TW200708713A - Error-measuring apparatus for nano-scale rotary axle - Google Patents

Error-measuring apparatus for nano-scale rotary axle

Info

Publication number
TW200708713A
TW200708713A TW094128886A TW94128886A TW200708713A TW 200708713 A TW200708713 A TW 200708713A TW 094128886 A TW094128886 A TW 094128886A TW 94128886 A TW94128886 A TW 94128886A TW 200708713 A TW200708713 A TW 200708713A
Authority
TW
Taiwan
Prior art keywords
error
rotary axle
nano
splitter
measuring apparatus
Prior art date
Application number
TW094128886A
Other languages
Chinese (zh)
Other versions
TWI260394B (en
Inventor
Wen-Yuh Jywe
Chien-Hong Liu
Xing-Zhu Wu
Hsueh-Liang Huang
Original Assignee
Univ Nat Formosa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Nat Formosa filed Critical Univ Nat Formosa
Priority to TW94128886A priority Critical patent/TWI260394B/en
Application granted granted Critical
Publication of TWI260394B publication Critical patent/TWI260394B/en
Publication of TW200708713A publication Critical patent/TW200708713A/en

Links

Abstract

The present invention relates to an error-measuring apparatus for nano-scale rotary axle, comprising: a laser source, a beam splitter, a corner cube prism, a reflector, a grating, a first splitter, a second splitter, a third splitter, a first route measuring unit, and a second route measuring unit, in which the laser source is capable of emitting a beam into the corner cube prism on the rotary axle so that when there is an error at the rotary axle, a variation of diffraction will be caused, which further affects the reflected light on the grating; thus, the variation of the signal position on the light detector can be used to calculate the lateral error thereof.
TW94128886A 2005-08-24 2005-08-24 Error-measuring apparatus for nano-scale rotary axle TWI260394B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW94128886A TWI260394B (en) 2005-08-24 2005-08-24 Error-measuring apparatus for nano-scale rotary axle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW94128886A TWI260394B (en) 2005-08-24 2005-08-24 Error-measuring apparatus for nano-scale rotary axle

Publications (2)

Publication Number Publication Date
TWI260394B TWI260394B (en) 2006-08-21
TW200708713A true TW200708713A (en) 2007-03-01

Family

ID=37874740

Family Applications (1)

Application Number Title Priority Date Filing Date
TW94128886A TWI260394B (en) 2005-08-24 2005-08-24 Error-measuring apparatus for nano-scale rotary axle

Country Status (1)

Country Link
TW (1) TWI260394B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101907443A (en) * 2010-06-23 2010-12-08 清华大学 Displacement measuring device for movable mutual inductor of energy balance

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI398622B (en) * 2009-06-06 2013-06-11 Univ Nat Formosa The Device and Method of Detecting Angle Error by Laser Interferometer
CN101922932B (en) * 2010-07-30 2012-07-04 华中科技大学 Compensating device of pyramid prism coordinate measuring error
TWI633274B (en) * 2017-04-17 2018-08-21 國立虎尾科技大學 An optical detecting apparatus for detecting a degree of freedom error of a shaft and a method thereof (1)
TWI632344B (en) * 2017-04-17 2018-08-11 國立虎尾科技大學 An optical detecting apparatus for detecting a degree of freedom error of a shaft and a method thereof (2)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101907443A (en) * 2010-06-23 2010-12-08 清华大学 Displacement measuring device for movable mutual inductor of energy balance

Also Published As

Publication number Publication date
TWI260394B (en) 2006-08-21

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees