TW200708741A - Replaceable modular probe head - Google Patents

Replaceable modular probe head

Info

Publication number
TW200708741A
TW200708741A TW094127877A TW94127877A TW200708741A TW 200708741 A TW200708741 A TW 200708741A TW 094127877 A TW094127877 A TW 094127877A TW 94127877 A TW94127877 A TW 94127877A TW 200708741 A TW200708741 A TW 200708741A
Authority
TW
Taiwan
Prior art keywords
probe
probe head
replaceable
replaceable modular
modular probe
Prior art date
Application number
TW094127877A
Other languages
Chinese (zh)
Other versions
TWI273243B (en
Inventor
Hsiang-Ming Huang
An-Hong Liu
Yi-Chang Lee
Yao-Jung Lee
Yeong-Her Wang
Original Assignee
Chipmos Technologies Inc
Chipmos Technologies Bermuda
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chipmos Technologies Inc, Chipmos Technologies Bermuda filed Critical Chipmos Technologies Inc
Priority to TW94127877A priority Critical patent/TWI273243B/en
Application granted granted Critical
Publication of TWI273243B publication Critical patent/TWI273243B/en
Publication of TW200708741A publication Critical patent/TW200708741A/en

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

A replaceable modular probe head consists of a plurality of probe-fixed bases in strip form and arranged side by side. Each probe-fixed base has a plurality of die-probing areas in the linear arrangement. In one embodiment, each probe-fixed base has connecting portions at its both ends to be assembled as a probe card. Accordingly, the probe-fixed bases is replaceable. It is not necessary to scrap the entire probe head when partial probes are damaged. Moreover, it can reduce the manufacture cost of the multi-site probe head.
TW94127877A 2005-08-16 2005-08-16 Replaceable modular probe head TWI273243B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94127877A TWI273243B (en) 2005-08-16 2005-08-16 Replaceable modular probe head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94127877A TWI273243B (en) 2005-08-16 2005-08-16 Replaceable modular probe head

Publications (2)

Publication Number Publication Date
TWI273243B TWI273243B (en) 2007-02-11
TW200708741A true TW200708741A (en) 2007-03-01

Family

ID=38621442

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94127877A TWI273243B (en) 2005-08-16 2005-08-16 Replaceable modular probe head

Country Status (1)

Country Link
TW (1) TWI273243B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI614506B (en) * 2014-12-24 2018-02-11 克禮陶股份有限公司 Wafer probe station, front loading wafer probe station and method of loading a wafer into a wafer probe station
CN113176433A (en) * 2021-04-12 2021-07-27 武汉氢能与燃料电池产业技术研究院有限公司 Fuel cell voltage inspection device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI743730B (en) * 2020-04-06 2021-10-21 旺矽科技股份有限公司 Probe card

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI614506B (en) * 2014-12-24 2018-02-11 克禮陶股份有限公司 Wafer probe station, front loading wafer probe station and method of loading a wafer into a wafer probe station
US11175309B2 (en) 2014-12-24 2021-11-16 Qualitau, Inc. Semi-automatic prober
CN113176433A (en) * 2021-04-12 2021-07-27 武汉氢能与燃料电池产业技术研究院有限公司 Fuel cell voltage inspection device

Also Published As

Publication number Publication date
TWI273243B (en) 2007-02-11

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Legal Events

Date Code Title Description
MM4A Annulment or lapse of patent due to non-payment of fees