200809903 (1) 九、發明說明 【發明所屬之技術領域】 本發明是關於電子槍，能量線發生裝置，電子線發生 裝置，及X線發生裝置。 ^ 【先前技術】 放出電子的電子槍，是例如被使用在X線發生裝置 φ 或電子線發生裝置。在電子槍，眾知爲了放出電子必須施 加例如爲數十kV以上的高電壓，惟確保內部配線等的高 壓部與筐體等之電性絕緣下，爲了確保內部配線的處理等 自由度，以樹脂等的絕緣段覆蓋高壓部的構成。 例如，在專利文獻1，揭示著具有高壓變壓器等的高 壓部以環氧樹脂模塑的構成的電子槍的X線發生裝置。 專利文獻1 :日本特開昭5 8-1 4499號公報 φ 【發明內容】 在揭示於專利文獻1的X線發生裝置中，模塑高壓 部的環氧樹脂被收容高電壓發生筐體的內部。如此地，在 具有高壓部以絕緣段所覆蓋的構成的電子槍，隨著施加高 電壓會發生多量的熱，而有膨脹絕緣段的趨勢。因此，在 絕緣段被收容成覆蓋於容器（參照專利文獻1的第3圖及 第7圖），或是在容器內夾住般地被固定（參照專利文獻 1的第5圖）的情形，則在絕緣段與容器之間，發生起因 於絕緣段的膨脹的應力。結果，其應力的影響會及於絕緣 -4- 200809903 (2) 段側，而絕緣段發生變形等等之虞。 本發明是鑑於上述課題而創作者，其目的是在於提供 可抑制依絕緣段的膨脹所產生的膨脹的影響的電子槍，能 量線發生裝置，電子線發生裝置，及X線發生裝置。 爲了解決上述課題，本發明的電子槍，其特徵爲：具 備：具有朝第一方向互相相對的第一及第二內面，及朝與 上述第一方向交叉的第二方向互相相對的第三及第四內面 φ ，具有從上述第一內面貫通至外面的開口的容器；及接觸 於上述容器的上述第一及第三內面，而且在上述第二及第 四內面之間的間隙所配置的絕緣段；及設於從上述容器的 上述開口所露出的上述絕緣段的部分上的電子放出構件。 在上述的電子槍中，於設有用以配置電子放出構件的 開口的第一內面接觸有絕緣段。電子放出構件是在電子線 發生裝置或X線發生裝置等中被收容於真空容器內。因 此，若接觸於第一內面般地配置絕緣段，則藉由絕緣段可 ^ 氣密地密封容器的開口而較佳。另一方面，若在第二內面 也密接絕緣段，則藉由絕緣段的膨脹在第一方向會發生應 力。在上述的電子槍中，藉由在與第二內面之間隔著間隙 配置有絕緣段，則可充分地避免第一方向的絕緣段的膨脹 〇 又，在上述的電子槍中，藉由將絕緣段配置成與第三 內面接觸，而且在與第四內面之間隔著間隙所配置，則可 充分地避免第二方向的絕緣段的膨脹。而且藉由在所謂第 一及第三內面的複數面密接絕緣段，且確實地可固定容器 -5- 200809903 (3) 內的絕緣段的位置。 亦即，依照本發明的電子槍，則可 段的膨脹所產生的影響。 又，電子槍是容器具有導電性，又 中，覆蓋在與容器之間設有間隙的表面 以。箱由此，可將在與容器之間設有間 電位與容器相同電位（例如接地電位） φ 可發揮對於內部配線等的遮蔽效果。 又，電子槍是容器爲在第三內面具 。藉由此，例如成形由樹脂等所構成的 段凹陷固定在第三內面的凹凸形狀之故 牢固地固定在容器。 又，電子槍是又具備：從容器的外 內面的第三內面的連接器，及塡在絕緣 延伸至電子放出構件的內部配線也可以 φ 在上述的電子槍中，在第一內面接 候，一般配置連接器成爲電子放出方向 方向互相一致（亦即，在第二內面配置 若將連接器配置於第二內面，則爲了避 密接第二內面與絕緣段較佳。但是，在 了避免第一方向的絕緣段的膨脹，在第 間隔著間隙，很難將連接器配置於第二 如此地，本發明人等，互相相對於 第二方向的第三及第四內面中，在第三 適當地抑制依絕緣 具備絕緣段的表面 的導電性構件也可 隙的絕緣段表面的 之故，因而適當地 有凹凸形狀也可以 絕緣段之際，絕緣 ，因而可將絕緣段 側貫通配置在第一 段內，而從連接器 〇 觸有絕緣段。這時 另連接器的中心軸 連接器）。但是， 免降低耐壓能力而 上述的電子槍，爲 二內面與絕緣段之 內面。 與第一方向交叉的 內面配置連接器， -6- 200809903 (4) 而且將絕緣段配置成爲與第三內面接觸。藉由此，抑制容 器內的連接器的露出，得到適當地可防止降低耐壓能力的 構成。 又，電子槍是連接器的一部分塡在絕緣段內’而連接 * 器被固定在容器也可以。藉由此，經由連接器牢固地可固 ^ 定絕緣段與容器。 又，電子槍是絕緣段爲除了第一及第三內面之外’隔 ^ 著間隙配置於與所有內面之間也可以。藉由此，更有效地 可抑制依絕緣段的膨脹所產生的影響。 又，本發明的能量線發生裝置，是具備上述的任一電 子槍，出射從電子槍所放出的電子，或是藉由該電子所發 生的放射線。藉由此，可提供可抑制依絕緣段的膨脹所產 生的影響的能量線發生裝置。 又，本發明的電子線發生裝置，是具備：上述的任一 電子槍；及收容電子槍的電子放出構件的真空容器；及設 φ 於真空容器，透過從電子槍所放出的電子而朝真空容器的 外部出射所用的窗材。藉由此，可提供可抑制依絕緣段的 膨脹所產生的影響的能量線發生裝置。 又，本發明的X線發生裝置，是具備：上述的任一 電子槍，及收容電子槍的電子放出構件的真空容器，及接 受從電子槍所放出的電子而放出X射的靶材，及設於真 空容器，透過從靶材所放出的X線而朝真空容器的外部 出射所用的窗材。藉由此，可提供可抑制依絕緣段的膨脹 所產生的影響的能量線發生裝置。 -7- 200809903 (5) 依照本發明，可提供可抑制依絕緣段的膨脹所產生的 膨脹的影響的電子槍，能量線發生裝置，電子線發生裝置 ，及X線發生裝置。 【實施方式】 以下，一面參照圖式一面針對於本發明的電子槍，能 量線發生裝置，電子線發生裝置，及X線發生裝置的最 Φ 適當實施形態詳細地加以說明。又，在圖式的說明中，在 相同或相當部分給予相同符號，省略了重複的說明。 第1實施形態 第1圖是表示具備電子槍，發生電子線或X線所用 的能量線發生裝置的第1實施形態的構成的側視斷面圖。 又，第2圖是表示沿著圖示於第1圖的I-Ι線的斷面的側 視斷面圖。又，第3圖是表示沿著圖示於第1圖的Π-II φ 線的斷面的俯視斷面圖。又，在第1圖至第3圖，爲了說 明方便上，表示著XYZ正交座標系。 本實施形態的能量線發生裝置1 a是具備：出射電子 線EB的電子槍2，及收容電子槍2的電子放出構件而氣 密地密封所用的真空容器3，及出射窗構成部1 〇a (或 10b )，及真空泵20。又，電子槍2是具備：絕緣高壓部 所用的絕緣段的樹脂構件4，及收容樹脂構件4的機殼5 ，及被安裝於機殼5的側面的高耐壓型連接器6 ’及放出 電子所用的電子放出構件的燈絲7 ’及高電壓部的內部配 -8- 200809903 (6) 線9a，9b，及覆蓋樹脂構件4的一部分的導電性構件1 9 〇 機殼5是具備有電子槍2的容器。機殻5是藉由金屬 等的導電性材料所構成，收容後述的樹脂構件4。本實施 ' 形態的機殻5是具有長方體狀的外觀，惟機殼5的外觀是 ' 並不被限定於此者。機殼5是其內部成爲中空，具有內面 5a〜5f。其中，內面5a (第一內面）及5b (第二內面） φ ，是互相地相對於所定的第一方向（在本實施形態中爲Z 軸方向）。又，內面5c (第三內面）及5d (第四內面） ，是互相地相對於與第一方向交叉的第二方向（在本實施 形態中爲X軸方向）。又，內面5 e (第五的內面，參照 第2圖及第3圖），及5f (第六的內面，參照第2圖及 第3圖），是互相地相對於與第一及第二方向交叉的第三 方向（在本實施形態中爲Y軸方向）。又，在本實施形 態中，第一至第三方向是分別成正交，惟此些方向是以正 φ 交以外的角度形成交叉也可以。 又，機殼5是具有開口 5g，5h。開口 5g是穿過內部 配線9a，9b所用的圓形開□，貫通內面5a與其背側外面 (上面）般地所形成。又，開口 5h是安裝有連接器6所 用的圓形開口，貫通內面5 c與其背側外面（側面）般地 所形成。 樹脂構件4是藉由例如所謂環氧樹脂的絕緣性樹脂所 構成，設置作爲絕緣電子槍2的高電壓部（內部配線9a ，9b )及其他部分（例如機殼5等）所用的絕緣段。具體 -9 - 200809903 (7) 上，樹脂構件4是具有基部4a，及從該基部4a朝第一方 向（Z軸方向）突出的凸部4b。基部4a是幾乎佔滿機殻 5內部般地被收容在機殼5內。又，凸部4b是藉由從基 部4a穿過開口 5g而突出，由機殼5露出。又，在凸部 ^ 4b (在本實施形態中爲凸部4b的前端附近），配置有燈 ' 絲7。 又，在樹脂構件4的基部4a與機殼5之間，設有間 φ 隙A。具體上，基部4a是接觸於機殼5的內面5a，5c ( 較佳是密接），而且除了內面5 a，5 c之外，在與其他所 有內面5 b，5 d〜5 f之間隔著間隙A所配置。藉由該間隙 A，可避免依熱所產生的樹脂構件4的膨脹。又，在內面 5e形成有凹凸形狀。藉由此，成形樹脂構件4之際，樹 脂構件4凹陷固定於此凹凸形狀之故，因而令樹脂構件4 與內面5 c牢固地被固定。又，作爲在此所說的凹凸形狀 的一例子，有如第1圖所示地溝狀者’或是藉由將內面 φ 5 c的表面作成粗糙所產生的微細的凹凸等。 高耐壓型連接器6，是從能量線發生裝置la的外部 接受電源電壓的供給所用的連接器（插座），從機殼5的 外側（側面）貫通配置至內面5 c。位於機殼5內部的連 接器6的部分6a，是被塡在樹脂構件4的基部4a而被固 定。又，在該部分6 a的表面形成有凹凸形狀。藉由此’ 在成形樹脂構件4之際，凹陷樹脂構件4被固定在此凹凸 形狀之故，因而樹脂構件4與連接器6牢固地被固定。又 ，作爲在此所說的凹凸形狀的一例子，有如第2圖及第3 -10- 200809903 (8) 圖所示地沿著連接器6的中心軸方向周期性地重複凹凸般 的形狀，或是將連接器6的表面作成粗糙所產生的微細的 凹凸等。 又，連接器6，是被固定在機殻5的側壁（構成內面 5 c的側壁），經由連接器6而令樹脂構件4與機殼5牢 ' 固地被固定。在此連接器6’插入有保持從未圖示的電源 裝置所延伸的外部配線前端的電源用插頭。 φ 燈絲7是放出電子所用的本實施形態的電子放出構件 。燈絲7的兩端是分別被連接於從連接器6朝燈絲7延伸 的內部配線9a，9b。因此，當電源用插頭被插入在連接 器6，則燈絲7的兩端，是經由外部配線而與電源裝置電 性地被連接。燈絲7是藉由流著數安培的電流，被加熱成 約25 00 °C，又藉由從另一電源裝置施加數十kV至數百 kV的高電壓，放出電子。又，燈絲7是被覆蓋在形成用 以拉出電子的電場的柵部8。在柵部8，經由未圖示的配 φ 線施加有所定的電壓。因此，從燈絲7所放出的電子，是 從被形成柵部8的一部分的孔被出射作爲電子線EB。又 ，內部配線9a，9b ’是從電源裝置施加如上述的高電壓 之故，因而藉由被塡在絕緣材料所形成的樹脂構件4的內 部，被確保著與機殼5的絕緣。 導電性構件1 9是樹脂構件4的表面中，用以覆蓋在 與機殼5之間設有間隙A表面的導電性構件。具體來說 ，導電性構件1 9是導電性薄膜，或導電性帶的薄構件較 佳’完全地覆蓋樹脂構件4中未密接於機殼5的部分般地 -11 - 200809903 Ο) 黏貼於樹脂構件4。又，導電性構件1 9是導電性塗料或 導電性膜等也可以。 真空容器3是收容電子槍2的燈絲7而用以氣密地密 封的構件。真空容器3是被形成朝第一方向（Z軸方向） 延伸的圓筒狀，具有：用以收容電子槍2的燈絲7，柵部 8 ’及凸部4b的收容室3 a，及朝從電子槍2所出射的電 子線EB的出射方向（z軸方向）延伸的電子通路3b。電 φ 子通路3 b是與收容室3 a連通，而從電子槍2所出射的電 子線EB，是通過電子通路而到達至真空容器3的前端。 在電子通路3b的周圍，設有功能作爲隔著電子通路3b成 對的電磁偏向透鏡的電磁線圏3 1，3 2。 又，真空容器3是朝Z軸方向可分割地構成，藉由在 其分割部具備未圖示的鉸鏈，可開閉地構成收容室3a較 佳。藉由真空容器3具備此種開放型的構成，而容易地可 更換消耗材的燈絲7。 φ 能量線發生裝置1 a是將出射窗構成部1 0a，1 Ob中的 一方具備於真空容器3。出射窗構成部1 〇a，是接受從電 子槍2所出射的電子線EB而發生X線XR，並將此X線 XR朝真空容器3外部出射所用的構造部分。能量線發生 裝置1 a是具備此出射窗構成部1 0a時，則功能作爲X線 發生裝置。又，出射窗構成部1 是將從電子槍2所出射 的電子線EB朝真空容器3外部出射所用的構造部分。能 量線發生裝置1 a是具備此出射窗構成部1 〇 b時，則功能 作爲電子線發生裝置。 -12- 200809903 (10) 真空泵20(參照第2圖），是用以排氣真空容器3 內部的零件。真空容器3是如上述的開放型時，則能量線 發生裝置la是具備真空泵2〇較佳。本實施形態的真空泵 20 ’是沿著機殻5側面中設有連接器6的側面（亦即，內 面5 c的背側側面）以外的側面（例如，內面5 e的背側側 面）所配置。藉由將真空泵20如此地配置，可避免被插 入在連接器6的電源用插頭及外部配線與真空泵2 〇的干 馨 擾’而可小型化能量線發生裝置1 a，真空泵2 0是經由排 氣通路33被連接於真空容器3的收容室3a。 在此’第4(a)圖是具體地表示出射窗構成部1〇a 的構成例的側視斷面圖。又，第4 ( b )圖是具體地表示 出射窗構成部1 〇b的構成例的側視斷面圖。 首先’參照第4(a)圖，出射窗構成部l〇a是具有 :基座11，窗基板12，靶材13，窗材14及堆壓環15。 基座Π是大約圓筒狀構件，被固定在真空容器3(參照 φ 第1圖至第3圖）的前端。基座11是具有與真空容器3 電子通路3b連通的貫通孔11a，及以貫通孔11a的中心 的圓形凹坑1 1 b。窗基板1 2是用以支持固定窗材1 4的構 件。窗基板1 2是呈大約圓板狀，而在其中心部具有與貫 通孔11a連通的貫通孔12a。窗基板12的直徑是成爲與 基座11的凹坑lib的內徑大約相同尺寸，而窗基板12是 被嵌入在凹坑1 1 b ° 靶材1 3是接受從電子槍2所出射的電子線EB而放 出X線XR所用的膜狀構件。又，窗材14是透過從靶材 -13- 200809903 (11) 1 3所放出的χ線xr而朝真空容器3的外部所出射所用 的板狀構件。窗材1 4的其中一方的面！ 4 a是位於真空容 器3的外側’而接觸於大氣。又，窗材14的一面14 b是 位於真空容器3的內側。靶材1 3是形成於窗材14的一面 14b上。靶材13是由接受電子線EB而發生X線XR的材 料（例如鎢）所形成，窗材14是由有效率地可透過X線 XR的材料（例如鈹）所形成。推壓環〗5是用以窗基板 φ 12的外周部分推向基座1 1而被固定的構件。推壓環1 5 是具有用以露出窗材14的開口 15a，又，藉由與基座11 螺合而構成可裝卸之狀態。 又，參照第4 ( b )圖，出射窗構成部1 Ob是具有基 座1 1，窗基板12，推壓環1 5，窗材1 6，焊材料17，及 固定板1 8。此些中，針對於基座1 1，窗基板12，及推壓 環15的構成，與表示於第4(a)圖的出射窗構成部l〇a 同樣。又，第4 ( b )圖的焊材料17是表示在製程中熔融 φ 前的狀態。 窗材16是從電子槍2所出射的電子線EB而出射至 真空容器3的外部所用的板構件。窗材1 6是關閉窗基板 12的貫通孔12a的一端般地被固定在窗基板12°窗材16 的其中一方的一面1 6 a是位於真空容器3的外側，而接觸 於大氣。又，窗材16的另一方的一面16b是位於真空容 器3的內側。窗材16是由有效率地透過電子線EB的材 料（例如鈹）所形成。 焊材料17及固定板18是用以將窗材16固疋在窗基 -14- 200809903 (12) 板12的構件。焊材料17及固定板18是被形成大約圓板 狀，分別具有用以通過電子線EB的開口。焊材料1 7及 固定板1 8是以此順序重疊於窗基板12上。又，焊材料 17是在製造出射窗構成部l〇b時，藉由高溫被熔融，而 互相固定著固定板18，窗材16及窗基板12。 ‘ 在出射窗構成部l〇a，10b中，藉由可裝卸地構成著 基座11，成爲可更換窗基板12(以及附屬於此的窗材14 φ ，16或靶材1 3等）。又，如此地窗基板12作成可更換 時，能量線發生裝置1 a是地具備真空泵20較佳。 針對於具備以上構成的本實施形態的能量線發生裝置 1 a的動作加以說明。首先，藉由真空泵2 0，令真空容器 3的內部被排氣，而成爲真空狀態。又，準備於能量線發 生裝置la外部的電源用插頭被插入在連接器6。藉由此 ，令電源裝置與內部配線9 a，9 b互相地被電性地連接。 之後，從電源裝置施加有數安倍的電流，及從其他電源裝 φ 置施加有數十kV至數百kV的電源電壓。此電源電壓是 經由內部配線9a，9b被供給至燈絲7，而從燈絲7放出 電子。 從燈絲7所放出的電子，是藉由柵部8朝Z軸正方向 ，成爲電子線EB。電子線EB是通過電子通路3b達到出 射窗構成部10a (或10b)。此時，電子線EB是藉由電 磁線圈3 1被聚束。又，電子線EB是也有藉由電磁線圈 32進行軸修正的情形。能量線發生裝置1 a具備出射窗構 成部l〇a[第4 ( a)圖]的情形，藉由電子線EB入射靶材 -15- 200809903 (13) 1 3，從靶材1 3放出X線XR。X線XR是透過窗材14，被 出射至能量線發生裝置1 a的外部。又，在能量線發生裝 置la具備出射窗構成部i〇b [第4 ( b )圖]的情形。電子 線EB是透過窗材1 6，而被出射至能量線發生裝置1 a的 • 外部。 ' 針對於本實施形態的電子槍2及能量線發生裝置la 所具有的效果，與發明的經緯一起說明。在本實施形態的 φ 能量線發生裝置1 a中，燈絲7是被收容在真空容器3的 內部（收容室3a )，惟在藉由樹脂構件4的基部4a氣密 地密封用以確保此燈絲7的電惟連接的機殼5的開口 5 g 之目的，在機殻5的各內面5a〜5f中設有開口 5g的內面 5a (第一內面）密接樹脂構件4 (基部4a )。又，一般， 爲了減小高壓部及絕緣用構件的尺寸，來自燈絲的電子線 的中心軸線與真空容器的中心軸線互相地一致般地配置有 連接器的情形較多。但是，在本實施形態中，若將連接器 φ 6配置於內面5b (第二內面），則爲了避免降低連接器6 露出於機殼5的內部空間所產生的耐壓能力而密接內面 5b與樹脂構件4較佳。又，也接觸於內面5a般地配置基 部4a。因此，成爲樹脂構件4接觸於互相相對的內面5a ，5 b的雙方，很難充分地避免Z軸方向的樹脂構件4的 膨脹。 亦即，在內面5 b也密接樹脂構件4，則藉由樹脂構 件4的膨脹會發生應力於Z軸方向。對於此，在本實施形 態的電子槍2中，在與內面5b之間隔著間隙A配置有樹 -16 - 200809903 (14) 脂構件4之故，因而可充分地避免z軸方向的樹脂構件4 的膨脹。 又，針對於依樹脂構件4的膨脹所產生的影響，有關 於與Z軸方向交叉的X軸方向也可說同樣的情形。在本 實施形態中配置成互相相對的內面5 c，5 d (第三及第四 內面）中’樹脂構件4接觸於內面5 c。又，藉由相對於 內面5 c的內面5 d與樹脂構件4之間設置間隙a，可充分 φ 地避免x軸方向的樹脂構件4的膨脹。又，藉由在樹脂 構件4所接觸的內面5c配置連接器6，抑制機殻5的內 部的連接器6的露出，適當地可防止降低耐壓能力。 又’與本實施形態相反地，在內面5b (第二內面） 密接樹脂構件4，隔離內面5 a (第一內面）與樹脂構件4 的情形，則可抑制依樹脂構件4的膨脹所產生的應力，惟 依樹脂構件4的膨脹所產生的電子放出構件（燈絲7)的 位置變化成爲更顯著。具體而言，在機殻5的各內面5a φ 〜5f中距燈絲7最遠離的內面5b成爲固定樹脂構件4。 因此，在此情形下，不但受到凸部4 b的膨脹的影響，而 加上基部4a的樹脂構件4全體的膨脹對燈絲7的位置有 所影響。對於此，對此，在本實施形態下，在距燈絲7最 近的內面5 a固定樹脂構件4之故，因而燈絲7的位置變 化是僅成爲凸部4 b的膨張所產生的變化分量，可將對燈 絲7的位置的影響抑制在最小限定。 又’隔離內面5 a與樹脂構件4的情形，以樹脂構件 4未密封機殼5的開口 5 g。因此，爲了將電子出射路徑作 -17- 200809903 (15) 成真空，也必須將機殼5內作成真空。此情形，除了完全 地排氣機殻5的間隙A的領域的困難性之外，還成爲機 殻5本體地被要求高氣密性。對於此，在本實施形態中， 因在內面5 a密接樹脂構件4，因此可適當地密封開口 5 g ’ ，而可簡單地構成機殼5。 ' 如此地，依照本實施形態的電子槍2，藉由將樹脂構 件4的形狀想辦法，朝Z軸方向及X軸方向可設置間隙 φ A，因此可充分地避免此些方向的樹脂構件4的膨脹。亦 即，依照本實施形態的電子槍2及能量線發生裝置1 a， 有效果地可抑制依樹脂構件4的膨脹所產生的各種影響。 又，藉由想辦法來配置連接器6，也不會導致降低連接器 6的耐壓能力。 又，依照本實施形態的電子槍2，來自燈絲7的電子 放出方向（Z軸正方向）與連接器6的中心軸方向互相地 交叉般地配置著連接器6之故，因而可縮短能量線發生裝 φ 置1 a的全長度。又，在如將電子線EB或X線XR朝垂直 上方出射般地設置著能量線發生裝置1 a的情形，也令連 接器6被配置於能量線發生裝置1 a的側面之故，因而可 將下面作成平坦，使得設置之際保養成爲容易。 又，作爲密接機殼5的內面5 a，5 b與樹脂構件4， 並在其他內面5b，5d〜5f與樹脂構件4之間設置間隙A 的製造方法，有例如如下的製造方法。首先，將成爲樹脂 構件4的樹脂，與構成機殼5的內面5 c的構件一體地進 行硬化。這時候，因在內面5 c形成有凹凸形狀，因此可 -18- 200809903 (16) 將樹脂與內面5c固定作成牢固。之後’將構成機殼5的 內面5 a的構件，使用可保持真空氣密的黏接劑黏貼於樹 脂構件4。可保持此真空氣密的黏接劑，是保持構成機殻 5的內面5a的構件與樹脂構件4之間的真空氣密的構件 • 的一例。之後，裝配構件機殻5的其他內面5b，5d〜5f ' 各構件。這時候，將構成機殼5的內面5a〜5f的各構件 的尺寸，設計成設有所期望的間隔的間隙A較佳。藉由 φ 此，適當地可製造機殼5及樹脂構件4的上述構成。 又，如本實施形態地，電子槍2是具備覆蓋樹脂構件 4的表面中，與機殼5間設有間隙A的表面導電性構件 1 9較佳。藉由此，因可將在與機殼5之間設有間隙A的 樹脂構件4表面的電位作成與機殼5相同電位（例如接地 電位），因此，即使在樹脂構件4與機殼5之間設置間隙 A的構成，也適當地可發揮對於內部配線9 &，9 b等的遮 蔽效果。 φ 又，如本實施形態地，在機殼5的內面5 c的表面具 有凹凸形狀較佳。藉由此，在成形樹脂構件4之際，因此 樹脂構件4凹陷至內面5c的凹凸形狀而變硬，因此牢固 地可固定樹脂構件4與內面5c。 又’如本實施形態地，連接器6的一部分塡在樹脂構 件4內，令連接器6被固定在機殼5較佳。藉由此，經由 連接器6牢固地可固定樹脂構件4與機殼5。 又’如本實施形態地，樹脂構件4是並不被限定於內 面5b，5d，在與內面5e，5f (亦即，除了內面5a，5e的 -19- 200809903 (17) 所有內面）之間也隔著間隙A所配置較佳。藉由此，更 有效地可抑制依樹脂構件4的膨脹所產生的影響。 第2實施形態 第5圖是表示具備電子槍，用以發生電子線或X線 _ 的能量線發生裝置的第2實施形態的構成的側視斷面圖。 又，在第5圖爲了說明的方便，表示著XYZ正交座標系 ⑩。 本實施形態的能量線發生裝置1 b與上述第1實施形 態的能量線發生裝置la的不同處，是真空泵21的配置。 針對於除了真空泵2 1的配置之外的其他構成，及能量線 發生裝置1 b的動作，因與第1實施形態的能量線發生裝 置1 a同樣，因此，省略詳細的說明。 本實施形態的能量線發生裝置1 b是代替第1實施形 態的真空泵2 0而具備真空泵21。真空泵2 1是用以排氣 φ 真空容器3的內部的零件。真空泵21是配置於與設有連 接器6的機殼5的側面相同側的連接器3的側面（亦即， 與X軸方向交叉的側面）。又，真空泵21是爲了避免與 被插入於連接器6的電源用插頭及外部配線的干擾，從真 空容器3的側面朝X軸方向突出所配置。真空泵21是經 由排氣通路34被連接於真空容器3的收容室3&。 能量線發生裝置的真空泵是如本實施形態的真空泵 21地配置也可以。藉由此，連接器6與真空泵2 1對於能 量線發生裝置1 b的中心軸線配置在相同方向之故，因而 -20- 200809903 (18) 對於連接器6的電源用插頭的插扳，及真空泵的維修成爲 容易。 第3實施形態 * 第6圖是表示具備電子槍，用以發生電子線或X線 ' 的能量線發生裝置的第2實施形態的構成的側視斷面圖。 又，在第6圖爲了說明的方便，表示著XYZ正交座標系 •。 本實施形態的能量線發生裝置lc與上述第1實施形 態的能量線發生裝置1 a的不同處，是保持構成機殼5的 內面5 a構件及樹脂構件4之間的真空氣密的構件。針對 於除了此構件之外的其他構成，及能量線發生裝置1 c的 動作，因與第1實施形態的能量線發生裝置1 a同樣，因 此省略詳細的說明。 本實施形態的能量線發生裝置1 c，是代替可保持第1 φ 實施形態的真空氣密的黏接劑，具備：形成於機殻5的內 面5a環狀溝部40a，及被收容於溝部40a內的〇形環40 ，Ο形環40是保持構成機殼5的內面5 a的構件與樹脂構 件4之間的真空氣密的構件的一例。Ο形環40是爲了提 高真空容器3的收容室3a的氣密性的零件。〇形環40是 配置在構成機殼5的內面5 a的構件與樹脂構件4之間。 因本實施形態的能量線發生裝置1 c是具有上述構成 ，因而可減低在將收容室3 a內保持在真空之際，從黏接 劑被放出至收容室3 a內的氣體的影響。 -21 - 200809903 (19) 依本發明的電子槍，能量線發生裝置，電子線發生裝 置，及X線發生裝置，是並不被限定於上述的各實施形 態者，其他也可做各種變形。例如，在上述各實施形態中 表示朝一方向（Z軸方向）出射電子線EB或X線XR的 ' 構成，惟本發明的能量線發生裝置，電子線發生裝置，或 ' X線發生裝置，是例如具備將X軸方向或Y軸方向作爲 長度方向的線狀窗材，並朝此些方向可掃描電子線EB或 φ X線XB的構成也可以。又，在上述各實施形態中針對於 所謂開放型的能量線發生裝置加以說明，惟本發明是也可 適用在無法更換電子放出構件的型式的能量線發生裝置。 又，在上述各實施形態，作爲絕緣段的一例說明了環 氧樹脂所構成的樹脂構件。本發明的絕緣段是並不被限定 於環氧樹脂，而例如藉由陶瓷或聚矽氧樹脂的其他絕緣性 材料所構成也可以。又，在上述各實施形態中針對於由連 接器供應高電壓的構成加以說明，惟在絕緣段內部具備昇 Φ 壓電路也可以。 【圖式簡單說明】 第1圖是表示具備電子槍，用以發生電子線或X線 的能量線發生裝置的第1實施形態的構成的側視斷面圖。 第2圖是表示沿著圖示於第1圖的I-Ι線的斷面的側 視斷面圖。 第3圖是表示沿著圖示於第1圖的II-II線的斷面的 側視斷面圖。 -22- 200809903 (20) 第4(a)圖及第4(b)圖是具體地表示出射窗構成 部的構成例的側視斷面圖。 第5圖是表示備電子槍，用以發生電子線或X線的 能量線發生裝置的第2實施形態的構成的側視斷面圖。 第6圖是表示備電子槍，用以發生電子線或X線的 能量線發生裝置的第3實施形態的構成的側視斷面圖。 【主要元件符號說明】 1 a，1 b，1 c :能量線發生裝置 2 :電子槍 3 :真空容器 4 :樹脂構件 4a :基部 4b :凸部 5 :機殻 5 a〜5 f :內面 5g，5h :開口 6 :連接器 7 :燈絲 8 :柵部 9a，9b :內部配線 l〇a，l〇b :出射窗構成部 1 1 :基座 12 :窗基板 -23 - 200809903 (21) 13 :靶材 14 :窗材 15 :堆壓環 1 7 :焊材料 1 8 :固定板 1 9 :導電性構件 2 0，21 :真空泵200809903 (1) Description of the Invention [Technical Field] The present invention relates to an electron gun, an energy ray generating device, an electron beam generating device, and an X-ray generating device. ^ [Prior Art] An electron gun that emits electrons is used, for example, in an X-ray generator φ or an electron beam generator. In the electron gun, it is known that a high voltage of, for example, several tens of kV or more is required to emit the electrons. However, in order to ensure the degree of freedom such as the treatment of the internal wiring, the high-voltage portion such as the internal wiring is electrically insulated from the casing. The insulating section of the cover covers the configuration of the high pressure portion. For example, Patent Document 1 discloses an X-ray generator for an electron gun having a high pressure portion such as a high voltage transformer molded with an epoxy resin. [Explanation of the Invention] In the X-ray generator disclosed in Patent Document 1, the epoxy resin molded in the high voltage portion is housed inside the high voltage generating housing. . Thus, in the electron gun having the high-voltage portion covered with the insulating portion, a large amount of heat is generated as a high voltage is applied, and there is a tendency to expand the insulating portion. Therefore, in the case where the insulating section is housed so as to cover the container (see FIGS. 3 and 7 of Patent Document 1) or is fixed in the container (see FIG. 5 of Patent Document 1), Then, between the insulating section and the container, a stress due to expansion of the insulating segment occurs. As a result, the influence of the stress will be on the side of the insulation -4- 200809903 (2), and the insulation section is deformed and the like. The present invention has been made in view of the above problems, and an object of the invention is to provide an electron gun, an energy line generating device, an electron beam generating device, and an X-ray generating device which can suppress the influence of expansion caused by expansion of an insulating segment. In order to solve the above problems, an electron gun according to the present invention includes: a first and a second inner surface facing each other in a first direction; and a third and a second direction facing each other in a second direction intersecting the first direction a fourth inner surface φ having a container extending from the first inner surface to the outer surface; and a contact between the first and third inner surfaces of the container and a gap between the second and fourth inner surfaces An insulating segment disposed; and an electron emitting member provided on a portion of the insulating segment exposed from the opening of the container. In the above electron gun, the first inner surface provided with the opening for arranging the electron emission member is in contact with the insulating portion. The electron emission member is housed in a vacuum container in an electron beam generator or an X-ray generator. Therefore, if the insulating segment is disposed in contact with the first inner surface, the opening of the container can be hermetically sealed by the insulating portion. On the other hand, if the insulating portion is also closely attached to the second inner surface, stress is generated in the first direction by the expansion of the insulating portion. In the above-described electron gun, by providing the insulating portion with a gap interposed therebetween with the second inner surface, the expansion of the insulating portion in the first direction can be sufficiently avoided. In the above electron gun, the insulating portion is The expansion of the insulating segment in the second direction can be sufficiently avoided by being disposed in contact with the third inner surface and disposed at a gap from the fourth inner surface. Moreover, by insulating the insulating segments on the plurality of faces of the so-called first and third inner faces, the position of the insulating segments in the container -5 - 200809903 (3) can be surely fixed. That is, the electron gun according to the present invention can be affected by the expansion of the segment. Further, the electron gun is a container having electrical conductivity and covering the surface with a gap between the electron container and the container. In this case, the potential between the container and the container can be set to the same potential (e.g., ground potential) φ as the container, and the shielding effect on the internal wiring or the like can be exhibited. Also, the electron gun is a container for the third inner mask. Thereby, for example, the concave and convex shape in which the segment made of resin or the like is formed and fixed to the third inner surface is firmly fixed to the container. Further, the electron gun further includes: a connector that is connected to the third inner surface of the outer surface of the container, and an inner wiring that extends from the insulation to the electron emission member, and is φ in the electron gun described above, and is received on the first inner surface. Generally, the connectors are arranged such that the directions in which the electrons are emitted are identical to each other (that is, if the connector is disposed on the second inner surface on the second inner surface, it is preferable to avoid the second inner surface and the insulating portion to avoid the adhesion. However, The expansion of the insulating segments in the first direction is avoided, and it is difficult to arrange the connectors in the second interval at intervals, and the present inventors, among the third and fourth inner faces of the second direction, Thirdly, it is preferable to suppress the surface of the insulating member which is provided with the surface of the insulating segment by the insulating member, and therefore the insulating portion can be insulated by the uneven portion or the insulating portion. In the first segment, there is an insulating segment from the connector. At this time, the central axis connector of the other connector). However, the above-mentioned electron gun is the inner surface of the inner surface and the insulating section without reducing the pressure resistance. The inner surface of the connector intersects with the first direction, -6- 200809903 (4) and the insulating segment is placed in contact with the third inner surface. Thereby, the exposure of the connector in the container is suppressed, and a configuration that can appropriately prevent the pressure resistance from being lowered can be obtained. Further, the electron gun is a part of the connector which is placed in the insulating section, and the connector is fixed to the container. Thereby, the insulating section and the container are firmly fixed via the connector. Further, the electron gun may have an insulating section which is disposed between the inner surface and the inner surface except for the first and third inner surfaces. Thereby, the influence by the expansion of the insulating section can be more effectively suppressed. Further, the energy ray generating device of the present invention includes any of the above-described electron guns, and emits electrons emitted from the electron gun or radiation generated by the electrons. Thereby, it is possible to provide an energy ray generating device which can suppress the influence caused by the expansion of the insulating segment. Further, the electron beam generating device of the present invention includes: any one of the above-described electron guns; and a vacuum container that houses the electron emitting member of the electron gun; and φ is disposed in the vacuum container, and transmits the electrons emitted from the electron gun to the outside of the vacuum container. The window material used for the exit. Thereby, it is possible to provide an energy ray generating device which can suppress the influence of the expansion of the insulating segment. Further, the X-ray generator of the present invention includes: any one of the above-described electron guns, and a vacuum container that houses an electron emission member of the electron gun; and a target that receives electrons emitted from the electron gun and emits X radiation, and is provided in a vacuum The container emits the window material used for the outside of the vacuum container through the X-rays discharged from the target. Thereby, it is possible to provide an energy ray generating device which can suppress the influence caused by the expansion of the insulating segment. -7- 200809903 (5) According to the present invention, it is possible to provide an electron gun, an energy ray generating device, an electron beam generating device, and an X-ray generating device which can suppress the influence of the expansion caused by the expansion of the insulating portion. [Embodiment] Hereinafter, the most suitable embodiment of the electron gun, the energy ray generating device, the electron beam generating device, and the X-ray generating device of the present invention will be described in detail with reference to the drawings. In the description of the drawings, the same reference numerals are given to the same or corresponding parts, and the repeated description is omitted. (First Embodiment) Fig. 1 is a side cross-sectional view showing a configuration of a first embodiment of an energy ray generating device for generating an electron beam or an X-ray. 2 is a side cross-sectional view showing a cross section taken along line I-Ι of the first drawing. 3 is a plan cross-sectional view showing a cross section taken along the line Π-II φ in the first drawing. Further, in the first to third figures, the XYZ orthogonal coordinate system is shown for convenience of explanation. The energy ray generation device 1a of the present embodiment includes an electron gun 2 that emits an electron beam EB, a vacuum container 3 that is used to house an electron discharge member of the electron gun 2, and is hermetically sealed, and an exit window configuration unit 1a (or 10b), and vacuum pump 20. Further, the electron gun 2 is a resin member 4 including an insulating section for insulating the high voltage portion, a casing 5 accommodating the resin member 4, and a high withstand voltage connector 6' attached to the side surface of the casing 5, and discharging electrons. The filament 7' of the electron-releasing member and the internal portion of the high-voltage portion -8-200809903 (6) line 9a, 9b, and a portion of the conductive member covering the resin member 4 are provided with an electron gun 2 Container. The casing 5 is made of a conductive material such as metal, and houses the resin member 4 to be described later. The casing 5 of the present embodiment has a rectangular parallelepiped appearance, but the appearance of the casing 5 is not limited thereto. The casing 5 has a hollow interior and has inner faces 5a to 5f. Here, the inner surface 5a (first inner surface) and the 5b (second inner surface) φ are mutually opposed to each other in the predetermined first direction (in the present embodiment, the Z-axis direction). Further, the inner surface 5c (third inner surface) and the 5d (fourth inner surface) are mutually opposite to each other in the second direction (in the present embodiment, the X-axis direction). Further, the inner surface 5 e (the fifth inner surface, referring to the second and third figures) and the 5f (the sixth inner surface, see the second and third figures) are mutually opposite to each other. And a third direction in which the second direction intersects (in the present embodiment, the Y-axis direction). Further, in the present embodiment, the first to third directions are orthogonal to each other, but the directions may be intersected at an angle other than the intersection of positive φ. Further, the casing 5 has openings 5g, 5h. The opening 5g is a circular opening for passing through the internal wirings 9a, 9b, and is formed through the inner surface 5a and the outer surface (upper surface) of the back side. Further, the opening 5h is a circular opening for mounting the connector 6, and is formed to penetrate the inner surface 5c and the outer surface (side surface) of the back side. The resin member 4 is made of an insulating resin such as an epoxy resin, and is provided with an insulating segment for the high voltage portion (internal wirings 9a, 9b) of the insulating electron gun 2 and other portions (for example, the casing 5). -9 - 200809903 (7) The resin member 4 has a base portion 4a and a convex portion 4b that protrudes from the base portion 4a in the first direction (Z-axis direction). The base portion 4a is housed in the casing 5 almost inside the casing 5. Further, the convex portion 4b is protruded from the base portion 4a through the opening 5g, and is exposed by the casing 5. Further, in the convex portion ^4b (in the vicinity of the tip end of the convex portion 4b in the present embodiment), the lamp 'wire 7' is disposed. Further, a gap φ between the base portion 4a of the resin member 4 and the casing 5 is provided. Specifically, the base portion 4a is in contact with the inner faces 5a, 5c of the casing 5 (preferably in close contact), and in addition to the inner faces 5a, 5c, and all other inner faces 5b, 5d~5f It is arranged with a gap A therebetween. By the gap A, the expansion of the resin member 4 by heat can be avoided. Further, the inner surface 5e is formed with a concavo-convex shape. As a result, when the resin member 4 is molded, the resin member 4 is recessed and fixed to the uneven shape, whereby the resin member 4 and the inner surface 5c are firmly fixed. Further, as an example of the uneven shape referred to here, there is a groove-like shape as shown in Fig. 1 or a fine unevenness or the like which is formed by roughening the surface of the inner surface φ 5 c . The high-voltage-resistant connector 6 is a connector (socket) for receiving supply of a power source voltage from the outside of the energy-ray generating device 1a, and is disposed to penetrate from the outer side (side surface) of the casing 5 to the inner surface 5c. The portion 6a of the connector 6 located inside the casing 5 is fixed to the base portion 4a of the resin member 4. Further, a concavo-convex shape is formed on the surface of the portion 6a. When the resin member 4 is molded, the concave resin member 4 is fixed to the uneven shape, and the resin member 4 and the connector 6 are firmly fixed. In addition, as an example of the uneven shape described here, the uneven shape is periodically repeated along the central axis direction of the connector 6 as shown in FIG. 2 and the third to October 2008-09-03 (8). Alternatively, the