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Application filed by Chung Shan Inst Of SciencefiledCriticalChung Shan Inst Of Science
Priority to TW94137094ApriorityCriticalpatent/TWI281975B/en
Publication of TW200716948ApublicationCriticalpatent/TW200716948A/en
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Publication of TWI281975BpublicationCriticalpatent/TWI281975B/en
A micro gyroscope including a substrate, an oscillating body, driving electrodes, and sensing electrodes is provided. The oscillating body formed over the substrate includes many oscillating rings arranged to form a symmetrical pattern. Wherein, the geometric centers of the neighboring oscillation rings are apart π/4 radian from each other by using the geometric centers of the symmetrical pattern as a referring point. The driving electrodes disposed on the substrate are used for driving the oscillating rings to deform. Wherein, the oscillating body has a driving deformation while the oscillating rings deformed. On the other hand, the oscillating rings deform as suffering the Coriolis force. At this moment, the oscillating body has a sensing deformation. Wherein, the directions of the driving deformation and the sensing deformation are apart π/4 radian from each other. Furthermore, the sensing electrodes disposed on the substrate are used for sensing the sensing deformation of the oscillating body.
Process for the preparation of (3r,3as,6ar)-hexahydrofuro [2,3-b] furan-3-yl (1s,2r)-3-[[(4-aminophenyl) sulfonyl] (isobutyl) amino]-1-benzyl-2-hydroxypropylcarbamate