TW200809804A - Magnetic recording medium, method for production thereof, and magnetic recording and reproducing device - Google Patents

Abstract

A discrete track-type magnetic recording medium (30) includes a nonmagnetic substrate (1), a magnetic recording track and a servo signal pattern that are provided on at least one side of the nonmagnetic substrate and a part (4) nonmagnetized through implantation (7) of ions from above a mask (6) having a shape of a pattern expected to be separated for physically separating the magnetic recording track and the servo signal pattern. A magnetic recording and reproducing device includes the magnetic recording medium (30), a driving part (26) serving to drive the magnetic recording medium in a direction of recording, a magnetic head (27) composed of a recording part and a reproducing part, means (28) to impart motion to the magnetic head relative to the magnetic recording medium and recording and reproducing signal processing means (29) for entering a signal into the magnetic head and reproducing an output signal from the magnetic head.

Description

200809804 IX. Description of the Invention: [Technical Field of the Invention] The manufacturing method thereof and the present invention relate to a magnetic recording medium magnetic recording and reproducing apparatus used in a hard disk drive. ° [Prior Art] Since the magnetic recording devices such as disk drives, floppy drives and tape drives have greatly increased their importance, many efforts have focused on the magnetic recording media used in the second clothing. The recording density can be greatly changed. Yudou, magnetic write head and partial response maximum matching fine (five) _ fiber ^: surface / ed! r ^ PRML) the introduction of technology 'to make the surface recording density more growth and increase = due to the introduction of giant magnetoresistance (GMR) in recent years The head and the tunnel type magnetoresistance (moving): Bayu, so it continues to increase at a rate of about 1G_ per year. The industry - direct drive to achieve this? In the future to achieve a higher recording density, and spur its magnetic mi on the south of the coercive force (c〇ercive f〇rce), signal and noise ratio (®) in recent years' We have witnessed the industry's continuous efforts to increase the linear recording by 1 degree and to increase the surface recording density by increasing the orbital density. In the latest magnetic recording devices, the track density has been. Interference occurs between the data portions of the Γ 』 邻 邻 , , , , , , , , , , , , , , , 产生 产生 产生 产生 产生 产生 产生 产生 产生 产生This fact hinders the increase in recording density because it immediately causes a decrease in the bit error rate. In order to increase the surface recording density, it is necessary to form individual recording bits on the H recording medium in as small a size as possible to ensure saturation magnetization and magnetic film soil as much as possible in the range of Big. However, when the size of the recording bit is further reduced by a factor of two, it tends to cause the following problem: the magnetization of each bit has the smallest body and the small cross, and the magnetization caused by the thermal fluctuation causes the recorded data to be generated. disappear. ,,, =, because the pitch of the implementation is small, the magnetic recording device requires a highly accurate servoing mechanism (tracking serv〇mechanism), taking into account the maximum possible degree of influence from the adjacent obstinating road for 5 200809804. Elimination, generally requires a method of performing recording in a large width and performing regeneration in a small width during the recording period. = = This method can minimize the impact between adjacent tracks, but it will produce the following problem 2. It is difficult to fully obtain the regenerative output, so it is difficult to ensure a sufficient s calendar. When I want to solve the problem of thermal fluctuations and obtain an appropriate SNR or sufficient output, it is now necessary to increase the density by the lower touch method. · Form an irregular map along the obscuration on the surface of the recording medium. Type, thus making adjacent tracks physically separated from each other. Hereinafter, this technique will be referred to as "discrete track method", and a magnetic recording medium discrete track medium manufactured by this technique. An example of a known magnetic recording medium (for example, moxibustion 2 JP-A 2_-164692) is formed on a non-magnetic substrate having an irregular pattern on the surface, and is capable of obtaining physics. Separate magnetic recording and servo signal patterns. Μίϋϊίί f ί ί The peak of the ferromagnetic layer on the substrate filament and the diarrhea on the surface of the layer have an irregular pattern on the surface of the substrate. This magnetic recording ship is formed in the plane and is magnetically separated from the environment. According to this magnetic recording ship, it is considered that since the occurrence of magnetic walls in the soft magnetic layer can be suppressed, the thermal change can be avoided = the interference between adjacent signals disappears, so that an unmagnetic recording ship can be formed. There are two kinds of discrete methods of detecting the recursiveness of the micro-small heart, that is, the method of forming a track after forming a magnetic recording medium by a complex magnetic recording medium or forming a film for a track = A method of forming a thin film magnetic recording medium (for example, LJP'i·20:4_178794) °r-

