TW200735975A - Exhaust - Google Patents

Exhaust

Info

Publication number
TW200735975A
TW200735975A TW095111451A TW95111451A TW200735975A TW 200735975 A TW200735975 A TW 200735975A TW 095111451 A TW095111451 A TW 095111451A TW 95111451 A TW95111451 A TW 95111451A TW 200735975 A TW200735975 A TW 200735975A
Authority
TW
Taiwan
Prior art keywords
exhaust
pipe
rinsing unit
semiconductor equipment
semiconductor
Prior art date
Application number
TW095111451A
Other languages
Chinese (zh)
Other versions
TWI289082B (en
Inventor
Hung-Hsu Chen
Chieh-Wen Shih
Chiung-Chun Lee
Original Assignee
Powerchip Semiconductor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Powerchip Semiconductor Corp filed Critical Powerchip Semiconductor Corp
Priority to TW95111451A priority Critical patent/TWI289082B/en
Publication of TW200735975A publication Critical patent/TW200735975A/en
Application granted granted Critical
Publication of TWI289082B publication Critical patent/TWI289082B/en

Links

Landscapes

  • Filtering Of Dispersed Particles In Gases (AREA)
  • Cleaning Or Drying Semiconductors (AREA)

Abstract

A exhaust is suitable for connecting to at least one semiconductor equipment to exhaust the powder produced from the semiconductor process. The exhaust including a pipe and a rinsing unit is provided. Moreover, the pipe is communicated with the semiconductor equipment, and the rinsing unit is disposed in the pipe to wash the powder adhered to the inner wall thereof.
TW95111451A 2006-03-31 2006-03-31 Exhaust TWI289082B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95111451A TWI289082B (en) 2006-03-31 2006-03-31 Exhaust

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95111451A TWI289082B (en) 2006-03-31 2006-03-31 Exhaust

Publications (2)

Publication Number Publication Date
TW200735975A true TW200735975A (en) 2007-10-01
TWI289082B TWI289082B (en) 2007-11-01

Family

ID=39294866

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95111451A TWI289082B (en) 2006-03-31 2006-03-31 Exhaust

Country Status (1)

Country Link
TW (1) TWI289082B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI843321B (en) * 2021-12-22 2024-05-21 大陸商北京北方華創微電子裝備有限公司 Semiconductor process equipment and its exhaust system

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI563201B (en) * 2012-08-10 2016-12-21 United Microelectronics Corp Exhaust gas processing conduit, manufacturing apparatus and gas flow guiding method thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI843321B (en) * 2021-12-22 2024-05-21 大陸商北京北方華創微電子裝備有限公司 Semiconductor process equipment and its exhaust system

Also Published As

Publication number Publication date
TWI289082B (en) 2007-11-01

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees