200823444 九、發明說明： 【發明所屬之技術領域】 本發明涉及一種調制傳遞函數值量測板及使用該量測 <板之测量裝置，尤其涉及一種鏡頭調制傳遞函數值之測量 裝置。 【先前技術】 調制傳遞函數（Modulation Transfer Function，簡稱 馨MTF)值係對鏡頭之銳度，反差及解析度進行綜合評價之表 數。於光學産業而言，經常需要對鏡頭之MTF值進行測量。 鏡頭調制傳遞函數值測量裝置通常包括一測試板，_ 固定有圖像感測器之調制傳遞函數值量測板，以及一驅動 單元。所述測試板上具有測試圖案。所述圖像感測器用於 感測該測試板上的測試圖案經由所述待測鏡頭於該圖像感 测器上的成像。所述驅動單元用於驅動所述待測鏡頭於測 試板與調制傳遞函數值量測板之間沿該待測鏡頭之光軸方 籲向移動，以使該測試板上的測試圖案於所述圖像感測器上 形成最佳成像。測量時，一般是於所述圖像感測器上獲得 最佳成像之後，由圖像感測器之晝素所感測之測試圖案成 像亮度之強度值計算出待測鏡頭之調制傳遞函數值。 然，由於在測量過程中圖像感測器與待測鏡頭之間的 距離通常很小，尤其是在測量手機或數位相機等小型電子 產品中的鏡頭時’常常會有鏡頭撞擊到圖像感測器的現 象，若發生撞擊之後驅動單元沒有立即停止，則會造成圖 像感測器、鏡頭’以及驅動單元等的嚴重損壞。 7 200823444 有繁於此’有必要提供-種可偵測撞擊之調制傳遞函 數值量測板，以及使用該量測板之調制傳遞函數值測量裝 -置’以免於測量過程中産生撞擊造成測量裝置及待頭 •的損壞。 項 【發明内容】 下面將以具體實施例說明-種可偵測撞擊的調制傳遞 函數值量測板，以及使用該量測板之調制傳遞函數值測旦 裝置。 、里 一種調制傳遞函數值量測板，其包括一基板，一固定 於該基板上的圖像感測器，以及一裝設於該基板上的震^ 感測器，該震動感測器用於感測該基板的震動。 以及，一種調制傳遞函數值測量裝置，用於測量待測 鏡頭^調制傳遞函數值，其包括一測試板，一調制傳遞函 數值量測板，及一驅動單元。所述測試板上具有測試圖案。 所述調制傳遞函數值量測板包括一基板，一固定於該基板 #上的圖像感測！，以及一裝設於該基板上的震動感測器， 所述圖像感測器用於感測所述測試板上的測試圖案經由所 述待測鏡頭於該圖像感測器上的成像，所述震動感測器用 於感測該基板的震動。所述驅動單元用以使所述待測鏡頭 與調制傳遞函數值量測板沿該待測鏡頭之光軸方向産生相 對移動，當該待測鏡頭與圖像感測器發生碰撞時，所述震 動感測益旎夠感測該基板的震動並産生一控制訊號以使驅 動單元停止工作。 相較於先前技術，所述調制傳遞函數值量測板包括一 8 200823444 裝設於所述基板上的震動感測器，其可感測該基板的震 動，由於所述圖像感測器固定於該基板上，因而該震動感 -測器可同時感測該圖像感測器的震動。所述使用該量測板 -的調制傳遞函數值測量裝置，其於測量待測鏡頭之調制傳 遞函數值時，所述驅動單元於使該待測鏡頭與調制傳遞函 數值量測板沿該待測鏡頭之光軸方向產生相對移動，以使 該測試板上的測試圖案於所述圖像感測器上獲得最佳成像 之過程中，當該待測鏡頭與圖像感測器發生碰撞時，所述 擊震動感測器可感測到該圖像感測器及調制傳遞函數值量測 板基板之震動，此時該震動感測器可產生一控制訊號，以 使驅動單元立即停止工作，從而可避免造成測量裝置及待 測鏡頭的嚴重損壞。 【實施方式】 下面將結合附圖對本發明實施例作進一步詳細說明。 參見圖1，本發明第一實施例所提供之調制傳遞函數 魯值量測板100’其包括一基板110, 一固定於該基板u◎上 的圖像感測器120’以及一裝設於該基板110上的震動感測 器 130。 所述圖像感測裔120可爲電荷耦合圖像感測器或互補 金屬氧化物半導體圖像感測器。 所述震動感測器130可爲水銀電阻式震動感測器。該 水銀電阻式震動感測器可根據其電阻值之變化來感測所述 基板110是否有震動。當然，該震動感測器130亦可爲滚 珠震動開關或磁簧開關。 9 200823444 所述調制傳遞函數值量測板100進一步包括一支撐裝 置140，用於支撐所述基板110。該支撐裝置140包括一基座 、142，一主體144，一與該基座142滑動連接的第一磁性套環 .141，一第二磁性套環143及一第三磁性套環145。該第二、 第三磁性套環143、145與所述基座142固定連接且分設於所 述第一磁性套環141之相對兩侧。所述主體144依次穿過第 二、第一及第三磁性套環143、141及145，並與該第一磁性 套環141固定連接。該主體144之一端1442爲自由端，相對 的另一端1444與所述調制傳遞函數值量測板1〇〇之基板11〇 固定連接。該主體144於所述第一、第二及第三磁性套環 141、143及145之間的磁力作用下維持於一平衡位置。 所述基座142大體相對於第一磁性套環141之位置設有 一 ^執1422。優選的’該第^ —磁性套環141藉由^^連接臂 1412與所述導執1422活動連接。該連接臂1412能夠帶著該 第一磁性套環141沿該導軌1422滑動。優選的，所述第二、 丨第三磁性套環143、145分別藉由一連接臂1432、1452與所 述基座142固定連接。 參見圖2,本發明第二實施例所提供之使用上述調制傳 遞函數值量測板100之調制傳遞函數值測量裝置200，其包 括一測試板210，一調制傳遞函數值量测板1〇〇，以及一驅 動單元220。該調制傳遞函數值測量裝置200用於測量鏡頭 300之調制傳遞函數值。 所述测試板210上具有測試圖案，如黑白相間之條紋。 所述調制傳遞函數值量測板1〇〇包括一基板11〇，一固 200823444 定於該基板110上的圖像感測器120，以及一裝設於該基板 110上的震動感測器130。所述圖像感測器120可爲電荷耦合 •圖像感測器或互補金屬氧化物半導體圖像感測器，其用於 -感測所述測試板210上的測試圖案經由所述待測鏡頭300於 該圖像感測器120上的成像。所述震動感測器130可爲水銀 電阻式震動感測器，該水銀電阻式震動感測器可根據其電 阻值之變化來感測所述基板110是否有震動，例如，測量過 程中待測鏡頭300—接觸到圖像感測器120，該水銀電阻式 着震動感測器130之電阻值會立即産生變化，則表明所述基板 110有震動，當然，該電阻值之變化還可以反應出該基板11〇 相對於其初始位置之傾斜角度，進而可根據該傾斜角度使 該基板110恢復至初始位置等。 所述調制傳遞函數值量測板100進一步包括一支撐裝 置140，用於支撐所述基板11〇。該支撐裝置14〇包括一基座 142，——主體144，一與該基座142滑動連接之第一磁性套環 肇141，一第二磁性套環143及一第三磁性套環145。該第二、 第三磁性套環143、145與所述基座142固定連接且分設於所 述第一磁性套環141之相對兩側。所述主體144依次穿過第 二、第一及第三磁性套環143、141及145，並與該第一磁性 套環141固定連接。該主體144之一端1442爲自由端，相對 的另一端1444與所述調制傳遞函數值量測板1〇〇之基板110 固定連接。該主體144於所述第一、第二及第三磁性套環 141、143及145之間的磁力作用下維持於一平衡位置。 所述基座142大體相對於第一磁性套環141之位置設有 11 200823444 一導軌1422。優選的，該第一磁性套環ι41藉由一連接臂 1412與所述導執1422活動連接。該連接臂1412能夠帶著該 '第一磁性套環141沿該導轨1422滑動。優選的，所述第二、 ^第三磁性套環143、145分別藉由一連接臂1432、1452與所 述基座142固定連接。 