surface of the connector 6 may be made into fine irregularities or the like which are generated by roughening. Further, the connector 6 is fixed to the side wall of the casing 5 (the side wall constituting the inner surface 5c), and the resin member 4 and the casing 5 are firmly fixed by the connector 6. A connector for a power supply that holds a front end of an external wiring extending from a power supply device (not shown) is inserted into the connector 6'. The φ filament 7 is an electron emission member of the present embodiment for emitting electrons. Both ends of the filament 7 are respectively connected to internal wirings 9a, 9b extending from the connector 6 toward the filament 7. Therefore, when the power supply plug is inserted into the connector 6, both ends of the filament 7 are electrically connected to the power supply device via the external wiring. The filament 7 is heated to a temperature of about 25 00 ° C by a current of several amps, and is discharged by applying a high voltage of several tens of kV to several hundreds kV from another power supply device. Further, the filament 7 is covered by a grid portion 8 which forms an electric field for pulling out electrons. In the grid portion 8, a predetermined voltage is applied via a φ line (not shown). Therefore, the electrons emitted from the filament 7 are emitted as electron beams EB from the holes formed in a part of the grid portion 8. Further, since the internal wirings 9a, 9b' apply the high voltage as described above from the power supply device, the insulation of the casing 5 is ensured by the inside of the resin member 4 formed of the insulating material. The electroconductive member 19 is a conductive member which is provided on the surface of the resin member 4 to cover the surface of the gap A provided between the casing 5. Specifically, the conductive member 19 is a conductive film, or the thin member of the conductive tape is preferably 'completely covered with a portion of the resin member 4 that is not in close contact with the casing 5 - 11 - 200809903 Ο) adhered to the resin Member 4. Further, the conductive member 19 may be a conductive paint or a conductive film. The vacuum container 3 is a member for accommodating the filament 7 of the electron gun 2 to be hermetically sealed. The vacuum vessel 3 is formed in a cylindrical shape extending in the first direction (Z-axis direction), and has a filament 7 for accommodating the electron gun 2, a accommodating chamber 3a for the gate portion 8' and the convex portion 4b, and a detachment electron gun The electron path 3b extending in the emission direction (z-axis direction) of the two outgoing electron beams EB. The electric φ sub-passage 3b is in communication with the accommodating chamber 3a, and the electron beam EB emitted from the electron gun 2 reaches the leading end of the vacuum vessel 3 through the electron passage. Around the electron passage 3b, electromagnetic coils 1-3, 323 which function as electromagnetic deflection lenses which are paired via the electron passage 3b are provided. Further, the vacuum container 3 is formed to be separable in the Z-axis direction, and it is preferable that the storage chamber 3a is configured to be openable and closable by providing a hinge (not shown) in the divided portion. Since the vacuum container 3 has such an open configuration, the filament 7 of the consumable can be easily replaced. The φ energy line generating device 1 a is provided in the vacuum container 3 with one of the exit window forming portions 10a and 1 Ob. The exit window constituting portion 1a is a structural portion for receiving the X-ray XR from the electron beam EB emitted from the electron gun 2 and emitting the X-ray XR toward the outside of the vacuum container 3. When the energy ray generating device 1a includes the exit window constituting portion 10a, the function is an X-ray generating device. Further, the exit window constituting portion 1 is a structural portion used for emitting the electron beam EB emitted from the electron gun 2 toward the outside of the vacuum vessel 3. When the energy-quantity generating device 1a is provided with the exit window configuring portion 1b, it functions as an electron beam generating device. -12- 200809903 (10) The vacuum pump 20 (refer to Fig. 2) is a part for exhausting the inside of the vacuum container 3. When the vacuum container 3 is of the open type as described above, the energy ray generating device 1a is preferably provided with a vacuum pump 2. The vacuum pump 20' of the present embodiment is a side surface (for example, a back side surface of the inner surface 5e) other than the side surface on which the connector 6 is provided on the side surface of the casing 5 (that is, the back side surface of the inner surface 5c). Configured. By arranging the vacuum pump 20 in this manner, the power supply plug 1a can be prevented from being miniaturized by the power supply plug inserted into the connector 6 and the external wiring and the vacuum pump 2, and the vacuum pump 20 is discharged. The gas passage 33 is connected to the storage chamber 3a of the vacuum vessel 3. Here, the fourth (a) diagram is a side cross-sectional view specifically showing a configuration example of the exit window forming portion 1A. Further, Fig. 4(b) is a side sectional view specifically showing a configuration example of the exit window constituting portion 1b. First, referring to Fig. 4(a), the exit window forming unit 10a has a base 11, a window substrate 12, a target 13, a window member 14, and a stacking ring 15. The base cymbal is an approximately cylindrical member and is fixed to the front end of the vacuum vessel 3 (refer to φ Figs. 1 to 3). The susceptor 11 is a through hole 11a having a communication with the electronic passage 3b of the vacuum vessel 3, and a circular pit 1 1b having a center of the through hole 11a. The window substrate 12 is a member for supporting the fixing of the window material 14. The window substrate 12 has a substantially circular plate shape and has a through hole 12a communicating with the through hole 11a at the center portion thereof. The diameter of the window substrate 12 is approximately the same as the inner diameter of the pit lib of the susceptor 11, and the window substrate 12 is embedded in the pit 1 1 b °. The target 13 is an electron beam that is received from the electron gun 2. The EB is used to release the film member used for the X-ray XR. Further, the window member 14 is a plate-like member that is emitted toward the outside of the vacuum container 3 through the twisted wire xr discharged from the target -13 - 200809903 (11) 13 . One of the faces of the window material 1 4! 4 a is located outside the vacuum container 3 and is in contact with the atmosphere. Further, the one surface 14b of the window member 14 is located inside the vacuum container 3. The target 13 is formed on one side 14b of the window member 14. The target 13 is formed of a material (e.g., tungsten) that receives the X-ray XR by receiving the electron beam EB, and the window material 14 is formed of a material (e.g., tantalum) that is efficiently transmitted through the X-ray XR. The push ring 5 is a member that is fixed by pushing the outer peripheral portion of the window substrate φ 12 toward the base 11. The push ring 15 has an opening 15a for exposing the window member 14, and is detachably attached to the base 11 by screwing. Further, referring to Fig. 4(b), the exit window forming portion 1 Ob has a base 11, a window substrate 12, a pressing ring 15, a window material 16, a solder material 17, and a fixing plate 18. In the above, the configuration of the susceptor 1, the window substrate 12, and the pressing ring 15 is the same as that of the exit window forming portion 10a shown in Fig. 4(a). Further, the solder material 17 of the fourth (b) diagram shows a state before melting φ in the process. The window member 16 is a plate member for being emitted from the electron beam EB emitted from the electron gun 2 to the outside of the vacuum container 3. The window member 16 is fixed to the window substrate 12 at one end of the through hole 12a of the window substrate 12, and the one surface 16b of the window member 16 is located outside the vacuum container 3 to be in contact with the atmosphere. Further, the other side 16b of the window member 16 is located inside the vacuum container 3. The window member 16 is formed of a material (e.g., crucible) that efficiently passes through the electron beam EB. The solder material 17 and the fixing plate 18 are members for fixing the window member 16 to the window substrate -14 - 200809903 (12). The solder material 17 and the fixing plate 18 are formed in a substantially circular plate shape, and each has an opening for passing through the electron beam EB. The solder material 17 and the fixing plate 18 are superposed on the window substrate 12 in this order. Further, when the welding window 17 is manufactured, the welding material 17 is melted at a high temperature, and the fixing plate 18, the window member 16 and the window substrate 12 are fixed to each other. In the exit window forming portions 10a, 10b, the susceptor 11 is detachably formed to be the replaceable window substrate 12 (and the window members 14 φ, 16 or the target material 1 3 attached thereto). Further, when the window substrate 12 is replaceable as described above, it is preferable that the energy ray generating device 1a is provided with the vacuum pump 20. The operation of the energy ray generation device 1a of the present embodiment having the above configuration will be described. First, the inside of the vacuum vessel 3 is evacuated by the vacuum pump 20 to be in a vacuum state. Further, a power supply plug prepared outside the energy line generating device 1a is inserted into the connector 6. Thereby, the power supply unit and the internal wirings 9a, 9b are electrically connected to each other. Thereafter, a few times the current is applied from the power supply unit, and a power supply voltage of several tens of kV to several hundreds of kV is applied from the other power supply unit. This power source voltage is supplied to the filament 7 via the internal wirings 9a, 9b, and electrons are discharged from the filament 7. The electrons emitted from the filament 7 are the electron beam EB by the gate portion 8 in the positive direction of the Z-axis. The electron beam EB reaches the emission window forming portion 10a (or 10b) through the electron passage 3b. At this time, the electron beam EB is bundled by the electromagnetic coil 31. Further, the electron beam EB is also subjected to axial correction by the electromagnetic coil 32. The energy ray generation device 1a is provided with the emission window constituting portion 10a [Fig. 4 (a)], and the electron EB is incident on the target -15 - 200809903 (13) 1 3 to release X from the target 13 Line XR. The X-ray XR is transmitted through the window member 14 to the outside of the energy ray generating device 1a. Further, the energy ray generating device 1a has a case where the emission window constituting portion i 〇 b [Fig. 4 (b)]. The electron beam EB is emitted to the outside of the energy ray generating device 1a through the window member 16. The effects of the electron gun 2 and the energy ray generating device 1a of the present embodiment will be described together with the warp and weft of the invention. In the φ energy ray generation device 1a of the present embodiment, the filament 7 is housed inside the vacuum container 3 (the accommodating chamber 3a), but is hermetically sealed by the base portion 4a of the resin member 4 to secure the filament. The inner surface 5a (first inner surface) of the opening 5g is provided in the inner faces 5a to 5f of the casing 5 for the purpose of the opening 5g of the casing 5 of the casing 5, and the resin member 4 (base portion 4a) is closely attached. . Further, in general, in order to reduce the size of the high-pressure portion and the insulating member, the connector is often disposed such that the central axis of the electron beam from the filament and the central axis of the vacuum container are aligned with each other. However, in the present embodiment, when the connector φ 6 is disposed on the inner surface 5b (second inner surface), the pressure resistance of the connector 6 exposed to the inner space of the casing 5 is prevented from being in close contact with each other. The surface 5b and the resin member 4 are preferable. Further, the base portion 4a is also disposed in contact with the inner surface 5a. Therefore, it is difficult to sufficiently avoid the expansion of the resin member 4 in the Z-axis direction when the resin member 4 is in contact with the mutually facing inner faces 5a, 5b. That is, when the resin member 4 is also in close contact with the inner surface 5b, stress is generated in the Z-axis direction by the expansion of the resin member 4. In the electron gun 2 of the present embodiment, the tree member 16 is disposed between the inner surface 5b and the gap member A, and the resin member 4 in the z-axis direction can be sufficiently avoided. Expansion. Further, the same can be said