TW200736574A - Position measuring device and position measuring method, mobile body driving system and mobile body driving method, pattern forming device and pattern forming method, exposure device and exposure method, and device manufacturing method - Google Patents

Position measuring device and position measuring method, mobile body driving system and mobile body driving method, pattern forming device and pattern forming method, exposure device and exposure method, and device manufacturing method

Info

Publication number
TW200736574A
TW200736574A TW096106378A TW96106378A TW200736574A TW 200736574 A TW200736574 A TW 200736574A TW 096106378 A TW096106378 A TW 096106378A TW 96106378 A TW96106378 A TW 96106378A TW 200736574 A TW200736574 A TW 200736574A
Authority
TW
Taiwan
Prior art keywords
mobile body
position measuring
pattern forming
exposure
body driving
Prior art date
Application number
TW096106378A
Other languages
Chinese (zh)
Inventor
Susumu Makinouchi
Toru Imai
Akihiro Watanabe
Original Assignee
Nikon Corp
Sendai Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp, Sendai Nikon Corp filed Critical Nikon Corp
Publication of TW200736574A publication Critical patent/TW200736574A/en

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)

Abstract

A position measuring device includes linear encoders (50A to 50D) having four movable scales (44A to 44D) which are secured to a wafer stage (WST) and surround a wafer (W); and head units (46A to 46D) which are corresponding to the movable scales and emit a light having a wavelength in the longitudinal direction substantially longer than that in the direction perpendicular to the longitudinal direction. The information on the position of the wafer stage (WST) in an XY plane is calculated on the basis of the results of measured by the encoders. Thereby, the position of a mobile body can be accurately measured without increasing the size.
TW096106378A 2006-02-21 2007-02-26 Position measuring device and position measuring method, mobile body driving system and mobile body driving method, pattern forming device and pattern forming method, exposure device and exposure method, and device manufacturing method TW200736574A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006044597 2006-02-21

Publications (1)

Publication Number Publication Date
TW200736574A true TW200736574A (en) 2007-10-01

Family

ID=38437388

Family Applications (1)

Application Number Title Priority Date Filing Date
TW096106378A TW200736574A (en) 2006-02-21 2007-02-26 Position measuring device and position measuring method, mobile body driving system and mobile body driving method, pattern forming device and pattern forming method, exposure device and exposure method, and device manufacturing method

Country Status (4)

Country Link
JP (1) JPWO2007097350A1 (en)
KR (1) KR20090015888A (en)
TW (1) TW200736574A (en)
WO (1) WO2007097350A1 (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101342765B1 (en) * 2006-02-21 2013-12-19 가부시키가이샤 니콘 Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method and device manufacturing method
EP3418807A1 (en) * 2006-08-31 2018-12-26 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
JP5486189B2 (en) * 2006-09-01 2014-05-07 株式会社ニコン MOBILE BODY DRIVING METHOD, MOBILE BODY DRIVING SYSTEM, PATTERN FORMING METHOD AND APPARATUS, EXPOSURE METHOD AND APPARATUS, AND DEVICE MANUFACTURING METHOD
US8711327B2 (en) 2007-12-14 2014-04-29 Nikon Corporation Exposure apparatus, exposure method, and device manufacturing method
US8237916B2 (en) * 2007-12-28 2012-08-07 Nikon Corporation Movable body drive system, pattern formation apparatus, exposure apparatus and exposure method, and device manufacturing method
JP5109805B2 (en) * 2008-05-23 2012-12-26 株式会社ニコン Exposure apparatus, exposure method, and device manufacturing method
JP5199982B2 (en) 2008-12-08 2013-05-15 エーエスエムエル ネザーランズ ビー．ブイ． Lithographic apparatus
US8294878B2 (en) * 2009-06-19 2012-10-23 Nikon Corporation Exposure apparatus and device manufacturing method
NL2005259A (en) 2009-09-29 2011-03-30 Asml Netherlands Bv Imprint lithography.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54151265U (en) * 1978-04-12 1979-10-20
JPS6033013A (en) * 1983-08-03 1985-02-20 Optic:Kk Position encoder
JPH0617770B2 (en) * 1985-03-29 1994-03-09 日本電信電話株式会社 Mark detector
JPH01291101A (en) * 1988-05-18 1989-11-22 Tokyo Electron Ltd N-dimensional encoder
JPH07270122A (en) * 1994-03-30 1995-10-20 Canon Inc Displacement detection device, aligner provided with said displacement detection device and manufacture of device

Also Published As

Publication number Publication date
KR20090015888A (en) 2009-02-12
WO2007097350A1 (en) 2007-08-30
JPWO2007097350A1 (en) 2009-07-16

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