TW200714140A - Microwave plasma excitation device - Google Patents

Microwave plasma excitation device

Info

Publication number
TW200714140A
TW200714140A TW094132219A TW94132219A TW200714140A TW 200714140 A TW200714140 A TW 200714140A TW 094132219 A TW094132219 A TW 094132219A TW 94132219 A TW94132219 A TW 94132219A TW 200714140 A TW200714140 A TW 200714140A
Authority
TW
Taiwan
Prior art keywords
microwave
reaction chamber
plasma
excitation device
plasma reaction
Prior art date
Application number
TW094132219A
Other languages
Chinese (zh)
Other versions
TWI301732B (en
Inventor
Wen-Liang Huang
Ting-Wei Huang
Jau-Chyn Huang
ming-hua He
Qing-Han Li
qing-song Xiao
Original Assignee
Ind Tech Res Inst
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ind Tech Res Inst filed Critical Ind Tech Res Inst
Priority to TW094132219A priority Critical patent/TW200714140A/en
Publication of TW200714140A publication Critical patent/TW200714140A/en
Application granted granted Critical
Publication of TWI301732B publication Critical patent/TWI301732B/zh

Links

Abstract

The present invention relates to a microwave plasma excitation device, which with proper design, serves to transform a single microwave source into multiple microwave sources supplies to a plasma reaction chamber for generating plasma. The microwave plasma excitation device includes a microwave source, a power distribution structure, and a plasma reaction chamber. The power distribution structure is coupled to the microwave source and the plasma reaction chamber to evenly distribute the microwave power supplied by the microwave source to the plasma reaction chamber, thereby achieving uniform microwave energy distribution over a large area.
TW094132219A 2005-09-19 2005-09-19 Microwave plasma excitation device TW200714140A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW094132219A TW200714140A (en) 2005-09-19 2005-09-19 Microwave plasma excitation device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW094132219A TW200714140A (en) 2005-09-19 2005-09-19 Microwave plasma excitation device

Publications (2)

Publication Number Publication Date
TW200714140A true TW200714140A (en) 2007-04-01
TWI301732B TWI301732B (en) 2008-10-01

Family

ID=45070316

Family Applications (1)

Application Number Title Priority Date Filing Date
TW094132219A TW200714140A (en) 2005-09-19 2005-09-19 Microwave plasma excitation device

Country Status (1)

Country Link
TW (1) TW200714140A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI730195B (en) * 2016-11-15 2021-06-11 美商萊登股份有限公司 Microwave chemical processing
CN113088938A (en) * 2021-04-08 2021-07-09 四川大学 Plasma chemical vapor deposition device with multiple microwave sources

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI730195B (en) * 2016-11-15 2021-06-11 美商萊登股份有限公司 Microwave chemical processing
CN113088938A (en) * 2021-04-08 2021-07-09 四川大学 Plasma chemical vapor deposition device with multiple microwave sources
CN113088938B (en) * 2021-04-08 2022-03-11 四川大学 Plasma chemical vapor deposition device with multiple microwave sources

Also Published As

Publication number Publication date
TWI301732B (en) 2008-10-01

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