TW200725789A - Discontinuous conveyor system - Google Patents

Discontinuous conveyor system

Info

Publication number
TW200725789A
TW200725789A TW095135834A TW95135834A TW200725789A TW 200725789 A TW200725789 A TW 200725789A TW 095135834 A TW095135834 A TW 095135834A TW 95135834 A TW95135834 A TW 95135834A TW 200725789 A TW200725789 A TW 200725789A
Authority
TW
Taiwan
Prior art keywords
container
transport system
transporting
tool
container transport
Prior art date
Application number
TW095135834A
Other languages
English (en)
Inventor
Anthony C Bonora
Theodore Rogers
Original Assignee
Asyst Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Technologies filed Critical Asyst Technologies
Publication of TW200725789A publication Critical patent/TW200725789A/zh

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67733—Overhead conveying
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67769—Storage means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67775—Docking arrangements
TW095135834A 2005-09-28 2006-09-27 Discontinuous conveyor system TW200725789A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/238,030 US7661919B2 (en) 2005-09-28 2005-09-28 Discontinuous conveyor system

Publications (1)

Publication Number Publication Date
TW200725789A true TW200725789A (en) 2007-07-01

Family

ID=37467485

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095135834A TW200725789A (en) 2005-09-28 2006-09-27 Discontinuous conveyor system

Country Status (4)

Country Link
US (1) US7661919B2 (zh)
JP (1) JP2009510776A (zh)
TW (1) TW200725789A (zh)
WO (1) WO2007038096A2 (zh)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7578650B2 (en) * 2004-07-29 2009-08-25 Kla-Tencor Technologies Corporation Quick swap load port
US7604449B1 (en) * 2005-06-27 2009-10-20 Kla-Tencor Technologies Corporation Equipment front end module
US20100310351A1 (en) * 2006-03-30 2010-12-09 Tokyo Electron Limited Method for handling and transferring a wafer case, and holding part used therefor
US20070289843A1 (en) * 2006-04-18 2007-12-20 Barry Kitazumi Conveyor System Including Offset Section
CN101578700B (zh) * 2006-08-18 2012-11-14 布鲁克斯自动化公司 容量减少的载物台,传送,装载端口,缓冲系统
US20080050208A1 (en) * 2006-08-25 2008-02-28 Barry Kitazumi High speed transporter including horizontal belt
DE602007013300D1 (de) * 2007-10-01 2011-04-28 Abb Technology Ab Ndustrierobotersystem und industrierobotersystem
US7992734B2 (en) * 2008-01-11 2011-08-09 International Business Machines Corporation Semiconductor automation buffer storage identification system and method
KR101015225B1 (ko) * 2008-07-07 2011-02-18 세메스 주식회사 기판 처리장치 및 이의 기판 이송 방법
JP5212165B2 (ja) 2009-02-20 2013-06-19 東京エレクトロン株式会社 基板処理装置
IT1393300B1 (it) * 2009-03-24 2012-04-20 Marchesini Group Spa Sistema e metodo per l'accumulo di articoli contenitori che si identificano in flaconi o siringhe
TWI496732B (zh) * 2009-07-31 2015-08-21 Murata Machinery Ltd 供工具利用之緩衝儲存和運輸裝置
US8956098B2 (en) * 2011-05-02 2015-02-17 Murata Machinery, Ltd. Automated warehouse
CN103811378B (zh) * 2012-11-14 2016-08-03 沈阳芯源微电子设备有限公司 一种半导体制造设备的自动移动装置
TW201422501A (zh) * 2012-12-04 2014-06-16 Tian-Sing Huang 晶圓承載裝置及其應用
DE102013222900B4 (de) 2013-11-11 2017-04-06 Fabmatics Gmbh Flexibles Purge-Management System
US10780576B2 (en) * 2014-11-22 2020-09-22 Kenneth C. Miller Suspended automation system
US9875921B2 (en) * 2015-05-07 2018-01-23 Fabmatics Gmbh Flexible purge management system
CN107851594B (zh) * 2015-08-28 2021-06-22 株式会社国际电气 基板处理装置以及半导体装置的制造方法
US9698036B2 (en) * 2015-11-05 2017-07-04 Lam Research Corporation Stacked wafer cassette loading system
SG11202009270XA (en) * 2018-03-22 2020-10-29 Murata Machinery Ltd Stocker system
CA3014976A1 (en) * 2018-08-20 2020-02-20 Cube Automation Inc. A method for handling a catch from a fishing boat
WO2020095570A1 (ja) * 2018-11-06 2020-05-14 村田機械株式会社 天井搬送車
JP7095750B2 (ja) * 2018-11-06 2022-07-05 村田機械株式会社 天井吊下棚
KR102530860B1 (ko) * 2018-12-26 2023-05-10 무라다기카이가부시끼가이샤 보관 시스템

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3622101B2 (ja) * 1997-03-13 2005-02-23 村田機械株式会社 天井走行車システム
US5980183A (en) * 1997-04-14 1999-11-09 Asyst Technologies, Inc. Integrated intrabay buffer, delivery, and stocker system
US6283692B1 (en) 1998-12-01 2001-09-04 Applied Materials, Inc. Apparatus for storing and moving a cassette
US6481558B1 (en) 1998-12-18 2002-11-19 Asyst Technologies, Inc. Integrated load port-conveyor transfer system
DE19900804C2 (de) * 1999-01-12 2000-10-19 Siemens Ag Fördersystem
KR100603100B1 (ko) * 1999-05-06 2006-07-20 동경 엘렉트론 주식회사 유리 기판의 반송 시스템
US6677690B2 (en) 2001-02-02 2004-01-13 Asyst Technologies, Inc. System for safeguarding integrated intrabay pod delivery and storage system
US6678583B2 (en) 2001-08-06 2004-01-13 Seminet, Inc. Robotic storage buffer system for substrate carrier pods
US7261508B2 (en) 2002-04-22 2007-08-28 Taiwan Semiconductor Manufacturing Co., Ltd. Method for aligning a loadport to an overhead hoist transport system
US6663340B1 (en) 2002-08-30 2003-12-16 Motorola, Inc. Wafer carrier transport system for tool bays
US7243003B2 (en) 2002-08-31 2007-07-10 Applied Materials, Inc. Substrate carrier handler that unloads substrate carriers directly from a moving conveyor
KR101544699B1 (ko) 2002-10-11 2015-08-18 무라다기카이가부시끼가이샤 오버헤드 호이스트를 탑재한 오버헤드 호이스트 수송 차량
JP2005150129A (ja) * 2003-11-11 2005-06-09 Asyst Shinko Inc 移載装置及び移載システム
JP2005144606A (ja) * 2003-11-17 2005-06-09 Yaskawa Electric Corp 移動ロボット

Also Published As

Publication number Publication date
JP2009510776A (ja) 2009-03-12
US20070081879A1 (en) 2007-04-12
WO2007038096A2 (en) 2007-04-05
US7661919B2 (en) 2010-02-16
WO2007038096A3 (en) 2007-06-14

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