TW200720668A - Method of manufacturing probe card - Google Patents

Method of manufacturing probe card

Info

Publication number
TW200720668A
TW200720668A TW095140356A TW95140356A TW200720668A TW 200720668 A TW200720668 A TW 200720668A TW 095140356 A TW095140356 A TW 095140356A TW 95140356 A TW95140356 A TW 95140356A TW 200720668 A TW200720668 A TW 200720668A
Authority
TW
Taiwan
Prior art keywords
probes
substrate
probe card
manufacturing
vertical direction
Prior art date
Application number
TW095140356A
Other languages
English (en)
Inventor
Teppei Kimura
Kazumichi Machida
Original Assignee
Japan Electronic Materials
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Japan Electronic Materials filed Critical Japan Electronic Materials
Publication of TW200720668A publication Critical patent/TW200720668A/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R3/00—Apparatus or processes specially adapted for the manufacture or maintenance of measuring instruments, e.g. of probe tips

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
TW095140356A 2005-11-02 2006-10-31 Method of manufacturing probe card TW200720668A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005319409A JP2007127481A (ja) 2005-11-02 2005-11-02 プローブカードの製作方法

Publications (1)

Publication Number Publication Date
TW200720668A true TW200720668A (en) 2007-06-01

Family

ID=38005774

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095140356A TW200720668A (en) 2005-11-02 2006-10-31 Method of manufacturing probe card

Country Status (3)

Country Link
JP (1) JP2007127481A (zh)
TW (1) TW200720668A (zh)
WO (1) WO2007052622A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010203890A (ja) * 2009-03-03 2010-09-16 Tokyo Cathode Laboratory Co Ltd プローブカード及びプローブカードの製造方法
JP5386272B2 (ja) * 2009-08-21 2014-01-15 日本電子材料株式会社 プローブカード

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6420884B1 (en) * 1999-01-29 2002-07-16 Advantest Corp. Contact structure formed by photolithography process
US20040119485A1 (en) * 2002-12-20 2004-06-24 Koch Daniel J. Probe finger structure and method for making a probe finger structure

Also Published As

Publication number Publication date
WO2007052622A1 (ja) 2007-05-10
JP2007127481A (ja) 2007-05-24

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