TW200722659A - In-plane manipulator - Google Patents

In-plane manipulator

Info

Publication number
TW200722659A
TW200722659A TW095137962A TW95137962A TW200722659A TW 200722659 A TW200722659 A TW 200722659A TW 095137962 A TW095137962 A TW 095137962A TW 95137962 A TW95137962 A TW 95137962A TW 200722659 A TW200722659 A TW 200722659A
Authority
TW
Taiwan
Prior art keywords
object holder
manipulator
actuator
base
plane manipulator
Prior art date
Application number
TW095137962A
Other languages
English (en)
Inventor
Waltherus Cornelis Jozef Bierhoff
Original Assignee
Koninkl Philips Electronics Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Koninkl Philips Electronics Nv filed Critical Koninkl Philips Electronics Nv
Publication of TW200722659A publication Critical patent/TW200722659A/zh

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/26—Stages; Adjusting means therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Manipulator (AREA)
  • Transmission Devices (AREA)
  • Microscoopes, Condenser (AREA)
TW095137962A 2005-10-17 2006-10-14 In-plane manipulator TW200722659A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP05109606 2005-10-17

Publications (1)

Publication Number Publication Date
TW200722659A true TW200722659A (en) 2007-06-16

Family

ID=37716227

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095137962A TW200722659A (en) 2005-10-17 2006-10-14 In-plane manipulator

Country Status (7)

Country Link
US (1) US20080285124A1 (zh)
EP (1) EP1941315A1 (zh)
JP (1) JP2009511977A (zh)
KR (1) KR20080046725A (zh)
CN (1) CN101288014A (zh)
TW (1) TW200722659A (zh)
WO (1) WO2007046021A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007011818A1 (en) 2005-07-15 2007-01-25 Auburn University Microscope illumination device and adapter for dark- and bright-field illumination

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5374556A (en) * 1992-07-23 1994-12-20 Cell Robotics, Inc. Flexure structure for stage positioning
JPH0735987A (ja) * 1993-07-20 1995-02-07 Hitachi Denshi Ltd Ｚ軸微動機構
US5705878A (en) * 1995-11-29 1998-01-06 Lewis; Aaron Flat scanning stage for scanned probe microscopy
DE19650392C2 (de) * 1996-08-23 1999-07-15 Leica Microsystems Feinfokussiertisch
JP2000099153A (ja) * 1998-09-21 2000-04-07 Olympus Optical Co Ltd 変位拡大機構
DE19940124C2 (de) * 1998-08-31 2003-04-10 Olympus Optical Co Plattform mit einem Verschiebungsverstärkungsmechanismus
AT412244B (de) * 2003-02-25 2004-11-25 Wild Gmbh Objekttisch
KR100526538B1 (ko) * 2003-07-23 2005-11-08 삼성전자주식회사 나노스케일 이동을 위한 엑츄에이터 시스템
KR100586885B1 (ko) * 2004-08-06 2006-06-08 삼성전자주식회사 초정밀 위치제어 시스템
DE102005002309A1 (de) * 2005-01-17 2006-07-27 Leica Microsystems Cms Gmbh Hubtisch

Also Published As

Publication number Publication date
WO2007046021A1 (en) 2007-04-26
KR20080046725A (ko) 2008-05-27
JP2009511977A (ja) 2009-03-19
CN101288014A (zh) 2008-10-15
US20080285124A1 (en) 2008-11-20
EP1941315A1 (en) 2008-07-09

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