 42 is buckled, the loading port 230 surface 230 does not cover the entire F〇up 扉 surface 3. Therefore, the loading port 226 does not hit the FUP upper flange 43. The loading threshold 靡The recessed surface is preferably as small as possible in the loading gate sill surface 243 and the F〇up sill surface 31. The gap gl is determined by the tool interface and the thickness of the sealing plate. The thickness of the tool interface should be moved

As thin as possible to minimize the entrance surface 243 and F

The gap between gl. Non-face W. Although the loading threshold 226 is not flush with the FOUP threshold when it is coupled to the FOUP threshold 42, any particles on the exposed surface of the loading threshold 226 16 200824026 扉 42 should not be stored in F The wafer of the 〇Up4〇 is contaminated. The clean air laminar flow within the processing tool typically moves vertically from the upper end of the tool to the lower end of the tool. After the loading port 226 moves the FOUP threshold 42 into the tool, the laminar flow of air prevents the particles in the gap gl from moving up to the wafer w. In addition, the upper portion 242 of the loading portal is provided with a barrier to prevent particles in the gap gi from directly entering a clean area within the tool. The upper portion M2 of the loading port sill substantially protects the FOUP sill face 31 from being disturbed by the proximal air to prevent particles on the Fgup face 31 from being moved. Figure 20 shows a blowing system 28 that can be incorporated into the loading port 226, which can be latched to the load =, 226, at an intermediate position between the open position and the closed position as shown. The blowing system, the generalized entrance threshold US exposed to the outside = the cleanliness of the brother part. In this embodiment, the blowing system 28q includes a singer, a fan or a fan 282 having an intake σ 286 and a filter for filtering the air in the i. The blowing system, system 2 (shown by the arrow in Fig. 20). The $ π wire of the blower cover 284 preferably includes a cover and moves to the outside Si to include a removable module or a collection of blowing systems. 1 It is also possible to create a money flow. Age forced clean air = 1 hood 284 (see arrow), the number of particles attached to the exit surface 290 ", 'hunting this to reduce the pollution of the clean area of the processing tool. Or, do not need to do 20 ^ blowing system 280 The cleanliness of the fan 282 or 29 可 can be separately determined by (9) 丁目^疋^ 288. The exit surface escapes to the external environment. When the drum = exposed to the outer ring, 曰aa, ☆, hungry" Early "4 exit surface 290 treatment of the effect of dry matter contamination within the tool, the pressure difference will force Figure 21 77 strong - through the exit surface 290 to the external environment. Yet another embodiment of a non-adjustable sealing plate. In addition to other East 17 200824026 West, the loading port 300 includes a plate 3 具有 2 having a hole 304, a seal advancement assembly 306, and a load inlet sill 326. Ten Boards Figure 21 shows the load inlet 300 for operating the large capacity FOUP20. In this embodiment, the sealing plate 308 includes a stationary plate 310 and an adjustable plate 312. The adjustable flat 312 includes a recessed surface 322. The stationary plate 310 includes a recessed surface 314. The adjustable plate 312 is moved vertically (shown by arrows) relative to the plate 302. The movable adjustable plate 312 can control the size of the plate aperture 304. The stationary plate 31 can also include a machined surface of the plate 302. ^, the recessed surface 322 of the entire flat plate is in close proximity to the upper flange 43 of the FOUP. The recessed surface 314 of the stationary plate 310 forms a near seal with the lower flange 45 of the FOUP. Fig. 21 shows that even if the heights of the heights of the inlet sills are equal, the surface area of the surface Bo of the inlet sills is not equal to the surface area of 22. In order to cooperate with the sealing plate 3〇8, the loading port 靡 is moved to the surface 33〇, the first recessed surface 346, and the second recessed surface 348. Question 2, '(display) extends from the load port sill contact surface 33〇. In the face jack (not shown) in which F〇up is located in the day (4) UP (10) 22, the F0UP2() is placed on the container advancing assembly 306, and the container advancing plate 1 306 moves the FOUP to the advanced position (as shown in Fig. 21). In this position, the F〇up 45 forms a close seal with the recessed surface 314 of the stationary plate 310. The adjustable j-plate 312 is moved downwardly close to F〇up2〇 until the recessed surface appears to form a close seal with the F〇up scoop flange 43. The latch key is loose and the F〇up threshold 22 is buckled. i (fiifTpFGUP threshold is in contact with the thin surface. The threshold of the population is contacted with the surface of the surface. m β subsequent to the 31 does not need to be directly thinner. The population of the population (4) Ρϋ精 is separated from the PP 扉 31 31 by the interval d4. The interval d4 can be two: = 赚 平板 平板 平板 平板 平板 装入 平板 页 页 页 页 页 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作 操作The difference is caused by the 2-axis dynamic 327' load port threshold 326 (compared to the position shown in Figure 18 200824026 21) until the latch key is aligned with the latch key of 1?