TW200716468A - Substrate transferring apparatus and substrate processing apparatus having the same - Google Patents

Substrate transferring apparatus and substrate processing apparatus having the same

Info

Publication number
TW200716468A
TW200716468A TW095138005A TW95138005A TW200716468A TW 200716468 A TW200716468 A TW 200716468A TW 095138005 A TW095138005 A TW 095138005A TW 95138005 A TW95138005 A TW 95138005A TW 200716468 A TW200716468 A TW 200716468A
Authority
TW
Taiwan
Prior art keywords
substrate
same
processing apparatus
plate
substrate processing
Prior art date
Application number
TW095138005A
Other languages
Chinese (zh)
Other versions
TWI332930B (en
Inventor
Man-Soo Choi
Jeong-Chol Kim
Ho-Youn Park
Original Assignee
Dms Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dms Co Ltd filed Critical Dms Co Ltd
Publication of TW200716468A publication Critical patent/TW200716468A/en
Application granted granted Critical
Publication of TWI332930B publication Critical patent/TWI332930B/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a substrate transferring apparatus, comprising a bottom plate glidingly provided on a frame rail; a top plane provided on the base plate and a top plate for carrying substrate on the top plane; a connecting member rotatably provided on the bottom plate for connecting the top plate; a rotation limiting apparatus for limiting the rotation radius of the top plate within a certain range.
TW095138005A 2005-10-24 2006-10-16 Transfer for use in transmitting works TWI332930B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020050100238A KR100674882B1 (en) 2005-10-24 2005-10-24 Transfer for use in transmitting works

Publications (2)

Publication Number Publication Date
TW200716468A true TW200716468A (en) 2007-05-01
TWI332930B TWI332930B (en) 2010-11-11

Family

ID=38014984

Family Applications (1)

Application Number Title Priority Date Filing Date
TW095138005A TWI332930B (en) 2005-10-24 2006-10-16 Transfer for use in transmitting works

Country Status (3)

Country Link
KR (1) KR100674882B1 (en)
CN (1) CN1955089B (en)
TW (1) TWI332930B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4450081B2 (en) * 2008-02-13 2010-04-14 セイコーエプソン株式会社 Parts testing equipment
KR101105416B1 (en) * 2009-07-23 2012-01-17 주식회사 디엠에스 Apparatus for processing substrate
CN102136407B (en) * 2009-12-31 2013-11-06 丽佳达普株式会社 Guide rack of substrate processing device
KR101331507B1 (en) * 2010-08-09 2013-11-20 엘지디스플레이 주식회사 Substrate cleaning/drying apparatus and substrate processing apparatus comprising the same, substrate cleaning/drying method, and method for manufacturing of display device the same
WO2013011107A1 (en) * 2011-07-21 2013-01-24 Thyssenkrupp System Engineering Gmbh Device and method for stopping and/or aligning transport goods on a conveying device, and conveying device
CN108444265B (en) * 2018-03-26 2020-06-16 东莞市银泰玻璃有限公司 Glass plate's transportation airing device
KR102640243B1 (en) 2023-07-31 2024-02-23 (주)템스코 Pick-up and transfer device for manufacturing shield-type OLED metal mask with synchronous opening and closing structure

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2517701Y (en) * 2001-09-20 2002-10-23 黄平尧 Steering device of circuit board
KR100500170B1 (en) * 2003-06-25 2005-07-07 주식회사 디엠에스 Apparatus for horizontal and up-down transporting of works

Also Published As

Publication number Publication date
KR100674882B1 (en) 2007-01-29
CN1955089B (en) 2011-09-28
TWI332930B (en) 2010-11-11
CN1955089A (en) 2007-05-02

Similar Documents

Publication Publication Date Title
TW200716468A (en) Substrate transferring apparatus and substrate processing apparatus having the same
MXPA06002502A (en) Adjustable trim for sloped ceiling recessed downlight.
EP1872394A4 (en) Substrate processing apparatus
EP1805792A4 (en) Substrate processing apparatus
IN2014CN03762A (en)
ZA200502210B (en) Substrates for O6-alkylguanine-DNA alkyltansferase.
MY140188A (en) Support element for securing in a furniture carcass
AU2003231869A1 (en) Dual arm substrate transport apparatus
EP1482545A4 (en) Substrate support mechanism for semiconductor processing system
TW200639162A (en) Pure duloxetine hydrochloride
EP1902460A4 (en) High speed substrate aligner apparatus
EP1976004A4 (en) Semiconductor element mounting substrate, semiconductor device using the same, and process for producing semiconductor element mounting substrate
CA2603516C (en) Impact pads and a process for manufacturing the same
EP1925021A4 (en) Cleaning member, substrate cleaning apparatus and substrate processing apparatus
TW200636891A (en) Manufacturing method for electronic device
EP1866958A4 (en) High speed substrate aligner apparatus
SG145753A1 (en) Contacts to microdevices
PL1885982T3 (en) Device for fixing substrates, in particular glass substrates
UA93513C2 (en) Device, method and apparatus for lifting railway rail
ITMI20042258A1 (en) TRANSFER PLATE FOR CONVEYORS
ATE413355T1 (en) TRANSFER WHEEL
GB2452444A (en) A camera mounting apparatus
HK1090790A1 (en) Amplifiers for multicarrier base station
AU2003255942A1 (en) Support plate for semiconductor components
TW200640767A (en) Apparatus for conveying substrate plates