TW200734623A - Angular deflection microscope and method - Google Patents
Angular deflection microscope and methodInfo
- Publication number
- TW200734623A TW200734623A TW095108308A TW95108308A TW200734623A TW 200734623 A TW200734623 A TW 200734623A TW 095108308 A TW095108308 A TW 095108308A TW 95108308 A TW95108308 A TW 95108308A TW 200734623 A TW200734623 A TW 200734623A
- Authority
- TW
- Taiwan
- Prior art keywords
- angular deflection
- test light
- microscope
- detected
- light
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95108308A TWI274150B (en) | 2006-03-10 | 2006-03-10 | Angular deflection microscope and method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW95108308A TWI274150B (en) | 2006-03-10 | 2006-03-10 | Angular deflection microscope and method |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI274150B TWI274150B (en) | 2007-02-21 |
TW200734623A true TW200734623A (en) | 2007-09-16 |
Family
ID=38623062
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW95108308A TWI274150B (en) | 2006-03-10 | 2006-03-10 | Angular deflection microscope and method |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI274150B (zh) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI417519B (zh) * | 2009-12-10 | 2013-12-01 | Ind Tech Res Inst | 干涉相位差量測方法及其系統 |
TWI467227B (zh) * | 2012-04-12 | 2015-01-01 | Univ Nat Formosa | 穿透式三維顯微裝置及方法 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI394946B (zh) * | 2008-09-02 | 2013-05-01 | Univ Nat Formosa | Method and device for measuring object defect |
TWI399518B (zh) * | 2010-01-14 | 2013-06-21 | Univ Nat Yunlin Sci & Tech | Corner prismatic polarized light interference system |
TWI688754B (zh) * | 2018-11-14 | 2020-03-21 | 國立虎尾科技大學 | 共光程外差式微小偏極旋轉測量計及方法 |
CN113532281B (zh) * | 2021-06-16 | 2023-06-06 | 南京信息职业技术学院 | 一种微小位移检测传感器、装置及方法 |
-
2006
- 2006-03-10 TW TW95108308A patent/TWI274150B/zh not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI417519B (zh) * | 2009-12-10 | 2013-12-01 | Ind Tech Res Inst | 干涉相位差量測方法及其系統 |
TWI467227B (zh) * | 2012-04-12 | 2015-01-01 | Univ Nat Formosa | 穿透式三維顯微裝置及方法 |
Also Published As
Publication number | Publication date |
---|---|
TWI274150B (en) | 2007-02-21 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |