TW200717666A - Ion gun - Google Patents
Ion gunInfo
- Publication number
- TW200717666A TW200717666A TW094137867A TW94137867A TW200717666A TW 200717666 A TW200717666 A TW 200717666A TW 094137867 A TW094137867 A TW 094137867A TW 94137867 A TW94137867 A TW 94137867A TW 200717666 A TW200717666 A TW 200717666A
- Authority
- TW
- Taiwan
- Prior art keywords
- ion gun
- vacuum container
- cathode device
- anode
- aperture
- Prior art date
Links
Landscapes
- Cold Cathode And The Manufacture (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The present invention provides an ion gun. The ion gun includes a vacuum container, an anode and a cathode device. The vacuum container comprises an electron injection aperture, an ion exit aperture and a gas injection portal. The anode is inside the vacuum container. The cathode is arranged outside of the electron injection aperture. The cathode device is a field emission cold cathode device. The ion gun has the feature of the emitting stably the electron and the simple structure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94137867A TWI293788B (en) | 2005-10-28 | 2005-10-28 | Ion gun |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94137867A TWI293788B (en) | 2005-10-28 | 2005-10-28 | Ion gun |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200717666A true TW200717666A (en) | 2007-05-01 |
TWI293788B TWI293788B (en) | 2008-02-21 |
Family
ID=45067962
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94137867A TWI293788B (en) | 2005-10-28 | 2005-10-28 | Ion gun |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI293788B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI478199B (en) * | 2008-12-24 | 2015-03-21 | Showa Shinku Kk | Ion gun and ion beam extraction method |
-
2005
- 2005-10-28 TW TW94137867A patent/TWI293788B/en active
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI478199B (en) * | 2008-12-24 | 2015-03-21 | Showa Shinku Kk | Ion gun and ion beam extraction method |
Also Published As
Publication number | Publication date |
---|---|
TWI293788B (en) | 2008-02-21 |
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