TW200802407A - Rotational/bidirectional moving device, alignment unit, and alignment stage - Google Patents

Rotational/bidirectional moving device, alignment unit, and alignment stage

Info

Publication number
TW200802407A
TW200802407A TW096107557A TW96107557A TW200802407A TW 200802407 A TW200802407 A TW 200802407A TW 096107557 A TW096107557 A TW 096107557A TW 96107557 A TW96107557 A TW 96107557A TW 200802407 A TW200802407 A TW 200802407A
Authority
TW
Taiwan
Prior art keywords
rotational
alignment
driving shaft
movable element
stage
Prior art date
Application number
TW096107557A
Other languages
Chinese (zh)
Inventor
Tatsuhiko Koba
Original Assignee
Yaskawa Denki Seisakusho Kk
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Denki Seisakusho Kk filed Critical Yaskawa Denki Seisakusho Kk
Publication of TW200802407A publication Critical patent/TW200802407A/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G—PHYSICS
    • G12—INSTRUMENT DETAILS
    • G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
    • G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Linear Motors (AREA)
  • Details Of Measuring And Other Instruments (AREA)
  • Control Of Position Or Direction (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Machine Tool Units (AREA)

Abstract

To provide an alignment stage capable of miniaturizing an alignment device requiring great thrust, and preventing movement caused by a self weight even when the stage is tilted. A linear guide 103 provided with a support mechanism is placed on a rotation mechanism 102, and the rotation mechanism 102 is placed on a linear motor device 101, to thereby constitute this rotational/bidirectional moving device I capable of moving the support mechanism rotationally/bidirectionally. Two rotational/bidirectional moving devices I are provided, and a stator driving shaft 101b for each linear motor device 101 is used in common, and each movable element 101a is arranged in series on the stator driving shaft 101b, and a magnet M is arranged on the side of the movable element 101a and an armature C is arranged on the stator driving shaft 101b side, and a brake is disposed on the movable element 101a so that a brake shoe can be pressed onto the side face of a rail.
TW096107557A 2006-03-06 2007-03-05 Rotational/bidirectional moving device, alignment unit, and alignment stage TW200802407A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006060036A JP2007240213A (en) 2006-03-06 2006-03-06 Rotational/bidirectional moving device, alignment unit, and alignment stage

Publications (1)

Publication Number Publication Date
TW200802407A true TW200802407A (en) 2008-01-01

Family

ID=38585902

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096107557A TW200802407A (en) 2006-03-06 2007-03-05 Rotational/bidirectional moving device, alignment unit, and alignment stage

Country Status (3)

Country Link
JP (1) JP2007240213A (en)
KR (1) KR100859656B1 (en)
TW (1) TW200802407A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102053625B (en) * 2010-12-30 2012-06-20 厦门大学 Method for controlling moving slide block on curved surface
CN106879244B (en) * 2016-12-30 2019-09-13 大连益盛达智能科技有限公司 A kind of full-automatic FOG binding machine Teflon charging tray clamp system

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004038837A (en) 2002-07-08 2004-02-05 Adtec Engineeng Co Ltd Alignment stage
JP3604686B1 (en) 2003-06-03 2004-12-22 株式会社ファースト 4-axis XYθ table and control method thereof
US7848832B2 (en) 2004-11-30 2010-12-07 Kabushiki Kaisha Yaskawa Denki Alignment apparatus
JP4742663B2 (en) 2005-04-26 2011-08-10 株式会社安川電機 Alignment device

Also Published As

Publication number Publication date
KR20070091535A (en) 2007-09-11
JP2007240213A (en) 2007-09-20
KR100859656B1 (en) 2008-09-23

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