TW200741843A - Acoustic energy system, method and apparatus for processing flat articles - Google Patents

Acoustic energy system, method and apparatus for processing flat articles

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Publication number
TW200741843A
TW200741843A TW096102102A TW96102102A TW200741843A TW 200741843 A TW200741843 A TW 200741843A TW 096102102 A TW096102102 A TW 096102102A TW 96102102 A TW96102102 A TW 96102102A TW 200741843 A TW200741843 A TW 200741843A
Authority
TW
Taiwan
Prior art keywords
transducer
flat article
liquid
rotatable support
acoustic energy
Prior art date
Application number
TW096102102A
Other languages
Chinese (zh)
Other versions
TWI528436B (en
Inventor
Pejman Fani
John Korbeler
Mark Rouillard
James Brown
Chad Hosak
Original Assignee
Akrion Technologies Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Akrion Technologies Inc filed Critical Akrion Technologies Inc
Publication of TW200741843A publication Critical patent/TW200741843A/en
Application granted granted Critical
Publication of TWI528436B publication Critical patent/TWI528436B/en

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  • Cleaning Or Drying Semiconductors (AREA)

Abstract

A system, apparatus and method for processing this flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. in one aspect, the invention is a system for processing flat articles comprising: a rotatable support for supporting a flat article; a first dispenser for applying liquid to a first surface of a flat article on the rotatable support; a second dispenser for applying liquid to a second surface of a flat article on the rotatable support; a first transducer assembly comprising a first transducer for generating acoustic energy and a first transmitter acoustically coupled to the first transducer, the first transducer assembly positioned so that when the first dispenser applies liquid to the first surface of a flat article on the rotatable support, a first meniscus of liquid is formed between a portion of the first transmitter and the first surface of the flat article; and a second transducer assembly comprising a second transducer for generating acoustic energy and a second transmitter acoustically coupled to the second transducer, the second transducer assembly positioned so that when the second dispenser applies liquid to the second surface of the flat article on the rotatable support, a second meniscus of liquid is formed between a portion of the second transmitter and the second surface of the flat article.
TW096102102A 2006-01-20 2007-01-19 Acoustic energy system, method and apparatus for processing flat articles TWI528436B (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US76082006P 2006-01-20 2006-01-20
US83796506P 2006-08-16 2006-08-16
US85093006P 2006-10-11 2006-10-11

Publications (2)

Publication Number Publication Date
TW200741843A true TW200741843A (en) 2007-11-01
TWI528436B TWI528436B (en) 2016-04-01

Family

ID=56361392

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096102102A TWI528436B (en) 2006-01-20 2007-01-19 Acoustic energy system, method and apparatus for processing flat articles

Country Status (1)

Country Link
TW (1) TWI528436B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI651770B (en) * 2013-09-18 2019-02-21 美商北方華創艾可隆公司 System, device and method for processing substrate using acoustic energy

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI651770B (en) * 2013-09-18 2019-02-21 美商北方華創艾可隆公司 System, device and method for processing substrate using acoustic energy

Also Published As

Publication number Publication date
TWI528436B (en) 2016-04-01

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