TW200732272A - Aluminum nitride composite body, and manufacturing method of the same - Google Patents
Aluminum nitride composite body, and manufacturing method of the sameInfo
- Publication number
- TW200732272A TW200732272A TW095148142A TW95148142A TW200732272A TW 200732272 A TW200732272 A TW 200732272A TW 095148142 A TW095148142 A TW 095148142A TW 95148142 A TW95148142 A TW 95148142A TW 200732272 A TW200732272 A TW 200732272A
- Authority
- TW
- Taiwan
- Prior art keywords
- aluminum nitride
- manufacturing
- same
- composite body
- nitride composite
- Prior art date
Links
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
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- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/003—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts
- C04B37/005—Joining burned ceramic articles with other burned ceramic articles or other articles by heating by means of an interlayer consisting of a combination of materials selected from glass, or ceramic material with metals, metal oxides or metal salts consisting of glass or ceramic material
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
- C04B35/44—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminates
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/581—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on aluminium nitride
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- C04B2235/3205—Alkaline earth oxides or oxide forming salts thereof, e.g. beryllium oxide
- C04B2235/3208—Calcium oxide or oxide-forming salts thereof, e.g. lime
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- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
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- C04B2235/3218—Aluminium (oxy)hydroxides, e.g. boehmite, gibbsite, alumina sol
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- C04B2235/3217—Aluminum oxide or oxide forming salts thereof, e.g. bauxite, alpha-alumina
- C04B2235/3222—Aluminates other than alumino-silicates, e.g. spinel (MgAl2O4)
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- C04B2235/3229—Cerium oxides or oxide-forming salts thereof
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- C04B2235/3852—Nitrides, e.g. oxynitrides, carbonitrides, oxycarbonitrides, lithium nitride, magnesium nitride
- C04B2235/3865—Aluminium nitrides
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- C04B2237/36—Non-oxidic
- C04B2237/366—Aluminium nitride
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- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/80—Joining the largest surface of one substrate with a smaller surface of the other substrate, e.g. butt joining or forming a T-joint
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Chemistry (AREA)
- Ceramic Products (AREA)
- Resistance Heating (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US75413705P | 2005-12-27 | 2005-12-27 |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200732272A true TW200732272A (en) | 2007-09-01 |
TWI308908B TWI308908B (en) | 2009-04-21 |
Family
ID=37877048
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW095148142A TWI308908B (en) | 2005-12-27 | 2006-12-21 | Aluminum nitride composite body, and manufacturing method of the same |
Country Status (6)
Country | Link |
---|---|
US (1) | US20070144667A1 (zh) |
EP (1) | EP1803696B1 (zh) |
JP (2) | JP4921150B2 (zh) |
KR (1) | KR100847498B1 (zh) |
CN (1) | CN100506752C (zh) |
TW (1) | TWI308908B (zh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI811011B (zh) * | 2021-10-07 | 2023-08-01 | 日商日本碍子股份有限公司 | 半導體製造裝置用構件 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090277388A1 (en) * | 2008-05-09 | 2009-11-12 | Applied Materials, Inc. | Heater with detachable shaft |
US9624137B2 (en) * | 2011-11-30 | 2017-04-18 | Component Re-Engineering Company, Inc. | Low temperature method for hermetically joining non-diffusing ceramic materials |
US9315424B2 (en) * | 2011-11-30 | 2016-04-19 | Component Re-Engineering Company, Inc. | Multi-layer plate device |
US8932690B2 (en) * | 2011-11-30 | 2015-01-13 | Component Re-Engineering Company, Inc. | Plate and shaft device |
CN106536451A (zh) * | 2014-07-10 | 2017-03-22 | 陶瓷技术有限责任公司 | 带有凹处的陶瓷的层压的模制体 |
CN114749754B (zh) * | 2022-05-31 | 2023-07-25 | 核工业西南物理研究院 | 一种用于真空钎焊工艺评定的真空钎焊评定试件 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5209525A (en) * | 1990-03-28 | 1993-05-11 | Ngk Insulators, Ltd. | Bonded ceramic structure |
JPH03279274A (ja) * | 1990-03-28 | 1991-12-10 | Ngk Insulators Ltd | セラミック接合体 |
JP2783980B2 (ja) * | 1994-09-01 | 1998-08-06 | 日本碍子株式会社 | 接合体およびその製造方法 |
JP3604888B2 (ja) * | 1997-01-30 | 2004-12-22 | 日本碍子株式会社 | 窒化アルミニウム質セラミックス基材の接合体、窒化アルミニウム質セラミックス基材の接合体の製造方法及び接合剤 |
JP4070752B2 (ja) * | 1997-01-30 | 2008-04-02 | 日本碍子株式会社 | 窒化アルミニウム質セラミックス基材の接合剤 |
JP2001342079A (ja) * | 2000-05-30 | 2001-12-11 | Ibiden Co Ltd | セラミック接合体 |
JP3966376B2 (ja) * | 2001-09-11 | 2007-08-29 | 住友電気工業株式会社 | 被処理物保持体、処理装置および半導体製造装置用セラミックスサセプタ |
WO2003077290A1 (fr) * | 2002-03-13 | 2003-09-18 | Sumitomo Electric Industries, Ltd. | Support destine a un systeme de production de semi-conducteur |
JP3520074B2 (ja) * | 2002-03-28 | 2004-04-19 | 日本碍子株式会社 | セラミックサセプターの取付構造、セラミックサセプターの支持構造およびセラミックサセプターの支持部材 |
JP3832409B2 (ja) * | 2002-09-18 | 2006-10-11 | 住友電気工業株式会社 | ウエハー保持体及び半導体製造装置 |
JP4787568B2 (ja) * | 2004-11-16 | 2011-10-05 | 日本碍子株式会社 | 接合剤、窒化アルミニウム接合体及びその製造方法 |
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2006
- 2006-12-21 TW TW095148142A patent/TWI308908B/zh active
- 2006-12-21 JP JP2006344214A patent/JP4921150B2/ja active Active
- 2006-12-22 KR KR1020060132609A patent/KR100847498B1/ko active IP Right Grant
- 2006-12-22 EP EP06256536A patent/EP1803696B1/en not_active Ceased
- 2006-12-26 CN CNB2006101714108A patent/CN100506752C/zh active Active
- 2006-12-27 US US11/616,434 patent/US20070144667A1/en not_active Abandoned
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2011
- 2011-08-12 JP JP2011176513A patent/JP5367778B2/ja active Active
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI811011B (zh) * | 2021-10-07 | 2023-08-01 | 日商日本碍子股份有限公司 | 半導體製造裝置用構件 |
US12087610B2 (en) | 2021-10-07 | 2024-09-10 | Ngk Insulators, Ltd. | Member for semiconductor manufacturing apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP2012031058A (ja) | 2012-02-16 |
CN1990426A (zh) | 2007-07-04 |
JP2007176792A (ja) | 2007-07-12 |
KR100847498B1 (ko) | 2008-07-22 |
JP5367778B2 (ja) | 2013-12-11 |
TWI308908B (en) | 2009-04-21 |
US20070144667A1 (en) | 2007-06-28 |
CN100506752C (zh) | 2009-07-01 |
EP1803696B1 (en) | 2012-10-24 |
JP4921150B2 (ja) | 2012-04-25 |
EP1803696A1 (en) | 2007-07-04 |
KR20070069030A (ko) | 2007-07-02 |
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