TW200708741A - Replaceable modular probe head - Google Patents
Replaceable modular probe headInfo
- Publication number
- TW200708741A TW200708741A TW094127877A TW94127877A TW200708741A TW 200708741 A TW200708741 A TW 200708741A TW 094127877 A TW094127877 A TW 094127877A TW 94127877 A TW94127877 A TW 94127877A TW 200708741 A TW200708741 A TW 200708741A
- Authority
- TW
- Taiwan
- Prior art keywords
- probe
- probe head
- replaceable
- replaceable modular
- modular probe
- Prior art date
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
A replaceable modular probe head consists of a plurality of probe-fixed bases in strip form and arranged side by side. Each probe-fixed base has a plurality of die-probing areas in the linear arrangement. In one embodiment, each probe-fixed base has connecting portions at its both ends to be assembled as a probe card. Accordingly, the probe-fixed bases is replaceable. It is not necessary to scrap the entire probe head when partial probes are damaged. Moreover, it can reduce the manufacture cost of the multi-site probe head.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94127877A TWI273243B (en) | 2005-08-16 | 2005-08-16 | Replaceable modular probe head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94127877A TWI273243B (en) | 2005-08-16 | 2005-08-16 | Replaceable modular probe head |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI273243B TWI273243B (en) | 2007-02-11 |
TW200708741A true TW200708741A (en) | 2007-03-01 |
Family
ID=38621442
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94127877A TWI273243B (en) | 2005-08-16 | 2005-08-16 | Replaceable modular probe head |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI273243B (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI614506B (en) * | 2014-12-24 | 2018-02-11 | 克禮陶股份有限公司 | Wafer probe station, front loading wafer probe station and method of loading a wafer into a wafer probe station |
CN113176433A (en) * | 2021-04-12 | 2021-07-27 | 武汉氢能与燃料电池产业技术研究院有限公司 | Fuel cell voltage inspection device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI743730B (en) * | 2020-04-06 | 2021-10-21 | 旺矽科技股份有限公司 | Probe card |
-
2005
- 2005-08-16 TW TW94127877A patent/TWI273243B/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI614506B (en) * | 2014-12-24 | 2018-02-11 | 克禮陶股份有限公司 | Wafer probe station, front loading wafer probe station and method of loading a wafer into a wafer probe station |
US11175309B2 (en) | 2014-12-24 | 2021-11-16 | Qualitau, Inc. | Semi-automatic prober |
CN113176433A (en) * | 2021-04-12 | 2021-07-27 | 武汉氢能与燃料电池产业技术研究院有限公司 | Fuel cell voltage inspection device |
Also Published As
Publication number | Publication date |
---|---|
TWI273243B (en) | 2007-02-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MM4A | Annulment or lapse of patent due to non-payment of fees |