TW200726827A - In situ fluoride ion-generating compositions and uses thereof - Google Patents

In situ fluoride ion-generating compositions and uses thereof

Info

Publication number
TW200726827A
TW200726827A TW095145201A TW95145201A TW200726827A TW 200726827 A TW200726827 A TW 200726827A TW 095145201 A TW095145201 A TW 095145201A TW 95145201 A TW95145201 A TW 95145201A TW 200726827 A TW200726827 A TW 200726827A
Authority
TW
Taiwan
Prior art keywords
situ
compositions
fluoride ion
generating compositions
kits
Prior art date
Application number
TW095145201A
Other languages
English (en)
Inventor
Philip Gerard Clark
Nobuaki Ando
Paul Edward Rajtar
Original Assignee
3M Innovative Properties Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 3M Innovative Properties Co filed Critical 3M Innovative Properties Co
Publication of TW200726827A publication Critical patent/TW200726827A/zh

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/28—Organic compounds containing halogen
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D11/00—Special methods for preparing compositions containing mixtures of detergents
    • C11D11/04—Special methods for preparing compositions containing mixtures of detergents by chemical means, e.g. by sulfonating in the presence of other compounding ingredients followed by neutralising
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3263—Amides or imides
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
    • C11D7/22—Organic compounds
    • C11D7/32—Organic compounds containing nitrogen
    • C11D7/3281—Heterocyclic compounds
    • C—CHEMISTRY; METALLURGY
    • C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
    • C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
    • C11D2111/00—Cleaning compositions characterised by the objects to be cleaned; Cleaning compositions characterised by non-standard cleaning or washing processes
    • C11D2111/10—Objects to be cleaned
    • C11D2111/14—Hard surfaces
    • C11D2111/22—Electronic devices, e.g. PCBs or semiconductors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Wood Science & Technology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Materials Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Detergent Compositions (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Cosmetics (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Glass Compositions (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Weting (AREA)
TW095145201A 2005-12-07 2006-12-05 In situ fluoride ion-generating compositions and uses thereof TW200726827A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/295,859 US20070129273A1 (en) 2005-12-07 2005-12-07 In situ fluoride ion-generating compositions and uses thereof

Publications (1)

Publication Number Publication Date
TW200726827A true TW200726827A (en) 2007-07-16

Family

ID=38119562

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095145201A TW200726827A (en) 2005-12-07 2006-12-05 In situ fluoride ion-generating compositions and uses thereof

Country Status (7)

Country Link
US (1) US20070129273A1 (zh)
EP (1) EP1957609A1 (zh)
JP (1) JP2009518857A (zh)
KR (1) KR20080076927A (zh)
CN (1) CN101326262A (zh)
TW (1) TW200726827A (zh)
WO (1) WO2007067362A1 (zh)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4854245B2 (ja) * 2005-09-22 2012-01-18 東京エレクトロン株式会社 半導体装置の製造方法
JP5732199B2 (ja) * 2010-01-04 2015-06-10 旭硝子株式会社 基板の洗浄方法
JP6059968B2 (ja) * 2011-11-25 2017-01-11 株式会社半導体エネルギー研究所 半導体装置、及び液晶表示装置
SG11201913385UA (en) 2017-06-26 2020-01-30 Agc Inc Method for cleaning mask for vacuum vapor deposition and rinsing composition
US20190233321A1 (en) 2018-01-26 2019-08-01 Corning Incorporated Liquid-assisted laser micromachining of transparent dielectrics

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT401785B (de) * 1994-03-02 1996-11-25 Wimmer Alois Ing Sicherheitseinrichtung an hydraulischen kolben-zylinder-einheiten
US5925611A (en) * 1995-01-20 1999-07-20 Minnesota Mining And Manufacturing Company Cleaning process and composition
EP0828815B1 (en) * 1995-05-16 2009-10-14 Minnesota Mining And Manufacturing Company Azeotrope-like compositions and their use
CA2218890A1 (en) * 1995-05-16 1996-11-21 Dean S. Milbrath Azeotrope-like compositions and their use
US5770263A (en) * 1995-11-08 1998-06-23 Micron Technology, Inc. Method for in situ removal of particulate residues resulting from hydrofluoric acid cleaning treatments
US5648324A (en) * 1996-01-23 1997-07-15 Ocg Microelectronic Materials, Inc. Photoresist stripping composition
DE69840266D1 (de) * 1997-05-16 2009-01-08 Nippon Zeon Co Polymer enthaltende flüssigkeit und verfahren zur herstellung eines polymerfilms
US6689734B2 (en) * 1997-07-30 2004-02-10 Kyzen Corporation Low ozone depleting brominated compound mixtures for use in solvent and cleaning applications
US6022842A (en) * 1998-02-11 2000-02-08 3M Innovative Properties Company Azeotrope-like compositions including perfluorobutyl methyl ether, 1- bromopropane and alcohol
US6159917A (en) * 1998-12-16 2000-12-12 3M Innovative Properties Company Dry cleaning compositions containing hydrofluoroether
US6630421B1 (en) * 1999-04-28 2003-10-07 Showa Denko Kabushiki Kaisha Reactive agent and process for decomposing fluorine compounds and use thereof
US7097715B1 (en) * 2000-10-11 2006-08-29 R. R. Street Co. Inc. Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
US6755871B2 (en) * 1999-10-15 2004-06-29 R.R. Street & Co. Inc. Cleaning system utilizing an organic cleaning solvent and a pressurized fluid solvent
US6372700B1 (en) * 2000-03-31 2002-04-16 3M Innovative Properties Company Fluorinated solvent compositions containing ozone
US6310018B1 (en) * 2000-03-31 2001-10-30 3M Innovative Properties Company Fluorinated solvent compositions containing hydrogen fluoride
AU2001218942A1 (en) * 2000-12-18 2002-07-01 Sumitomo Precision Products Co., Ltd. Cleaning method and etching method
JP2002261081A (ja) * 2001-03-01 2002-09-13 Asm Japan Kk 半導体ウエハのエッチング装置及び方法
US6848455B1 (en) * 2002-04-22 2005-02-01 Novellus Systems, Inc. Method and apparatus for removing photoresist and post-etch residue from semiconductor substrates by in-situ generation of oxidizing species
US6699829B2 (en) * 2002-06-07 2004-03-02 Kyzen Corporation Cleaning compositions containing dichloroethylene and six carbon alkoxy substituted perfluoro compounds
US6841333B2 (en) * 2002-11-01 2005-01-11 3M Innovative Properties Company Ionic photoacid generators with segmented hydrocarbon-fluorocarbon sulfonate anions
US6890452B2 (en) * 2002-11-08 2005-05-10 3M Innovative Properties Company Fluorinated surfactants for aqueous acid etch solutions
US6936544B2 (en) * 2003-03-11 2005-08-30 Taiwan Semiconductor Manufacturing Co., Ltd. Method of removing metal etching residues following a metal etchback process to improve a CMP process
US6921695B2 (en) * 2003-10-14 2005-07-26 Taiwan Semiconductor Manufacturing Co., Ltd. Etching method for forming a square cornered polysilicon wordline electrode
US6953082B2 (en) * 2003-12-16 2005-10-11 3M Innovative Properties Company Hydrofluoroether as a heat-transfer fluid
US7195676B2 (en) * 2004-07-13 2007-03-27 Air Products And Chemicals, Inc. Method for removal of flux and other residue in dense fluid systems

Also Published As

Publication number Publication date
US20070129273A1 (en) 2007-06-07
CN101326262A (zh) 2008-12-17
KR20080076927A (ko) 2008-08-20
WO2007067362A1 (en) 2007-06-14
JP2009518857A (ja) 2009-05-07
EP1957609A1 (en) 2008-08-20

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