TW200726916A - Fixed volume valve system - Google Patents

Fixed volume valve system

Info

Publication number
TW200726916A
TW200726916A TW095142927A TW95142927A TW200726916A TW 200726916 A TW200726916 A TW 200726916A TW 095142927 A TW095142927 A TW 095142927A TW 95142927 A TW95142927 A TW 95142927A TW 200726916 A TW200726916 A TW 200726916A
Authority
TW
Taiwan
Prior art keywords
valve
flow passage
valve seat
diaphragm
present
Prior art date
Application number
TW095142927A
Other languages
Chinese (zh)
Inventor
Iraj Gashgaee
James Cedrone
George Gonnella
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of TW200726916A publication Critical patent/TW200726916A/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B25/00—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B7/00—Piston machines or pumps characterised by having positively-driven valving
    • F04B7/02—Piston machines or pumps characterised by having positively-driven valving the valving being fluid-actuated
    • F04B7/0266—Piston machines or pumps characterised by having positively-driven valving the valving being fluid-actuated the inlet and discharge means being separate members
    • F04B7/0275—Piston machines or pumps characterised by having positively-driven valving the valving being fluid-actuated the inlet and discharge means being separate members and being deformable, e.g. membranes

Abstract

Embodiments of the present invention provide valves that provide for uniform holdup volume. An embodiment of the present invention provides a valve comprising a valve body (e.g., one or more pieces) that defines a valve chamber having a valve seat, an inlet flow passage, an outlet flow passage and a diaphragm control flow passage intersecting the valve seat. The valve seat is shaped so that the valve has a fixed holdup volume when at least a threshold vacuum is applied to the diaphragm control flow passage. The valve further comprises a diaphragm movable towards and away from the valve seat. According to one embodiment of the present invention, the valve seat can have a semi-hemispherical shape to which the diaphragm conforms when a minimum vacuum is applied to the diaphragm control flow passage.
TW095142927A 2005-12-02 2006-11-21 Fixed volume valve system TW200726916A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US74214705P 2005-12-02 2005-12-02

Publications (1)

Publication Number Publication Date
TW200726916A true TW200726916A (en) 2007-07-16

Family

ID=38123366

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095142927A TW200726916A (en) 2005-12-02 2006-11-21 Fixed volume valve system

Country Status (3)

Country Link
US (1) US20070128061A1 (en)
TW (1) TW200726916A (en)
WO (1) WO2007067339A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015089202A1 (en) * 2013-12-10 2015-06-18 Semba Biosciences, Inc. High-flow fluid valve block
KR20190133063A (en) * 2015-06-23 2019-11-29 엔테그리스, 아이엔씨. Oblong diaphragm valves

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Also Published As

Publication number Publication date
WO2007067339A3 (en) 2007-09-20
WO2007067339B1 (en) 2007-11-22
US20070128061A1 (en) 2007-06-07
WO2007067339A2 (en) 2007-06-14

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