WO2007015747A3 - Electrically controlled tiltable microstructures - Google Patents

Electrically controlled tiltable microstructures Download PDF

Info

Publication number
WO2007015747A3
WO2007015747A3 PCT/US2006/027353 US2006027353W WO2007015747A3 WO 2007015747 A3 WO2007015747 A3 WO 2007015747A3 US 2006027353 W US2006027353 W US 2006027353W WO 2007015747 A3 WO2007015747 A3 WO 2007015747A3
Authority
WO
WIPO (PCT)
Prior art keywords
platform
support structure
microstructures
tilt
electrically controlled
Prior art date
Application number
PCT/US2006/027353
Other languages
French (fr)
Other versions
WO2007015747A2 (en
Inventor
Natale Jeffrey F De
Xiaobin Li
Original Assignee
Teledyne Licensing Llc
Natale Jeffrey F De
Xiaobin Li
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teledyne Licensing Llc, Natale Jeffrey F De, Xiaobin Li filed Critical Teledyne Licensing Llc
Publication of WO2007015747A2 publication Critical patent/WO2007015747A2/en
Publication of WO2007015747A3 publication Critical patent/WO2007015747A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0062—Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/042—Micromirrors, not used as optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/058—Rotation out of a plane parallel to the substrate

Abstract

A support structure extends upwards from a substrate and supports a tiltable platform, the upper surface of which can be a mirror, by means of spaced flexible couplings that enable the platform to tilt relative to the support structure . Respective electrodes associated with the substrate and the platform control the platform tilt in response to applied signals. The platform electrodes are spaced below and tilt with the platform, with the platform extending laterally from the support structure further than the platform electrodes. The platform is bulk micromachined, and the support structure surface micromachined.
PCT/US2006/027353 2005-07-21 2006-07-13 Electrically controlled tiltable microstructures WO2007015747A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/187,054 2005-07-21
US11/187,054 US20070018065A1 (en) 2005-07-21 2005-07-21 Electrically controlled tiltable microstructures

Publications (2)

Publication Number Publication Date
WO2007015747A2 WO2007015747A2 (en) 2007-02-08
WO2007015747A3 true WO2007015747A3 (en) 2007-04-05

Family

ID=37533525

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/027353 WO2007015747A2 (en) 2005-07-21 2006-07-13 Electrically controlled tiltable microstructures

Country Status (3)

Country Link
US (1) US20070018065A1 (en)
TW (1) TW200716477A (en)
WO (1) WO2007015747A2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7466476B2 (en) * 2006-08-02 2008-12-16 Texas Instruments Incorporated Sloped cantilever beam electrode for a MEMS device
FI121928B (en) 2008-10-08 2011-06-15 Teknillinen Korkeakoulu Electricity generation systems
NL2020564B1 (en) * 2018-03-09 2019-09-13 Scinvivo B V Forward looking OCT probe and method of manufacturing the same
US11036030B2 (en) * 2018-06-15 2021-06-15 Silicon Light Machines Corporation MEMS posting for increased thermal dissipation
US20210139314A1 (en) * 2019-11-07 2021-05-13 Innovative Interface Laboratory Corp. Linear actuator
CN111552072B (en) * 2020-04-28 2022-07-12 安徽中科米微电子技术有限公司 Large-size MEMS vertical comb micro-mirror and preparation method thereof
DE102022209427A1 (en) * 2022-09-09 2024-03-14 Carl Zeiss Smt Gmbh Micromirror arrangement with spring-mounted individual mirror elements

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1591824A (en) * 1924-06-13 1926-07-06 John H Herold Potato picker
DE19712201A1 (en) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Micro-mechanical mirror arrangement with grid of individually disengageable mirror components
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
EP1203976A2 (en) * 2000-11-03 2002-05-08 Samsung Electronics Co., Ltd. Optical scanner, laser image projector adopting the optical scanner, and method of driving the laser image projector
GB2372832A (en) * 2001-03-02 2002-09-04 Samsung Electronics Co Ltd Micromirror device and projector
US20040061962A1 (en) * 2002-09-27 2004-04-01 Haesung Kwon Shock protectors for micro-mechanical systems
US20040165249A1 (en) * 2003-02-24 2004-08-26 Aubuchon Christopher M. Micromirror systems with concealed multi-piece hinge structures
US20050073736A1 (en) * 2003-10-02 2005-04-07 James Guo Micro mirror device with spring and method for the same
US20050111069A1 (en) * 2003-11-21 2005-05-26 Adel Jilani Micro-mirrors with flexure springs
US20050152019A1 (en) * 2002-01-29 2005-07-14 Yoshihiro Mushika Shape-variable mirror and light control device having the shape-variable mirror

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5212582A (en) * 1992-03-04 1993-05-18 Texas Instruments Incorporated Electrostatically controlled beam steering device and method
US6587613B2 (en) * 2001-07-24 2003-07-01 Innovative Technology Licensing, Llc Hybrid MEMS fabrication method and new optical MEMS device
US6914711B2 (en) * 2003-03-22 2005-07-05 Active Optical Networks, Inc. Spatial light modulator with hidden comb actuator
US6903860B2 (en) * 2003-11-01 2005-06-07 Fusao Ishii Vacuum packaged micromirror arrays and methods of manufacturing the same

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1591824A (en) * 1924-06-13 1926-07-06 John H Herold Potato picker
US6028689A (en) * 1997-01-24 2000-02-22 The United States Of America As Represented By The Secretary Of The Air Force Multi-motion micromirror
DE19712201A1 (en) * 1997-03-24 1998-10-01 Bodenseewerk Geraetetech Micro-mechanical mirror arrangement with grid of individually disengageable mirror components
EP1203976A2 (en) * 2000-11-03 2002-05-08 Samsung Electronics Co., Ltd. Optical scanner, laser image projector adopting the optical scanner, and method of driving the laser image projector
GB2372832A (en) * 2001-03-02 2002-09-04 Samsung Electronics Co Ltd Micromirror device and projector
US20050152019A1 (en) * 2002-01-29 2005-07-14 Yoshihiro Mushika Shape-variable mirror and light control device having the shape-variable mirror
US20040061962A1 (en) * 2002-09-27 2004-04-01 Haesung Kwon Shock protectors for micro-mechanical systems
US20040165249A1 (en) * 2003-02-24 2004-08-26 Aubuchon Christopher M. Micromirror systems with concealed multi-piece hinge structures
US20050073736A1 (en) * 2003-10-02 2005-04-07 James Guo Micro mirror device with spring and method for the same
US20050111069A1 (en) * 2003-11-21 2005-05-26 Adel Jilani Micro-mirrors with flexure springs

Also Published As

Publication number Publication date
US20070018065A1 (en) 2007-01-25
WO2007015747A2 (en) 2007-02-08
TW200716477A (en) 2007-05-01

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