about the influence of the expansion of the resin member 4 with respect to the X-axis direction crossing the Z-axis direction. In the present embodiment, the resin members 4 are in contact with the inner surface 5c in the inner faces 5c, 5d (the third and fourth inner faces) which are disposed to face each other. Further, by providing the gap a between the inner surface 5d of the inner surface 5c and the resin member 4, the expansion of the resin member 4 in the x-axis direction can be sufficiently prevented. Further, by arranging the connector 6 on the inner surface 5c that the resin member 4 is in contact with, the exposure of the connector 6 inside the casing 5 is suppressed, and the pressure resistance can be appropriately prevented from being lowered. In contrast, in the case where the inner surface 5b (second inner surface) is in close contact with the resin member 4 and the inner surface 5a (first inner surface) is separated from the resin member 4, the resin member 4 can be suppressed. The stress generated by the expansion is more remarkable in the positional change of the electron emission member (filament 7) due to the expansion of the resin member 4. Specifically, the inner surface 5b farthest from the filament 7 among the inner faces 5a to 5f of the casing 5 is the fixed resin member 4. Therefore, in this case, not only the expansion of the convex portion 4b is affected, but the expansion of the entire resin member 4 of the base portion 4a affects the position of the filament 7. On the other hand, in the present embodiment, since the resin member 4 is fixed to the inner surface 5a closest to the filament 7, the positional change of the filament 7 is only a change component due to the expansion of the convex portion 4b. The influence on the position of the filament 7 can be suppressed to a minimum. Further, in the case where the inner surface 5a is separated from the resin member 4, the resin member 4 does not seal the opening 5g of the casing 5. Therefore, in order to make the electron emission path -17-200809903 (15) into a vacuum, the inside of the casing 5 must also be vacuumed. In this case, in addition to the difficulty in the field of the gap A of the exhaust casing 5, the casing 5 is required to be highly airtight. In the present embodiment, since the resin member 4 is adhered to the inner surface 5a, the opening 5g' can be appropriately sealed, and the casing 5 can be easily formed. In the electron gun 2 of the present embodiment, the gap φ A can be provided in the Z-axis direction and the X-axis direction by the shape of the resin member 4, so that the resin member 4 in these directions can be sufficiently avoided. Swell. In other words, the electron gun 2 and the energy ray generating device 1a according to the present embodiment can effectively suppress various influences caused by the expansion of the resin member 4. Further, by arranging the connector 6 by a method, the pressure resistance of the connector 6 is not lowered. Further, according to the electron gun 2 of the present embodiment, since the connector 6 is disposed so that the electron emission direction (the Z-axis positive direction) of the filament 7 and the central axis direction of the connector 6 cross each other, the energy line can be shortened. Install φ to set the full length of 1 a. Further, in the case where the energy ray generating device 1a is disposed such that the electron beam EB or the X-ray XR is emitted vertically upward, the connector 6 is disposed on the side surface of the energy ray generating device 1a, and thus The following is made flat, making maintenance easy at the time of setting. Further, as a manufacturing method in which the inner faces 5a, 5b of the casing 5 and the resin member 4 are provided with the gap A between the other inner faces 5b, 5d to 5f and the resin member 4, there are, for example, the following manufacturing methods. First, the resin which becomes the resin member 4 is hardened integrally with the member which comprises the inner surface 5c of the casing 5. At this time, since the inner surface 5c is formed with a concavo-convex shape, the resin can be fixed to the inner surface 5c by fixing it to -18-200809903 (16). Thereafter, the member constituting the inner surface 5a of the casing 5 is adhered to the resin member 4 by using an adhesive which can maintain vacuum airtightness. The adhesive which can maintain this vacuum and airtightness is an example of a member which maintains a vacuum-tightness between the member constituting the inner surface 5a of the casing 5 and the resin member 4. Thereafter, the other inner faces 5b, 5d to 5f' of the component casing 5 are assembled. At this time, it is preferable to design the size of each member constituting the inner faces 5a to 5f of the casing 5 so as to have a gap A at a desired interval. The above configuration of the casing 5 and the resin member 4 can be suitably produced by φ. Further, in the present embodiment, the electron gun 2 is preferably provided with a surface conductive member 19 having a gap A provided between the casing 5 and the surface of the resin member 4. By this, the potential of the surface of the resin member 4 having the gap A provided between the casing 5 and the casing 5 can be made to have the same potential as the casing 5 (for example, the ground potential), and therefore, even in the resin member 4 and the casing 5 The configuration in which the gap A is provided between them can appropriately exhibit the shielding effect on the internal wirings 9 & φ Further, as in the present embodiment, it is preferable that the surface of the inner surface 5 c of the casing 5 has a concavo-convex shape. As a result, when the resin member 4 is molded, the resin member 4 is recessed to the uneven shape of the inner surface 5c and hardened, so that the resin member 4 and the inner surface 5c can be firmly fixed. Further, as in the present embodiment, a part of the connector 6 is twisted in the resin member 4, and the connector 6 is preferably fixed to the casing 5. Thereby, the resin member 4 and the casing 5 can be firmly fixed via the connector 6. Further, as in the present embodiment, the resin member 4 is not limited to the inner faces 5b, 5d, and is inside the inner faces 5e, 5f (i.e., -19-200809903 (17) except the inner faces 5a, 5e. The faces are also preferably disposed between the gaps A. Thereby, the influence by the expansion of the resin member 4 can be more effectively suppressed. (Second Embodiment) Fig. 5 is a side cross-sectional view showing a configuration of a second embodiment of an energy ray generating device