TW200708713A - Error-measuring apparatus for nano-scale rotary axle - Google Patents
Error-measuring apparatus for nano-scale rotary axleInfo
- Publication number
- TW200708713A TW200708713A TW094128886A TW94128886A TW200708713A TW 200708713 A TW200708713 A TW 200708713A TW 094128886 A TW094128886 A TW 094128886A TW 94128886 A TW94128886 A TW 94128886A TW 200708713 A TW200708713 A TW 200708713A
- Authority
- TW
- Taiwan
- Prior art keywords
- error
- rotary axle
- nano
- splitter
- measuring apparatus
- Prior art date
Links
Abstract
The present invention relates to an error-measuring apparatus for nano-scale rotary axle, comprising: a laser source, a beam splitter, a corner cube prism, a reflector, a grating, a first splitter, a second splitter, a third splitter, a first route measuring unit, and a second route measuring unit, in which the laser source is capable of emitting a beam into the corner cube prism on the rotary axle so that when there is an error at the rotary axle, a variation of diffraction will be caused, which further affects the reflected light on the grating; thus, the variation of the signal position on the light detector can be used to calculate the lateral error thereof.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94128886A TWI260394B (en) | 2005-08-24 | 2005-08-24 | Error-measuring apparatus for nano-scale rotary axle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW94128886A TWI260394B (en) | 2005-08-24 | 2005-08-24 | Error-measuring apparatus for nano-scale rotary axle |
Publications (2)
Publication Number | Publication Date |
---|---|
TWI260394B TWI260394B (en) | 2006-08-21 |
TW200708713A true TW200708713A (en) | 2007-03-01 |
Family
ID=37874740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW94128886A TWI260394B (en) | 2005-08-24 | 2005-08-24 | Error-measuring apparatus for nano-scale rotary axle |
Country Status (1)
Country | Link |
---|---|
TW (1) | TWI260394B (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101907443A (en) * | 2010-06-23 | 2010-12-08 | 清华大学 | Displacement measuring device for movable mutual inductor of energy balance |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI398622B (en) * | 2009-06-06 | 2013-06-11 | Univ Nat Formosa | The Device and Method of Detecting Angle Error by Laser Interferometer |
CN101922932B (en) * | 2010-07-30 | 2012-07-04 | 华中科技大学 | Compensating device of pyramid prism coordinate measuring error |
TWI633274B (en) * | 2017-04-17 | 2018-08-21 | 國立虎尾科技大學 | An optical detecting apparatus for detecting a degree of freedom error of a shaft and a method thereof (1) |
TWI632344B (en) * | 2017-04-17 | 2018-08-11 | 國立虎尾科技大學 | An optical detecting apparatus for detecting a degree of freedom error of a shaft and a method thereof (2) |
-
2005
- 2005-08-24 TW TW94128886A patent/TWI260394B/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101907443A (en) * | 2010-06-23 | 2010-12-08 | 清华大学 | Displacement measuring device for movable mutual inductor of energy balance |
Also Published As
Publication number | Publication date |
---|---|
TWI260394B (en) | 2006-08-21 |
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Legal Events
Date | Code | Title | Description |
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MM4A | Annulment or lapse of patent due to non-payment of fees |