TW200741398A - System and method for controlled mixing of fluids and multiplexing setpoints - Google Patents

System and method for controlled mixing of fluids and multiplexing setpoints

Info

Publication number
TW200741398A
TW200741398A TW096106720A TW96106720A TW200741398A TW 200741398 A TW200741398 A TW 200741398A TW 096106720 A TW096106720 A TW 096106720A TW 96106720 A TW96106720 A TW 96106720A TW 200741398 A TW200741398 A TW 200741398A
Authority
TW
Taiwan
Prior art keywords
fluids
setpoints
multiplexing
controlled mixing
mixture
Prior art date
Application number
TW096106720A
Other languages
English (en)
Inventor
J Karl Niermeyer
Robert F Mcloughlin
Joseph E Smith
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200741398A publication Critical patent/TW200741398A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80—Forming a predetermined ratio of the substances to be mixed
    • B01F35/83—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices
    • B01F35/831—Forming a predetermined ratio of the substances to be mixed by controlling the ratio of two or more flows, e.g. using flow sensing or flow controlling devices using one or more pump or other dispensing mechanisms for feeding the flows in predetermined proportion, e.g. one of the pumps being driven by one of the flows
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00—Control of flow ratio
    • G05D11/16—Controlling mixing ratio of fluids having different temperatures, e.g. by sensing the temperature of a mixture of fluids having different viscosities
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
    • B01F2101/58—Mixing semiconducting materials, e.g. during semiconductor or wafer manufacturing processes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67017—Apparatus for fluid treatment
    • H01L21/67063—Apparatus for fluid treatment for etching
    • H01L21/67075—Apparatus for fluid treatment for etching for wet etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/0318—Processes
    • Y10T137/0324—With control of flow by a condition or characteristic of a fluid
    • Y10T137/0329—Mixing of plural fluids of diverse characteristics or conditions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Accessories For Mixers (AREA)
TW096106720A 2006-03-01 2007-02-27 System and method for controlled mixing of fluids and multiplexing setpoints TW200741398A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/365,395 US7684446B2 (en) 2006-03-01 2006-03-01 System and method for multiplexing setpoints

Publications (1)

Publication Number Publication Date
TW200741398A true TW200741398A (en) 2007-11-01

Family

ID=38471313

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096106720A TW200741398A (en) 2006-03-01 2007-02-27 System and method for controlled mixing of fluids and multiplexing setpoints

Country Status (3)

Country Link
US (1) US7684446B2 (zh)
CN (1) CN101573174A (zh)
TW (1) TW200741398A (zh)

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Also Published As

Publication number Publication date
US7684446B2 (en) 2010-03-23
US20070217442A1 (en) 2007-09-20
CN101573174A (zh) 2009-11-04

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