〇171> The position of the position = F〇UP threshold 42). The 2-axis actuator 327 can be, for example, a lead screw actuator to raise and lower the load port threshold 326 to align the question lock key with a FOUP of a selected capacity. In one embodiment, the 2-axis actuator π is also used to move the load port sill 326 between open and closed positions, wherein, when closed, the load port door 326 closes at least a portion of the hole 104, And when opening, by loading the entrance threshold, for example, by lowering the loading threshold to a lower position below and after the hole The hole is substantially unobstructed by the loading threshold. The boring actuator 329 is used to move the loading sill (and F〇up sill) into the interior of the processing tool to cause the FOUP threshold and loading. The port door can be lowered without colliding with the b〇lts plate. In the position shown in Fig. 22, the lower portion 344 of the loading door sill covers the plate 3〇2 and the plate 310. The lower flange 45 of the FOUP is still with the stationary plate. The recessed surface 314 is smothered and sealed. The adjustable flat plate 312 is moved downward until the concave surface 112 forms a close seal with the upper flange 43 of the FOUP. The adjustable flat plate 312 effectively reduces the flat hole 304 The height is up to the actual height of the FOUP 4 以 to prevent the sub-entry into the tool 11. In this embodiment, the need to recess the surface of the population threshold is more pronounced. The upper flange 43 of the adjustable plate 31WF〇up and the loading threshold The recessed surface 346 is transported between the recessed surface 314 of the stationary plate and the recessed surface 348 of the load port sill. 3 you can include a table of holes or enamel holes The perforated or porous surface allows for the surface of each recess to help minimize the collection of surfaces 346 and 348, such as, but not limited to, fans, filters, or processing tools. The atmospheric pressure difference provides the desired air flow. Figures 23-24 show the loading port 4. In this embodiment, the plate 402 carrying the inlet 4〇〇404, the container subassembly 406, and the sealing plate 4〇 8 and load = door non-426. The sealing plate includes a stationary plate having a recessed surface 414, and an adjustable plate 412 having a recessed surface 422. The loading port 扉 426 includes 30, and may also include extension features 436 and 438 (shown in phantom in FIG. 23): 19 200824026 ^ In the embodiment, the extended features 436 and 438 are from the pi-gamma feature 436. And 438 can have other lengths. As will be more detailed, the adjustable plate 412 and the stationary plate 41 are each formed in a close seal with the upper I flange 45 of the F〇up (opposite the front face of each flange, as in the embodiment of Figures 21-22). Shown). u Figure 23 shows the loading port 400 operating a large capacity F〇up2〇. The operation up is mounted on the container forward assembly of the moving FOUP 20 toward the flat plate 402. At the position shown in Fig. 23, the stationary flat plate 410 and the lower convex portion of F〇i, and the Mori 45 form a close seal. The adjustable flat plate 412 and the upper projection of the F〇up form a proximity seal. In this embodiment, the sealing plate and the upper and lower flanges 43, 45 are sealed with the surface of each flange material and are not the front faces of the respective flanges. For example, the exterior of the recessed surface illusion 2 of the adjustable plate 412 and the upper wire 25 form a proximity seal. The stationary plate 41. The recessed surface 414 and the lower flange 45 form a proximal seal. In one example, the entrance threshold 426 does not require any recessed surface to fit the 〇ΐΓϋ3〇ΐΓϋ or the stationary plate 410. Loading the front surface of the port 扉 426;;, complementing between the faces 4TM (10) 22