Onagnetw layer piOCessing type)", because of its physical processing on the surface of the line, has the disadvantage that the A-day, =, and the dyed media suffers greatly and greatly complicates the manufacturing process. After being used by 3 6 200809804, the emb〇ss pr〇cessing type is not easy to lead every 5 music in the manufacturing process. It is stable with =. In the media, % can't make the floating posture and height of the head overlap with the bribe. The square method can easily find the flat surface, so this method does not _ The shape continues to exist on the surface to be completed. This is the surface of the discrete-type recording medium that is processed by the 1-layer layer, because r匕, ί = the magnetic layer for recording and then magnetic The pattern of the pattern, (Pnntlng method) is used to form the pattern, and the part of the non-magnetic part of the #f, / non-magnetic part rides the material, so that the surface of the result is flat = S1 〇 2 or stone 糸 non-magnetic material and Formed on the bean, and the surface layer is coated with a thousand or more protective layers, which is hybridized and not only. The discrete-orbiting medium of the == residual type makes the manufacturing process more complicated and less accessible. Flat surface. And the distance ', § Therefore ==, 1 and the distance between the layers becomes thinner with the protective film layer In order to amplify the wheel and the recording medium can be stably floated, and the type of signal required to be allowed to read and write on the head dimension can be sinned to the magnetic layer and avoid the adjacent track method, J: at f No one has proposed - the manufacture of a discrete obsessive media, the surface of the money is not cited _ test and can be _ flat device ίί force: J plus and the technical difficulties of the magnetic record and thus increase the surface recording density 200809804 It is better to obtain higher recording and reproduction characteristics than in the past. In particular, the discrete layer type formed after the magnetic layer has a conventional processing formed in the magnetic layer processing type, and the present day is reduced in the media. In contrast, the magnetic layer removal step and the application of the photoresist by the photoresist, the simple manufacturing method and the less production result in the contamination = the second step is provided - the species is well characterized and confirmed = and this The invention provides a magnetic recording medium. In order to solve the above problems, the present invention provides an off-recording device. The medium and the magnetic body are invaded. [Invention] The present invention provides a discrete method. Magnetic record The recording medium includes: a non-magnetic substrate; is disposed on the magnetic sample, and is ion implanted from above the self-mask; the manager separates the magnetic recording track from the 錬 signal, and the I shape is According to the first aspect of the magnetic recording medium, its T. Hai 丨 丨 。 己 己 己 己 己 己 己 己 己 己 己 己 己 己.

The Aii hairpin provides a method for manufacturing a discrete-type magnetic recording medium, which is disposed on at least one side of a non-magnetic substrate having physically separated magnetic recording tracks, the method comprising the following steps: The shape of the south ti/t ® case is implanted on the ion, thereby forming the shape. ^ 5 Separating the magnetic recording track and the non-magnetization of the servo signal pattern is provided by the magnetic recording and reproducing device. As a fourth aspect, the clothing 0 3 is a combination of the following: a magnetic recording medium according to the first or second aspect; a driving portion 'for driving the magnetic recording medium in the recording direction; and a magnetic reading head for the recording portion a regenerative unit; a device for moving the magnetic head relative to the magnetic recording medium; and a recording and reproducing signal processing device for causing the signal to enter the magnetic read 8 200809804 write head and regenerating the wheel from the magnetic head Signal. In the magnetic recording medium having the magnetic screen disposed as the film layer on the non-magnetic substrate, the present invention can provide: a magnetic recording medium, a medium sufficient to ensure stable head scale of the head, and excellent separation Characteristics, „=, affected by signal interference and good high recording density. The invention of the field allows the omission of the dry process steps of the ultra-layer processing magnetic layer. The step of removing the light of the light, not only can increase the productivity, can avoid the generation of particles and can produce the magnetic recording and reproducing device manufactured by the company. Because of the use of the body of the invention, it has a good head floating. Characteristics and Good [Embodiment] The cross-sectional structure of the discrete magnetic recording medium to be invented by the invention. The cross-sectional structure of the discrete magnetic recording medium of the invention of the invention is ϋίίΪΓ i ion implanted. The magnetic record of the present invention The medium 3G has a soft magnetic lubricating film on the first surface of the non-magnetic substrate 1 from the lower layer and 2, and the magnetic recording medium which is formed on the surface of the non-magnetic substrate 1 is omitted. Any of the patterns, the formation of the material (four) refers to the good ground; the purpose of the county, the magnetic layer of the miscellaneous ® case 3 is more than the thickness of the magnetic part of the L, and the non-magnetic part of 200 nm or less. For the purpose of increasing the density of the & scale, the track pitch P(=W+L) can be reduced to a range of 300 nm or less by 200809804. The US Cup can be used as the base of the A1 4-pass carbonated glass made of Al-Mg alloy with A1 as the domain, and the aluminosilicate glass. A substrate made of various resins such as glass-tao-wa and (four), titanium, and terracotta. The upper magnetic layer on the first surface of the non-magnetic substrate of the t-quality can be an ancient tree-like recording layer or a perpendicular magnetic recording layer. However, in order to achieve the goal of 'degree of recording', it is preferable that the vertical magnetic recording layer is formed mainly by Co as a main component/composite metal, and is also magnetized. 3 can be used by non-magnetic CrM The underlying layer and the ferromagnetic CoCrftTa magnetic sound are used as the magnetic recording layer for the in-plane magnetic recording medium. The 曰 S layer is formed as a backing layer, a position control film, and a selective 磁性 in the magnetic recording i used in the perpendicular magnetic recording medium, and the support layer is made of soft magnetic Fec. Alloy (for example

