TW200741843A - Acoustic energy system, method and apparatus for processing flat articles - Google Patents
Acoustic energy system, method and apparatus for processing flat articlesInfo
- Publication number
- TW200741843A TW200741843A TW096102102A TW96102102A TW200741843A TW 200741843 A TW200741843 A TW 200741843A TW 096102102 A TW096102102 A TW 096102102A TW 96102102 A TW96102102 A TW 96102102A TW 200741843 A TW200741843 A TW 200741843A
- Authority
- TW
- Taiwan
- Prior art keywords
- transducer
- flat article
- liquid
- rotatable support
- acoustic energy
- Prior art date
Links
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
A system, apparatus and method for processing this flat articles, such as semiconductor wafers, with acoustical energy. In a cleaning process, the inventive system, apparatus and method can remove particles from both sides of a wafer more efficiently and effectively. in one aspect, the invention is a system for processing flat articles comprising: a rotatable support for supporting a flat article; a first dispenser for applying liquid to a first surface of a flat article on the rotatable support; a second dispenser for applying liquid to a second surface of a flat article on the rotatable support; a first transducer assembly comprising a first transducer for generating acoustic energy and a first transmitter acoustically coupled to the first transducer, the first transducer assembly positioned so that when the first dispenser applies liquid to the first surface of a flat article on the rotatable support, a first meniscus of liquid is formed between a portion of the first transmitter and the first surface of the flat article; and a second transducer assembly comprising a second transducer for generating acoustic energy and a second transmitter acoustically coupled to the second transducer, the second transducer assembly positioned so that when the second dispenser applies liquid to the second surface of the flat article on the rotatable support, a second meniscus of liquid is formed between a portion of the second transmitter and the second surface of the flat article.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US76082006P | 2006-01-20 | 2006-01-20 | |
US83796506P | 2006-08-16 | 2006-08-16 | |
US85093006P | 2006-10-11 | 2006-10-11 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200741843A true TW200741843A (en) | 2007-11-01 |
TWI528436B TWI528436B (en) | 2016-04-01 |
Family
ID=56361392
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096102102A TWI528436B (en) | 2006-01-20 | 2007-01-19 | Acoustic energy system, method and apparatus for processing flat articles |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI528436B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI651770B (en) * | 2013-09-18 | 2019-02-21 | 美商北方華創艾可隆公司 | System, device and method for processing substrate using acoustic energy |
-
2007
- 2007-01-19 TW TW096102102A patent/TWI528436B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI651770B (en) * | 2013-09-18 | 2019-02-21 | 美商北方華創艾可隆公司 | System, device and method for processing substrate using acoustic energy |
Also Published As
Publication number | Publication date |
---|---|
TWI528436B (en) | 2016-04-01 |
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