TW200738360A - Substrate transport method and apparatus thereof - Google Patents

Substrate transport method and apparatus thereof

Info

Publication number
TW200738360A
TW200738360A TW095144424A TW95144424A TW200738360A TW 200738360 A TW200738360 A TW 200738360A TW 095144424 A TW095144424 A TW 095144424A TW 95144424 A TW95144424 A TW 95144424A TW 200738360 A TW200738360 A TW 200738360A
Authority
TW
Taiwan
Prior art keywords
substrate
transport
transport path
supporting
round belts
Prior art date
Application number
TW095144424A
Other languages
English (en)
Chinese (zh)
Inventor
Haruhiko Yoshimi
Yoshihisa Konishi
Shigeharu Horiguchi
Original Assignee
Takatori Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Takatori Corp filed Critical Takatori Corp
Publication of TW200738360A publication Critical patent/TW200738360A/zh

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67721—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations the substrates to be conveyed not being semiconductor wafers or large planar substrates, e.g. chips, lead frames
TW095144424A 2006-01-06 2006-11-30 Substrate transport method and apparatus thereof TW200738360A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006001127A JP2007184391A (ja) 2006-01-06 2006-01-06 基板の搬送方法及び装置

Publications (1)

Publication Number Publication Date
TW200738360A true TW200738360A (en) 2007-10-16

Family

ID=38251249

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095144424A TW200738360A (en) 2006-01-06 2006-11-30 Substrate transport method and apparatus thereof

Country Status (4)

Country Link
JP (1) JP2007184391A (ko)
KR (1) KR20070074488A (ko)
CN (1) CN1996116A (ko)
TW (1) TW200738360A (ko)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7644512B1 (en) 2006-01-18 2010-01-12 Akrion, Inc. Systems and methods for drying a rotating substrate
CN101596531B (zh) * 2009-02-13 2011-09-28 昆山开石精密电子有限公司 手机镜片清洗生产线装置
CN101927463A (zh) * 2010-05-11 2010-12-29 赫得纳米科技(昆山)有限公司 带有光滑接触面传送带的喷砂机传送结构
CN103257469B (zh) * 2013-05-22 2015-09-30 深圳市华星光电技术有限公司 显示器基板质量检测装置及检测方法
CN107708929B (zh) * 2015-06-29 2019-11-05 株式会社村田制作所 喷射加工装置和被加工物的表面加工方法
CN107597775A (zh) * 2017-09-19 2018-01-19 合肥惠科金扬科技有限公司 一种基板清洗设备
CN109668831B (zh) * 2019-01-24 2021-04-02 合肥工业大学 一种液晶显示屏缺陷自动光学检测仪器圆带传输装置

Also Published As

Publication number Publication date
KR20070074488A (ko) 2007-07-12
JP2007184391A (ja) 2007-07-19
CN1996116A (zh) 2007-07-11

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