for generating an electron beam or an X-ray _. Further, in Fig. 5, for convenience of explanation, the XYZ orthogonal coordinate system 10 is shown. The energy ray generation device 1 b of the present embodiment is different from the energy ray generation device 1a of the first embodiment described above in the arrangement of the vacuum pump 21. The configuration other than the arrangement of the vacuum pump 21 and the operation of the energy ray generating device 1b are the same as those of the energy ray generating device 1a of the first embodiment, and thus detailed description thereof will be omitted. The energy ray generation device 1b of the present embodiment is provided with a vacuum pump 21 instead of the vacuum pump 20 of the first embodiment. The vacuum pump 2 1 is a component for exhausting the inside of the φ vacuum container 3. The vacuum pump 21 is disposed on the side surface of the connector 3 on the same side as the side surface of the casing 5 on which the connector 6 is provided (that is, the side surface intersecting the X-axis direction). Further, the vacuum pump 21 is disposed so as to protrude from the side surface of the vacuum container 3 in the X-axis direction in order to avoid interference with the power supply plug and the external wiring inserted into the connector 6. The vacuum pump 21 is a storage chamber 3& which is connected to the vacuum container 3 via an exhaust passage 34. The vacuum pump of the energy ray generation device may be disposed as the vacuum pump 21 of the present embodiment. Thereby, the connector 6 and the vacuum pump 2 1 are disposed in the same direction with respect to the central axis of the energy ray generating device 1 b, and thus -20-200809903 (18) for the plug of the power supply plug of the connector 6, and the vacuum pump The repair becomes easy. Third Embodiment FIG. 6 is a side cross-sectional view showing a configuration of a second embodiment of an energy ray generating device for generating an electron beam or an X-ray'. Further, in Fig. 6, for convenience of explanation, the XYZ orthogonal coordinate system is shown. The energy ray generating device 1c of the present embodiment is different from the energy ray generating device 1a of the first embodiment in that a vacuum-tight member that constitutes the inner surface 5a of the casing 5 and the resin member 4 is held. . The configuration other than the member and the operation of the energy ray generating device 1c are the same as those of the energy ray generating device 1a of the first embodiment, and thus detailed description thereof will be omitted. The energy ray generating device 1c of the present embodiment is provided with an annular airtight portion 40a formed on the inner surface 5a of the casing 5, and is housed in the groove portion instead of the vacuum airtight adhesive which can hold the first φ embodiment. The 〇-shaped ring 40 in the 40a, the Ο-shaped ring 40 is an example of a member that holds the vacuum airtight between the member constituting the inner surface 5a of the casing 5 and the resin member 4. The ring 40 is a member for improving the airtightness of the storage chamber 3a of the vacuum container 3. The ring 40 is disposed between the member constituting the inner surface 5a of the casing 5 and the resin member 4. Since the energy ray generating device 1c of the present embodiment has the above configuration, it is possible to reduce the influence of the gas released from the adhesive into the accommodating chamber 3a while the inside of the accommodating chamber 3a is held in a vacuum. (19) The electron gun, the energy ray generating device, the electron beam generating device, and the X-ray generating device according to the present invention are not limited to the above-described respective embodiments, and various modifications are possible. For example, in the above embodiments, the configuration in which the electron beam EB or the X-ray XR is emitted in one direction (Z-axis direction) is shown, but the energy ray generating device, the electron beam generating device, or the 'X-ray generating device of the present invention is For example, a linear window material having a longitudinal direction in the X-axis direction or the Y-axis direction may be provided, and the electron beam EB or the φ X-ray XB may be scanned in these directions. Further, in the above embodiments, the so-called open type energy ray generating device has been described. However, the present invention is also applicable to an energy ray generating device of a type in which the electron emitting member cannot be replaced. Further, in each of the above embodiments, a resin member composed of an epoxy resin is described as an example of an insulating segment. The insulating segment of the present invention is not limited to an epoxy resin, and may be composed of, for example, ceramic or a polyoxymethylene resin. Further, in the above embodiments, the configuration in which the high voltage is supplied from the connector will be described, but the Φ voltage circuit may be provided inside the insulating segment. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a side cross-sectional view showing a configuration of a first embodiment of an energy ray generating device for generating an electron beam or an X-ray. Fig. 2 is a side sectional view showing a cross section taken along line I-Ι of Fig. 1; Fig. 3 is a side sectional view showing a cross section taken along line II-II of Fig. 1; -22- 200809903 (20) FIGS. 4(a) and 4(b) are side cross-sectional views specifically showing a configuration example of the exit window constituting portion. Fig. 5 is a side sectional view showing a configuration of a second embodiment of an electron beam generating device for generating an electron beam or an X-ray. Fig. 6 is a side sectional view showing the configuration of a third embodiment of an electron beam generating device for generating an electron beam or an X-ray. [Description of main component symbols] 1 a, 1 b, 1 c : Energy line generating device 2 : Electron gun 3 : Vacuum container 4 : Resin member 4a : Base portion 4 b : Projection 5 : Case 5 a to 5 f : Inner surface 5 g , 5h : Opening 6 : Connector 7 : Filament 8 : Grid 9a , 9b : Internal wiring l 〇 a, l 〇 b : Exit window constituting part 1 1 : Base 12 : Window substrate -23 - 200809903 (21) 13 : Target 14 : Window material 15 : Stacking ring 1 7 : Welding material 1 8 : Fixing plate 1 9 : Conductive member 2 0, 21 : Vacuum pump
3 1，3 2 :電磁線圈 A :間隙 XR ·· X 線 EB :電子線3 1,3 2 : electromagnetic coil A : gap XR ·· X line EB : electron line
-24--twenty four-