TW200734030A - Filtering device and filtering method and semiconductor fabricating method thereof - Google Patents
Filtering device and filtering method and semiconductor fabricating method thereofInfo
- Publication number
- TW200734030A TW200734030A TW096101963A TW96101963A TW200734030A TW 200734030 A TW200734030 A TW 200734030A TW 096101963 A TW096101963 A TW 096101963A TW 96101963 A TW96101963 A TW 96101963A TW 200734030 A TW200734030 A TW 200734030A
- Authority
- TW
- Taiwan
- Prior art keywords
- filtering
- parts
- gas
- filtering device
- cooling space
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/0027—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions
- B01D46/0036—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours with additional separating or treating functions by adsorption or absorption
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Separation Of Gases By Adsorption (AREA)
- Filtering Materials (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/372,193 US7628845B2 (en) | 2006-03-10 | 2006-03-10 | Filtering device and filtering method thereof and semiconductor fabricating method |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200734030A true TW200734030A (en) | 2007-09-16 |
TWI308083B TWI308083B (en) | 2009-04-01 |
Family
ID=38477623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW096101963A TWI308083B (en) | 2006-03-10 | 2007-01-18 | Filtering device and filtering mthod and semiconductor fabricating method thereof |
Country Status (3)
Country | Link |
---|---|
US (1) | US7628845B2 (zh) |
CN (1) | CN101053702B (zh) |
TW (1) | TWI308083B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2008004278A1 (fr) * | 2006-07-04 | 2008-01-10 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Procédé et dispositif de concentration / dilution de gaz spécifique |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5785741A (en) * | 1995-07-17 | 1998-07-28 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges, Claude | Process and system for separation and recovery of perfluorocompound gases |
JP3977514B2 (ja) * | 1998-05-26 | 2007-09-19 | 高砂熱学工業株式会社 | 空気浄化フィルタ及びその製造方法及び高度清浄装置 |
US6206971B1 (en) * | 1999-03-29 | 2001-03-27 | Applied Materials, Inc. | Integrated temperature controlled exhaust and cold trap assembly |
US6491884B1 (en) * | 1999-11-26 | 2002-12-10 | Advanced Technology Materials, Inc. | In-situ air oxidation treatment of MOCVD process effluent |
US7540901B2 (en) * | 2000-05-05 | 2009-06-02 | Entegris, Inc. | Filters employing both acidic polymers and physical-adsorption media |
CA2406703A1 (en) * | 2000-05-05 | 2001-11-15 | Extraction Systems, Inc. | Filters employing both acidic polymers and physical-adsorption media |
US6527828B2 (en) * | 2001-03-19 | 2003-03-04 | Advanced Technology Materials, Inc. | Oxygen enhanced CDA modification to a CDO integrated scrubber |
US6630012B2 (en) * | 2001-04-30 | 2003-10-07 | Battelle Memorial Institute | Method for thermal swing adsorption and thermally-enhanced pressure swing adsorption |
US6551381B2 (en) * | 2001-07-23 | 2003-04-22 | Advanced Technology Materials, Inc. | Method for carbon monoxide reduction during thermal/wet abatement of organic compounds |
US6596054B2 (en) * | 2001-07-23 | 2003-07-22 | Advanced Technology Materials, Inc. | Method for carbon monoxide reduction during thermal/wet abatement of organic compounds |
JP3892385B2 (ja) * | 2002-10-22 | 2007-03-14 | 株式会社デンソー | キャニスタ用フィルタ |
US7252703B2 (en) * | 2003-06-30 | 2007-08-07 | Honeywell International, Inc. | Direct contact liquid air contaminant control system |
US7014682B2 (en) * | 2003-08-07 | 2006-03-21 | Hickerson Steven A | Apparatus and process for removing contaminants from a flowing gas stream |
US20050109207A1 (en) * | 2003-11-24 | 2005-05-26 | Olander W. K. | Method and apparatus for the recovery of volatile organic compounds and concentration thereof |
US7314506B2 (en) * | 2004-10-25 | 2008-01-01 | Matheson Tri-Gas, Inc. | Fluid purification system with low temperature purifier |
CN2841646Y (zh) | 2005-10-28 | 2006-11-29 | 丁静 | 空心齿形流化填料 |
US7494533B2 (en) * | 2005-12-29 | 2009-02-24 | American Air Liquide, Inc. | Systems for purifying gases having organic impurities using granulated porous glass |
KR100732228B1 (ko) * | 2006-03-06 | 2007-06-27 | 학교법인 포항공과대학교 | 하이브리드 흡수식 냉동기 |
-
2006
- 2006-03-10 US US11/372,193 patent/US7628845B2/en active Active
-
2007
- 2007-01-18 TW TW096101963A patent/TWI308083B/zh active
- 2007-03-06 CN CN2007100856642A patent/CN101053702B/zh active Active
Also Published As
Publication number | Publication date |
---|---|
US7628845B2 (en) | 2009-12-08 |
CN101053702B (zh) | 2013-10-23 |
CN101053702A (zh) | 2007-10-17 |
US20070209515A1 (en) | 2007-09-13 |
TWI308083B (en) | 2009-04-01 |
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