TW200713601A - A verticle dual bit non-volatile flash memory cell - Google Patents

A verticle dual bit non-volatile flash memory cell

Info

Publication number
TW200713601A
TW200713601A TW094132813A TW94132813A TW200713601A TW 200713601 A TW200713601 A TW 200713601A TW 094132813 A TW094132813 A TW 094132813A TW 94132813 A TW94132813 A TW 94132813A TW 200713601 A TW200713601 A TW 200713601A
Authority
TW
Taiwan
Prior art keywords
dielectric layer
drain region
flash memory
verticle
memory cell
Prior art date
Application number
TW094132813A
Other languages
Chinese (zh)
Other versions
TWI283060B (en
Inventor
Nan-Ray Wu
Original Assignee
Nan-Ray Wu
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nan-Ray Wu filed Critical Nan-Ray Wu
Priority to TW94132813A priority Critical patent/TWI283060B/en
Publication of TW200713601A publication Critical patent/TW200713601A/en
Application granted granted Critical
Publication of TWI283060B publication Critical patent/TWI283060B/en

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  • Non-Volatile Memory (AREA)
  • Semiconductor Memories (AREA)

Abstract

Disclosed is a three-dimensional flash memory device of NOR type, which comprises a substrate section, a drain region, a first dielectric layer and two memory unit structures, wherein the drain region is implanted to the substantially center of the substrate section and the first dielectric layer is formed on the drain region. Also, the two memory unit structures are used for memorizing datas and are mirror images of each other flipped over the drain region and the first dielectric layer. Besides, each of the memory unit structures comprises a source region, a floating gate, a second dielectric layer, a third dielectric layer and a control gate, wherein the position of source region is lower than which of the drain region, the floating gate is formed on the first dielectric layer and the third dielectric layer covers the source region. Moreover, The control gate is separated from the floating gate by a second dielectric layer and is separated from the source region by a third dielectric layer.
TW94132813A 2005-09-22 2005-09-22 A vertical dual bit non-volatile flash memory cell TWI283060B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94132813A TWI283060B (en) 2005-09-22 2005-09-22 A vertical dual bit non-volatile flash memory cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94132813A TWI283060B (en) 2005-09-22 2005-09-22 A vertical dual bit non-volatile flash memory cell

Publications (2)

Publication Number Publication Date
TW200713601A true TW200713601A (en) 2007-04-01
TWI283060B TWI283060B (en) 2007-06-21

Family

ID=38828986

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94132813A TWI283060B (en) 2005-09-22 2005-09-22 A vertical dual bit non-volatile flash memory cell

Country Status (1)

Country Link
TW (1) TWI283060B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI460827B (en) * 2010-03-31 2014-11-11 Taiwan Memory Company Method of manufacturing flash memory cell

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI460827B (en) * 2010-03-31 2014-11-11 Taiwan Memory Company Method of manufacturing flash memory cell

Also Published As

Publication number Publication date
TWI283060B (en) 2007-06-21

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