Her 特征 features 436 and 438 help prevent particles from entering the processing tool. Each slightly overlaps the individual sealing plates. The extended feature 436 slightly flattens the recessed surface 422 of the 412 412 to enclose or minimize airflow, the gap between the slab (10), the adjustable plate, and the sealing plate.武3 tf^ 438 slightly overlaps the concave surface 414 of the stationary plate 410 to close the airflow, and the airflow will enter the population threshold, the stationary plate, and the F0UP=% mail container (4) fine structure, Figure 24 shows The entrance 4〇〇 operates a small capacity F〇up4〇. Small capacity 20 200824026 into the f 406. When, for example, the container advancement assembly 4〇6 is removed from the container, the small capacity F〇UP40 is placed on the container advancement assembly, and the load is changed, and vice versa. The front surface of the manned σ threshold is 43 〇. The area of the two sills 42. When the F〇UP40 is located at the front position, the load is flat and the second side is 430. The two sides 430 are heavy enough to adjust the concave surface 422 of the flat plate 412 and the concave surface 414 of the static ten plate 410. The operation of the plate 408 is as described in Figure 23 above with the "i t;:TM ^ cup 4m Ϊ 勺 勺 scoop recessed surface 414 forming a proximal seal. Adjustable You form a close seal. § The outer surface of the recessed surface 422 and the upper flange 43 is 432 ^ α . The non-526 twist and height Β extend. In this embodiment, the height of the load 526 is 'high=Fig.:;; there is: an embodiment in which each of the pairs is selected (four) to ask for a lock key jack, wherein - the flash lock key can be significantly reproduced from Fig. 25C. Move to the second height of the other-pair lock key jack. ^ Π 4 ; 26 , 432 When the large-capacity chat 2g is operated (not shown in the day m. twice. When the load port 400 operates the small-capacity FOUP40 = (not shown in Figure 25), the height B is the preferred height. For example, when the H40 screen assembly 406 is on, the height of the vertical axis of the FOUP is a vertical center line of the 靡U threshold. The ΐ=Γ, the spring position of each horizontal direction is said to be above and below the threshold. The midpoint has and the door lock key extends from the load port threshold 426. The lock button can be moved manually between the height A and the height B by the hand 21 200824026. The automatic composition shown in Fig. 25A The latch key pair 432 can be extended or retracted by the latch key mechanism 433. For example, the latch key mechanism 433 in the loading port 426 can be coupled to extend the latch key from the height A. Pair 432 of pivot means (not shown) while simultaneously retracting another pair of latch keys 432 at height B. ^Manual composition of Figure 25B, load port threshold 426 may include four jacks 437' each for To accommodate a latch key 435. Two jack milks are located at height a, and the other two jacks 437 are located at height B. When large capacity F〇UP20 is located The feed plate 106 has a pair of latching keys 435 inserted into the receptacle 437 at height A. The next loadport sill 426 can also have four 432 that extend all the way from the load portal 426, as shown in Figure 25C. The F〇UP threshold includes receiving four if_key jacks. In the embodiment, only four questions are operated, two of the keys are loose or the ship's threshold is closed. The other two (10) The key action ^ is the same as the passive (10) key. The Langji is separated far enough, the small capacity f〇u 1 can still only include two _ lock key jacks, and only the wall is combined with two of the four jacks of the manned The F〇up on the advancing plate 106 is a small capacity F〇UP4〇, and the latch key pair 435 can be moved (for example, by an operator) from the jack 437 at the height A and inserted at the height B. The jack 437 is indicated by, for example, an arrow. In one embodiment, the single flash key drive drives all four jacks at any time, regardless of which jacks the flash lock button 432 is to be inserted. The key pair 432 extending from the entrance threshold 426 will engage the latch key hole in the FOUP threshold. When the loading port is waiting for FOUP At the time, each of the above-mentioned adjustable sealing plates = in the anti-contamination load inlet threshold. As shown in Figure 2, the second is a F 〇 UP 'exposure the loading door 扉 surface 30 to the surrounding ring = Π i Ϊ The inlet _ 426 may collect contaminants or particles. In order to open the sealing plate shown in Fig. 18, the first plate can be lowered to the recessed surface 210 of the contact tool interface 202. At 22 200824026 When the loading port 200 is not in operation, the sealing plate 208 covers the loading port sill surface 230 and prevents particles from contacting the loading door sill surface 23A. The sealing plate 2〇8 does not need to completely cover the loading door sill surface 230. The sealing plate 208 can be lowered to only partially cover the inlet sill surface 230. When F0Up is loaded over the support assembly 2〇6, the second plate 208 rises to a position equivalent to the size of the FOUP. Mountain, Figure 26-28 shows the loading port 600. In this embodiment, the load port 6 includes a flat plate 602 having a flat hole 604, a container advancement assembly 606, and a load port threshold. Plate 602 includes a recessed surface (such as lower surface 614 and upper surface 616 as shown in cross-section). The load port 扉 626a includes at least one latch key = 2 extending from the front surface 63A. In this embodiment, the container advancement assembly 6〇6 includes a uranium feed assembly for vertical adjustment that is raised and lowered for a straight period of π weeks. The load inlet 600 can be used to align the F〇up=lock key socket and Smart key 632. In one embodiment, the lifter uses a lead screw machine, 0 (Fig. 26) to raise the capacity of the advancement assembly. The lead screw mechanism is well known in the art; therefore, no further step-by-step instructions are required. Other elevated devices include an actuator, a ribbon drive, etc., which can also be used to vertically open the valley feed assembly 606. Figure 26 shows the load port 6 〇〇 operating large capacity F〇up2〇. On Γΐί f = in, _ (can be at any height). The TM is set to 容, / and 6 days, if the FOUP latch key is not aligned with the latch key =, the V screw mechanism 610 will raise the container forward assembly 6 〇 6 straight 632. Next, the container advances the flat plate 612 horizontally _=〇, toward ^ 602 ' until the upper flange 43 and the lower flange 45 of the F0up are freshly plated. The loading port 靡 flash lock button 632 releases the F 〇 W 扉 22, and the FOUP 20 穸 2 2 is coupled to the loading port 扉 626a. Next, the entrance threshold 626a is loaded and the F0UP threshold 22 is moved into the tool. ..., then you can access the wafers stored in F〇up2〇. -斟ΪΓ^ shows the loading port _ operation small capacity just (10). In this embodiment, the sealing plates 618 and 620 are sealed to the plate to reduce the thickness of the plate holes. The sealing plate 618 is sealed to the concave surface of the flat plate 602 by the holder 626b. 200824026 ==41 The sealing plate (4) is sealed by the fixing device 628 to the depression of the flat plate 6G2, and the temple is read on the flat plate 602, or is always tested. ==:: into the manned D_ gift operation large capacity; ^ 壬, small capacity F 〇 UP4G set in the container forward component _ on (can be located Ϊ ° FQUP4 () set on the capacity «_ 6% on the The financial dependence depends on (4) If the target is from the touch), the guide 632 = 133 into the group, 1 Qing? Which built-in jack pair lock button is facing flat i 602. Pickup, container face plate 612 horizontal F〇UP40 flange = amount / ΓΓ will first face the plate 6 〇 2 ' until the front flange _UP convex, the upper 邛 of the 彖43, and the lower flange of the front flange The lower end of the front end portion 622 _ the edge 45 and the front surface of the front end of the flat plate 618 (10) 43 or the lower surface of the lower projection, the lower surface of the crucible 45 may form a close seal with the sealing plate. Loose ==== two

= Figure 15-28 of the lead screw mechanism (10) or any other such technology can be seen and can not be compared with other container cutters or containers of Figure 4_25 _J Figure 27 shows the tf as shown in Figure 27 An embodiment of FIG. 27 includes an automated top seal = Γ by the HIT board 640 that can be retracted into the slots 65 and 652, respectively. The automated upper sealing plate 638 and the lower sealing mountain plate are operated by automated actuators 646 and 648. It will be appreciated by those skilled in the art that other 24 200824026 automated sealing plates are also possible. The loser is the above-mentioned loading port and the related mechanism for matching and operating different sizes is only for the purpose of scale, and the present invention is not limited thereto. Knowing the skills ☆ Those who know that the above method is based on the health of the m, can reach the advantages of tir. It is also to be understood that within the scope and scope of the invention, various variations, modifications and substitutions are possible. For example, the description of the port and F0UP described and depicted in the content can be equally implemented in the context of a simple description of the drawing. FIG. 1 is an isometric view of an embodiment of the FOUP according to the prior art. 2 is an isometric view of an embodiment of the prior art 'loading port; FIG. 3 is a cross-body SJ of different components of the side height of the population as shown in FIG. 2; FIG. 4 is a loading port Figure 5A is a side cross-sectional view of the loading port shown in Figure 4; Figure 5B is a detailed view of the upper portion of Figure 5A; Figure 6 is a front view of another embodiment of the loading port; Figure 7 is a schematic view of an embodiment of the loading port; Figure 8 is a front view of the embodiment of the loading door sill; Figure 9 is a small operation of the loading port sill shown in Figure 8 1 is a front view; a side view; a schematic view n is an overview of an embodiment of a load carrying large capacity container in Fig. 1A. Fig. 12 is a front view of still another embodiment of the load port threshold. Fig. 13 For the loading door shown in Figure 12, Figure 14 is a container for the loading of the door. (4) is a front view of the capacity container as shown in Fig. ;; a side view of the inlet sill inserted into the large capacity container: 25 200824026 Fig. 16 is a perspective view of a different embodiment of the stationary sealing plate; Figure 18 is a schematic view of another embodiment; Figure 19 is a schematic view of another embodiment; Figure 20 is a schematic view of another embodiment of the loading port shown in Figure 19; Figure 21 is a schematic view of another embodiment; Figure 22 is a schematic view of still another embodiment; Figure 23 is a schematic view of another embodiment; 24 is a schematic view of the operation of the small-capacity container as shown in FIG. 23; FIGS. 25A, 25B, and 25C are implementations having a loading port threshold and a retractable, re-shiftable, or multiple latching keys. Figure 26 is a schematic view of another embodiment; a schematic view of the inlet operation small-capacity container shown; a schematic view of an alternative embodiment of the loading port shown; The mouth is smashed. Private sketch, showing no small capacity (4) II ··Processing tool range 18 : Hole 19 : Air

20 : FOUP 22 = FOUP Threshold 23 : Loading port assembly 24 : Housing 25 : Advancing plate 凼 : Loading port 扉 27 : Locating pin 26 200824026 28 : Processing tool 30 · Loading port 30'a : Front surface 31 : Front side 32: Latch key 33: Latch key jack 36: BOLTS tablet interface

40: small capacity FOUP 41 ·· FOUP sill surface 42 ·· FOUP sill 43 : upper flange 43 ′ : upper surface 44 ·· FOUP sill surface 45 : lower flange 45 ′ : outer surface 46 : housing front surface 100 · Variable load port 102: tool interface 103: recessed surface 104: plate hole 106: container advancement assembly/support assembly 107: adapter 108: seal assembly 110: inclined surface 110' · sloping surface 112 · sag Surface 112' · recessed surface 116: sealing plate 116': sealing plate 27 200824026 116": sealing plate 118': hole 118": hole 120: inclined surface / recessed area 122: concave surface 124: upper 125: terminal end Portion 126: Load entry threshold 127: Bottom 128': Hole 128": Hole 129: Latch key cover 130: Load entry door surface 131 · Latch key cover 132: Latch key 140: Extension plate 140' : extension plate 140": extension plate 142 · · extension plate surface 144 · first extension plate 144': extension plate surface 144": extension plate surface 146: second extension plate 148: extension plate surface 150 • • extension plate surface 2 (8): loading port 202: tool interface 204 : hole 206 · container advancement component 200824026 208: sealing plate 210 · inclined surface 212 · concave surface 212a: flat surface 213 · concave surface 215: inclined surface 219: arrow 225 · · plate 226: loading threshold 扉 230 : loading door sill surface 231 ·· loading door sill upper surface 242 ·· loading sill upper 243 : recessed surface 280 · blowing system 282 : fan 284 : outer cover 286 : air inlet 288 : filter 290 : Outlet 300: Loading inlet 302: Plate 304: Hole 306: Container support assembly 308: Sealing plate 310: Stationary plate 312: Adjustable plate 314: Concave surface 322 · Depression surface 326: Loading port threshold 200824026 327: z Axis actuator 329: y-axis actuator 330: contact surface 344: lower portion 346 of loading port sill: recessed surface 348 · recessed surface 400: loading port 402: plate 404: plate hole 406: container support assembly 408 : Sealing plate 410 : stationary plate 412 : adjustable plate 414 · recessed surface 422 : recessed surface 426 · · loading door 扉 430 : loading door sill front surface 432 : latching key 433 · · latching key mechanism 435 · ·Latch key 437: Latch key jack 436: extension feature 438: extension feature 526: load port 扉 6 (8) · port 602: plate 604: plate hole 606: container advancement component 610: lead screw mechanism 200824026 612: container Advancing plate 614: lower surface 616: upper surface 618: sealing plate 620: sealing plate 622: distal end portion 624: distal end portion 626 · loading port threshold 628: holder 630: front surface 632: latching key 638: Upper sealing plate 640: lower sealing plate 646: actuator 648: actuator 650: slot 652: slotted

Claims (1)

200824026 X. Patent application scope: 1. A variable-volume loading inlet assembly, comprising: a tool interface, extending substantially in the vertical dimension to the front surface of the tool interface - the front surface, the "^ surface has a face-to-face, and a Hole; m Haiyue surface - back table - load ΠΗ扉 'where the population threshold has a position 'When the loading gate is in the closed position』 j is activated when the π Η扉 position is in the open position The hole is blocked by the mouth; the babe is not doubled to the bottom of the loading hole, the near item ί, the forward position is earned (4) 卩 = drop the key, wherein, by changing the advance &amp; degree has -_ key insert ^ qing qing p 'fine number of different capacity each different height 2 · such as two = profit range of the item of the variable batch of the entry component, including: part of the hole ^ ^ f 11 ^ on the working face - like to cover the hole flange i into a close contact ' ^ ^ upper sealing plate shape is set to be able to be one of the front end of the F 〇up 邱 邱 具有 has a fixed at the lower end of the tool interface And covering the hole flange close to the dense 3. 'Binding sealing plate The shape is set to be FQUP-free. The first 32 is the same as the upper part of the front flange; the upper part is formed close to the upper part of the front flange; the mouth, and the piece, wherein the upper mil A variable-volume loading inlet assembly, wherein: a continuous recessed shoulder of one of the upper holes of the 'Hay hole'; and a lower sealing flange formed by the 'J flange of the month of the FOUP The proximity seal; and, as such, to the front of the FOUP: ====shoulders' and extending upwards up to the variable inlet of the load item just in the mouth item, wherein the loading, , the size of the smaller hole in the hole 'the variable batch of the inlet component further includes: one of the upper part of the hole; and the closed position ====, when the population threshold is located in the τι ^ ^, , / I The upper sill of the loading sill extends vertically upward to close one of the holes. The lower slab can be directly configured: the loading port assembly, wherein the advancing device advances the assembly; and: the dead: and the hoist is located The second feeling: the forward component is directly placed on the forward component of the container. The location of the tablet is higher. 7. If the variable population component of the patent application section is applied for, the lift 33 200824026 mouth 匕 δ is used to raise and lower the advancement of the advancement plate. Please refer to the variable-volume population component of item 7 of the patent scope, in which the descendant includes a lead screw mechanism. The 1&amp;1 variable-capacity population component of the first item, including the installation Tuesday ^Replacement of the static flat is reversed. 'The stationary plate closes the hole 22-2; The stationary plate has the -reduced hole'. The size and shape of the reduced hole are recognized as 14 Fenix-family-FQUp axis close-up (4). The patented sigma component of the variable batch of the patent item i includes the inside of the installation: the door panel has a size for the latch key to extend through the shape of the selected wire amount fp (10) and 11. A variable batch load port assembly, comprising: the tool interface positive dimension extension, the tool interface having a face-to-face, and - hole domain face, substantially parallel to one of the front faces, and a watch Retracting position and one type of concentrated wafer cassette boring hole one of the FOUP front flange 2: ' ί upper sealing plate shape is set to cover the hole under the sealing plate, with the lower end of the I interface - and 34 200824026, one of the upper ends of the portion, the lower sealing plate is shaped to form a close seal with the flange, the upper portion of the upper portion and the lower portion of the upper portion of the upper portion of the upper portion of the upper portion of the flat plate The variable tooling of the item includes a continuous recessed shoulder ρ around the hole. The front flange forms the proximal seal; f', just above the table, to the top of the table. ΪγΪτΓ密Attached to the plate line _ recess portion, and extends on the lower of the n -τ Langqia good heteroaryl bribes of the flange, the flange is formed near the joint seal.可变fUUP's patent range Scope u of the variable batch loading component, including a verification, one of the _roup thresholds can be directly displaced for the capacity, and the elevator includes a container advancement component and the advancement One of the connectors between the plates; the advancing plate is raised to a position higher than the position at which the advancing plate is located when the container advancement assembly is directly disposed. The </ RTI> </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; </ RTI> <RTIgt; 35 200824026 17·—A variable-volume loading inlet assembly, including a tool interface, extending substantially in the vertical dimension to the front surface, the front surface, and the substantially flat position door-opening ===扉 position in the opening In the position, the hole 4=== contains: the middle wafer ^' __ 奸 - front open set, a forward flat plate, facing the front side of the tool interface, the horizontally extending flat plate extends substantially horizontally and is used Support type ▲ : ^ near 忒 tool; I face, and the retracted position away from the tool interface; and the hole stop SiC face 'the stationary plate closed = size and shape is set to be able to have her; the extension plate from the The threshold of the population is extended upwards and downwards to match the shape and shape. The size of the 扉 扉 ί 降 降 器 器 器 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变 可变