TW200716477A - Electrically controlled tiltable microstructures - Google Patents

Electrically controlled tiltable microstructures

Info

Publication number
TW200716477A
TW200716477A TW095126544A TW95126544A TW200716477A TW 200716477 A TW200716477 A TW 200716477A TW 095126544 A TW095126544 A TW 095126544A TW 95126544 A TW95126544 A TW 95126544A TW 200716477 A TW200716477 A TW 200716477A
Authority
TW
Taiwan
Prior art keywords
platform
support structure
microstructures
tilt
electrically controlled
Prior art date
Application number
TW095126544A
Other languages
Chinese (zh)
Inventor
Jeffrey F Denatale
xiao-bin Li
Original Assignee
Rockwell Scient Licensing Llc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rockwell Scient Licensing Llc filed Critical Rockwell Scient Licensing Llc
Publication of TW200716477A publication Critical patent/TW200716477A/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)

Abstract

A support structure extends upwards from a substrate and supports a tillable platform, the upper surface of which can be a mirror, by means of spaced flexible couplings that enable the platform to tilt relative to the support structure. Respective electrodes associated with the substrate and platform control the platform tilt in response to applied signals. The platform electrodes are preferably spaced below and tilt with the platform, with the platform extending laterally from the support structure further than the platform electrodes. The platform is preferably bulk micromachined, and the support structure surface micromachined.
TW095126544A 2005-07-21 2006-07-20 Electrically controlled tiltable microstructures TW200716477A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US11/187,054 US20070018065A1 (en) 2005-07-21 2005-07-21 Electrically controlled tiltable microstructures

Publications (1)

Publication Number Publication Date
TW200716477A true TW200716477A (en) 2007-05-01

Family

ID=37533525

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095126544A TW200716477A (en) 2005-07-21 2006-07-20 Electrically controlled tiltable microstructures

Country Status (3)

Country Link
US (1) US20070018065A1 (en)
TW (1) TW200716477A (en)
WO (1) WO2007015747A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111552072A (en) * 2020-04-28 2020-08-18 安徽中科米微电子技术有限公司 Large-size MEMS vertical comb micro-mirror and preparation method thereof

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US7466476B2 (en) * 2006-08-02 2008-12-16 Texas Instruments Incorporated Sloped cantilever beam electrode for a MEMS device
FI121928B (en) 2008-10-08 2011-06-15 Teknillinen Korkeakoulu Electricity generation systems
NL2020564B1 (en) * 2018-03-09 2019-09-13 Scinvivo B V Forward looking OCT probe and method of manufacturing the same
US11036030B2 (en) * 2018-06-15 2021-06-15 Silicon Light Machines Corporation MEMS posting for increased thermal dissipation
US20210139314A1 (en) * 2019-11-07 2021-05-13 Innovative Interface Laboratory Corp. Linear actuator
DE102022209427A1 (en) * 2022-09-09 2024-03-14 Carl Zeiss Smt Gmbh Micromirror arrangement with spring-mounted individual mirror elements
CN115805375A (en) * 2022-11-22 2023-03-17 厦门大学 Pressure sensor with interlocking integrated microstructure and manufacturing method thereof

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
US1591824A (en) * 1924-06-13 1926-07-06 John H Herold Potato picker
US5212582A (en) * 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
DE19712201A1 (en) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Micro-mechanical mirror arrangement with grid of individually disengageable mirror components
JP2002148554A (en) * 2000-11-03 2002-05-22 Samsung Electronics Co Ltd Optical scanner and laser video projector applying the same and driving method for the same
KR100389865B1 (en) * 2001-03-02 2003-07-04 삼성전자주식회사 A micromirror device and a projector employing it
US6587613B2 (en) * 2001-07-24 2003-07-01 Innovative Technology Licensing, Llc Hybrid MEMS fabrication method and new optical MEMS device
DE60235263D1 (en) * 2002-01-29 2010-03-18 Panasonic Corp FORM VARIABLE MIRROR AND LIGHT CONTROLLER WITH MOLDING MIRROR
US6733144B2 (en) * 2002-09-27 2004-05-11 Intel Corporation Shock protectors for micro-mechanical systems
US6906848B2 (en) * 2003-02-24 2005-06-14 Exajoule, Llc Micromirror systems with concealed multi-piece hinge structures
US6914711B2 (en) * 2003-03-22 2005-07-05 Active Optical Networks, Inc. Spatial light modulator with hidden comb actuator
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same
US6894824B2 (en) * 2003-10-02 2005-05-17 Hewlett-Packard Development Company, L.P. Micro mirror device with spring and method for the same
US7046415B2 (en) * 2003-11-21 2006-05-16 Hewlett-Packard Development Company, L.P. Micro-mirrors with flexure springs

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111552072A (en) * 2020-04-28 2020-08-18 安徽中科米微电子技术有限公司 Large-size MEMS vertical comb micro-mirror and preparation method thereof

Also Published As

Publication number Publication date
US20070018065A1 (en) 2007-01-25
WO2007015747A3 (en) 2007-04-05
WO2007015747A2 (en) 2007-02-08

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