FeTaN &gt; FeTaC ^Co CoTaZr ^ CoZrNB ΓNlCr, N-aged, select = intermediate TOCo-SCr-lSPt-loSt, TM'^ 5 nmiiiitf thickness is 3 η&quot;&quot; or thicker to 2Q nm or thinner Good land can be ίτ or thinner for writing. The miscellaneous riding position only needs to comply with the magnetic alloy and laminated structure categories used for reading output and input. The layer is /, and has a film thickness of 4 inches or more, in degrees. At the same time, in view of the fact that the deterioration of the representative number is usually proportional to the increase in output, it is necessary to set the magnetic layer 10 200809804 to the optimum film thickness. In general, a film is formed by a sputtering method to serve as a magnetic recording layer. A film of the protective film 5 is formed on the first surface of the magnetic recording layer. Yu Yuqiao, the mountain can use carbon (6), hydrogenated carbon (four), carbon nitride (CN = =, stone anti-fossil (SiC) and other carbon-containing species, Si〇2, Zn〇3, TiN and other commonly used ^匕 film layer material. Two or more layers can be used to form the protective film layer. ,, ', the film thickness of the protective film layer 5 must be less than 10 nm. If the protective film layer - Γ ' exceeds the lead between the head and the magnetic layer The distance is excessively increased. The input and exit signals are fully enhanced. Generally speaking, the plating method or CT method is used. The layer is formed on the film by the age of the film. For example, the /door #润π layer is usually tied! Formed to a thickness of 4. The following is the result of the discretion of Wei's narrative tree, although the recording medium is produced. Zhongmen ί Hr is a soft magnetic layer of FeCoB on the surface of a younger brother, a magnetic layer of Ru iH iG2 alloy and a protective layer of carbon. The outer substrate (4) is placed on the processing chamber of the ion implanting device and the magnetic layer is directly above the soil plate (the substrate and the magnetic layer are both perpendicular to the ion implantation side to activate the ion implantation to demagnetize the magnetic layer of the thief) To the 'in order to use the ion implantation device to achieve the atomic implantation of the plant ==^, although: ion implantation can be made two implants and used to remove the magnetic mixture ^. It only needs to be implanted in the depth direction to reach deep = medium == straight, considering the magnetic layer, so that the atom is decorated to the magnetic layer: the depth of the second one 11 200809804 implants the atom into the magnetic layer and The appropriate part is demagnetized, so this limit the depth of implanting. The atomic thief degree is appropriately determined by the intensity of the accelerating voltage of the ion implantation implant. In addition to the protective layer of the magnetic recording medium other than the protective layer 3, it is possible to use an RF sputtering method for depositing a film layer and a Dc sputtering method. The Shishishan 1 protective film layer usually uses the p-gvd method to carry out the iron-like transformation into the ruthenium film. However, this method is not the only way. The structure of the magnetic recording and reproducing apparatus of the present invention is shown in Fig. 2. The recording and reproducing apparatus has: a magnetic recording medium 3 of the present invention; a neighbor 26 for driving the medium in the recording direction; a magnetic head 27 composed of a recording and reproducing unit; a head drive and a recording medium 30 moves; and the recording and reproducing signal system 29, the page is combined with a processing device for causing the signal to enter the magnetic head 27 and regenerate the signal generated by the magnet 27. By combining the above elements, it is possible to construct a magnetic recording apparatus having a high height. Due to the physical processing of the recording track of the magnetic recording medium, the present invention is capable of actuating the reproducing head and the head at nearly the same width, but so far has been widely used to make the (four) 攸 (4) to the dump head less than = recorded The width of the head is used to eliminate the influence of the region of magnetization over the edge portion of the track. Therefore, we can obtain satisfactory regenerative output and high SNR. Moreover, 'by forming a magnetic regenerative section with a giant magnetoresistance (GMR) read/write head or tunnel type magnetoresistance (10)r), 3 can also obtain a satisfactory signal at a high recording density. A magnetic recording device with a density of three recordings. The recording density can be further increased by incorporating a signal circuit </ RTI> which follows the maximum likelihood decoding method. Satisfactory S-legs can be obtained even if recording and reproducing are performed under the following conditions: every inch of i〇〇k or more, the degree of parentalness, lQQ〇k or more The linear recording density of the element, and the recording density of 100 G or more bits per square inch. 12 200809804 Comparative Example 1: S The vacuum chamber in which the HD substrate is placed in the glass substrate is evacuated to a lower vacuum. The glass substrate used herein is an outer diameter of 65 and an inner diameter of 2 measured by using a glass ceramic pottery having 20 parts of the upper Μ, _7〇5, and Sb2〇3—Ζη0 as components. 〇 deleted and has an average surface roughness (Ra) of 2 a. /, the rf money mining method forms a thickness of 200 coffee on the nucleus substrate

Si〇2fe comes as an embossed pre-layer. The pre-county of r is stenciled by the slab of the slab which is made by Nl. The die has a depth of 1 〇〇 (10) to a depth of 2°. Use the relevant design _ (four) ίί / f from the ion beam side to the side Sl02 layer. The thin portion of the Si〇2 layer is slanted to the depth of the substrate, resulting in the formation of concave and convex patterns conforming to the irregular pattern formed by the stamper on the surface of the substrate n. On the first surface of the -ρ plate, the soft magnetic layer of FeCoB, the middle layer of ru, and the intermediate layer of ru 〇c〇-5Cr-15pt-1〇&amp;〇2 alloy are sequentially stacked by the DC sputtering method in the following order. The magnetic layer [skin layer] stomach is further stacked with a C (carbon) protective film layer and a fluorine-based lubricating film by a p-CVD method. The thickness of the magnetic layer of FeCoB is 6qq, the thickness of the intermediate layer is 1〇〇, the thickness of the magnetic layer is 15〇 A, and the average thickness of the protective layer of c (carbon) is 4 coffee. This sample was obtained as an example of the relief type product of Comparative Example 1. Comparative Example 2: The vacuum chamber in which the glass substrate having the HD position was placed was previously evacuated to a vacuum of 1.0 × 10 5 Pa or less. The glass substrate used herein is made of a glass ceramic using LizSi^, AHΜ, MgO-P2〇5, and SM3-ZnO as components. The measured outer diameter was 65 faces and the inner diameter was 2 legs, and had an average surface roughness (Ra) of 2 A.

The magnetic layers of the layer p, rt t intermediate layer and 7〇C〇~5Cr-15Pt_10Si〇2 alloy are sequentially stacked on the glass substrate by DC deposit plating method in the following order:] ;f processing to form a magnetic pattern on the 』 Ϊ Ϊ Ϊ ί 预定 预定 预定 预定 预定 预定 预定 预定 在 在 在 在

The stone film removes the photoresist of the remaining convex portion by the concave portion of the magnetic layer, and forms the removed portion of the magnetic layer. Thereafter, the lubricating member is produced by P-CVD etching. Utilizing the ion beam in the empty chamber of the first to eight upper 乂 n f working chambers, and passing the red gas into the true

3〇〇W^RF products. In the sample processing of the magnetic layer manufacturing product of Comparative Example 2, the non-heteromaterial was used as the object of implementation. In #太杈口 Β Β ^ ^ Use Si〇2. The film is manufactured using sputtering technology. The clothes are made by Ben-闰, and the shape of the light is to be shaped. The shape of each line is formed by the concave portion formed on the first surface of the protective film layer and the convex = concave portion and the convex portion are formed by Xiangxia. : It is difficult to give a given pressure: the protective film formed by the double, and press the stamp under high pressure. Or ί, by using a thermosetting resin, a plurality of tracks formed by curing a resin, etc. === For example, the method of electron beam-forming technology has a fine material type. Lai is recording ordinary numbers _ service signal pattern such as blast pattern um pattern), gray line drawing: (! ray cord pattern) and header pattern (Qing Yi, 廿 ^ ^ when using private light, use dry _, Reactive ion paste or ion milling 14 200809804 to remove the photoresist and the photoresist on the surface. Because of the retention;: The part of the protective layer on which the pattern is applied is = The protective layer' is only allowed to have a vacuum of the pattern example 1: the wall of the wall, / to 〇l〇^ or lower. The average surface roughness of 'Mtr; A Sb2〇3-Zn0^^^ a used here Degree (L) has an inner diameter of 20 faces' and has a stack of FeCoB ΐίϊ p^ by DG贱 method in the order of 2 ^ 基板 基板 ; ; ; ; ; ; 依 依 依 依 依 依 依 依 依 依 依 咖 咖 咖 咖Hi FeC〇B _ A bone amine. The measured degree is (10)a and 岐) protective film layer (10)a, magnetic layer thickness is pre-existing; Specifically, there are 5 layers of the film layer: sub == ion: the result is a non-magnetic pattern formed in the desired shape; ί sample is used as an example! The manufacturing sample = household ^^ is set at 28 (four), and the implant dose is fixed in the middle to accelerate the voltage and use the read/write head to read the $ write head to record ^ 3Τ «(sauash) 〇: 4ί^Π ί * This means: the shape is good, the butterfly is fixed, the hiding is in the forest === 15 200809804

