TW200715915A - Atmospheric glow plasma surface processing method and device for flexible material - Google Patents
Atmospheric glow plasma surface processing method and device for flexible materialInfo
- Publication number
- TW200715915A TW200715915A TW094135784A TW94135784A TW200715915A TW 200715915 A TW200715915 A TW 200715915A TW 094135784 A TW094135784 A TW 094135784A TW 94135784 A TW94135784 A TW 94135784A TW 200715915 A TW200715915 A TW 200715915A
- Authority
- TW
- Taiwan
- Prior art keywords
- plasma
- processing method
- flexible material
- atmospheric glow
- surface processing
- Prior art date
Links
Landscapes
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
The present invention relates to atmospheric glow plasma surface processing method and device for a flexible material. The device includes a single plasma gas flowing channel, which consists of electrodes, a single plasma gas flow channel constituted by the dielectric shielding plates and its sealing insulation plate, a uniformly gas in and out device, sealing device of a moving object, and a scroll device to provide uniformly distributed plasma gas among electrodes. In this way, the expensive plasma gas can be saved and uniform atmospheric glow discharge plasma can be generated with minimum power. A high quality of uniform plasma can be achieved, and a continuous production is possible to provide high yield.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094135784A TW200715915A (en) | 2005-10-14 | 2005-10-14 | Atmospheric glow plasma surface processing method and device for flexible material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW094135784A TW200715915A (en) | 2005-10-14 | 2005-10-14 | Atmospheric glow plasma surface processing method and device for flexible material |
Publications (2)
Publication Number | Publication Date |
---|---|
TW200715915A true TW200715915A (en) | 2007-04-16 |
TWI295547B TWI295547B (en) | 2008-04-01 |
Family
ID=45068474
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW094135784A TW200715915A (en) | 2005-10-14 | 2005-10-14 | Atmospheric glow plasma surface processing method and device for flexible material |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200715915A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI486996B (en) * | 2013-12-04 | 2015-06-01 | Ind Tech Res Inst | Plasma device and operation method of plasma device |
-
2005
- 2005-10-14 TW TW094135784A patent/TW200715915A/en not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
TWI295547B (en) | 2008-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |