TW200734623A - Angular deflection microscope and method - Google Patents

Angular deflection microscope and method

Info

Publication number
TW200734623A
TW200734623A TW095108308A TW95108308A TW200734623A TW 200734623 A TW200734623 A TW 200734623A TW 095108308 A TW095108308 A TW 095108308A TW 95108308 A TW95108308 A TW 95108308A TW 200734623 A TW200734623 A TW 200734623A
Authority
TW
Taiwan
Prior art keywords
angular deflection
test light
microscope
detected
light
Prior art date
Application number
TW095108308A
Other languages
English (en)
Other versions
TWI274150B (en
Inventor
Ming-Hung Chiu
Bo-Yuan Chih
Kuo-Hsing Hu
Original Assignee
Univ Nat Formosa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Formosa filed Critical Univ Nat Formosa
Priority to TW95108308A priority Critical patent/TWI274150B/zh
Application granted granted Critical
Publication of TWI274150B publication Critical patent/TWI274150B/zh
Publication of TW200734623A publication Critical patent/TW200734623A/zh

Links

TW95108308A 2006-03-10 2006-03-10 Angular deflection microscope and method TWI274150B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW95108308A TWI274150B (en) 2006-03-10 2006-03-10 Angular deflection microscope and method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW95108308A TWI274150B (en) 2006-03-10 2006-03-10 Angular deflection microscope and method

Publications (2)

Publication Number Publication Date
TWI274150B TWI274150B (en) 2007-02-21
TW200734623A true TW200734623A (en) 2007-09-16

Family

ID=38623062

Family Applications (1)

Application Number Title Priority Date Filing Date
TW95108308A TWI274150B (en) 2006-03-10 2006-03-10 Angular deflection microscope and method

Country Status (1)

Country Link
TW (1) TWI274150B (zh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417519B (zh) * 2009-12-10 2013-12-01 Ind Tech Res Inst 干涉相位差量測方法及其系統
TWI467227B (zh) * 2012-04-12 2015-01-01 Univ Nat Formosa 穿透式三維顯微裝置及方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI394946B (zh) * 2008-09-02 2013-05-01 Univ Nat Formosa Method and device for measuring object defect
TWI399518B (zh) * 2010-01-14 2013-06-21 Univ Nat Yunlin Sci & Tech Corner prismatic polarized light interference system
TWI688754B (zh) * 2018-11-14 2020-03-21 國立虎尾科技大學 共光程外差式微小偏極旋轉測量計及方法
CN113532281B (zh) * 2021-06-16 2023-06-06 南京信息职业技术学院 一种微小位移检测传感器、装置及方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI417519B (zh) * 2009-12-10 2013-12-01 Ind Tech Res Inst 干涉相位差量測方法及其系統
TWI467227B (zh) * 2012-04-12 2015-01-01 Univ Nat Formosa 穿透式三維顯微裝置及方法

Also Published As

Publication number Publication date
TWI274150B (en) 2007-02-21

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