200817667 九、發明說明： 【發明所屬之技術領域】 本發明侧於-槪陷檢錄置，將域有以透鏡系及 數目之晝素所構成之區域感測器之複數台之攝影機，對 數之區域之檢《象之各分割區域所拍攝得之影像資訊^j後 理，並根據所汁异之特徵量識別該區域之缺陷。 【先前技術】 心缺陷檢查裝置，使用以區域感測11拍攝液晶顯示元件 查對象而成之影像資訊，檢查輝度缺陷（如 不應發光之晝素發光之缺陷）。 圖2為顯示由備有區域感測器之2台之攝影機所運作之 二二雙ί之基本性的系統構成之立體圖。檢查對象100之檢查i t ί ί ’各檢查區域，透過透鏡2議、2娜"^自 看有&或感測為301A、301B之攝影機300A、300B拍攝，所抽 攝之影像資訊各自交予影像處理裝置400A、400B。 旦~^個人電轉所構成之影像處理裝置4_、4_，根據透過 ^輝度資職讀齡式處理輯躲查，並統合各 果0 ° ，3 $統合有根據由複數台之攝影機所拍攝之影像資訊之檢 裝置之功能方塊圖。攝影機讓〜3GGN所拍攝 ^心像貝吼，-各自由影像處理機構4〇〇A〜4〇〇N所取得而將其 处理，以執行所負責之檢查區域之缺陷檢查。 ^ 絲人二4_〜4_之檢查結果，由座標轉換機構500 之檢查結果而交予判定結果輸出機構_。於統 :ΐίΐ禮之拍攝系之檢查系統，攝影機3_〜麵所備有 之區域感測器301Α〜301Ν之特性有必要一致。 為此，各攝影機300Α〜3麵備有增益調整功能，於系統運轉 200817667 之初始階段，進杆右 性一，之準備操作有由操作者執行增益調整，為使各拍攝系之特 下以:像i理裝置之具體構成例之功能方塊圖。以 所備有之GGD 其魏構成。輯影機 «^40! 於前處理機構4〇2，ώ媒旦j,〇A取侍父予前處理機構402。 測器本身之輝度遺漏卢機缺陷修正機構402a進行區域感 縮小，均勾化區域感測器^周修正機構·執行 理，交予偵測處理機構備;之感度與中心部之感度差之處 波機分系之加強濾 後，交給判定處理機構·。,對口抽出廷擇對象分別賦予編號 對象:針對缺陷選擇 對比等均輝度、取大輝度、輝度體積、平均對比、最大平均 4〇4b ^ 象做為缺陷識別之^=定^^=::5超_值之選擇對 程圖圖:^各景綠敫處理裝置麵〜侧之訊號處理程序之流 ，後’於階段s2拍攝影像被輸入，於階段 Μ進仃_$衫機缺陷之修正，於階段S4進行陰影修正。 声搜接f ’於階段S5進行加強滤波處理，於階段S6進行二值化 ί階示。然後，於階段S8進行特徵量之計算， 進仃識別處理，於階段S10輸出判定結果。 禝數分割檢查區域，以複數台之攝影機拍攝之理由係由於搭 200817667 載於，影機之CCD等區域感測器之解像度有其極限。檢查對象之 液晶顯示元件（以下，LCD)之解像度，於全高晝質上為丨^⑸丨〇8〇 xRGB = 6，220，800。 為進行缺陷識別，LCD與CCD之晝素比率最低亦需為i ·· 3χ3， 因此所求於CCD續像度為LCD之解像度之9倍而為 ^台⑽7, 200 ’即使是搭載有1〇，咖，_晝素之CCD之攝影機亦需 ，需識別更加微小之缺陷時，需使LCD與CCD之書 增加丄伴隨此，攝職台數亦會增加。 -素b丰更為 古4猎由攝影機之台數增加’而提昇CCD表面上之解像度的 所二3ii，fCCD之晝素比率之方法為吾人所習知。：即 素^距i f)24 ’产黑白ccd時’僅縱横偏移®之晝 像度4倍之解像度&像人拍攝而合成各影像，則可得具有CCD解 「影:以ccd為影像感測器之拍攝裝置中，以 ^像偏私」獒什表面上之解像度之原理，及以 =系/魏元件）進行之影像偏移機構。 [專利文獻1]日本特開平6—261236號公報 V.. 【發明内容】 中，有ίϊΐίί内建有影像偏移機構之攝影機之缺陷檢查裝置 :内部内建有壓電式:由於於攝影 機皆需有ΧΥ平台之驅動哭，伴 。於母一各個攝影 成為必要，造成檢絲/之大^化。’支梅顯之平台之剛性亦 -χ/ϋίΐΐ#。需與攝影機台數相當之麼電式ΧΥ平二介 而ΧΥ千台之驅動器，因而昂貴。 千口，亦 200817667 (3)搭載冷卻CCD後更加大型化、昂貴。CC])可因冷 S/N比顯著地改善。為提高檢查精密度，有時會以 7 ^ 冷卻d搭載内建有冷卻部之χγ平台’攝影機 龐大，造成裝置之更加大型化、高價格化。 (4^攝影機之間之影像偏移量不均等。使用複數台攝影 際’為使任-攝影機m可適用關—影像處理 像偏移量-致。於複數台之攝影機之間調整此偏^ 事煩雜，無法使其完全一致。 里 «)需使用備有影像偏移機構之攝影機。備有 之攝影機之麵祕，可使狀攝影麵限。像偏私機構 本發明係鱗決上述問題㈣產生，其目的在於 二現下列事項之缺陷檢查裝置：即便使彡 亦不致大型化，所有攝影機之影像偏移量皆 攝域衣置 為達成如此之課題，本發明如下構成： 祕i1)—種缺_錄置’由備有以透鏡歧特定數目之佥+ 感測器之複數台之攝影機，對分割為複數之區ίί 計舁之特徵量_域之·， ^亚根據所 其特徵為備有： 置該複數台之攝影機；及 影機板。機構於X Y方向之特疋範圍周雛地移動操作此攝 (2)如申請專利範圍第（1)項 動器機構以m為表示該透鏡系之成像倍率 =二該致 距時，於m·占/9夕rFt细γ ν·Γ手以6表不该晝素之間 機板。 /2之㈣朝Χ、Υ方向周期性地移動操作該攝影 中備或（2)項之缺陷檢絲置，其 有有位置膽機構，根據該成像倍率及畫素間距資訊設定該攝' 200817667 構移動 被調整之壓電元件所構成。根據4成像倍率及晝素間距資訊而 (5)如申請專利範圍第 〇 中該致動器機構係根據該成像丄f之缺陷檢查裝置’其 影機=移動量之—位置控制機距錄，由控制該攝 移動操作之一鞍部，节摄旦於固疋框架朝X方向周期性地被 部朝Y方向周t地利用第2致動器機構相對於該鞍 發明蓋至 依本發明，可期待如下效果： 影機有相轉位移，因此可實現全部攝 多，象偏移機構之攝影機，因此攝影機之選項 (3)即使攝影機台數增加，亦可以π # A _器機構）進行影像偏移。 同—構造（x、Y2方向之 【實施方式】 檢查圖1為顧示適用本發明之缺陷 於因後述线動器機構朝面圖。 影機tUlt、置有2钟频2A 1邮動操作之攝 置於該間隙之僅#朝機板1之框型之鞍部3。因配 之―之 200817667 置於朝鞍部3之框型之_架5。因配 批认门2 朝X方向微動之板片彈簧6a〜M，鞍部3之i日 5之相對位_調整，調整於圖示之中立位置。 -藉』馬達7固定配置於固定框架5, .部3於X方向之特6a〜6d之彈力而周期性地移動操作輕 缸」ί成器機構之紅筒式馬達8固定配置於鞍部3,以此 t簧4a〜4d而周期性地移動操作攝影機板工 之止動部9a〜9(1所〜、Λ鞍4側犬出而形成位置調整機構 整。 。此#止動部之突㈣可以騎機構等調 於固;方向之移動量，由 位置調整機構之止動部1〇3〜^'_4^=^而+形成 以螺釘機構等調整。 又疋此寺止動部之突出量可200817667 IX. Description of the invention: [Technical field to which the invention pertains] The present invention is directed to a camera that has a plurality of cameras of a region sensor composed of a lens system and a number of elements, and a logarithmic region. The inspection of the image information captured in each divided area of the image is followed by the identification of the defect of the area according to the characteristic quantity of the juice. [Prior Art] A heart defect inspection device uses image information obtained by photographing a liquid crystal display element with an area sensing 11 to check for a luminance defect (such as a defect of a halogen light that should not be illuminated). Fig. 2 is a perspective view showing the system configuration of the basics of two or two cameras operated by two cameras equipped with area sensors. Checking the object 100 inspection it ί ί 'Each inspection area, through the lens 2, 2 Na " ^ self-viewing / or sensing 301A, 301B camera 300A, 300B shooting, the image information taken The image processing apparatuses 400A and 400B are provided. The image processing device 4_, 4_, which consists of a personal electric transfer, is based on the reading of the illuminating age, and combines the results of each of the 0 °, 3 $ integrated images based on a plurality of cameras. Functional block diagram of the information inspection device. The camera allows the images taken by ~3GGN to be taken by the image processing units 4A to 4〇〇N and processed to perform the defect inspection of the inspection area in charge. The result of the inspection of the singer 2 4 to 4 _ is sent to the determination result output means _ by the inspection result of the coordinate conversion mechanism 500. Yu Tong: The inspection system of the photography system of the ΐίΐ ceremony, the characteristics of the area sensors 301Α~301Ν provided by the camera 3_~ face are necessary. To this end, each camera has a gain adjustment function on the 300Α~3 surface. In the initial stage of system operation 200817667, the right-handedness is entered. The preparation operation is performed by the operator to adjust the gain, so that each camera system is specially designed to: A functional block diagram of a specific configuration example of the device. It consists of the GGD and its Wei. The photo machine «^40! In the pre-processing mechanism 4〇2, the media agent j, 〇A takes the patron to the pre-processing mechanism 402. The brightness of the detector itself is missing. The defect correction mechanism 402a performs the regional sense reduction, and the area sensor is corrected by the correction mechanism and the execution mechanism is sent to the detection processing organization; the sensitivity of the sensitivity is different from that of the central part. After the filter of the wave machine is reinforced, it is sent to the judgment processing unit. The counterparts are given the numbered objects respectively: the uniform brightness, the large luminance, the luminance volume, the average contrast, and the maximum average 4〇4b ^ for the defect selection ^==^==:5 The selection of the super_value pair is shown in the figure: ^The flow of the signal processing program on the surface of the device from the side to the side of the scene, and the image taken in the stage s2 is input, and the defect of the defect is changed in the stage. Shadow correction is performed at stage S4. The sound search f' performs a reinforced filter process at stage S5, and a binarization step is performed at stage S6. Then, the calculation of the feature amount is performed in the step S8, and the recognition processing is performed, and the determination result is output in the step S10. The number of divisions in the inspection area, the reason for shooting with a plurality of cameras is due to the resolution of the sensor in 200817667. The resolution of the liquid crystal display element (hereinafter, LCD) of the inspection object is 丨^(5)丨〇8〇 xRGB = 6,220,800 on the full height. In order to identify the defect, the ratio of the pixel to the LCD and the CCD is also required to be i ··3χ3. Therefore, the CCD continuation is 9 times the resolution of the LCD and is (10) 7, 200 ' even if it is equipped with 1〇 The coffee machine, _ 昼 之 CCD camera also needs to identify more minor defects, the need to increase the number of LCD and CCD books, accompanied by this, the number of the number of posts will also increase. The method of increasing the resolution of the CCD surface by increasing the number of cameras, and improving the resolution of the CCD surface, is known to us. :Immediate ^ distance if)24 'When black and white ccd is produced' only the vertical and horizontal offset of the image of the resolution of 4 times the resolution & the image is synthesized by human beings, you can get the CCD solution "shadow: ccd as the image In the imaging device of the sensor, the image shifting mechanism is performed based on the principle of the image on the surface and the resolution of the surface. [Patent Document 1] Japanese Laid-Open Patent Publication No. Hei 6-261236. In the present invention, there is a defect inspection device for a camera having an image shifting mechanism built therein: a piezoelectric type built in the inside: since the camera is Need to have the drive of the platform to cry, accompanied. In the mother-in-one photography, it becomes necessary to cause the inspection/largeness. The rigidity of the platform of the 'Mei Xianxian is also -χ/ϋίΐΐ#. It is necessary to match the number of cameras, and the electric drive is the same as the number of cameras. Thousands, also 200817667 (3) It is more large and expensive after being equipped with a cooling CCD. CC]) can be significantly improved due to the cold S/N ratio. In order to improve the inspection precision, the χ γ platform with built-in cooling unit is installed at 7 ^ cooling d. The camera is huge, resulting in a larger size and higher price. (4^The image offset between the cameras is not uniform. Use multiple cameras to make the camera-m can be applied - image processing image offset - adjust the camera between multiple cameras. Things are cumbersome and cannot be completely consistent. In the «) camera is required to use an image shifting mechanism. With the secret of the camera, you can limit the size of the camera. The invention is based on the above-mentioned problem (4). The purpose of the invention is to produce a defect inspection device for the following items: even if the flaw is not enlarged, the image shift of all the cameras is set to achieve such a problem. The present invention is constituted as follows: 秘i1) - 缺 _ 录 录 '''''''''''''''''''''''''' According to its characteristics, it is equipped with: a camera for the plurality of cameras; and a video board. The mechanism moves in the special range of the XY direction. (2) As in the patent scope, the actuator mechanism (m) indicates the imaging magnification of the lens system = two, the distance, in m· Occupy / 9 eve rFt fine γ ν · Γ hand to 6 table should not be between the plate. /2 (4) periodically move the ray or Υ direction to operate the photographic or (2) defect detection wire, which has a positional biliary mechanism, according to the imaging magnification and pixel spacing information to set the photo '200817667 The structure is constructed by moving the adjusted piezoelectric element. According to the 4 imaging magnification and the pixel spacing information, (5) as in the scope of the patent application, the actuator mechanism is based on the defect inspection device of the imaging device, its camera = the amount of movement - the position control machine distance recording, By controlling the saddle portion of the photographing movement operation, the second frame mechanism is periodically attached to the Y direction in the X direction by the solid frame in the X direction, and the second actuator mechanism is used to cover the saddle invention to the present invention. I look forward to the following effects: The camera has a phase shifting displacement, so it can realize all the cameras, such as the camera of the offset mechanism. Therefore, the camera option (3) can be used for the image bias even if the number of cameras increases, the π # A _ mechanism can be used. shift. The same structure (x, Y2 direction) [Embodiment] Inspection FIG. 1 is a view showing a defect in which the present invention is applied to the above-described linear actuator mechanism. The camera tUlt is provided with 2 clock frequencies 2A 1 The frame-type saddle 3 of the machine plate 1 is placed in the gap. The 200817667 is placed in the frame type of the saddle portion 3. The plate is moved toward the X direction by the approval door 2 The leaf springs 6a to M, the relative position of the saddle portion 3, i, 5, are adjusted and adjusted to the neutral position shown in the drawing. - The motor 7 is fixedly disposed on the fixed frame 5, and the portion 3 is in the X direction 6a to 6d. The elastic cylinder is moved elastically and periodically. The red cylinder motor 8 of the mechanism is fixedly disposed in the saddle portion 3, and the treads 4a to 4d are periodically moved to operate the shutter portions 9a to 9 of the camera board. 1 to ~, the saddle 4 side of the dog out to form a position adjustment mechanism. This #stop section of the protrusion (four) can be adjusted by the riding mechanism, etc.; direction of movement, by the position adjustment mechanism of the stop part 1〇3 ~^'_4^=^ and + formation is adjusted by screw mechanism, etc.
之备:铃So + v 士丄 H刺问樣地，缸筒式島;查S 制器12進行序列控$作極性及姆周期’透過驅動器13、由控 其次，説明關於偏移量之設定程序。 關，之光《。若以b為檢查對㈣f H 6 =；；攝影機成像 a為透鏡主點與區域感測器⑽）3^:^=主點間距離， 點距離，則 之像面間距離，f為透鏡焦 、 l/a + l/b=l/f 成立。此時’像倍率m = b/a。 若以占為CCD之晝素間距，進行書辛 查對象之攝影機本體與透鏡，僅使cc^n過去皆固定檢 朝Λ 丫方向移動J/2而 10 200817667Preparation: Bell So + v Gentry H thorns, cylinder-type island; check S 12 for sequence control $ for polarity and um cycle 'pass drive 13, control second, explain the offset setting program. Guan, the light. If b is the check pair (4) f H 6 =;; camera imaging a is the lens main point and the area sensor (10)) 3 ^: ^ = distance between the main points, the point distance, then the image surface distance, f is the lens coke , l/a + l/b=l/f is established. At this time, the image magnification m = b/a. If the CCD's pixel spacing is used, the camera body and lens of the book are searched, and only cc^n is fixed in the past. The direction of the camera is moved to J/2 and 10 200817667
It ί ^ 100 ' " - CCD 可設i==i=;2，、k值’亦可容⑽,， 離； 固定配置而使抽攝倍率二 圖1之貫施形癌中’可以紅筒式黾耄7 ί及^移動量時’可自取得m糾之值之設 7 Λ 8 7a ί Sa；；^^ " Π ^ 13^ 於圖1之實施形態，做為致動器機構例示以 然，亦可嘲t成像倍率以晝翻距5之 8’ 之壓電元件（壓電式致動器等）構成。 卿振巾田被碰 伺服Ϊ行更為高精密度之位£控辦，亦可魏如下之位置控制 之美之光ί式距離感測器測定自攝影機板1及鞍部3 之基準位置雜之麟，對控彻12輸人此 2,根細差透過‘= 多愈可使LCD與CCD之晝素比率增加。 戰口数μ 【圖式簡單說明】 圖1為頒示適用本發明之缺陷檢查裝置中之攝影機平么之一 實施形態之平面圖。 口 圖2為顯示由備有區域感測器之2台攝影機所進行之缺陷檢 11 200817667 查裝置之基本系、统構成之一，二么 圖3為統合根據由複數合:機所拍攝之影像資訊之檢查結 果之缺陷檢查裝置之功能方媿園。 圖4為顯示影像處理裝置之具體構成例之功能方塊圖。 圖5為顯示影像處理裝置之訊號處理程序之流程圖。 圖6為顯示攝影機之成像關係之光學系圖。 【主要元件符號說明】 1攝影機板 2A、2B攝影機 3鞍部 4a〜4d板片彈簧 5 固定框架 6a〜6d板片彈簧 7 缸筒式馬達 7a缸筒 8 缸简式馬達 8a缸筒 9a〜9d止動部 l〇a〜lQd止動部 11驅動器 12控制器 13驅動器 14設定機構 100檢查對象 、JA、2_〜2〇〇N 透鏡 _HA、301B〜301N區域感測器 攝影機 、40〇β〜4〇⑽影像處理裝置 12 200817667 401影像輸入板（機構） 402 前處理機構 40 2a攝影機缺陷修正機構 402b陰影修正機構 403 偵測處理機構（缺陷選擇對象抽出處理機構） 403a加強遽波機構 403b二值化機構 403c標示機構 404 判定處理機構 404a特徵量計算機構 404b識別機構 405判定結果輸出機構 500座標轉換機構 600判定結果輸出機構 A、B檢查區域 La 閾值 S1〜S10 階段 X、Y 方向 a透鏡主點與區域感測器（CCD) 301之像面間距離 b檢查對象100與透鏡200之主點間距離 ί 透鏡焦點距離 m像倍率 δ CCD之晝素間距 13It ί ^ 100 ' " - CCD can be set i == i =; 2, k value can also accommodate (10),, away; fixed configuration so that the magnification of magnification 2 Figure 1 of the perforated cancer can be red When the cartridge type 7 ί and ^ move amount, the value of the value can be obtained from the value of 7 Λ 8 7a ί Sa;;^^ " Π ^ 13^ In the embodiment of Fig. 1, as the actuator mechanism As an example, it is also possible to slap the piezoelectric element (piezoelectric actuator or the like) having an imaging magnification of 8'. Qing Zhen's towel field was hit by a servo with a higher precision. The control unit can also control the beauty of the position as follows. The distance sensor is measured from the reference position of the camera board 1 and the saddle 3. For the control of 12 losers, the root fineness can increase the ratio of LCD to CCD by '= multiple. [Brief Description of the Drawings] Fig. 1 is a plan view showing an embodiment of a camera in a defect inspecting apparatus to which the present invention is applied. Port 2 is one of the basic systems and system components for displaying the defect detection by the two cameras equipped with the area sensor. The picture is based on the image taken by the complex camera. The function of the defect inspection device of the inspection result of the information. Fig. 4 is a functional block diagram showing a specific configuration example of the image processing apparatus. FIG. 5 is a flow chart showing a signal processing procedure of the image processing apparatus. Figure 6 is an optical diagram showing the imaging relationship of the camera. [Description of main components] 1 camera board 2A, 2B camera 3 saddle 4a to 4d leaf spring 5 fixed frame 6a to 6d leaf spring 7 cylinder type motor 7a cylinder 8 cylinder simple motor 8a cylinder 9a to 9d Movement part l〇a~lQd stop part 11 driver 12 controller 13 driver 14 setting mechanism 100 inspection object, JA, 2_~2〇〇N lens_HA, 301B~301N area sensor camera, 40〇β~4 〇(10) Image Processing Apparatus 12 200817667 401 Image Input Board (Mechanism) 402 Preprocessing Mechanism 40 2a Camera Defect Correction Mechanism 402b Shading Correction Mechanism 403 Detection Processing Mechanism (Defect Selection Object Extraction Processing Mechanism) 403a Enhanced Chopping Mechanism 403b Binarization Mechanism 403c Marking mechanism 404 Decision processing means 404a Feature amount calculating means 404b Identification means 405 Judgment result Output means 500 Coordinate conversion mechanism 600 Judgment result output means A, B Inspection area La Threshold values S1 to S10 Stage X, Y direction a Lens main point and The distance between the image planes of the area sensor (CCD) 301 b is the distance between the object 100 and the principal point of the lens 200. ί The focal length of the lens is m like the magnification δ CCD From 13