TW200742494A - Short arc type discharge lamp operating apparatus, ultraviolet irradiation apparatus and method of ultraviolet irradiating - Google Patents

Short arc type discharge lamp operating apparatus, ultraviolet irradiation apparatus and method of ultraviolet irradiating

Info

Publication number
TW200742494A
TW200742494A TW095142251A TW95142251A TW200742494A TW 200742494 A TW200742494 A TW 200742494A TW 095142251 A TW095142251 A TW 095142251A TW 95142251 A TW95142251 A TW 95142251A TW 200742494 A TW200742494 A TW 200742494A
Authority
TW
Taiwan
Prior art keywords
arc type
short arc
ultraviolet
mercury lamp
ultraviolet irradiation
Prior art date
Application number
TW095142251A
Other languages
English (en)
Other versions
TWI344320B (en
Inventor
Kouichi Tamai
Hisao Kousaka
Yoshitaka Fujita
Kazuhiro Shiraishi
Original Assignee
Harison Toshiba Lighting Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2005376287A external-priority patent/JP2007179842A/ja
Priority claimed from JP2006083343A external-priority patent/JP2007258085A/ja
Application filed by Harison Toshiba Lighting Corp filed Critical Harison Toshiba Lighting Corp
Publication of TW200742494A publication Critical patent/TW200742494A/zh
Application granted granted Critical
Publication of TWI344320B publication Critical patent/TWI344320B/zh

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70008—Production of exposure light, i.e. light sources
    • G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/073—Main electrodes for high-pressure discharge lamps

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • General Physics & Mathematics (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
  • Circuit Arrangement For Electric Light Sources In General (AREA)
TW095142251A 2005-12-27 2006-11-15 Short arc type discharge lamp operating apparatus, ultraviolet irradiation apparatus and method of ultraviolet irradiating TWI344320B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2005376287A JP2007179842A (ja) 2005-12-27 2005-12-27 ショートアーク形水銀ランプ点灯装置、紫外線照射装置および紫外線照射方法
JP2006083343A JP2007258085A (ja) 2006-03-24 2006-03-24 ショートアーク形水銀ランプ装置

Publications (2)

Publication Number Publication Date
TW200742494A true TW200742494A (en) 2007-11-01
TWI344320B TWI344320B (en) 2011-06-21

Family

ID=38504817

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095142251A TWI344320B (en) 2005-12-27 2006-11-15 Short arc type discharge lamp operating apparatus, ultraviolet irradiation apparatus and method of ultraviolet irradiating

Country Status (2)

Country Link
KR (1) KR100840798B1 (zh)
TW (1) TWI344320B (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI398192B (zh) * 2008-07-23 2013-06-01 Ushio Electric Inc Ultraviolet light irradiation device and ultraviolet light irradiation device
TWI399787B (zh) * 2008-03-06 2013-06-21 Ushio Electric Inc Ultraviolet irradiation unit and ultraviolet radiation treatment device
TWI407483B (zh) * 2008-02-21 2013-09-01 Ushio Electric Inc Excimer lamp
TWI594290B (zh) * 2013-03-25 2017-08-01 Ushio Electric Inc Short arc discharge lamp

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002367837A (ja) * 2001-06-06 2002-12-20 Ushio Inc 起動回路を有するランプ点灯装置
JP2004056086A (ja) * 2002-05-31 2004-02-19 Ushio Inc ランプ点灯制御装置および光照射装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI407483B (zh) * 2008-02-21 2013-09-01 Ushio Electric Inc Excimer lamp
TWI399787B (zh) * 2008-03-06 2013-06-21 Ushio Electric Inc Ultraviolet irradiation unit and ultraviolet radiation treatment device
TWI398192B (zh) * 2008-07-23 2013-06-01 Ushio Electric Inc Ultraviolet light irradiation device and ultraviolet light irradiation device
TWI594290B (zh) * 2013-03-25 2017-08-01 Ushio Electric Inc Short arc discharge lamp

Also Published As

Publication number Publication date
KR100840798B1 (ko) 2008-06-23
KR20070069006A (ko) 2007-07-02
TWI344320B (en) 2011-06-21

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees