TW200721295A - Composition for etching metal layer and method of forming metal pattern using the same - Google Patents
Composition for etching metal layer and method of forming metal pattern using the sameInfo
- Publication number
- TW200721295A TW200721295A TW094140471A TW94140471A TW200721295A TW 200721295 A TW200721295 A TW 200721295A TW 094140471 A TW094140471 A TW 094140471A TW 94140471 A TW94140471 A TW 94140471A TW 200721295 A TW200721295 A TW 200721295A
- Authority
- TW
- Taiwan
- Prior art keywords
- composition
- weight
- same
- metal layer
- etching
- Prior art date
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
A composition for etching a metal layer includes: about 55% to about 80% by weight of a phosphoric acid; about 3% to about 15% by weight of a nitric acid; about 5% to about 20% by weight of an acetic acid; about 0.5 % to about 10 % by weight of a phosphate; about 0.1% to about 5% by weight of a chloric compound; about 0.01% to about 4% by weight of an azolic compound; and a water.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94140471A TWI292932B (en) | 2005-11-17 | 2005-11-17 | Composition for etching metal layer and method of forming metal pattern using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94140471A TWI292932B (en) | 2005-11-17 | 2005-11-17 | Composition for etching metal layer and method of forming metal pattern using the same |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200721295A true TW200721295A (en) | 2007-06-01 |
TWI292932B TWI292932B (en) | 2008-01-21 |
Family
ID=45067672
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94140471A TWI292932B (en) | 2005-11-17 | 2005-11-17 | Composition for etching metal layer and method of forming metal pattern using the same |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI292932B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110647255A (en) * | 2019-08-15 | 2020-01-03 | 信利光电股份有限公司 | Manufacturing method of touch screen metal wire |
US11180826B2 (en) | 2014-06-25 | 2021-11-23 | Uwin Nanotech Co., Ltd. | Tin stripping method |
-
2005
- 2005-11-17 TW TW94140471A patent/TWI292932B/en not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11180826B2 (en) | 2014-06-25 | 2021-11-23 | Uwin Nanotech Co., Ltd. | Tin stripping method |
CN110647255A (en) * | 2019-08-15 | 2020-01-03 | 信利光电股份有限公司 | Manufacturing method of touch screen metal wire |
Also Published As
Publication number | Publication date |
---|---|
TWI292932B (en) | 2008-01-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |