TW200733898A - Operating method of low-temperature drying - Google Patents
Operating method of low-temperature dryingInfo
- Publication number
- TW200733898A TW200733898A TW095108277A TW95108277A TW200733898A TW 200733898 A TW200733898 A TW 200733898A TW 095108277 A TW095108277 A TW 095108277A TW 95108277 A TW95108277 A TW 95108277A TW 200733898 A TW200733898 A TW 200733898A
- Authority
- TW
- Taiwan
- Prior art keywords
- working gas
- low
- operating method
- temperature drying
- drying
- Prior art date
Links
- 238000001035 drying Methods 0.000 title abstract 3
- 238000011017 operating method Methods 0.000 title abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- 238000001816 cooling Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
Landscapes
- Drying Of Solid Materials (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095108277A TW200733898A (en) | 2006-03-10 | 2006-03-10 | Operating method of low-temperature drying |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW095108277A TW200733898A (en) | 2006-03-10 | 2006-03-10 | Operating method of low-temperature drying |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200733898A true TW200733898A (en) | 2007-09-16 |
TWI293022B TWI293022B (enrdf_load_stackoverflow) | 2008-02-01 |
Family
ID=45067701
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095108277A TW200733898A (en) | 2006-03-10 | 2006-03-10 | Operating method of low-temperature drying |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200733898A (enrdf_load_stackoverflow) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109606947A (zh) * | 2018-12-28 | 2019-04-12 | 天津森罗科技股份有限公司 | 一种文物储藏系统 |
-
2006
- 2006-03-10 TW TW095108277A patent/TW200733898A/zh not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI293022B (enrdf_load_stackoverflow) | 2008-02-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |