TW200724653A - Slurry compositions for barrier CMP - Google Patents

Slurry compositions for barrier CMP

Info

Publication number
TW200724653A
TW200724653A TW094145491A TW94145491A TW200724653A TW 200724653 A TW200724653 A TW 200724653A TW 094145491 A TW094145491 A TW 094145491A TW 94145491 A TW94145491 A TW 94145491A TW 200724653 A TW200724653 A TW 200724653A
Authority
TW
Taiwan
Prior art keywords
cmp
slurry
cmp slurry
barrier layer
slurry compositions
Prior art date
Application number
TW094145491A
Other languages
English (en)
Other versions
TWI387641B (zh
Inventor
Judy Jian-Fen Jing
Peter Wei-Hong Song
Yuan Gu
Sunny Chun Xu
Michael Ying Song
Original Assignee
Anji Microelectronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anji Microelectronics Co Ltd filed Critical Anji Microelectronics Co Ltd
Priority to TW94145491A priority Critical patent/TWI387641B/zh
Publication of TW200724653A publication Critical patent/TW200724653A/zh
Application granted granted Critical
Publication of TWI387641B publication Critical patent/TWI387641B/zh

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
TW94145491A 2005-12-21 2005-12-21 阻擋層用之化學機械拋光液 TWI387641B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94145491A TWI387641B (zh) 2005-12-21 2005-12-21 阻擋層用之化學機械拋光液

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94145491A TWI387641B (zh) 2005-12-21 2005-12-21 阻擋層用之化學機械拋光液

Publications (2)

Publication Number Publication Date
TW200724653A true TW200724653A (en) 2007-07-01
TWI387641B TWI387641B (zh) 2013-03-01

Family

ID=48471146

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94145491A TWI387641B (zh) 2005-12-21 2005-12-21 阻擋層用之化學機械拋光液

Country Status (1)

Country Link
TW (1) TWI387641B (zh)

Also Published As

Publication number Publication date
TWI387641B (zh) 2013-03-01

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