可以理解，所述第二、第一及第三磁性套環143、141 及145可以爲電磁鐵，且磁極及磁場強度可以調節，其磁極 可以以S-N、N-S、S-N或N-S、S-N、N-S之順序排列，亦可 •以以N-S、N-S、N-S、或者S-N、S_N、S-N之順序排列，只 要於第一、第二及第三磁性套環141、143及145之間能産生 力平衡即可。 所述驅動單元220可爲一電機，用於驅動所述待測鏡頭 300或調制傳遞函數值量測板〗〇〇，使該待測鏡頭3〇〇與調制 傳遞函數值量測板100沿該待測鏡頭3〇〇之光軸方向産生相 對移動，以使所述測試板210上的測試圖案於所述圖像感測 ⑩器120上獲得最佳成像。本實施例中，該驅動單元22〇用於 驅動所述待測鏡頭300於所述調制傳遞函數值量測板1〇〇與 測試板210之間沿該待測鏡頭3〇〇之光軸方向移動。 於使用本實施例所提供之調制傳遞函數值測量裝置 200對待測鏡頭300進行測量時，當該待測鏡頭3〇〇於驅動單 兀220之驅動下，於所述測試板21〇與調制傳遞函數值量測 板100之間沿該待測鏡頭300之光軸方向移動，以使該測試 板210上的測試圖案於所述圖像感測器12〇上獲得最佳成像 之過程中，當該待測鏡頭3〇〇與圖像感測器12〇發生碰撞 12 200823444 時，所述震動感測器130即可感測到該調制傳遞函數值量測 板100之基板110及圖像感測器120之震動，此時該震動感測 、器130可産生一控制訊號，如控制報警器報警之訊號或控制 β水銀電阻值變化之反饋訊號，進而可自動或手動使驅動單 元220立即停止工作，而且，若待測鏡頭300與圖像感測器 120之間撞擊力較大時，所述第一、第二及第三磁性套環 141、143及145之間的力平衡會被破壞，此時，該第一磁性 套環141之連接臂1412會帶動該第一磁性套環141於所述基 ⑩座142之導執1422内滑動，進而帶動所述支撐裝置140之主 體144及調制傳遞函數值量測板100 —起滑動，對待測鏡頭 300與圖像感測器120之間的撞擊力形成一缓衝，從而可避 免造成整個測量裝置200及待測鏡頭300之嚴重損壞。 當然，可以理解，所述震動感測器130亦可爲其他可偵 測震動之裝置，如滾珠震動開關或磁簧開關等，只要當待 測鏡頭300與圖像感測器120發生碰撞時，其能夠感測該圖 0像感測器120及所述基板110之震動，並能産生一控制訊號 以使驅動單元220停止工作即可。 綜上所述，本發明確已符合發明專利要件，爰依法提 出專利申請。惟，以上所述者僅為本發明之較佳實施例， 舉凡熟悉本案技藝之人士，於援依本案發明精神所作之等 效修飾或變化，皆應包含於以下之申請專利範圍之内。 【圖式簡單說明】 圖1係本發明第一實施例所提供之量測板之結構示意 圖。 13 200823444 圖2係本發明第二實施例所提供之調制傳遞函數值測 量裝置使用狀態示意圖。 、【主要元件符號說明】 調制傳遞函數值量測板 100 基板 110 圖像感測器 120 震動感測器 130 支撐裝置 140 第一磁性套環 141 連接臂 1412、1432、 1452 基座 142 導執 1422 第二磁性套環 143 主體 144 主體之一端 1442 主體之另一端 1444 第三磁性套環 145 調制傳遞函數值測量裝置 200 測試板 210 驅動單元 220 待測鏡頭 300BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a modulation transfer function value measuring plate and a measuring device using the same, and more particularly to a measuring device for a lens modulation transfer function value. [Prior Art] The Modulation Transfer Function (Minimum MTF) value is a comprehensive evaluation of the sharpness, contrast, and resolution of the lens. For the optical industry, it is often necessary to measure the MTF value of the lens. The lens modulation transfer function value measuring device usually includes a test board, a modulation transfer function value measuring plate to which an image sensor is fixed, and a driving unit. The test board has a test pattern. The image sensor is configured to sense imaging of the test pattern on the test board via the lens to be tested on the image sensor. The driving unit is configured to drive the lens to be tested to move along the optical axis of the lens to be tested between the test board and the modulation transfer function value measuring board, so that the test pattern on the test board is in the Optimal imaging is formed on the image sensor. In the measurement, after the optimal imaging is obtained on the image sensor, the modulation transfer function value of the lens to be tested is calculated from the intensity value of the test pattern image brightness sensed by the pixel of the image sensor. However, since the distance between the image sensor and the lens to be tested is usually small during the measurement process, especially when measuring a lens in a small electronic product such as a mobile phone or a digital camera, the lens often hits the image. The phenomenon of the detector, if the drive unit does not stop immediately after the impact, it will cause serious damage to the image sensor, the lens 'and the drive unit. 7 200823444 There is a need to provide a kind of modulation transfer function value measuring board capable of detecting impact, and using the modulation transfer function value measuring device of the measuring board to avoid the impact caused by the measurement process. Damage to the device and the head. SUMMARY OF THE INVENTION Hereinafter, a modulation transfer function value measuring plate capable of detecting an impact and a modulation transfer function value measuring device using the measuring plate will be described by way of specific embodiments. A modulation transfer function value measuring plate comprising a substrate, an image sensor fixed on the substrate, and a seismic sensor mounted on the substrate, the vibration sensor being used for The vibration of the substrate is sensed. And a modulation transfer function value measuring device for measuring a value of the modulation lens to be measured, comprising a test board, a modulation transfer function value measuring board, and a driving unit. The test board has a test pattern. The modulation transfer function value measuring board comprises a substrate, and an image sensing fixed on the substrate #! And a vibration sensor mounted on the substrate, the image sensor is configured to sense imaging of the test pattern on the test board via the lens to be tested on the image sensor, The shock sensor is for sensing the vibration of the substrate. The driving unit is configured to cause a relative movement between the lens to be tested and the modulation transfer function value measuring plate along the optical axis direction of the lens to be tested, when the lens to be tested collides with the image sensor, The vibration sensing is sufficient to sense the vibration of the substrate and generate a control signal to stop the drive unit from operating. Compared with the prior art, the modulation transfer function value measuring board includes an 8 200823444 vibration sensor mounted on the substrate, which can sense the vibration of the substrate, because the image sensor is fixed. On the substrate, the vibration sensor can simultaneously sense the vibration of the image sensor. The modulation transfer function value measuring device using the measuring plate, wherein when the modulation transfer function value of the lens to be tested is measured, the driving unit causes the measuring lens and the modulation transfer function value measuring plate to be along the The relative direction of the optical axis direction of the measuring lens is such that the test pattern on the test board is optimally imaged on the image sensor, when the lens to be tested collides with the image sensor The shock sensor can sense the vibration of the image sensor and the modulation transfer function value measuring board substrate, and the vibration sensor can generate a control signal to stop the driving unit immediately In order to avoid serious damage to the measuring device and the lens to be tested. [Embodiment] Hereinafter, embodiments of the present invention will be further described in detail with reference to the accompanying drawings. Referring to FIG. 1 , a modulation transfer function LU value measuring plate 100 ′ according to a first embodiment of the present invention includes a substrate 110 , an image sensor 120 ′ fixed on the substrate u ◎ , and a device mounted on the substrate The vibration sensor 130 on the substrate 110. The image sensing source 120 can be a charge coupled image sensor or a complementary metal oxide semiconductor image sensor. The vibration sensor 130 can be a mercury resistive vibration sensor. The mercury resistive vibration sensor can sense whether the substrate 110 is vibrated according to a change in its resistance value. Of course, the vibration sensor 130 can also be a ball vibration switch or a reed switch. 9 200823444 The modulation transfer function value measuring plate 100 further includes a supporting device 140 for supporting the substrate 110. The support device 140 includes a base 142, a main body 144, a first magnetic collar 141 slidably coupled to the base 142, a second magnetic collar 143 and a third magnetic collar 145. The second and third magnetic collars 143 and 145 are fixedly connected to the base 142 and are disposed on opposite sides of the first magnetic collar 141. The main body 144 passes through the second, first and third magnetic collars 143, 141 and 145 in sequence and is fixedly coupled to the first magnetic collar 141. One end 1442 of the main body 144 is a free end, and the other end 1444 is fixedly connected to the substrate 11A of the modulation transfer function value measuring board 1 . The body 144 is maintained in an equilibrium position by the magnetic force between the first, second and third magnetic collars 141, 143 and 145. The base 142 is generally provided with a handle 1422 relative to the position of the first magnetic collar 141. Preferably, the magnetic collar 141 is movably coupled to the guide 1422 by a connecting arm 1412. The connecting arm 1412 can slide along the guide rail 1422 with the first magnetic collar 141. Preferably, the second, third magnetic collars 143, 145 are fixedly coupled to the base 142 by a connecting arm 1432, 1452, respectively. Referring to FIG. 2, a modulation transfer function value measuring apparatus 200 using the above-described modulation transfer function value measuring board 100 according to a second embodiment of the present invention includes a test board 210 and a modulation transfer function value measuring board. And a drive unit 220. The modulation transfer function value measuring means 200 is for measuring the modulation transfer function value of the lens 300. The test board 210 has a test pattern, such as black and white stripes. The modulation transfer function value measuring board 1 includes a substrate 11 , an image sensor 120 fixed on the substrate 110 , and a vibration sensor 130 mounted on the substrate 110 . . The image sensor 120 may be a charge coupled image sensor or a complementary metal oxide semiconductor image sensor for sensing a test pattern on the test board 210 via the test Imaging of the lens 300 on the image sensor 120. The vibration sensor 130 can be a mercury resistance type vibration sensor, and the mercury resistance type vibration