TW200715915A - Atmospheric glow plasma surface processing method and device for flexible material - Google Patents

Atmospheric glow plasma surface processing method and device for flexible material

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Publication number
TW200715915A
TW200715915A TW094135784A TW94135784A TW200715915A TW 200715915 A TW200715915 A TW 200715915A TW 094135784 A TW094135784 A TW 094135784A TW 94135784 A TW94135784 A TW 94135784A TW 200715915 A TW200715915 A TW 200715915A
Authority
TW
Taiwan
Prior art keywords
plasma
processing method
flexible material
atmospheric glow
surface processing
Prior art date
Application number
TW094135784A
Other languages
Chinese (zh)
Other versions
TWI295547B (en
Inventor
Min-Wen Wu
Zheng-Chang Xie
Chi-Fong Ai
guo-chuan Zheng
Tien-Hsiang Hsueh
Original Assignee
Atomic Energy Council
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Council filed Critical Atomic Energy Council
Priority to TW094135784A priority Critical patent/TW200715915A/en
Publication of TW200715915A publication Critical patent/TW200715915A/en
Application granted granted Critical
Publication of TWI295547B publication Critical patent/TWI295547B/zh

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  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The present invention relates to atmospheric glow plasma surface processing method and device for a flexible material. The device includes a single plasma gas flowing channel, which consists of electrodes, a single plasma gas flow channel constituted by the dielectric shielding plates and its sealing insulation plate, a uniformly gas in and out device, sealing device of a moving object, and a scroll device to provide uniformly distributed plasma gas among electrodes. In this way, the expensive plasma gas can be saved and uniform atmospheric glow discharge plasma can be generated with minimum power. A high quality of uniform plasma can be achieved, and a continuous production is possible to provide high yield.
TW094135784A 2005-10-14 2005-10-14 Atmospheric glow plasma surface processing method and device for flexible material TW200715915A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094135784A TW200715915A (en) 2005-10-14 2005-10-14 Atmospheric glow plasma surface processing method and device for flexible material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094135784A TW200715915A (en) 2005-10-14 2005-10-14 Atmospheric glow plasma surface processing method and device for flexible material

Publications (2)

Publication Number Publication Date
TW200715915A true TW200715915A (en) 2007-04-16
TWI295547B TWI295547B (en) 2008-04-01

Family

ID=45068474

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094135784A TW200715915A (en) 2005-10-14 2005-10-14 Atmospheric glow plasma surface processing method and device for flexible material

Country Status (1)

Country Link
TW (1) TW200715915A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI486996B (en) * 2013-12-04 2015-06-01 Ind Tech Res Inst Plasma device and operation method of plasma device

Also Published As

Publication number Publication date
TWI295547B (en) 2008-04-01

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MM4A Annulment or lapse of patent due to non-payment of fees