==f=tapping mode) resolution and rate. The results of the evaluation are not available in the list below. Compared to the samples of Comparative Examples i and 2, a very low amount of surface roughness was achieved. This means that this improvement resulted in the evaluation of the sliding avalanche characteristics of a pair of samples of riu Comparative Example 1 &amp; This evaluation was carried out in a device manufactured by s〇ny/Tektr〇nix c〇 and sold under the product code "DS41GG", and using a slip head (slider }1 manufactured by Glidenght Hardware Corp. (1) 50%. The results are shown in the table below. Very clear: κ1 in the floating characteristics of the head is better than the comparative example 1 and 2 in the case of a low sliding avalanche (glide avalanche) A comparison with Comparative Examples 1 and 2 clearly shows that the present invention can easily manufacture discrete media by implanting ions above the mask of the pattern shape that needs to be separated, thereby allowing the magnetic layer in the desired shape to go. Magnetization, this medium exhibits a sufficiently low surface roughness and produces a stable read/write head floating. As in Example 1 and Comparative Labor and 2, it is clear earlier that 俾 reduces the surface roughness as much as possible. The manufacture of this method forms an important factor for achieving the purpose of stabilizing the head floating. The present invention preferably fixes the surface roughness at Ra$2 nm, and more preferably at Ra $1·5 nm. Obvious: the invention is a non-separating patterning An effective device for the magnetic and magnetic layers, and more capable of producing a patterned medium that can achieve a higher recording density than the discrete method. '月16 200809804 Table 1 Implanted ion species Implanted ion amount (atoms/cm2) Accelerating voltage (keV) SNR (dB) 3T extrusion (%) Ra (nm) sliding avalanche (nm) Example 1 Si 5xel6 28 13.2 85.3 0.5 5.5 Comparative Example 1 No benefit 6.5 54.3 8.0 12.1 Comparative Example 2 No 10.5 69.8 2.7 9.5 BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the structure of a magnetic recording medium of the present invention. Fig. 2 is a structural explanatory view of a magnetic recording and reproducing apparatus of the present invention. [Description of main components] 1. Nonmagnetic substrate 2: soft magnetic layer And intermediate layer 3: magnetic layer 4: non-magnetized layer 5: protective film layer 6: mask 7: ion implantation 26: media drive unit 27: magnetic head 28: head drive unit 29 · recording and reproduction Signal system 30: magnetic recording medium 17

Claims (1)

200809804 X. Patent application scope: 1. A discrete track type magnetic recording medium comprising: a non-magnetic substrate, a magnetic recording track and a service signal pattern disposed on at least one side of the non-magnetic substrate; and a non-magnetized portion The mask having the pattern shape to be separated is subjected to ion implantation and demagnetized, and the non-magnetized portion is used to physically separate the magnetic recording track from the servo signal pattern. 2. The discrete-type magnetic recording medium of claim 1, wherein the magnetic property δ has been recorded as a vertical magnetic recording track. ^ A method of manufacturing a discrete-type magnetic recording medium disposed on at least one side of a non-magnetic substrate having physically separated magnetic recording tracks and servo signal patterns, the method comprising the following steps: Ion implantation is performed above the separated pattern-shaped mask, thereby forming a shape. A magnetic recording and reproducing apparatus for physically separating the magnetic recording track and the signal pattern, including a combination of the following: The magnetic recording medium of claim 1 or 2; Driving the magnetic recording medium in the recording direction; the write head 'constructed by the recording unit and the reproducing unit; moving; and = clothing, moving the magnetic head relative to the magnetic recording medium from the manual reading Write and regenerate eleven, schema: 18