sensor can sense whether the substrate 110 has vibration according to a change in the resistance value thereof, for example, the measurement process is to be tested. The lens 300 is in contact with the image sensor 120, and the resistance value of the mercury resistance-type vibration sensor 130 changes immediately, indicating that the substrate 110 has vibration. Of course, the change of the resistance value can also reflect The substrate 11 is tilted with respect to its initial position, and the substrate 110 can be returned to the initial position or the like according to the tilt angle. The modulation transfer function value measuring plate 100 further includes a supporting device 140 for supporting the substrate 11A. The support device 14 includes a base 142, a main body 144, a first magnetic collar 141 slidably coupled to the base 142, a second magnetic collar 143 and a third magnetic collar 145. The second and third magnetic collars 143 and 145 are fixedly connected to the base 142 and are disposed on opposite sides of the first magnetic collar 141. The main body 144 passes through the second, first and third magnetic collars 143, 141 and 145 in sequence and is fixedly coupled to the first magnetic collar 141. One end 1442 of the main body 144 is a free end, and the other end 1444 is fixedly connected to the substrate 110 of the modulation transfer function value measuring board 1 . The body 144 is maintained in an equilibrium position by the magnetic force between the first, second and third magnetic collars 141, 143 and 145. The base 142 is generally provided with a 11 200823444 rail 1422 at a position relative to the first magnetic collar 141. Preferably, the first magnetic collar ι 41 is movably connected to the guide 1422 by a connecting arm 1412. The connecting arm 1412 can slide along the guide rail 1422 with the 'first magnetic collar 141'. Preferably, the second, third magnetic collars 143, 145 are fixedly coupled to the base 142 by a connecting arm 1432, 1452, respectively. It can be understood that the second, first and third magnetic collars 143, 141 and 145 can be electromagnets, and the magnetic pole and the magnetic field strength can be adjusted, and the magnetic poles can be SN, NS, SN or NS, SN, NS. Arranged in order, or in the order of NS, NS, NS, or SN, S_N, SN, as long as a force balance can be generated between the first, second and third magnetic collars 141, 143 and 145 . The driving unit 220 can be a motor for driving the to-be-tested lens 300 or the modulation transfer function value measuring board, so that the to-be-tested lens 3〇〇 and the modulation transfer function value measuring board 100 are along the The optical axis direction of the lens 3 to be tested is relatively moved so that the test pattern on the test board 210 is optimally imaged on the image sensing device 120. In this embodiment, the driving unit 22 is configured to drive the to-be-measured lens 300 between the modulation transfer function value measuring board 1 and the test board 210 along the optical axis direction of the to-be-tested lens 3 mobile. When the measurement of the lens 300 to be measured is performed by using the modulation transfer function value measuring apparatus 200 provided in this embodiment, when the lens 3 to be tested is driven by the driving unit 220, the test board 21 is modulated and transmitted. The function value measuring plates 100 are moved along the optical axis direction of the lens under test 300 so that the test pattern on the test board 210 is optimally imaged on the image sensor 12A. When the lens 3 to be tested collides with the image sensor 12〇12 200823444, the vibration sensor 130 can sense the substrate 110 of the modulation transfer function value measuring plate 100 and image sensing. The vibration of the device 120, the vibration sensor 130 can generate a control signal, such as a signal for controlling the alarm of the alarm or a feedback signal for controlling the change of the resistance value of the beta mercury, thereby automatically or manually stopping the driving unit 220. Moreover, if the impact force between the lens under test 300 and the image sensor 120 is large, the force balance between the first, second, and third magnetic collars 141, 143, and 145 may be destroyed. At this time, the connection of the first magnetic collar 141 1412 will drive the first magnetic collar 141 to slide in the guide 1422 of the base 10 142, thereby driving the main body 144 of the supporting device 140 and the modulation transfer function value measuring plate 100 to slide, the lens to be tested The impact force between the 300 and the image sensor 120 forms a buffer, so that serious damage to the entire measuring device 200 and the lens to be tested 300 can be avoided. Of course, it can be understood that the vibration sensor 130 can also be other devices that can detect vibration, such as a ball vibration switch or a reed switch, etc., as long as the lens to be tested 300 collides with the image sensor 120, It can sense the vibration of the image sensor 120 and the substrate 110, and can generate a control signal to stop the driving unit 220 from operating. In summary, the present invention has indeed met the requirements of the invention patent, and has filed a patent application according to law. However, the above-mentioned embodiments are merely preferred embodiments of the present invention, and those skilled in the art will be able to incorporate the modifications and variations of the invention in the spirit of the invention. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a schematic view showing the structure of a measuring plate according to a first embodiment of the present invention. 13 200823444 FIG. 2 is a schematic diagram showing the state of use of a modulation transfer function value measuring device according to a second embodiment of the present invention. [Major component symbol description] Modulation transfer function value measuring plate 100 Substrate 110 Image sensor 120 Vibration sensor 130 Support device 140 First magnetic collar 141 Connecting arm 1412, 1432, 1452 Base 142 Guide 1422 Second magnetic collar 143 Main body 144 One end of the main body 1442 The other end of the main body 1444 Third magnetic collar 145 Modulation transfer function value measuring device 200 Test board 210 Drive unit 220 Test lens 300